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Proyecto Torre de Emergencia
Proyecto Torre de Emergencia
Abstract—Piezoelectric Micromachined Ultrasonic Almost all recent studies on PMUT are based on concept a
Transducer (PMUT) is an acoustic transducer used in application piezoelectric sandwiched with two electrodes. The
of medical diagnostic, medical imaging and underwater imaging. conventional PMUT is low in sensitivity. The investigation on
The design concept of conventional PMUT is based on sandwich thin film [2], flexural membrane, and density of membrane are
piezoelectric between two electrodes. This is based on d31 mode purposely to increase the sensitivity. The d33 mode based
polarization PMUT and the sensitivity is depend on thickness of PMUT is well known in energy harvesting[3]. The d33 mode
piezoelectric and flexural deformation of membrane. The d33 mode
concept will increased energy in piezoelectric material. Thus it
polarization design concept is normally applied in energy
harvester. This concept will increased the energy. This paper will
will increased sensitivity. Interdigital Electrodes (IDE) is very
present D33 mode based Piezoelectric Micromachined Ultrasonic famous design used in energy harvesting. Some are used in
Transducers to increase the sensitivity. Polyimide (PI) is used as transmitting and receiving ultrasonic wave[4]. The square IDE
membrane and substrate and dielectric help to increase the will used stresses in the diaphragm to improve sensitivity and
sensitivity. Pulse-Echo method is an experimental method to device capacitance [5]. Thin film is studied on IDE based
characterize the receiving sensitivity. The simulation on PMUT PMUT, where IDE was fabricated on top and bottom side of
design to see the peak displacement of PMUT and it will be Lead Zirconate Titanate (PZT)[2]. The deformation of this
represented as resonance frequency occurred in collecting technique is low because they have contradiction polarization
receiving signal. The PMUT device has more receiving sensitivity on top and bottom side, and gave low deformation. Radial Field
compared to conventional hydrophone and it is shows in result. Diaphragm piezoelectric actuator with Inter-Circulating
The receiving sensitivity achieved by PMUT is -64.44 dB re Electrodes (ICE-RFD) is comprised of a thin circular
1V/uPa. The fractional bandwidth for PMUT is 28%. The piezoelectric ceramic disk sandwiched between two polyimide
operational bandwidth is needed to be improve for future design. (PI) acting as dielectric films with copper-etched spiral
electrodes. The novel electrode pattern induces an electric field
Keywords—D33 mode Polarization, Polyimide Membrane,
Piezoelectric Micromachined Ultrasonic Transducer, Underwater
into the piezo-ceramic that extends out radially from the center
Imaging. of the wafer[6]. The diaphragm bearing the spiral electrode
operate in d33 mode, which allows the in-plane deformation of
I. INTRODUCTION the diaphragm to be converted to the out-of-plane deformation
and generates an acoustic wave in the same direction[7].
Piezoelectric Micromachined Ultrasonic Transducer
(PMUT) is used in many applications such as medical In next section, theory of d33 mode polarization will
diagnostic, medical acoustic imaging and underwater imaging. discussed, in section 3, the design of d33 mode based PMUT
will presented, in section 4, the fabrication of PMUT will
PMUT is based on piezoelectric ultrasonic transducer. The presented, in section 5, the experimental setup will presented,
performance of conventional piezoelectric ultrasonic transducer result and discussion will explained in section 6 and last section,
(PUT) is based on a matching layer, thickness of a piezoelectric conclusion will presented.
material as sensing element, and backing layer. The
methodology of PUT is the sensing element, piezoelectric II. THEORY OF D33 MODE POLARIZATION
material sandwiched in between of electrodes. The matching
layer and backing layer are expended the operation bandwidth. D33 mode PMUT polarization is achieved by polarization a
But, PUT is still limited in size and bandwidth. Then piezoelectric material with a DC-voltage applied to positive
piezoelectric micromachined ultrasonic transducer (PMUT) is electrode and generated the electric field. If no external pressure
fabricated in micrometer scale using micromachined on piezoelectric material, the polarization is scattered in
fabrication technique.[1]. piezoelectric material. When an external ultrasonic wave
pressure is perpendicularly applied on membrane, stresses are
2017 IEEE 15th Student Conference on Research and Development (SCOReD) 159
PDMS
PZT
Polyimide
(a)
Fig 1. Schematic of d33 mode polarization, (a) before membrane hit by
an acoustic wave pressure, (b) after membrane hit by an acoustic wave
pressure.
Consequently, the induced voltage is given by Firstly, the Polydimethylsiloxane (PDMS) is prepared using
Sylgard 184 Silicone Elastomer Kit. Then placed PDMS in
2017 IEEE 15th Student Conference on Research and Development (SCOReD) 160
vacuum chamber at pressure, 200 mbar to remove the bubbles V. EXPERIMENTAL SETUP
in PDMS. Then put a small spoon of PDMS on top of flexible Digital
circuit that consist of electrodes. Then the flexible circuit was Oscilloscope
placed on spin coater handle. Run the spin coater at 3000rpm to Digital
Oscilloscope Laptop
obtain the thickness of PDMS at 10µm. The PDMS on top of Pulse
flexible circuit is adhered to sensing element, PZT5H. Before Performed
Network
adhered between them, the PDMS on top of electrodes and output
electrical pad is removed to prevent no conductivity between Hz
electrodes and PZT5H. It will removed using sand paper. Then input Pulse Performed
Network
the PZT5H with flexible circuit were place in oven about 8 Function
Function
generator
hours at 40ºC. The flexible circuit is shows in Fig 3. Generator
projector
pmut
Test Tank
Test Tank
(b)
(a)
VII. CONCLUSSION