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Titanium Oxides
TiO2 layers have the highest index in the visible range.
Layers produced with Ti3O5 are very consistent.
Characteristics of Titanium Oxides Evaporation techniques Advantages of Ti3O5
TiO2 layers have the highest refractive index in The Titanium oxides TiO, Ti2O3, Ti3O5 can be evap- The films produced with Ti3O5 are very constant
the visible region. The layers are very hard and orated from Tungsten crucibles, but in a reactive and independant of the evaporated material
stable in combination with other oxides. process there will always some Tungsten oxide quantity.
being formed and evaporated. Therefore electron
Titanium and oxygen form a number of phases,
beam evaporation is preferred. In any case
as TiO, Ti2O3, Ti3O5 and TiO2. Out of those only
reactive evaporation in an oxygen atmosphere
Ti3O5 evaporates congruently, the others evap-
of about 2x10-4 mbar is necessary to form
orate incongruently. The refractive index of films
stochiometric films of TiO2. The films will be
deposited in sequence from the same melt thus
predominately of the anatase crystal form unless
is not constant except in the case of Ti3O5.
very high substrate temperature or high energies
(ion assistance) are used.
2.60
Technical Data 25º C
2.50
250º C
Refractive Index N
Material Purity [%] Color Density [g/cm ]3
Melting point [°C] 2.40
2.30
TiO 99.5 Gold 4.9 1750 2.20
TiO2 99.9 Black 4.2 1775 2.10
The properties of the films depend on the evaporation conditions, as substrate temperature, Wavelength nm
oxygen flow resp. pressure rate etc.
Refractive index as a function of wavelength
Evaporation conditions:
25°C: in CCS 250 Oxygen flow = 14 sccm p ~ 1.7x10-4 mbar
250°C: in BAK 640 Oxygen pressure = 3x10-4 mbar
Zirconium Oxides
Zirconium oxides are high index coating material.
Zirconium monoxide produces layers of high and consistent quality.
Characteristics of Zirconium Oxides Advantages of Zirconium Oxides
2.30
Zirconium oxide layers are widely used as high ZrO has a better melting behaviour than ZrO2. Due 2.25 2 x 10-4 mbar
3 x 10-4 mbar
Refractive Index N
index materials in AR coatings, especially on to its lower melting temperature the material 2.20
plastic lenses. In combination with SiO2 as low forms a more uniform melt in the source leading 2.15
2.10
index material, and with a thin layer of a higher to a higher repeatability and a constant thickness
2.05
index material (i.e. Dralo or TiO2) for adjustment uniformity across the substrate holder. 2.00
of the reflection characteristic, hard and durable
The increased process stability means higher and 1.95
coatings are obtained. ZrO2 films tend to show 1.90
more consistent quality for the final product.
an inhomogeneous refractive index, especially at 1.85
250 300 350 400 450 500 550 600 650 700 750 800
higher substrate temperatures. This has to be Wavelength nm
taken into account when designing AR coatings.
Dralo
Dralo is a high index coating material.
Dralo provides a high AR bandwidth.
Dralo is excellent for low temperature evaporations.
Dralo reduces film stress.
Dralo has a high environmental stability.
Advantages of Dralo Technical Data
Dralo is an excellent material for the high Density: 4.5 g/cm3
index layer in multilayer AR coatings, where
Melting point: 1700°C
the low index layer is SiO2 or LIMA, and there-
fore a refractive index of about 2.2 is required It is recommended to use an electron beam
for optimal bandwidth. Dralo is especially well gun with a molybdenum liner. Dralo forms a
suited for low temperature substrates (plastic homogeneous melt. Layers with constant 2.60
lenses). In addition to its excellent environ- properties can be produced by replenishing 25º C
2.50
mental stability, Dralo, a special design ma- the liner with granulate. Best results are 250º C
Refractive Index N
2.40
terial, based on titanium oxide, has a lower achieved at a rate of 0.3 to 0.5 nm/s and an
film stress than pure titanium oxides. oxygen pressure of about 3 to 4x10-4 mbar. 2.30
Lima
Lima is a low index material.
Lima layers have lower stress than SiO2.
Lima layers have a high environmental stability.
Advantages of Lima Technical Data
1.60
Lima is a specially designed mixture based on Density of Lima: 1.5 g/cm3 Lim
a
SiO
2
Re
fr
activ
e Inde
x N
BD481889-T Silicondioxide SiO2 99.9% Dielectric Mirror Granulate 1.5 – 3.5 mm 500 g 45.0
Thickness = 2850 nm
40.0
Other dimensions/quantities are available on request. 35.0
30.0
25.0
20.0
15.0
10.0
5.0
0.0
400
450
500
550
600
650
700
750
800
nm
Hydrophobic
Hydrophobic topcoats make lenses water repellent.
Hydrophobic topcoats ease lens cleaning.
Characteristics of hydrophobic materials Technical Data
Product* A B C Density: 1.04 g/cm3
BV868956/8/2004/1000
Hydrophobic
Hydrophobic topcoats make lenses water repellent.
Hydrophobic topcoats ease lens cleaning.
Characteristics of hydrophobic materials Technical Data
Special materials
Product* A B C Density: 1.04 g/cm3
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