Freescale Semiconductor, Inc.

MOTOROLA Order number: MPX5100/D

SEMICONDUCTOR TECHNICAL DATA Rev 9, 3/2004

MPX5100/MPXV5100
Integrated Silicon Pressure Sensor SERIES
On-Chip Signal Conditioned, INTEGRATED PRESSURE SENSOR
Temperature Compensated Differential 0 to 100 kPa (0 to 14.5 psi)
and Calibrated Absolute 15 to 115 kPa (2.18 to 16.68 psi)
The MPX5100/MPXV5100 series piezoresistive transducer is a state-of- 0.2 to 4.7 Volts Output
the-art monolithic silicon pressure sensor designed for a wide range of appli-
cations, but particularly those employing a microcontroller or microprocessor
SMALL OUTLINE UNIBODY PACKAGE
with A/D inputs. This patented, single element transducer combines advanced
PACKAGE
micromachining techniques, thin-film metallization, and bipolar processing to
provide an accurate, high level analog output signal that is proportional to the
Freescale Semiconductor, Inc...

applied pressure.

Features
MPX5100D
• 2.5% Maximum Error over 0° to 85°C CASE 867
• Ideally suited for Microprocessor or Microcontroller-Based
Systems MPXV5100GC6U
CASE 482A
• Patented Silicon Shear Stress Strain Gauge
• Available in Absolute, Differential and Gauge Configurations
• Ideal for Automotive and Non-Automotive Applications

VS

MPX5100DP
CASE 867C
THIN FILM GAIN STAGE #2
TEMPERATURE AND MPXV5100GC7U
SENSING CASE 482C
COMPENSATION GROUND Vout
ELEMENT
AND REFERENCE
GAIN STAGE #1 SHIFT CIRCUITRY

PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS

MPX5100GSX
FOR SMALL OUTLINE PACKAGE
GND CASE 867F
PINS 4, 5, AND 6 ARE NO CONNECTS FOR
UNIBODY PACKAGE PIN NUMBER PIN NUMBER
Figure 1. Fully Integrated Pressure Sensor Schematic 1 N/C 5 N/C 1 Vout 4 N/C
2 VS 6 N/C 2 GND 5 N/C
3 GND 7 N/C 3 VS 6 N/C
4 Vout 8 N/C NOTE: Pins 4, 5, and 6
are internal device
NOTE: Pins 1, 5, 6, 7, and
connections. Do not
8 are internal device
connect to external
connections. Do not
circuitry or ground. Pin1 is
connect to external
noted by the notch in the
circuitry or ground. Pin1 is
lead.
noted by the notch in the
lead.

© Motorola, Inc. 2004

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