GreenSolar Equipment Manufacturing Ltd.
About GreenSolar
Turn-key production lines for
tandem thin film silicon solar modules
Product Catalog
GreenSolar is a high tech photovoltaic R&D company. Its target is to become one of the leaders
on the thin film PV market. GreenSolar has the background of the well expert technical team from
EnergoSolar who already successfully installed over 100 MWp a-Si production line worldwide.
GreenSolar manufactures, installs and services turn-key production lines of thin film solar modules.
It has a manufacturing capacity of 100 MWp production lines/year on its 10.000 m2 production
facility in Budapest. GreenSolar develops and sells its own technologies making it an ideal partner
for companies entering or expanding into the fast growing thin film PV market.
Solar energy is becom-
ing a primary solution of
choice for energy policy
decision-makers in many
countries around the
world. Large scale so-
lar energy production is
about costs, return on in-
vestment and reliability,
factors that low cost thin
film technologies can best
serve. The worldwide PV
module production ca-
pacity is expected to grow
dramatically in the next
decade and low cost thin
film production capacities
will lead that growth.
GreenSolar is involved in tan-
dem a-Si thin film technolo-
gies making it a go-to tech-
nology source and equipment
manufacturer. GreenSolar
pursues research of a-Si/ μc-
Si technology. GreenSolar
operates a state of the art
pilot line having a floor space
of 1200 square meters. Ten
years of expertise in thin film,
the scale of R&D activity, the
range of technologies and
the offer of a cost effective
and flexible turn-key produc-
tion line makes GreenSolar
your real thin film specialist.
 Turn-key tandem thin film solar
module manufacturing systems

7 MWp/Year Tandem Thin Film Solar Module

Manufacturing System with Manual Loading
47000

Sand blaster Conductive layer deposition line

Final IV tester

ISO 7 class cleanroom

Assembly stations

Cool down chamber

Ultrasonic bonding
Module laminator Active layer deposition chambers
26000
31000

EVA lay-up station

Panel light IV tester

Preheat chambers

ISO 7 class cleanroom

Glass cutter
laser scriber for TCO Gas abatement system
Dust filter
1st glass washer
Box cleaning station
2nd glass washer

Edge grinder
Glass driller

Box loading station

FORKLIFT WAY

52000
 Turn-key tandem thin film solar
module manufacturing systems

Why thin film solar modules are competitive

Within the past decade, the market of the solar photovoltaic modules grows at a very fast
pace. After some little slow down in 2005-2006 due to the silicon shortage, the rate of growth
of the pv market recovered very fast, together with the commissioning of the new high purity
silicon production facilities. The global financial crisis of 2008-2009 had its effect over the pv
industry and market. The good of the bad is for consumers, hence the solar module prices have
been halved within a very short time. GreenSolar gives a very viable solution to the quest of
the competitiveness by making possible the production of solar modules at the lowest cost of
ownership on the market, and also the lowest cost of investment.

Cost of ownership example

Description Cost [USD] Cost [EUR] Cost [%]
Direct Materials 0.471 $/W 0.344 €/W 68.16%
Depr. Production Line (7 years) 0.125 $/W 0.091 €/W 18.09%
Other Direct Costs 0.054 $/W 0.039 €/W 7.81%
Personnel 0.020 $/W 0.015 €/W 2.89%
Maintenance 0.010 $/W 0.007 €/W 1.45%
Depr. Utilities (7 years) 0.008 $/W 0.006 €/W 1.16%
Depr. Building (25 years) 0.003 $/W 0.002 €/W 0.43%
Total Cost of Ownership 0.691 $/W 0.504 €/W 100%
Exchange rate = 0.73 €/$ o st of o w n e
tc
es

rs h
Cost of Ownership
 L ow

1.16%

ip
e nt 
1.45% 0.43%
2.89%
L ow

tm
st e s
c ost
of i n v
e

Direct Materials
7.81%
Depr. Production Line (7 years)

Other Direct Costs

18.09% Personnel

Maintenance
68.16% Depr. Utilities (7 years)

Depr. Building (25 years)

The cost of ownership for the thin film solar modules produced with GreenSolar’s equipment
and technologies, can be as low as 0.70 $/W or 0.50 €/W in certain locations.

Turn-key production lines
For a smooth start in thin film module production GreenSolar will provide you a real turn-key
solution including the equipment, technology, know-how and a package of services including
assistance in business planning, factory design, installation and setup, personal training, support
for material resourcing, performance and equipment warranty, after warranty services and
technology upgrades.
With the delivery time of less
than one year GreenSolar
offers you a quick appearance
and a dynamic expansion in
the market. With GreenSolar
you have the opportunity to
start with a production plant
with low level investment and
go for certifications and for
big scale step by step in line
with your market penetration.
With a production line from
GreenSolar modules are
made in a simple process of
“glass in – module out”, which
significantly reduces materials, labor and energy inputs. The straight forward economic and well
designed technology and machinery keep quality high at a very competitive cost level. The special
easy-to-manage factory concept allows you low expense for building, skilled staff and maintenance.
Your likely production cost with GreenSolar’s production lines and technology will be one of the
lowest on the market accompanied with good quality allowing you profitable production under all
circumstances. On the top of that GreenSolar offers technology upgrades ensuring you long term
competitiveness on the market.
Turn-key tandem thin film solar
module manufacturing systems
Environment
We all know that solar energy is a good solution to reduce the carbon emissions that contribute to
the greenhouse effect, and to the global climate change. Thus solar modules are “green”, but have
you ever thought about how “green” their manufacturing is?
It is a very odd thing to reduce the carbon emissions by gaining energy by photovoltaic devices,
while the manufacturing of some solar modules contributes to the emission of gases, which are
much more harmful greenhouse gases than carbon dioxide.
Sulphur Hexafluoride (SF6) is the most potent
greenhouse gas that it has evaluated, with a
global warming potential of 22,800 times that
of CO2 when compared over a 100 year period.
Nitrogen Trifluoride (NF3) is a greenhouse gas,
with a global warming potential 17,200 times
greater than that of CO2 when compared over a
100 year period.
Fluorine gas that is claimed to be
“environmentally friendly” alternative to SF6
and NF3 is nevertheless a potentially hazardous
and very agressive substance, which in contact
with water forms hydrofluoric acid that is
so agressive, that it corrodes even glass and
stainless steel.
Would you like to handle such substances in
your factory?
Can anybody guarantee that no leaks will ever
occur?
GreenSolar’s technologies do not require any kind of fluorine gases, neither SF6, NF3, nor F2, thus
using GreenSolar manufacturing equipment means saving the atmosphere.
Many technologies use such agressive gaseous chemicals because of the need to remove from the
electrodes of the CVD equipment the unwillingly deposited (doped or undoped) silicon. How is
possible that such unwanted deposition doesn’t occur in GreenSolar’s CVD reactors?
The solution is given by design, hence in GreenSolar’s reactors the space where plasma is generated
is surrounded by the glass of the solar plates. Therefore 99.95% of the silicon deposition occurs
where it is intended, exactly on the surface of the future solar modules under process.
The little deposition, which is in excess, all occurs on removable parts, that are taken out of the
reactors and cleaned mechanically, without the use of any chemicals, whenever it is needed.
If you are environmentally-conscious, before choosing one or another of the available production
lines and technologies, ask for the fluorine and fluoride consumptions.
For a sustainable life, GreenSolar provides you only completely “green”, environmentally friendly
FLUORINE-LESS THIN FILM TECHNOLOGIES.
 Turn-key tandem thin film solar
module manufacturing systems

Technology Process
The manufacturing process applied by GreenSolar is based on what is known as amorphous
silicon technology. A key feature of this technology is the use of Plasma Enhanced Chemical
Vapor Deposition (PECVD) to form the amorphous silicon semiconductor film layers. Although the
energy conversion efficiency of amorphous modules is lower than that of single-crystal units (an
average of 6-7% compared to an average of 12-16%), they are cheaper to produce and convert
more electrical energy than crystalline modules with the same nominal power used under high
temperature environment or in diffuse light conditions.
The amorphous silicon thin film solar
cell technology offered by GreenSolar
Hungary Equipment Manufacturing Ltd.
involves the deposition of two extremely
thin solar cell structures on top of each
other onto a TCO-coated glass sheet with
a total layer thickness of less than one
micron.
This structure is called tandem or double
junction solar cell.
Regarding the operation of this solar cell
structure, the first cell converts mainly the
shorter wavelength part of the spectrum
of incident light while the second cell
converts the longer wavelength part.
Comparing this structure to the so-called
single junction structure, where only one solar cell structure is deposited on the TCO-coated
glass sheet, it is possible to achieve the same absorption while the individual cells are thinner.
The thinner the amorphous silicon layers are the
less the degradation and the higher the stabilized
efficiency of the solar cells.
As amorphous silicon thin film solar cells have more
favorable temperature dependence compared to
their mono- or polycrystalline counterparts and
they work better in diffuse or low intensity light
conditions their yearly generated energy yield –
under real life conditions – relative to their nominal
power is higher, as well.
Another advantage is that since thin film solar cells
contain much less active material than the mono-
and polycrystalline solar cells and their technology
involves only low temperature processes, their
production is more cost effective.
 Turn-key tandem thin film solar
module manufacturing systems

15 MWp/Year Tandem Thin Film Solar Module

Semi-Automated Manufacturing System

FORKLIFT WAY

ISO 7 class cleanroom

Panel light IV tester

Dust filter

FORKLIFT WAY
FORKLIFT WAY

EDGE
GRINDING
46000

GLASS
WASHER Box storage

ISO 7 class cleanroom

FORKLIFT WAY
Box cleaning station
Dispensing
machine

Class A IV tester
Box loading station
step 2
step 1

FORKLIFT WAY

67400
 Turn-key tandem thin film solar
module manufacturing systems

Recommended Equipment Quantities Utilities needed

Description 7 MWp/year 15 MWp/year 30 MWp/year Description 7 MWp/year 15 MWp/year 30 MWp/year
GLASS PREPARATION [pcs or sets] [pcs or sets] [pcs or sets]
Glass Cutter 1 1 1 Factory floor space [m2] 1500 3000 6000
Glass Driller 1 1 1 (without warehouse, offices etc.)
Edge Grinder 1 1 1 Installed electric power [kW] peak 440 970 1800
Glass Washer (After Grinding) 1 1 2
SPUTTER DEPOSITION OF THE TCO LAYER (OPTIONAL) average 290 600 1200
Heating Tunnel (OPTIONAL) - - (1) Compressed air [liters/min] peak 1350 1850 2000
Vertical TCO Sputtering System (OPTIONAL) - - (1) average 900 1230 1400
Cooling Tunnel (OPTIONAL) - - (1)
Wet etching station (OPTIONAL) - - (1) Cooling water* [m3/hour] peak 11 22 38
PATTERNING OF THE TIN OXIDE LAYER average 5.8 11.5 22
Laser Scribing System for Tin Oxide 1 1 2 * It is strongly recommended to have a closed loop cooling water circuit.
Glass Washer (Before a-Si Deposition) 1 1 1
DEPOSITION OF THE TANDEM a-Si MATERIAL City water City water is used by the laminators for cooling down
Robotic Loading-Unloading Station - - 2 and also for service operations.
Box Carrier for a-Si 8 16 32 It is up to the user to consider a closed loop system
Box Carrier Carts 8 16 - also here.
Box Carrier Transport System - - 1
Preheat Oven 2 4 8
PECVD Deposition System for a-Si Layer 2 4 8 Process water The main process water is used in the glass prepara-
Cool-Down Chamber 2 4 8 tion and the washing systems.
EXHAUST MANAGEMENT SYSTEM The washing system tipically needs de-ionized (DI)
Gas Abatement System 1 2 2
water for the rinsing, and normal water for the pre-
Filter System 1 2 2
PATTERNING OF THE a-Si LAYER washing.
Laser Scribing System for a-Si Layer 1 1 2 Glass preparation and washing machines work par-
SPUTTER DEPOSITION OF THE BACK CONDUCTIVE LAYER tially with water recycling system.
6 Chambers Sputter System for Al & ZnO 1 2 4
PATTERNING OF THE BACK CONDUCTIVE LAYER
Laser Scribing System for Al & ZnO 1 1 2 Air conditioning The temperature in the building shall stay within
ENCAPSULATION 23 ± 2°C.
Laser Edge Deletion System 1 1 1 The humidity level shall be in the 50-70% range
Ultrasonic Bonding System 1 2 2 (non condensing).
EVA Applicator 1 2 1
EVA Laminator 1 3 6
Electrical Assembly Station 1 4 2 Clean room conditions It is recommended that a-Si patterning to be done in
Mechanical Assembly Station 1 4 2 Clean Room Class 7 (as per ISO 146441-1 standard)
Junction Box Filling Station - - 1
MODULE TESTING
Quick Panel Light I-V Tester 1 1 2
Technology gases The supplier of the process-gases shall buid the Gas
„A” Class Panel Light I-V Tester 1 1 2 Supply System and shall supply the gases during the
Insulation Tester 1 1 1 operation.
Climate Chamber - 1 1 The process requires the following gases:
Measurement Device Set 1 1 1 Ar, N2, H2, He, SiH4, CH4, 3% B(CH3)3 in SiH4, and 3%
Light Soaker - 1 1
In-line Resistivity Meter (OPTIONAL) - - (2)
PH3 in Ar.
In-line Haze Tester (OPTIONAL) - - (1) Nitrogen is needed both as nitrogen gas and liquid
In-line Visual Purity Meter (OPTIONAL) - - (1) nitrogen.
OTHER INSTRUMENTS The quality of the gases shall be guaranteed at the
Laser Marking System - 1 1 consumption point by the supplier of the gas system.
Maintenance Instruments 1 1 1
The gas system supplier suppliess the gas detector
Transport Carts 21 12 12
Roller Table 4 - - system as well.
Conveyor System - 1 1
 Turn-key tandem thin film solar
module manufacturing systems

Manpower needed Examples for the Performance of the Produced PV Solar Modules
Description 7 MWp/year 15 MWp/year 30 MWp/year
Description Customer 1 Customer 2
Operating personnel that must work in every shift
Electrical Specifications Stabilized Rated Parameters at STC*
Glass preparation (+OPTIONAL TCO) 5 4 4 (+3)
Rated maximum power Pmax 45 W 52 W
Lasers 3 4 4 Rated voltage at Pmax Umpp 47.4 V 71.2 V
PE-CVD 4 6 8 Rated current at Pmax Impp 0.95 A 0.74 A
PVD (+ sandblaster for 7MWp only) 2+4 1 2 Open circuit voltage Voc 65 V 93.5 V
Encapsulation, assembly and test 8 14 14 Short circuit current Isc 1.3 A 0.88 A
Quality control 2 3 4 Temperature coefficients Uoc – 0.28 %/°C – 0.30 % /°C
Maintenance and repair 2 3 4 Isc + 0.09%/°C + 0.08 %/°C
Pmax – 0.19%/°C – 0.15 % / °C
Total personnel per shift 30 35 40 (43)
Maximum system voltage V 1000 V 600 V
Technical management and support personnel (daytime only) Mechanical Specifications
CTO and deputy CTO, Workshop Manager 2 2 2 Dimensions [mm] 1 245 × 635 × 7 1 245 × 635 × 7
Speciality engineers 6 6 6 Total surface [m2] 0.79 0.79
Quality manager 1 1 1 Active surface [m2] 0.71 0.71
Chief of maintenance - 1 1 Lateral structuring laser pattern laser pattern
Warehouse personnel 2 4 6 Overall weight [kg] 13.5 13.5
* STC (Standard Test Conditions): 1,000 watts/m2 irradiance,
Total daytime personnel 11 14 16
AM 1.5 solar spectral distribution, 25 °C cell temperature.
Tipical annual capacity of the production lines
Description 7 MWp/year 15 MWp/year 30 MWp/year
Module Dimensions [mm] 1245×635×7
Module Area [m2] 0.79
Cell Aperture Area [m2] 0.71
Initial Power [W] 55
Degradation rate [%] 18
Stabilized [Watt/Module] 45
Total hours per year [hours] 8 760
Uptime [%] 80.5
Real Production [hours] 7 056
Nominal Production [MW] 7 15 30
Tact time [pcs/hour] 24 48 96
Produced Modules [pcs] 169 334 338 668 677 376
Yield [%] 94.0 98.0 98.5
Good Modules effective [pcs] 159 183 331 914 667 215
Production effective [MW] 7.16 14.93 30.02
Beyond efficiency
Conclusions of a real-life module performance testing in Bulgaria. Standard thin film solar
modules model SP44 have been installed on a test PV field and have been monitored for five
months, together with polycrystalline modules of one of the well-known brands. The modules
were installed under an 30

optimal fix tilt angle. The 50

SP44 modules
polySi modules 50
total installed capacity
was about 1.7 kWp for
Weekly Specific Yields [kWh/kWp]

25
40 40

Weekly irradiance [kWh/m ]

both types of modules

Average temperature [ C]
connected to the same type 30 30
of inverters under similar 20

dc conditions.
20 20
During the entire test, an

O
2
15
average daily irradiance 10 10
of 5.8 kWh/m2 with peak
days of 7.9 kWh/m2 have 0 0 10
been recorded. Ambient 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34
Weeks of the year 2010
temperature ranged from
+1°C to +40°C with an average of +22°C. The output PAC values of the integrated daily energy
production obtained from the inverters.
From the collected data specific yields, as well as module performance ratios were calculated
and compared. Specific yields and performance ratios were compared on weekly bases, as well
as daily data were analyzed as the functions of irradiance and average ambient temperature. On
the average about 6% higher specific yields were obtained for the SP44 dual-junction thin-film
modules than that of the polycrystalline ones, as represented in the above diagram.
The second diagram represents the daily
performance ratios of the SP44 modules,
compared to that of the reference
polycrystalline installation.
For the amorphous modules an increasing
tendency is seen with the increasing
daily average temperature, while in the
case of the polycrystalline modules this
tendency is quite the opposite.
From the irradiance and temperature
analysis it is seen that the thin-film
silicon modules SP44 may perform about
10-15% better under high irradiance
(> 5 kWh/m2*day) and high average
temperature (> 23°C) conditions than
the polycrystalline ones.
Generally thin film cells tend to perform better under harsh working conditions, such as long
hours of extremely strong sunshine and its generated heat, as well as extreme and diffuse light
conditions (e.g. sunrise, sunset and cloudy weather).
 Turn-key tandem thin film solar
module manufacturing systems

30 MWp/Year Tandem Thin Film Solar Module

Fully Automated Manufacturing System
 www.greensolar.hu

Intellectual Property
Since 2010 February GreenSolar Equipment Manufacturing Ltd is the legal owner of the IP, know-how, logo
and brand name of EnergoSolar Hungary Ltd. GreenSolar hired most of the expert technical and adminis-
trative staff of the former EnergoSolar, and continues to work on the projects started once by EnergoSolar
Hungary Ltd in China.

Realizations
GreenSolar is a young company, but it has a well assembled team of managers, designers, engineers, techni- Contact Details
cians etc. This team has already produced and installed a total manufacturing capacity of 120 MWp/year GreenSolar Equipment Manufacturing Ltd.
in several locations*: Gyömrői út 128., H-1103 Budapest, Hungary
2005-2007 Bangkok Solar Co., Ltd., Thailand European Community
2006-2008 Tianjin Jinneng Solar Cell Co., Ltd., China Tel.: +36-1-445-0777, Fax: +36-1-434-0101,
2007-2008 HelioGrid Hungary Ltd., Hungary e-mail: sales@greensolar.hu, http://greensolar.hu
2008-2009 SolarPro AD, Bulgaria
2009-2010 Parity Solar Technology Zhenjiang Co., Ltd., China VAT No.: HU11706906
*as of the end of year 2010.
R&D Projects Disclaimer
Recently GreenSolar has built up its new pilot line for R&D activities, as the development of increased The contents of the present brochure are for general information and promotion purpose
efficiency thin film silicon solar modules, manufacturing of double size solar modules, creation of micro- and by any means do not represent any commercial offer.
morph solar modules and further reduction of manufacturing costs. In order to get a quotation, please contact the sales personnel of GreenSolar by e-mail to
GreenSolar’s policy is to deliver to its customers products of the best performance and competitiveness. sales@greensolar.hu or by fax to the number +36-1-434-0101.

GScatalog20110209_v3