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V TH Control in CNTs Transistors
V TH Control in CNTs Transistors
Cite This: ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX www.acsami.org
charge density and the onset of conduction in a transistor, providing a rational route
to control the electrical characteristics of carbon nanotube transistors. Smooth and
continuous balancing of the properties between unipolar p-type and n-type transport
is achieved using a molar fraction series of poly(styrene-co-2-vinylpyridine) statistical copolymers combined with an electron-
donating molecule. We further demonstrate the easy fabrication of a p−n diode which shows a modest rectification of 8:1.
KEYWORDS: carbon nanotubes, field-effect transistors, polymer dielectrics, encapsulation, electric transport, doping, n-type transport,
printed electronics
■ INTRODUCTION
Progress in semiconducting single-walled carbon nanotubes
temperature, vacuum processing, whereas most polymer
coatings reported to date are either hydrophilic23 or yield p-
(sc-SWCNTs) purification and enrichment1,2 enables the low- type devices.24
cost and large-area fabrication of soft, flexible,3,4 stretchable, The threshold voltage, VT is a key metric of field-effect
and transparent5 electronic deviceslogics,6,7 displays,8 transistor (FET) characteristics reflecting the flat band
sensors,9−12 and even more complex systems such as electronic potential and built-in electric fields due to fixed charges in
skin13 and three-dimensional integrated circuit architec- the proximity of the channel active material. As a quantitative
ture14from solution processes and printing techniques. metric of a FET turn-on voltage, VT is closely related to the
Functional components necessitate the control of parameters operation mode (depletion or enhancement) and operation
beyond current carrying capabilities and on/off ratio: the power. In this work, we surveyed more than 20 polymers with
performances of such devices are tributary to the carrier moderate to high degree of hydrophobicity for carbon
mobility, the operation power, and their device-to-device nanotube network FET (CNN-FET) encapsulation,24,25
variations. Moreover, control over the carrier type allows the affording control over the threshold voltage and other
creation of complementary integrated circuits. SWCNT characteristic parameters by rational selection of passivation
devices are, however, sensitive to external interferences and materials and their combinations. We report a simple linear
exhibit unipolar p-type conduction under normal conditions, relationship between VT and the charge accumulated at the
with O2 adsorption inducing a Schottky barrier that suppresses immediate carbon nanotube interface. With a better handle on
electron injection at metal−SWCNT contacts15,16 and with the the electrostatic environment and associated charge trap
O2/H2O redox couple that hinders electron transport in the density, reduced day-to-day and device-to-device variations
channel.17 can be expected. Poly(2-vinylpyridine) (P2VP) was found to
A widely used solution to mitigate the effects of ambient produce the most negative threshold voltage for hole transport,
gases consists of encapsulating the device with a dielectric whereas polystyrene (PS) had among the most positive. A
coating.18 The coating layer can be subject to uncontrolled combination of the two polymers in a blend or as copolymers
electrostatics as a result of incomplete stoichiometry and traps, allows a continuous tuning of transistor parameters. Moreover,
whereas high κ dielectrics also display interfacial dipoles the addition of an electron-donating molecule, 4-(2,3-dihydro-
because of the presence of polar chemical groups,19 with 1,3-dimethyl-1H-benzimidazol-2-yl)-N,N-dimethylbenzen-
consequences for the carrier type, mobility, and threshold amine (N-DMBI), to P2VP converts an ambipolar transistor to
voltage. The intentional tuning of the coating layer bulk and an air-stable unipolar n-type one. This simple materials
interfacial charge density can be exploited to control the device
properties, even yielding unipolar n-type conduction.20−23 Received: June 5, 2019
Nevertheless, there remains a technological gap as inorganic Accepted: September 6, 2019
coatings are not adapted to printing techniques due to high
combination is a concrete solution to the complementary p- molar fractions of the styrene (S) and 2-vinyl pyridine (2VP)
and n-type transistors required to implement logic gates in monomers (11.5, 25, 40, 70 2VP mol %). The end points of
printable electronics, in analogy to CMOS devices. This work the series were the homopolymers (0%: pure PS and 100%:
is readily transferrable to printing in ambient as a low pure P2VP).
temperature process for low-cost and flexible electronics. A series of CNN-FETs were prepared on SiO 2/Si
Figure 4. (a) Transfer characteristics of a CNN-FET (1000 nm oxide) doped with N-DMBI and encapsulated with a layer of P2VP spiked with N-
DMBI showing the stability over time. (b) Extracted on-state current of a CNN-FET device doped with N-DMBI, but left uncapped, as compared
to a device doped with N-DMBI but protected by a layer of P2VP containing N-DMBI, as a function of time.
D DOI: 10.1021/acsami.9b09857
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article
■
hydrophobic P2VP. Devices showed excellent stability for a
period longer than a month. In an effort to demonstrate
CONCLUSIONS application to complementary electronics, we built a p−n
The electronic transport properties of CNN-FETs can be junction that exhibits rectification. The usefulness of polymer
controlled by the choice of polymer encapsulation layer. Of dielectrics really comes into force when they combine other
note is the continuous tuning of turn-on voltage, from unipolar desirable properties such as hydrophobicity and when used in
p-type to ambipolar transistors. Through a survey of over 20 conjunction with dopant molecules.
homopolymers and copolymers, a simple relationship, the so- We have thus highlighted the importance of polymer
called “master” curve, was obtained and relates the threshold dielectrics in the materials stack entering in the fabrication of
voltage VT to the interfacial charge density present in close SWCNT-based devices. It follows that control of the
E DOI: 10.1021/acsami.9b09857
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article
SWCNT/dielectric interface is crucial to improve the stability, remove the residual solvent. Finally, the electrode pads were opened
operation mode, and electrical characteristics of the devices up using a blade manipulated under a stereomicroscope.
and to enable functional circuits based on complimentary Generation of the “Master” Relationship. A modified
measurement technique was implemented that tracks the threshold
logics.
■
voltage of a device in order to obtain the transfer characteristics with
constant gate-induced charge density limits of −650 to +650 μC/m2
METHODS for all encapsulated devices, regardless of the relative dielectric
Materials. Unless noted otherwise, all materials were used as permittivity of the capping polymer. First, the effective relative
purchased. The following polymers were acquired: poly(methyl dielectric permittivity of the assembly of the underlying silicon dioxide
methacrylate) (medium MM, Aldrich, cat. no 18 224-9), PS (Mn = (εrsub ≈ 3.9) and the capping dielectric (variable εrcap, Table S3,
Supporting Information) were evaluated according to the relation, εreff
45k, Aldrich, cat. no 33 165-1), poly(vinylidene difluroride) (Aldrich,
= (εrsub + εrcap)/2. The capacitance per surface area in a parallel plate
cat. no 18 270-2), nylon 6-6 (Aldrich, cat. no 18 112-9), cellulose
approximation was thus estimated as Ceff = ε0 εreff/d, where d is the
acetate (39.8 wt % acetyl content, avg. Mn = 30k (GPC), Aldrich),
gate dielectric thickness. The gate-induced charge density, Qind is the
poly(2-vinyl pyridine) (MW 40k, cat. no 21 382-10), Teflon AF
product of the effective surface capacitance and the overdrive voltage
(Dupont, grade 400S2-100-1), poly(vinylidene chloride-co-methyl
(VG − VT): Qind = Ceff (VG − VT). Then, transfer characteristics were
acrylate) (MW ≈ 90k, Aldrich, cat. no 430 404), poly(vinyl acetate)
obtained using gate potentials that are equivalent to Qind bounded by
(MW ≈ 100k, Aldrich, cat. no 189 480), and cellulose nitrate
the limits −650 and +650 μC/m2. The range of gate potentials thus
(collodion solution, Aldrich, cat. no 09 986). The poly(styrene-co-2-
becomes dependent on the threshold voltage, VT of the device. First,
vinyl pyridine) copolymers were purchased from Polymer Source Inc.
three full transfer characteristics were acquired with VT arbitrarily set
with various molar fractions of styrene to 2-vinyl styrene monomers
to 0 V, before evaluating VT on the fly (extrapolation to IDS = 0 from a
and had the following characteristics: 11.5 mol % 2VP, cat. no P7612- linear regression of the p branch points above 70% of the maximum
S2VPran, Mn = 34.5k, MW = 46.5k; 25 mol % 2VP, cat. no P7610- current) and adjusting the VG limits accordingly. For every
S2VPran, Mn = 28k, MW = 38.5k; 25 mol % 2VP, cat. no P7611- subsequent sweep, VT was reevaluated and the VG limits were
S2VPran, Mn = 36.5k, MW = 47.5k; 77 mol % 2VP, cat. no P7616- readjusted to correspond to −650 and +650 μC/m2. Because the
S2VPran, Mn = 28.5k, MW = 44.8k). Blends were obtained by mixing measurement imposes a gate bias stress to the dielectric, the VT value
two homopolymers (P2VP/PS) at the given weight fractions in a will monotonously drift and tend to an equilibrium value. Therefore, a
common solvent. total number of 16 sweeps was acquired for each device, and the last
CNN-FET Fabrication. The CNN-FETs were fabricated using the quasi equilibrium value of VT was kept for the “master” relationship.
following procedure: the substrates, complete with pre-existing Knowing the VT value for the encapsulated device, the measure-
source-drain electrodes, were purchased from the Fraunhofer Institute ment of the charge density at VT was then obtained. The setup was
(Dresden). They are made of degenerately doped silicon wafers with made of a capacitive brass probe with a 2.38 mm (3/32 in) circular
90 or 230 nm of thermal grown silicon dioxide with interdigitated cross-section held 500 μm above the sample, which was laid on a large
gold electrodes deposited on top of the dielectric. The channel width brass plate connected to the back gate electrode. The sample was first
was 2 mm with available channel lengths of 2.5, 5, 10, and 20 μm. discharged: a grounded probe tip was connected to the drain
Alternatively, substrates with 1000 nm thermal oxide were used. electrode with the gate electrode also grounded and the sample was
Those substrates had electrodes deposited in-house by electron beam discharged for 60 s, at which point the grounded tip was
evaporation (Ti/Au), forming a rectangular channel 40 μm long and disconnected. The probe tip was then connected to the sample’s
1000 μm wide. Substrates were cleaned first by ultrasonication in drain electrode while biased at a potential equal to VT for 60 s, at
acetone for 5 min, followed by 5 min of ultrasound in isopropyl which point the probe tip was disconnected while still being biased.
alcohol (IPA). Substrates were blown dry using a stream of N2, then The sample charge density was measured by moving the sample
immediately placed in an ultraviolet/ozone cleaner for 30 min. underneath the capacitive probe, while measuring the induced voltage
Substrates were used within 20 min for the SWCNT deposition step. using an electrometer, with the grounded brass plate used as a
A solution of enriched semiconducting poly(9,9-di-n-dodecylfluor- reference. The charge density was evaluated as the difference between
ene)-wrapped carbon nanotubes37 was prepared at an approximate the voltage at the grounded brass plate reference and the voltage
concentration of 2 μg/mL in toluene from dilution of a 480 μg/mL above the encapsulated sample. This charging state corresponds to a
mother solution. The diluted solution was subjected to ultrasound for state where the gate-induced charge density, Qind is minimal because
90 min prior to SWCNT deposition. For SWCNT deposition, the VG ≈ VT, and where the measured charge density corresponds mainly
soaking method was used. Specifically, substrates were placed in a to the charges at the CNTs-polymer interface due to the chemical
Petri dish, and then covered with the 2 μg/mL SWCNT solution. The nature of the polymer, that maintains a built-in potential influencing
Petri dish was covered for 16 min to avoid evaporation of the solvent. VT. Repeating this cycle of measuring the VT using the on-the-fly
After this time, the substrates were soaked for 5 min in toluene, then 5 tracking technique followed by a measurement of the charge density
min in IPA, and finally dried by a jet of N2. The samples were baked at VT for every encapsulating homopolymers, a “master” relationship
on a hot plate at 150 °C for 5 min. To complete the CNN-FET can be generated reflecting the built-in potential at the interface and
fabrication, the edges of the substrate were gently wiped using a clean thus yielding a predictive power to select a polymer for a desired
room grade swab dipped in methanol. The substrate back side was electrical property, for instance the threshold voltage.
scratched using a diamond scribe and the gate electrical contact was N-Type Doping. A solution of 4-(2,3-dihydro-1,3-dimethyl-1H-
established using copper tape (temporary) or silver lacquer benzimidazol-2-yl)-N,N-dimethylbenzenamine (N-DMBI, Sigma-Al-
(permanent). drich) was prepared in ethanol at a concentration of 10 mg/mL.
Polymer Encapsulation. Polymer encapsulation was performed CNN-TFT samples were prepared the day before using the above
using the following procedure: The CNN-FET samples were annealed procedure and kept at 200 °C under rough vacuum until doping.
at 200 °C overnight under rough vacuum and were kept on a hot plate Doping was performed by spin coating of the N-DMBI solution at
at 150 °C prior to encapsulation. Polymer solutions were prepared in 1000 rpm for 1 min. A further encapsulation step was performed on
advance in an appropriate solvent and concentration. Conditions are one of the samples. A solution of 10 mg/mL N-DMBI in P2VP 15%
listed for each polymer in Table S1 of the Supporting Information. w/v was prepared in chloroform. Capping was carried out using spin
The encapsulation step was carried out using spin coating, where the coating of this solution (stage 1: 9 s at 800 rpm, stage 2: 30 s at 3000
CNN-FET sample was briefly cooled down, set on a vacuum chuck, rpm). The n-type dopant was activated by baking at 80 °C overnight
and then covered with the polymer solution. Spin coating proceeded under rough vacuum.
in two stages, at speeds and times listed in Table S2 of the Supporting Diode Fabrication. A solution of 0.2% w/w N-DMBI was
Information. A bake, sometimes in two steps, was done afterwards to prepared in 1-hexanol. P2VP was added to a 20% w/w concentration
F DOI: 10.1021/acsami.9b09857
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article
and stirred for 3 h. The p−n junction was made by covering (7) Lau, P. H.; Takei, K.; Wang, C.; Ju, Y.; Kim, J.; Yu, Z.;
approximately half of the channel with a stripe from this solution, Takahashi, T.; Cho, G.; Javey, A. Fully Printed, High Performance
which was controllably drawn by the capillary action of a Carbon Nanotube Thin-Film Transistors on Flexible Substrates. Nano
poly(ethylene terephthalate) blade attached to a three-axis translation Lett. 2013, 13, 3864−3869.
stage for fine control and in contact with the substrate. (8) Cao, X.; Lau, C.; Liu, Y.; Wu, F.; Gui, H.; Liu, Q.; Ma, Y.; Wan,
■
*
ASSOCIATED CONTENT
S Supporting Information
H.; Amer, M. R.; Zhou, C. Fully Screen-Printed, Large-Area, and
Flexible Active-Matrix Electrochromic Displays Using Carbon Nano-
tube Thin-Film Transistors. ACS Nano 2016, 10, 9816−9822.
(9) Chen, K.; Gao, W.; Emaminejad, S.; Kiriya, D.; Ota, H.; Nyein,
The Supporting Information is available free of charge on the H. Y. Y.; Takei, K.; Javey, A. Printed Carbon Nanotube Electronics
ACS Publications website at DOI: 10.1021/acsami.9b09857. and Sensor Systems. Adv. Mater. 2016, 28, 4397−4414.
Spin coating parameters, charge density measurement (10) Yeom, C.; Javey, A.; Cho, G.; Chen, K.; Yeom, C.; Yu, Z. Large-
theory, method for the dynamic determination of Area Compliant Tactile Sensors Using Printed Carbon Nanotube
threshold voltage, results on P2VP/PS blends, capacitor Active-Matrix Backplanes. Adv. Mater. 2015, 27, 1561−1566.
models, results of the thickness series, results on charge (11) Zhou, C.; Zhao, J.; Ye, J.; Tange, M.; Zhang, X.; Xu, W.; Zhang,
density as a function of basicity, and supplemental K.; Okazaki, T.; Cui, Z. Printed Thin-Film Transistors and NO2 Gas
Sensors Based on Sorted Semiconducting Carbon Nanotubes by
results for the P(S-co-2VP) copolymer series and N- Isoindigo-Based Copolymer. Carbon 2016, 108, 372−380.
DMBI n-doping experiments (PDF) (12) Schroeder, V.; Savagatrup, S.; He, M.; Lin, S.; Swager, T. M.
■ AUTHOR INFORMATION
Corresponding Author
Carbon Nanotube Chemical Sensors. Chem. Rev. 2019, 119, 599−
663.
(13) Chortos, A.; Liu, J.; Bao, Z. Pursuing Prosthetic Electronic Skin.
Nat. Mater. 2016, 15, 937−950.
*E-mail: Francois.Lapointe@nrc-cnrc.gc.ca. (14) Shulaker, M. M.; Hills, G.; Park, R. S.; Howe, R. T.; Saraswat,
ORCID K.; Wong, H.-S. P.; Mitra, S. Three-Dimensional Integration of
François Lapointe: 0000-0002-5645-8745 Nanotechnologies for Computing and Data Storage on a Single Chip.
Jacques Lefebvre: 0000-0001-5118-0580 Nature 2017, 547, 74−78.
(15) Heinze, S.; Tersoff, J.; Martel, R.; Derycke, V.; Appenzeller, J.;
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The manuscript was written through contributions of all Rev. Lett. 2002, 89, 106801.
authors. All authors have given approval to the final version of (16) Cui, X.; Freitag, M.; Martel, R.; Brus, L.; Avouris, P.
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Funding Contacts. Nano Lett. 2003, 3, 783−787.
This work was funded by the National Research Council (17) Aguirre, C. M.; Levesque, P. L.; Paillet, M.; Lapointe, F.; St-
Antoine, B. C.; Desjardins, P.; Martel, R. The Role of the Oxygen/
Canada through the Printable Electronics program. Water Redox Couple in Suppressing Electron Conduction in Field-
Notes Effect Transistors. Adv. Mater. 2009, 21, 3087−3091.
The authors declare no competing financial interest. (18) Schießl, S. P.; Fröhlich, N.; Held, M.; Gannott, F.; Schweiger,
■ ACKNOWLEDGMENTS
We are grateful to Patrick R.L. Malenfant for insightful
M.; Forster, M.; Scherf, U.; Zaumseil, J. Polymer-Sorted Semi-
conducting Carbon Nanotube Networks for High-Performance
Ambipolar Field-Effect Transistors. ACS Appl. Mater. Interfaces
2015, 7, 682−689.
discussions, and to Dan Dalacu, Joe McKee and Alexandria (19) Lee, S.-H.; Xu, Y.; Khim, D.; Park, W.-T.; Kim, D.-Y.; Noh, Y.-
Snider for technical support. A.S. acknowledges support by Y. Effect of Polymer Gate Dielectrics on Charge Transport in Carbon
prof. Gyoujin Cho (Sunchon National University).
■
Nanotube Network Transistors: Low-k Insulator for Favorable Active
Interface. ACS Appl. Mater. Interfaces 2016, 8, 32421−32431.
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G DOI: 10.1021/acsami.9b09857
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article
H DOI: 10.1021/acsami.9b09857
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX