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Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics
PAPER
E-mail: y.ionikh@spbu.ru
Abstract
The influence of the pulses of visible-spectrum light on the breakdown in a discharge tube was
studied experimentally. The tube of 80 cm length and 1.5 cm inner diameter contained neon at
a pressure of 0.6 Torr. High-voltage rectangular or ramp pulses were applied to the anode. The
light pulses of 0.1–100 µs duration were produced by the light-emitting diode or laser diode
at a wavelength of 460 and 407 nm, respectively. A small area of the tube wall near the anode
was illuminated at different moments after or before the voltage pulse onset.
It has been found that the light pulse exerts the strongest influence on the breakdown. In the
case of rectangular pulse, it drastically decreases the statistical delay time of the breakdown.
As a result, all the breakdowns, which did not happen before the light pulse, occur during
several microseconds after its onset. The light pulse influences the breakdown delay time even
if it terminates before the voltage pulse onset. This can be explained by the finite lifetime
of the secondary electrons produced by the light. In the case of the ramp voltage pulse, an
essential decrease in the breakdown voltage scatter is observed under illumination. The effect
is especially pronounced if the light pulse is applied at the moment when the anode voltage
is equal to or somewhat lower than the minimum breakdown voltage. For later moments,
the breakdown voltages are strictly bounded by both sides. The average breakdown voltage
decreases noticeably.
As for the mechanism responsible for the observed effect, electron photodesorption from
the tube wall is suggested. This process presumably occurs in dielectric barrier discharge at
atmospheric pressure where it can influence the breakdown voltage and provide synchronous
breakdown of micro discharges, thus causing the formation of multiple filaments.
Keywords: breakdown in a long tube, breakdown delay time, breakdown voltage, wall charge,
electron photodesorption
between its boundary and the next part of the wall. This, in turn, delay time was explained by the deactivation of the Ne 1s5 or
causes the appearance of a new ionization region, so that the the N2A3 Σ+ u metastable states by the radiation, which led to
plasma boundary and ionization front move towards the low- a decrease in the rates of the ionization processes involving
voltage electrode. The speed of this movement found in [5] these states. The authors of [24] explained the decrease in the
through optical and electrical measurements, was ~105 cm s−1. delay time by the photoemission from the cathode surface,
After the ionization front reaches the low-voltage electrode, presumably covered with an iron oxide microfilm, which has
plasma fills the whole tube, and the current circuit is closed. a longer wavelength threshold than the metal itself.
Plasma electrons that settled on the wall create an electric The effect of optical radiation on the breakdown was
field that, together with the external field, retracts electric field observed in [25] when studying a corona discharge in a point-
lines inwards of the plasma volume [2]. The resultant field is to-plane gap with a polished plane cathode. A considerable
directed along the tube axis and forms a glow discharge with increase in the generation rate of initial electrons under the
appropriate spatial structure. action of visible light was found. As a mechanism of this
The mechanism proposed in that work was approved in effect, the authors consider photo-stimulated exo-electron
later studies [6–20]. Of those works, [6, 8, 9, 11–20] pre- emission (PSEE) [26], which arises at a wavelength longer
sent the result of an experimental study, and in [6, 7, 10, 11, than the threshold of the photoelectric effect. PSEE is a par
13–15, 19] the modeling was performed. An interest to the ticular case of exo-electron emission, viz. low-temperature
breakdown in tubes was primarily aroused by their applica- electron emission from a solid surface under preliminary exci-
tions in fluorescent lamps. That is why in most of these works tation of the emitter [27]. In [25], it was supposed that such
the tube was filled with argon, either pure or in a mixture with an excitation was performed by mechanical polishing of the
mercury vapor and/or the rare gases Ne and Kr. Breakdown electrode, which led to the formation of charged microcracks
in nitrogen was also studied in [14], in helium [16], neon [18] in the surface oxide layer.
and an Ar–N2 mixture [19]. In many cases, the discharge tube The effect of illumination by visible light on the break-
was shielded with a grounded metal cylinder (Faraday cage), down in the tubes was observed in [28–31]. A tungsten-hal-
which should exclude non-controlled electrical interference ogen lamp of 150 W power was used as the irradiating light
from external equipment and could also serve as a climate- source. Standard fluorescent lamps (Hg–Ar, 50 cm in length,
control system. The key features of the model [5] were con- 28 mm in diameter) with no wall fluorescent coating were
firmed in these studies, namely the appearance of a charged studied. In [29], the lamp was mounted in a metal housing
area near the high-voltage electrode and the propagation of an with an opening for light irradiation. Voltage pulses with time
ionization front (ionization, or pre-breakdown wave) and of dependence U = U0 × [1 − exp(−t/τ)], τ ~ 10 ms, and with
wall surface charge, towards the low-voltage electrode. One a repetition rate of 10 Hz, were applied to the high-voltage
more wave in the opposite direction may propagate prior to electrode. The U0 magnitude was fitted so that the discharge
the breakdown. However, only one wave was registered in ignition occurred once per two or three seconds. The authors
[12, 14–20] and three waves were observed in [6]. The authors define such U0 value as ‘ignition voltage’; it probably cor-
of [13] saw only a direct wave for the positive voltage polarity, relates (but does not coincide [31]) with breakdown voltage.
and direct and return waves for the negative one. Note, that the A growth of U0 under illumination was observed; the effect
first stage of this scenario, that is the initial breakdown, has was enhanced with light intensity and for illuminance ~103 lx
not been studied in detail. Nevertheless, because of the short- saturated at the level of an almost 1.5-fold voltage increase.
ness of the discharge gap for this breakdown, it is assumed to For negative pulse voltage it was essentially weaker. The long-
have a Townsend-like nature [13, 18]. wavelength limit of the effect was ca. 500 nm. It was found
In [13], it was mentioned that illumination of the tube can that the efficiency of irradiation depended on the position of
affect the breakdown voltage; however, special studies of the irradiated place along the tube; the points 4–6 cm from
this effect in that work have not been performed. Actually, the anode were the most sensitive to illumination. The authors
the effect of UV, x-rays, and gamma radiation on the break- proposed two possible mechanisms of the irradiation effect.
down is well studied [1] and its mechanism is well known; (1) Illumination depopulates the metastable argon levels,
it is the generation of secondary electrons due to either gas thereby decreasing the ionization of Hg atoms in the Penning
photoionization or photoelectron emission from the electrode processes. (2) Illumination changes the charging state of the
surface. But the effect of visible radiation on the breakdown wall surface and, as a result, influences the ionization front
has received little attention. There are several papers on movement. No quantitative treatment was proposed.
the study of Townsend breakdown in short discharge gaps In our works [16–18], the influence of the illumination on
[21–24] where the delay time of breakdown was measured. the dynamic breakdown voltage Ub in long tubes was studied
In [21], in which neon at a pressure of 10 Torr was studied, for tubes filled with He [16], Ar [16, 17], Ar–Hg mixture
the discharge gap was illuminated by a laser operating at the and Ne [18] at a pressure of 1–5 Torr. In [16], the tube was
wavelength of 614.3 nm, corresponding to the Ne 1s5 − 2p6 illuminated by filtered emission of the halogen lamp, in [17,
transition. In [22–24] (nitrogen at a pressure of 1 Torr), the 18] the light-emitting diodes (LEDs) were used. The ramp
gap was illuminated by the emission of a nitrogen discharge. high-voltage pulses with steepness dU/dt up to ~107 V s−1
In all cases, the irradiation changed the breakdown delay time; [16, 18], or pulses with the leading edge governed by equa-
however, the sign of this change was different; in [21–23], tion U = U0 × [1 − exp(−t/τ)], τ ≈ 50 µs [17], were applied
it increased, while in [24], it decreased. The increase in the to the anode of the tubes. In all cases, illumination lowered
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
the average breakdown voltage Ub by as much as two or three For all pulse shapes, the sharp drop of the voltage was
times. Besides, statistical scatter in the Ub values decreased observed at the moment of breakdown. For ramp pulses,
or almost ceased. The long-wavelength threshold of the effect voltage at the point preceding this drop was considered as
was estimated to be 400–500 nm. In [18], it was also obtained the breakdown voltage Ub. For rectangular pulses, when all
that illumination of the tube reduced the breakdown statistical breakdowns occurred at amplitude voltage, the breakdown
delay time. In this case, rectangular voltage pulses were used. delay time td was determined as an interval between the pulse
Similar to [27, 28], the points most sensitive to illumination leading edge and point of the voltage drop.
were placed at 5–6 cm from the anode. Light pulses were produced at different time shifts relative
As for the mechanism of the effect, in [16] it was suppos- to the voltage pulse onset. In figure 2, their possible mutual
edly similar to [25], which is PSEE. However, in later studies positions are shown schematically. Two light sources were
[17, 18] another mechanism was proposed, viz. electron pho- used. (i) An LED of ~50 mW input power and ~1 cd luminous
todesorption from the wall surface. This process is assumed to intensity. The irradiation was diaphragmed and narrowed, so
occur in dielectric barrier discharges (DBDs) at atmospheric that the 5 mm spot on the tube wall was illuminated. The lumi-
pressure [32–37], where electrons are presumably desorbed nous flux through this area was ≈3·10−5 W. (ii) Laser diode
from the surface of the dielectric barrier under the action of of ~500 mW input pulse power. The irradiated spot was also
discharge radiation. It is suggested that this is important for 5 mm in diameter and the luminous flux was ca. 10 mW. For
discharge ignition owing to the synchronization of separate both light sources, the light beam was nearly parallel and
micro-discharge pulses. crossed the axis of the tube at a right angle. Two positions
In [38], the influence of visible light on the ignition of of the illuminated spot could be used: (1) close to the anode
pulsed discharge in a flow of He, N2, O2, and He–N2, He–O2 end, so that the light beam passed next to the anode ceramic
mixtures is described. The gas pressure ranged from 2 × collar; (2) at a distance of 5 cm from the anode towards the
103–9 × 104 Pa, while the flow rate was 0.5–4 l min−1. The cathode. The spectral distributions were measured for both
light sources were LEDs, lasers and Xe lamps. The break- sources using the calibrated spectrometer (figure 3). All other
down delay time was measured and found to be decreasing light sources including the room lighting were switched off.
when the tube was illuminated. In nitrogen, the effect was It was noted above that in some of the previous works where
especially strong; the delay time fell from more than five min- the breakdown in tubes was studied, they were surrounded by
utes to several seconds. The proposed mechanism is the PSEE the grounded shield (mostly aluminum tube of about 5 cm in
mentioned above; it can also involve the vibrational excitation diameter). The main purpose of the shielding is usually to
of nitrogen molecules. exclude the non-controlled electrostatic interaction with the
In all previous research of the effect of visible-spectrum environment. But instead, interaction with the shield arises.
light on the breakdown in tubes, continuous light sources were It seems evident that this interaction can also influence the
applied. In the present work, the pulsed illumination of the breakdown. In our recent studies [18, 20], we have detected
tube was studied. This allowed us to examine the temporal such an influence in experiments with Ar–Hg mixture, when
characteristics of the effect and get additional information on the tube was placed inside the grounded cylindrical shields
its features. of varied diameter d. In particular for d = 5 cm, the ioniz
ation wave average velocity was more than 3-fold higher than
2. Experimental that with no shielding. The shield also drastically distorted
waveforms of the anode voltage and current. The idea of this
The sealed-off discharge tube was of 15 mm in inner diameter work was to study the breakdown in tubes under conditions of
with an 80 cm distance between the cylinder hollow aluminum their conventional applications (light sources, gas-discharge
electrodes of 2 cm in length and 10 mm in diameter. Their lasers, plasma research, etc) where no special shielding is usu-
front edges were coated with ceramic collars. The tube was ally used. Therefore, the discharge tube in this work was not
filled with high-purity neon at a pressure of 0.6 Torr. One of screened. For minimizing electrical impact on the environ
the electrodes was grounded; the positive high-voltage pulses ment, the tube was fixed on dielectric holders at a distance
were applied to the other. Pulses of two different waveforms larger than 7–10 cm from all small-sized metal components of
were used (figure 1): (1) rectangular pulse with steep leading the setup, and at more than 40 cm from its larger components.
edge (rise time of ~1 µs); (2) the pulse with a linearly growing The absence of such an impact was proved by the fact that no
leading edge (ramp pulse) U(t) = (dU/dt) × t, with dU/dt = rearrangement in laboratory equipment had had any effect on
106–108 V s−1. The pulse amplitude was varied through the the measured parameters of the breakdown. No change was
range 1–5 kV, and the pulse repetition rate was 1 Hz or lower. observed when relocating the tube to another laboratory room.
Such a low rate was chosen to ensure independence of the It was also found that the presence of small-scale metal (even
breakdown characteristics from the influence of the previous grounded) objects affected the breakdown characteristics only
pulse (‘memory effect’ [14, 39]). The pulse duration was typi- if they were located closer than 2‒3 cm from the tube. It is also
cally 10 ms. It was enough for igniting glow discharge after worth noting that in experiments with Ar–Hg mixture [18, 20]
the breakdown, and for discharge current to reach the steady- where the tube was placed inside the shields of varied diam-
state value. The ballast resistor in the discharge circuit limited eter d, the breakdown characteristic distortions waned when
this value to a magnitude of 10–40 mA. increasing the d value and almost disappeared at d ≈ 70 cm.
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
Figure 1. Waveforms of voltage and current for the rectangular (a) and ramp (b) pulses. Breakdown delay time td and breakdown voltage
Ub are shown.
Figure 2. Relative positions of voltage and light pulses. Bold lines show the voltage pulse waveforms. Bar depicts the light pulse.
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
Figure 4. Breakdown delay times for sequences of 300 pulses with no illumination (a) and with the 5 µs LED pulses illuminating the area
next to the anode end at different delay time t0 after the voltage pulse onset (b) and (c). Lines mark the t0 values.
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
Figure 6. Breakdown delay times for sequences of 300 pulses under illumination of the area next to the anode end with the LED pulses of
different duration δt applied at t0 = 200 µs after the voltage pulse onset.
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
Figure 9. Breakdown voltage measured for sequences of 50 ramp voltage pulses with the illumination point at 5 cm from the anode end by
10 µs LED pulses. Time gap between the voltage pulse onset and light pulse τ (µs) is depicted in a frame; dU/dt = 5 kV ms−1. For other
details, see in the text.
4. Discussion
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
upper limit, but not changing the lower one Ubmin = 1210 V.
The latter is marked in figures 9(a)–(f) with thin lines and obvi-
ously corresponds to the ts equal to 0 (or at least to ts ≪ tfw).
Therefore,
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
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J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
the lifetime of the surface charge by three orders of magni- may drop from 5-fold to 10 percent. The average breakdown
tude. In [48], the breakdown voltage in the DBD in helium voltage decreases up to more than twice. For the moments τ
decreased essentially under irradiation of the dielectric later than τ*, all the breakdowns occur in the interval between
(glass) by a Nd:YAG laser at λ 532 nm (hν = 2.33 eV); emis- τ* and τ, and the breakdown voltages are strictly bounded by
sion with λ 1064 nm (1.17 eV) induced the discharge trans both sides.
ition from the glow mode to the Townsend mode. The light As the mechanism responsible for the observed effect, the
emission initiated by the fast electrons provides synchronous electron photodesorption from the tube wall is suggested. This
breakdown of micro discharges (filaments) [32–37, 47]. Due process is proposed to occur in DBD at atmospheric pressure
to such collective effect, the first filamentary discharge trig- where it can influence the breakdown voltage and provide
gers the subsequent filamentary discharges and thus causes synchronous breakdown of micro discharges, thus causing the
the formation of multiple filaments. Similar processes occur formation of multiple filaments.
in a surface DBD [33]. For the ramp voltage, it has been found that deferred action
The spectral range effective for desorption is evidently of light pulse on the breakdown may be realized when meta-
defined by the binding energy Eb of adsorbed electrons. The stable atoms are involved as intermediates.
following data are available on this magnitude: for glass sur- It seems possible to use the effects described in the paper to
face Eb < 3.5 eV [33] and 1.17 eV [48]; for quartz 0.50 eV improve the characteristics of the breakdown in the tubes, e.g.
[47]. These data were obtained in works devoted to the study to diminish jitter, to decrease breakdown voltage fluctuations
of DBDs. In conditions of ignition of low-pressure glow dis- and to reduce the average value of this voltage.
charge where photoemission threshold λth was determined,
available data for the glass surface [16–18, 28] give the
Acknowledgments
interval 420–530 nm (hν = 2.34–2.95 eV) and for quartz wall
λth = 530 nm (2.34 eV) [38]. The authors are grateful to N A Dyatko for his valuable
The above consideration confirms the hypothesis [43] of comments and D Marinov for very helpful discussions and
the existence of weakly bound adsorbed electrons on the glass information on publications on photostimulated electron
and other dielectric surfaces. Their bond energy and appro- desorption. This work was supported by the Russian Founda-
priate wavelength threshold make it possible for these elec- tion for Basic Research, project #15-02-06191-a.
trons to be emitted under the impact of photons of visible
spectrum radiation. It seems most likely that this very process
is the mechanism of effects observed in this work. ORCID iDs
A V Meshchanov https://orcid.org/0000-0002-9760-4948
5. Conclusion Y Z Ionikh https://orcid.org/0000-0003-4817-7174
A I Shishpanov https://orcid.org/0000-0001-5869-3207
The influence of the light pulses emitted by the LED and laser
diode at a wavelength of 460 and 407 nm on the breakdown in
the discharge tube was studied experimentally. References
It has been found that the light pulse of fairly moderate
intensity exerts the strongest influence on the breakdown. In [1] Meek J M and Craggs J D 1978 Electrical Breakdown of
the case of rectangular voltage pulse, it drastically decreases Gases (New York: Wiley)
the statistical delay time of the breakdown. As a result, all [2] Raizer Y P 1991 Gas Discharge Physics (Berlin: Springer)
the breakdowns, which had not happened before the light [3] von Seeliger R and Bock K 1938 Zs. Phys. 110 717–26
[4] Bartholomeyczeyk W 1939 Ann. Phys. 36 485–590
pulse, occur during several microseconds after its onset. This [5] Nedospasov A V and Novik A E 1961 Sov. Phys.-Tech. Phys.
interval may be made still shorter by increasing the light inten- 5 1261–7
sity. As to the light pulse width, it should be such that at least [6] Horstman R E and Lansink F M O 1988 J. Phys. D: Appl.
several secondary electrons produced by light and initiating Phys. 21 1130–6
the discharge (so-called effective electrons), appeared during [7] Brok W J M, van Dijk J, Bowden M D, van der
Mullen J J A M and Kroesen G M W 2003 J. Phys. D:
the pulse. Further extension of the pulse does not change the Appl. Phys. 36 1967–79
picture. [8] Gendre M F, Bowden M D, Haverlag H, van den
The light pulse influences the breakdown delay time even Nieuwenhuizen H C M, Gielen J and Kroesen G M W
if it terminates before the voltage pulse onset. This can be 2003 Proc. Frontiers in Low Temperature Plasma
explained by the finite lifetime of the secondary electrons. Diagnostics V: Proc. of Int. Workshop (Villaggio:
Cardigliano) 295–8
The latter value has been estimated experimentally and can be [9] Gendre M F, Bowden M D, van den Nieuwenhuizen H C M,
attributed to the free diffusion time of electrons. Haverlag M, Gielen J W A M and Kroesen G M W 2005
In the case of the ramp voltage pulse, an essential decrease IEEE Trans. Plasma Sci. 33 262–3
in the breakdown voltage scatter is observed. The effect [10] Brok W J M, Gendre M F and van der Mullen J J A M 2007 J.
is especially pronounced if the light pulse is applied at the Phys. D: Appl. Phys. 40 156–62
[11] Brok W J M, Gendre M, Haverlag M and van der
moment τ* when the anode voltage is equal to or slightly Mullen J J A M 2007 J. Phys. D: Appl. Phys. 40 3931–6
lower than the minimum breakdown voltage. In this case, the [12] Langer R, Garner R, Hilscher A, Tidecks R and Horn S 2008
difference between the highest and lowest breakdown voltages J. Phys. D: Appl. Phys. 41 144011
11
J. Phys. D: Appl. Phys. 51 (2018) 335202 A V Meshchanov et al
[13] Gendre M F, Haverlag M and Kroesen G M W 2010 J. Phys. [31] Korolev Yu D and Mesyats G A 1991 Physics of Pulsed Gas
D: Appl. Phys. 43 234004 Breakdown (Moscow: Nauka)
[14] Shishpanov A I, Ionikh Yu Z, Meshchanov A V and [32] Ambrico P F, Ambrico M, Šimek M, Colaianni A, Dilecce G
Dyatko N A 2014 Plasma Phys. Rep. 40 467–80 and De Benedictis S 2009 Appl. Phys. Lett. 94 231501
[15] Meshchanov A V, Korshunov A N, Ionikh Yu Z and [33] Guaitella O, Marinov I and Rousseau A 2011 Appl. Phys. Lett.
Dyatko N A 2015 Plasma Phys. Rep. 41 677–84 98 071502
[16] Shishpanov A I, Ionikh Y Z and Meshchanov A V 2016 Opt. [34] Ambrico P F, Ambrico M, Schiavulli L and De Benedictis S
Spectrosc. 120 929–35 2014 J. Phys. D: Appl. Phys. 47 305201
[17] Meshchanov A V, Ionikh Y Z, Shishpanov A I and [35] Tay W H, Kausik S S, Yap S L and Wong C S 2014 Phys.
Kalinin S A 2016 Plasma Phys. Rep. 42 978–89 Plasmas 21 044502
[18] Shishpanov A I, Meshchanov A V, Kalinin S A and [36] Kashiwagi Y and Itoh H 2006 J. Phys. D: Appl. Phys.
Ionikh Y Z 2017 Plasma Sources Sci. Technol. 26 065017 39 113–8
[19] Dyatko N A, Ionikh Yu Z, Meshchanov A V and [37] Allegraud K, Guaitella O and Rousseau A 2007 J. Phys. D:
Napartovich A P 2018 Plasma Phys. Rep. 44 334–44 Appl. Phys. 40 7698–706
[20] Kalinin S A, Meshchanov A V, Shishpanov A I and Ionikh [38] Nie L, Xian Y, Lu X and Ostrikov K 2017 Phys. Plasmas.
Yu Z 2018 Plasma Phys. Rep. 44 345–58 24 043502
[21] Bošan Dj A, Radović M K and Krmpotić Dj M 1986 J. Phys. [39] Pejović M M, Ristić G S and Karamarković J P 2002 J. Phys.
D: Appl. Phys. 19 2343–9 D: Appl. Phys. 35 R91–103
[22] Bošan Dj A, Jovanović T V and Krmpotić Dj M 1997 J. Phys. [40] Dutton J 1975 J. Phys. Chem. Ref. Data 4 577–856
D: Appl. Phys. 30 3096–8 [41] Suzuki S and Itoh H 2016 J. Phys. D: Appl. Phys. 49 185202
[23] Jovanović T V, Bošan Dj A, Krmpotić Dj M and Radović M K [42] Mitchell A C G and Zemansky M W 1961 Resonance
1998 J. Phys. D: Appl. Phys. 31 3249–51 Radiation and Excited Atoms (Cambridge: Cambridge
[24] Pejović M M, Ristić G S and Petrović Z Lj 1999 J. Phys. D: University Press)
Appl. Phys. 32 1489–93 [43] Golubovskii Yu B, Maiorov V A, Behnke J and Behnke J F
[25] Gosho Y and Harada A 1983 J. Phys. D: Appl. Phys. 16 1047–54 2002 J. Phys. D: Appl. Phys. 35 751–61
[26] Kramer J 1950 Der Metallische Zustand (Gottingen: [44] Heinisch R L, Bronold F X and Fehske H 2012 Phys. Rev. B
Vandenhoeck and Ruprecht) 85 075323
[27] Mintz R I, Mil’man I I and Kryuk V I 1976 Sov. Phys. Usp. [45] Bronold F X and Fehske H 2015 Phys. Rev. Lett. 115 225001
19 697–707 [46] Tschiersch R, Bogaczyk M and Wagner H-E 2014 J. Phys. D:
[28] Hamamoto M 2006 Japan. J. Appl. Phys. 45 L172–4 Appl. Phys. 47 365204
[29] Hamamoto M 2006 Japan. J. Appl. Phys. 45 L175–7 [47] Li M, Li C, Zhan H, Xu J and Wang X 2008 Appl. Phys. Lett.
[30] Hamamoto M, Kai S, Haizaki T and Ishibashi M 2007 Proc. 92 031503
28th Int. Conf. Phenomena in Ionized Gases (Prague, [48] Tschiersch R, Nemschokmichal S and Meichsner J 2017
Czech Republic) pp 1973–6 Plasma Sources Sci. Technol. 26 075006
12