2/20/2011

Airborne Particle Physical Controls

Filtration Dilution Isolation

Utilizing HEPA & Diluting internally Containing or
ULPA filters to contaminated air isolating particle
remove particles with clean, filtered generations with
from supply air air barriers

HEPA: 99.97% Process exhaust

Higher air
(Ef.@0.3 m) change Mini-environment
ULPA: 99.9997% rate, better
(Ef.@0.12 m) dilution.

Typical Ceiling Filter Coverage

Class HEPA
Ceiling Filter
or
Coverage
US 209 ISO ULPA

9 5% - 15%
100,000 8 5% - 15%
10,000 7 15% - 20% HEPA
1,000 6 25% - 40%
100 5 35% - 70%
10 4 60% - 90%
1 3 60% - 100%
ULPA
2 80% - 100%
1 80% - 100%