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10.1007@s10854 014 1781 X
10.1007@s10854 014 1781 X
DOI 10.1007/s10854-014-1781-x
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J Mater Sci: Mater Electron
properties including transmittance and luminescence. The The filtered precursor solution was deposited on clean
surface roughness of thin films has been reported to corning glass substrates using a locally fabricated dip
influence the electrical and optical properties [11]. The rms coating apparatus. The dip coating parameters were opti-
roughness values of range greater than 4 % of the film mized as 20 cm/min lifting speed and 90 ° vertical lifting,
thickness makes the films suitable for solar cell applica- depending on the viscosity and concentration of the pre-
tions [6]. Also, the smooth films (approximately equal to cursor solution. The dip coated films were dried at room
1 % of the film thickness) finds applications in optoelec- temperature and pre-fired at 250 °C for 30 min. The doped
tronics [12]. Thin films of indium tin oxide are widely used samples were annealed at 500 °C at the rate 4 °/min in air,
as transparent and conductive oxide layers for many and held at this temperature for 120 min during the course
microelectronics applications, such as transparent electrical of annealing. The process of dipping, pre-firing and
contacts in liquid crystal displays, organic light-emitting annealing were repeated seven times, as seven coatings
diodes (OLEDs), plasma displays, thin film solar cells, etc. were required for obtaining useful data from X-ray dif-
[13]. fraction characterization.
SnO2:In films have been prepared by various techniques Crystallization phase of the SnO2:In films were char-
such as chemical vapor deposition, spray pyrolysis, reac- acterized by X-ray diffraction (XRD) using X-ray diffrac-
tive RF sputtering, sol–gel technique. Sol–gel fabrication tometer (Model—PW 1710 PHILIPS).The XRD patterns of
has gained much interest because of its simplicity, low the films were measured by Philips X’pert Materials
processing temperature, stoichiometry control and its Research diffractometer operated at a voltage of 40 kV and
ability to produce uniform, chemically homogenous films a current of 30 mA, using Cu Ka radiation
over large areas that can provide integration with other (k = 1.54 Å).The parameter setting for all XRD scans is
circuit elements. The sol–gel method can be successfully 1.5 °/min and a step size of 0.016 ° in a 2 h range of
used for the preparation of pure oxide films applied in 20–60. The surface morphology of the annealed films were
electronics and optics [14]. The main advantage of the sol– investigated by using atomic force microscopy, Bruker
gel process is the ability to form inorganic structures at Multimode III. AFM parameters details, such as roughness,
relatively low temperature. Moreover, incorporation of kurtosis and skewness were deduced from WSxM 5.0
dopant is easier in this technique. Ji et al. [15] deposited p Developer 5.3 data processing and analysis software.
type transparent SnO2 thin films by sol–gel dip coating XPS spectrum was recorded using a monochromatic Al
method and used indium as acceptor dopant. Ka (1,486.6 eV) source and a MAC-2 electron analyzer
In this study, SnO2:In films were deposited by sol–gel (RIBER system model-FCX 700). The resistivity of
dip coating method on corning glass substrate. We report SnO2:In films was determined by four-point probe mea-
the effect of indium content on the structural, morpho- surements with a Keithley 6200 source meter and a cylin-
logical, optical and electrical properties of the film. drical four-point probe head. The spectral transmittance of
Besides, X-ray photoelectron spectroscopy (XPS) studies the films were recorded as a function of wavelength, in the
revealed the chemical composition, chemical state of the range 300–900 nm, using JASCO V-550 UV–Vis spectro-
surface species and different defect states in the SnO2:In photometer. The film thickness and optical band gap values
thin film. were determined using Swanepoel’s envelope method [17].
The Photoluminescence spectra were recorded by using a
Perkin-Elmer fluorescence spectrometer (Model-LS55) with
2 Experimental Section a 40 W Xenon Lamp as the excitation source and 5 nm
excitation and emission slit width.
Undoped and In-doped SnO2 films were deposited on
corning glass substrate by sol–gel method using dip-coat-
ing technique. The indium doped SnO2 thin films were 3 Results and discussion
prepared by using SnCl22H2O (Alfa Aesar, purity: 98 %)
as the source for tin and InCl34H2O (HPLC, purity: 97 %) 3.1 X-ray diffraction studies
as the source for indium. A 6.8 g of SnCl22H2O was
dissolved in 85 ml of absolute ethanol, and different con- Figure 1 shows the XRD pattern of undoped and indium
centration (0–7 mol%) of InCl34H2O was added as dopant doped SnO2 thin films for various doping concentrations of
source. To stabilize the solution, 15 ml of acetic acid indium. The XRD data of SnO2 films revealed peaks at
(Merck, purity: 99 %) was added as stabilizer. The solution 26.6 °, 33.83 °, 37.95 °, 51.8 ° and 54.76 ° corresponding
was stirred for approximately 2 h at 60 °C until a limpid to the (110), (101), (200), (211) and (220) planes respec-
sol–gel was obtained. The prepared sol–gel was kept at tively. All the prominent peaks in the pattern correspond to
room temperature for 30 h [16]. the tetragonal structure of SnO2 and are indexed on the
123
J Mater Sci: Mater Electron
(110) 500 (110) Table 1 Crystallite size, FWHM and lattice parameters of SnO2:In
160
450 (101) films for various In doping concentrations
Intensity(a.u)
400
(101) (211)
In doping Crystallite size D FWHM b Lattice
350
300 (200)
(220)
concentration (nm) (rad) parameters
120 250 (mol%) (Å)
200
Intensity(a.u)
20 30 40 50 60
2Theta(degrees) a c
(211)
80 (220) (300) 0 11.38 ± 0.01 0.012 4.742 3.173
a 1 9.07 ± 0.03 0.015 4.754 3.188
3 6.02 ± 0.01 0.023 4.751 3.249
40 b 5 5.56 ± 0.14 0.026 4.736 3.212
7 4.74 ± 0.17 0.031 4.733 3.185
c
d
0
20 30 40 50 60 Table 2 RMS roughness, average roughness, kurtosis and skewness
2θ (degrees) of SnO2:In films for various In doping concentrations
Fig. 1 XRD patterns of SnO2:In films for a 1 mol% In, b 3 mol% In, In doping RMS Average Kurtosis Skewness
c 5 mol% In (Inset: XRD pattern of undoped SnO2) concentration roughness roughness
(mol%)
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J Mater Sci: Mater Electron
Since it is a tetragonal system, the lattice constants a and Gaussian distribution, the skewness is equal to zero and the
c were determined from the spectra using the equation kurtosis is equal to three. In this study, SnO2:In films pos-
1 h2 þ k2 l2 ses’ kurtosis values below 3 indicating relatively flat sur-
2
¼ þ 2 ð3Þ face. The flat surface morphology of the films could protect
d a2 c
against cathode-to-anode electrical shorts in OLEDs [13].
where ‘d’ is the interplanar distance, (hkl) are the miller Therefore, our SnO2:In films are the best candidate for the
indices, a and c are the lattice constants. The lattice con- production of high-quality transparent conducting elec-
stants for tetragonal SnO2 film are reported in standard data trodes for OLEDs and flexible displays.
a = 4.7382 Å and c = 3.1871 Å (JCPDS card no:
041-1445). In addition, the lattice constants for SnO2:In 3.3 XPS studies on the film surface
films were larger than that of the SnO2 films. In3? substi-
tution for Sn4? leads to an increase in lattice constant due XPS study was used to understand the surface chemical
to the difference between their ionic radii (Table 2). In3? changes in the SnO2:In film (1 mol%) through the study of
(0.84 Å) possesses a larger size than Sn4? (0.71 Å), which binding energy of core-level electrons. Figure 3 shows the
in turn results in the slight shift of the diffraction peaks XPS survey scan spectrum and XPS core level spectra of
[15], which is in good agreement with the XRD patterns the film sample. The spectrum revealed the presence of
(Fig. 1). This is indication of In3? substitution Sn4?, impurity, such as carbon, as well as the constituent ele-
therefore, this result can be attributed to indium ions ments of indium, oxygen and tin. The energy scale was
substituting for the tin ions and suppressing the growth of calibrated using C 1s peak position set at 284.4 eV of
SnO2. carbon as a Ref. [24]. In the XPS spectra of Sn, the binding
energies of Sn 3d5/2 and Sn 3d3/2 were measured to be
3.2 Surface morphological studies 488.8 and 497.2 eV respectively. The Sn 3d5/2 located at
about 488.8 eV, demonstrates that the chemical state of Sn
The surface roughness plays a major role in optical and in the sample is ?4. The separation between Sn 3d5/2 and
electrical properties of thin films. The AFM images taken Sn3d3/2 level (8.4 eV) is approximately the same as in the
for SnO2 and SnO2:In thin films for various indium con- standard spectrum of Sn and agrees well with other report
centrations are shown in Fig. 2 on a scanning area of [25]. The O 1s peak observed at 532.8 eV can be attributed
2.5 lm 9 2.5 lm. It can be seen that the surfaces of all to O2- state adsorbed at oxygen vacancies respectively due
films are uniform and crack free. It is seen that the grains to chemisorbed oxygen in non-stoichiometric oxides. This
appear to be less dense in nature with increase in indium value of binding energy agrees with reported results [26].
content (Fig. 2b–d). This shows that the grain growth is Reports suggest that, the indium core is orbit split to 3d5/2
inhibited at higher indium doping concentrations. This and 3d3/2, with the 3d5/2 peak positioned at 446 eV and the
observation agrees with the XRD results. The unique 3d3/2 peak positioned at 453 eV [26]. The presence of the
properties of the semiconducting oxides are related to the peak 444.1, 446 and 453.9 eV in the In 3d spectrum shows
microstructural properties of the thin films. The micro- the presence of In 3d5/2 and In 3d3/2 in SnO2:In sample.
structure depends on indium content, and the incorporation The In 3d5/2 located at about 446 eV, demonstrates that the
of In into the SnO2 film causes change in morphology of the chemical state of In in the sample is ?3. The quantitative
film. The surfaces of SnO2:In films were found to be slightly analysis was done from the normalized areas of the Sn
rough and displayed surface roughness values which ranges 3d and O 1s peaks, which shows a molar ratio of
from 0.7681 (0 mol%) to 4.0081 (7 mol%). Such roughness O/Sn *1.61 for the sample which is smaller than the value
values were comparable and even lower than those varying for stoichiometric SnO2, suggesting oxygen vacancies [27].
from 10 to 40 nm reported in the other reports [23]. The This oxygen vacancy contributes to the photoluminescence
roughness of the SnO2:In films increased with increase in (PL) in SnO2:In film.
indium doping content. The prepared SnO2:In films with
indium doping greater than 3 mol% posses rms roughness 3.4 Electrical studies
values approximately equal to 1 % of the film thickness.
These films, although not very smooth,are promising, since Figure 4 shows the variation in resistivity of SnO2:In films
the control of film roughness would allow us to extend the for various indium doping concentrations. SnO2 has n-type
range of applications in optoelectronics. The two key conductivity due to the intrinsic defects such as oxygen
parameters used to characterize the asymmetry and the vacancies and tin interstitials. In SnO2 films, Sn can exist in
flatness of the surface distribution is the skewness and two possible valence states, Sn2? and Sn4?. As seen in
kurtosis. Skewness measures the symmetry of surface data Fig. 4, the resistivity of the SnO2:In (0–3 mol%) films
and kurtosis indicates the flatness of the surface. For the increases and then tends to decrease with an increase in In
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J Mater Sci: Mater Electron
content (SnO2:In 5 mol%). But when the doping concen- two contributions together produce electron concentrations
tration increased to 7 mol%, the resistivity started to up to 1017 cm-3 [13]. In this study, SnO2:In (0–3 mol%)
increase slightly. The nature of the semiconductor was films exhibited n-type conductivity,which may be due to
confirmed using hot probe method. The hot probe mea- the low doping of indium in SnO2. This low doping of
surements used to determine conductivity type of the films indium atoms that incorporate to the lattice, may be
showed that the SnO2:In (0–3 mol%) films exhibited insufficient to switch them from n to p type film. Substi-
n-type conductivity, while the SnO2:In (5–7 mol%) films tution of tin (Sn4?) tetravalent by trivalent indium (In3?)
exhibited p-type conductivity behavior. As already known, may cause a deficiency of one electron or creation of a
undoped SnO2 reveals n-type conductivity due to oxygen hole. Hence, the decrease in resistivity of the SnO2:In films
vacancies and interstitial tin atoms. It is believed that these at 5 mol% indium contents, can be attributed to an increase
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J Mater Sci: Mater Electron
a 300000 c 500000
Sn 3d Sn 3d Sn 3d
5/2
250000
400000
Sn 3d3/2
Intensity(a.u)
200000
Intensity(a.u)
O 1S 300000
150000
200000
100000
100000
50000 C 1S
In 3d
0 0
0 200 400 600 800 1000 1200 480 485 490 495 500
Binding Energy(eV)
Binding energy(eV)
O 1S
d 20000
b 220000 In 3d5/2 In 3d
19500
200000 O 1S
19000
Intensity(a.u)
180000 In 3d3/2
18500
Intensity(a.u)
160000
18000
In 3d5/2
140000
17500
120000
17000
100000
16500
80000
525 530 535 540 545 430 435 440 445 450 455 460
Fig. 3 a XPS wide spectra of SnO2:In film(1 mol% In). b XPS wide spectrum of O 1S in SnO2:In film(1 mol% In). c XPS wide spectrum of Sn
3d in SnO2:In film(1 mol% In). d XPS wide spectrum of In 3d in SnO2:In film(1 mol% In)
300000
(7 mol%), the grain size again became smaller and
250000
numerous grain boundaries are formed. Consequently grain
200000 boundary scattering disturbs movement of charge carriers.
150000 So this may cause slight increase in resistivity with higher
100000 indium doping concentrations.
50000
3.5 Optical studies
0
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J Mater Sci: Mater Electron
100 Table 3 Thickness and band gap value of SnO2:In films for various
b
a In doping concentrations
ce
80 In doping concentration (mol%) Thickness (nm) Band gap (eV)
d
Transmittance (%)
3.00E+013
0 405 ± 0.77 3.608 ± 0.002
60 1 408 ± 0.94 3.565 ± 0.003
d
2.00E+013 c 3 426 ± 0.59 3.530 ± 0.002
(αhυ)2(eV/cm)2
e
40 5 437 ± 0.89 3.503 ± 0.001
b
1.00E+013 a
7 458 ± 1.47 3.489 ± 0.005
20
0.00E+000
2.5 3.0 3.5 4.0
υ
Energy (hυ)
0 2.5
400 500 600 700 800 900
Wavelength (nm) 2.0
Figure of merit
1.0
smooth surface and relatively good homogeneous films
were formed possesing nanometer-sized small grains. The 0.5
slight decrease of transmittance at higher doping concen-
trations may be due to the scattering of photons by crystal 0.0
defects created by doping. This is in agreement with the
AFM data, the roughness of the films are found to be -1 0 1 2 3 4 5 6 7 8
increasing. Indium doping Concentration(mol %)
The optical band gap of semi-conductor materials can be
deduced from transmission measurements using Wood– Fig. 6 Variation in figure of merit for SnO2:In films for different
Tauc relation [28]. indium doping concentrations
1=2
ðahmÞ ¼ A hm Eg ð4Þ
where hm is the photon energy, a the absorption coefficient in the potential barrier required for charge movement in
corresponding to frequency m, A is a constant, Eg the band nanocrystalline SnO2:In films. In transparent conductor
gap energy. Eg values obtained by extrapolating the linear applications, electrical and optical coating parameter
portion of (ahm)2 versus hm plots to intercept the photon optimisation plays a key role. Both conductivity and
energy axis (inset–Fig. 5), the calculated Eg values are transmittance should be as high as possible for solar cell
given in the Table 3. In our films the plots of (ahm)2 as a applications. The definition of figure of merit of a
function of energy(hm) for SnO2:In films tend transparent conducting film was given by Haacke [29]
asymptotically towards a linear section,which shows that equation:
the investigated films have a direct optical band gap. The
T
incorporation of indium is accompanied by a systematic U¼ ð5Þ
RS
low energy shift of the band gap. Eg values of SnO2 films
decreased with In doping from 3.6 to 3.49 eV (inset where T is the transmittance at 550 nm and Rs is the sheet
Fig. 5). Presence of dopant, can introduce impurity band resistance. The calculated value of figure of merit as a
levels into the band gap of tin oxide. The narrowing band function of various In doping concentration is depicted in
gap energy is possibly due to the existence of indium Fig. 6. The Fig. 6 shows that the figure of merit decreasing
impurities in the SnO2 structure, which induce the and increasing nature depending on the indium doping
formation of new recombination centers with lower concentration. A higher figure of merit of the films suggests
emission energy. The lowering of the band gap gives an that the prepared SnO2:In films posses good optoelectrical
indication of the stoichiometric deviation and degeneracy properties. The 5 mol% SnO2:In films in this study posses
of the doped SnO2 and the increase in oxygen vacancies low sheet resistance, transmittance greater than 80 % and
within the lattice. Because of this reduction in band gap, high figure of merit. Hence, 5 mol% SnO2:In films are best
room temperature gas sensing is possible with a reduction suited for optoelectronic and gas sensing applications.
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J Mater Sci: Mater Electron
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J Mater Sci: Mater Electron
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