Assignment 1

Static analysis of MEMS Cantilever beam

A. Design MEMS Cantilever (clamped-free) beams for following three structures

1. Rectangular : 200 µm x 45 µm x 4 µm (L x w x t)
2. Perforated rectangular: 200 µm x 45 µm x 4 µm with circles of diameter 20 µm spaced
at 20
µm
3. Trapezoidal: 200 µm x 4 µm (L x t), width- 45 µm on clamped side to 29 µm on free
side

B. The effect of the following actuation mechanisms needs to be studied

1. Mechanical actuation (Force)
2. Electrostatic actuation (Voltage)

Perform the following static Analysis of

Beam:
 Calculate mechanical force for deflection of 2% of length of cantilever and
verify it by COMSOL simulation. Simulate for the following two
configurations:
 Point load
 Distributed load

Comment on the difference in the amount of force required for the same
amount of deflection.
 Simulate for the voltage required to bend beam for above deflection for
distributed load configuration.

 Assuming the gap between the beam and bottom surface to be 15 µm, simulate for
the Pull- in voltage of beam and verify it by the calculated values.