Gas Sensing Mechanismo of Metal Oxides The Role of Ambient Atmosphere, Type of Semicondutor and Gases PDF

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Gas sensing mechanism of metal oxides: The role of ambient atmosphere,


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Science Letters Journal Sci. Lett. J. 2015, 4: 126

Gas sensing mechanism of metal oxides: The role of ambient atmosphere, type of
semiconductor and gases - A review

Prabakaran Shankar, John Bosco Balaguru Rayappan*

School of Electrical & Electronics Engineering (SEEE) & Centre for Nanotechnology & Advanced Biomaterials (CeNTAB)
SASTRA University, Thanjavur – 613 401, India
*
Author for correspondence: John Bosco Balaguru Rayappan, email: rjbosco@ece.sastra.edu
Received 01 Aug 2014; Accepted 08 Oct 2014; Available Online 08 Oct 2014

Abstract

Metal oxide thin films have emerged as a promising choice in the gas sensor industry. Several key parameters such as physical and
chemical characteristics of the metal oxides, synthesis techniques used, nature of gases, type of atmosphere and the operating temperature
collectively influence the sensor properties. The chemiresistive property change in the conductivity associated with adsorption and
desorption of gas molecules on the metal oxide surface, is the principle of sensing mechanism. However, owing to the multitude of factors
involved, understanding the interaction mechanism behind the sensing property remains a challenge. In this review, the chemical kinetics of
reduction-oxidation (REDOX) reactions occurring at the metal oxide surface during its interaction with various gases in dry and wet
atmospheres have been analysed. Along with, the sensing characteristics of the metal oxide materials toward the detection of toxic gases, the
various determining factors of sensing behaviour of metal oxides and the role of gas molecules have been discussed. For this study, the most
toxic, combustible and hazardous gases such as CO, CO2, NO2, SO2, NH3, H2S and C2H5OH have been considered as target gases while,
ZnO, SnO2, In2O3, WO3 and CuO, NiO represent n-type and p-type semiconductors respectively to study the influence of base materials.

Keywords: Metal oxide gas sensor; REDOX reactions; Temperature; Nanostructures; Thin films

1. Introduction In the recent past, the development of nanoscience and


technology has strongly influenced this field and lead to a
The complex and tunable nature of electrical paradigm shift in the sensor technology [28–30].
properties of metal oxides makes them an interesting and
attractive material for various applications such as solar cells 1.1. Principle
[1,2], optoelectronics [3–5], spintronics [6], piezoelectric [7] The metal oxide gas sensor works on the principle of
and gas sensors [8]. In 1953, Brattain et al. and Bardeen et al. chemiresistance viz. the change in electrical conductivity or
[9–11] conducted a systematic study on the changes in the resistivity of thin films on exposure to a target gas. In other
electrical properties of semiconductor materials due to the words, gas molecules interacting with the metal oxides either
interaction of gas molecules at the surface. The detailed study act as a donor or acceptor of charge carriers (Receptor
of the interaction of gas molecules with semiconductor function), and alters the resistivity of the metal oxide
materials prompted the research on metal oxides for gas (Transduction function) and it is shown in Figure 1. The
sensing applications. In 1962, Seiyama et al. [12,13] and increase or decrease of resistance of the metal oxide thin film
Taguchi et al. [14] observed the changes in the electrical
behaviour of zinc oxide and tin oxide due to the changes in the
gas composition at the ambient atmosphere. Figaro Inc., a gas
sensor company based on metal oxides started by Taguchi in
1968 still stands as one of the world‟s leading gas sensor
manufacturer. Since 1968, the science and technology of metal
oxide based semiconductor gas sensors have been evolving
due to the significant contributions from researchers across the
globe. The sensitivity/response of the metal oxide gas sensors
towards a particular target gas can be improved by using metal
additives/doping [15–18], by reducing grain size [19,20], or by
altering operating temperature [15,16], and humidity [21].
Another important characteristic parameter namely selectivity
of the sensor with reference to the type of gas (oxidizing/
reducing) [22] and conductivity of the semiconducting
material [15], effect of dopants [23] and nature of the selected
oxide materials have also been studied. Simultaneously,
theoretical contributions from different researchers [24–27]
help to have a better understanding about the science of Figure 1. Schematic of metal oxide thin film gas sensor.
interaction between the metal oxide surface and gas molecules.
Cognizure 1
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Table 1. Mechanism of sensitization by metal or metal oxide additive (Reprinted with permission from Ref. [20] Yamazoe, Sens. Actuat. B
5 (1991) 7. © Elsevier Publishing).

Type Chemical Electronic


Model

Role of noble metal Activation and spill-over of sample gas Electron donor or acceptor
Origin of gas-sensitive Change of oxidation state of noble
Change of adsorbed oxygen concentration
properties metal
Example Pt-SnO2 Ag2O-SnO2, PdO-SnO2

depends upon the type of majority carriers in the sensitization or response enhancement by additives are found
semiconducting film and the nature of gas molecules (whether to be different in different metal oxide materials. Yamazoe
oxidizing or reducing) in an ambient atmosphere. For n-type [20] have proposed two types of sensitization mechanisms;
materials, oxidizing gases (acceptor) increase the resistance of chemical and electronic as shown in Table 1. In chemical
thin film while, reducing gases (donor) decrease and are sensitization, the promoters residing on the metal oxide surface
correspondingly converse for p-type materials [31]. The facilitates the chemical reactions between target gas and metal
mechanism of receptor function (REDOX) together with the oxide surface through the spill- over phenomenon, for example
transduction function describes the chemiresistive behaviour of Pt, Pd–SnO2 [20]. On the other hand, in electronic
the metal oxide gas sensors. The metal oxide sensors can be in sensitization, the electrical property of the metal oxide is
the form of sintered pellets or thick and thin films. In specific, changed through the change in redox state of the promoter, by
the geometry of the crystallites of the grown crystals and their acceptor or donor charges from gas molecules, for example
interconnectivity between crystallites play a most responsible Ag- SnO2 [20].
role in determining the receptor and transduction functions. “Promoters are additives to metal oxides, which help
This is one of the main reasons behind the influence of in improving their sensing characteristics by lowering the
nanotechnology in this field, which manipulates matter on an energy required for chemisorption of gas molecules on the
atomic and molecular scale. Thus nano dimension plays a semiconductor surface” [35]. “Adding a suitable dopant can
major role in the development of gas sensors [32]. stabilize a particular valence state and increase the electron
The chemiresistance property of the metal oxides can exchange rate or stabilize the metal oxide against reduction”
be related to the width of the space charge region formed on [35, 36]. The choice of the synthesis method and the
the crystallites due to the transfer of electrons during the composition of mixture of precursors used in the synthesis
adsorption and desorption of gas molecules. The width of the strongly affect the surface of metal oxide and hence its sensing
space charge region acts as a potential barrier in the characteristics [36].
conduction process between the grains and induces changes in
the Fermi level. The process of creation and annihilation of 1.3. Thin film based sensors
electrons form the conduction band results in band bending In the recent past, synthesis of nanostructured metal
and Fermi level modulation. When oxidizing gas interacted oxide thin films with and without the doping elements has
with n-type material the band bends upward due to the been reported to obtain smaller grain size [37]. Thin films with
depletion of electrons and while, the band bends downward smaller grain size are favorable as the increased surface to
due to the accumulation of electrons for reducing gas. Hence, volume ratio, carrier concentration and enhanced catalytic
one can infer the direct relation between space charge region activity, facilitate its interaction with larger number of gas
and band bending which depends on the carrier concentrations molecules.
in the grain that, in turn, depends upon the size and shape of The thin film formation process involves several steps
the grain. such as thermal accommodation, adsorption of metal atoms on
the substrate and nucleation followed by crystallization or the
1.2. Influencing factors formation of microstructure. Thus, the thin films synthesized
In 1972, Seiyama et al. [33] reported that additives from the techniques like paste/slurry, chemical and physical
can promote gas sensitivity and rate of response under certain vapour deposition techniques, etc. [37–40], result in different
conditions by modifying its surface. In 1991, Yamazoe et al. electrical, optical and magnetic properties. In each case,
[20] have found an inverse correlation between the response growth process (assembly of molecular building blocks) is
and its grain size. The grain size in the metal oxide thin films different leading to variance in nucleation, growth direction,
can be controlled by modifying the synthesis parameters [34] crystallographic orientation (atomic stacking energy), packing
and adding suitable dopants with appropriate host materials density, interfacial energy and diameter of the crystallites. To
[20]. Reducing crystallite size might have influenced on the date, thin film technology has been either empirical or semi-
width of space charge region which, aids the chemisorption of empirical. Although basic research in understanding and
gas molecules and sensing process. The mechanism of relating several growth parameters has been reported [41,42],
2 Cognizure
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it would take decades of research to have a complete Rapid industrial growth and increase in automobiles
understanding and precise control of the thin film growth. have led to drastic intensification in the concentration of toxic,
Besides the nature and properties of the thin film, the hazardous and greenhouse gases in the atmosphere. These
environmental conditions such as operating temperature and gases can be extremely dangerous and life threatening when
humidity determine the sensing performance and the concentration levels exceed the threshold [22]. In the
characteristics of the thin film gas sensors. The operating context of receptor mechanism of metal oxide based gas
temperature influences the receptor function through its effect sensors, these gases can be classified as oxidizing (eg. CO2,
on the chemical dynamics at gas-solid interface and thus NO2) and reducing (eg. CO, SO2, NH3, H2S, C2H5OH) gases.
determines the important sensing properties such as response, The interaction of each of these gases with metal oxides will
selectivity, stability, response and recovery times [36]. In be discussed separately in the following sections.
addition, humidity level in the atmosphere has a larger
influence on the sensor response [21], as the water vapour 2.1. Wet atmosphere
absorbed on the metal oxide surface affects the electronic and Humidity poses a great challenge in the metal oxide
ionic conducting properties of the semiconducting metal based gas sensors. In many cases, increase of humidity in the
oxides. The review articles published so far have focused on atmosphere greatly impedes the response of sensor [21,71].
specific aspects such as general gas sensing principles The water undergoes dissociative adsorption on metal oxide
[20,35,43–51], response and conduction mechanisms [52–57], surfaces as given in Eq. 1 and the resultant ions will be
influence of structural parameters [58], nanostructures adsorbed on the metal oxide surface [72].
[28,29,34,39,59–65], environmental gases [22,31,66,67], and
the theory behind the gas sensing principle [44,68–70]. (1)
Although, numerous research articles have been published on
thin film based gas sensors, greater attention is required on the In wet atmosphere, ratio of water molecules to active
sensing behaviour of metal oxide materials especially of thin sites (metal in metal oxide) decides the adsorption mechanism.
film form, the relation between sensing characteristics and the Chemisorption mechanism is followed at low humidity level
most influencing parameters namely the operating while physisorption is observed at higher levels of humidity.
temperature, type and concentration of gas molecules. Hence, Heiland and Kohl [73] proposed two possible
in this review, we address the REDOX mechanisms associated mechanisms for explaining the effect of humidity on metal
with the interactions of metal oxide thin films of both n- and p- oxide surfaces, which were subsequently verified
type conductivities for the selected oxidizing and reducing gas experimentally [21,74,75] using the tin oxide material. As
molecules of different concentrations in dry and wet shown in Figure 2 and Eqs. 2 and 3, the mechanisms were
atmospheric conditions. For this review, the most toxic, simply based on the number of water molecules interacting
combustible and hazardous gases such as CO, CO2, NO2, SO2, with each lattice site on the metal oxide surface.
NH3, H2S and C2H5OH have been considered. And the
considered base materials are zinc oxide (ZnO), tin oxide ( )
(SnO2), indium oxide (In2O3), tungsten trioxide (WO3) and (2)
copper oxide (CuO), nickel oxide (NiO) as examples of n-type ( )
and p-type semiconductors respectively. (3)
2. Role of ambient atmosphere Figure 2(a) and Eq. 2 corresponds to a case of a water
molecule interacting with two metal oxides, where two Sn-OH
Receptor function, first phase of sensing dipoles are formed from the dissociated hydroxyl ion and by
phenomenon, is a chemical process between target gas in the combination of hydrogen ion and a lattice oxygen. Two free
atmosphere and metal oxide surface. The atmosphere is electrons are produced from each oxygen vacancy ( ) in the
composed of many gases; some of which aid, impede, or have lattice during the formation of Sn-OH bond. On the other hand,
negligible effect on the receptor function. The lower layer of if each water molecule interacts with only a single metal oxide
atmosphere is mainly composed of nitrogen, oxygen and water as shown in Figure 2(b) and Eq. 3, while, the dissociated
besides traces of other gases. The ambient of a metal oxide hydroxyl ions are bonded with each metal site, the hydrogen
surface while sensing is normally classified as dry and wet, ion diffuses into the lattice to bind with lattice oxygen, thus
based upon the humidity level. As will be discussed, in wet forming two hydroxyl bonds per metal site. The rooted OH
atmosphere, water molecules have a major role and influence group acts as a donor due to lower electron affinity and
on the receptor function while oxygen plays a decisive role in ionization. Therefore, irrespective of the mechanism,
the dry atmosphere. The dense water molecules and high adsorption of water molecules on the metal oxide surface
electronegativity of oxygen can make them easily adsorbed by changes the sensing properties of the metal oxide surface. It
the metal oxide surface, as electron acceptor. Similarly, the may be due to the change in conductivity from the free
interaction of target gas with metal oxide would cause changes electrons produced or change in the electron affinity due to the
in the resistance of the metal oxide. Therefore, the response of deep-rooted hydroxyl bonds or simply by the occupation of the
metal oxide towards a specific target gas is net change in active sites by the adsorbed water molecules.
resistance produced due to gas-solid interaction in the ambient Morrison [76], Henrich and Cox [77] have suggested
atmosphere. Thus, the response of a metal oxide surface another possible mechanism, co-adsorption of water molecules
strongly depends on the composition of atmosphere; especially on the other adsorbate. It seems to be a formation of water
water (wet atmosphere) and oxygen (dry atmosphere) which vapour layer on the surface due to higher humidity level.
defines the baseline for the sensor response and calibration. Figure 3 shows the schematic representation of humidity
sensing by metal oxide surface, described by Kannan et al.
Cognizure 3
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Figure 2. Mechanisms of humidity adsorption on the surface of tin oxide; (a) one water molecule for two metal sites and (b) one water
molecule per metal site.

Figure 3. Schematic representation of humidity sensing at ZnO (Reprinted with permission from Ref. [75] Kannan et al. Sens. Actuat. A
164 (2010) 8. © Elsevier Publishing).

[75]. It explains that, at low humidity, adsorption of water humidity levels, which is characteristic p-type behaviour.
molecules on the metal oxide surface obeys chemisorption However, Kannan et al. [75] have reported a decrease in
process as explained by Eq. 2 and 3 and at higher humidity resistance, indicating n-type behaviour. Figure 4 shows a
levels, all the active sites on metal oxide surface are occupied comparison of the resistance variation of ZnO films with
by water molecules and later it can be formed as an additional humidity reported by these authors. The approximate linear
layer on the surface following the physisorption process. The change in resistance with humidity up to 75% of RH in either
free movement of proton occurs along the water layer as cases show the donor behaviour of water molecules followed
shown in Figure 3 and during physisorption process, resistance by chemisorption explained by the Eq. 2 & 3 and Figure 2. The
of the film is decreased. Further increase in humidity leads to abrupt change in resistance at RH above 75% is because of the
co-adsorption where the water molecules try to dislodge the co-adsorption mechanism suggested by Morrison, Henrich and
adsorbents occupying the active sites. During the Cox. Bai et al. [21] and Hotovy et al. [79] have reported that
chemisorption, resistance drastically decreases while it is being RH around 50% is optimum for sensing gases by both n and p
slowed down during physisorption at higher humidity level - type materials. Since humidity severely affects the sensing
and the conductivity changes almost ceased during co- response of metal oxides towards gas molecules, it is
adsorption at much higher humidity levels. Author has customary to study and optimize the effect of humidity in the
reported that physisorption leads to capillary condensation and design and development of metal oxide based gas sensors.
the conduction process mainly follows Grotthuss transport
mechanism [75,78]. 2.2. Dry atmosphere
Bai et al. [21] have observed an increase in the The atmosphere with RH less than 20% humidity is
resistance of ZnO nanostructured thin films for relative termed as dry atmosphere. Apart from humidity, other
humidity (RH) levels from 10-75% and a decrease at higher components in the atmosphere such as nitrogen (N 2) and
4 Cognizure
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Figure 4. Resistance vs. Relative Humidity plot for n-type [75] and p-type [21] ZnO metal oxide thin films.

oxygen (O2) has a characteristic influence on the gas-solid Thus, the adsorption and desorption of oxygen molecules is
interaction. In the following section, the role of these associated with corresponding changes in the resistance
atmospheric gases in the sensing characteristics of metal measured on the metal oxide surface. The chemisorption
oxides has been discussed. process of oxygen on the metal oxide surface can be described
as given in Eq. 4 [57]. It can be seen that the concentration of
2.2.1. Nitrogen (N2) electrons on the metal oxide surface acts as an active site for
The molecular nitrogen is the most abundant gas in the oxygen adsorption. The number of electrons gained by the
atmosphere, but it is chemically non-reactive with other gas oxygen (O2) during the adsorption decides the ionic strength
molecules and metal oxide surface. The triple bond in the ( ) of the adsorbed species ( ). Barsan and Weimer
molecular nitrogen makes it a strong and chemically inactive [57] and Yamazoe et al. [15] reported that at higher
gas, as it requires more energy to break its bonds. Hao et al. temperatures, molecular species turn to atomic; either lattice
[80] demonstrated the chemical inactivity of nitrogen gas with ( ) or dissociative ( ), which can also be effectively
p-type semiconducting copper oxide. CuO thin film showed an enhanced by catalysts or dopants [20].
increase in electrical resistance when reacted with reducing
gas. When reducing gas was replaced gradually by nitrogen, (4)
then there was no change in the resistance besides the
reduction in resistance due to desorption of the reducing gas
molecules, proving the inertness of the nitrogen gas. The following Eq. 5 describes the adsorption process
Therefore, nitrogen is often used as carrier gas to study the in the case of oxygen deficient sites ) on the metal oxide
chemical kinetics of the interaction between a test gas and the surface. Oxygen from the ambient diffuses to the oxygen
metal oxide surface. vacant sites in metal oxide surface, by consuming one or two
free electrons. Thus, the chemisorption of oxygen molecules
2.2.2. Oxygen (O2) reduces the mobility of electrons leading to reduction in
In the atmosphere, oxygen is the second largest conductance in n-type materials as well as reduces the active
element after nitrogen. Oxygen plays a predominant role in the sites for further adsorption.
adsorption process due to its high electronegativity of about
3.65 and lone pairs of electrons, making it easily adsorbed on (5)
the surface of metal oxides. Diatomic oxygen is a non-reactive
species in the gas phase, while interacting with the metal oxide 2.3. Reduction-Oxidation (REDOX) mechanisms for
surface, it act as an electron acceptor and gets ionized [81] and oxidizing and reducing gas molecules
form an ionic layer on the surface. This helps in sorption of 2.3.1. Oxidizing gases
other gas molecules on to the metal oxide surface. In dry 2.3.1.1. Oxygen (O2)
atmosphere, chemisorbed oxygen molecule strongly influenced In the context of REDOX mechanisms, gases such as
the receptor function. Thus, the principle of metal oxide gas O2, NO2, CO2 which have the tendency to accept electrons
sensor mainly depends upon the oxygen concentration and its from the metal oxide surface, are termed as oxidizing gases.
rate of adsorption and desorption. During the adsorption Oxygen is the dominant one among oxidizing gases, which
process, the oxygen molecule gains an electron from the metal adsorbs quickly with metal oxide surfaces compared to others.
oxide surface and turned to ionic form ( ) [82]. Thus The adsorption can be enhanced by increasing the operating
electrons trapped on the surface of grains, and results in the temperature, using dopants and by reducing the grain size [20].
increase of the width of space charge region and hence the Below the temperature of 200 °C, O2 can accept one electron
height of potential barrier. This, in turn, reduces the and above 200 °C, it can accept two electrons from the metal
conduction of electron between the grains, which influence the oxide surface, and it is given in the Eqs. 6 and 7 [15,78]. The
transduction process of the metal oxide surface. In addition, adsorbed oxygen molecules/atoms are desorbed quickly, when
the grain boundary resistance also plays a crucial role in interacts with other gas molecules.
determining the surface resistance of the sensing element.
Cognizure 5
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(6) If the metal oxide thin film has oxygen vacancy in the
surface, nitrogen dioxide turns to nitrogen monoxide (NO) by
} (7) loss of one oxygen atom as given in Eqs. 16 and 17 to vacant
site in the metal oxide surface. The adsorption of oxygen from
the NO2 molecule on to the vacant site leads to decrease in
conductance of the n-type metal oxide [88]. X-ray
2.3.1.2. Carbon dioxide (CO2)
photoelectron spectroscopy (XPS) studies revealed the reaction
The linear bonded atoms of carbon dioxide (CO 2)
mechanism described in Eq. 18 of interaction of NO 2 gas
molecule have stable structure and there is no lone pair of
molecules with In2O3 surface [89] and the same phenomena
electrons to bond. Ostrick et al. [83] have reported that at low
was described with Au doped WO3 thin film [90]. Eq. 18
temperatures the dissociated hydroxyl and hydrogen ions from
explains that NO2 directly adsorbed on the metal sites by
water molecules at the surface of metal oxide react with
electron capture and desorbed as NO [91].
gaseous CO2 to form carbonate ions as given in Eqs. 8-
11, with the intermediate products, formate ions and
(16)
bicarbonate ions [72]. At high temperatures, CO2 molecules
interact with the layered oxygen ions ( to directly form ( ) (17)
carbonate ions [84] as given in Eq. 12. Thus, the consumption → →
of electrons by each CO2 molecule during its interaction with }

the metal oxide surface leads to reduction in conduction, which
(18)
can be used for sensing CO2.
2.3.2. Reducing gases
(8)
Reducing gases are those, which act as electron
(9) donors when interacting with metal oxide surface. During this
(10) interaction, reducing gases desorb or remove the chemisorbed
oxygen ions and physisorbed hydroxyl ions from the metal
(11) oxide surface. The variation in the resistance of the material is
(12) used to detect the concentration of reducing gases such as SO 2,
CO, H2, NH3, H2S and C2H5OH by the chemical changes
The observed chemical kinetics of CO2 molecule following REDOX reaction.
interaction is in close agreement with CdO nanostructured thin
film [85]. However, Kim and co-workers [71] have reported 2.3.2.1. Sulfur dioxide (SO2)
the CO2 detection behaviour of lanthanum coated tin oxide in Sulfur dioxide is one of the most toxic gases that
the ambient of dry air, pure oxygen, nitrogen as well as in wet makes the metal layer non-resistant by bonding with its strong
atmosphere. Lanthanum coated tin oxide showed better electron pairs. Normally NO2, SO2 reacts with water molecules
sensing performance in the oxygen atmosphere, compared to to form an acid in atmosphere that is given in Eq. 19.
others, while worst performance at the higher relative humidity
level. Besides the oxygen adsorption, CO2 molecules further (19)
oxidized the metal oxide surface and increase the surface
resistance. Here the interaction of stable CO2 on the surface In the wet atmosphere, hydroxide ions and SO2 make
achieved might be the existence of the additive lanthanum a surface more acidic, it strongly corrodes the material. At low
present on the surface [71]. Based on the results, the following humidity or dry atmosphere, SO2 molecules interact with
REDOX mechanism is proposed to explain the interaction of adsorbed oxygen on the surface to form sulfate (SO 4) ions and
oxygen and CO2 on the metal oxide surface. it increases the conductance of the n-type material. Further, the
continuous interaction of SO2 molecules directly bond with
(13) metal sites by completely desorbing the adsorbed oxygen from
the surface and continues to replace the lattice oxygen from the
first layer, and after the incorporation the resistance of it
2.3.1.3. Nitrogen dioxide (NO2) remains constant. The proposed mechanism is given in Eqs. 20
Nitrogen dioxide is a strong oxidizing agent and has and 21.
strong electrophilic property [86], which makes this molecule
to be quickly adsorbed on the metal oxide surface. NO 2 can (20)
react with metal oxide surface both in the presence and
absence of oxygen as given in the Eqs. 14 and 15 [87]. It can (21)
be seen that the oxidation of NO2 leads to the reduction of
conduction electrons in the conduction band. Rodriguez et al. [92] and Kim [93] investigated the
adsorption of SO2 on the ZnO and NiO surface. In ZnO,
formation of sulfite and sulfate on the surface was confirmed
(14) by XPS analysis. NiO material also showed the same process
and both the studies revealed the formation of sulfate, Eq. 22
explains the adsorption and desorption of SO2 on ZnO
material, the same process followed in NiO sample. If, oxygen
(15) vacancy or available metal (M) sites are more in the metal
oxide surface, then SO2 molecules react with the active sites
and forms sulfur and oxygen ( ). In n-type
6 Cognizure
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Figure 5. CO gas – SnO2 solid interaction mechanism at ambient temperature (Reprinted with permission from Ref. [74] Barsan et al.,
Fresenius. J. Anal. Chem. 365 (1999) 287. © Springer-Verlag).

material, chemical kinetics of SO2 molecules increases the


carrier concentration and it is due to the replacement of sulfate (27)
molecules on the surface instead of oxide ions [92].
Adsorption of protons on the surface, enhance the
(22) electron concentration, which is given in Eq. 27. The detection
of hydrogen in the oxygen atmosphere may follow the Eqs. 28
2.3.2.2. Carbon monoxide (CO) and 29. From these equations, one can determine the detecting
CO acts as a reducing agent, the oxidation of carbon limit of the metal oxide; hence, detection limit is associated
monoxide increases the electron concentration on the surface. with oxygen adsorption and operating temperature. Hao et al.
In dry atmosphere, carbon monoxide reacts with chemisorbed [80] have showed the detection of hydrogen using p-type CuO
oxygen to form carbon dioxide. In wet atmosphere, metal metal oxide and the reaction is depicted in Eq. 28.
oxide does not respond to lesser concentration of carbon
monoxide like in dry atmosphere. Under this situation, metal (28)
oxide surface led to the formation of formate (HCO2) ions, (29)
which is an intermediate during the oxidation of CO. There are
experimental and theoretical results/analysis that proposes the 2.3.2.4. Hydrogen sulfide (H2S)
REDOX mechanism given in Eqs. 23 and 24 [72] (Figure 5). In the metal oxide surface, H2S vapour strongly reacts
Weimer group investigated the interaction between the p-type with the metals to form elemental sulfur. Oxygen adsorption
CuO with CO, in the presence and absence of humidity, by on the metal oxide surface promotes the response of H2S
using the work function calculation and compared with the vapour, that is presumed by XPS studies and described in Eq.
experimental work. He observed that the presence of humidity 30 [97].
increased the response of metal oxide [94].
(30)

(23) The presence of H2S on the metal oxide surface can


(24) be confirmed by three possibilities [98].
Eq. 30 explains the strong reduction behaviour that
The detection of CO by metal oxide semiconductor in happens in dense oxygen atmosphere along with the bi-product
oxygen atmosphere is better than nitrogen and wet atmosphere of sulfur dioxide and water vapour.
[24]. Hubner et al. [95] showed the formation of carbon At low partial pressure of oxygen, H2S directly reacts
dioxide as a residue, during the interaction of carbon monoxide with lattice oxygen to form SO4 and produces the oxygen
on the surface of WO3. When the operating temperature is vacancy in the surface of the metal oxide which, in turn,
below and above 250 °C, then the REDOX mechanism follows increases the conductance as given in the Eq. 31 and this
the Eqs. 25 [96] and 26 [24] respectively. Both the equations process has been explained with the help of in situ XPS [99],
confirm that, operating temperature determines the limit of
detection for specific materials. (31)

(25) where denotes electrically neutral oxygen atoms in their


(26) lattice.
At zilch of oxygen in the atmosphere or after
2.3.2.3. Hydrogen (H2) continuous interaction of H2S on the surface, adsorbed oxygen
H2 molecules are adsorbed as protons on the thin film were completely desorbed and it led to direct interaction with
surface and desorbed as water vapour [72], and again interacts the surface and results in the formation of elemental sulfur.
with the surface as hydroxyl ions. Above 300 °C, hydrogen This sulfur can replace the lattice oxygen and the obtained
and water vapour can be evolved completely [59].
Cognizure 7
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Figure 6. H2S gas sensing mechanism on copper oxide thin film (Reprinted with permission from Ref. [101] Ramgir et al., Sens. Actuat. B
151 (2010) 90. © Elsevier Publishing).

reaction is said to be sulfurization reaction, which is given in laboratories and industries for various research purposes and
Eqs. 32 and 33. applications. Based on whether the surface of metal oxide is
acidic or basic, functional group of the adsorbed ethanol
(32) dissociates as water vapour or hydrogen molecule.
(33) Dissociation into water vapour (dehydration) or hydrogen
molecule (dehydrogenation) process led to desorption of
In situ Raman and impedance measurements also carbon dioxide gas molecule and water vapour via the
reveal the same reaction of sulfurization with tin oxide formation of cyclobutadiene (C2H4) and acetaldehyde
[98,100]. This same reaction was observed in the CuO thin (CH3CHO). Also, desorption of ethanol was determined by the
film, ( ), where copper sulfide partial pressure of oxygen in the ambient atmosphere. Cyclic
turned back to copper oxide when reacted with oxygen process of ethanol adsorption reduces the oxygen content in
( ) [101]. In WO3 material, wet the atmosphere, hence the intermediate products react with the
lattice oxygen in the metal oxide surface, and creates oxygen
atmosphere did not affect the response of H2S. It was shown vacancies in the lattice and these process are given in Eqs. 37-
that, 90% of RH slightly decreases the response value to 41 [96,110–116]. These REDOX mechanism process increases
~20% of total response [102]. the electron concentration in metal oxide surface by desorption
The following reaction scheme (Figure 6) and the of oxygen from the surface and lattice. However, the in-situ
resultant band bending sequence depicts the hydrogen sulphide gas chromatography study of ethanol reaction with metal oxide
interaction with CuO. material revealed the desorption of carbon dioxide from the
surface [117].
2.3.2.5. Ammonia (NH3)
The lone pair of electrons of NH3 provide strong (37)
electron acceptor behaviour. But it acts as an electron donor to
(38)
the metal oxide, when reacted with the adsorbed oxygen ions
on the surface by reverting the trapped electrons. Nguyen et al. (39)
[103] proposed the mechanism that generates free electrons (40)
accomplished by the number of oxygen ions reacted with NH 3 (41)
molecules, given in the Eqs. 34-36. Eq. 34 has been adopted
by most of the authors [104–108]. By the adsorption of dissociated H and OH ions on
the oxygen adsorbed surface of the metal oxide can modify the
surface to be acidic or basic nature. At low humidity level
} (34) (36%) lack of hydroxyl ions lead to follow the Eqs. 37 and 38,
while at higher humidity (96%), the mechanism will follow the
Eqs. 39 and 40, because of enhancement of hydroxyl ion
(35)
concentration. The infrared spectrum analysis confirmed that
(36) 50% of RH has not affected on the response of the sensor [21].

In humid atmosphere, the kind of reactions that takes 3. Role of metal oxides
place on the surface, which would modify its resistance are yet
to be investigated. However up to 60 and 72% of RH did not Metal oxide materials are the main source of gas
affect the sensing performance of the sensor [105,109]. sensor industry. The investigations on metal oxide revolve
around studying their properties and methods of increasing the
2.3.2.6. Ethanol (C2H5OH) sensitivity and selectivity towards specific gases at different
Ethanol is the most important organic molecule to be operating conditions. Specific metal oxides such as, Cr 2O3,
detected in the ambient since it is being used in many Mn2O3, Co3O4, NiO, CuO, SrO, In2O3, WO3, TiO2, V2O3,
8 Cognizure
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reported. These sensors showed a considerable response only


at the elevated operating temperatures. Noticeably, spray
pyrolysis deposited nanostructured ZnO thin film showed a
response of 40 towards 0.6 ppm concentration of NO 2 gas at an
operating temperature of 135 °C [87]. This is one of the best
NO2 sensors in detecting the lowest concentration. The
response of ZnO thin film to SO2 gas was found to be 3 at
300 °C [124]. Hierarchically porous ZnO nanosheets [126]
prepared using solvothermal method showed a response of
11.7 for 100 ppm of CO at 300 °C while ZnO thin film
deposited by atomic layer deposition technique showed an
appreciable response at room temperature [127] itself. These
results imply that the deposition methods could decide the
sensing characteristics of the materials. Though there are many
ZnO gas sensors available for sensing ammonia gas, majority
of them can sense only at the elevated operating temperatures
such as 200 °C [123] and 300 °C [105]. But recently our group
has reported a spray pyrolysis deposited nanostructured
undoped [109] and doped [128] ZnO thin films which showed
an excellent response of 233 and 2667 towards 25 ppm and 50
ppm of ammonia vapour at room temperature respectively.
Various forms of ZnO nanostructures namely nanowire,
nanorod, nanobelt, tetrapod structures and also single nanowire
shown in Figure 7 were considered for fabricating H2S sensors
[129]. Among them, ZnO nanowires showed good response
towards H2S and NO gases. Better response towards H2S
Figure 7. Surface morphology of (a) ZnO nanotetrapods, (b)
might be due to the change in grain boundary resistance, while
nanowires, (c) nanobelts and (d) tetrapods film deposited on
intra-grain resistance accompanied with grain boundary
alumina substrate. Isolated nanostructures aligned between gold
resistance for NO. This was supported by the electrical
electrodes with 25 µm separation: (e) three nanowires/belts
shown by arrows and (f) a nanobelt (Reprinted with permission
transport mechanism studied using impedance spectroscopy
from Ref. [129] Gupta et al., J. Chem. Sci. 122 (2010) 57. ©
measurements. However, ZnO nanorods synthesized by
Springer-Verlag). hydrothermal method showed a peculiar H2S sensing
characteristics [130]. In this case, nanorods detected the
Fe2O3, GeO2, Nb2O5, MoO3, Ta2O5, La2O3, CeO2, Nd2O3, ZnO, presence of 0.05 ppm of H2S at room temperature (~24 °C).
Ga2O3 and SnO2 are suitable for sensing because of their The same material effectively sensed 1 ppm of C2H5OH at
electronic structure [61]. The metal oxides can be classified as elevated temperature of 350 °C with better selectivity. Though
n-type and p-type based on the majority charge carriers. The n- there are many ZnO based ethanol sensors, many of them have
type (ZnO, SnO2, In2O3 and WO3) and p-type (NiO and CuO) shown better response only at the elevated operating
are the most promising materials in sensing applications. In temperatures [113,117,124,130–134] and very few reports are
this section, the performance of these metal oxides towards available for sensing ethanol at room temperature [135,136].
selected toxic gases; NO2, SO2, CO2, H2S, SO2, CO and Our group has recently reported a room temperature ethanol
C2H5OH have been discussed. sensor using spray pyrolysis deposited nanostructured ZnO
thin film [137]. From these observations, one can understand
3.1. n-type metal oxide the role of nanostructures, grain size, grain boundary
3.1.1. Zinc oxide (ZnO) resistance, operating temperature in fabricating gas sensors for
Zinc oxide is a versatile material among the metal different vapours/gases.
oxides and is used for several applications [118]. In gas
sensing applications, its n-type semiconducting property, 3.1.2. Tin dioxide (SnO2)
chemical stability, tunable transport properties, large exciton The n-type semiconducting and wide band gap
binding energy have made it as one of the most promising material namely SnO2 is one of the most exploited materials by
candidate. Sensing CO2 in the atmosphere using metal oxide the gas sensor industries. Since 1968, SnO2 has been
materials is a challenging process since the sensing mechanism dominating in the design of Taguchi commercial gas sensors.
is based on the reactivity of the target gas. Even though, few RF sputtered SnO2 thin film with rough and porous micro
metal oxide sensors including ZnO have been reported for surface showed a considerable response towards 1 ppm of NO2
sensing CO2, their sensitivity is found to be low and to date the gas [91] at 100 °C. This was achieved because of the number
underlying sensing mechanism is not known clearly. The of free Sn sites available on the porous surface which in turn
reactive sputter deposited ZnO thin film at the substrate depends on the growth kinetics during deposition and
temperature of 403 K showed a good response of 2.17 at room adsorption of oxygen ions on the surface. Electrostatic spray
temperature towards CO2 gas. The highly oriented (111) plane deposited SnO2 film showed a response of 1 for 20 ppm of
and the grain size of ~20 nm might be the reason for sensing SO2 at 100 °C [138]. Since the highly stable CO2 gas showed
CO2 gas [119]. NO2 can be sensed by, ZnO based thin film poor response when reacted with pure SnO2 metal oxide film,
sensors with different morphologies synthesized using physical researchers prepared doped SnO2 films as well as with
and chemical vapour deposition methods [120–125] were catalytic coatings to solve this very challenge. The catalyst
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Science Letters Journal Sci. Lett. J. 2015, 4: 126

Figure 8. (a) TEM image of SnO2 (a) nanoparticles, (b) nanorods and (c) nanoflowers (Reprinted with permission from Ref. [105] Rout et
al., Nanotechnology 18 (2007) 205504. © IOP Publishing Ltd.).

homogeneous precipitation ethanol-thermal method showed a


response of 25.8 towards 80 ppm of ethanol at room
temperature [143]. The similar nanocrystalline SnO2 grains
with size of ~ 6 nm synthesized by ultra-sonic spray pyrolysis
technique showed a response of 491 at an operating
temperature of 300 °C and possessed selectivity in the mixture
of methanol and isopropanol [114]. Surface modification by
altering the synthesis methods produced a different sensing
response.

3.1.3. Indium oxide (In2O3)


Indium oxide is an n-type semiconducting material
with direct band gap of 3.6 eV and indirect band gap of about
2.6 eV. It has been widely investigated next to SnO 2 and ZnO
in gas sensing applications. In2O3 thin film based NO2 sensors
were fabricated using sol-gel and electron-beam (EB)
Figure 9. SE micrograph of the (a) undoped In2O3 base film and techniques with 5, 6, 20 and 100 nm grain sizes respectively
(b) Au activated In2O3 film (Reprinted with permission from Ref. [144]. Thin film with 5 nm grain size showed a response of 60
[145] Steffes et al., Sens. Actuat. B 78 (2001) 106. © Elsevier for 1 ppm of NO2 at 150 °C. Authors have highlighted the role
Publishing). of agglomeration of particles, smaller crystallite and grain size
in sensing NO2 gas. Steffes et al. [145] reported that RF
lanthanum treated SnO2 thick film showed a response of 1.38 magnetron sputtered Au doped In2O3 thin films showed better
for 2000 ppm of CO2 at 400 °C in the atmospheric condition response towards SO2 gas than undoped In2O3. Figure 9 shows
[71]. Similarly, SnO2/Al2O3 combination showed a good the Au activated surface of the doped In2O3 film morphology.
response to CO2 gas [139]. Dip coated SnO2 thin films with Compared with pure In2O3, Au modified film exhibited better
different processing times showed a marked difference in the sensing properties because of the increased number of active
response characteristics of H2S detection. The response of thin sites. It also modified the electronic structure and made the
films synthesized with 1 hr stirring process showed a response thin film surface capable of interacting with SO2 molecule.
of ~400 for 68.5 ppm of H2S gas at 30 °C [140] while, the The influence of operating temperature was absent in the SO 2
samples made with 5 hr stirring process showed a response of sensing characteristics of Au modified In2O3 thin films.
81 for 3.4 ppm (lowest possible detection) at ~30 °C [141]. Mesoporous In2O3 nanofibers were prepared using
Hence the figure of merits of the gas sensors can be tuned by unique and cost-effective electro-spinning technique which
varying the synthesis processing. The thick film ammonia exhibited a response of ~530 for 100 ppm of CO gas in air
sensor was fabricated using SnO2 nanoparticles, nanorods and atmosphere at 300 °C [146]. The Brunauer-Emmett-Teller
nanoflowers as shown in Figure 8 [105]. Among them thick (BET) investigation unveiled that the sample had highest
film SnO2 nanoflowers showed good response and response surface area (48 m2 g-1) and pore diameter (10.3 nm) which, in
and recovery time. It might be due to the higher surface area turn, resulted in a strong sensing of CO. While sensing
relative to nanoparticle and nanorod structures. It is highly ammonia vapour, sol-gel synthesized In2O3 nanorods and
selective towards ammonia, than compared to H2, H2S and CO nanoparticles showed the response of ~20 and ~40 towards 80
gases. ppm at 300 °C [105]. In2O3 nanocrystals synthesized by
But these nanostructured materials showed no hydrothermal and chemical precipitation method [97] were
response for SO2. SnO2 thin films with different thickness used to detect H2S. The response was found to be good with
prepared using atomic layer deposition (ALD) technique [142] better selectivity in the presence of 11 gases [97]. Kulkarni and
showed the response of ~31 towards CO gas at 250 °C. Since Borse [147] investigated the CO gas sensing performance of
the generation and transduction of free electrons were the In2O3 thick films synthesized by screen printing method. Their
prerequisite of sensor material, developed thin film with sensor showed response towards the 500 ppm of a wide range
particular thickness and temperature yielded the maximum of gases like carbon dioxide, ethanol, ammonia, and liquefied
response. The nanocrystalline SnO2 powder with a grain size petroleum at 250-300 °C. At the same time it showed a
of 8 nm and surface area of 214 m2 g-1 prepared using considerable response towards 100 ppm of hydrogen sulfide
10 Cognizure
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Figure 11. Unit cell structure of cupric (CuO) and cuprous


(Cu2O) oxide (Reprinted with permission from Ref. [160] Pike et
al., Appl. Catal. A Gen. 303 (2006) 273. © Elsevier Publishing).

poor response of In2O3 film towards CO2 and SO2, it is hard to


find reports on In2O3. WO3 films synthesized by electro-
spinning method showed a response of ~1.5 for 100 ppm of
Figure 10. Polyhedral representation of the structure of
CO2 [153] and films developed by electrostatic deposition
orthorhombic β-WO3 looking down the (a) [100], (b) [010], and method showed a response of ~1 for 10 ppm of SO 2 at 200 °C
(c) [001] directions, and tetragonal α-WO3 looking down the (d) [154]. WO3 films prepared using thermal deposition showed
[100], (e) [111], and (f) [001] directions (Reprinted with comparatively a better response of 18.2 for 10 ppm of
permission from Ref. [159] Vogt et al., J. Solid State Chem. 144 ammonia vapour at 200 °C [152] than sensors synthesized by
(1999) 209. © Elsevier Publishing). other methods [90,108,151,153,155,156]. Noticeably, thermal
vapour deposited WO3 undoped and Pt sensitized nanorods
gas at 150 °C. In this work the significance of operating showed a better response towards CO gas [157]. The response
temperature was emphasized in determining the sensing was enhanced when the sensing layer was functionalized with
response. In2O3 nanocrystals synthesized by wet chemical Pt nanoparticles. Pt nanoparticles enhanced the active sites,
method, showed a linear response for 1 to 100 ppm of ethanol and ultimately enhance the redox reaction rate. Nanocrystalline
at 200 °C [148]. Authors have emphasized the sensing WO3 thick films showed an excellent response towards H2S at
behaviour due to the large contact area exhibit by face contacts room temperature [158]. The observed room temperature
between the nanocrystals. This result was found to be in sensing behaviour for 10 ppm of H2S with the remarkable
drastic contrast in the case of nanowire and nanorod structures response of ~104 might be due to the presence of grains with
with point contacts [148]. the tetragonal phase. The tetragonal phase of WO3 (Figure 10
a-c) was obtained by sintering the ultra-fine powder at 500 °C,
3.1.4. Tungsten trioxide (WO3) and it was found that 500 °C is the optimum sintering
WO3, an n-type semiconducting material having band temperature. However, the orthorhombic WO3 (Figure 10 d-f)
gap of 2.7 eV attracted researchers to investigate its sensing thin film with nanosheet morphology was synthesized by a
properties. „W‟ sites with different oxidation states of the non- simple sonochemical method showed a response of 15.6
stoichiometric WO3 triggered the researchers to investigate the towards 100 ppm of ethanol [155]. Figure 10 depicts the
chemistry of the surface reactions. The first investigation by tetragonal and orthorhombic crystal planes of WO 3 [159].
Sbervegleri et al. [149] on the response of WO3 towards NOx These results have highlighted the role of tetragonal [158] and
was an eye opener to use the same material for various gas orthorhombic [155] crystal phases of WO3 in tuning the
sensing studies. NO2 sensor using WO3 thin film was selectivity of the sensor.
fabricated by modifying the surface area by varying the
discharge gas in reactive sputtering technique [150]. These 3.2. p-type metal oxide
sensing elements with porous morphology and high effective 3.2.1. Copper oxide (CuO)
surface area exhibited a maximum response of ~450 towards Copper oxide, a p-type material exists as cupric
one ppm of NO2 at 200 °C. Similarly, mesoporous structured (CuO) and cuprous (Cu2O) oxide with narrow band gap of 1.2
WO3 thin film synthesized by low frequency AC – 1.5 eV and 2.12 eV respectively. The exchange of oxygen
electrophoretic method was used to detect 100 ppb of NO 2 gas from atmosphere and lattice oxygen vacancy during the
at 200 °C [151]. In a different way, WO3 films with sensing process, switches cupric to cuprous and vice versa.
agglomerated grains prepared using thermal evaporation Figure 11 shows the unit cell structure of cupric and cuprous
technique showed a significant response towards 100 ppb of oxide material [160]. This transformation plays a vital role in
NO2 at 100 °C [152]. These studies have strongly revealed the the chemical kinetics of gas – solid interaction.
role of enhanced surface area and hence the receptor function Nanocrystalline CuO thin film with monoclinic
of the sensing elements and at the same time, the agglomerated crystal structure synthesized by sol-gel method was used to
grains mended the transduction function. Because of the very detect both the oxidizing and reducing gases [161]. While
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mechanism where NiO film with different stoichiometric


conditions [168]. Authors have highlighted the influence of
oxygen vacancies in detecting SO2. NiO thin film sensor
synthesized using gas evaporation technique showed a
considerable response towards oxidizing (NO2) and reducing
(H2S) gases [169]. The selectivity of this sensor was
determined by the modulating operating temperature and the
authors observed a response for 10 ppm of NO 2 at 112.5 °C
and H2S at 150 °C. The NiO thin film fabricated employing
Figure 12. Plan view of (a) hollow NiO hemispheres and (b) 2-D colloidal template and sputtering methods exhibited a response
hexagonal close-packed arrays of hollow NiO hemispheres
of ~1.5 towards 5 ppm of C2H5OH [170]. While the hollow
(Reprinted with permission from Ref. [170] Gyu et al., Sens.
hemispherical morphology obtained by annealing the same
Actuat. B 155 (2011) 366. © Elsevier Publishing).
samples showed an enhanced response. The enhanced surface
to volume ratio and porosity of the hollow hemispherical
sensing NO2, it showed a response of ~1.5 for 100 ppm at an structures (Figure 12) might have promoted the gas solid
operating temperature of 200 °C. But it responded well with interaction and hence the response.
better selectivity towards H2S. Sputtered coated CuO thin film
with (020) orientation showed a considerable response towards 4. Discussion
CO2 gas [162]. The sensing performance of the films which
are sputtered with low and high deposition rate was The atmosphere in wet and dry states acts as a donor
investigated. Among these two films, film prepared at lower (reducing gas) and acceptor (oxidizing gas) of electrons
deposition rate showed a better response towards CO2 at the respectively from the surface of the metal oxide because of the
operating temperature of 160 °C. CuO thick film showed a presence of water vapour and oxygen. Therefore, the response
response towards 30 ppm of SO2 at 200 °C but further increase of a metal oxide is enhanced or reduced by the atmosphere
in the operating temperature had no influence on the response. towards a particular gas and depends on either the target gas or
Hollow and hierarchical CuO microspheres detected the type of material surface. Although some authors have reported
presence of CO gas and C2H5OH vapour at the operating better sensing of a particular metal oxide towards a target gas
temperature of 320 °C and 230 °C respectively [163]. The post in wet and dry atmospheres, in general both humidity and
annealed microspheres with compact and rough surface oxygen are present in varying ratios in a typical measuring
showed a response of ~12 towards 400 ppm of CO gas. CuO ambience. The laboratory studies are normally conducted in
microspheres synthesized by thermal evaporation method dry atmosphere because the adsorbed oxygen molecules
showed a response of ~250 towards 5 ppm of H 2S in the readily open the binding link for other gases and increases its
presence of other gases like Cl2, CO, NH3, NO and CH4 [101]. sensitivity. Further, higher operating temperatures suppress the
While the spin coated CuO thin film showed a response to H 2S humidity level and many cases enhance the reaction kinetics of
at 200 °C. Hence one could understand the role of operating the gas molecules. Recently, a ZnO sensor for ammonia with
temperature in tuning the sensor performance and in turn, the high selectivity and immunity to humidity was reported [109]
figure of merits. Nanocrystalline CuO powders with 27 nm implying that besides the ambient temperature, material
crystallite size were used to fabricate thick film ammonia properties of the metal oxide play an important role in deciding
sensor. Because of the high surface area, maximum porosity its sensing properties.
and catalytic activity [164], it exhibited a considerable All the gas molecules, have its own bond length, bond
response towards ammonia at room temperature. The CuO thin energies, HOMO and LUMO energy levels [171]. For
film deposited using spray pyrolysis technique showed a example, in the case of ethanol, bond energies of H-OC2H5, H-
response of ~25 towards 10 ppm of ethanol at room CH and H-CH2 bonds are 436, 452 and 473 kJ/mol
temperature [165]. While the same film which was annealed at respectively [130]. The close matching of these bond energies
400 °C showed an enhanced response. with respect to the surface energy of the metal oxide play an
important role in the selectivity and strength of adsorption of
3.2.2. Nickel oxide (NiO) gases on metal oxide surface. The possible orientations of
Chemically stable nickel oxide has excellent electrical ethanol molecule on the metal oxide surface during interaction
properties with the band gap of 4.3 eV. The nearly filled 3d are depicted in the Figure 13. The top three orientations in the
orbital plays a vital role in using this material for figure correspond to the fore-mentioned three binding
chemiresistive modulation. Since, the deposition methods and energies. By modifying the operating temperature, the bond
preparation conditions or parameters strongly influence or energies can be modified thus changing the favorable
determine the properties of thin film based sensing elements, orientation of the gas molecule and hence the strength of
NiO thin films were deposited by modulating the various adsorption. The operating temperature can also influence the
parameters using reactive magnetron sputtering to detect NO 2 semiconducting property of the metal oxides by increasing and
[79] and CO gases [166]. It was found that the material accelerating the carrier charges. It is also possible to switch the
synthesized with higher oxygen content of 40%, exhibited a nature of semiconductor between p-type and n-type. An author
response towards NO2 at 160 °C and CO at 420 °C. But the reported that at elevated temperature ceria effectively selects
NiO surface failed to compete with the discussed metal oxides the ethanol rather than tri-methylamine (TMA) whose nature
(ZnO, SnO2, In2O3, WO3 and CuO) towards the sensing of CO2 has been switched from n- to p-type [172].
and NH3 [167]. The interaction of SO2 molecules with the NiO From the REDOX mechanisms discussed for various
surface was investigated by Li and Henrich to understand the gases, it is clear that the transfer of electrons and number of

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Figure 13. The possible ways of ethanol molecule interacts on the metal oxide surface.

Table 2. Key parameters to be considered during the synthesis.

Sl. Synthesis method Optimizing Key parameters

1. Sputtering (RF/DC) Source – Substrate distance, Substrate temperature, Anode potential, Ratio of Argon and
other (oxygen) gas, Working pressure, Deposition time, DC: applied voltage and RF:
applied power and impedance matching
2. Spray pyrolysis Substrate temperature, Substrate-Spray nozzle distance, Spray nozzle/gun diameter,
Solution flow rate, Applied gas pressure, Applied frequency (power) – Ultrasonic spray and
Applied flame in the ambient – Flame spray
3. Sol gel Precursor medium, Stabilizing agent, Ratio of solute and stabilizing agent, Ageing
(Processing) time, Drying temperature, Preheating temperature
Dip Coating
Dip / Retrieval speed, Dip duration and Number of Dip
Spin Coating
Substrate rotation speed and Number of cycles
4. Hydrothermal Precursor medium, Surfactant, Processing temperature and duration, Washing method and
Medium, Drying temperature and duration and Sintering temperature and duration
5 Thermal Evaporation Target or Source, Reactive atmosphere, Working pressure, Applied voltage/current,
Substrate and target distance and Annealing temperature

electrons transferred between the metal oxide and target gas example, Zhou et al. have reported changes in the sensing
decides the response of the metal oxide. The charge transfer properties of SnO2 metal oxide thin films synthesized by sol-
between the metal oxide and the gases in turn depends on the gel (dip coating) towards detection of H2S gas by varying the
number of active sites available on the surface, which depends processing (stirring) time of the precursor solution from 1 hr
on the carrier density and the structural arrangements of the [140] to 5 hours [141]. This increase in processing time alters
surface. the material behaviour towards sensing. Similarly, the sensing
The metal oxide materials synthesized by various response can be optimized in the sputtering method by
methods such as sputtering, thermal evaporation, spray obtaining different crystal orientations through substrate
pyrolysis, sol-gel (dip and spin coating), sonochemical, vapour temperature. The ZnO thin films with 002 and 100 plane
phase solution and hydrothermal method produced thin films orientations have been obtained at substrate temperature of 153
with different morphologies like nanoparticles, nanorods, °C and 130 °C respectively [119]. The thin film with plane
nanowires, nanoflowers, etc. It can be seen that these materials orientation 100 reportedly has relatively smaller grain size of
have shown entirely different response behaviour towards 20.66 nm and showed better response for CO2 molecules.
various gases. The wide variations in the response and Thus, thin film surfaces with certain crystalline orientation and
selectivity behaviour of various metal oxides are due to the grain size has better sensing towards a particular gas molecule.
optimization of their respective synthesis parameters in Every crystallographic plane has its own surface state density,
addition to the operating temperature. Table 2 describes some electronic energy levels - donor/acceptor energy making the
key parameters to be considered in various synthesis methods. chemisorption characteristics. Hence, the response of a metal
The property of the metal oxide depends strongly on the oxide film towards a particular gas strongly depends on the
synthesis method and its preparation conditions [144]. For orientation of the crystal surface [58]. Further, morphology of
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Table 3. The material property and sensing parameter of zinc oxide material.

Lattice
Sensing Parameter
Synthesis Parameter Crystallite
Plane Morphology Ref.
method size (nm) Temperature
a (Å) c (Å) Gas Response
(°C)
Wet chemical ~ 10
101 3.24 5.21 18 Nanoflower CO 300 [178]
process (100 ppm)
~ 50
Sol-gel 002 3.25 5.2 15 Nanoparticles NH3 300 [105]
(80 ppm)
~ 37
Spin coating 101 3.265 5.214 73.48 Nanoparticles NO2 200 [123]
(100 ppm)
70-110/0.2- ~ 100
Hydrothermal 101 - - Nanorods H2S 25 [130]
1.3 (10 ppm)
Sputtering 100 - - 20.66 - CO2 100 ~ 2.17 [119]

Table 4. The ethanol sensing response of anion and cation doped – ZnO material.

Electronic Concentration Temperature


Synthesis method Dopants Response Ref.
configuration (ppm) (°C)
Al
Spray Pyrolysis [Ne]3s2 3p1 80 402 160 [23]
(1.8 at. %)
Al
Pulsed layer deposition [Ne]3s2 3p1 200 ~25 ~170 [175]
(wt. 3 %)
In
Spray Pyrolysis [Kr] 4d10 5s2 5p1 80 402 ~72 [23]
(6.5 at. %)
Sn
Dip [Kr] 4d10 5s2 5p2 300 300 ~58 [179]
(4at. %)
Mn
Spray Pyrolysis [Ar] 3d5 4s2 50 100 ~18 [180]
(4 at. %)
Fe
Spray Pyrolysis [Ar] 3d6 4s2 80 402 ~100 [23]
(1.1 at. %)
Hydrothermal method and Co
[Ar] 3d7 4s2 50 350 ~10.9 [181]
electrochemical process (1.8 %)
Cu
Spray Pyrolysis [Ar] 3d104s1 80 402 ~30 [23]
(3.6 at. %)

the metal oxide affects the response as it changes the number varying selectivity and sensing properties of thin films
of active sites for adsorption. Among, the ZnO based metal produced by different synthesis techniques.
oxide sensors with nanorod [134], nanowire [132], nanoflower Density functional study reveals that the electrical
[104], nanotube [131] and granular nanoparticle [173] properties and hence the sensing properties of zinc oxide
morphologies reported, granular nanoparticles were found to depends on its geometrical structure [70]. Spencer [70] have
have better response to ethanol. The grain size, which can be extended the study to show that the dopants can alter the
controlled by the synthesis parameters play a major role in electronic properties of the material and enhance the sensing
determining the sensing properties [174]. The sensitivity was response. The dopants can enhance the sensing characteristics
highly enhanced because of the grain size reduction [20] and it of the metal oxide surfaces by lowering the energy required for
is one of the most important factors of the metal oxides since it chemisorption of gas molecules. The precise choice of the type
controls all the operating characteristics of the gas sensor of dopant and optimizing its concentration is required for
[174]. For better understanding, let us consider ZnO as an getting better sensing performance [23]. The dopants in the
example to have an insight on the influence of synthesis metal oxide semiconductors can be broadly classified as
method on its structural and sensing properties. Table 3 n-type/anion (metal atoms such as Aluminium (Al), Gallium
provides a list of ZnO films produced by different synthesis (Ga), Indium (In) and Tin (Sn)) and p-type/cation (transition
methods along with their structural and sensing parameters. It metal atoms such as Manganese (Mn), Iron (Fe), Cobalt (Co),
can be seen that sensing property depends on all the structural and Copper (Cu)). Table 4 summarizes the sensing response of
properties listed and varying sensing characteristics can be ethanol for the selective dopants in the zinc oxide thin film. It
expected by choosing different synthesis method. can be seen that, ZnO with n-type dopant (Al) responded well
The lattice parameters of ZnO thin films listed in at room temperature [175] as well as at elevated temperatures
Table 3, corresponds to hexagonal wurtzite structure. [23]. Zhou et al. [176] have reported that compared to Li and
However, since different synthesis method is chosen, they 3d transition metal (Mn, Co and Cu) doping in ZnO, Al has
showed response to different gases and operating temperature better electrical conductivity. The impurity Al in ZnO
as they have different grain sizes, crystal orientations and increased the conductance by decreasing the grain and grain
morphology. The difference in the grain size, crystal boundary resistance than undoped ZnO. In contrast, Cu in ZnO
orientation and morphology modifies the nature of the active increased the grain and grain boundary resistance. Obviously,
sites for the adsorption of gas molecules. The direct it shows grain and grain boundary resistance can control and
dependence of carrier density on the grain or crystallite size, enhance the transduction and receptor function of the metal
surface morphology and crystal orientation explains the oxide gas sensor. Therefore, by doping with appropriate choice
14 Cognizure
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Science Letters Journal Sci. Lett. J. 2015, 4: 126

of the type and concentration of dopant material in metal Acknowledgements


oxide, the sensing properties can be enhanced by controlling
the grain size and grain boundary resistance. Further, doping The authors wish to express their sincere thanks to the
highly electronegative elements like fluorine has influenced Department of Science & Technology, New Delhi, India for
the sensing characteristics by the phenomena of grain their financial support (INT/SWD/VINN/P-04/2011). They
boundary scattering. As the consequence of this, the trend in also wish to acknowledge SASTRA University, Thanjavur for
change in resistance while interacting with gas is reversed, extending infrastructural support to carry out this work. We
which, in turn, can be used to enhance the selectivity of the would like to thank Dr. Gopinath Mudhana, Asst. Prof., for his
sensing element [177]. valuable suggestions.

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Cognizure 17
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Science Letters Journal Sci. Lett. J. 2015, 4: 126

John Bosco Balaguru Rayappan received his M.Sc. and


Ph.D. degrees in Physics from Bharathidasan University,
Tiruchirapalli, India, in 1996 and 2003 respectively. He is
currently working as a Professor in the School of Electrical &
Electronics Engineering and Centre for Nanotechnology &
Advanced Biomaterials (CeNTAB), SASTRA University,
Thanjavur, India. His current research interests include lattice
dynamics, fabrication of thin film based chemical & biosensors
and functional nanomaterials. He is also working in the field of
embedded systems and steganography.

Cite this article as:

Prabakaran Shankar et al.: Gas sensing mechanism of metal oxides: The role of ambient atmosphere, type of semiconductor
and gases - A review. Sci. Lett. J. 2015, 4: 126

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