Maintenance Guide

Agilent 4070 Series Semiconductor Parametric Tester

E3102-90200
October 2000

© Copyright 1999, 2000 Agilent Technologies

Legal Notice
The information contained in this document is subject to change without notice.
Copyright © 1999, 2000 Agilent Technologies.
This document contains information which is protected by copyright. All rights are
reserved. Reproduction, adaptation, or translation without prior written permission
is prohibited, except as allowed under the copyright laws.

Printing History
Edition 1 June 1999
Edition 2 January 2000
Edition 3 October 2000
 Contents

1. Maintaining Your System

Overview of Maintenance Tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Executing Diagnostics Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Diagnostics Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
To Execute Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
To Save or Load Test Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
To Execute Diagnostics from Command Line . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
To Execute Tests Selectively from Command Line . . . . . . . . . . . . . . . . . . . . 1-11
To Confirm Test Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
To Display and Print Test Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Replacing a Pin Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
Contents
1 Maintaining Your System

This guide describes maintenance tasks that Agilent 4070 user should perform.

1-1
Maintaining Your System
Overview of Maintenance Tasks

Overview of Maintenance Tasks

The 4070 users should perform the following maintenance tasks:
• Execute diagnostics program periodically.
Diagnostics program checks functionality of your system.
• Execute relay test of diagnostics program at least once a week.
This test checks and cleans the testhead relays.
If a relay test fails, replace failed pin boards. Refer to “Replacing a Pin Board”
for detail procedure.
• Execute SMU self-calibration at least once a day or when the temperature
changes more than 3 C since last SMU self-calibration.
/opt/hp4070/bin/hp4070 -smucal command immediately execute SMU
self-calibration.
Or you can execute SMU self-calibration from "Calibration" window, refer to
User's Guide for detail about "Calibration" window.
• At least once every three months press the EMO button on the front door of the
system cabinet to verify all AC power to the 4070 is turned off.
• At least once every three months verify the WAFER PROBER SENSE switch
on the testhead is working properly.

• When mounting the testhead on a prober

First verify the OUTPUT ENABLE indicator is on when the testhead makes
contact with either the personality board or prob card in a prober. Then take
the testhead apart by a manipulator or a hinge and verify the OUTPUT
ENABLE indicator is off.
• When using an E3140A test fixture adapter
First verify the OUTPUT ENABLE indicator is on when the fixture lid is
closed. Then verify the OUTPUT ENABLE indicator is off when the fixture
lid is opened.
• When using an E3146A cable extension fixture
First verify the OUTPUT ENABLE indicator is on when the E3146A is
installed on the testhead. Then verify the OUTPUT ENABLE indicator is off
when the E3146A is uninstalled.

1-2 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Overview of Maintenance Tasks

NOTE Performance Verification

The diagnostics program is not a performance verification, that is, does not verify
that your system meets its specifications.
To verify the performance of your system, contact your local Agilent Service Office.

NOTE Cleaning
To prevent dc leakage, do not touch measurement pins and measurement paths.
If you want to clean the external chassis of system cabinet or instruments, do as
follows:

1. Disconnect main power cable of system cabinet to prevent electrical shock.

2. Use a dry or slightly wet cloth to clean the external chassis of system cabinet or
instruments.

NOTE Working Environment

This product is designed with ergonomic considerations in mind. For details about
the working environment, refer to Working in Comfort. The 4070 is designed to be
operated from a standing position.

Agilent 4070 Maintenance Guide, Edition 3 1-3

Maintaining Your System
Executing Diagnostics Program

Executing Diagnostics Program

This section describes how to execute the diagnostics program.

Diagnostics Overview
Diagnostics program is used to check the following functionality of your system
hardware resources:

• Testhead Selftest Executes selftests for testhead CPU, high-resolution ADC,

SMU, and GNDU.
• Reference Configuration Check Confirms hardware existence and power line
frequency setting by using system configuration file.
• Relay Test Checks relay operation in testhead. This test also cleans the relays.
You should execute this test at least once a week.
• HF Matrix Relay Test Checks relay operation for HF Matrix.
• GNDU Test Checks voltage potential of GNDU.
• SMU V/I Test Checks SMU output and measurement functions.
• DC Leakage Test Checks the isolation of each path.
• CMU C/G Test Checks the capacitance measurement function of CMU.
• CMU DC Bias Test Checks the dc bias function of CMU.
• DVM Test Executes selftest and checks the differential voltage measurement
function of DVM.
• PG Selftest Executes seleftests for PGs.
• PG Connection Test Checks PG hardware connection by using PG connection
information file.
• Pulse Switch Test Checks relay operation in pulse switch.
• PG Output Level Test Checks pulse output level.
• PG Trigger Test Checks the trigger distribution of PGs.

1-4 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

To Execute Diagnostics
1. Make sure all measurement pins are open:

• If you use test fixture, confirm that no DUT is connected to test fixture.
• If you use wafer prober, lower the chuck of the wafer prober so that all probe
needles are open (do no make contact).
2. Execute /opt/hp4070/bin/diag4070.
$ diag4070
3. The Diagnostics window opens.

4. Select test to be executed.

By default, all test categories, all SMUs, and all switching matrix pins are
selected to be tested.
You can change the test selection by using the selection buttons at test selection
area on the Diagnostics window.
Test Category Selection The top button toggles between All
Tests and Selected Tests.

Agilent 4070 Maintenance Guide, Edition 3 1-5

Maintaining Your System
Executing Diagnostics Program

If you toggle to Selected Tests, check

buttons appear for selecting test
categories.
SMU Selection This area appears only if All Tests or an
SMU-related test is selected in Test
Category Selection area.
This button toggles between All SMUs
and Selected SMUs.
If you toggle to Selected SMUs, check
buttons appear for selecting SMUs.
Pin Selection This area appears only if All Tests or
Relay test is selected in Test Category
Selection area.
This button toggles between All Pins
and Selected Pins.
If you toggle to Selected Pins, an area
appears for selecting measurement
pins, and check buttons appear for
selecting the chuck pin and input
selection board.
5. Click Start button at Test Control area to start diagnostics test.
Test status is displayed at Test Status area during a test as follows.
Summary Indicator Top area of Test Status area. When the
4070 successfully passes first test
category, "Pass" in green text appears.
If any test fails, this changes to "Fail" in
red text, and does not change to green
even if following tests pass.
The red or green text is cleared by the
next diagnostics start action.
Log Display area Summarized test log is displayed in this
area.
Displayed log is reset by the next
diagnostics start action
Status Display area Displays the present status of a test.

1-6 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

NOTE Test Execution Control

You can stop or repeat test execution from Test Control area.
Repeat button If this check button is selected, you can
specify how many times to execute the
diagnostics test.
Break action button Stops diagnostics test.

NOTE If your system fails the diagnostics program

1. Confirm the connections of all instruments.
2. Confirm that all measurement pins are open.
3. Execute the failed test again.
4. If your system fails diagnostics program again, contact your local Agilent
Service Office.

Agilent 4070 Maintenance Guide, Edition 3 1-7

Maintaining Your System
Executing Diagnostics Program

To Save or Load Test Selection

You can save test selection information into a file and load it from a file later.
• To save test selection information into a file:

1. Choose File: Save Test Selection menu of the Diagnostics window.

2. Open Test Selectiondialog.
Enter a file name where test selection information is saved.
• To load test selection information from a file:

1. Choose File: Load Test Selection menu of the Diagnostics window.

2. Open Test Selectiondialog.
Enter a file name to be loaded.

1-8 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

To Execute Diagnostics from Command Line

You can execute diagnostics program without GUI window as follows:
1. Make sure all measurement pins are open:

• If you use test fixture, confirm that no DUT is connected to test fixture.
• If you use wafer prober, lower the chuck of the wafer prober so that all probe
needles are open (do no make contact).
2. Execute /opt/hp4070/bin/diag4070 as follows:
$ diag4070 -all
If you want to execute tests selectively, refer to “To Execute Tests Selectively
from Command Line”.

NOTE You can repeatly execute diagnostics as follows:

$ diag4070 -all -repeat times
Specify repeat number of times to execute.

3. Test results are displayed on screen:

$ diag4070 -all
PASS:(100)TestheadSelftest

PASS:(110)ReferenceConfigurationCheck

PASS:(120)RelayTest

PASS:(121)HFMatrixRelayTest

PASS:(130)GNDUTest

PASS:(131)SMUV/ITest

PASS:(132)DCLeakageTest

PASS:(140)CMUC/GTest

PASS:(141)CMUDCBiasTest

PASS:(150)DVMTest

PASS:(160)PGSelftest

PASS:(161)PGConnectionTest

PASS:(162)PulseSwitchTest

PASS:(163)PGOutputLevelTest

PASS:(164)PGTriggerTest

Agilent 4070 Maintenance Guide, Edition 3 1-9

 Maintaining Your System
Executing Diagnostics Program

NOTE If you connect system unsupported instruments to AUX ports

The diag4070 -all command does not execute the relay test of AUX ports connected
to system unsupported instruments. In this case, use -manual option instead of -all
option:

1. Disconnect system unsupported instruments from the AUX connectors of

testhead.
2. Execute the following:
$ diag4070 -manual
3. The following message is displayed.
$ diag4070 -manual
You select a manual mode. Is it OK?
Type c (continue) or b (break), then press Return.
4. Type c, then press Return key.
The -manual option executes the same tests as -all plus the relay test for AUX ports
of system unsupported instruments.
If you only want to execute the relay test for AUX ports of system unsupported
instruments, execute the following:
diag4070 -manual -category120
For usage of -category option, refer to next section, “To Execute Tests Selectively
from Command Line”.

1-10 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

To Execute Tests Selectively from Command Line

The diag4070 command has following options to execute only desired tests:
• -category number
Specify number of desired tests to execute:

Test number Description

100 Testhead Selftest

110 Reference Configuration Check

120 Relay Test

121 HF Matrix Relay Test

130 GNDU Test

131 SMU V/I Test

132 DC Leakage Test

140 CMU C/G Test

141 CMU DC Bias Test

150 DVM Test

160 PG Selftest

161 PG Connection Test

162 Pulse Switch Test

163 PG Output Level Test

164 PG Trigger Test

$ diag4070 -category 120

$ diag4070 -category 140 141

Agilent 4070 Maintenance Guide, Edition 3 1-11

Maintaining Your System
Executing Diagnostics Program

• -smu number
Specify number of desired SMUs to test. The SMU related tests (SMU V/I Test:
131 and DC Leakage Test: 132) are executed only for the specified SMUs.
$ diag4070 -smu 2 3
The above example executes all tests, but executes the SMU related tests only
for SMU2 and SMU3.
$ diag4070 -smu 2 3 -category 131
The above example only executes the SMU V/I Test and only for SMU2 and
SMU3.
• -pin number
Specify number of desired measurement pins to test in Relay Test.
$ diag4070 -pin 24
The above example executes all tests, but executes the Relay Test only for pins 2
and 4.
$ diag4070 -pin 2 4 -category 120
The above example only executes Relay Test, and only for pins 2 and 4.
• -chuck
The Relay Test for the chuck pin is executed.
• -input
The Relay Test for the input board is executed.
• -file name
Specify a name of test selection file that is saved from diagnostics GUI window.
To save a test selection file, refer to “To Save or Load Test Selection”.
You can not specify this option with “-all”, “-category”, “-smu”, “-pin”,
“-chuck”, and “-input”.

1-12 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

To Confirm Test Result

The test results of diagnostics program will be written to the
/var/opt/hp4070/diag/log file in ASCII format.
The /var/opt/hp4070/diag/log file includes the:

• time when diagnostics started

• results of diagnostics
• messages for troubleshooting
• time when diagnostics finished

NOTE The diagnostics results are added to the /var/opt/hp4070/diag/log file, so that the
latest results are at the end of the file. To see the latest results, open the file with a
text editor, and go to the end of the file.

Agilent 4070 Maintenance Guide, Edition 3 1-13

 Maintaining Your System
Executing Diagnostics Program

To Display and Print Test Data

After diagnostics, the test data is stored in the /var/opt/hp4070/diag/DIAGdata file.
If you need to report the test results, you can use the quick formatter, which is
included in the 4070 system software, to display and print out test results. The
following describes how to display and print test results using the quick formatter.

1. Click Quick Formatter... in the diagnostics window, or execute the view4070

command in the terminal window.

Figure 1-1 Quick Formatter Window

2. Select the File: Load: File menu in the quick formatter window, and choose the
data file. The diagnostics data file is stored in the /var/opt/hp4070/diag directory.
3. To print out the diagnostics data displayed in the quick formatter window:
a. Click Print... in the quick formatter window. The print window appears.
b. Type the printer name.

1-14 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Executing Diagnostics Program

c. Click OK.
4. To store formatted data in a text file:

a. Click Print... in the quick formatter window. The print window appears.
b. In the print window, type:
cat>file_name

Agilent 4070 Maintenance Guide, Edition 3 1-15

 Maintaining Your System
Replacing a Pin Board

Replacing a Pin Board

CAUTION Do not touch the testhead board with bare hands. When you remove the testhead
boards, put on the lint free gloves (Agilent part number 9300-0148). Oil,
perspiration, and dirt may degrade measurement accuracy.

Bottom
cover

Power
switch

Screws
Screws
2. Remove the inner plate. (hex screwdriver H5)
1. Turn off the testhead power, and remove the
bottom cover. (hex screwdriver H3)

Cable clamps
Screw
3. (4073A only) Remove the cable clamps. (flat-blade screwdriver)

1-16 Agilent 4070 Maintenance Guide, Edition 3

 Maintaining Your System
Replacing a Pin Board

4. Remove the measurement pin socket. 5. Remove the pin board.

6. Replace with the new pin board and put back all parts in the inverse order.

Agilent 4070 Maintenance Guide, Edition 3 1-17