Pfeiffer Adixen HIPACE1200

OPERATING INSTRUCTIONS EN
Translation of the Original
HIPACE 1200
Turbopump
Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/72
Table of contents
Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Product variants affected 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 10
2 Safety 11
2.1 General safety instructions 11
2.2 Safety instructions 11
2.3 Safety precautions 16
2.4 Limits of use of the product 16
2.5 Proper use 17
2.6 Foreseeable improper use 17
3 Product description 18
3.1 Identifying the product 18
3.1.1 Product types 18
3.1.2 Product features 18
3.2 Functional properties 18
3.2.1 Cooling 19
3.2.2 Rotor bearing 19
3.2.3 Drive 19
3.3 Shipment 19
4 Transportation and Storage 21

4.1 Transport 21
4.2 Storage 22
5 Installation 23
5.1 Preparatory work 23
5.2 Connecting the high vacuum side 23
5.2.1 Requirements for the dimensioning of a counter flange 23
5.2.2 Considering the earthquake protection 24
5.2.3 Using a splinter shield or protective screen 25
5.2.4 Using the vibration compensator 25
5.2.5 Mounting orientations 25
5.2.6 Attaching ISO-K flange onto ISO-K 26
5.2.7 Attaching ISO-K flange to ISO-F 27
5.2.8 Attaching ISO-F flange to ISO-F 28
5.2.9 Fastening CF flange to CF-F 30
5.3 Filling the operating fluid 31
5.4 Connecting the fore-vacuum side 33
5.5 Connecting the cooling water supply 34
5.6 Connecting accessories 35
5.6.1 Connecting accessories to the turbopumps 36
5.6.2 Connecting sealing gas 36
5.6.3 Connecting a venting valve 37
5.6.4 Installing a heating jacket 38
5.7 Connecting the electrical supply 39
5.7.1 Grounding the vacuum pump 39
5.7.2 Establishing the electric connection 40
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Table of contents
6 Operation 41
6.1 Commissioning 41
6.2 Operating modes 42
6.2.1 Operation without operating unit 42
6.2.2 Operation via connection "E74" 42
6.2.3 Operation via multi-function connection "remote" 42
6.2.4 Operation via Pfeiffer Vacuum display and control unit 42
6.2.5 Operation via field bus 43
6.3 Switching on the turbopump 43
6.4 Operation monitoring 44
6.4.1 Operating mode display via LED 44
6.4.2 Temperature monitoring 44
6.5 Switching off and venting 44
6.5.1 Switching off 44
6.5.2 Venting 45
7 Maintenance 46
7.1 General maintenance information 46
7.2 Maintenance intervals and responsibilities 46
7.3 Changing the operating fluid 46
7.3.1 Draining the operating fluid 47
7.3.2 Filling the operating fluid 48
7.4 Replacing the electronic drive unit 49
7.5 Confirming the speed specification 51
8 Decommissioning 52
8.1 Shutting down for longer periods 52
8.2 Recommissioning 52
8.3 Disposing of the vacuum pump 53
9 Malfunctions 54
10 Service solutions from Pfeiffer Vacuum 57
11 Spare parts 59
12 Accessories 60
13 Technical data and dimensions 61

13.1 General 61
13.2 Technical data 61
13.3 Dimensions 67
Declaration of conformity 70
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List of tables
List of tables
Tbl. 1: Abbreviations used in this document........................................................................10
Tbl. 2: Permissible ambient conditions................................................................................ 16
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps...................................18
Tbl. 4: Turbopump features................................................................................................. 18
Tbl. 5: Drive power depending on the supplied mains voltage............................................ 18
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection....
24
Tbl. 7: Behavior of pumping speed when using a splinter shield or protective screen........ 25
Tbl. 8: Requirements on the cooling water composition......................................................34
Tbl. 9: Requirements on the cooling water connection........................................................34
Tbl. 10: Factory pre-set accessory connections on the electronic drive unit......................... 36
Tbl. 11: Tightening torque for heating jacket fastening screws............................................. 39
Tbl. 12: Terminal lay-out of the power supply connector.......................................................40
Tbl. 13: Preconfigured settings for turbopumps when delivered........................................... 42
Tbl. 14: Behavior and meaning of the LEDS of the electronic drive unit............................... 44
Tbl. 15: Factory settings for delayed venting in turbopumps................................................. 45
Tbl. 16: Characteristic nominal rotation speeds of the turbopumps...................................... 51
Tbl. 17: Troubleshooting turbopumps....................................................................................56
Tbl. 18: Available spare parts................................................................................................ 59
Tbl. 19: Conversion table: Pressure units..............................................................................61
Tbl. 20: Conversion table: Units for gas throughput.............................................................. 61
Tbl. 21: Technical data for HiPace 1200 Standard................................................................63
Tbl. 22: Technical data for HiPace 1200 U............................................................................64
Tbl. 23: Technical data for HiPace 1200 C............................................................................66
Tbl. 24: Technical data for HiPace 1200 UC......................................................................... 67
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List of figures
List of figures
Fig. 1: HiPace 1200 design (example: standard version, DN 200 ISO-F | U-version
DN 200 ISO-K)......................................................................................................... 19
Fig. 2: Slinging points for transport of the turbopump in the standard and U versions........22
Fig. 3: Example: Secure against displacement and tipping caused by external vibrations....
24
Fig. 4: Mounting orientations of the standard version, upright.............................................26
Fig. 5: Mounting orientations of the U version, overhead.................................................... 26
Fig. 6: Alignment of the fore-vacuum connection with horizontal mounting orientation.......26
Fig. 7: Flange connection ISO-K to ISO-F, bracket screws.................................................27
Fig. 8: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole.............27
Fig. 9: Flange connection ISO-K to ISO-F, stud screw and tapped hole.............................28
Fig. 10: Flange connection ISO-K to ISO-F, stud screw and through hole............................28
Fig. 11: Flange connection ISO-F, hexagon head screw and tapped hole............................29
Fig. 12: Flange connection ISO-F, hexagon head screw and through hole.......................... 29
Fig. 13: Flange connection ISO-F, stud screw and tapped hole............................................29
Fig. 14: Flange connection ISO-F, stud screw and through hole.......................................... 29
Fig. 15: Flange connection CF-F, hexagon head screw and through hole............................30
Fig. 16: Flange connection CF-F, stud screw and tapped hole............................................. 30
Fig. 17: Flange connection CF-F, stud screw and through hole............................................31
Fig. 18: Removing the protective cap on U- or standard versions.........................................32
Fig. 19: Position of the operating fluid filler screws depending on orientation of the turbo-
pump.........................................................................................................................32
Fig. 20: Example of fore-vacuum connection........................................................................ 33
Fig. 21: Cooling water connection......................................................................................... 35
Fig. 22: Connecting the sealing gas valve.............................................................................37
Fig. 23: Connection of the heating jacket.............................................................................. 38
Fig. 24: Example: Connecting the grounding cable...............................................................39
Fig. 25: Removing the protective cap on U- or standard versions.........................................47
Fig. 26: Position of the operating fluid drain plugs depending on orientation of the turbo-
pump.........................................................................................................................47
pump.........................................................................................................................48
Fig. 28: Replacing the electronic drive unit – Removal......................................................... 49
Fig. 29: Replacing the electronic drive unit – Installation...................................................... 50
Fig. 30: Replacing the electronic drive unit – Fastening........................................................50
Fig. 31: Spare parts HiPace 1200......................................................................................... 59
Fig. 32: HiPace 1200 | DN 200 ISO-K................................................................................... 67
Fig. 33: HiPace 1200 | DN 200 ISO-F................................................................................... 68
Fig. 34: HiPace 1200 | DN 200 CF-F.....................................................................................68
Fig. 35: HiPace 1200 U | DN 200 ISO-K............................................................................... 68
Fig. 36: HiPace 1200 U | DN 200 ISO-F................................................................................69
Fig. 37: HiPace 1200 U | DN 200 CF-F................................................................................. 69
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About this manual
1 About this manual

IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the
designated product and provide the most important information for safe usage of the product. The de-
scriptions comply with applicable directives. All information provided in these operating instructions refer
to the current development status of the product. The documentation remains valid as long as the cus-
tomer does not modify the product in any way.
1.1.1 Applicable documents
Document Number
Operating instructions, Electronic drive unit TC 1200, standard PT 0239 BN
Operating instructions, Electronic drive unit TC 1200 PB, Profibus PT 0269 BN
Operating instructions, Electronic drive unit TC 1200 E74, according to PT 0303 BN
Semi E74
Operating instructions, Electronic drive unit TC 1200 DN, DeviceNet PT 0353 BN
Operating instructions, Electronic drive unit TC 1200 EC, EtherCat PT 0455 BN
Declaration of conformity A component of these in-
structions
1.1.2 Product variants affected

● HiPace 1200 Standard, DN 200 ISO-K
● HiPace 1200 Standard, DN 200 ISO-F
● HiPace 1200 Standard, DN 200 CF-F
● HiPace 1200 U, DN 200 ISO-K
● HiPace 1200 U, DN 200 ISO-F
● HiPace 1200 U, DN 200 CF-F
● HiPace 1200 C, DN 200 ISO-K
● HiPace 1200 C, DN 200 ISO-F
● HiPace 1200 C, DN 200 CF-F
● HiPace 1200 U C, DN 200 ISO-K
● HiPace 1200 U C, DN 200 ISO-F
● HiPace 1200 U C, DN 200 CF-F
1.2 Target group
This operating instructions are aimed at all persons performing the following activities on the product:
● transport,
● setup (installation),
● usage and operation,
● decommissioning,
● maintenance and cleaning,
● storage or disposal.
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
7/72
About this manual
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
► This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.
Rating plate (example)

D-35614 Asslar Rating plates of individual assemblies are located on the
Mod. HiPace 1200
P/N PM P03 910 lower part of the turbopump or on the relevant attachments.
S/N --------
Oil PM 006 336 -T TÜV Rheinland
n, f 37800 1/min, 630 Hz C US
Mass 27 kg Made in Germany 2018/05
Operating manual note

Do not open!
before having read the This sticker indicates that this operating manual must be
operating instructions
Nicht öffnen! read before performing any tasks.
Erst Betriebsanweisung lesen
Prima d’aprire,
leggerele instruzioni d’uso
Pas ouvrir !
il faut lire d’abord
l’instruction de
service
Vor Inbetriebnahme Pumpe mit Öl Operating fluids note

füllen. This sticker emphasizes the necessity to fill the turbopump
Fill the pump with oil before putting with operating fluid before commissioning.
into operation.
Remplir la pompe d’huile avant la
mise en route.
8/72
About this manual
Mounting orientation upright note

This sticker depends on the variant. The sticker shows the
valid spatial positions for the installation and operation of
the turbopump.
Overhead mounting orientation note

This sticker depends on the variant. The lsticker shows the
valid spatial positions for the installation and operation of
the turbopump.
ACHTUNG!
Wird F3-Öl über 300 °C erwärmt, entstehen giftige Dämpfe,
F3 operating fluid note
die den Atemwegen schaden! F3-Öl nicht mit Tabakwaren in
Berührung bringen! Die üblichen Vorsichtsmaßnahmen im
Umgang mit Chemikalien beachten!
This sticker provides information on the safe handling of
ATTENTION!
If oil F3 will be heated to more than 300 °C poisonous vapours hazardous substances.
come out whhich are noxious for the respiratory organs! Do not
bring oil F3 in contact with tobaccos! Care for the usual pre-
cautions for treating chemicals!
ATTENTION !
Quand on chauffe l’huile F3 à une température supérieure à
300 °C, il se forment des vapeurs toxiques, misibles pour les
organes de la respiration! Le contact de l’huile F3 avec des
produit en tabac doit être évité! Il faut faire attention aux pré-
cautions usuels pour le traitement des substances chimiques!
Operating fluid filler screws note

Öleinfüll- und Ablassschraube nur dann öffnen
wenn Pumpe auf Atmosphärendruck geflutet
This sticker provides information on the safe handling of the
Do not open oil-filling or oil-drain flange
unless interior of the pump is under atmos- screws on the operating fluid pump.
pheric pressure
Ne pas ouvrir les brides d’entrée d’huile et
de vidange si l’interieur de la pompe ne se
trouve pas sous pression atmosphérique
Operating fluid filler screw

This sticker describes the position of the respective filler
screw for operating fluid.
Protection class
This sticker describes protection class 1 for the product.
The positioning indicates the position for the ground con-
nection.
Cooling water connection
COOLING WATER IN
This sticker indicates the position and conditions for the
max. 6 bar (90 psi)
cooling water supply of the turbopump.
Cooling water connection

COOLING WATER OUT This sticker indicates the position for the cooling water dis-
charge of the turbopump.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging or removing a
closure seal results in loss of the warranty.
Sealing gas connection note

PURGE This sticker indicates the position for the exclusive sealing
gas connection.
9/72
About this manual
1.3.4 Abbreviations
Abbreviation Meaning in this document

AC Alternating current (AC)
d Diameter value (in mm)
DCU Display Control Unit (Pfeiffer Vacuum display and control unit).
DN Nominal diameter as size description
f Rotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Illuminating diode
PE Earthed conductor (protective earth)
[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
T Temperature (in °C), property abbreviation of the turbopump
TC Turbopump electronic drive unit (turbo controller)
WAF width across flats
U Overhead version, property abbreviation of the turbopump
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 1: Abbreviations used in this document
10/72
Safety
2 Safety
2.1 General safety instructions
This document includes the following four risk levels and one information level.
DANGER
Imminent danger
Indicates a hazardous situation which, if not avoided, will result in death or serious injury.
► Instructions on avoiding the hazardous situation
WARNING
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.
NOTICE
Danger of property damage
Notice is used to address practices not related to physical injury.
► Instructions on avoiding property damage
Notes, tips or examples indicate important information on the product or on this

document.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Risk of serious injury from swinging, toppling or falling objects
During transport, there is a risk of crushing and impact on swinging, toppling or falling objects. There
is a risk of injuries to limbs, up to and including bone fractures and head injuries.
► Secure the danger zone if necessary.
► Pay attention to the center of gravity of the load during transport.
► Ensure even movements and moderate speeds.
► Observe safe handling of the transport devices.
► Avoid sloping attachment aids.
► Never stack products.
► Wear protective equipment, e.g. safety shoes.
11/72
Safety
Risks during installation
DANGER
Danger to life from electric shock
Contact with exposed and live elements generate an electric shock. Incorrect connection of the mains
supply leads to the risk of live housing parts that can be touched. There is a risk to life.
► Before the installation, check that the connection leads are voltage-free.
► Make sure that electrical installations are only carried out by qualified electricians.
► Provide adequate grounding for the device.
► After connection work, carry out an earthed conductor check.
WARNING
Danger to life from electric shock due to improperly performed installation
The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal
situations arise due to unsafe or incorrectly installation when reaching into the device.
► Ensure that the system is safely integrated into an emergency off safety circuit.
► Do not carry out any unauthorized modifications or changes to the device.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
Opening the high vacuum flange enables access to sharp-edged parts. A manual rotation of the rotor
increases the danger situation. There is a risk of cut injuries up to a piece of your body being severed
of (e.g. finger tips). There is a risk of hair and loose clothing being drawn in. Objects dropping into the
turbopump will destroy the pump in subsequent operation.
► Remove the original protective cover only immediately prior to connecting the high vacuum
flange.
► Never reach into the high vacuum connection.
► Wear protective gloves during installation.
► Never start the turbopump operation while the vacuum connections are open.
► Always carry out the mechanical installation before connecting the electrics.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
► Only connect mating plugs after the mechanical installation.
► Only switch on the vacuum pump immediately prior to operation.
12/72
Safety
WARNING
Risk of serious injury from oscillating, toppling or falling objects
Incorrect handling during the mechanical installation leads to a risk of oscillating, toppling or falling
heavy loads. There is a risk of crushing and impacts (e.g. on colliding flange connections). There is a
risk of injuries to limbs, up to and including bone fractures and head injuries.
► Use the intended eye bolts during the installation.
► When approaching the vacuum pump, be particularly careful at the counter flange.
► Note the center of gravity of the load.
WARNING
Danger of poisoning from toxic vapors
Igniting and heating synthetic operating fluid generates toxic vapors. Danger of poisoning if inhaled.
► Observe the application instructions and precautions.
► Do not allow tobacco products to come into contact with the operating fluid.
WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling water supply,
there is a risk of scalding from suddenly escaping, hot cooling water at over pressure.
► Prior to installation, ensure that pressure is discharged from the cooling water system, and that it
is cooled down.
► Wear protective equipment, e.g., safety goggles and gloves.
Risks during operation
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
► If necessary, set up a contact guard.
► If necessary, apply the warning stickers provided for this at the danger points.
► Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
► Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
► Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
► Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
► Do not fully unscrew the venting screw out of the housing during venting.
► Keep a distance from automatic venting device, such as venting valves.
13/72
Safety
Risks during maintenance
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
► Before performing all work, switch off the main switch.
► Wait until the turbopump comes to a standstill (rotation speed =0).
► Remove the mains plug from the device.
► Secure the device against unintentional restarting.
WARNING
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
► Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
► Decontaminate affected parts before carrying out maintenance work.
► Wear protective equipment.
WARNING
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
► Wait until the turbopump comes to a standstill (rotation speed f=0).
► Switch the turbopump off properly.
► Secure the turbopump against re-start.
► Close open connections immediately following removal, using the original protective cover.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
► Do not fully unscrew the venting screw out of the housing during venting.
► Keep a distance from automatic venting device, such as venting valves.
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Safety
CAUTION
Electric shock and damage to the vacuum pump and electronic drive unit due to improper dis-
connection of components
Even after the mains power is switched off, the turbopump continues to deliver electrical energy dur-
ing its run-down period. If the turbopump and electronic drive unit are disconnected prematurely,
there is the risk of electric shock from contact with live components. There is a risk of electric body
contact and, as a result, the destruction of electronic components.
► Never disconnect the turbopump and electronic drive unit from each other if power is still con-
nected or if the rotor is running.
► Monitor the turbopump rotation via the parameters available in the electronic drive unit (e.g., [P:
398]).
Risks in the event of malfunctions
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
► Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it will tear off. The energy released in this way can propel the en-
tire turbopump or shattered pieces from its interior through the surrounding area. Potentially danger-
ous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equip-
ment damage.
► Follow the installation instructions for this turbopump.
► Observe the requirements regarding stability and design of the counter flange.
► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
► Take suitable safety precautions on-site for the compensation of the occurring torques.
► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
► Keep masses connected to the turbopump as low as possible.
► Use flexible lines to connect to the turbopump where necessary.
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Safety
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dan-
gers posed by this product.
Every person who is involved in the installation, operation or maintenance of the
product must read, understand, and adhere to the safety-related parts of this docu-
ment.
Infringement of EU conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the opera-
tor changes the original product or installs additional equipment.
● Following installation into a system, the operator is required to check and re-
evaluate as necessary the conformity of the overall system in the context of the
relevant EU Directives before commissioning that system.
General safety precautions when handling the product

► Observe all applicable safety and accident prevention regulations.
► Check that all safety measures are observed at regular intervals.
► Do not expose body parts to the vacuum.
► Always ensure a secure connection to the earthed conductor (PE).
► Never disconnect plug connections during operation.
► Observe the above shutdown procedures.
► Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
► Never put the device into operation with the high vacuum connection open.
► Keep lines and cables away from hot surfaces (> 70°C).
► Never fill or operate the unit with cleaning agents or cleaning agent residues.
► Do not carry out your own conversions or modifications on the unit.
► Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product

Installation location weatherproof (internal space)
Air pressure 750 hPa to 1060 hPa
Installation altitude max. 2000 m
Rel. air humidity max. 80%, at T < 31°C,
up to max. 50% at T < 40°C
IP degree of protection (according to IEC 61010) I
Degree of pollution (according to IEC 61010) 2
Excess voltage category II
Permissible protection class IP54
Ambient temperature 5°C to 40°C with water cooling
Permissible surrounding magnetic field 6 mT
Maximum irradiated thermal output 22.5 W
Maximum permissible rotor temperature of the turbopump 120 °C
Maximum permissible temperature at HV-flange 120 °C
Tbl. 2: Permissible ambient conditions
16/72
Safety
Notes on ambient conditions

The specified permissible ambient temperatures apply to operation of the turbo-
pump at maximum permissible backing pressure or at maximum gas throughput,
depending on the cooling type. The turbopump is intrinsically safe thanks to redun-
dant temperature monitoring.
● The reduction in backing pressure or gas throughput permits operation of the
turbopump at higher ambient temperatures as well.
● If the maximum permissible operating temperature of the turbopump is exceed-
ed, the electronic drive unit first reduces the drive output and switches it off
where necessary.
2.5 Proper use
► Use the turbopump only for generating vacuum.
► Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
► Use the turbopump only in closed indoor areas.
► Use the turbopump only for the evacuation of dry and inert gases.
► Exclusively use C-version turbopumps with sealing gas supply for the pumping of corrosive media.
2.6 Foreseeable improper use

Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse.
● Transport, installation or operation of the vacuum pump in an impermissible spatial position
● Establishing the voltage supply without correct installation
● Installing the pump with unspecified mounting material
● Pumping explosive media
● Pumps of corrosive media with turbopumps in the standard version
● Pumping of fluids
● Pumping of dust
● Operation with impermissible high gas throughput
● Operation with impermissible high fore-vacuum pressure
● Operation with excessively high irradiated heat output
● Operation in impermissible high magnetic fields
● Operation in an incorrect gas mode
● Venting with impermissible high venting rates
● Use for pressure generation
● Use in areas with ionizing radiation
● Operation in explosion-hazard areas
● Use in systems in which sporadic loads and vibrations or periodic forces act on the device
● The causing of hazardous operating conditions by a presetting on the electronic drive unit that is
contrary to the process
● Use of accessories or spare parts that are not listed in these instructions
17/72
Product description
3 Product description
3.1 Identifying the product
► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
► Learn about certifications through test seals on the product or at www.tuvdotcom.com with com-
pany ID no. 000021320.
3.1.1 Product types
The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the
family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an
additional feature description.
Family Size/model Property, attribute, feature

HiPace 10 to 2800 none = Standard version
mini = Compact version
U = Overhead version
C = Corrosive gas version
P = Process
M = Active magnetic bearing
T = Temperature management
E = High efficiency
H = high compression
I = ion implantation
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps
3.1.2 Product features
Feature Version
HV flange DN 200 ISO-K DN 200 ISO-F DN 200 CF-F
Flange material Aluminium Aluminium Stainless steel
Tbl. 4: Turbopump features
Mains voltage ± 10% Output of the electronic drive unit

100 to 120 V AC 700 to 930 W
200 to 240 V AC 1200 W
Tbl. 5: Drive power depending on the supplied mains voltage
3.2 Functional properties
The turbopump forms a compact unit with the electronic drive unit. The integrated power supply pack
acts as a voltage supply.
18/72
Product description
1 2 3 4 5 6
12
11
10 9 8 7
Fig. 1: HiPace 1200 design (example: standard version, DN 200 ISO-F | U-version
DN 200 ISO-K)
1 High vacuum connection 7 Protective cover for the high vacuum flange
2 Venting connection, venting screw 8 Protective cap of operating fluid pump
3 Fore-vacuum connection, DN 40 ISO-KF 9 Mains connection "AC in"
4 Cooling water connection, outlet 10 Electronic drive unit TC 1200
5 Cooling water connection, inlet 11 Ground terminal
6 Protective cover for the fore-vacuum flange 12 Sealing gas connection
3.2.1 Cooling
● Water cooling
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.2.2 Rotor bearing
Hybrid-bearing turbopump
● High vacuum side: wear proof permanent magnetic bearing
● Fore-vacuum side: ball bearing with ceramic balls
Turbopumps from the hybrid bearing HiPace series use ceramic ball bearings for the rotor bearing on
the fore-vacuum side. The permanent lubrication and the performance of the ball bearings ensures the
defined supply from an operating fluid pump.
The design of the operating fluid pump is largely mirror-symmetrical. The screws for filling the operating
fluid are each marked by a symbol and are located on the long sides of the operating fluid pump. The
drain screws are located at the front of the operating fluid pump.
3.2.3 Drive
● Electronic drive unit TC 1200
3.3 Shipment
● Turbopump with electronic drive unit and integrated power supply pack
● Protective cover for the high vacuum connection
● Protective cover for the fore-vacuum connection
● Mating plug for the "remote" connection on the TC 1200 (type-dependent)
● Mating plug for the "E74" connection on the TC 1200 (type-dependent)
● Mains power socket HAN 3A for mains connection of the turbopump
19/72
Product description
● Sealing gas valve (already fitted)

● Operating fluid F3 (50 ml) with syringe
● 2 eye bolts for transport
● 2 threaded hose nozzles with sealing ring for cooling water connection, G 1/4"
● Operating instructions
20/72
Transportation and Storage
4 Transportation and Storage

4.1 Transport
WARNING
Risk of serious injury from swinging, toppling or falling objects
During transport, there is a risk of crushing and impact on swinging, toppling or falling objects. There
is a risk of injuries to limbs, up to and including bone fractures and head injuries.
► Secure the danger zone if necessary.
► Pay attention to the center of gravity of the load during transport.
► Ensure even movements and moderate speeds.
► Observe safe handling of the transport devices.
► Avoid sloping attachment aids.
► Never stack products.
► Wear protective equipment, e.g. safety shoes.
NOTICE
Destruction of the vacuum pump due to failure to observe the type-specific spatial position
Impermissible spatial positions lead to pollution of the vacuum pump by operating fluid. There is a
risk of pollution of the process vacuum and damage to the vacuum pump up to and including its de-
struction.
► Observe the labels relating to the valid spatial position of the vacuum pump.
► Observe the property labels on the type plate.
► Drain off the operating fluid before moving or transporting the vacuum pump.
► Only fill the vacuum pump with operating fluid after mechanical installation.
Pfeiffer Vacuum recommends keeping the transport packaging and original protec-
tive cover.
General information regarding safe transport

1. Observe weight specified on the rating plate.
2. Where possible, always transport or ship the turbopump in its original packaging.
3. Remove the protective cover only immediately prior to installation.
Information regarding transport of the turbopump in its packaging
1. Use a pallet truck to transport the turbopump when still in its packaging.
2. Note the center of gravity of the load.
3. Observe safe handling of manually operated transport devices.
4. Only transport the turbopump in its valid spatial position and with the rotor axis vertically aligned.
5. Ensure harmonious movements and moderate speeds.
6. Ensure a flat substrate.
7. Wear protective equipment, e.g. safety shoes.
21/72
Transportation and Storage
60°
max 60°
max
Fig. 2: Slinging points for transport of the turbopump in the standard and U versions
Information regarding transport of the turbopump without packaging

2 eye bolts are included in the shipment and are firmly bolted to the turbopump ex works.
1. Attach suitable lifting tools to both eye bolts.
2. Pay attention to the correct use and fastening of the lifting equipment.
3. Lift the turbopump vertically (e.g. out of the packaging).
4. Only transport the turbopump in its valid spatial position and with the rotor axis vertically aligned.
5. If necessary, remove the eye bolts after transport and installation.
– Keep the eye bolts for future use.
4.2 Storage
Pfeiffer Vacuum recommends storing the products in their original transport pack-
aging.
Storing the turbopump

1. Close all flange openings with the original protective caps.
2. Close all other connections (e.g. venting connection) with the respective original parts.
3. Store the turbopump only indoors within the permissible temperature limits.
4. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
22/72
Installation
5 Installation
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blade) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Preparatory work
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
Opening the high vacuum flange enables access to sharp-edged parts. A manual rotation of the rotor
increases the danger situation. There is a risk of cut injuries up to a piece of your body being severed
of (e.g. finger tips). There is a risk of hair and loose clothing being drawn in. Objects dropping into the
turbopump will destroy the pump in subsequent operation.
► Remove the original protective cover only immediately prior to connecting the high vacuum
flange.
► Never reach into the high vacuum connection.
► Wear protective gloves during installation.
► Never start the turbopump operation while the vacuum connections are open.
► Always carry out the mechanical installation before connecting the electrics.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
General notes for the installation of vacuum components

► Choose an installation location that permits access to the product and to supply lines at all times.
► Observe the ambient conditions given for the area of use.
► Provide the highest possible level of cleanliness during assembly.
► Ensure that flange components during installation are grease-free, dust-free and dry.
Select the installation location
1. Observe the instructions for transport to the installation location.
2. Make sure that there are sufficient cooling options for the turbopump.
3. Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.
4. Install suitable shielding so that the irradiated thermal output does not exceed the permissible val-
ues when high temperatures occur due to the process.
5. Observe the permissible temperatures for the vacuum connection.
5.2 Connecting the high vacuum side

5.2.1 Requirements for the dimensioning of a counter flange
NOTICE
Risk of damage due to incorrect counter flange design
Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing,
even when properly attached. This can produce leakage or negative changes in running characteris-
tics.
► Adhere to the shape tolerances for the counter flange.
► Observe the maximum flatness deviations over the entire surface.
23/72
Installation
The assembly of vertical superstructural parts on the high vacuum connection is the
responsibility of the operating company. The loading capacity of the high vacuum
flange is specific for the turbopump used. The total weight of superstructural parts
must not exceed the maximum values specified.
If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must
be absorbed. The installation elements for turbo pumps are special designs by Pfeiffer Vacuum.
Maximum Maximum Flatness Minimum ten- Screw Maximum Maximum

torque oc- permissible sile strength depth of permissi- permissi-
curring in axial load on of the flange the fas- ble sur- ble irradi-
the event of the high vac- material in all tening rounding ated ther-
a burst1) uum flange2) operating screws magnetic mal out-
states field put
9800 Nm 2000 N ± 0.05 mm 170 N/mm2 2.5 x d 6.0 mT 22.5 W
(equivalent to 270 N/mm2 1.5 x d
200 kg)
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection
Important information for correct installation

► Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the
turbopump.
5.2.2 Considering the earthquake protection
NOTICE
Vacuum pump damage caused by external vibrations
In the event of earthquakes or other external vibrations, there is the risk of the rotor coming into con-
tact with the safety bearings, or the housing wall touching the turbopump. This can produce mechani-
cal loads up to and including destruction of the turbopump.
► Make sure that all flange and safety connections absorb the resulting forces.
► Secure the vacuum chamber against displacement or tipping.
VACUUM CHAMBER
Fig. 3: Example: Secure against displacement and tipping caused by external vibrations
Safety connection, customer-side
1) The theoretically calculated torque in the event of a burst (rotor shaft breakage) according
to ISO 27892 was not reached in any experimental test.
2) A one-sided load is not permitted.
24/72
Installation
5.2.3 Using a splinter shield or protective screen

Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the Turbopump against foreign matter from the vacuum chamber. The puming speed of the pump is
reduced according to the passage guide values and the size of the high vacuum flange.
Flange size Reduced pumping speed in % by gas type

H2 He N2 Ar
Splinter shield DN 200 10 13 26 28
Protective screen DN 200 3 3 8 9
Tbl. 7: Behavior of pumping speed when using a splinter shield or protective screen
► Use centering rings with protective screen or splinter shield for ISO flanges.
► Use additional protective screen or splinter shield for CF flanges.
5.2.4 Using the vibration compensator

Pfeiffer Vacuum vibration compensators are suitable for use on vibration-sensitive systems.
WARNING
Installing the vibration compensator

1. Install the vibration compensator only with vertical passage.
2. Consider the flow resistance.
3. Secure the turbopump additionally to the high vacuum flange.
4. Observe the fastening of the ISO flanges.
5.2.5 Mounting orientations
NOTICE
Destruction of the vacuum pump due to failure to observe the type-specific spatial position
Impermissible spatial positions lead to pollution of the vacuum pump by operating fluid. There is a
risk of pollution of the process vacuum and damage to the vacuum pump up to and including its de-
struction.
► Observe the labels relating to the valid spatial position of the vacuum pump.
► Observe the property labels on the type plate.
► Drain off the operating fluid before moving or transporting the vacuum pump.
► Only fill the vacuum pump with operating fluid after mechanical installation.
25/72
Installation
Fig. 4: Mounting orientations of the standard version, upright
Fig. 5: Mounting orientations of the U version, overhead
► When using oil-sealed backing pumps, avoid backflow from the fore-vacuum range.
HV
VV VV ± 25° max VV
Fig. 6: Alignment of the fore-vacuum connection with horizontal mounting orientation
Determining the horizontal mounting orientation of the turbopump

1. Always align the fore-vacuum connection downwards vertically.
– Permissible deviation ± 25°
2. Support the tube connections in front of the turbopump.
3. Do not allow any forces from the piping system to act on the turbopump.
4. Do not load the high vacuum flange of the turbopump on one side.
5.2.6 Attaching ISO-K flange onto ISO-K
ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the
event of sudden blockage of the rotor, despite correct installation.
● Leak-tightness of the flange connection, however, is not jeopardized in this re-
gard.
26/72
Installation
Required tools
● Wrench, WAF 15
● Calibrated torque wrench (Tightening factor ≤ 1.6)
Fig. 7: Flange connection ISO-K to ISO-F, bracket screws
Connection with bracket screw

1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.
2. Connect the flange with the components of the mounting kit according to the figure.
3. Use for all prescribed components for the turbopump.
4. Tighten the bracket screws cross-wise in 3 steps.
– Tightening torque: 5, 15, 25 ± 2 Nm
5.2.7 Attaching ISO-K flange to ISO-F

The connection types for ISO-K flange installation with ISO-F flange are:
● "Hexagon head screw and tapped hole"
● "Stud screw with tapped hole"
● "Stud screw with through hole"
ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the
event of sudden blockage of the rotor, despite correct installation.
● Leak-tightness of the flange connection, however, is not jeopardized in this re-
gard.
Required tools
● Hexagon wrench (15 WAF)
● Calibrated torque wrench (tightening factor ≤ 1.6)
1.5 × d
Fig. 8: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole
Connection of the hexagon head screw and tapped hole

2. Place the collar flange over the high vacuum flange of the turbopump.
3. Insert the snap ring in the side groove on the high vacuum flange of the turbopump.
4. Attach the turbopump with collar flange, snap ring and centering ring to the counter flange accord-
ing to the figure.
5. Use all prescribed components for the turbopump.
6. Screw the hexagon head screws into the tapped holes.
– Observe the minimum tensile strength of the flange material and the screw depth.
7. Fasten the hexagon head screws cross-wise in 3 steps.
27/72
Installation
2.5 × d
Fig. 9: Flange connection ISO-K to ISO-F, stud screw and tapped hole
Connection of the stud screw and tapped hole

2. Screw in the required number of stud screws with the shorter end in the holes on the counter
flange.
ing to the figure.
7. Secure the nuts cross-wise in 3 steps.
Fig. 10: Flange connection ISO-K to ISO-F, stud screw and through hole
Connection of the stud screw and through hole

ing to the figure.
6. Tighten the nuts cross-wise in 3 steps.
7. Tightening torque: 5, 15, 25 ± 2 Nm
5.2.8 Attaching ISO-F flange to ISO-F

The connection types for ISO-F flange installation with ISO-F flange are:
● "Hexagon head screw and tapped hole"
● "Hexagon head screw and through hole"
Required tools
● Hexagon wrench (15 WAF)
1.5 × d
28/72
Installation
Fig. 11: Flange connection ISO-F, hexagon head screw and tapped hole
Connection of the hexagon head screw and tapped hole

2. Attach the turbopump with centering ring to the counter flange according to the figure.
4. Screw the required number of hexagon head screws into the tapped hole.
5. Fasten the hexagon head screws cross-wise in 3 steps.
Fig. 12: Flange connection ISO-F, hexagon head screw and through hole
Connection of the hexagon head screw and through hole

4. Push the hexagon head screws through the holes of the turbopump and counter flange.
5. Secure the hexagon nuts.
6. Fasten the screw connections cross-wise in 3 steps.
2.5 × d
Fig. 13: Flange connection ISO-F, stud screw and tapped hole

2. Screw in the stud screws with the shorter end in the tapped holes on the counter flange.
5. Secure the hexagon nuts.
6. Tighten the nuts cross-wise in 3 steps.
Fig. 14: Flange connection ISO-F, stud screw and through hole
29/72
Installation

ing to the figure.
4. Fasten the screw connections cross-wise in 3 steps.
5.2.9 Fastening CF flange to CF-F

The connection types for CF installation with CF flange are:
● "Hexagon head screw and through hole"
NOTICE
Leaks may occur due to the incorrect installation of CF flanges
Inadequate cleanliness when handling CF flanges and copper gaskets results in leaks and may
cause process damage.
► Always wear suitable gloves before touching or fitting any components.
► Fit seals only if dry and free of grease.
► Take care of damaged surfaces and cut edges.
► Replace the damaged components.
Required tools
● Hexagonal wrench (13 WAF)
Fig. 15: Flange connection CF-F, hexagon head screw and through hole
Connection of the hexagon head screw and through holes

2. If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbo-
pump high vacuum flange.
3. Place the seal exactly in the hollow.
5. Tighten the screw couplings all the way around.
– Tightening torque: 22 ± 2 Nm
6. Then check the torque, since flowing of the sealing material may make it necessary to re-tighten
the screws.
Fig. 16: Flange connection CF-F, stud screw and tapped hole
30/72
Installation

2. Screw in the required number of stud screws with the shorter end in the holes on the counter
flange.
the screws.
Fig. 17: Flange connection CF-F, stud screw and through hole

the screws.
5.3 Filling the operating fluid

WARNING
NOTICE
Destruction of the turbopump due to incorrect operation when filling with operating fluid
The operating fluid filling quantity depends on the selected spatial position of the turbopump. The fill-
er screws are located at clearly marked positions on both sides of the operating fluid pump of the tur-
bopump. Confusion with other screw plugs leads to impurities, damage to the turbopump, up to and
including its destruction.
► Only fill the turbopump with operating fluid after mechanical installation.
► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol
only.
► If in doubt, contact Pfeiffer Vacuum.
The operating fluid pump of the turbopump is situated beneath a protective cap. The screws for filling
the operating fluid are identified with a respective symbol. The drain screws are located at the front of
the operating fluid pump.
31/72
Installation
3
Fig. 18: Removing the protective cap on U- or standard versions
1 Operating fluid pump 3 Protective cap

2 Allen head screws
Required tools
● Allen key, size 3
Permitted operating fluid
● F3 for vacuum pumps, 50 ml
Remove the protective cap from the operating fluid pump
► Unscrew the Allen head screws.
► Remove protective cap.
2 1
1 2
3 3
pump
1 Filler screw 3 Drain screw

2 O-ring
Procedure
1. Unscrew and remove the higher filler screw from the operating fluid pump.
2. Use the syringe and the operating fluid from the turbopump shipment.
3. Place a container below the filling port.
4. Continue to fill in operating fluid until it overflows at the filling port
– Maximum volume 50 ml.
– In vertical mounting orientation, the filling volume is a little lower.
5. Seal the filler screw.
– Tightening torque: 3 Nm
32/72
Installation
5.4 Connecting the fore-vacuum side

WARNING
poisoning.
We recommend
Use the turbopump only in combination with a suitable backing pump that can deliv-
er up to the required maximum fore-vacuum pressure. To achieve the fore-vacuum
pressure, use a suitable vacuum pump or a pumping station from the Pfeiffer Vac-
uum range.
In this case, the backing pump is also controlled directly via the turbopump elec-
tronic drive unit interfaces (e.g., relay box or connection cable).
1 2 3 4 5
Fig. 20: Example of fore-vacuum connection
1 turbopump fore-vacuum connection 4 Vacuum components DN 40 ISO-KF

2 Centering ring 5 Backing pump (e.g. two-stage vane pump)
3 Circlip
Procedure
1. With rigid pipe connections, include bellows to attenuate external vibrations.
2. Install a fore-vacuum connection with small flange components, e.g. connection elements and
pipe components DN 40 ISO-KF from the Pfeiffer Vacuum Components Shop.
3. Implement measures to counteract the backflow of operating fluids or condensate from the fore-
vacuum area.
33/72
Installation
4. Observe the information in the operating manual of the backup pump or pumping station when
connecting and operating it.
5.5 Connecting the cooling water supply

WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling water supply,
there is a risk of scalding from suddenly escaping, hot cooling water at over pressure.
► Prior to installation, ensure that pressure is discharged from the cooling water system, and that it
is cooled down.
► Wear protective equipment, e.g., safety goggles and gloves.
The HiPace 1200 turbopumps use water cooling as standard.
Parameter Cooling water

Appearance ● filtered
● mechanically clear
● visually clear
● no turbidity
● no sediment
● free from grease and oil
pH value 7 to 9
Carbonate hardness, max. 10 °dH
12.53 °e
17.8 °fH
178 ppm CaC03
Chloride content, max. 100 mg/l
Sulfate content, max. 240 mg/l
Carbonic acid content, max. not detectable
Ammonia content, max. not detectable
Electrical conductivity, max. 500 µS/cm
Particle size, max. 150 µm
Cooling water temperature See "Technical data"
Cooling water consumption See "Technical data"
Feed line overpressure, max. 6000 hPa
Tbl. 8: Requirements on the cooling water composition
Connection to the turbopump External cooling water supply

Internal thread, G 1/4" Hose cable
Hose nozzles (included with shipment) Inner hose diameter 7 to 8 mm
Tbl. 9: Requirements on the cooling water connection
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Installation
1 2 3 4 5 6 7
Fig. 21: Cooling water connection
1 Return line 5 Sealing ring (2x)

2 Feed line 6 Cooling water inlet, 1/4" thread
3 Dirt trap 7 Cooling water outlet, 1/4" thread
4 Threaded nozzle (2x)
Procedure
The following instructions describe how to connect the cooling water supply to the turbopump with hose
nozzles from the shipment.
Requirements: The customer-side cooling system is closed and depressurized. The provided hose
connections correspond to the turbopump connections.
Pfeiffer Vacuum recommends the use of a dirt trap in the supply line.
1. Screw one hose nozzle with sealing ring onto each of the turbopump's cooling water connections.
– Tightening torque: maximum 15 Nm
2. Connect the cooling water supply line to the hose nozzle at the designated cooling water inlet of
the turbopump.
3. Connect the cooling water return line to the hose nozzle at the designated cooling water outlet of
the turbopump.
4. Secure the hose lines on the turbopump with hose clamps.
5.6 Connecting accessories
Installation and operation of accessories
Pfeiffer Vacuum offers a series of special, compatible accessories for its products.
● Information and ordering options for approved accessories can be found on-
line.
● The following accessories are not included in the scope of supply.
35/72
Installation
5.6.1 Connecting accessories to the turbopumps
Electronic drive unit TC 1200 accessory connection

The electronic drive unit of the turbopump offers space for the connection of maxi-
mum 4 accessory devices. M12 sockets with the designation "accessory" are avail-
able for this purpose.
● The accessory connections have been preconfigured at the factory.
● After connecting pre-configured accessory devices, these are immediately
ready for operation according to the factory settings.
● The use of other accessories for turbopumps is possible and requires settings
in the configuration of the electronic drive unit.
● The desired accessory output is configured via RS-485 using Pfeiffer Vacuum
display and control units or a PC.
● You can find more detailed information in the “Electronic drive unit TC|1200”
operating manual.
Electronic drive unit Accessory con- Y-connector Pre-set configuration

connection nection
Acc. A A1 Y-1 Sealing gas valve
A2 Y-2 Backing pump
11 Y-Connector
for Accessories 22 Acc. B B1 Y-1 Venting valve
B2 Y-2 Heating
Tbl. 10: Factory pre-set accessory connections on the electronic drive unit
Connecting accessory devices

1. Observe the installation instructions in the operating instructions for the relevant accessory.
2. Note the existing configuration of existing connections and control lines.
3. Connect only matching accessory devices to the electronic drive unit.
4. Use the Y-distributor from the Pfeiffer Vacuum range of accessories if you want to connect 3 or 4
devices.
Using additional accessories
1. Observe the installation instructions in the operating instructions for the relevant accessory.
2. Note the existing configuration of existing connections.
3. Use the Pfeiffer Vacuum display and control unit DCU 002, or a DCU with integrated power supply
pack.
5.6.2 Connecting sealing gas

The use of sealing gas serves to protect the turbopump in dusty processes or with excessive gas
throughputs. Sealing gas prevents the ingress of damaging substances into the motor and bearing area.
The supply is carried out either via a sealing gas valve or a sealing gas throttle without control.
● Pfeiffer Vacuum recommends the use of sealing gas from 50 % of the maximum gas throughput.
● The permissible inlet pressure for sealing gas is 1,500 hPa absolute.
● The flow rate for sealing gas is at 17.5 to 20 sccm.
36/72
Installation
1 2 3
Fig. 22: Connecting the sealing gas valve
Connecting the sealing gas valve

1. Unscrew the screw plug with sealing ring out of the sealing gas connection of the turbopump.
2. Screw the sealing gas valve with the outlet side into the sealing gas connection of the turbopump.
3. Screw the control line of the sealing gas valve into a free accessory connection on the electronic
drive unit.
– The specification in the configuration is "accessory A1".
4. Configure the accessory output for the sealing gas via the interfaces of the electronic drive unit.
Connecting the sealing gas throttle without control valve
1. Unscrew the screw plug with sealing ring out of the sealing gas connection of the turbopump.
2. Screw the sealing gas throttle with the outlet side into the sealing gas connection of the turbo-
pump.
Establishing the sealing gas supply
In case you want to use room air as sealing gas, the sealing gas valve is ready for operation immediate-
ly.
In case you want to use another inert gas (e.g. nitrogen N2) as sealing gas, follow the handling steps.
1. Provide an external sealing gas supply with a maximum inlet pressure of 1,500 hPa absolute.
2. Connect the sealing gas supply to the inlet side (1/8" thread) of the valve.
3. If required, use a connecting adapter from the accessory of the valve (not included in the scope of
supply).
5.6.3 Connecting a venting valve

A Pfeiffer Vacuum venting valve serves the automatic venting of a turbopump after switching off or in
event of a power failure.
● The permissible inlet pressure for venting gas is 1,500 hPa absolute.
Connecting the venting valve
1. Unscrew the venting screw with sealing ring out of the turbopump by hand.
2. Screw the venting valve with the outlet side into the venting connection of the turbopump.
Connect the venting valve to the accessory connection "accessory B1"
► Screw the control line of the venting valve into a free accessory connection on the electronic drive
unit.
– The specification in the configuration is "accessory B1".
Establish the venting gas supply
In case you want to use dry room air as venting gas, the venting valve is ready for operation immediate-
ly.
In case you want to use another inert gas (e.g. nitrogen N2) as venting gas, follow the handling steps.
1. Provide an external venting gas supply with a maximum inlet pressure of 1,500 hPa absolute.
2. Connect the venting gas supply to the inlet side (G 1/8") of the valve.
3. If required, use a connecting adapter for the valve inlet side (not included in the shipment).
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Installation
5.6.4 Installing a heating jacket
CAUTION
Danger of burns on hot surfaces
When baking out the turbopump or vacuum chamber, there is a risk of burns on contact, even after
the housing heater has been switched off.
► Implement thermal insulation measures on the heating jacket, pump housing, and vacuum cham-
ber.
► Wear personal protective equipment if necessary.
NOTICE
Vacuum pump destruction due to excessive energy input during operation
Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high
heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy
the vacuum pump.
► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val-
ues apply.
The turbopump and vacuum chamber must be baked out to reach the ultimate pressure more quickly.
The heating jacket may only be used in turbopumps with high vacuum flange in stainless steel design.
The heating duration depends on the degree of contamination in the process, as well as the final pres-
sure to be reached, and should be at least 4 hours.
5 (2x) 1 2 3 4
Fig. 23: Connection of the heating jacket
1 Pump housing 4 Heating relay box

2 Allen head screw 5 "Hot surface" warning sticker
3 Heating jacket
Required tools
● Allen key, size 4 or 5
Installing the heating jacket
1. Carefully bend out the heating jacket at the outer clamping strap.
2. Push the jacket onto the cylindrical section of the pump body from the side.
3. Care should be taken that the heater bands do not become deformed and that the jacket is resting
flush against the body.
4. Secure the heating jacket onto the body with the Allen head screw.
5. Observe the max. permissible temperature on the connection flange of the vacuum chamber.
6. Install suitable shielding plates as protection against the radiated heat input exceeding the maxi-
mum values.
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Installation
Fixing screw Tightening torque in Tightening torque for One-time retightening

thread cold condition bakeout after cooling
M5 6 Nm 7 Nm 7 Nm
M6 11 Nm 12 Nm 12 Nm
Tbl. 11: Tightening torque for heating jacket fastening screws
Connecting the control line

1. Connect the accessory control line to the electronic drive unit using the corresponding accessory
connection, and tighten the plug securely.
2. Check the specification in the configuration "accessory B1".
3. Establish the power supply for the relay box in accordance with the operating instructions for the
accessory.
5.7 Connecting the electrical supply

DANGER
Danger to life from electric shock
Contact with exposed and live elements generate an electric shock. Incorrect connection of the mains
supply leads to the risk of live housing parts that can be touched. There is a risk to life.
► Before the installation, check that the connection leads are voltage-free.
► Make sure that electrical installations are only carried out by qualified electricians.
► Provide adequate grounding for the device.
► After connection work, carry out an earthed conductor check.
5.7.1 Grounding the vacuum pump
M4
Fig. 24: Example: Connecting the grounding cable
Required aids
● Screw M4 × 8
● Shake proof washer M4, if required
● Suitable grounding cable with cable lug size M4
Procedure
1. Use a suitable grounding cable to divert applicative interferences.
2. Route the connection in accordance with locally applicable provisions.
3. Use the turbopump ground terminal (M4 female thread).
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Installation
5.7.2 Establishing the electric connection
WARNING
Danger to life from electric shock due to improperly performed installation
The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal
situations arise due to unsafe or incorrectly installation when reaching into the device.
► Ensure that the system is safely integrated into an emergency off safety circuit.
► Do not carry out any unauthorized modifications or changes to the device.
WARNING
vacuum flange.
Pin Assignment
1 Phase L
2 3 2 Neutral conductor
3 not connected
1 PE
PE Earthed conductor
Tbl. 12: Terminal lay-out of the power supply connector
Preparing a supply cable for the turbopump

There are 2 options for configuring the mains connection for the turbopump.
► Make sure that you have the correct supply voltage.
► Order a corresponding mains connection cable from the Pfeiffer Vacuum accessories range.
► Assemble your own mains connection cable using the HAN 3A connecting socket from the ship-
ment.
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Operation
6 Operation
6.1 Commissioning
WARNING
vacuum flange.
NOTICE
Vacuum pump destruction due to excessive energy input during operation
Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high
heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy
the vacuum pump.
► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val-
ues apply.
NOTICE
Damage to the turbopump due to excess temperature
High process temperatures will cause damage to the pump.
► Always use water cooling when using the vacuum pump with a housing heating or during opera-
tion with heated vacuum chambers.
► Avoid additional energy input in the vacuum pump when using a housing heater.
► Observe the limit values specified in the ambient conditions.
NOTICE
Turbopump destruction due to gases with too high molecular masses
When pumping gases with impermissibly high molecular masses, there is the risk of destroying the
turbopump.
► Ensure that the correct gas mode [P:027] is set in the electronic drive unit.
► Consult Pfeiffer Vacuum before using gases with larger molecular masses (> 80).
Important settings and function-related variables are factory-programmed into the vacuum pump elec-
tronic drive unit as parameters. Each parameter has a three-digit number and a description. Parameter-
driven operation and control is supported via Pfeiffer Vacuum displays and control units, or externally
via RS-485 using Pfeiffer Vacuum protocol.
Parameter Name Designation Adjustment, setting

[P:027] GasMode Gas mode 0 = heavy gases
[P:035] CfgAccA1 Accessory connection A1 5 = Sealing gas
[P:036] CfgAccB1 Accessory connection B1 1 = Venting valve
[P:037] CfgAccA2 Accessory connection A2 3 = backing pump
[P:038] CfgAccB2 Accessory connection B2 2 = heating
[P:700] RUTimeSVal Set value run-up time 8 min
[P:701] SpdSwPt1 Speed-control switching point 80 %
[P:707] SpdSVal Speed-control operation specification 65 %
[P:708] PwrSVal Set value power consumption 100 %
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Operation
Parameter Name Designation Adjustment, setting

[P:720] VentSpd Venting at rotation speed, delayed venting 50 %
[P:721] VentTime Venting time, delayed venting 3600 s
Tbl. 13: Preconfigured settings for turbopumps when delivered
Putting the turbopump into operation

1. When using water cooling, observe the cooling water flow and throughput.
2. When using sealing gas, observe the sealing gas flow and throughput.
3. Observe the reduction of the drive power depending on the mains connection voltage provided.
4. Provide the current supply for the product.
6.2 Operating modes
The turbopump can be operated in different modes.
● Operation without control unit
● Operation via connection "E74"
● Operation via "remote" connection
● Operation via interface RS-485 and Pfeiffer Vacuum display and control unit or PC
● Operation via field bus
6.2.1 Operation without operating unit
Automatic start
When using the supplied mating plug on the electronic drive unit or bridging con-
tacts according to the terminal lay-out, the turbopump is ready for operation. Once
the supply voltage is provided, the turbopump starts up immediately.
Instructions for operation without control panel

1. Use only the approved Pfeiffer Vacuum mating plug with bridges on the connection of the elec-
tronic drive unit.
2. Switch on the mains supply of the turbopump only immediately before operation.
After applying the operating voltage, the electronic drive unit carries out a self-test to check the supply
voltage. After completing the self-test successfully, the turbopump starts and activates connected addi-
tional equipment according to the configuration.
6.2.2 Operation via connection "E74"

Operation is possible via the 15-pole D-sub connection with the “E74” designation on the electronic
drive unit. Besides the signals defined in the Directive SEMI E74-0301, the connection is provided with
an inverted alarm signal and an analog output.
Instructions for operation with E74
► See the operating manual of the electronic drive unit with E74 version.
6.2.3 Operation via multi-function connection "remote"

Remote control is available via the 26-pole D-sub connector with the “remote” designation on the elec-
tronic drive unit. The accessible individual functions are mapped to "PLC levels".
Instructions for remote control operation
► See the operating manual of the electronic drive unit for the standard version.
6.2.4 Operation via Pfeiffer Vacuum display and control unit

The connection of a Pfeiffer Vacuum display and control panel permits the controlling of the turbopump
via the parameters fixed in the electronic drive unit.
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Operation
Instructions for operation with display and control unit

1. When handling the Pfeiffer Vacuum display and control unit, observe the associated operating
manual:
– "DCU" operating manual available from the Pfeiffer Vacuum Download Center.
– "HPU" operating manual available from the Pfeiffer Vacuum Download Center.
2. Observe the electronic drive unit operating manual from the turbopump scope of delivery.
3. Connect the display and control unit to the connection "RS-485" on the electronic drive unit.
6.2.5 Operation via field bus

Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible
when using an electronic drive unit with a corresponding connection panel.
The following are available:
● Profibus
● EtherCAT
● DeviceNet
Instructions for field bus operation
► See the operating manual of the electronic drive unit with corresponding connection panel.
6.3 Switching on the turbopump

WARNING
vacuum flange.
WARNING
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
► Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
► Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
Establishing mains connection

1. Make sure that the connection to the operator's network is interrupted or switched off.
2. Plug a mains cable into the "AC in" connector on the turbopump’s electronic drive unit.
3. Connect the mounting brackets to the connecting plug.
Switching on the turbopump
► Connect the mains cables to the operator's mains supply or switch it on.
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Operation
6.4 Operation monitoring
6.4.1 Operating mode display via LED
LEDs on the electronic drive unit indicate basic operating conditions of the turbopump. A differentiated
malfunction and warning display is possible only for operation with DCU or HPU.
LED Symbol LED status Display Meaning

Off without current
On, flashing "Pumping station OFF", rotation speed ≤ 60
rpm-1
Green
On, inverse flashing "Pumping station ON", set rotation speed not
reached
On, constant "Pumping station ON", set rotation speed
reached
On, flashing "Pumping station OFF", speed > 60 rpm-1
Yellow Off no warning
On, constant Warning
Red Off no error, no warning

On, constant Malfunction, error
Tbl. 14: Behavior and meaning of the LEDS of the electronic drive unit
6.4.2 Temperature monitoring
If threshold values are exceeded, output signals from temperature sensors allow the turbopump to be
switched to a safe condition. Depending on the type, temperature thresholds for warning and malfunc-
tion messages are stored immutably in the electronic drive unit. For information purposes, various sta-
tus requests are set up in the parameter set.
● If the excess temperature warning threshold is exceeded, the electronics reduce the turbopump
drive power with the aim of avoiding shutdown.
─ Examples are an impermissible motor temperature, or impermissibly high housing tempera-
ture.
● Further reduction of drive power and thus decreasing speed can potentially lead to the set rotation
speed switchpoint not being met, and thus to the turbopump switching off.
● If the error threshold for excess temperature is exceeded, the turbopump switches off immediate-
ly.
6.5 Switching off and venting

Recommendation
After the turbopump is switched off, Pfeiffer Vacuum recommends venting the tur-
bopump to avoid contamination due to particles streaming back from the fore-vac-
uum area.
6.5.1 Switching off
Notes for switching off the turbopump
1. Shut down the turbopump via the control unit or remote control.
2. Close the fore-vacuum line.
3. Switch off the backing pump, if necessary.
4. Vent the turbopump (options see below).
5. Close the supply lines (e.g. for cooling water or sealing gas).
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Operation
6.5.2 Venting
NOTICE
Damage to the turbopump due to non-permissibly fast pressure rise during venting
Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bear-
ing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump,
there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump,
including potential failure.
► Observe the prescribed maximum pressure rise speed of 15 hPa/s.
► Avoid manual and uncontrolled venting of very low volumes.
► Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.
Manual venting
Manual venting describes the standard process for venting the turbopumping station.
1. Ensure that the vacuum system is shut down.
2. Open the black venting screw on the turbopump by one revolution maximum.
3. Wait for pressure equalization to atmospheric pressure in the vacuum system.
4. Close the venting screw again.
Use a Pfeiffer Vacuum venting valve
The Pfeiffer Vacuum venting valve is an optional accessory for installation on the turbopump.
The venting valve is normally closed. Control is via the turbopump electronic drive unit, and configura-
tion of parameters [P:012] and [P:030]. In the event of a power failure, the turbopump continues to de-
liver sufficient energy during its run-down period to initiate a proper venting process. When power is re-
stored, the venting process is interrupted.
► Switch off the turbopump.
– The venting process starts automatically.
Venting speed [P:720] Venting duration [P:721] Venting duration in the event of a power
failure
50 % of rated speed 3600 s 3600 s
Tbl. 15: Factory settings for delayed venting in turbopumps
General information for fast venting

Pfeiffer Vacuum recommends fast venting of larger volumes in 2 steps.
1. Use a Pfeiffer Vacuum venting valve for the turbopump, or match the valve cross-section to the
size of the recipient and maximum venting rate.
2. Vent the vacuum system with a maximum rate of pressure rise of 15 hPa/s for a duration of 20
seconds.
3. Then vent the system with a second venting valve of any size, for example directly at the vacuum
chamber.
4. Wait for pressure equalization to atmospheric pressure in the vacuum system.
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Maintenance
7 Maintenance
7.1 General maintenance information
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
► Before performing all work, switch off the main switch.
► Wait until the turbopump comes to a standstill (rotation speed =0).
► Remove the mains plug from the device.
► Secure the device against unintentional restarting.
WARNING
process media.
7.2 Maintenance intervals and responsibilities

Recommendations for performing maintenance measures
1. Clean the turbopump exterior with a lint-free cloth and a little isopropanol.
2. Replace the electronic drive unit in case of a defect.
3. Replace the operating fluid.
4. Pay attention to when the operating fluid must be changed.
5. Replace the operating fluid at least every 4 years.
6. Have Pfeiffer Vacuum Service replace the rotor bearing of the turbopump at least every 4 years.
7. Consult with Pfeiffer Vacuum Service about shorter maintenance intervals for extreme loads or im-
pure processes.
8. For all other cleaning, maintenance or repair work, contact the responsible Pfeiffer Vacuum Serv-
ice Center.
7.3 Changing the operating fluid

WARNING
Risk of poisoning from contact with harmful substances
The operating fluid and parts of the turbopump may contain toxic substances from pumped media.
► Prevent health hazards or environmental impacts with adequate safety precautions.
► Observe the operating fluid safety data sheet.
► Dispose of the operating fluid according to locally applicable regulations.
WARNING
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Maintenance
Preparatory work
1. Switch off the turbopump (see chapter “Switching off”, page 44).
2. Vent the vacuum system to atmospheric pressure (see chapter “Venting”, page 45).
3. Interrupt the electric supply.
4. Remove all cables from the electronic drive unit.
5. If dismantling the turbopump from the system: Close all openings with the original protective
covers and screw plugs.
7.3.1 Draining the operating fluid

1
3
Fig. 25: Removing the protective cap on U- or standard versions
1 Operating fluid pump 3 Protective cap

2 Allen head screws
Required tools
Required aids
● Suitable vessel for collecting the operating fluid
Remove the protective cap from the operating fluid pump
1. Unscrew the Allen head screws.
2. Remove protective cap.
Fig. 26: Position of the operating fluid drain plugs depending on orientation of the turbo-
pump
1 O-ring 2 Drain screw
Draining the operating fluid

1. Place the vessel under the operating fluid pump of the turbopump.
2. Unscrew the lower drain plug from the operating fluid pump.
3. Fully drain the operating fluid.
4. Screw the drain screw back in.
– Tightening torque: max. 3 Nm
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Maintenance
7.3.2 Filling the operating fluid
WARNING
NOTICE
Destruction of the turbopump due to incorrect operation when filling with operating fluid
The operating fluid filling quantity depends on the selected spatial position of the turbopump. The fill-
er screws are located at clearly marked positions on both sides of the operating fluid pump of the tur-
bopump. Confusion with other screw plugs leads to impurities, damage to the turbopump, up to and
including its destruction.
► Only fill the turbopump with operating fluid after mechanical installation.
► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol
only.
► If in doubt, contact Pfeiffer Vacuum.
Required tools
Permitted operating fluid
● F3 for vacuum pumps, 50 ml
2 1
1 2
3 3
pump
1 Filler screw 3 Drain screw

2 O-ring
Procedure
1. Unscrew and remove the higher filler screw from the operating fluid pump.
2. Use the syringe and the operating fluid from the turbopump shipment.
3. Place a container below the filling port.
4. Continue to fill in operating fluid until it overflows at the filling port
– Maximum volume 50 ml.
– In vertical mounting orientation, the filling volume is a little lower.
5. Seal the filler screw.
– Tightening torque: 3 Nm
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Maintenance
7.4 Replacing the electronic drive unit

NOTICE
Damage to the turbopump and electronic drive unit due to improper disconnection of compo-
nents
Even after the mains power is switched off, the turbopump continues to deliver electrical energy dur-
ing its run-down period. If the turbopump and electronic drive unit are disconnected prematurely,
there is the risk of body contact and consequently the destruction of electronic components.
► Never disconnect the turbopump and electronic drive unit from each other if power is still con-
nected or if the rotor is running.
► Monitor the turbopump rotation speed via the parameters available in the electronic drive unit
(e.g., [P:398]).
NOTICE
Property damage from electrostatic discharge
Neglecting the electrostatic hazard for electronic components results in their damage or destruction
► Implement ESD safety measures at the workstation.
► Observe EN 61340 "Protection of electronic devices from electrostatic phenomena".
The electronic drive unit of the turbopump cannot be repaired. In the event of a defect, replace the en-
tire electronic drive unit with a replacement part.
Backing up settings made by the customer

The factory operating parameters are always preset in replacement units. All set-
tings made by the customer to the original electronic drive unit are lost when it is
replaced. To preserve your custom settings, you have the following options:
1. Back up all your settings as a parameter set in an HPU.
2. Load a backup parameter set by means of HPU into the new electronic drive
unit.
3. Program the individual settings into the new electronic drive unit by hand.
4. Note the operating instructions of the electronic drive unit and the HPU.
Preparatory work
1. Switch off the turbopump (see chapter “Switching off”, page 44).
2. Vent the vacuum system to atmospheric pressure (see chapter “Venting”, page 45).
3. Interrupt the electric supply.
4. Remove all cables from the electronic drive unit.
5. If dismantling the turbopump from the system: Close all openings with the original protective
covers and screw plugs.
Required tools
1 2 3
6 5 4
Fig. 28: Replacing the electronic drive unit – Removal
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Maintenance
1 Electronic drive unit TC 1200 4 Shake proof washer

2 O-ring 5 Allen head screw M4 × 12
3 Pump lower part 6 Allen head screw M4 × 65
Removing the electronic drive unit

1. Observe the valid spatial position after removing the turbopump.
2. Unscrew the M4 × 12 and M4 × 65 Allen head screws that secure the electronic drive unit on the
turbopump.
3. Pay attention to the shake proof washer.
4. Store the screws and shake proof washer in a safe place.
5. Carefully remove the old electronic drive unit from the pump, making sure that you keep it straight.
1 2
4 3
Fig. 29: Replacing the electronic drive unit – Installation
1 Electronic drive unit TC 1200 3 O-ring

2 Connecting plug 4 Cooling plate
Installing the electronic drive unit

1. If needed, secure the O-ring in the groove in the pump base.
2. Line up the new electronic drive unit with the straight edge on the cooling plate above the operat-
ing fluid pump.
3. Carefully place a new electronic drive unit on the connecting plug of the turbopump, making sure
that it is straight.
4. Check that the electronic drive unit is correctly seated on the pump base and in relation to the
screw connection bores.
1 2
5 4 3
Fig. 30: Replacing the electronic drive unit – Fastening
1 Electronic drive unit TC 1200 4 Allen head screw M4 × 12

2 Screw plug 5 Allen head screw M4 × 65
3 Shake proof washer
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Maintenance
Fastening the electronic drive unit

1. Screw an M4 × 12 Allen head screw with shake proof washer into the bore in front of the power
supply plug of the electronic drive unit.
2. Screw an M4 × 12 Allen head screw into the bore in front of the electronic drive unit connection
panel.
3. Use all of the other M4 x 65 Allen head screws to fasten the electronic drive unit to the turbopump.
– Tightening torque: 2.5 Nm
4. Remove the screw plugs from the electronic drive unit connections.
5. Keep them in a safe place.
7.5 Confirming the speed specification

The typical nominal rotation speed of a turbopump is preset at the factory in the electronic drive unit.
After replacing the electronic drive unit, the set value for the nominal rotation speed is deleted. The
manual confirmation of the nominal rotation speed is part of a redundant safety system as a measure
for preventing excess rotation speed.
HiPace Confirmation of nominal rotation speed [P:777]

1200 / 1500 630 Hz
1800 / 2300 525 Hz
2800 455 Hz
Tbl. 16: Characteristic nominal rotation speeds of the turbopumps
Required aids
● A connected Pfeiffer Vacuum display and control unit.
● Knowledge of the configuration and setting of electronic drive unit operating parameters.
Adjusting the nominal rotation speed confirmation
The redundant confirmation of the nominal rotation speed of a turbopump is possible by adjusting the
[P:777] NomSpdConf parameter in the electronic drive unit.
1. Observe the display and control unit operating instructions.
2. See the electronic drive unit operating instructions.
3. Set the parameter [P:794] to "1" and activate the expanded parameter set.
4. Open and edit the parameter [P:777].
5. Set the parameter [P:777] to the required value of the nominal rotation speed in Hertz.
Alternative: A Pfeiffer Vacuum SpeedConfigurator for the one-time immediate setting of parameter [P:
777] is included with the replacement units.
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Decommissioning
8 Decommissioning
8.1 Shutting down for longer periods
WARNING
process media.
Procedure for a longer downtime of the turbopump (> 1 year)

1. Remove the turbopump from the vacuum system if necessary.
2. Drain the operating fluid from the turbopump.
3. Close the high vacuum flange of the turbopump.
4. Evacuate the turbopump via the fore-vacuum connection.
5. Vent the turbopump via the venting connection with dry, oil-free air or inert gas.
6. Close all flange openings with the original protective caps.
7. Store the turbopump with the vertical rotary axis in its permissible spatial position.
8. Store the turbopump indoors only, within the specified temperature range.
9. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
8.2 Recommissioning
NOTICE
Risk of damage to the turbopump as a result of operating fluid aging after recommissioning
The shelf life of the operating fluid of the turbopump is limited. Aging of the operating fluid may lead
to the failure of the ball bearing and cause damage to the turbopump.
► Pay attention to when the operating fluid must be changed:
● after maximum 2 years without operation,
● after maximum 4 years combined operation and downtimes.
► Observe the maintenance instructions and inform Pfeiffer Vacuum Service.
Procedures for recommissioning the turbopump

1. Check the turbopump for pollution and moisture.
2. Clean the turbopump exterior with a lint-free cloth and a little isopropanol.
3. If necessary, arrange for Pfeiffer Vacuum Service to completely clean the turbopump.
4. Observe the total running time of the turbopump and if necessary, arrange for Pfeiffer Vac-
uum Service to replace the bearing.
5. Change the turbopump's operating fluid.
6. Install the turbopump according to these instructions (see chapter “Installation”, page 23).
7. Recommission the turbopump according to these instructions .
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Decommissioning
8.3 Disposing of the vacuum pump

WARNING
process media.
► Dispose of all substances in a safe manner according to locally applicable regulations.
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Malfunctions
9 Malfunctions
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
► Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it will tear off. The energy released in this way can propel the en-
tire turbopump or shattered pieces from its interior through the surrounding area. Potentially danger-
ous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equip-
ment damage.
► Follow the installation instructions for this turbopump.
► Observe the requirements regarding stability and design of the counter flange.
► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
WARNING
poisoning.
Should malfunctions occur, you can find information about potential causes and how to fix them here.
The operating manual of the associated electronic drive unit contains more detailed error descriptions.
Problem Possible causes Remedy

Turbopump will not start up; none ● Current supply interrupt- 1. Check the plug contacts on the power supply
of the built-in LEDs on the elec- ed pack.
tronic drive unit light up 2. Check the current supply lines.
● Incorrect operating volt- 1. Observe the electronic drive unit rating plate.
age 2. Supply the correct operating voltage.
● No operating voltage 1. Supply the correct operating voltage.
present
● Electronic drive unit de- 1. Replace the electronic drive unit.
fective 2. Contact Pfeiffer Vacuum Service.
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Malfunctions
Turbopump will not start up; ● For operation without 1. Connect the connections according to the elec-
green LED on the electronic drive control unit: Pins 1-3, tronic drive unit connection diagram.
unit is flashing 1-4 and 1-14 on the “re- 2. Install the mating plug from the shipment.
mote” connection are not
connected
● For operation via 1. Remove the bridge at the “remote” connection.
RS-485: The bridge be- 2. Remove the mating plug from the electronic drive
tween pins 1 and 14 in- unit.
hibits control commands
● For operation via 1. Set the parameters [P: 010] and [P: 023] via the
RS-485: Parameters not interface RS-485 to 1 = "ON".
set in the electronic drive
unit
● Voltage drop in the cable 1. Check the connection cable.
is too high 2. Use a suitable connection cable.
Turbopump fails to reach the ● fore-vacuum pressure 1. Check backup pump compatibility (see technical
nominal rotation speed within the too high data).
set run-up time 2. Check that the backup pump is working.
● Leakage on the turbo- 1. Carry out leak detection.
pump 2. Check seals and flange connections.
3. Eliminate leaks.
● Gas throughput too high 1. Reduce the process gas load.
● Rotor not running 1. Check the turbopump for noise development
smoothly, defective bear- 2. Contact Pfeiffer Vacuum Service.
ing
● Run-up time setpoint ad- 1. Extend the run-up time setpoint [P:700] via a dis-
justed too low play and control unit.
Thermal load due to: 1. Reduce the thermal load.
● lack of ventilation ─ Ensure adequate air supply.
● water flow too low ─ Adjust the cooling water flow.
● fore-vacuum pressure ─ Reduce the fore-vacuum pressure.
too high ─ Adapt the ambient conditions.
● ambient temperature too
high
Turbopump not achieving the ulti- ● Turbopump is polluted 1. Heat the turbopump if required.
mate pressure 2. Have it cleaned.
3. Contact Pfeiffer Vacuum Service.
● Vacuum chamber, pipes 1. Carry out leak detection starting from the vacuum
or turbopump leaking chamber.
2. Check seals and flange connections.
3. Eliminate leaks in the vacuum system.
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Malfunctions
Unusual noises during operation ● Rotor bearing damaged 1. Contact Pfeiffer Vacuum Service.
● Rotor damaged 1. Contact Pfeiffer Vacuum Service.
● Splinter shield or protec- 1. Check and correct the seat of the splinter shield
tive screen loose or protective screen in the high vacuum flange.
2. Follow the installation instructions.
Red LED on the electronic drive ● Group error 1. Reset the malfunction by switching the current
unit illuminates supply off and on.
2. Reset the malfunction with V+ on pin 13 on the
“remote” connection.
3. Set the parameter [P: 009] via the interface
RS-485 to 1 = Malfunction acknowledgment.
4. Set the parameter [P: Set parameter [P:010] via
the interface RS-485 to 0 = off and then 1 = On
and Malfunction acknowledgment.
5. Carry out a differentiated malfunction analysis
with a display and control unit.
6. Contact Pfeiffer Vacuum Service.
Tbl. 17: Troubleshooting turbopumps
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Service solutions from Pfeiffer Vacuum
10 Service solutions from Pfeiffer Vacuum

We offer first class service
Long vacuum component service life, coupled with low downtimes, are clear expectations that you have
of us. We satisfy your needs with capable products and outstanding service.
We are consistently striving to perfect our core competence, service for vacuum components. And our
service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really
just begins then. In proven Pfeiffer Vacuum quality, of course.
Our professional sales engineers and service technicians stand ready to provide hands-on support to
you worldwide. Pfeiffer Vacuum offers a complete portfolio of service offerings, ranging from genuine
spare parts right through to service agreements.
Take advantage of Pfeiffer Vacuum Service
Whether for preventative on-site service from our field service, fast replacement with as-new replace-
ment products or repair in a Service Center close to you; you have various options for upholding your
equipment availability. Detailed information and addresses can be found on our website in the Pfeiff-
er Vacuum Service section.
Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner.
For quick and smooth handling of the service process, we recommend the following steps:
1. Download the current form templates.

─ Declaration of Service Request
─ Service Request
─ Declaration of Contamination
a. Dismantle all accessories and keep them (all external mounted parts as valve, inlet
screen, etc.).
b. Drain the operating fluid/lubricant as necessary.
c. Drain the cooling medium as necessary.
ANFORDERUNG SERVICE
2. Fill out the service request and the declaration of contamination.
ERKLÄRUNG KONTAMINIERUNG
3. Send the forms via email, fax or post to your local Service Center.
4. You will receive a response from Pfeiffer Vacuum.
Sending of contaminated products

No units will be accepted if they are contaminated with micro-biological, explosive or radioactive sub-
stances. If products are contaminated or if the declaration of contamination is missing, Pfeiffer Vacuum
will contact the customer before starting maintenance. In addition, depending on the product and the
level of contamination additional decontamination costs may be required.
57/72
Service solutions from Pfeiffer Vacuum
5. Prepare the product for transport in accordance with the details in the dec-
laration of contamination.
a) Neutralize the product with nitrogen or dry air.
b) Close all openings with airtight blank flanges.
c) Seal the product in appropriate protective film.
d) Only pack the product in suitable, stable transport containers.
e) Observe the applicable transport conditions.
ERKLÄRUNG KONTAMINIERUNG
6 Affix the declaration of contamination to the outside of the packaging.
7 Then send your product to your local Service Center.
8 You will receive a confirmation message/a quotation from Pfeiffer Vacuum.
For all service orders, our General Terms and Conditions of Sales and Supply and General Terms and
Conditions of Repair and Maintenance apply to vacuum equipment and components.
58/72
Spare parts
11 Spare parts
1 2
7
3
Fig. 31: Spare parts HiPace 1200
Position Designation Size order number Note Pieces Quan-

tity
1 Electronic drive unit refer to the rating plate depending on the con- 1
TC 1200 nection panel
2 "remote" mating plug PM 061 378 -X with solder tags 1
3 Supply socket HAN 3 PM 061 200 -T 1
4 Sealing gas valve 17.5 – 20 PM Z01 313 1
sccm
5 Syringe 50 ml PM 006 915 -U 1
6 Operating fluid F3 50 ml PM 006 336 -T Other lengths on re- 1
quest
7 Sealing ring P 3529 145 -A for threaded nozzle 2
8 Threaded nozzle 1/4" thread P 0998 067 for inner hose diameter 2
7 to 8 mm
Tbl. 18: Available spare parts
59/72
Accessories
12 Accessories
View the line of accessories for Pfeiffer Vacuum turbopumps online at pfeiffer-vac-
uum.com.
60/72
Technical data and dimensions
13 Technical data and dimensions

13.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
Maximum values refer exclusively to the input as a single load.
● Specifications according to PNEUROP committee PN5

● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
torque"
● ISO 21360 2007: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - General description”
● ISO 5302 2003: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance"
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m3/h)
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar bar Pa hPa kPa Torr | mm Hg

mbar 1 1 · 10 -3 100 1 0.1 0.75
bar 1000 1 1 · 105 1000 100 750
Pa 0.01 1 · 10-5 1 0.01 1 · 10-3 7.5 · 10-3
hPa 1 1 · 10-3 100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33 1.33 · 10-3 133.32 1.33 0.133 1
1 Pa = 1 N/m2
Tbl. 19: Conversion table: Pressure units
mbar l/s Pa m3/s sccm Torr l/s atm cm3/s

mbar l/s 1 0.1 59.2 0.75 0.987
Pa m3/s 10 1 592 7.5 9.87
sccm 1.69 · 10-2 1.69 · 10-3 1 1.27 · 10-2 1.67 · 10-2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm /s 3 1.01 0.101 59.8 0.76 1
Tbl. 20: Conversion table: Units for gas throughput
13.2 Technical data
Selection field HiPace® 1200 with TC HiPace® 1200 with TC HiPace® 1200, with
1200, DN 200 ISO-K 1200, DN 200 ISO-F TC 1200, DN 200 CF-F
Order number PM P03 910 PM P03 911 PM P03 912
Flange (in) DN 200 ISO-K DN 200 ISO-F DN 200 CF-F
Flange (out) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF
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Ultimate pressure according to PNEUROP < 1 · 10-7 hPa < 1 · 10-7 hPa < 5 · 10-10 hPa
Pumping speed for Ar 1200 l/s 1200 l/s 1200 l/s
Pumping speed for H2 1100 l/s 1100 l/s 1100 l/s
Pumping speed for He 1300 l/s 1300 l/s 1300 l/s
Pumping speed for N2 1250 l/s 1250 l/s 1250 l/s
Gas throughput at full rotational speed for 11 hPa·l/s 11 hPa·l/s 6 hPa·l/s
Ar
Gas throughput at full rotational speed for > 30 hPa·l/s > 30 hPa·l/s > 30 hPa·l/s
H2
Gas throughput at full rotational speed for > 30 hPa·l/s > 30 hPa·l/s 16 hPa·l/s
He
N2
Fore-vacuum max. for N2 2 hPa 2 hPa 2 hPa
Fore-vacuum max. for Ar 2.5 hPa 2.5 hPa 2.5 hPa
Fore-vacuum max. for H2 0.25 hPa 0.25 hPa 0.25 hPa
Fore-vacuum max. for He 0.9 hPa 0.9 hPa 0.9 hPa
Compression ratio for Ar > 1 · 108 > 1 · 108 > 1 · 108
Compression ratio for H2 6 · 103 6 · 103 6 · 103
Compression ratio for He 2 · 105 2 · 105 2 · 105
Compression ratio for N2 > 1 · 108 > 1 · 108 > 1 · 108
Power characteristic line in gas mode 0, 578/37800 W/min-1 578/37800 W/min-1 406/37800 W/min-1
vertex C
vertex D
vertex A
vertex B
Rotation speed ± 2 % 37800 rpm 37800 rpm 37800 rpm
Rotation speed variable 50 – 100 % 50 – 100 % 50 – 100 %
Run-up time 2.5 min 2.5 min 2.5 min
Sound pressure level ≤ 50 dB(A) ≤ 50 dB(A) ≤ 50 dB(A)
Integral leak rate < 1 · 10-8 Pa m³/s < 1 · 10-8 Pa m³/s < 1 · 10-8 Pa m³/s
Venting connection G 1/8" G 1/8" G 1/8"
Connection pressure max. for venting/seal- 1500 hPa 1500 hPa 1500 hPa
ing gas valve
Electronic drive unit with TC 1200 with TC 1200 with TC 1200
Mains requirement: voltage (range) 100 – 120/200 – 240 V 100 – 120/200 – 240 V 100 – 120/200 – 240 V
AC AC AC
Mains requirement: frequency (range)
Power consumption max. 1350 VA 1350 VA 1350 VA
Current consumption max. 10 A 10 A 10 A
Cooling method, standard Water Water Water
Cooling water temperature 15 – 35 °C 15 – 35 °C 15 – 35 °C
62/72
Cooling water consumption – – –
Permissible magnetic field max. 6 mT 6 mT 6 mT
Protection category IP54 IP54 IP54
Relative humidity of air 5 –85, not condens- 5 –85, not condens- 5 –85, not condens-
ing % ing % ing %
Mounting orientation Standard (0° – 90°) Standard (0° – 90°) Standard (0° – 90°)
Weight 30 kg 31.9 kg 41 kg
Tbl. 21: Technical data for HiPace 1200 Standard
Selection field HiPace® 1200 U with HiPace® 1200 U with HiPace® 1200 U with
TC 1200, DN 200 ISO- TC 1200, DN 200 ISO- TC 1200, DN 200 CF-F,
K, upside down ver- F, upside down ver- upside down version
sion sion
Ultimate pressure according to PNEUR- -7
< 1 · 10 hPa -7
< 1 · 10 hPa < 5 · 10-10 hPa
OP
Ar
H2
He
N2
Compression ratio for Ar > 1 · 10 8
> 1 · 10 8
> 1 · 108
vertex C
vertex D
vertex A
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Selection field HiPace® 1200 U with HiPace® 1200 U with HiPace® 1200 U with
K, upside down ver- F, upside down ver- upside down version
sion sion
vertex B
Connection pressure max. for venting/ 1500 hPa 1500 hPa 1500 hPa
sealing gas valve
AC AC AC
ing % ing % ing %
Mounting orientation Upside down (90° – Upside down (90° – Upside down (90° –
180°) 180°) 180°)
Tbl. 22: Technical data for HiPace 1200 U
Selection field HiPace® 1200 C with HiPace® 1200 C with HiPace® 1200 C with
K, corrosive F, corrosive corrosive
Ultimate pressure according to PNEUROP < 1 · 10-7 hPa < 1 · 10-7 hPa < 5 · 10-10 hPa
Ar
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H2
He
N2
Compression ratio for Ar > 1 · 10 8
> 1 · 10 8
> 1 · 108
vertex C
vertex D
vertex A
vertex B
Integral leak rate -8
< 1 · 10 Pa m³/s -8
< 1 · 10 Pa m³/s < 1 · 10-8 Pa m³/s
sealing gas valve
AC AC AC
ing % ing % ing %
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Mounting orientation Standard (0° – 90°) Standard (0° – 90°) Standard (0° – 90°)
Tbl. 23: Technical data for HiPace 1200 C
Selection field HiPace® 1200 U C with HiPace® 1200 U C with HiPace® 1200 U C with
K, upside down ver- F, upside down ver- upside down version,
sion, corrosive sion, corrosive corrosive
Ultimate pressure according to PNEUR- -7
< 1 · 10 hPa -7
< 1 · 10 hPa < 5 · 10-10 hPa
OP
Gas throughput at full rotational speed 11 hPa·l/s 11 hPa·l/s 6 hPa·l/s
for Ar
Gas throughput at full rotational speed > 30 hPa·l/s > 30 hPa·l/s > 30 hPa·l/s
for H2
Gas throughput at full rotational speed > 30 hPa·l/s > 30 hPa·l/s 16 hPa·l/s
for He
Gas throughput at full rotational speed 20 hPa·l/s 20 hPa·l/s 16 hPa·l/s
for N2
Compression ratio for Ar > 1 · 108 > 1 · 108 > 1 · 108
vertex C
vertex D
vertex A
vertex B
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Selection field HiPace® 1200 U C with HiPace® 1200 U C with HiPace® 1200 U C with
K, upside down ver- F, upside down ver- upside down version,
sion, corrosive sion, corrosive corrosive
sealing gas valve
AC AC AC
ing % ing % ing %
Mounting orientation Upside down (90° – Upside down (90° – Upside down (90° –
180°) 180°) 180°)
Tbl. 24: Technical data for HiPace 1200 UC
13.3 Dimensions
Dimensions in mm
Ø 264
HV
DN 200 ISO-K Ø 240
G 1/4“
15° 16
1.
5
123
189.5
203.1
45°
230.3
40°
297.8
G 1/8“
371.3
40°
G 1/8“
10°
70
°
141.9
VV
DN 40 ISO-KF
Fig. 32: HiPace 1200 | DN 200 ISO-K
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Ø 285
HV
DN 200 ISO-F Ø 264
G 1/4“ 16
15° 1.
5
130
196.5
210.1
237.3
45°
378.3
40°
G 1/8“
304.8
G 1/8“
40°
10°
70
°
141.9
VV
DN 40 ISO-KF
Fig. 33: HiPace 1200 | DN 200 ISO-F
HV
DN 200 CF-F Ø 264
G 1/4“
15° 16
1.
5
142.5
208.5
222.1
249.3
45°
316.8
40°
G 1/8“
390.3
G 1/8“
40°
10°
70
°
141.9
VV
DN 40 ISO-KF
Fig. 34: HiPace 1200 | DN 200 CF-F
VV
DN 40 ISO-KF
70
°
G 1/4“
15° 16
1.
5
G 1/8“
45°
40°
371.3
297.8
G 1/8“
230.3
189.5
203.1
40°
10°
123
141.9
Ø 240
HV Ø 264
DN 200 ISO-K
Fig. 35: HiPace 1200 U | DN 200 ISO-K
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VV
DN 40 ISO-KF
70
°
G 1/4“ 16
15° 1.
5
G 1/8“
45°
40°
378.3
304.8
G 1/8“
237.3
210.1
196.5
40°
10°
130
141.9 Ø 264
HV Ø 285
DN 200 ISO-F
Fig. 36: HiPace 1200 U | DN 200 ISO-F
VV
DN 40 ISO-KF
70
°
G 1/4“
15° 16
1.
5
G 1/8“
45°
40°
390.3
316.8
G 1/8“
249.3
222.1
40°
208.5
10°
142.5
141.9
Ø 264
HV
DN 200 CF-F
Fig. 37: HiPace 1200 U | DN 200 CF-F
69/72
Declaration of conformity
We hereby declare that the product cited below satisfies all relevant provisions of the follow-
ing EU Directives:
● Machinery 2006/42/EC (Annex II, no. 1 A)
● Electromagnetic compatibility 2014/30/EU
● Restriction of the use of certain hazardous substances 2011/65/EU
The authorized representative for the compilation of technical documents is Mr. Hel-
mut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar, Germany.
Turbopump
HiPace 1200 | U C
HiPace 1200 U | U C
Harmonized standards and national standards and specifications which have been
applied:
DIN EN ISO 12100:2011

DIN EN 1012-2:2011
DIN EN 61000-3-2:2014
DIN EN 61000-3-3:2014
DIN EN 61010-1:2010
DIN EN 61326-1:2013
DIN EN 62061:2013
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Aßlar
Germany
(Dr. Ulrich von Hülsen) Aßlar, 2018-07-11

Managing Director
71/72
ed. I - Date 1809 - P/N:PT0240BEN
*PT0240*

Pfeiffer Adixen HIPACE1200

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OPERATING INSTRUCTIONS EN

Translation of the Original

4 Transportation and Storage 21

10 Service solutions from Pfeiffer Vacuum 57

13 Technical data and dimensions 61

1 About this manual

1.1.2 Product variants affected

1.3.3 Stickers on the product

Rating plate (example)

n, f 37800 1/min, 630 Hz C US

Mass 27 kg Made in Germany 2018/05

Operating manual note

Vor Inbetriebnahme Pumpe mit Öl Operating fluids note

Mounting orientation upright note

Overhead mounting orientation note

Operating fluid filler screws note

Operating fluid filler screw

Cooling water connection

Sealing gas connection note

Abbreviation Meaning in this document

Tbl. 1: Abbreviations used in this document

Notes, tips or examples indicate important information on the product or on this

Risks during installation

Risks during operation

Risks during maintenance

Risks in the event of malfunctions

Infringement of EU conformity due to modifications to the product

General safety precautions when handling the product

2.4 Limits of use of the product

Tbl. 2: Permissible ambient conditions

Notes on ambient conditions

2.6 Foreseeable improper use

Family Size/model Property, attribute, feature

Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps

Tbl. 4: Turbopump features

Mains voltage ± 10% Output of the electronic drive unit

Tbl. 5: Drive power depending on the supplied mains voltage

● Sealing gas valve (already fitted)

4 Transportation and Storage

General information regarding safe transport

Information regarding transport of the turbopump without packaging

Storing the turbopump

General notes for the installation of vacuum components

5.2 Connecting the high vacuum side

Maximum Maximum Flatness Minimum ten- Screw Maximum Maximum

Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection

Important information for correct installation

5.2.2 Considering the earthquake protection

Safety connection, customer-side

5.2.3 Using a splinter shield or protective screen

Flange size Reduced pumping speed in % by gas type

5.2.4 Using the vibration compensator

Installing the vibration compensator

Fig. 4: Mounting orientations of the standard version, upright

Fig. 5: Mounting orientations of the U version, overhead

Determining the horizontal mounting orientation of the turbopump

5.2.6 Attaching ISO-K flange onto ISO-K

ISO flange connections