Chapter 2

Typical Vacuum Mechanisms

2.1 Functions of Vacuum Mechanisms

The vacuum mechanisms are used in vacuum technological equipment described

in Chapter 1 for transportation of components (samples, wafers, cathodes, etc.)
from one working position to another, for their orientation and positioning against
the instruments (electron-, ion-, molecular, X-ray beam), or for their positioning
against other components (for example, cathode against anode of the gauge). In
scanning microscopy they are used for the instrument (probe or cantilever) posi-
tioning and scanning of the analyzed surface. In most cases it is enough to have
one or two degrees of freedom (linear motion and rotation). However, some techno-
logical processes (surface analysis, scanning nanomicroscopy, X-ray lithography)
require 3–6 degrees of freedom.
The main element in any vacuum mechanism is the motion feedthrough which
plays a role of the mechanical element of transmission as well as a sealing ele-
ment. It is the most critical mechanical element of the kinematic chain of the drive
because it controls the required precision of the mechanism and at the same time
it should protect vacuum elements against the atmospheric air. In many cases the
motion feedthrough plays a role of the final vacuum mechanism on a technological
position.
In some cases for small micro- or nanotravels independent piezo drive situated in
the vacuum chamber can be used. In these cases vacuum feedthroughs are not used.

2.2 Rotary-Motion Feedthroughs

Rotary-motion feedthroughs for transmission of the rotation into a vacuum chamber

without reduction are well-proven mechanical devices. In high vacuum (to 10−5 Pa)
they are designed on the basis of a cup-type seal [1, 2] which, in turn, is based
on Wilson seal [3]. For rotary-motion transmission into ultrahigh vacuum bellows

E.A. Deulin et al., Mechanics and Physics of Precise Vacuum Mechanisms, 21

Fluid Mechanics and Its Applications 91, DOI 10.1007/978-90-481-2520-3_2,
© Springer Science+Business Media B.V. 2010
22 2 Typical Vacuum Mechanisms

Fig. 2.1 The general view of the set of the bellow sealed rotary-motion feedthroughs (a, b, c),
which are manufactured by Vacuum Generators Co. The middle sample (b) is of two degrees
of freedom; (d) the diagram of the bellow sealed rotary-motion feedthrough, where: 1 – leading
eccentric shaft; 2 – the output eccentric shaft; 3 – intermediate hermetic bush; 3a – the hermetic
screen into the bush; 4 – the stainless bellow.

sealed rotary-motion feedthroughs are used. These devices are manufactured by a

number of vacuum companies [4–11].
Figures 2.1a–c show the bellows-sealed rotary-motion feedthrough manufactured
by Vacuum Generators Co. [9]. These feedthroughs can be designed with double
coaxial input and output shafts (Figure 2.1d) which allows both rotation and lin-
ear motion, Figure 2.1b. The scheme of the simplest rotary-motion feedthrough is
shown in Figure 2.1d. The input rotation of the leading eccentric shaft 1 sets the
intermediate hermetic bush 3 in circular motion without rotation. This bush in its
turn sets the output eccentric shaft 2 into rotation again. The bellow 4 hermetically
welded to the body 5 and to the bush 3 is sealed with the hermetic screen 3a into
the bush. From one side, the value of the eccentricity “e” of the shafts 1 and 2 de-
termines the bellows longevity from one side and from the other side the loading