09DN07 NANOLITHOGRAPHY AND FABRICATION

3003
PATTERNING OF THIN FILMS: Introduction - Necessity for a clean room- different types of clean rooms-construction and
maintenance of a clean room- Lithography -Optical lithography- Optical projection lithography- Multistage scanners resolution- Photo
mask- Binary mask- Phase shift mask - Attenuated phase shift masks - alternating phase shift masks - Off axis illumination- Optical
proximity correction - Sub resolution assist feature enhancement-Optical immersion lithography- Optical interferometric lithography-
Holographic lithography. (15)

MASKLESS OPTICAL LITHOGRAPHY: Mask less optical projection lithography - Zone plate array lithography-Extreme ultraviolet
lithography. (5)

ELECTRON BEAM LITHOGRAPHY: Scanning electron-beam lithography- mask less EBL- parallel direct-write e-beam systems-
electron beam projection lithography - Scattering with angular limitation projection e-beam lithography- Projection reduction
exposure with variable axis immersion lenses. (5)

X-RAY LITHOGRAPHY: Ion beam lithography- Focusing ion beam lithography - Ion projection lithography - Projection focused ion
multi-beam - Masked ion beam lithography- Masked ion beam direct structuring- atom lithography. (5)

NANOIMPRINT LITHOGRAPHY AND SOFT LITHOGRAPHY: Nanoimprint lithography (NIL)- NIL- hot embossing- UV-NIL- Soft
Lithography- Moulding/Replica moulding: Printing with soft stamps- Edge lithography -Dip-Pen Lithography-set up and working
principle. Etching techniques- Reactive Ion etching- RIE reactive ion etching- Magnetically enhanced RIE- IBE Ion beam etching-
Other etching techniques. (15)

Total 45
REFERENCES:
1. D. S. Dhaliwal et al., PREVAIL –“Electron projection technology approach for next generation lithography”, IBM Journal
Res. & Dev. 45, 615, 2001.

2. M. Baker et al., “Lithographic pattern formation via metastable state rare gas atomic beams”, Nanotechnology 15, 1356,
2004.

3. H.Schift et al., “Fabrication of polymer photonic crystals using nanoimprint lithography”, Nanotechnology 16, 261, 2005.

4. R.D. Piner, “Dip-Pen” Nanolithography, Science 283, 66, 1999.

09DN08 MEMS AND NEMS

3003
Development of micro electronics, Region of Nanostructures, methods and limits on microminiaturjzatjon in semiconductors, micro
electro mechanical systems. (9)

Silicon micromachining, semiconductors and insulators, Microsystems fabrication techniques, Silicon MEMS fabrication technology,
Single crystal reactive etching and metallization process. (9)

Non-silicon MEMS and fabrication techniques, SiC MEMS, Biomedical - MEMS techniques. Integration of microsystems with
electronics – RF MEMS – Applications. (9)

Polymers in Microsystems, Packaging of MEMS devices by anodic/fusion bonding, Pressure sensors and packaging, MEMS
performance and evaluation. (9)

Nano electro mechanical systems fabrication and process techniques, lntegration of nanosystems and devices, applications and
future challenges. (9)

Total 45
REFERENCES:
1. W.R.Fahrner, “Nanotechnologv and Nanoelectronics - Materials, Devices and Measurement Techniques” Springer, 2006.
2. K.Goser, P.Glosekotter & J.Dienstuhl, “Nanoelectronic and Nanosystems – From Transistors to Molecular Quantum Devices”
Springer, 2004
3. S. E. Lyshevski, MEMS and NEMS: Systems, Devices and Structures, CRC Press, 2002.
4. Gregory Timp, Nanotechnology, Springer, 2005
5. Smart Material Systems and MEMS: Design and Development; Vijay K Varadan, K J Vinoy, S Gopalakrishnan.
 09DN09 NANOELECTRONICS
3003
Basics of nanoelectronics – capabilities of nano electronics – physical fundamentals of nano electronics – basics of information
theory – the tools for micro and nano fabrication – basics of lithographic techniques for nanoelectronics. (5)

Quantum electron devices – from classical to quantum physics: upcoming electronic devices – electrons in mesoscopic structure –
short channel MOS transistor – split gate transistor – electron wave transistor – electron spin transistor – quantum cellular automate
– quantum dot array – Principles of Single Electron Transistor (SET) – SET circuit design – comparison between FET and SET
circuit design. (12)

Nanoelectronics with tunneling devices and superconducting devices – tunneling element technology - RTD: circuit design based
RTD – Defect tolerant circuits. Molecualr electronics – elementary circuits – flux quantum devices – application of
Superconducting devices – Nanotubes based sensors, fluid flow, gas temperature; Strain – oxide nanowire, gas sensing (ZnO, TiO,
SnO, WO), LPG sensor (SnO powder)- Nano 2 2 3 2 designs and Nanocontacts-metallic nanostructures.
(10)

A survey about the limits – Replacement Technologies – Energy and Heat dissipation – Parameter spread as Limiting Effect – Limits
due to thermal particle motion – Reliability as limiting factor – Physical limits – Final objectives of integrated chip and systems.
(6)

Memory devices and sensors – Nano ferroelectrics – Ferroelectric random access memory – Fe-RAM circuit design – ferroelectric
thin film properties and integration – calorimetric sensors – electrochemical cells – surface and bulk acoustic devices – gas sensitive
FETs – resistive semiconductor gas sensors –electronic noses – identification of hazardous solvents and gases – semiconductor
sensor array. (12)

Total 45
REFERENCES:
1. Karl Goser, Peter Glosekotter, Jan Dienstuhl, “Nanoelectronics and Nanosystems”, Springer, 2004.
2. Rainer Waser (ed.) Wiley VCH Verlag Weiheim Nanoelectronics and information technology: Advanced electronic materials
and novel and devices, 2nd edition, 2005.
3. Mick Wilson, Kamali Kannangara, Geoff Smith, Michelle Simmons, Burkhard Raguse “Nanotechnology: basic science and
emerging technologies”, Overseas Press 2005.

09DN11 NANOSENSORS, DETECTORS AND THEIR APPLICATIONS

3003

SENSOR CHARACTERISTICS AND PHYSICAL EFFECTS: Active and Passive sensors – Static characteristic - Accuracy, offset
and linearity – Dynamic characteristic - First and second order sensors – Physical effects involved in signal transduction-
Photoelectric effect – photo dielectric effect – Photoluminescence effect – electroluminescence effect – chemiluminescence effect –
Doppler effect – Barkhausen effect – Hal effect – Ettinshausen effect – Thermoelectric effect – Peizoresistive effect – piezoelectric
effect – pyroelectric effect – magneto-mechanical effect (magnetostriction) – Magnetoresistive effect.
(12)

NANO BASED INORGANIC SENSORS: Density of states (DOS) – DOS of 3D, 2D, 1D and 0D materials – one dimensional gas
sensors:- gas sensing with nanostructured thin films – absorption on surfaces – metal oxide modifications by additives – surface
modifications – Nano optical sensors – nano mechanical sensors – plasmon resonance sensors with nano particles – AMR, Giant
and colossal magnetoresistors – magnetic tunneling junctions. (8)

ORGANIC / BIOSENSORS: Structure of Protein – role of protein in nanotechnology – using protein in nanodevices – antibodies in
sensing – antibody in nano particle conjugates – enzymes in sensing – enzyme nanoparticle hybrid sensors – Motor proteins in
sensing – transmembrane sensors – Nanosensors based on Nucleotides and DNA – Structure of DNA – DNA decoders and
microarrays – DNA protein conjugate based sensors – Bioelectronic sensors – DNA sequencing with nanopores – sensors based on
molecules with dendritic architectures – biomagnetic sensors. (12)

APPLICATIONS: Cantilever array sensors- Cantilever sensors for diagnosis of diabetes mellitus - Cantilever sensors for cancer
diagnosis- Nano tube based sensors- Nanotube-based sensors for DNA detection- Nanotube-based sensors for capnography-
Nanowire-based sensors- Nanowire-based electrical detection of single viruses- Nanowire-based electrical detection of
biomolecules. (8)

DETECTORS AND APPLICATIONS: Bio receptors–Bio detectors-Nano array based detector-Nano Particle based detector- Ultra-
sensitive detection of pathogenic biomarkers- Ultra-sensitive detection of single bacteria.
(5)

Total 45
REFERENCES:
1. Kouroush Kalantar – Zadeh, Benjamin Fry, “Nanotechnology enabled Sensors”, Springer Verlag New York, 2007, ISBN-13:
9780387324739
2. H.Rosemary Taylor, “Data acquisition for sensor systems” (sensor physics and technology 5) Chapman and Hall, London,
UKISBN 0 412 785609, 1997.
3. Jerome Schultz, Milar Mrksich, Sangeeta N. Bhatia, David J. Brady, Antionio J. Ricco, David R. Walt, Charles L. Wilkins,
“Biosensing: International Research and Development”, Springer, 2006 ISBN 10 14020 40571, ISBN 13 978 1 4020 4057
4. Ramon Pallas-Areny, John G. Webster, “Sensors and signal conditioning” John Wiley & Sons, 2001, 2 edition ISBN 0 471
33232 1.

09DN13 POLYMER ELECTRONICS

3003
POLYMERIC MATERIALS: Introduction – Origin, classification, formation of polymers – chain growth and step growth
polymerization, copolymerization. Thermoplastics and thermosets. Micro structures in polymers – polymer length, molecular weight,
amorphous and crystalline, thermal transitions in plastics. (9)

ELECTRONICALLY CONDUCTING POLYMERS: General description – Band theory, insulators, semiconductors, metals,
semimetals, poly(sulfur nitride), polyacetylene – Synthesis, structure and morphology. Conductivity doping, theory, uses. Phenylene
polymers – poly(para-phenylene), poly(phenylene vinylenes),poly(phenylene sulfide). Polypyrrole and Polythiophene, Polyaniline.
Stacked phtalocyanine polymers, polymers with transition metals in the side-group structure.
(10)
Roadmap for Organic Electronics Applications : Technology, Materials, Printing and Patterning Techniques, Devices, Principle
Challenges/Red Brick Walls.Technical Issues in Printed Electrodes for All-Printed Thin-Film Transistor Applications: Introduction,
Surface Roughness of Printed Electrodes, Edge Waviness in Printed Electrodes, Solution-Process Organic TFT. All-Printed Flexible
Organic Light-emitting Diodes: introduction, Roll-to-Roll Printing, Gravure Printing of Poly(3,4-ethylenediocythiophene):poly(styrene
sulfonate) and Pentafluorobenzenethiol , Screen Printing of Aluminium Cathode, Characteristics of All-Printed OLEDS, Roll-to-Roll
Printed OLED Demonstrators. (9)
Scaling Effects in Organic Transistors and Transistor-Based Chemical Sensors : Scaling Behavior in Organic Transistors,
Charge Transport in Polycrystalline Organic Semiconductors (Intragrain and Intergrain), Characterization of Nanoscale Organic
Transistors, Channel Length and Temperature Dependence of Charge Transport in Organic Transistors, Field-Dependent Mobility
Model for the Scaling Behavior of Charge Transport, Charge Transport in sub-10-nm Organic Transistors, Scaling Behavior of
Chemical Sensing with Organic Transistors, General Introduction to Organic Transistors for Sensing Applications, Vapor Sensing in
Micron-Sized Organic Transistors and Trapping at Grain Boundaries, Transition of Sensing Response by Organic Transistors from
Micron-Scale to Nanoscale, Discussions on the Scaling Behavior of Sensing Response: Role of Grain Boundaries and Contact,
Sensor Response to Different Analytes and the Function of Receptors.
(9)

Sensor applications: Organic Thin-Film Transistors for Inorganic Substance Monitoring, OTFT-Based Sensors, Strain and
Pressure Sensors Based on Organic Field-Effect Transistors, Applications for Organic Field-Effect Transistor Sensors, An
Introduction to Organic Photodetectors. (8)

Total 45
REFERENCES:
1. Harry R Allcock, Frederick W Lampe and James E Mark, “Contemporary Polymer Chemistry”, 3rd edition, Pearson
2. Polymer Electronics- A flexible Technology: Frances Gardiner, Eleanor Carter: iSmithers.
3. Organic Electronics in Sensors and Biotechnology, Ruth Shinar, Joseph Shinar; Mc graw Hill.
4. Norman G Einspruch, “VLSI Electronics Microstructure Science”, Volume 1, Academic Press, New York, 1981.

09DN14 NANOTECHNOLOGY FOR ENERGY SYSTEMS

3003
INTRODUCTION: Nanotechnology for sustainable energy-Materials for light emitting diodes-batteries-advanced turbines-catalytic
reactors-capacitors-fuel cells. (9)

RENEWABLE ENERGY TECHNOLOGY: Energy challenges, development and implementation of renewable energy technologies -
nanotechnology enabled renewable energy technologies - Energy transport, conversion and storage, Nano, micro and meso scale
phenomena and devices. (9)

MICRO FUEL CELL TECHNOLOGY: Micro-fuel cell technologies, integration and performance for micro-fuel cell systems - thin film
and microfabrication methods - design methodologies - micro-fuel cell power sources. (9)

MICROFLUIDIC SYSTEMS: Nano-electromechanical systems and novel microfluidic devices - nano engines - driving mechanisms
- power generation - microchannel battery - micro heat engine (MHE) fabrication - thermocapillary forces - Thermocapillary pumping
(TCP) - piezoelectric membrane. (9)
HYDROGEN STORAGE METHODS: Hydrogen storage methods - metal hydrides - size effects - hydrogen storage capacity -
hydrogen reaction kinetics - carbon-free cycle- gravimetric and volumetric storage capacities - hydriding/dehydriding kinetics - high
enthalpy of formation - and thermal management during the hydriding reaction - distinctive chemical and physical properties -
multiple catalytic effects - degradation of the sorption properties - hydride storage materials for automotive applications.
(9)

Total 45
REFERENCES:
1. J. Twidell and T. Weir, Renewable Energy Resources, E & F N Spon Ltd, London, 1986.
2. Hydrogen from Renewable Energy Sources by D. Infield,
3. Fuel Storage on Board Hydrogen Storage in Carbon Nanostructures by R.A., Shatwell,
4. Fuel cell technology handbook. Hoogers. CRC Press, 2003.
Handbook of fuel cells: Fuel cell technology and applications by Vielstich. Wiley, CRC Press, 2003

09DN52 NANOSENSORS DESIGN LAB

1. Design and simulation of pressure sensor
2. Design and simulation of gas sensor
3. Design and simulation of Thermal sensor
4. Design and simulation of Gyroscope
5. Design and simulation of Accelerometer
6. Design and simulation of DNA Biosensor
7. Design and simulation of Cantilever Array sensor
8. Design and simulation of Nanotube based sensor
9. Design and simulation of Nano wire based sensor