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Sensors and Actuators B: Chemical: A. Colombelli, M.G. Manera, A. Taurino, M. Catalano, A. Convertino, R. Rella
Sensors and Actuators B: Chemical: A. Colombelli, M.G. Manera, A. Taurino, M. Catalano, A. Convertino, R. Rella
Sensors and Actuators B: Chemical: A. Colombelli, M.G. Manera, A. Taurino, M. Catalano, A. Convertino, R. Rella
a r t i c l e i n f o a b s t r a c t
Article history: In this work we study the potential of silica nanowires (NWs) decorated with Au nanoparticles (NPs) as
Received 27 August 2015 novel optical platform for plasmonic biosensing. These composite materials combine the high white-light
Received in revised form scattering of silica NWs with the selective absorption of the localized surface plasmon resonances (LSPRs)
13 November 2015
of the metal NPs, generating efficient light trapping just at the LSPR wavelengths. In addition, the NWs
Accepted 17 November 2015
offer a macroporous framework for a three-dimensional (3D) distribution of the Au NPs, easily accessible
Available online 2 December 2015
by biomolecules. These optical and morphological pecularities, make the decoration of silica NWs with
metal NPs a promising strategy for improved plasmonic biosensing. We fabricated silica NWs by thermal
Keywords:
Surface plasmon
oxidation of silicon (Si) NWs, grown by plasma enhanced chemical vapor deposition (PECVD). The silica
Optical sensing NWs were decorated with Au NPs by evaporating and then de-wetting via thermal annealing Au thin films.
Transducer The biosensing ability of these materials was studied and compared with the performances of similar
Silica Au NPs deposited on glass substrate, forming a planar (two-dimensional, 2D) distribution. A careful
Nanowires morphological analysis about the NWs and their Au NP coverage, including their vertical distribution
across the NW film, was performed by high resolution scanning electron microscopy (HR-SEM) and
energy dispersive X-ray spectroscopy (EDS) experiments. The morphological information was used for
building a theoretical model through 2D finite element modeling (FEM) able to describe the optical
behavior of the new transducers and their functional properties, as well as to predict the evolution of the
sensing performance of the transducer when passing from a 2D to a 3D distribution of plasmonic NPs.
The Au NPs decorated NWs were finally modified with a self-assembled monolayer of BSA (bovin serum
albumin) and the specific binding with the related antibody monitored during the time.
© 2015 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.snb.2015.11.075
0925-4005/© 2015 Elsevier B.V. All rights reserved.
590 A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597
well defined extinction bands so that an easy theoretical predic- bulk RI sensitivity in these 3D structure with respect to the classi-
tion of optical response of such systems using the discrete dipole cal 2D chip. The improved performances of the 3D structure with
approximation (DDA) method is possible [20,21]. respect the 2D were also predicted by the theoretical model. After
However, such plasmonic devices that rely solely on changes in this calibration step, immobilization of BSA (bovine serum albu-
the dielectric permittivity of the environment often suffer from low min) molecules was monitored, and the consequent binding with
sensitivity (typically <10 nm spectral shift for spherical nanopar- anti-BSA antibodies was detected. The label free detection of the
ticles) [22,23] that originates from fairly small variations in the interactions is easily achieved thus confirming the promising out-
refractive index because of the low density of nanoparticles in the comes of the proposed optical sensor.
defined surface area.
Recently we have showed as silica nanowires (NWs) deco- 2. Experimental details
rated with Au and Ag NPs can act as efficient RI sensors [24],
due to their morphological and optical features, which are also 2.1. Silica NWs decorated with Au NPs
very attractive for biosensing applications. First, they form a dense
three-dimensional (3D) ensemble of metal NPs, easily accessible to Forests of silica NWs were produced by thermal annealing of
liquids, vapors, or biomolecules due to the macroporous structure Si NWs grown by PECVD. First, gold-catalyzed Si NWs were grown
of the NW forest and the large interparticle distance. Second, they by PECVD Si(1 0 0) substrates. To induce the NWs growth, a 1 nm
offer absorption enhancement at the LSPR wavelengths because of thick Au film was evaporated onto the substrates prior to growth.
light trapping effects in the NW forest. To the best of our knowledge, The growth was performed by using pure SiH4 as precursor at
only a few attempts have been made to create three-dimensional a total pressure of 1 Torr and substrate temperature of 360 ◦ C. A
(3D) LSPR structures to increase the sensing performance of metal 13.56 MHz radiofrequency with power density of 50 mW cm−2 was
NPs transducers. used to create the plasma. In these growth conditions 15–20 m
Jiang and co-workers [25] fabricated multilayer structures long Si NWs with average diameter of 150–200 nm at the bottom
composed of Au nanoparticles (NPs) and polyelectrolyte by and tapered shape can be obtained [30]. After the growth, the Si
spin-assembly or spin-assisted layer-by-layer (SA-LbL) deposition NWs were oxidized to form SiO2 (silica) NWs by means of a ther-
techniques and discussed their optical properties by correlating mal treatment in a convection oven (controlled steam atmosphere)
them to the density of the metal NPs into the multilayer struc- at 980 ◦ C for 8 h. The decoration of the silica NWs with Au NPs was
ture. Plasmon resonance peaks from isolated NPs and interparticle obtained by thermal evaporation of a thin film of Au on the silica
interactions were revealed in their UV–vis extinction spectra. In NWs. The nominal thickness was fixed at 12 nm and estimated by
Refs. [26,27] metal-coated macroporous films were realized using considering the deposition rate obtained in the case of evapora-
silica spheres and used as transducer platform to measure a typ- tion on a flat substrate. Au NPs were obtained as a result of metal
ical antigen-antibody binding event. Ye et al. [28] demonstrated de-wetting at high temperatures (∼800 ◦ C) for 6 min.
the improvement of bulk refractive index sensitivity of 3D self- In order to compare the sensing performance of the 3D plas-
assembled Au NPs multilayer structures obtained by the alternate monic structure with respect to a traditional 2D configuration, Au
deposition of a bifunctional cross-linker and Au NPs. The num- NPs on glass substrate were also prepared in the same conditions
ber of deposition cycles, in this case, was crucial in obtaining the used for the decoration of the NWs, i.e. thermal evaporation of a
desired sensor performance. Analogously, Guo and coworkers [29] 12 nm thick layer of Au onto glass substrates and successive thermal
realized a 3D Au nanoarchitecture by layer-by-layer (LbL) deposi- treatment at 800 ◦ C for 6 min.
tion of Au NPs and multiwalled carbon nanotubes (MWCNTs). After
demonstrating the improvement of the bulk refractive index (RI)
sensitivity of these multilayered Au NPs with respect to a mono- 2.2. Morphology
layer of AuNPs on a glass chip, they experimented the beneficial role
of the 3D transducing platform also for the study of a biomolecular The morphology of the silica NWs decorated with metal NPs was
binding experiment. investigated by SEM both in plan-view and cross-sectional geom-
In this work, we study the biosensing feasibility of silicon etry. EDS line scan profiles were acquired in cross-section in order
NW forests decorated with Au NPs. In particular, silica NW to study the compositional distribution of gold, silicon and oxygen
were obtained by thermal oxidation of Si NWs grown by plasma along the thickness of the NWs film. A Zeiss NVISION 40 dual-beam
enhanced chemical vapor deposition (PECVD). The NWs were Focused Ion Beam machine, equipped with a high resolution SEM
decorated with metal Au NPs by de-wetting thin metallic films Gemini column and an Oxford 350 x-act EDS spectrometer, was
evaporated on the NWs [24]. The proposed preparation techniques used for SEM and EDS experiments. SEM observation were also
offer the stability and reproducibility typical of a physical depo- performed onto 2D samples containing gold NPs deposited on glass
sition technique while keeping a degree of flexibility required for substrates.
producing a functional transducer platform. In order to compare
the sensing performance of the 3D plasmonic structure respect to 2.3. Modeling and simulation
a traditional 2D configuration, Au NPs on glass substrate were also
prepared in the same conditions used for the decoration of the NWs. The optical properties of the system were investigated through
Structural and morphological information were obtained by finite element simulations. A numerical model for the diffuse reflec-
Scanning Electron Microscopy in normal and cross section con- tivity of disordered NWs decorated with plasmonic nanostructures
figuration. They were used to build a theoretical model through was developed with the RF Module of COMSOL Multiphysics
a 2D finite element model (FEM) able to describe the optical platform. The model has taken into account the morphological
behavior of the transducers and their functional properties. In the characteristics of the system, the scattering events of the light in
numerical model the scattering in the NWs framework and the the NWs mats and the plasmonic absorption of metallic NPs. The
plasmonic absorption of metallic NPs were taken into account. model well described the reflectivity measurements and the ability
Numerical results found a confirmation in experimental optical of the system to perform real-time monitoring of molecular adsorp-
characterization. tion. We explored several key parameters in order to know how
Finally, a functional characterization of the realized transducer the optical properties of the local environment influence the LSPR
platform was carried out thus demonstrating an increase of the conditions.
A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597 591
Fig. 1. (a) Representation of the used experimental set-up. (b) Schematic diagram of the sensor system.
Fig. 4. SEM micrograph of the NPs distribution deposited onto glass substrate.
the profile: a value of (32 ± 2)% was obtained at the bottom of the
NWs film and a value of (10 ± 1)% was obtained at the top of the film.
Similarly, the oxygen concentration gradually decreases; consider-
ing the Si/O counts ratio along the scan profile, it can be noted that
this ratio remains almost constant, being 2.92 ± 0.76 in the NWs
film and 2.77 ± 0.78 in the SiO2 , demonstrating that the NWs have
a uniform composition along the film depth.
Some information about the Au coverage can be also derived
from the EDS profile: the Au signal increases almost linearly when
Fig. 2. SEM plan-view secondary electron images of the NWs forest at low (a) and going from the bottom of the NWs to their top; this trend is opposite
high (b) magnification. The inset of figure (b) shows the Au coverage of the extreme to the one observed for the Si signal, giving a clear evidence that
tapered tip of a wire.
the Au NPs are mostly distributed on the outer part of the NWs
layer, that mainly exposed to the evaporated gold flux, whereas
electron beam from the Si/SiO2 interface to the top of the NWs the innermost areas remain uncovered.
film. Fig. 3 reports the SEM image of the cross section together with By using the fabrication process described above to decorate
the EDS profiles of Si (in red), O and Au signals acquired during the Si NWs, a planar distribution of Au NPs on a glass substrate was
the electron beam scanning along the 18 m long yellow line. A realized. The morphology of the 2D samples was also investigated
silicon dioxide layer of 1.8 m between the Si substrate and the by plan-view SEM analysis. The 2D architecture is shown in Fig. 4. As
NWs film can be observed. The analyses of these profiles allowed to one can see the dimension of Au NPs are similar to those distributed
extrapolate quantitative information to be used for the NWs model. onto Si NWs ranging between 20–30 nm. In the inset the optical
An estimation of the NWs density was obtained from the Si pro- absorption spectrum of the Au NPs distribution is shown. As one can
file. From the value of the Si counts in the substrate, corresponding see the absorption peak due to the localized plasmons is centered
to a 100% Si density, the Si percentage in the film was derived from at about m = 530 nm.
Fig. 3. SEM cross-sectional image showing the Si substrate, the SiO2 layer and the NWs forest. The EDS profiles of Si (counts reduced by a factor 5 to compare all the profiles
in the same graph), O and Au are reported in the graph. (For interpretation of the references to color in this figure legend, the reader is referred to the web version of this
article.)
A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597 593
3.2. Theoretical modeling of highly disordered NWs system 3.2.1. Building of the model
The simulation domain was composed of several layers with
Disordered NWs mats have significant diffuse reflectivity arising optimized thicknesses. By using the results of SEM morphological
from multiple scattering events that the light undergoes by pass- analysis and EDS profile, we built a model composed by the fol-
ing across NW forests [30,32–34]. Systems of Silica NWs assure, lowing layers visible in Fig. 5a: air environment (10 m), SiO2 NWs
for example, large light scattering at all wavelengths in the vis- layers (15 m), a suitable 3D distribution of Au NPs Fig. 5b, SiO2
ible range, appearing as a natural bright white mat. Recently it layer (1.8 m) and the Si substrate (10 m). The SiO2 NWs were
has been also demonstrated how the outstanding optical reflec- modeled with a series of 15 layers of composite material SiO2 /Air,
tion, especially in the UV range, makes these materials very suitable characterized by an inwards increase of the refractive index over
in UV lightening devices [32]. The presence of Au particles on the the NW layer. This variation was due to the decreasing filling fac-
NWs modifies their reflectivity and their appearance because of tor of SiO2 along the wires growth direction, which arises from
the selective optical absorption of plasmonic nanostructures [24]. both tapering of the wires and the presence of a distribution of
How the geometrical properties (shape, dimension, distribution) of the NW length that especially affects the outer part of the film.
both NWs and metal nanostructures may modify the reflection of The presence of Au nanostructures was simulated by adding, in
these materials is not yet clarified, and this is a critical issue for the the simulation domain, a dense array of nano-spheres with diam-
development of efficient NW/NP based devices. Here we developed eter of 20 nm. Both the Au particles distribution and the RI of the
a numerical model with the RF Module of COMSOL Multiphysics, wire layers were optimized by exploiting the results of the EDS
which calculated the reflectivity of these combined systems. Opti- profiles reported in the previous section. The effective distribution
cal and electric properties were calculated across a wide spectral of Si, O and Au from the substrate interface to the surface of the
range including substrate and environmental effects. Due to the sample, represented a key factor in the model construction. The
highly disordered nature of the system, it is useless to develop a gradual increase of Au signal from the base to the top of the NW
model with a precise 3D geometry, as it can be done with ordered film suggested that Au NPs are mostly distributed on the top of
vertical NWs. Instead, we developed a finite element simulation the wires. In the model, we reproduced a similar particles distribu-
characterized by a 2D multi-layered structure, showing its appli- tion, by adding a periodic array of nano-spheres characterized by
cation to silica NWs decorated with Au nano-spheres. As built, the an outward increase of the density. The silicon and the oxygen EDS
model can predict easily the optical properties of other disordered profiles confirm the decreasing filling factor of SiO2 in the outer
NWs systems. part of the film allowing the estimation of the concentrations of
Fig. 5. (a) Schematic of the layered simulation domain. The geometry is not to scale. (b) Periodic Au NPs distribution characterized by an increasing density in the NW layer.
(c) SiO2 and Air concentrations calculated for the NW layer (left); refractive index distribution calculated for the NW layer (right).
594 A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597
Fig. 6. Simulated and experimental UV–vis spectra comparison of the NWs system 3.2.3. Refractive index sensitivity simulation
(red lines) and the NWs/AuNPs hybrid structure (black lines). The modeling of the two investigated transducing nanostruc-
tures allowed us also building a simulated calibration curve relative
these elements in the NWs mats. The effective refractive index of to bulk Refractive Index changes in the environment surrounding
the NWs layers was calculated by considering a SiO2 /Air compos- the metal NPs, both in a planar and three-dimensional configura-
ite material with a decreasing SiO2 concentration that varies from tion. The results are reported in the following by comparison with
33%, near the substrate interface, to 13% near the sample surface experimental ones.
(Fig. 5c). Finally, complex wavelength dependent RIs were set for
both the SiO2 layer and the silicon substrate. 3.3. Functional characterization of the investigated transducer
platforms
3.2.2. Optical investigation of the model
In Fig. 6 we plot the inverse of the experimental reflectivity spec- 3.3.1. Refractive index sensitivity tests
tra obtained from pristine silica NWs and Au decorated silica NWs The sensitivity of the silica NWs/AuNPs and 2D Au array was
(continous black line) in the wavelength range 500–600 nm. The initially investigated by recording LSPR spectra after their immer-
spectrum of the pristine silica NWs is characterized by low values sion in solutions with different refractive indices: air (n = 1), pure
(i.e. high reflectivity values) whereas the Au decorated NWs show ethanol (n = 1.36), water (n = 1.33) and in a water/ethanol solutions
a peak at around 540 nm. Fig. 6 shows also the simulated spectra at increasing concentrations. In Fig. 7 we plot the dynamic response,
(dashed red lines) obtained with 2D finite element model previ- evaluated as the normalized integrated area (NIA) of LSPR peak, for
ously described for both the samples. At the investigated wave- both the transducers exposed to different ethanol/water concen-
lengths, Au was modeled with a complex RI. The real and imaginary tration, i.e. by varying the RI of the environment. Changes of the
components of the Au RI were described by an interpolated sensors signal were due to changes in the intensity and wideness of
Fig. 7. Normalized integral absorption response curves of the sensing layer exposed to different ethanol concentration (dynamic sensing curves).
A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597 595
Fig. 8. (a) Experimental calibration curves of the 2D and 3D systems immersed in different concentrations of ethanol; (b) calibration curves calculated for 2D and 3D periodic
distribution of gold NPs immersed in different concentrations of ethanol.
the LSPR curves as shown in the following Fig. 9. This method of sen- RI change as low as 0.2%, values much lower than those detected
sitivity measurement can be often found in literature as it ensures a (0.67%) from the 2D Au array.
higher signal-to-noise ratio compared to the peak wavelength shift In Fig. 8a we show the experimental sensitivity, i.e. the NIA,
measurement [36,37]. The Au decorated NWs are characterized by for both the 3D and 2D transducer platforms as function of the RI
very short rise time, in the order of seconds, and can appreciate variation. Improved performance are exhibited by the decorated
Fig. 9. (a) Illustration of the Au-NPs functionalization for the detection of BSA–AntiBSA biological interactions. (b) Absorption spectra of the silica NWs/Au-NPs system and
(c) dynamic curve (Integrated absorption vs. time) registered during the biosensing measurements.
596 A. Colombelli et al. / Sensors and Actuators B 226 (2016) 589–597
M.G. Manera received her University degree in Physics and Ph.D. degree in “Mate-
[1] S. Link, M.A. El-Sayed, J. Phys. Chem. B 103 (1999) 8410–8426. rial and new technologies” from the University of Lecce, Italy in 2003 and 2006. Her
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[3] J. Spadavecchia, P. Prete, N. Lovergine, L. Tapfer, R. Rella, J. Phys. Chem. B 109 materials for optochemical sensing and biosensing applications exploiting surface
(2005) 17347–17349. Plasmon resonance transduction methodologies. Recently she has been involved
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[8] M. Kahraman, M.M. Yazici, F. Sahin, O.F. Bayrak, M. Culha, Appl. Spectrosc. 61 Antonietta Taurino received the Laurea (with honors) and Ph.D. degrees in physics
(5) (2007) 479. from the University of Lecce, Lecce, Italy, in 1995 and 1999, respectively. Since 2001,
[9] J.N. Anker, W.P. Hall, O. Lyandres, N.C. Shah, J. Zhao, R.P. Van Duyne, Nat. Mater. she has been a Researcher with the Institute for Microelectronics and Microsys-
7 (2008) 442–453. tems, National Research Council (IMM-CNR), Lecce. Her competences are related
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(1997) 1078–1081. semiconducting materials by transmission electron microscopy (TEM) techniques.
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(2001) 1471–1482. her activity has been extended to advanced SEM techniques, like scanning TEM and
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Massimo Catalano graduated in physics in 1987, with full honours. Since 1998
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he has been employed as a permanent researcher by the Institute for Microelec-
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Institute, where he coordinates the Microstructural and Microanalytical Character-
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31 (2008) 3666–3668. Annalisa Convertino received her Laurea degree in Physics at the University of Bari
[22] K.M. Mayer, J.H. Hafner, Chem. Rev. 111 (2011) 3828–3857. (Italy) in 1994 and her Ph.D. in Physics at the University of Bari in 1999. She is cur-
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(2000) 564–570. Italy. Currently she is involved in the research on organic–inorganic nanocomposite
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(2012) 1–9. vapor and liquid) sensors, self-organized structures and nanoscale devices. Analysis
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10414–10419. modification of metal surfaces for adsorption based biosensors (BIOMEMS).