applied

sciences
Article
Effects of Laser Fluence and Pulse Overlap on
Machining of Microchannels in Alumina Ceramics
Using an Nd:YAG Laser
Muneer Khan Mohammed 1, *, Usama Umer 1 , Osama Abdulhameed 2 and Hisham Alkhalefah 1
1 Advanced Manufacturing Institute, King Saud University, P.O. Box 800, Riyadh 11421, Saudi Arabia;
usamaumer@yahoo.com (U.U); halkhalefah@ksu.edu.sa (H.A.)
2 Industrial Engineering Department, College of Engineering, King Saud University, P.O. Box 800,
Riyadh 11421, Saudi Arabia; oabdulhameed@ksu.edu.sa
* Correspondence: muneerkm@ksu.edu.sa or muneer0649@gmail.com; Tel.: +966-11-4697370




Received: 5 August 2019; Accepted: 17 September 2019; Published: 20 September 2019


Abstract: The quality of micro-features in various technologies is mostly affected by the choice of
the micro-fabrication technique, which in turn results in several limitations with regard to materials,
productivity, and cost. Laser beam micro-machining has a distinct edge over other non-traditional
methods in terms of material choices, precision, shape complexity, and surface integrity. This study
investigates the effect of laser fluence and pulse overlap while developing microchannels in alumina
ceramic using an neodymium-doped yttrium aluminum garnet (Nd:YAG) laser. Microchannels
200 µm wide with different depths were machined using different laser peak fluence and pulse overlap
(percentage of overlap between successive laser pulses) values. It was found that high pulse overlaps
and fluences should be avoided as they give rise to V-shaped microchannels i.e., 100% bottom width
errors. The optimal peak fluence range was found to be around 125–130 J/cm2 corresponding to
3–5 µm depth per scan. In addition, channels fabricated with moderate pulse overlap were found to
be of good quality compared to low pulse overlaps.

Keywords: microchannels; alumina; micromachining; fluence; laser

1. Introduction
Structural ceramics find many applications in microfeature products due to their exceptional
properties such as wear resistant, chemical inertness, high temperature strength, and dimensional
stability. One of the most important and readily available structural ceramic is Alumina. Alumina
micro-featured products have applications in many areas like microelectronics due to their excellent
dielectric strength and in microreactors as heat and corrosive-resistant material with low thermal
expansion. Similarly, they are being utilized for many wear resistance applications like parts in micro-
pumps, valves, and thread/wire guides.
Conventional processing methods to fabricate micro features in structural ceramics are not able to
meet the designed requirements in various areas like micro-electronics, bio-medical applications and
microreactors etc. The microfeatures in these applications require high dimensional accuracy with
very fine surface finish. In addition, absence of microcracks, residual stresses, and heat affected zones
is crucial to ensure smart product architecture resulting in high performance integration [1,2].
Traditionally structural ceramics are processed using techniques similar to powder metallurgy. However,
manufacturing of high precision and defect free ceramic micro parts using these methods poses significant
challenges in terms of tool development and raw material preparation. Good quality ceramic parts require
high precision molds and very fine powder preparation. These constraints restrict the technology to high

Appl. Sci. 2019, 9, 3962; doi:10.3390/app9193962 www.mdpi.com/journal/applsci

Appl. Sci. 2019, 9, 3962 2 of 14

volume production and thus are not suitable for applications requiring customized parts and shorter product
development times. Other processing methods like electrochemical deposition and photolithography are
also being investigated for ceramic micro features. However, these methods are not easy to implement,
involve chemical handling, and are associated with long processing times [3,4].
Additive manufacturing methods which have been primarily developed for polymeric materials
are also being adapted to manufacture metallic and ceramic micro parts. These methods do not require
any mold preparation and processing is computer controlled. However, the quality of the micro parts
is not comparable to other methods in terms of porosity, residual stresses, and surface finish [5].
Micro-machining through mechanical cutting is the most prevalent method to fabricate micro
parts. With precision machine tools, it is possible to produce good surface finish and form accuracy.
However, at the same time, these tool contact-based methods are subjected to excessive tool wear and
micro-cracks especially for ceramic micro parts. In contrast non-conventional machining methods
like micro-electric-discharge machining (Micro-EDM), micro-ultrasonic machining (Micro-USM),
and micro-laser-beam machining (Micro-LBM) are able to produce extremely fine accuracy and better
surface integrity with little or no tool wear. Specifically, Micro-LBM is an excellent choice for machining
ceramic parts as it provides better process control, improved dimensional accuracy, and easier set-up
in comparison to other methods [6].
Microprocessing of ceramics using an Nd:YAG or excimer laser has been investigated by many
researchers using pulse widths in milli-, micro-, nano-, and pico-second range while generating different
microstructures. Effects of laser intensity/fluence, wavelength, scan speed, pulse repetition rate, pulse
width, and air pressure were investigated on different performance measures like dimensional accuracy,
ablation efficiency, heat affected zone, recast layers, surface roughness, and microcracks etc.
Microstructure development in titanium nitrate using femtosecond lasers was carried out by
Bonse et al. [7]. They compared circularly polarized radiation with linearly polarized radiation and
concluded that the former produces good surface finish and increased ablation rates using the same
laser fluence. Chen and Darling [8] utilized a near ultraviolet Nd:YAG laser for micromachining of
sapphire and silicon. They found higher ablation efficiency when laser fluence increased slightly above
the threshold values. However further increase in fluence did not show any improvement in ablation
efficiency possibly due to laser attenuation.
A short pulse Nd:YAG laser having wavelength of 355 nm and pulse duration of 15 ns was utilized
by Otani et al. [9] to generate microfeatures in diamond, silicon, and stainless steel. They showed that 1
mm thick silicon wafers can be machined easily without any microcracks but a small increase in pulse
width resulted in thermal damage. For diamond, the third harmonic of an Nd:YAG laser was found to
be suitable due to high absorption at this wavelength whereas steel was found to be less sensitive to
the wavelength and microholes of good quality could be created at 1064, 532, and 355 nm wavelengths.
Wernicke et al. [10] produced microholes in Aluminum Gallium Nitride/Gallium Nitride transistors
utilizing single crystal silicon carbide as substrate. They concluded that laser micromachining is a better
choice in comparison to lithography and dry etching for these hard and chemically inert materials.
Super hard nano polycrystalline diamond was machined by Okuchi et al. [11] using three types of
lasers: (a) nanosecond near-ultraviolet, (b) nanosecond near-infrared, (c) femtosecond near-infrared.
It was found that rough surfaces were produced by ns laser with high average power. In contrast smooth
surfaces were obtained using femtosecond laser with low average power. Mutlu et al. [12] performed
micro-drilling on alumina ceramic plate using a second and third harmonic Nd:YAG laser with a 6 ns
pulse width. They showed that the plasma shielding mode is dominant at this wavelength and the
increase of the diameter is more than the depth with the increase in average power. They also reported
a decrease in crater diameter with increase of ambient pressure. A dual prism optical system with
a UV Nd:YAG laser was utilized by Pan et al. [13] to make different microfeatures on silicon wafers.
They were able to develop microfeatures up to an aspect ratio of 10 that could be used for signal
transducing elements in micro-electro-mechanical systems (MEMS). They reported that the efficiency
of laser micromachining is not affected by the orientation of the silicon substrate.
Appl. Sci. 2019, 9, 3962 3 of 14

Matsuoka [14] examined trepanned drilling of through holes in borosilicate glass using fourth
harmonic Nd:YAG laser. They reported an increase in the number of pulses and a decrease in the
number of circular scans by increasing the number of lines per circular scans. Microhole drilling
in metals, alloys, and ceramics using a picosecond laser was studied by Hu et al. [15]. They utilized
laser of wavelengths of 532 nm and 1064 nm with a percussion drilling technique and holes less than
50 µm were produced in steel, silicon nitride and silicon carbide. They concluded that high quality
microstructures can be produced in different materials by picosecond lasers.
Microstructures in fused silica were examined by Vukelic et al. [16] and they analyzed different
mechanisms at very high laser fluence. According to them the ablation phenomenon is mainly
dependent on feedrate while pulse energy mainly accounts for feature size. Analysis of microholes
in alumina ceramic using a nanosecond laser was carried out by Li et al. [17] and they reported
an improvement in the quality of microholes using laser repeat drilling in static water.
Liu et al. [18] studied the micro-groove development by nanosecond laser in green ZrO2 ceramics.
They investigated the effects of power, frequency, and scanning speed on morphology and the
heat-affected zone around the machined textured grooves. They suggested power below 6 watts,
frequency below 40 Hz, and scanning speed above 60 Hz for good surface quality. Femtosecond laser
with helical drilling technique was utilized by Zhang et al. [19] to make blind and through holes
in titanium carbide. The quality of holes was analyzed by changing the spiral number, processing
time, laser fluence, and repetition rate. The concluded that ablation efficiency and quality is mainly
dependent on laser fluence and pulse repetition rate.
Xing et al. [20,21] developed nano-textures in Al2 O3 /TiC and Si3 N4 ceramics using a femtosecond
laser. They showed that pulse energy and scanning speed are the dominant factors for the surface
morphology and ablation depth and optimum settings were found to be 1.75 µJ with 500 µm/s or 2 µJ
with 500 µm/s. Microholes in alumina ceramics were studied by Hanon et al. [22] using a millisecond
pulsed laser. They reported that the peak power and pulse duration are the main factors in determining
the crater depth for single pulse application.
Li et al. [23] used two different methods with nanosecond laser to develop a micro-surface texture
on alumina ceramic. For single pulse interval processing, crater depth and diameter increase with the
increase in pulse energy and number of pulses. With the ring cutting processing, the micro- pit depth
increases with the average power and the micro-pit diameter is mainly controlled by the scan diameter.
Microchannels fabrication in Al2 O3 /TiC ceramic by a nanosecond laser was analyzed by Xing et al. [24].
The effects of overscans, frequency, scanning speed, and voltage on dimensional accuracy and surface
quality were investigated. It was reported that channel width and depth increase with the increase
in voltage, frequency, and number of overscans and decrease with the scanning speed.
It is evident from the literature that studies related to microchannel development in alumina
ceramic are rare and there is a need to assess the capabilities of Nd:YAG microsecond lasers with respect
to dimensional accuracies. In this study the effects of laser fluence and pulse overlap were investigated
while developing microchannels using Nd:YAG lasers having a pulse width in the microsecond range.
In addition, the current study provides a relationship between laser fluence, pulse overlap, and depth of
material removed per laser scan (D/S). The interpretation of relations between process parameters and
microchannel quality is significant for the accurate fabrication of microchannels in alumina ceramics.
The developed microchannels were analyzed in terms of variations in top width error, bottom width
error, depth of material removed per laser scan, and the material removal rate.

2. Material and Method

Alumina (Al2 O3 , 99.7%) samples of dimensions 50 × 50 × 10 mm from Ceram Tec® Germany
were used as the workpiece material. The experimental setup used in this work was lasertec-40 from
Deckel Maho Gildemeister, Germany. It is equipped with a Flashlamp pumped Nd:YAG laser with
a wavelength of 1064 nm and maximum power of 30 W. The laser beam is operated in fundamental
Gaussian mode (TEM00 ) and focused on the workpiece with the help of a galvanoscanner as shown
Appl. Sci. 2019, 9, x FOR PEER REVIEW 4 of 14

Deckel Maho Gildemeister, Germany. It is equipped with a Flashlamp pumped Nd:YAG laser with
Appl. Sci. 2019, 9, 3962
a wavelength of 1064
nm and maximum power of 30 W. The laser beam is operated in fundamental 4 of 14
Gaussian mode (TEM00) and focused on the workpiece with the help of a galvanoscanner as shown
in the schematic in Figure 1. The specifications and laser process parameters used in this study were
in the schematic in Figure 1. The specifications and laser process parameters used in this study were as
as shown in Table 1.
shown in Table 1.
Table 1.
Table 1. Laser
Laser specifications.
specifications.

Process
Process Parameter
Parameter Process Condition
Process Condition
Wavelength 1064 nm
Wavelength 1064 nm
Power
Power 30 W
30 W
Pulse
Pulse width
width 10 µs
10 µs
Spot size
Spot size 30 µm
µm
Pulse frequency
Pulse frequency 66 kHz
kHz

Figure
Figure 1. Schematic diagram
1. Schematic diagram of
of laser
laser setup.
setup.

Microchannels
Microchannels of of dimension
dimension 200 µm width
200 µm width andand 55 mm
mm length
length were
were machined
machined by by varying
varying the laser
the laser
fluence at three different pulse overlaps 58%,
fluence at three different pulse overlaps 58%, 67%, and 75%. 67%, and 75%.
Pulse
Pulse overlap
overlap is is the
the percentage
percentage of of overlap
overlap between
between successive
successive laser
laser pulses
pulses and
and is is given
given byby the
the
following Equation
following Equation (1). (1). !
V
Pulse overlap = 1 − 𝑉 × 100 (1)
𝑃𝑢𝑙𝑠𝑒 𝑜𝑣𝑒𝑟𝑙𝑎𝑝 1 f ∗D 100 (1)
V is the laser scan speed which was varied at 75,𝑓60, ∗ 𝐷45 mm/s, f is the pulse frequency and
D is the
V islaser spotscan
the laser size speed
whichwhich
were fixed at 6000atHz
was varied 75, and
60, 450.03 mm frespectively
mm/s, based on previous
is the pulse frequency and D is
experimental
the laser spotfindings.
size which were fixed at 6000 Hz and 0.03 mm respectively based on previous
In this study
experimental laser fluence was varied by varying the Flashlamp current as shown in Figure 2.
findings.
A laser
In power meter
this study (Ophir
laser Nova-II)
fluence in combination
was varied by varying withthea Flashlamp
sensor (Ophir L50) as
current was utilized
shown to measure
in Figure 2. A
the average
laser power power input for
meter (Ophir each ofinthe
Nova-II) lamp intensity
combination withsettings.
a sensor Average
(Ophir L50)power
wasand pulsetofrequency
utilized measure
together
the averagewere used input
power to calculate
for eachtheoflaser peak intensity
the lamp fluence. settings. Average power and pulse frequency
Twowere
together microchannels were machined
used to calculate the laseratpeak
eachfluence.
experimental condition and the averages were utilized
for the analysis. Channelswere weremachined
cut through ® 1000 precision saw
Two microchannels at the
each cross-section
experimental using an Isomet
condition and the averages were
from Bueler. The cross-sections were viewed under JEOL JSM-6610LV
utilized for the analysis. Channels were cut through the cross-section using an Isomet® 1000 Scanning Electron Microscope
precision
(SEM).
saw from TheBueler.
channels The were analyzed with
cross-sections were respect
viewed to material
under JEOL removal rate (MRR)
JSM-6610LV and width
Scanning error,
Electron
that is the difference
Microscope (SEM). The between the actual
channels werewidth and the
analyzed withtarget width.
respect At the top
to material of the channel,
removal rate (MRR) referred
and
to as top
width width
error, error
that is the(TWE), and atbetween
difference the bottom, referred
the actual as bottom
width and thewidth error
target (BWE)
width. At and depth
the top of per
the
scan (D/S),
channel, is the total
referred to asdepth obtained
top width errorover the number
(TWE), and at the of laser scans.
bottom, The obtained
referred as bottom channels
width were
error
uniform
(BWE) and throughout
depth perthe 5 mm
scan length.
(D/S), is theThe cross-sections
total depth obtained of a few
overchannels
the numberwereofanalyzed at three
laser scans. The
points
obtainedalong the length.
channels were The variation
uniform within the individual
throughout 5 mm length. channel measurementsofwas
The cross-sections a fewfound to be
channels
within 1%. The process
were analyzed at three was foundalong
points to have thegood repeatability,
length. the average
The variation withinvariation in the width
the individual and
channel
depth within the repetitions was found to be around 2%, and 3% respectively.
measurements was found to be within 1%. The process was found to have good repeatability, the
average variation in the width and depth within the repetitions was found to be around 2%, and 3%
respectively.
Appl. Sci. 2019, 9, 3962 5 of 14
Appl. Sci. 2019, 9, x FOR PEER REVIEW 5 of 14

Laser fluence
Figure 2. Laser fluence with respect to lamp current.

3. Results
3. Results and
and Discussions
Discussions

3.1. Effect of Laser Fluence and Pulse Overlap on Microchannel Geometry

3.1. Effect of Laser Fluence and Pulse Overlap on Microchannel Geometry
Table 2 shows the design array with the corresponding performance measures of the microchannels
Table 2 shows the design array with the corresponding performance measures of the
fabricated by varying peak fluence and pulse overlap for 24 laser scans. Figure 3 shows the SEM image
microchannels fabricated by varying peak fluence and pulse overlap for 24 laser scans. Figure 3
of the microchannel cross-sections with varying pulse overlap at the peak fluence of 169.76 J/cm2 . It was
shows the SEM image of the microchannel cross-sections with varying pulse overlap at the peak
found that both peak fluence and pulse overlap had significant effects on the microchannel geometry.
fluence of 169.76 J/cm2. It was found that both peak fluence and pulse overlap had significant effects
An increase in pulse overlap results in an increase in microchannel size and taper. The microchannels
on the microchannel geometry. An increase in pulse overlap results in an increase in microchannel
obtained at lower pulse overlaps were less deep and had minimum taper whereas at high pulse
size and taper. The microchannels obtained at lower pulse overlaps were less deep and had minimum
overlaps the microchannels were associated with high taper angle resulting in V-shaped channels as
taper whereas at high pulse overlaps the microchannels were associated with high taper angle
shown in Figure 3. In general, medium pulse overlap of 66.66% produced better channels.
resulting in V-shaped channels as shown in Figure 3. In general, medium pulse overlap of 66.66%
producedTablebetter channels.
2. Design array of the microchannels fabricated by varying laser fluence and pulse overlap.

TablePeak
S.no
Fluence
2. Design array ofPulse Channel fabricated
the microchannels Channelby varying laser fluence and pulse overlap.
TWE µm BWE µm D/S µm
MRR
J/cm2 Overlap % Width µm Depth µm mm3 /min
1 Peak
136.755 58.33 218.3 124.6 18.3TWE 67.4 5.2 0.119
Pulse Channel Channel BWE D/S MRR
S.no2 Fluence
169.765 58.33 227.5 194.4 27.5 74.2 8.1 0.189
Overlap % Width µm Depth µm µm µm µm mm 3/min
3 J/cm 2
229.183 58.33 240.1 239.0 40.1 62.8 10.0 0.248
1 4 353.678
136.755 58.33
58.33 253.8
218.3 305.2
124.6 53.8 18.3 62.8
67.4 12.7
5.2 0.333
0.119
5 517.313 58.33 251.5 437.8 51.5 97.1 18.2 0.470
2 169.765 58.33 227.5 194.4 27.5 74.2 8.1 0.189
6 136.755 66.66 207.7 120.9 7.7 67.7 5.0 0.088
3 7 229.183
169.765 58.33
66.66 240.1
222.7 239.0
246.7 22.7 40.1 62.8
112.1 10.0
10.3 0.248
0.160
4 8 353.678
229.183 58.33
66.66 253.8
233.8 305.2
282.0 33.8 53.8 62.8
86.5 12.7
11.7 0.333
0.224
5 9 353.678
517.313 66.66
58.33 238.2
251.5 442.3
437.8 38.2 51.5 133.9
97.1 18.4
18.2 0.320
0.470
6 10 517.313
136.755 66.66
66.66 249.3
207.7 610.8
120.9 49.3 7.7 164.5
67.7 25.4
5.0 0.382
0.088
11 136.755 75 228.6 307.5 28.6 12.8 0.118
7 169.765 66.66 222.7 246.7 22.7 112.1 10.3 0.160
12 169.765 75 233.2 385.3 33.2 16.1 0.146
8 13 229.183
229.183 66.6675 233.8
242.4 282.0
479.0 42.4 33.8 86.5 11.7
20.0 0.224
0.204
9 14 353.678
353.678 66.6675 238.2
254.9 442.3
698.4 54.9 38.2 133.9 18.4
29.1 0.320
0.312
10 15 517.313
517.313 66.6675 253.8
249.3 958.1
610.8 53.8 49.3 164.5 39.9
25.4 0.406
0.382
11 136.755 75 228.6 307.5 28.6 12.8 0.118
12 169.765 75 233.2 385.3 33.2 16.1 0.146
13 229.183 75 242.4 479.0 42.4 20.0 0.204
14 353.678 75 254.9 698.4 54.9 29.1 0.312
15 517.313 75 253.8 958.1 53.8 39.9 0.406
Appl. Sci. 2019, 9, 3962 6 of 14
Appl. Sci. 2019, 9, x FOR PEER REVIEW 6 of 14
Appl. Sci. 2019, 9, x FOR PEER REVIEW 6 of 14

Figure 3. SME images showing microchannel cross-sections with varying pulse overlap at laser
3. SME
Figure 3.
Figure SMEimages
imagesshowing microchannel
showing cross-sections
microchannel withwith
cross-sections varying pulse pulse
varying overlap at laseratfluence
overlap laser
fluence of
of 169.76 169.76
2 J/cm2.
fluence ofJ/cm
169.76. J/cm .
2

Figure
Figure 444 shows
shows
shows thethe variation
the variation of
variation of microchannel
of microchannel geometry
microchannel geometry with
geometry with increasing
with increasing peak
increasing peak fluence
peak fluence
fluence atat
at aaa fixed
fixed
fixed
Figure
pulse overlap
pulse overlap of 66.66%. It can be seen that low and medium peak fluence result in a flat surface at
pulse overlap of of 66.66%.
66.66%. ItItcan
canbe
beseen
seenthat
thatlow
lowand
andmedium
medium peak fluence
peak result
fluence in ainflat
result surface
a flat surface at the
at
the bottom
bottom of
of the the channel
channel whereas
whereas higher
higher peakpeak fluence
fluence results
results in V-shaped
in V-shaped microchannels.
microchannels.
the bottom of the channel whereas higher peak fluence results in V-shaped microchannels.

Figure 4. SEM images showing microchannel cross-sections with varying peak fluence at constant
Figure
Figure 4.
4. SEM
SEM images
images showing
showing microchannel
microchannel cross-sections
cross-sections with
with varying
varying peak
peak fluence
fluence at
at constant
constant
pulse overlap of 66.66%.
pulse
pulse overlap
overlap of
of 66.66%.
66.66%.
Both the laser peak fluence and pulse overlap have a significant effect on the channel width. The
Both
Both the
thelaser
laserpeak
peakfluence
fluenceandand pulse overlap
pulse have
overlap a significant
have effect
a significant on the
effect on channel width.
the channel The
width.
TWE increased with increase in peak fluence and the pulse overlap except for the 66.66% pulse
TWE
The TWEincreased withwith
increased increase in peak
increase fluence
in peak and
fluence andthethe
pulse
pulseoverlap
overlapexcept
exceptforforthe
the 66.66%
66.66% pulse
pulse
overlap, which resulted in channels with TWE less than the lowest pulse overlap as shown in Figure
overlap,
overlap, which resulted
resulted inin channels
channels with
withTWE
TWEless
lessthan
thanthe
thelowest
lowestpulse
pulseoverlap
overlapasasshown
shownininFigure
Figure5.
5. In general, low fluence and 66.66% pulse overlap resulted in microchannels with width closer to
5.
InIn general,low
general, lowfluence
fluenceand and66.66%
66.66%pulsepulseoverlap
overlapresulted
resultedin in microchannels
microchannels with with width closer to to
the target width. The increase in TWE with fluence and overlap is because at a higher fluence and
the
the target
target width.
width. The
The increase
increase inin TWE
TWE with
with fluence
fluence and
and overlap
overlap isis because
because at at aa higher
higher fluence
fluence and
overlap the energy density is higher which results in a high volume of molten material. This molten
overlap
overlap the
the energy density is higher which results in a high volume of molten material. This molten
material is ejected out through the cross-section of the channel at high speed and erodes the top edge
material
material is ejected
ejected out
out through
through thethe cross-section
cross-section of the channel at high
high speed
speed andand erodes
erodes the
the top
top edge
edge
resulting in a greater width of the microchannel. Figure 6 shows the effect of peak fluence and pulse
resulting
resulting in a greater width of the microchannel. Figure Figure 66 shows
shows the
the effect
effect of
of peak
peak fluence
fluence and
and pulse
pulse
overlap on the bottom width of the channel. BWE increases with increase in peak fluence and pulse
overlap on the bottom width of the channel. BWE increases with increase in peak fluence and pulse
overlap. At low peak fluence, the difference in BWE for both the pulse overlaps of 58.33% and 66.66%
overlap. At low peak fluence, the difference in BWE for both the pulse overlaps of 58.33% and 66.66%
Appl. Sci. 2019, 9, 3962 7 of 14

overlap on the bottom width of the channel. BWE increases with increase in peak fluence and pulse
overlap.
Appl.At
Appl. Sci. low
Sci. 2019, peak
2019, 9,
9, FORfluence,
xx FOR the difference in BWE for both the pulse overlaps of 58.33% and
PEER REVIEW
PEER REVIEW 77 of 66.66%
of 14
14
is minimum; however, this difference increases significantly with the increase in peak fluence. This is
is minimum;
is
because minimum; however,
at higherhowever, this difference
this
fluence levels, difference increases
increases
the depth significantly
significantly
of material removed withisthe
with the increase
increase
higher andininaspeak
peak fluence.
thefluence. This
This
depth increases,
is because
is because
it makes at higher
at higher
the ejection fluence
offluence levels,
moltenlevels, the depth
the depth
material of material
of material
difficult from the removed
removed
channel is higher
is resulting and
higher andin as the
astaper depth
the depth increases,
and increases,
lower bottom
itit makes
makes the the ejection
ejection of of molten
molten material
material difficult
difficult from
from the
the channel
channel resulting
resulting in in taper
taper and
and lower
lower bottom
bottom
width. The pulse overlap of 75% resulted in V-shaped microchannels. This is because at higher overlap,
width. The pulse overlap of 75% resulted in V-shaped microchannels.
width. The pulse overlap of 75% resulted in V-shaped microchannels. This is because at higher This is because at higher
the energy density is higher which results in a high volume of molten material and a high depth of cut.
overlap, the
overlap, the energy
energy density
density is
is higher
higher which
which results
results in in aa high
high volume
volume of of molten
molten material
material and
and aa high
high
Moreover,
depth of
depth
once cut.the
of cut. moltenonce
Moreover,
Moreover,
metal
once thehas
the
adhered
molten
molten metalto
metal has
has
the wall ofto
adhered
adhered tothe
thechannel,
the wall of
wall of the
thethe laser loses
channel,
channel,
theloses
the laser
the laser focus for
loses
the subsequent
the focus
the focus for layers
for the resulting
the subsequent in
subsequent layers a V-shaped
layers resulting
resulting inchannel.
in aa V-shaped
V-shaped channel.
channel.

Figure
Figure
Figure 5.
5. 5. Effectofof
Effect
Effect ofpeak
peakfluence
peak fluence and
fluence and pulse
andpulse overlap
pulseoverlap
overlaponon
on TWE.
TWE.
TWE.

Figure
Figure
Figure 6.
6. 6. Effectofof
Effect
Effect ofpeak
peakfluence
peak fluence and
fluence and pulse
andpulse overlap
pulseoverlap
overlaponon
on BWE.
BWE.
BWE.

As expected,
As expected,
As expected, the channel
the channel
the channel depth depth
depth increases
increases
increases with
withwith increase
increase
increase in peak
in
in peak peak fluence
fluence
fluence and pulse
and and
pulse pulse overlap.
overlap.
overlap. Increase
Increase
Increase in
in fluence
fluence and
and pulse
pulse overlap
overlap increases
increases the
the energy
energy density
density and
and
in fluence and pulse overlap increases the energy density and laser penetration into the laser
laser penetration
penetration intomaterial,
into the
the
material, which
material, which results
results in
in aa higher
higher depth
depth of of material
material being
being removed
removed for
for each
each laser
laser scan,
scan, thereby
thereby
which results in a higher depth of material being removed for each laser scan, thereby producing
Appl. Sci. 2019, 9, 3962 8 of 14
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9, xx FOR
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of 14
14

aproducing
producing
channel withaa channel
channel
higher with
with higher
higher
depth. depth.
depth.
Figure Figure 77 shows
Figure the
7 shows effectthe
shows of effect
the effect of
of peak fluence
peak and
peak fluence fluence
pulseand pulse
pulse overlap
andoverlap overlap
on the
on
on the
depth depth
theper
depth
scan.per
perIt scan.
can beIt
scan. can
can be
Itseen be seen
seen
that that
that at
at lower at lower
lower fluence,
fluence, fluence,
the the
the difference
difference in depth in
difference in depth
depth is
is minimum is minimum
minimum for
for
for different
different
different
pulse pulse overlaps.
pulse overlaps.
overlaps. However,
However,However, this difference
this difference
this difference increases significantly
increases significantly
increases significantly as the fluenceas the
as the fluence increases,
fluencebecause
increases, increases,at
because
because
higher at
at higher
higher
fluence fluencethe energy
fluence
energy densitythe
energy the density is
is higher
densitywhich
is higher higher which
which inin conjunction
in conjunction conjunction with
with the
with the overlap the overlap
overlapthe
increases increases
increases
depth
the
of depth
depth of
thematerial material
material removed.
ofremoved. removed. Figure
Figurethe
Figure 8 shows 88 shows
shows the
variationthe variation
variation
of MRR with of
of MRRpeakwith
MRR with peak
peakand
fluence fluence
fluence and
and
pulse pulse
pulse
overlap.
overlap.
overlap.
In general,In general,
In itgeneral,
was foundit was
it was found
found
that that
that
in the in the selected
in the selected
selected pulse overlap
pulse range
pulse overlap range
overlapa range a lower
lower apulse
lower pulse overlap
pulse overlap
overlap of 58.33% of
of
58.33%
58.33% resulted
resulted resulted in
in a higherin aa higher
higher MRR
MRR because
MRR because of the of
because of the
the reduced
reduced reduced machining
time. time.
machining
machining HighHigh
time. pulsepulse
High pulse overlaps
overlaps
overlaps require
require
require the
the
the laser
laserlaser to
to move
to move withwith
move less less
with less
speedspeed
speed as
as compared
compared
as compared to theto the
the lower
tolower lower overlaps
overlaps
overlaps resulting
resulting
resulting in
in increased
increased
in increased machining
machining
machining time
time and
timehence
and hence
and hence
reducedreduced
reduced MRR.
MRR.MRR.

Figure 7.
Figure 7.
7. Effect of peak
Effect of peak fluence
fluence and
fluence and pulse
and pulse overlap
pulse overlap on
overlap on depth
on depth per
depth per scan.
per scan.
scan.

Figure
Figure 8. Effect of
8. Effect of peak
peak fluence
fluence and
and pulse
pulse overlap
overlap on
overlap on MRR.
on MRR.
MRR.
3.2.
3.2. Optimal Laser
Laser Fluence Range
3.2. Optimal
Optimal Laser Fluence
Fluence Range
Range
SEM
SEM analysis of the microchannels revealed thatgeneral
in general the pulse overlap of 66.66%
SEM analysis
analysis ofof the
the microchannels
microchannels revealed
revealed that
that in
in general the
the pulse
pulse overlap
overlap ofof 66.66%
66.66% resulted
resulted
resulted
in in better atsurfacebottom
at the bottom of the microchannel as compared to other pulse overlaps.
in better
better surface
surface at thethe bottom of of the
the microchannel
microchannel as as compared
compared to to other
other pulse
pulse overlaps.
overlaps. The
The
The microchannels
microchannels withwith 58.33%
58.33% overlap
overlap resulted
resulted in in craters
craters atat thebottom
the bottomsurface
surfaceofofthe
thechannel
channel especially
especially
microchannels with 58.33% overlap resulted in craters at the bottom surface of the channel especially
at
at lower levels of peak fluence. The
The higher pulse
pulse overlap of of 75% resulted
resulted in V-shaped
V-shaped microchannels
at lower
lower levels
levels of
of peak
peak fluence.
fluence. The higher
higher pulse overlap
overlap of 75%
75% resulted in in V-shaped microchannels
microchannels
as
as shown in Figure 3. In order to find the optimal laser fluence range for the accurate fabrication
shown in Figure 3. In order to find the optimal laser fluence range for the accurate fabrication of
of
microchannels,
microchannels, the pulse overlap was fixed at 66.66% and laser fluence was varied in
the pulse overlap was fixed at 66.66% and laser fluence was varied in minimum
minimum
Appl. Sci. 2019, 9, 3962 9 of 14

Appl. Sci. 2019, 9, x FOR PEER REVIEW 9 of 14

as shown in Figure 3. In order to find the optimal laser fluence range for the accurate fabrication
of microchannels,
possible increments the pulse
with theoverlap
help of was fixed at 66.66%
the Flashlamp currentand
as laser
shown fluence was2.varied
in Figure in minimum
The microchannels
possible increments
of dimension 200 µmwithwidth
the help andof 5themmFlashlamp
length current as shown in
were machined in Figure 2. The
the lower microchannels
fluence range. Theof
dimension
combination 200ofµm width
lower and 5 mm
fluence and length
increased werenumber
machined in thescans
of laser lowerwas
fluence range.soThe
selected combination
as have a small
of lower
depth of fluence
cut. Tableand increased
3 shows number
the design of laser
array scans
of the was selected
microchannels so as have
fabricated a small depth
by varying of cut.
peak fluence
Table 3 shows
at a fixed the overlap
pulse design array of the microchannels
of 66.66% for 48 laser scans.fabricated byexperimental
In this, varying peak strategy
fluence atmicrochannel
a fixed pulse
overlap of 66.66% for 48 laser scans. In this, experimental strategy microchannel
geometry varied with respect to peak fluence similar to the study in the previous section but geometry varied
peak
with respect
fluence to peak
greater thanfluence
140 J/cm similar
2 to the
resulted instudy in thechannels.
V-shaped previous Thissection but peakoffluence
is because greaterinthan
the increase the
140 J/cm2ofresulted
number in V-shaped
scans which results channels.
in increased This is because
depth of thea increase
and hence V-shape.in the number of scans which
results in increased depth and hence a V-shape.
Table 3. Design array of the microchannels fabricated by varying the laser fluence for 48 laser scans
Table 3. Design
at a fixed array of of
pulse overlap the66.66%.
microchannels fabricated by varying the laser fluence for 48 laser scans at
a fixed pulse overlap of 66.66%.
Channel Channel
Fluence BWE D/S
S.no Fluence Width
Channel Depth
Channel TWE µm MRR mm MRR3/min
S.no J/cm2 2 TWE µm µm µm µm
BWE D/S µm
J/cm Width µmµm µm µm
Depth mm /min
3

11 125.768
125.768 211.7
211.7 144.0
144.0 11.7
11.7 58.6
58.6 3.0 3.0 0.0607
0.0607
22 126.455
126.455 211.7
211.7 178.3
178.3 11.7
11.7 82.1
82.1 3.7 3.7 0.0701
0.0701
33 127.324
127.324 210.4
210.4 195.3
195.3 10.4
10.4 110.3
110.3 4.1 4.1 0.0725
0.0725
44 132.590
132.590 217.7
217.7 262.6
262.6 17.7
17.7 141.4
141.4 5.5 5.5 0.0811
0.0811
55 135.287
135.287 213.6
213.6 267.8
267.8 13.6
13.6 141.9
141.9 5.6 5.6 0.0843
0.0843
66 138.227
138.227 218.4
218.4 301.0
301.0 18.4
18.4 173.7
173.7 6.3 6.3 0.0895
0.0895
77 141.471
141.471 219.5
219.5 336.4
336.4 19.5
19.5 7.0 7.0 0.0951
0.0951
88 145.244
145.244 215.2
215.2 340.1
340.1 15.2
15.2 7.1 7.1 0.0952
0.0952
99 148.733
148.733 221.2
221.2 366.8
366.8 21.2
21.2 7.6 7.6 0.1034
0.1034
10 152.841 220.6 371.2 20.6 7.7 0.1065
10 152.841 220.6 371.2 20.6 7.7 0.1065
11 157.302 227.9 400.0 27.9 8.3 0.1161
11 157.302 227.9 400.0 27.9 8.3 0.1161
12 162.124 216.5 409.2 16.5 8.5 0.1156
12
13 162.124
169.765 216.5
229.8 409.2
409.1 16.5
29.8 8.5 8.5 0.1156
0.1199
13 169.765 229.8 409.1 29.8 8.5 0.1199

The
The microchannel
microchannel width
width varied
varied within
within aa 210–229
210–229 µmµm range
range in
in the
the selected
selected fluence
fluence range
range and
and the
the
variation 2
variationofof TWE
TWE with
with varying
varyingpeak
peakfluence
fluenceisisshown
shownin inFigure
Figure9a.9a. The
The fluence
fluence range
range of
of 125–130
125–130 J/cm
J/cm2
resulted
resulted in
in channels
channels with
with width
widthcloser
closerto
to the
the target
targetwidth
widthof of 200 µm. The
200 µm. The bottom
bottom width
width of
of the
the channel
channel
however
however varied drastically with peak fluence up to a certain fluence range after which any increase
varied drastically with peak fluence up to a certain fluence range after which any increase
in
in peak
peakfluence
fluenceresulted
resultedin in
V-shaped microchannels.
V-shaped microchannels.The The
variation of BWE
variation of with
BWErespect to peak to
with respect fluence
peak
is shown in Figure 9b. The maximum width obtained at the bottom of the channel
fluence is shown in Figure 9b. The maximum width obtained at the bottom of the channel was 142 was 142 µm at
aµmpeak fluence of 125.76 J/cm 2.
at a peak fluence of 125.76 J/cm . 2

Figure 9. Cont.
Appl. Sci. 2019, 9, 3962 10 of 14
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Effect of peak fluence on (a) TWE (b) BWE (c) D/S (d) MRR for the channels fabricated with
Figure 9. Effect
48 laser scans.

Depth per
Depth per each
eachlaser
laserscanscanincreases
increaseswithwiththethe increase
increase in peak
in peak fluence
fluence as shown
as shown in Figure
in Figure 9c.
9c. The
The increase is higher in the lower fluence range because the energy absorption
increase is higher in the lower fluence range because the energy absorption into the material is higher into the material is
higher
at loweratfluence,
lower fluence,
whereaswhereas in the
in the high highrange
fluence fluence range itsaturation
it reaches reaches saturation
limit hencelimit
therehence there is
is minimum
minimum variation in depth removed. Depth per scan and total number of
variation in depth removed. Depth per scan and total number of laser scans define the final depth laser scans define the final
of
depth
the of the channel.
channel. It is important
It is important in order into order to have
have the the accurate
accurate depth ofdepth of the channel.
the channel. Depth perDepthscanperofscan
less
of less5 than
than µm was5 µm was found
found to givetofavorable
give favorable
resultsresults considering
considering the TWE
the TWE and BWE.
and BWE. A similar
A similar trendtrend
was
was observed for the MRR—it increases with the increase in peak
observed for the MRR—it increases with the increase in peak fluence and the increase is fluence and the increase is quite
quite
significant in
significant in the
the lower
lower fluence
fluence range
range asas shown
shown in in Figure
Figure 9d.
9d.
Based on this study, the optimal peak fluence range forfabrication
Based on this study, the optimal peak fluence range for fabricationofofmicrochannels
microchannels was wasfound
foundto
be 125–130 J/cm 2 . This peak fluence range resulted in microchannels with low dimensional error and
to be 125–130 J/cm . This peak fluence range resulted in microchannels with low dimensional error
2

medium
and depth
medium of cut
depth ofof about
cut 3–5 µm.
of about 3–5 µm.

3.3. Effect of Laser Scans on Channel Accuracy

3.3. Effect of Laser Scans on Channel Accuracy
The number
The numberofof laser scans
laser alongalong
scans with depth
with per
depthscanper
determine the final depth
scan determine the of the depth
final microchannel.
of the
This can be realized
microchannel. This canwithbedifferent
realizedstrategies such as
with different a low number
strategies such asofa scans with high
low number depthwith
of scans per scan,
high
a highper
depth number
scan, of scansnumber
a high in combination with
of scans in low depthwith
combination per scan or a medium
low depth per scandepth per scandepth
or a medium with
medium
per scanlaser
withscans.
medium In order
lasertoscans.
study the effect of
In order tolaser
studyscans
theon microchannel
effect accuracy,
of laser scans on three different
microchannel
combinations of laser scans and depth per scan were tested for fabrication of microchannels
accuracy, three different combinations of laser scans and depth per scan were tested for fabrication with 200
µm width and 200 µm depth. Figure 10 shows the SEM images of the
of microchannels with 200 µm width and 200 µm depth. Figure 10 shows the SEM images of the microchannel cross-section
fabricated withcross-section
microchannel 66 and 24 laser scans with
fabricated with3 66 and248 laser
µmand µm depth
scans per
withscan respectively.
3 µm The laser
and 8 µm depth per peak
scan
fluence was selected accordingly based up on the depth per scan. It can be seen
respectively. The laser peak fluence was selected accordingly based up on the depth per scan. It canthat the geometry of
the microchannel is more accurate with 3 µm depth per scan and 66 total scans. Higher
be seen that the geometry of the microchannel is more accurate with 3 µm depth per scan and 66 total depth per scan
and lower
scans. laser
Higher scansper
depth resulted
scan andin alower
high degree of taper.
laser scans resulted in a high degree of taper.
Appl.
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Figure 10. SEM images of microchannel cross-section fabricated with (a) 66 scans and (b) 24 scans.
Figure
Figure 10.
10. SEM
SEM images
images of
of microchannel
microchannel cross-section
cross-section fabricated
fabricated with
with (a)
(a) 66
66 scans
scans and
and (b)
(b) 24
24 scans.
scans.
The microchannel geometry and MRR was found to vary with laser scans. Figure 11 shows the
effectTheof microchannel
laser scans ongeometry
microchannel geometry
TWE, BWE, and
andandMRR
MRR was
wasfound
MRR. found
In totovary
general, vary with
lower withlaser scans.
laser
scans Figure
scans.
resulted 11 shows
Figure
in more the
11accurate
shows
effect
the of
effect laser
of scans
laser on
scans TWE,
on TWE, BWE,
BWE, andandMRR.
MRR. In Ingeneral,
general, lower
lower scans
scans
microchannels as compared to higher scans this is because with a lower number of laser scans the resulted
resulted in
in more
more accurate
microchannels
depth per scan as
microchannels as
andcompared
compared to
to higher
MRR is higher, higher
which scans
scans this
this in
results is geometrical
because
because with
with a lower number
inaccuracies.number of laser
However, the scans
TWE was the
depth per scan and MRR
MRR is
is higher,
higher, which results in geometrical inaccuracies.
found to be minimum for the 48 laser scans suggesting that there exists an optimal number of scans However,
However, the TWE was
found
for whichto bethe
minimum for the 48 laser
TWE is minimum. At ascans
lowersuggesting
number ofthat there
laser scans,exists
the an optimal
high depthnumber
of cut andof scans
MRR
for which the TWE is minimum. At
At aa lower
lower number
number of
of laser
laser scans,
scans, the
the high
high
causes high TWE and with higher laser scans, the interaction of the laser beam with the edge is higher depth
depth of cut and MRR
causes
resulting highinTWE and with
increased TWE. higher laser
It can scans,that
be seen the 66
interaction
laser scansof the laser beam with
in combination withthe3 edge
µm is
is higher
edgedepth higher
per
resulting in
in increased
increased TWE.
TWE. ItIt can
can bebe seen
seen that
that 66 66
laserlaser scans
scans in in combination
combination
scan resulted in microchannels with the least BWE and less taper. Figure 12 shows the SEM images with with
3 µm 3 µm
depth depth
per per
scan
scan
of theresulted
resulted in microchannels
in microchannels
microchannels withwith
fabricated the
usingthe3least
least BWE
µm BWE
andand
depth per less
less taper.
taper.
scan Figure
Figure
strategy 12ashows
12 shows
with the SEM
thefluence
peak SEM ofimages
images of
126.45
of
the the microchannels fabricated using 3 µm depth per scan strategy with a peak fluence of 126.452
J/cm2. A total of 66 and 99 scans were carried out for the target depth of 200 µm and 300 µm.
microchannels fabricated using 3 µm depth per scan strategy with a peak fluence of 126.45 J/cm
J/cm
A 2
total. Aoftotal
respectively.66 and of 99
66scans
and were
99 scans were
carried outcarried
for the outtargetfordepth
the target
of 200depth
µm and of300
200µm µmrespectively.
and 300 µm
respectively.

Figure 11. Cont.

Appl. Sci. 2019, 9, 3962 12 of 14
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9, xx FOR
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Figure 11.
Figure 11. Effect
Effect of laser
Effect of laser scans
scans on
on (a)
(a) TWE
TWE (b)
(b) BWE
BWE (c)
(c) MRR.
MRR.

Figure 12.
Figure 12. SEM
SEM images
SEM images of
images of the microchannels
of the microchannels (a)
(a) 200
200 µm
µm depth
depth (b)
(b) 300
300 µm
µm depth.
depth.

4. Conclusions
4. Conclusions
Conclusions
4.
In this
In this study
this study the
study the development
the development
development of of ceramic
of ceramic microchannels
microchannels using using anan Nd:YAG
Nd:YAG laserlaser was
was presented.
presented.
In ceramic microchannels using an Nd:YAG laser was presented.
In contrast
In contrast
contrast to to the
to the previous
the previous research
research based
previous research based on on expensive
expensive low low pulse width
width systems,
pulse width systems, this
this study assessed
study assessed
assessed
In based on expensive low pulse systems, this study
the
the performance
performance of the
of Nd:YAG
the Nd:YAGlaser in the
laser microsecond
in the range
microsecond to develop
range good
to quality
develop microchannels
good quality
the performance of the Nd:YAG laser in the microsecond range to develop good quality
in structural
microchannels in ceramics.
in structuralIt is evident
structural ceramics.
ceramics. Itthat
It is both
is evidentthe
evident that laser
that both fluence
both the and
the laser pulse
laser fluence overlap
fluence andand pulseare significant
pulse overlap
overlap areare
microchannels
parameters in controlling
significant parameters
parameters the quality and
in controlling
controlling dimensional
the quality
quality accuracy of accuracy
and dimensional
dimensional microchannels. It was found
of microchannels.
microchannels. that
It was
was
significant in the and accuracy of It
the depth
found thatofthe
material
the depth removed
of material
material perremoved
laser scanper is an
laserimportant
scan is indicator
is an
an importantof the overall quality
indicator of the of the
the overall
overall
found that depth of removed per laser scan important indicator of
microchannels.
quality of of the Afterwards, a methodology
the microchannels.
microchannels. Afterwards, aawas presented was
methodology for obtaining
presentedgood quality microchannels
for obtaining
obtaining good quality
quality
quality Afterwards, methodology was presented for good
with targeted
microchannels depth.
with The following
targeted depth. conclusions
The following can be drawn
conclusions from
can the
be study:
drawn from the study:
microchannels with targeted depth. The following conclusions can be drawn from the study:
1. The size and quality of microchannels are found to be strongly dependent on laser peak fluence
1. The
1. The size
size and
and quality
quality of of microchannels
microchannels are are found
found to to be
be strongly
strongly dependent
dependent on on laser
laser peak
peak fluence
fluence
and pulse overlap.
and pulse overlap.
and pulse overlap.
2. Irrespective of
2. Irrespective
Irrespective of the
the peak
peak fluence,
fluence, high
high pulse
pulse overlaps
overlaps give give rise
rise to
to high
high bottom
bottom width
width error
error (BWE)
(BWE)
2. of the peak fluence, high pulse overlaps give rise to high bottom width error (BWE)
i.e., formation
i.e., formation of of V-shaped
V-shaped channels.
channels.
i.e., formation of V-shaped channels.
3.
3. Moderate
Moderate pulse
pulse overlaps
overlaps are recommended
are recommended over over lowlow pulse overlap
pulse overlap
overlap as as they
they can
as they can fabricate
fabricate good
good
3. Moderate pulse overlaps are recommended over low pulse can fabricate good
quality microchannels.
quality microchannels.
microchannels.
quality
4. Based on the analysis,
analysis, aaa laser
laser peak fluence of 2 corresponding to 3–5 µm
4. Based
4. Based on the on the analysis, laser peak
peak fluence
fluence of of around
around 125–130
around 125–130 J/cm
125–130 J/cm22 corresponding
J/cm corresponding to to 3–5
3–5 µmµm
depth
depth per
per scan
scan is
is recommended
recommended for
for
depth per scan is recommended for better accuracy. better
better accuracy.
accuracy.
5.
5. Low
5. Low depth
depth perper scan
per scanvalues
scan valueswith
values withaaagreater
with greaternumber
greater number
number ofoflaser
of laser
laserscans areare
scans
scans recommended
are recommended
recommended to achieve the
to achieve
to achieve
desired
the
the depth.
desired
desired depth.
depth.
Appl. Sci. 2019, 9, 3962 13 of 14

Author Contributions: Conceptualization, M.K.M. and U.U.; Methodology, M.K.M., and U.U.; Software, M.K.M.
and U.U.; Validation, M.K.M., U.U., and H.A.; Formal Analysis, M.K.M. and H.A.; Investigation, M.K.M., U.U.,
and O.A.; Resources H.A.; Data Curation, M.K.M. and U.U.; Writing—Original Draft Preparation, M.K.M. and
U.U.; Writing—Review & Editing, M.K.M. and H.A.; Visualization, M.K.M.; Supervision, M.K.M. and U.U.; Project
Administration, U.U. and O.A.; Funding Acquisition, H.A.
Funding: This research was funded by Deanship of Scientific Research at King Saud University, grant
number RG-1440-026.
Acknowledgments: The authors extend their appreciation to the Deanship of Scientific Research at King Saud
University for funding this work through research group number RG-1440-026.
Conflicts of Interest: The authors declare no conflicts of interest.

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