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Case Study # 2: ESD Induced EMI Event
Case Study # 2: ESD Induced EMI Event
Case Study # 2: ESD Induced EMI Event
Exposure stage
Exposure stage
To Track
Wafer Aligner
To Track
z Implemented CO2 in
process D/I water flow
z Drove resistivity < 5
megohms
z Result:
ª Star cracking problem
eliminated
z Points to need to use
“static dissipative”
materials!
Agenda