De-Ionized Water

z De-ionized pure water is a poor electrical

conductor
ªResistivity on the order of 18.2 megohms
z Can result in significant tribo-charging of
insulators in spin apply processes
z Resisitivty of D/I water can be reduced by
introducing non-contaminating ions
ªE.G. CO2 Bubbler
ªConcentrations in sub 0.1 PPM level can reduce
resistivity to <5 megohms
The Solution

z Implemented CO2 in
process D/I water flow
z Drove resistivity < 5
megohms
z Result:
ª Star cracking problem
eliminated
z Points to need to use
“static dissipative”
materials!
Agenda

z Cleanroom/Environment Static Charge

Challenges
z Control Strategies
z Case Studies
z Summary and Acknowledgements
Summary

z Cleanrooms and Clean Environments have

exacting cleanliness requirements
z Methods of attaining those requirements
result in substantial ESA/ESD control
challenges to process
z Challenges can be met by implementation of
rigorous ESA/ESD control programs
 Acknowledgements

z Jeff Jimmo – One Source Environmental Test

z Larry Levit – MKS, Ion Systems
z Andy Rudack – Intl. SEMATECH
z John Kinnear - IBM