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2000-1276-xx - A - MNL - INSTALL.VPORT BOLTS - CLNRM
2000-1276-xx - A - MNL - INSTALL.VPORT BOLTS - CLNRM
2000-1276-xx - A - MNL - INSTALL.VPORT BOLTS - CLNRM
Installation Instructions
P/N:2000-1276-01 Revision A
Printed on Cleanroom Paper
DISCLAIMER
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior writ-
ten permission from Asyst Technologies, Inc. Material contained within this manual is provided for informa-
tional purposes only, and is subject to change without prior notice. Asyst Technologies, Inc. assumes no
responsibility for any errors which may appear in this manual, nor for any damages resulting from such
errors.
Any change, alteration, or modification to the equipment described herein, as well as application in a man-
ner inconsistent with its design and intent, without prior written permission from Asyst Technologies Engi-
neering Staff will void the system warranty and may render the equipment unsafe for use or unfit for its
intended purposes.
It is the responsibility of the customer to comply with all local, state, and federal ordinances, regulations,
and laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or maintenance of this equipment in any manner inconsistent or contrary to the meth-
ods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulle-
tins, communications, and recommendations.
Responsibility
It is the responsibility of the customer to comply with all local, state, and federal ordinances, regulations,
and laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or maintenance of this equipment in any manner inconsistent or contrary to the
methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions,
bulletins, communications, and recommendations.
Equipment Modification
Any change, alteration, or modification to the equipment described herein, as well as application in a man-
ner inconsistent with its design and intent, without prior written permission from Asyst Technologies’
Engineering Staff will void the system warranty and may render the equipment unsafe for use or unfit for its
intended purposes.
Introduction
The VersaPort 2200 is a 200mm class load port for presenting wafers or reticles to the pro-
cess tool while maintaining better-than-Class 1 cleanroom environment for the substrate.
This manual describes how to install the VersaPort.
The person installing this equipment must be thoroughly familiar with its operation, and
must understand and comply with all safety requirements described in this manual.
Technical Data (Specifications and Outline Drawing) section on page 6, includes specifica-
tions and outline drawing for the VersaPort.
About This Manual section on page 10, explains the conventions used in this manual for soft-
ware descriptions, figures & tables, and key words.
Safety section on page 10, describes the necessary precautions that must be taken when
installing or operating the equipment.
Labeling section on page 14, describes each VersaPort label and where it is placed.
Installation section on page 18, explains the installation procedure. The VersaPort installa-
tion proceeds in five main steps:
1. Verify Asyst Supplied Materials.
2. Prepare Installer Provided Materials.
3. Mount and level the VersaPort.
4. Verify proper operation of the VersaPort.
5. Complete the installation.
Table , VersaPort Configuration, on page 39, lists the default software configuration (ECID
values) of the VersaPort.
Operation with Manual Open Cassette Adapter (MOCA) section on page 40, describes operation
of the VersaPort with the Manual Open Cassette Adapter (MOCA).
Starting ISIM section on page 47, explains how to use the ISIM software to operate and con-
figure the VersaPort from a PC.
Process-Tool Side
(front)
Vertical Drive
Column
Port Door
Port Plate
Minienviron-
ment
Connector
Panel (behind
minienviron-
ment shield)
User/operator
side
Software
➢ Keys or switches that must be pressed are printed in bold. Example: Press Enter.
➢ Software commands are printed in italics. Example: After the UNLOAD command …
Key Words
Warnings, cautions, and notes are used throughout this manual as illustrated below:
WARNING
Warnings alert personnel to potentially hazardous conditions or actions that may result
in personal injury.
CAUTION
NOTE . . .
Notes emphasize, or expand upon, the presented information.
Safety
Before attempting any operation or service, it is essential that the information presented in
this section be read and thoroughly understood. Important information is provided regard-
ing safety hazards that may be encountered while working with these systems.
General Requirements
Warnings and cautions are used throughout this manual to identify potential hazards to
personnel and equipment, respectively.
All warnings and cautions immediately precede the step or operation in which the hazard-
ous condition may be encountered. All personnel operating or performing service on
Asyst equipment must fully understand warnings, cautions, and all general safety regula-
tions associated with electromechanical equipment.
Personnel should become thoroughly familiar with all aspects of safety for individuals and
equipment prior to operating or performing service on this equipment.
Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordi-
nances, regulations, and laws applicable to the installation and operation of this equip-
ment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or
damages resulting from the operation or service of this equipment in any manner inconsis-
tent or contrary to the methods supplied in Asyst Technologies, Inc. literature including,
but not limited to, manuals, instructions, bulletins, communications, and recommenda-
tions.
CAUTION
For ESD and EMI considerations and power supply protection, the ground cable must
be properly installed.
2. The Process Tool must be powered down, or the circuit that provides power to the Ver-
saPort must be switched off.
3. Lock out the circuit with an assigned lock.
4. Test to make sure the VersaPort cannot be turned on accidentally.
5. Tag the locked circuit with a statement indicating-
➢ Unauthorized operation of the equipment or removal of tag is prohibited
➢ Date of service performed
➢ Names of the persons performing the service
➢ Short description of the service performed
➢ Signatures of the service supervisor and production supervisor
Laser Safety
User
Under normal operation (auto mode) using a SMIF-Pod or the Manual Open Cassette
Adapter (MOCA), the user is never exposed to direct or collateral radiation in excess of
the accessible emission limits of Class I. The laser beam is on only when the VersaPort is
in motion and the pod-in-place switch is activated; when the VersaPort is not in motion,
the laser system is inoperative.
LASER WARNING
The VersaPort contains a Class II laser diode. The VersaPort is classified as a Class I
Laser Product under the CDRH laser safety regulations and the IEC 825-1 Standard
only if the VersaPort is installed onto a Process Tool. The laser radiation must be con-
tained inside the Tool, otherwise the VersaPort is a Class II Laser Product. Covers and/
or enclosures and a SMIF-Pod must be used with the VersaPort to prevent exposure to
the operator. Covers must never be removed by the operator.
If covers and a SMIF-Pod are not used, the VersaPort is a Class II, not a Class I Laser
Product.
Service Technician
During installation, there are no requirements for cleaning, servicing, or electro-optical
inspections of the laser system. Service procedures for laser replacement and alignment
are included in the Technical Manual (P/N 2000-1252-01).
When operating the VersaPort using ISIM software in Manual mode, the laser interlock
will be disabled. During service alignment of the laser system the technician may be
exposed to the laser beam. When power is removed from the VersaPort, the laser is inoper-
ative.
Safety Interlocks
DC Voltage
The VersaPort maximum voltage is +24 vdc. This voltage is considered non-hazardous
and requires no mechanical power interlocks.
Laser Interlock
The VersaPort is designed to prevent the user from exposure to the laser beam. During
normal operation, the laser is enabled only while the port plate is in motion with a Pod
locked to the port plate. With a SMIF-Pod locked to the port plate the user cannot be
exposed to the laser beam.
LASER WARNING
The laser interlock is bypassed when using ISIM software in Manual (service) mode.
Do not stare into laser beam.
ISIM
Usage of ISIM can put the Load Port in an unsafe mode for operators, as interlocks can be
disabled. Laser exposure hazards and pinch hazards may be present. Personnel should
become thoroughly familiar with all aspects of safety for individuals and equipment prior
to using ISIM to operate this equipment.
Seismic
Follow all installation procedures to ensure compliance with S2-93; Safety Guidelines For
Semiconductor Manufacturing Equipment, Seismic Requirements.
Pinch Points
A pinch hazard exists at the port plate when the VersaPort is being serviced and the
minienvironment is removed- or when no Pod is present. Pinch points are identified by
labels (Table 2, List of VersaPort Labels, on page 14) near the pinch-point hazard. See Fig-
ure 6, VersaPort Label Placement (user side), on page 16 for the location of the pinch haz-
ard labels.
PINCH WARNING
The user must never place fingers or hands on any part of the VersaPort while it is
operating. Failure to comply may result in bodily injury.
Ergonomic
Environmental
The VersaPort uses no chemicals or combustibles, and creates no hazardous waste.
Labeling
BS 4803
CAUTION
IEC 825
LASER RADIATION
DO NOT STARE INTO BEAM
POWER OUTPUT <1mW
DATE
5 Input Voltage and I/O The input voltage and I/O label is located
below the Versaport at the interface
frame. See Figure 6.
(optional)
TECHNOLOGIES, INC
48761 K ATO R D.
FREMONT, CA 94538
MODEL:
PART NO.:
SERIAL NO.:
MANUFACTURED:
CLASS I LASER PRODUCTS EMBEDDED WITH
CLASS II 670nm LASER
“PRODUCT COMPLIES WITH RADIATION PERFORMANCE
STANDARDS 21 CFR SUBCHAPTER J”
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED
DO NOT STARE INTO BEAM
NOTE-CE label and Pinch label behind shield
DANGER
PINCH HAZARD
Do Not Insert Fingers Into
Vertical Opening. Failure
To Comply May Result In
Finger Injury.
ASCII
SECS MSC
TECHNOLOGIES, INC
MODEL/
SERIALNO
48761 K ATO R D.
FREMONT, CA 94538
MODEL:
PART NO.:
SERIAL NO.:
MANUFACTURED:
CLASS I LASER PRODUCTS EMBEDDED WITH
CLASS II 670nm LASER
“PRODUCT COMPLIES WITH RADIATION PERFORMANCE
STANDARDS 21 CFR SUBCHAPTER J”
NOTICE
HANDLE CORNERS TO
MOVE AND INSTALL
AVOID EXPOSURE
BS 4803
CAUTION
IEC 825
LASER RADIATION
DO NOT STARE INTO BEAM
POWER OUTPUT <1mW
DATE
WAVELENGTH 600 - 700 nm
S/N
CLASS II LASER PRODUCT
SEISMIC
ATTACHMENT
POINT
Handling
CAUTION
Handle the VersaPort only by the BOLTS interface frame. Do not handle by the minien-
vironment or port plate assembly. Failure to comply may result in damage to the Versa-
Port.
GRAB/HANDLE
upper frame only.
DO NOT Grab/Handle
from these areas.
DO NOT bump against
these areas.
Once the VersaPort is removed from the shipping container it should be placed on a level
surface. Roll the VersaPort by grasping at the upper edges of the interface frame.
CAUTION
Make sure that the VersaPort is secured in a vertical position before operating with Pod
and cassette.
NOTE . . .
The Installation Kit, Platform Mount (P/N 9700-5811-01) is shipped with all VersaPort
models. The contents are not used for installation of the BOLTs interface model, since
the VersaPort is mounted to the interface frame. The Interface Kit (P/N 9700-5864-01)
shown is used to mount the VersaPort to the Process Tool.
Ferrite Bead
The process tool must be equipped with a six point bolt pattern interface frame per SEMI
E63 (BOLTS Interface). The height from the middle holes to the floor must be between
743.75mm and 755.75mm (749.75 +/- 6mm) in order to ensure that the VersaPort can be
adjusted to meet the SEMI 900mm height requirement.
NOTE . . .
If the height measured does not fall within the acceptable range, the Process tool frame
will need to be adjusted to assure the VersaPort meets the 900mm requirement.
Power Cable
VersaPort power requirement: +24vdc (+10%, –5%) at 1.5A standby, 3.5A running (typical)
The +24 vdc power for the VersaPort must be provided by the Process Tool.
EMO Requirement. The +24 vdc supply must be connected through the emergency machine
off switch (EMO) of the Process Tool to which the VersaPort is attached. The EMO switch
provides protection to the user and the product.
Cable Assembly. The Asyst Power Connector Kit (Part No. 9700-3379-01) is packed in the
shipping container. Use the Asyst-provided plug and pins and an installer-supplied cable
to assemble the 24vdc power cable according to Figure 10.
+24VDC 1 1
CHASSIS GROUND 2 2
NO CONNECTION 3 3
POWER RETURN 4 4
To reduce EMI emissions, clamp the ferrite core (supplied in the Interface Kit) around the
power cable. The core should be secured with a wire-tie near the VersaPort end of the
cable.
Table 4 and Table 5 show the pin assignments for the connection to the RFID or Fluo-
roTrac option.
1 ANT SIG
2 ANT SIG
3 ANT SIG
4 ANT SIG
5 N.C.
6 N.C.
7 N.C.
8 N.C.
9 N.C.
1 ANT SIG
2 ANT SIG
3 ANT SIG
4 ANT SIG
5 CASS PRESCENCE SIG
6 CASS PRESCENCE +12V
7 CASS PRESCENCE RET
8 OPERATOR PRESCENCE SIG
9 OPERATOR PRESCENCE +12V
Ground Cable
Prepare a braided copper grounding cable [4.37mm (12ga) braided wire] with No. 8 ring
lug connector for connecting the VersaPort BOLTS frame to the same earth ground used
by the process tool.
Communications Cables
All VersaPort communications cables must be shielded with metal backshells to reduce
EMI emissions. A installer-supplied ferrite core should be secured with a wire-tie near the
VersaPort end of any communications cable.
Serial Communications
Table 6 shows how to assemble cable(s) for the VersaPort serial interface for operation
using SECS, ASCII, and/or Smart-Tag communication.
NOTE . . .
1. Serial cables must be wired as null-modem cables.
2. Cables cannot be daisy-chained.
3. If a 5-wire cable is used for Host control only (no SMART Tag read/write), then the
CTS line must not be active. The VersaPort will interpret a signal on the CTS line as
indicating Tag data being sent.
Parallel Communications
The inputs and outputs use optical isolation, therefore electrical isolation is maintained
only as long as a separate Host +5 VDC and ground is used to drive the LEDs. The Versa-
Port internal +5 VDC and Ground can be used, but will not provide electrical isolation of
I/O pins. See Table 7 for the function of each pin.
1. I/O signals with shared labels (such as OPEN/CLOSE) are multi-purpose, with the
specific function depending on the status of other signals.
2. All I/O signals are active low.
3. Input signals are strobed. Minimum effective strobe length is 50 milliseconds.
4. Minimum time from one transition signal to another is 20 milliseconds.
5. To ensure complete electrical isolation (recommended) between the host and the
VersaPort I/O, the input LED power must be provided by the Host at J10 pins 1&13,
and the output signal ground also provided by the Host at J10- pins 14 & 25.
W22 pins 1 &2 on the I/O board must be jumpered and no jumper on W26 installed.
6. To use the VersaPort DC power and ground for input LED voltage and output
signal return, jumper W22 pins 2 & 3 and jumper W26. Connect J10 pins 20 &21 to
pins 14 & 15.
NOTE . . .
Follow all installation procedures carefully to ensure compliance with S2-93; Safety
Guidelines For Semiconductor Manufacturing Equipment, Seismic Requirements, and
ED-STD-209E, Cleanliness Specifications.
Installation Requirements
Installation of the VersaPort must provide the following air flow and differential pressure;
➢ Airflow- Class 1 Cleanroom air from FFU, with a maximum of 1 particle/cu.ft. @ 0.5
microns, should be diverted into the VersaPort to achieve horizontal laminar flow.
➢ Differential Pressure- A differential pressure of no less than 0.005 inches of water (1.2
Pascal) should be provided between the inside of the VersaPort body (exposed wafer/
reticle zone) and the ambient cleanroom.
➢ Cleanliness of ambient cleanroom should be Class1000 or better.
Mounting
Horizontal Alignment
Clamping Knob (2 places)
NOTE:
Clamping Knob can accept
a 1/8 inch hex wrench or
ball driver.
1. Make sure that the process tool is equipped with a BOLTS interface frame and is ready
for mounting of the VersaPort.
2. Place the Lower Alignment Mount at the bottom of the Process Tool interface frame
and center the two slots in the mount on the two holes in the frame. Fasten the frame
using the socket head cap screw and washer, as shown in Figure 11.
3. Place a single drop of Loctite 242 thread-locking compound (required, but not supplied
in the interface kit) on the threaded area of one Horizontal Alignment Shaft (shown in
Figure 12). Use a Phillips screwdriver or hex wrench inserted in the hole in the Align-
ment Shaft to fully seat the shaft. Repeat for Alignment shaft on other side. (Set the
two Horizontal Alignment Clamping Knobs aside for use later in this procedure.)
Horizontal Alignment
Shaft (knob removed).
749.75mm+/-6
BOLTS Interface
Set screw
Horizontal
Clamping
Knob
Alignment plate
locations
Base Cover
(Alignment Cam on
BOLTS frame)
2. Remove the three Phillips screws securing the Base Cover to the base of the frame. Set
the cover and screws aside.
3. Use fingers to loosen two captive screws securing the electronics cover on the user side
of the BOLTS interface frame (under the VersaPort base assembly) and set aside.
4. Roll the VersaPort up to the Process Tool mounting frame.
5. Connect a braided copper ground wire from the Process Tool power supply earth
ground to the attachment location on the VersaPort frame, see Figure 14.
6. Route power and communications cables from the Process Tool through the VersaPort
pass-thru on the BOLTS frame. Do not connect the cables to the VersaPort.
NOTE . . .
Have the alignment clamping knobs close by when preparing to secure the VersaPort.
Depending on the height of the process tool interface, it may be necessary to lift the
VersaPort in order to mount the cup onto the interface alignment ball. Use two people if
lifting is required.
1. Stand at the user side of the VersaPort. Tilt the top of the VersaPort frame away from
the Process Tool while pushing the bottom towards and against the Interface. Tilt the
VersaPort enough to align the cup on the BOLTS frame directly above the ball on the
lower alignment bar. See Figure 15.
2. Pivot the VersaPort frame up to engage the cup onto the ball, then continue to pivot the
frame up to the Process Tool so the horizontal alignment shafts of the process tool
extend through the VersaPort alignment plates.
3. While pressing the VersaPort against the interface frame, screw both horizontal align-
ment clamping knobs onto the alignment shafts until the frame is held in place (see
Figure 13). Do not over-tighten the knobs. They will need to be loosened during the
leveling process.
Alignment Ball
Use Asyst ISIM software (provided at the back cover of the Installation Instructions) and a
PC-type computer with a null modem cable to control VersaPort operation.If the software
is not installed on the PC, or for instructions on using ISIM software, see "Starting ISIM"
section on page 47.
1. Plug the null modem cable into the SECS port on the VersaPort connector panel. Con-
nect 24vdc power to the VersaPort.
(optional)
Power Cable
2. At the PC command line, change to the directory in which ISIM is stored. Type “isim”
and press Enter. The program will start.
3. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to select LPO/
VersaPort(LPX)/VersaPort and press Enter.
4. From the Main menu select F2 (MANUAL).
5. From the Manual menu select F5 (GOTO POS). At the Target Pos (inch) line, enter
11.3. Press Enter three times to accept the default speed and acceleration values and
raise the VersaPort.
LASER WARNING
Laser radiation present when power is applied and interlock is defeated. Exposure to a
Class II laser beam is feasible during ISIM Manual mode operation. Avoid direct eye
exposure to beam.
Adjust Centering
Center the VersaPort relative to the Process Tool. The coarse adjustment is at the Lower-
alignment Mounting Bar and the fine adjustment is at the Horizontal Alignment Plate.
When centered, tighten the two bolts on the lower alignment mount.
NOTE . . .
The side-to-side adjustment is limited to ±6.4mm (±0.25 inch) at the bottom (by the
mounting bolt slots in the lower-alignment mount) and to ±1.5mm (±0.06 inch) at the
middle (by the alignment plate screws).
Adjust the height of the VersaPort relative to the Process Tool. The horizontal datum
height needs to be at 900mm ±10mm from the floor in order to meet SEMI S2 guidelines.
1. Ensure that the horizontal adjustment clamping knobs are just loose enough to allow
adjustment.
2. On the lower alignment mount, as shown in Figure 17, loosen the Ball Setscrew with a
3/32 inch hex wrench. The lower mount is visible at the base, where the cover has been
removed.
3. Place a screwdriver shaft or hex wrench shaft through the hole in the Alignment Ball
and turn to either raise or lower the VersaPort to the desired height.
NOTE . . .
The slot in the alignment plate limits the height adjustment to ±6.4mm (0.25 inch).
4. Tighten the Ball-locking Setscrew on the lower alignment mount when the VersaPort
height is properly adjusted.
Alignment cam
Alignment Ball
Through-holes for
turning the align-
ment ball.
Final positioning involves the coordinated adjustment at several places on the VersaPort.
Readjustment of one or more areas, including horizontal and vertical positioning from pre-
vious sections, may be required.
If fine adjustment is needed to align the port plate with the transfer mechanism, loosen the
two Cup Attaching Screws at the bottom of the BOLTS frame, shown in Figure 17. Ensure
the horizontal clamping knobs are slightly loosened. Use a stubby flat blade screwdriver to
move the Angular Adjustment Cam left or right as needed to adjust the centering. Tighten
the cup attaching screws and clamping knobs.
NOTE . . .
The angular adjustment is limited to ±0.5 degrees.
The BOLTS interface ball and socket mounting is designed to create a gap at the bottom of
the mount and is not adjustable. The interface frame can be adjusted front-to-back to align
the VersaPort with the transfer mechanism.
NOTE . . .
The front-to-back adjustment of the BOLTS interface frame is limited to ±1.5mm (±0.06
inch or approximately 0.1 degrees) by the jack screw length.
The VersaPort can be adjusted front to back separately on the BOLTS frame. See Adjust
VersaPort Front to Back Level on Frame, on page 32
Adjust the BOLTS frame in or out by tightening or loosening the Horizontal Alignment
clamping knobs to move the frame. When adjusted properly, use a 9/64-inch Allen wrench
to remove each jack screw from the Alignment Plate (shown in Figure 13) one at a time
and apply a drop of thread adhesive (required but not supplied). Tighten each jack screw
until it just touches the Process Tool interface frame.
The VersaPort is mounted to a platform on the BOLTS interface frame. The platform has
one leveling screw attached through the bottom, behind the connector panel. The Process
Tool side of the VersaPort can be raised slightly to adjust to the transfer arm. To adjust the
VersaPort on the mounting platform;
1. Loosen the three hex screws on the bottom of the mounting platform that secure the
VersaPort.
2. Turn the leveling screw to raise the VersaPort at the Process Tool opening.
3. When the VersaPort is aligned with the transfer arm, tighten the three hex screws.
Make sure all bolts and screws are tightened once the adjustments are complete;
➢ Tighten the Lower Alignment Mount bolts
NOTE . . .
For operation of the VersaPort with the Asyst Manual Open Cassette Adapter (MOCA),
skip to the "Operation with Manual Open Cassette Adapter (MOCA)" section on page
40.
Asyst ISIM software can be used to check the VersaPort laser system and verify/modify
the configuration settings of the VersaPort before testing operation.
NOTE . . .
If there is not access for the PC connection, the Host or Process Tool computer must
have Asyst ISIM installed to test and cycle the VersaPort. Connect the Process Tool
communication cable to the SECS serial port.
2. Connect the Process Tool ground cable to the VersaPort. Connect Process Tool 24vdc
power.
The laser system is aligned at the factory. The sensors can be checked during installation
to verify operation. All DAC values must be less than 30.
1. From the ISIM Main menu select F2 (MANUAL).
2. Raise the port plate:
A. From the Main menu select F2 (MANUAL).
B. From the Manual menu select F5 (GOTO POS).
C. At the dialog box, enter “9” on the Target Pos (inch) line. Press Enter three times
to accept Speed and Acceleration values and raise the port plate nine inches.
With all DAC values less than 30, return the VersaPort to the Home position.
PINCH WARNING
A pinch hazard exists at the port plate as it lowers to the port door. Keep hands away
from the port plate path.
A pinch hazard may exist at the bottom of the minienvironment when the port plate
reaches the Home position. Keeps hands away from the minienvironment path.
Verify proper operation by performing a Self-Test using Asyst ISIM simulation software.
The process will move the port plate to the Stage (Open) position, extend the cassette shut-
tle forward, exercise all motors, check all laser sensors, and return the VersaPort to its
Home (Close) position. The software should return a message reading, “Errors found dur-
ing Self-test: None”. If no errors are encountered, continue the installation.
NOTE . . .
If errors are encountered during the SELF-TEST, AUTOCYCLE or HOMING Calibra-
tion function, clear the error by selecting F8 (CLEAR ERROR) from the MANUAL
menu (F2). Refer to the VersaPort Technical Manual for Calibration/Alignment Proce-
dures to resolve the problem.
NOTE . . .
If power has been removed from the VersaPort, it will perform a Homing calibration
before performing a motion command, to ensure the port assembly is at the correct
location. Homing will slowly move the port assembly (plate and door) and perform the
calibration routine.
The VersaPort will cycle once to self-test and the software will show the results on
the PC screen. Refer to the VersaPort Technical Manual (PN 2000-1252-01) to per-
form any procedure necessary to align the VersaPort if errors are detected.
The Device ID uniquely identifies each piece of equipment addressing the Host computer.
The default setting for all VersaPorts is 251. This number can be changed, if necessary to
any value from 1 to 65535.
1. From the ISIM Main menu select F6 (CONFIG).
2. From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Device ID.
B. At the dialog box, type in a new value for the Device ID and press Enter.
3. Press the Ctrl-Enter keys simultaneously to accept the change. Enter Y to confirm.
The VersaPort may require modification of its default cassette offset value (0) to optimize
wafer/reticle mapping. The offset value can be set by using encoder counts to determine
the center of a wafer/reticle in slot one and subtracting 3075.
1. Place a Pod with a wafer/reticle in cassette slot one on the port door.
2. From the ISIM Main menu select F1 (AUTO).
3. From the Auto menu select F8 (MISC).
A. At the dialog box, use the arrow keys to select Calibrate Homing and press Enter.
The port door will move slowly to the Home position.
4. Lift the Pod off the port plate and replace it to clear the map.
5. From the Auto menu select F1 (STAGE). The port plate will rise to the Open position.
6. Press F10 to return to the Main menu.
7. From the Main menu select F5 (STATUS).
8. From the Status menu select F7 (WAFER MAP).
A. At the dialog box, use the arrow keys to select Wafer Queue and press Enter.
The screen will display the encoder count at which the laser interrupt was activated
by the wafer/reticle in slot one (the ON value- at the bottom of the wafer/reticle)
and the encoder count where the laser was deactivated (the OFF value- at the top of
the wafer/reticle). The display will be similar to On: 3024 Off: 3100.
9. Add the On and Off values. Divide the sum by 2, to determine the center of the wafer/
reticle. From that number, subtract 3075 and round to the nearest whole number.
The result is the cassette offset value. Write the value down.
10.Press F10 to return to the Main menu.
11. From the Main menu select F6 (CONFIG)
12.From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Cassette Offset.
B. At the dialog box, type in a new value for the Offset and press Enter.
13.Press the Enter key until the confirmation screen appears. Select Yes to confirm.
14.Return the VersaPort to Home position:
A. From the ISIM Main menu select F1 (AUTO).
B. From the AUTO Menu select F2 (HOME).
After the cassette offset has been established, perform a wafer mapping procedure to ver-
ify its functionality.
1. Place wafers in the cassette at slots 1, 5, 6, 12, 19, 20, and 25.
NOTE . . .
A full cassette can be used for wafer mapping. The verification should be performed
with a minimum of seven wafers, placed as described above.
2. Load the cassette into a SMIF-Pod. Place the pod on the port door.
3. From the ISIM Main menu select F1 (AUTO).
4. From the Auto menu select F1 (STAGE).
LASER WARNING
Laser radiation present if SMIF Pod is not used. Exposure to a Class II laser beam is
feasible. Avoid direct eye exposure to beam.
5. The laser system will map the cassette slots. The ISIM screen will display a line at each
slot number in which a wafer is detected. Verify the wafer map is accurate for the cas-
sette.
Connect any serial and parallel cabling from the host (or Process Tool) to the proper con-
nector on the Versaport panel. See Figure 16 for connector identification.
Ensure the 24vdc power is supplied through the Process Tool EMO circuit.
Return the cover to the base of the frame and secure with captive thumb screws.
If required after installation, the extended base may be removed. [Not recommended.]
1. On the inside of the base, using a ¼ inch allen wrench or hex driver, remove four bolts
that secure the extended base to the base assembly.
2. Plug the four holes in the base assembly with cap plugs (interface kit item- see
Figure 18).
Store the extended base and four bolts for later use.
VersaPort Configuration
Refer to Software Communications chapter of the VersaPort Technical Manual for an
explanation of the software configurable settings available for the Versaport. Table 8 lists
the default configuration settings as they appear in ISIM, which can be modified using the
Config menu.
Cassette Placement
Refer to the MOCA Configurations document, (PN 2000-1438-01) for proper MOCA con-
figurations for various wafer cassettes.
NOTE . . .
If there is not access for the PC connection, the Host or Process Tool computer must
have Asyst ISIM installed to test and cycle the VersaPort. Connect the Process Tool
communication cable to the SECS serial port.
2. Connect the Process Tool ground cable to the VersaPort. Connect Process Tool 24vdc
power.
NOTE . . .
When operating the MOCA door, do not move the door to a full open or close position.
Operators should release the door about ten to fifteen degrees from a full open or close
position; the door should then complete the movement on its own. The door should
complete the open cycle within two to four seconds after the handle is released; the
close cycle should complete within four to eight seconds. If not, complete the Door
Adjustment procedure in the MOCA Installation and Technical Manual.
WARNING
Operate the MOCA door only using the handle. Failure to comply may result in hand or
finger injury to the operator.
4. Pull the handle on MOCA door. The door should open freely. Close MOCA door.
5. From the ISIM manual menu, select F6 (DC MOTOR).
Use the arrow keys to select Close Latch and press Enter.
6. Pull MOCA handle. If the door lock is functioning properly, the door will not open as
in Step 4. (It will be possible to open the door approximately one inch; this is normal
when the lock is functioning properly.)
ECID Change
The addition of the MOCA to the VersaPort requires a PID change. To ensure proper Ver-
saPort operation, select ECID 104 and choose “1”. If using a terminal setup program for
the ASCII port, type “ECS<space>P104=1” for the MOCA PIDs. When using the Versa-
Port without the MOCA, type “ECS<space>P104=0” for the standard PIDs.
Using HyperTerminal
A common method for implementing the ECID change described above involves using
HyperTerminal, which can be used as follows.
ASCII Configuration
With the VersaPort connected to a PC running ISIM and the cable connected to the SECS
port, configure the VersaPort for ASCII communications:
1. Launch ISIM
Start HyperTerminal
The laser system is aligned at the factory. The sensors can be checked during installation
to verify operation. All DAC values must be less than 30.
1. From the ISIM Main menu select F2 (MANUAL).
2. Raise the port plate:
A. From the Main menu select F2 (MANUAL).
B. From the Manual menu select F5 (GOTO POS).
C. At the dialog box, enter “9” on the Target Pos (inch) line. Press Enter three times
to accept Speed and Acceleration values and raise the port plate nine inches.
3. From the Manual menu select F4 (DAC).
Use the arrow keys to select Sensor Alignment and press Enter.
Use the arrow keys to select Wafer Sensor and press Enter. A window will display the
DAC value. It should be less than 30.
Press F4 to stop calibration.
4. Repeat Step 2 process to choose F4, Sensor Alignment, then select Slot Sensor and
read DAC value. Press F4 to stop calibration.
5. Repeat Step 2 to choose F4, Sensor Alignment, then select Protrude Sensor and read
DAC value. Press F4 to stop calibration.
If the DAC value is less than 30, the laser system is properly aligned. If value is not less
than 30, perform Calibration/Alignment Procedure, Align Laser Detector System in the
VersaPort Technical Manual.
With the DAC value less than 30, return the VersaPort to the Home position.
6. From the Main menu select F2 (MANUAL).
A. From the Manual menu select F5 (GOTOPOS).
PINCH WARNING
A pinch hazard exists at the port plate as it lowers to the port door. Keep hands away
from the port plate path.
A pinch hazard may exist at the bottom of the minienvironment when the port plate
reaches the Home position. Keeps hands away from the minienvironment path.
LASER WARNING
Laser radiation present if cassette is not used. Exposure to a Class II laser beam is fea-
sible. Avoid direct eye exposure to beam.
NOTE . . .
If power has been removed from the VersaPort, it will perform a Homing calibration
before performing a motion command, to ensure the port assembly is at the correct
location. Homing will slowly move the port assembly (plate, and shuttle if equipped)
and perform the calibration routine.
Verify proper operation by performing a Self-Test using Asyst ISIM simulation software.
The process will move the port plate to the Stage (Open) position, extend the cassette shut-
tle forward, exercise all motors, check all laser sensors, and return the VersaPort to its
Home (Close) position. The software should return a message reading, “Errors found dur-
ing Self-test: None”. If no errors are encountered, continue the installation.
NOTE . . .
If errors are encountered during the SELF-TEST, AUTOCYCLE or HOMING Calibra-
tion function, clear the error by selecting F8 (CLEAR ERROR) from the MANUAL
menu (F2). Refer to the VersaPort Technical Manual for Calibration/Alignment Proce-
dures to resolve the problem.
The Device ID uniquely identifies each piece of equipment addressing the Host computer.
The default setting for all VersaPorts is 251. This number can be changed to any value
from 1 to 65535.
1. From the ISIM Main menu select F6 (CONFIG).
2. From the Config menu select F4 (MODIFY CONFIG).
A. Use the Enter key to move down the list to Device ID.
B. At the dialog box, type in a new value for the Device ID and press Enter.
Press the Ctrl-Enter keys simultaneously to accept the change. Enter Y to confirm.
NOTE . . .
The Process Tool should move the VersaPort to the Home position after the connector
cover is installed. If the VersaPort is already being controlled by the Process Tool, pro-
ceed to Complete the Installation without exiting the software as described below.
2. From the MAIN menu select F8 (EXIT), then use the arrow key to choose Yes and
press Enter to close the simulation software.
3. Shutdown the laptop PC and disconnect the null modem cable from the VersaPort.
Leave cables connected if ISIM is run from the Process Tool.
NOTE . . .
If power was removed from the VersaPort during final cable connections, the VersaPort
will perform a Homing calibration. It will move slowly to the Home position.
Introduction
ISIM is the menu-driven diagnostic program supplied by Asyst for exercising the Versa-
Port from a standalone PC. This chapter explains how to use the software.
➢ To learn how to get started, read Starting ISIM below.
➢ To see descriptions of every function key and submenu item, see the Menu Lists sec-
tion on page 48.
➢ To get familiar with typical uses, see the Typical Operations section on page 57.
WARNING
Usage of ISIM can put the Load Port in an unsafe mode for operators, as interlocks can
be disabled. Laser exposure hazards and pinch hazards may be present. Personnel
should become thoroughly familiar with all aspects of safety for individuals and equip-
ment prior to operating this equipment. Refer to Safety section at the beginning of the
manual.
Starting ISIM
1. Copy the software program from the diskette provided at the back of the manual to a
laptop or other PC.
2. Connect a null modem cable from the computer that contains ISIM to the VersaPort
SECS port.
3. Open a MS-DOS window on the PC. Change to the directory (folder) containing the
ISIM software. Start the program by typing isim (not case sensitive) and pressing
Enter. The main menu appears. (See Figure 20, ISIM Menu Screen, on page 48)
NOTE . . .
If Com2 is being used to communicate with the VersaPort, press F6 (CONFIG) at the
Main Menu, then press F2 (COMM PORT).Use the keyboard arrow keys to change to
COM2 and press Enter.
4. From the Main Menu press other function keys to reach different menus, then select
submenu items from the pop-up window with the up/down arrows on the keyboard and
the Enter key (See Figure 20, ISIM Menu Screen, on page 48).
5. When finished, press F10 from any submenu to return to the Main Menu. Exit the
ISIM program by pressing F8 (EXIT). Use the arrow keys to select Yes and press
Enter
Menu Lists
This section contains a description of each menu and submenu function key for the ISIM
software.
Main Menu
Five function keys are accessible upon starting ISIM.
Function Description
(F1) AUTO Opens the Auto Mode Menu screen. See Table 10 for description of submenus.
(F2) MANUAL Opens the Manual Mode Menu screen. See Table 11 for description of submenus.
(F3) MSC Sets controls for the Micro-station Controller/Smart-Comm. See Table 12.
(F4) NON PC Allows the VersaPort to Autocycle without SIM connection. See Table 13.
CYCLES
(F5) STATUS Opens the Status Menu screen SeeTable 14 for description of submenus.
(F6) CONFIG Opens the Configuration Menu screen. SeeTable 15 for description of submenus.
(F7) TAG 8400 Sets Smart-Tag communication. See Table 16 for description of submenus.
(F8) EXIT Use to leave the ISIM program. To save the log file to the disk, from the Main Menu
press F6 (CONFIG), then F9 (FILE), then select CLOSE FILE.
(F9) SMIF OPTION Provides a customized software command set for the Asyst SMIF product
selected. See Table 18.
WARNING
Safety interlocks are bypassed in Manual mode. Manual operation of the Versaport
does not require the use of a SMIF-Pod. Laser exposure hazards and pinch hazards may
be present. Refer to Safety section at the beginning of the manual.
F3 READ CONFIG (see Modify Config, below) Returns VersaPort configuration data. (See
listing under Modify Config menu below)
F4 MODIFY Allows user to modify the VersaPort configura-
CONFIG tion. To modify config:
1. If the dialog item is highlighted with no pop-
up menu, enter the new desired value, then
press the ENTER key to go to the next dialog
item (DO NOT use arrows).
2. If a pop-up menu exists for a dialog item,
use the arrows to select a specific pop-up
item, then press ENTER to choose that item.
3. If no changes are desired for an item, just
press ENTER to go to the next item.
4. Press CTRL-ENT to skip the rest of the
configuration selection.
5. After making modifications, at the confirma-
tion prompt, enter Y to save the modifications,
or N to cancel the modifications.
Typical Operations
Self Test
A successful Self Test will return the message, “Errors found during self-test: None”.
To perform the self test using ISIM, from the Main Menu press F2 (MANUAL), then
press F3 (SELF TEST).
Manual Operation
WARNING
Safety interlocks are bypassed in Manual mode. Manual operation of the Versaport
does not require the use of a SMIF-Pod. Laser exposure hazards and pinch hazards may
be present.
From the Main Menu, press F2 (MANUAL), then select the function key for the desired
task. See Table 11, (F2) MANUAL Mode Menus, on page 50 for descriptions of available
operations.
To perform a homing calibration (calibrate vertical drive zero position reference- and hor-
izontal “Home” position, if shuttle installed), press F1 (AUTO) from the Main Menu.
Press F8 (MISC), then use the arrow keys to select “Calibrate Homing”.
To autocycle the VersaPort between Open (Stage) and Close (Home) positions, place a
Pod on the port door and press F1 (AUTO) from the Main Menu, then press F9 (AUTO
CYCLE). Press F9 again to stop the autocycle function.
From the Main Menu press F5 (STATUS), then press the desired function key from the list
of submenus. See Table 14, (F5) STATUS Menus, on page 51 for descriptions of available
operations.
From the Main Menu, press F6 (CONFIG), then press the desired function key from the
list of submenus:
Press F3 (READ CONFIG) from the Config Menu to check configuration. Press F4
(MODIFY CONFIG) to change those items. See Table 15, (F6) CONFIG Menus, on page
52 for descriptions of configuration items.
NOTE . . .
To create a log file to capture VersaPort events during a SIM session, press F9 (FILE)
from the CONFIG menu. Use the arrow keys to select Enable File. Enter a file name at
the prompt.
Exiting ISIM
From the Main Menu, press F8 (EXIT). Use the arrow keys to select “Yes”, then press the
Enter key.
Turn off the PC and disconnect the null modem cable from the VersaPort.