Syllabus for Semester VI, B. E.

(Electronics and Communication Engineering)

Course Code: ECT359 – 2 Course: Introduction to MEMS

(Program Elective – 2)
L: 3Hrs, T: 0Hr, P: 0 Hrs. Per week Total Credits: 03

Course Objectives
The objective of this course is to make student aware of:
1. Evolution of MEMS and their advancement in recent time.
2. Concept of designing, modeling and fabrication of MEMS devices.

Course outcomes
At the end of the course the students will be able to:
1. Appreciate the underlying working principles of MEMS and NEMS sensors, Actuators
used in micro systems.
2. Understand the basic principles and applications of micro-fabrication processes
3. Understand the basics of device design and modeling
4. Understand the applications of RF MEMS devices and Physical micro sensors

Prerequisites – Electronic Devices (ECT251)

Unit I
Introduction to MEMS: Historical background, Scaling effects, Benefits of Miniaturization,
Micro/Nano Sensors, Actuators and Systems overview: Case studies.

Unit II
Types of MEMS: Optical MEMS, Bio- MEMS, RF- MEMS, Micro fluidics

Unit III
MEMS fabrication modules: Oxidation, Deposition, Lithography, Etching. Micromachining,
Wafer Bonding, recent trends.

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Unit IV
Mechanics of solids in MEMS/NEMS: Stresses, Strain, Hookes‟s law, Poisson effect, Linear
Thermal Expansion, Bending; Energy methods, Overview of Finite Element Method, Modeling
of Coupled Electromechanical Systems, modeling based on case study of a device.

Unit V
RF MEMS Devices: Capacitor, Inductor, Switches, Resonators, and antennas, RF MEMS
components in communications, space and defense applications.

Unit VI
Physical Micro sensors: Classification of physical sensors, Thermal sensors, Electrical Sensors,
Mechanical Sensors, Chemical and Biosensors.

Text Books:
1. G. K. Anantha suresh, K. J.Vinoy, S .Gopalkrishnan K. N. Bhat,V.K.Aatre, Microand
Smart Systems,Wiley India,2012.
2. S.E.Lyshevski, Nano-andMicro-Electromechanical systems: Fundamentals of Nano-and
Micro engineering (Vol.8) .CRC press, (2005).
3. S.D.Senturia, Microsystem Design, Kluwer Academic Publishers, 2001.
4. M.Madou, Fundamentals of Microfabrication, CRCPress,1997.

ReferenceBook:
1. G.Kovacs, Micro machined Transducers Source book, McGraw-Hill, Boston,1998.
2. M.H.Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and
Gyroscopes, Elsevier, NewYork,2000.

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