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Maksymovych2011 PDF
Maksymovych2011 PDF
Scaling and disorder analysis of local I–V curves from ferroelectric thin films of lead zirconate
titanate
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Abstract
Differential analysis of current–voltage characteristics, obtained on the surface of epitaxial
films of ferroelectric lead zirconate titanate (Pb(Zr0.2 Ti0.8 )O3 ) using scanning probe
microscopy, was combined with spatially resolved mapping of variations in local conductance
to differentiate between candidate mechanisms of local electronic transport and the origin of
disorder. Within the assumed approximations, electron transport was inferred to be determined
by two mechanisms depending on the magnitude of applied bias, with the low-bias range
dominated by the trap-assisted Fowler–Nordheim tunneling through the interface and the
high-bias range limited by the hopping conduction through the bulk. Phenomenological
analysis of the I –V curves has further revealed that the transition between the low- and
high-bias regimes is manifested both in the strength of variations within the I –V curves
sampled across the surface, as well as the spatial distribution of conductance. Spatial variations
were concluded to originate primarily from the heterogeneity of the interfacial electronic barrier
height with an additional small contribution from random changes in the tip–contact geometry.
(Some figures in this article are in colour only in the electronic version)
Electron transport through wide bandgap semiconductors and The common feature of wide bandgap oxides is small
nearly insulating materials has been thoroughly investigated band dispersion, low carrier mobility and an inherently large
to optimize the quality of gate dielectrics in transistors density of shallow and deep levels in the bandgap. This is
and develop viable high-k alternatives to SiO2 [1, 2]. particularly true for ternary oxides, which may exhibit disorder
The recent resurgence of interest in such materials at on A, B and oxygen sublattices [9]. Current sensing scanning
nanoscale dimensions has been stimulated in large part by probe microscopy, where a metal-coated tip acts as one of
the phenomenon of resistive switching [3], where electronic the electrodes in the two-terminal transport measurement,
conductance is altered by current and/or electric field, allowing is emerging as a potent method to investigate electron
implementation of non-volatile memory and logic [4] on a transport properties of such materials, because the localization
variety of length scales. Resistive switching in binary oxides of the probed volume to less than tens of nanometers
is believed to arise from ionic motion in an applied electric allows one to differentiate between intrinsic and defect-
field. In more complex ternary oxides, electron transport can mediated transport [10, 11]. Examples of new phenomena
be modulated by the order parameters, such as spontaneous discovered and characterized by conducting atomic force
polarization [5–7], magnetization [8] and strain, enabling a rich microscopy (cAFM), often in combination with other
variety of intrinsic nonlinear transport phenomena. types of scanning probe microscopy, include polarization-
controlled tunneling across ferroelectric surfaces [7] and tunnel
3 Author to whom any correspondence should be addressed.
junctions [5, 6], local conductivity of ferroelastic domain
0957-4484/11/254031+11$33.00 1 © 2011 IOP Publishing Ltd Printed in the UK & the USA
Nanotechnology 22 (2011) 254031 P Maksymovych et al
Figure 1. (A) X-ray diffraction analysis of the 50 nm Pb(Zr0.2 Ti0.8 )O3 film, representative of all the films studied here. (B) Several I –V
curves obtained on the surface of a 30 nm Pb(Zr0.2 Ti0.8 )O3 film in ultrahigh vacuum at 294 K. The arrows show the direction of the linear
tip-bias ramp. The values on the bottom curve correspond to measured current, while the upper two curves were offset for clarity. (C) Time
dependence of local current measured on two different surface locations at a tip bias of −3.2 V and at T = 300 K. (D) Schematic band
alignment and bending of the Pt-tip/PZT/La(Sr0.3 Mn0.7 )O3 junction and the equivalent circuit diagram (parallel capacitance ignored). PZT is
assumed to be n-doped in this case.
walls in multiferroic oxides [12], filamentary conduction d I /dV measurements with variable-temperature statistics to
through perovskite oxides [13], heterogeneity and breakdown identify the transport-limiting mechanism behind the local I –
of ultrathin dielectrics [14], local manipulation of two- V curve. Our analysis is reminiscent of works on macroscopic
dimensional electron gas at perovskite interfaces [15] and local capacitor measurements that relied on differential transport
variations in catalytic activity of ionic membranes for fuel characteristics [19, 20]. However, the key distinction here is
cells [16]. an emphasis on the temperature dependence, on the one hand,
Despite the numerous advantages of cAFM as a local and on spatially resolved analysis of the transport properties,
technique and a large amount of experimental work on the on the other. Systematic analysis of variations within I –
subject to date, relatively few attempts have been made to V curves obtained at different locations has also revealed
quantify and systematically analyze the cAFM data, and to coherent features that have been attributed to local changes in
answer the fundamental question of the dominant conduction the interfacial electronic barrier height.
mechanism. The difficulties in data interpretation arise due Experiments were carried out in a customized ultrahigh
to a large number of unknown parameters in the cAFM vacuum atomic force microscope (VT STM/AFM, Omicron)
experiment, such as the tip shape and contact area, the using Pt-coated cantilever tips (Mikromasch, CSC37). The
dielectric structure of the contact, and even the tip material. I –V measurements were performed at a pressure of
The localized nature of the measurement may further limit 3 × 10−10 Torr after transferring the sample from ambient
the applicability of conventional 1D semiconductor models without any subsequent treatment, using a variable-bandwidth
for metal–semiconductor interfaces, as recently demonstrated current preamplifier (FEMTO DPLCA-200) with a noise floor
for the analysis of space-charge-limited conduction in polymer of ∼100 fA at the highest gain setting of 109 V A−1 . The 30
films [17]. Moreover, many parameters of the material itself, and 50 nm ferroelectric films of Pb(Zr0.2 Ti0.8 )O3 (100) were
such as the doping and dopant profile, trap and surface state grown by pulsed-laser deposition on a low miscut (<0.1◦ )
density, the type of traps or effective electron mass, may not be SrTiO3 (001) substrate, buffered by a 50 nm La0.7 Sr0.3 MnO3
known or reliable [18]. (LSMO) conducting electrode [7]. The crystal structures
In this paper, we present a statistical analysis of local I –V of the PZT films have been studied by x-ray diffraction
curves that aims to differentiate between candidate conduction (XRD) (Panalytical X’Pert MRD PRO). A typical XRD 2θ –
mechanisms behind local conductivity through a ferroelectric θ scan of PZT films (figure 1(A)) reveals the crystallinity and
semiconductor PbZr0.2 Ti0.8 O3 (PZT) films grown epitaxially crystallographic orientation of the PZT films. The epitaxial
on La0.7 Sr0.3 MnO3 (LSMO) oxide electrodes on a SrTiO3 growth was established from the presence of only 00L type
substrate. We have combined local current–voltage ( I –V ) and diffraction in the diffraction pattern in the wide scan range. The
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
Table 1. 1D transport equations for the candidate conduction mechanisms in PZT films.
√ 3/2
2m PZT φB
E 2 exp(− 8π
3
Fowler–Nordheim tunneling I = A eff 8π hm
e m Pt
PZT φB 3he E
)
Schottky emission I = A eff A ∗ T 2 exp(− kTe (φB0 − 4πeEε0mεh ))
Low-field migration I = eμn E bulk exp(−E F /kT ), n —dopant volume density,
E F —Fermi level, E bulk —electric field in the bulk of the film
Poole–Frenkel I = eμn E bulk exp(− kTe (E i0 − eE bulk
4π ε0 εh
)), E i0 —trap ionization energy
2
9εμE bulk
Space-charge-limited (Mott–Gurney law) I = A eff 8L
, L —thickness of the dielectric, V —applied bias
out-of-plane lattice constant was measured to be ∼4.22 Å for mechanisms can therefore be partitioned into interface-limited
PZT films (c/a ∼ 1.07), which indicates that the PZT layers contributions, for example by Schottky emission and Fowler–
are highly strained on the STO substrates with the c axis along Nordheim tunneling, and bulk-limited contributions, such as
the (001) direction. low-field migration, Poole–Frenkel hopping and space-charge-
Despite having a relatively large bandgap (>3 eV) and limited conduction (table 1) [24–26].
being as thick as 30–50 nm, PZT films exhibited significant In the equations given in table 1, e—the elementary
local conductance in the current range from 1 pA to 100 nA charge, k —Boltzmann constant, ε —low frequency dielectric
at a negative tip bias less than −2 V (figure 1(B)). The constant, εh —high frequency dielectric constant, ε0 —vacuum
conductance strongly depended on the sign of the spontaneous permittivity, φB —barrier height, μ—electron mobility (can
polarization in PZT as detailed in our earlier publication [7]. be field-dependent), Aeff —effective transport area of the tip–
In all the experiments presented here, the films were poled surface junction, h —Planck constant and m i —electron (hole)
to ascertain upward polarization orientation relative to the effective mass.
film’s surface. Typical I –V curves (figure 1(B)) were highly At a given bias polarity, electron transport will be limited
rectifying and exhibited negligible hysteresis between forward primarily by the reverse-biased interfacial Schottky barrier
and backward directions of the tip-bias ramp. The conductance (here we assume that it is localized at the tip–surface junction),
also showed negligible time dependence on the time scales up but it may also have a strong contribution from the nonlinear
to 100 s (figure 1(C)). Finally, acquisition of I –V curves was (e.g. Poole–Frenkel) resistance of the bulk. It is common
not associated with irreversible changes of surface topography to attempt to linearize the I –V curves in the normalized
(not shown). Together these measurements indicate that the coordinates that correspond to the respective mechanisms.
electronic state of the probed volume is unchanged in the Here we will assume the abrupt junction approximation for
course of the measurement, ruling out the scenarios of mixed the metal–ferroelectric contact, making it equivalent to the
electron–ionic transport or effects due to polarization dynamics standard Schottky model [24]. Therefore the maximum electric
(including displacement current) and charge injection during field in the contact region, which factors in the above Fowler–
I –V scans. Parenthetically, a simple estimate of the oxygen Nordheim
and Schottky emission mechanisms, is E m =
vacancy displacement can be derived from the Nernst–Einstein 2eND
εε0
(V+ Vbi ), where Vbi is the built-in bias due to the
equation as = τ eD E/kT , where τ —diffusion time, difference between metal and ferroelectric work functions and
D —diffusion constant, e—electron charge, E —electric field, the presence of charged species on the surface, etc, ND is
k —Boltzmann constant and T —temperature. Using D ∼ the donor (or acceptor) density (combined shallow and deep
10−18 m2 s−1 , conservatively estimated from the data on a levels) and V is applied bias. This relationship represents
related SrTiO3 [21], the ionic displacement during a 1 s voltage the limiting case when the contact area is comparable to or
pulse would be ∼0.4 nm, or only about a unit cell in the electric larger than the film thickness (the 1D approximation) and the
field as high as 106 V m−1 at 300 K. width of the Schottky barriers is significantly smaller than
At the same time, the magnitude of local current varied by the film thickness. Although the properties of the metal–
almost one order of magnitude across the surface (see below), ferroelectric contacts are still under debate [23], there is indeed
implying significant variations of the material parameters a growing awareness that the Schottky barrier width could be
responsible for the interfacial barrier height (the density of as thin as several nanometers [18], in part due to an extremely
surface states) and the shape of the local tip potential (vacancy large density of vacancies in the skin region necessary to
density) across the surface [22]. Analysis of the variability stabilize ferroelectric polarization. On the other hand, the
in I –V curves enables spatially resolved mapping of these characteristic diameter of our tip–contact area is ∼40–60 nm,
parameters. as judged from the ∼30 nm width of a ferroelectric domain
As is now well accepted [18, 23], an equivalent circuit wall [27], typically observed on the surface of the 50 nm
diagram of the PZT film (and related perovskite oxides) PZT film (for more details see appendix A in [28]). We
consists of two back-to-back Schottky diodes, one due to the also note that the validity of the above assumption requires
buried interface between the PZT film and bottom metallic a relatively fast response of the donor and/or acceptor levels
electrode (La0.7 Sr0.3 MnO3 ) and the other one due to the in the ferroelectric (primarily charging/discharging) to applied
top tip–surface junction, separated by a resistor representing bias. While this is not generally the case for PZT [29], our
the bulk of the film (figure 1(D)). The electron transport observation of time-independent conductance on the time scale
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
Figure 3. (A) Temperature-dependent I –V curves averaged over 100–200 random locations across PZT surface at each temperature.
(B) Temperature dependence of current at three values of the tip bias. (C) Arrhenius analysis of average current values at several values of tip
bias. (D) Schottky analysis of the average current values.
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
Figure 5. (A) I –V curves calculated using equations for Fowler–Nordheim tunneling and Schottky emission (see text) using the following
parameters: FN: φB = 0.8 eV, A eff = 314 nm2 , ND = 1021 cm−3 , ε = 30 SE : φB = 0.65 eV, Vbi = 0, ND = 1020 cm−3 , ε = 30,
εh = 6.5 [38], T = 330 K and A eff = 314 nm2 (effective tip radius 10 nm). Inset shows linearization of the calculated I –V curves in their
respective coordinates. The parameters were chosen to approximate experimental current levels and the overall shape of the I –V curves. The
analysis presented in this paper does not depend on the exact choice of these parameters. (B) d log(I )/dV = f (V ) as a function of
temperature for Schottky emission mechanism and temperature dependence of d log(I )/dV at 1.7 V (inset). (C) d log(I )/dV = f (V ) for
various values of built-in field within the Fowler–Nordheim tunneling transport. (D) The exponent of the larger bias linear segment of
d log(I )/dV as a function of built-in potential for Fowler–Nordheim and Schottky emission. In all calculations the sign of the tip bias is
opposite to experimental negative values for convenience.
which significantly reduced the noise level due to digital emission or Poole–Frenkel conduction at |V | > 4 V, compare
differentiation. This experiment was repeated three times, in figures 5(B) and (D). Notably, d log(I )/dV scales as T n ,
the temperature range from ∼90 to 320 K, with the results with n = −0.8:−1.3 at high bias (figure 6(D)), in excellent
shown in figures 6(A)–(C). The following trends are observed: agreement with the anticipated n = −1 (see above). The
(1) the exponent α in d log(I )/dV = f (V α ) is the same crossover between the two mechanisms can be seen not only
and roughly constant when the magnitude of the tip bias from the temperature dependence, but also from the exponent
exceeds ∼4 V; (2) the absolute value of d log(I )/dV at each α . It is particularly apparent for the corresponding curves
voltage in this range is temperature-dependent and increases at T = 252 K in figure 6(A), T = 291 K in figure 6(B)
with decreasing measurement temperature, figures 6(A)–(D) and T = 260 K in figure 6(C). In each case, the slope of
and (3) α at |V | < 4 V is larger than that at |V | > 4 V and d log(I )/dV decreases by 1.2–1.5 units at |V | = 3.5–4 V. The
d log(I )/dV is virtually temperature-independent in this range, decrease of the magnitude of the slope by a similar amount is
figure 6(B). indeed expected for the crossover between Fowler–Nordheim
A model that fits the observed trends in normalized tunneling and Poole–Frenkel hopping (figure 5(D)). We can
conductance is that of two rather than one conductance- further rule out low-field migration and space-charge-limited
limiting mechanisms and a crossover between the mechanisms conduction as contributing at any point of the I –V curve,
at a certain value of the tip bias. The statistically negligible simply because the slope of d I /dV is not constant, figure 4(A),
temperature independence of d log(I )/dV at low tip bias as expected for low-field migration and its magnitude is 4–5,
|V | < 4 V (figure 6(D)) points to Fowler–Nordheim tunneling much larger than unity expected for the Mott–Gurney law.
as the most likely interfacial mechanism. On the other hand, As the temperature dependence of Schottky emission
the increase of the magnitude of d log(I )/dV with decreasing and Poole–Frenkel hopping is indistinguishable without a
temperature almost unambiguously points to either Schottky knowledge of the material-specific constants, one may suggest
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
Figure 7. (A) Statistical distribution of I –V curves based on an array acquired on a 30 × 30 grid with a resolution of 10 nm, plotted as a 2D
histogram. (B) Individual histograms at several values of tip bias.
Figure 8. Spatial distribution of current as a function of increasing negative tip bias. The pseudocolor maps represent log(I ) as a function of
tip position on a 28 pixel × 30 pixel grid with a spatial resolution of ∼10 nm. The colorbar scale is log(I × 10−1 nA).
mechanisms, which supports the conclusions derived above shows an average I –V curve, which was plotted as a histogram
using the temperature dependence of the current-normalized of observed current values at each bias value. The magnitude of
differential conductance. This analysis can be eventually current varies by ∼1 order of magnitude across the PZT surface
extended for systematic mapping of the material properties that (figure 7(B)), most likely due to inherent electrostatic disorder
enter the corresponding transport equations. in the film [36, 37], with the logarithm of current following
Spatially resolved analysis of the variations among the I – approximately a Gaussian distribution (figure 7(B)). What is
V curves was based on 900 I –V curves acquired on a 30 × 30 rather striking, however, is that the standard deviation is bias-
grid of points with a pixel resolution of ∼10 nm. Figure 7(A) dependent and there is a relatively abrupt crossover from
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
Figure 9. Spatial distribution of: (A) reverse current at −3.9 V; (B) the respective d log(I )/dV values (d log(I )/dV was numerically obtained
from the I –V curves, then fitted with fourth-order polynomial to calculate the values at −3.9 V); (C) reverse current at −3.9 V normalized by
the current values at −5.5 V for each I –V curve and (D) scaling exponent α of d log(I )/dV as a function of bias, obtained by fitting
d log(I )/dV in the bias range from −3 to −4.5 V (approximate window of interfacially limited conductance). The x and y axes in each case
are pixels (with a resolution of ∼10 nm) and the colorbars are the mapped values in their respective units.
wider distributions at V > −3.5 V to significantly narrower on the data in figure 8: (1) simple normalization, where the
distributions at V < −3.5 V, figures 7(A) and (B) (from current at a chosen bias (−3.9 V in figure 9) was divided by
σ = 0.28 at −5.5 V to σ = 0.47 at −2.8 V). Furthermore, the current value at another bias value (−5.5 V in figure 9(C))
the variations between I –V curves are not random, but rather and (2) d log(I )/dV analysis in the low-bias region (from
exhibit strong correlations across the surface, figure 8. In the −2 to −4.5 V) which we assigned to interfacially limited
low-bias region from −2.3 to −2.8 V, spatially coherent and conductance. d log(I )/dV was first numerically calculated for
discrete regions of enhanced conductance (∼30 nm diameter) each pixel, then fitted to a fourth-order polynomial, and then
are clearly visible (figure 8). Between −2.8 and −4 V, these the absolute values of d log(I )/dV (at −3.9 V in figure 9(B)),
‘hot-spot’ features begin to blend in with each other and with as well as the exponent α were calculated from the fit.
the surrounding areas, effectively disappearing. For −4 to The goal of simple normalization, I (−3.9 V)/I (−5.5 V),
−6 V, the spatial distribution of conductance is significantly is to reveal whether the disorder originates from the bias-
more uniform than in the low-bias region and it is also independent terms of the corresponding transport equations.
distinct because the surface areas that exhibited different These include the prefactor (e.g. contact area), as well as zero-
eφ 0
conductivity, e.g. the left versus right half of the image, field barrier-height terms, such as in exp(− kTB ) the Schottky
become approximately similarly conducting. The observed emission equation. Normalization should reduce the strength
variation of the disorder with tip bias is consistent with a of the disorder and change its spatial pattern if its origin is
crossover between two mechanisms, particularly since the tip bias-independent. The comparison of panels in figure 9(A)
bias corresponding to the narrowing of the current distribution (current) versus figure 9(C) (normalized current) reveals that
is nearly identical to the value where the exponent α is reduced the disorder pattern does remain after normalization. However,
(figures 6(A), (C) and (D)). The coherent and distinct features its details are slightly altered, particularly at the top and bottom
in the low-bias range may signify either extended defects or of the map. Upon careful examination one can see that the map
defect gradients at the interface or surface, the origin of which in figure 9(A) has several ‘streaks’ crossing the image (also
is subject to further investigation. The effect of these defects seen in figure 8 at −2.35, −2.52 V). These streaks clearly
on the overall conductance diminishes with increased bias, as manifest changes in the tip–contact geometry (e.g. contact
the bulk-limiting mechanism (and apparently more uniform area) along the fast x axis of the scan, so that along the slow-
distribution of the relevant bulk parameters) becomes more scan y axis the consecutive lines are abruptly different from
dominant at high bias. each other. We can therefore infer that changes revealed in
To gain more insight into the origins of the observed simple normalization, as well as the corresponding disorder,
disorder, we have carried out two types of numerical analysis originates from the tip–contact effects.
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
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Nanotechnology 22 (2011) 254031 P Maksymovych et al
area. The two effects can be reasonably well separated using [14] Sune J, Nafria M, Miranda E, Oriols X, Rodriguez R and
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[20] Mikhaelashvili V, Betzer Y, Prudnikov I, Orenstein M,
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Sciences (PM, MP, APB, SVK), sponsored at the Oak metal–dielectric–metal and metal–dielectric–semiconductor
Ridge National Laboratory by the Division of Scientific User structures based on electron beam evaporated Y2 O3 , Ta2 O5
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Facilities, US Department of Energy. The work at Berkeley
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