Microtechnology

Material is continuously being

added to this book -join the effort to
The open source Handbook of Microfabrication and create it!
Microtechnology
Encourage the
The Wikibook on Microtechnology has been started with There is a
authors -use Overview Tables:
the intention to gather information in one place about the related book on
the discussion
various applications, fabrication methods and systems to Nanotechnology. Wet Etches
page
provide students, researchers and everyone else an Microfabrication
open-source handbook and overview guide. Google Search Materials
in this book (htt Silicon Material
p://www.google.c Properties
om/custom?sa= Semiconductor
Latest major
Google+Search Electronic
addition:
&domains=en.wi Properties
Semiconductor
kibooks.org/wiki/
Electronic
Microtechnology
Properties
&sitesearch=en.
wikibooks.org/wi
ki/Microtechnolo
gy)

Contents Detailed descriptions (-icons are individual web pages; Numbers are sub-sections)

Part 1: INTRODUCTION Introduction Overviews About the Book Reaching Out

What is microtechnology 1. A Perspective on 1. Internet Resources 1. Vision 1. Outreach Projects

about - what can you use it Microtechnology 2. Journals 2. How to Contribute 2. Demonstration
for and where is it going? 2. Applications of 3. Microtech 3. History Experiments
Microtechnology Products & 4. Authors 3. Teaching
Companies 5. Support and Microtechnology
4. A Micro- Acknowledgements
technology
Timeline

Part 2: MATERIALS Materials Semiconductors Insulators Conductors

Silicon is the traditional 1. Overview 1. Silicon 1. Silicon Dioxide 1. Noble Metals

microfabrication material 2. Applications and 2. Polycrystalline 2. Silicon Nitride 2. Alloys
for making computer chips Uses Silicon 3. PMMA 3. Silicides
and other electronic 3. Product Life- 3. IV Semiconductors 4. PDMS
circuits. A wealth of other Cycles 4. III-V 5. SU8
material types are being
4. Environmental Semiconductors
increasingly used for lab- Considerations 5. II-VI
on-a-chip systems and
5. Wafers and Semiconductors
cheap disposable circuits.
Substrates
Overview

Part 3: FABRICATION Additive Processes Etching Processes Lithography Additional Methods

PROCESSES
1. Overview 1. Etchants 1. Ultra Violet 1. Rapid Thermal
Microfabrication is largely 2. Oxidation 2. Wet Etch Lithography (UVL) Anneal (RTA)
concerned with making 3. Chemical Vapor Overview Table 2. Electron Beam 2. Wafer Bonding
microchips by batch Deposition (CVD) Lithography (EBL)
processing silicon (and an 4. Physical Vapor 3. Wet Etch 3. Resist Coatings 3. Electrical
increasing number of Deposition (PVD) Compatibility Connections
different materials) wafers 5. Epitaxial Growth Chart 4. Doping
into individual chips in a 6. Electrochemical 4. Capillary Effects 5. Packaging
cleanroom facility. Methods 5. Silicon KOH Etch 6. Ellipsometry
Cleanrooms are used 7. Spinning 6. Silicon Oxide Etch
because dust must be 7. 4 Point
8. Surface (HF, BHF, BOE) Measurements
avoided. The parts of a
Functionalization 7. Silicon Nitride 8. Atomic Force
microchip are much
Etch Microscopy
smaller than the average
dust particle, and a single 8. Metal Etches 9. Scanning Electron
particle can wreak havoc 9. Cleaning Methods Microscopy
in a sensitive process (not 10. Dry Etching 10. Optical
only making a fault at Overview Microscopy
some point on the wafer, 11. Reactive Ion 11. Vacuum
but also contaminating Etching (RIE, Equipment
process equipment) The DRIE, ASE)
processes can roughly be 12. Dry Cleaning
divided into Additive and Methods (Plasma,
etching processes that Ozone)
wither add or remove 13. Laser Ablation
material, and lithography 14. Gas Etches
that creates patterns on
the surface.

Part 4: APPLICATIONS Microelectronics Photonics Micro- Microfluidics and

electromechanical Sensors
Reading this, you are 1. An Ohmic Resistor 1. Waveguides Systems (MEMS)
quite used to your 2. The Diode 2. Photonic Band 1. Applications
computer which is based 3. The Transistor Gap Structures 1. Applications 2. Microfluidic
on microelectronics, you 3. Electro-optical 2. Resonators Pumps
4. CMOS
access the internet which Devices 3. Strain Gauges 3. Microfluidic Valves
would not work well
4. Pressure Sensors 4. Chemical Noses
without photonics. The
airbag sensor in you car is 5. AFM cantilevers 5. PCR Systems
a MEMS devices and 6. Acceleration 6. Microfluidic Cell
shortly you will also find Detectors Handling
lab-on-a-chip devices in 7. Optical Beam
your everyday life. Control
8. RF MEMS

Retrieved from "https://en.wikibooks.org/w/index.php?title=Microtechnology&oldid=3463422"

This page was last edited on 13 September 2018, at 22:42.

Text is available under the Creative Commons Attribution-ShareAlike License.; additional terms may apply. By using this site, you agree to the
Terms of Use and Privacy Policy.