Professional Documents
Culture Documents
Electromagnetics: Electromagnetic Field Is A Natural Phenomenon
Electromagnetics: Electromagnetic Field Is A Natural Phenomenon
Electromagnetics: Electromagnetic Field Is A Natural Phenomenon
EMI
• ElectroMagnetic Interference is electromagnetic emission that
causes equipment malfunction
• No matter how strong emission is, if it doesn’t cause problems,
it is not an interference, i.e. not EMI.
• Therefore, the impact of EMI is judged not only by how much
emission is generated, but also by how it gets from “here” to
“there” and by how immune the equipment is to EMI.
• EMI is NOT an ESD Event! An ESD Event, though, can be one
of the sources of EMI
• For simplicity of this discussion we will call all electromagnetic
©2009 BestESD Technical Services
MM
CDM
2
Electromagnetic Field is a
Natural Phenomenon
• Electricity and magnetism were not invented – they were
discovered
• Our bodies rely on electric currents to function
• Earth has strong magnetic field
• Lightning and other atmospheric phenomena create electric
and magnetic fields
• Sun experiences electromagnetic storms
©2009 BestESD Technical Services
MM
CDM
3
1
Is Electromagnetic Field
Dangerous for People?
• Perhaps
• Everything is good in moderation
• It is hot inside microwave oven
• Outside in normal environment there was no
repeatable conclusive studies proving connection between
emission from mobile phones with any specific illness
• Every positive published study is refuted by a negative
MM
CDM
4
– Sensor misreading
HBM
– Component damage
MM
CDM
5
Types of Fields
• Voltage creates electric field
• Anywhere where voltage is present, there is an electric field
• In return, an electric field creates voltage in conductors
• Current creates magnetic field
• Anywhere current is present, there is a magnetic field
• In return, magnetic field creates current in conductive loops
©2009 BestESD Technical Services
HBM
MM
CDM
6
2
Electric and Magnetic Fields
• Electric field is
accompanied by
magnetic field
• Electric and magnetic
fields are orthogonal
to each other
MM Poynter Vector
CDM
7
Field Strength
• Electric field strength is a
quantitative expression of the
intensity of an electric field at a
particular location.
• The standard unit is the volt
per meter (V/m)
• A field strength of 1 V/m 1V
represents a potential
difference of one volt between
points separated by one meter
1 V/m
©2009 BestESD Technical Services
HBM
1 meter
MM
CDM
8
6.00E+01
1000
4.00E+01
2.00E+01
800
0.00E+00
1 2 3 4 5 6 7 8 9 10
600 -2.00E+01
-4.00E+01
400
-6.00E+01
©2009 BestESD Technical Services
-8.00E+01
200
-1.00E+02
0 -1.20E+02
1 2 3 4 5 6 7 8 9 10
HBM -1.40E+02
MM
CDM
9
3
Units of Measurement of
Voltage
Voltage Vdb = 20 × log(V / Vo )
• Vo (v): 0dBV = 1V
• Vo (µv): 0dBµV = 1µV
HBM
MM
CDM
10
Units of Measurement of
Field
Electric Field Edb = 20 × log( EV / m / E 0)
• Eo (V/m): 0dBV/m = 1V/m
• Eo (µV/m): 0dBµV = 1µV/m
x100 20*log(100) 40
x1000 20*log(1000) 60
HBM
MM
CDM
11
V V
vs .
inch m
• V/inch is an artificial unit for static electric field derived from the
convenience of using a fieldmeter at a distance of 1” from the
measured surface
• V/m is a more standardized unit. It is now frequently used by
Europeans for static control
• V/m does not mean that the field is measured at 1m away from the
surface – it is just calculations
V V V V
©2009 BestESD Technical Services
1 = 40 100 = 4000
inch m inch m
HBM
MM
CDM
12
4
Another Unit You May See
dbm P
Pdbm = 10 × log(
)
• This is a unit of power, not voltage P0
dbµV = dbm + 107
• It is also a logarithmic unit
dbm = dµV − 107
• P0 = 1mW into 50N load
CDM
13
−60 dBm 1.0 nW = 1000 pW The Earth receives one nanowatt per square meter from a magnitude +3.5 star
Typical range (−60 to −80 dBm) of wireless (802.11x) received signal power over a
−70 dBm 100 pW
network
HBM −127.5 dBm 0.178 fW = 178 aW Typical received signal power from a GPS satellite
MM
CDM
14
MM
CDM
15
5
Fundamental Difference
Between Near and Far Fields
• In the near field the affected objects are capacitively
coupled with the source
• The objects caught in the near field affect the source
• In the far field there is no coupling between the source and
the objects
• Why all of this would matter to us?
• See Static Charge Section!
MM
CDM
16
HBM
MM
CDM
17
EMISSION
HBM
MM
CDM
18
6
Propagation of
Electromagnetic Emission
• Radiated
– Electromagnetic field composed of electric and magnetic fields propagates via air path
just as emission from a mobile phone would reach the base station
– This field would create voltages and currents in any metal object, i.e. wire, PCB trace,
etc.
• Conducted
– The most neglected type of propagation
– High-frequency currents move via power, ground and data cables and inject
undesirable signals into equipment
• Mixed
– Radiated emission generates signals in wires and cables. These signals are then
HBM
MM
CDM
19
Radiated Emission
• Everything electric generates electromagnetic fields
• Electromagnetic fields, in return, generate signals in
conductive objects
• This is how your mobile phone, your radio and your TV can
work
• In most practical sense, every piece of equipment that has
anything electric inside is a radio station
©2009 BestESD Technical Services
MM
CDM
20
Antennae
• Without antennae there would be no radio communication (and no
radiated EMI)
• Antenna converts electromagnetic field into electric signal
• Any piece of wire is an electric field antenna
• Any wire loop, ground loop or coil is a magnetic field antenna
• Antenna can be receiving, transmitting or both
• Antennae have certain key properties that define their performance
• Details of antenna performance is outside of the scope of this class
• Sufficient to say that any piece of equipment can be either radiator or
©2009 BestESD Technical Services
receiver or both
HBM
MM
CDM
21
7
Radiated Emission
Propagation
• The farther from the source,
the smaller the field
• Electric field is inversely
proportional to the distance
• This means that even a
strong source of emission
won’t be able to interfere
CDM
22
Conducted Emission
• Any “glitch” and any electrical
artifact of operation of
equipment propagates via
power line, ground and other
cables
• Current spikes, voltage spikes,
other high-frequency signals
create corresponding
high-frequency signals that
©2009 BestESD Technical Services
MM
CDM
23
Properties of Signals on
Cables and Wires
• Most dominant signals on power lines and ground are
transient signals, i.e. spikes
• Spikes are caused typically by sudden draw of current
by actuators, stepper motors. This produces
corresponding voltage drops
• Even though the spectrum of these spikes may originally
be fairly broad, long cables exhibit reactive properties
such as distributed inductance and capacitance
• As a result, the spectrum of conducted noise is limited to
©2009 BestESD Technical Services
MM
CDM
24
8
Examples of Signals on
Cables and Wires
MM
CDM
25
Conducted Emission:
Propagation via Wires and Cables
• Electric noise can be generated by any equipment
• This signal propagates throughout the entire factory
• Unlike radiated emission, noise on lines is not as quickly
attenuated and can be critical far away from the source
• Common conduits:
– Ground wires
– Power cables
©2009 BestESD Technical Services
– Network cables
– Any cables and wires
HBM
MM
CDM
26
Common-Mode vs.
Differential Noise
HBM
MM
CDM
27
9
Common-Mode vs.
Differential Noise
• Differential Noise
– Caused by operation of electric equipment connected to that power line
– AC differential noise is between live and neutral
– DC differential noise is between positive and negative lines
• Common Mode
– Caused by induced signals from other lines or via transformer using capacitive and
inductive coupling
– Noise on ground wires is a derivative of common mode noise
• Differential noise is generated, common-mode noise is induced
• Reduction of differential noise in the facility leads to reduction of common
HBM
MM
CDM
28
HBM
MM
CDM
29
Noisy Tools
• Any electric circuit generates noise and unwanted currents
and voltages
• Poorly designed tool generates excessive noise
• When selecting your tools, always select the ones that
have passed emission test limits. Your starting criteria:
FCC or CE certification (not just a label)
• If you do not require your suppliers to provide you with
good-quality tools, then the noise becomes your problem to
deal with
©2009 BestESD Technical Services
MM
CDM
30
10
Example of a Noisy Tool
• Most tools use stepper motors
• Questionable-quality stepper
motors generate significant
noise
• Improperly-connected motors
use tool ground as return for
current +5V I Z
• This creates high-noise Signal In V
situation that may affect
MM
CDM
31
MM
CDM
32
HBM
MM
CDM
33
11
Is Copper Buss a Good
Grounding Element?
• What can possibly be bad in
using solid copper buss bar for
grounding?
• Large cross-section, good
conductive material
• Problem is skin effect
• Surface area is too small
• Oxidation further increases
HBM
MM
CDM
34
Skin Effect
δ = the skin depth in meters
• Due to internal magnetic fields in a µr = the relative permeability of the
conductor, the higher the frequency δ ≈ 503 ρ medium ~1 for copper
the more the current flows on the µr f ρ = the resistivity of the medium in
Ωm (for copper = 1.68 10-8 Ωm)
outside of that conductor f = the frequency of the wave in Hz
of “good ground”
Low impedance for DC
High impedance for EMI
HBM
MM
CDM
36
12
Grounding Wires and
High-Frequency Signals
• For safety purposes and for dissipation
of static charges, a coiled or long
ground wire is sufficient
• However, such wires have significant
impedance at high frequencies
• With currents flowing to/from the tool
during normal operation, the tool may
have voltage on its “grounded” parts
Z I V
• 5-turn coiled wire with a 10cm radius
and a 1cm thick coil will have
impedance of 6.28kOhms at 100MHz.
A 1mA current would cause 6.28V Impedance of Coiled Wire
r2N 2
voltage across such coil. L = 0.394
MM
CDM
37
Ground Bounce
• EMI (internal and external)
induces voltages in equipment’s
ground
• Current flows from equipment’s
ground to facility’s ground
• If ground path is imperfect, +5V I Z
V
voltage drop develops Signal In
• Equipment malfunctions
HBM
MM
CDM
38
• Equipment malfunctions
HBM
MM
CDM
39
13
Inductive Coupling in Wires
• Closely-placed wires act as
transformer
• Current in one wire generates
current in nearby wires
• All it takes is one “bad
neighbor” to spoil the entire
neighborhood
• Identify noisy wires and
separate them from other
MM
CDM
40
MM
CDM
41
Dealing
with EMI
©2009 BestESD Technical Services
HBM
MM
CDM
42
14
EMI Management:
Comprehensive Approach
• All components must be considered for
successful EMI managements
Propagation
EMI Origin EMI Target
Path
MM
CDM
43
Sources of EMI in
Manufacturing Environment
• Poorly-designed equipment
• Poorly installed equipment
• Poorly maintained equipment
• ESD Events
• Mobile phones and walkie-talkies
©2009 BestESD Technical Services
Propagation
EMI Origin EMI Target
Path
HBM
MM
CDM
44
for itself
HBM
MM
CDM
45
15
EMI in Improperly EMI Origin
Installed Equipment
• Even the best tool improperly
installed can be a source of
strong EMI
– Long and coiled ground wires
– Power cables running next to
data cables
– Known noisy tools installed
next to sensitive equipment
CDM
46
MM
CDM
47
16
EMI from EMI Origin
Mobile Phones
• Frequency range: 800, 900 and
1800MHz
• GSM phones produce emission in
bursts
• High emission levels (~10V/m)
• Easily creates disruption in sensitive
equipment in immediate proximity
HBM 4.6mS
MM
GSM Phone Transmission Pattern
CDM
49
Propagation of EMI
• If noise cannot get to sensitive equipment, the
problem is solved, at least partially
Propagation
EMI Origin EMI Target
Path
©2009 BestESD Technical Services
HBM
MM
CDM
50
MM
CDM
51
17
Propagation
Conducted Emission Path
• Common conduits:
– Ground wires
– Power cables
– Network cables
• A signal originated in one spot can propagate through the
entire factory via these conduits
• Consider using separate power and ground lines for
HBM
MM
CDM
53
peacefully
HBM
MM
CDM
54
18
Equipment Susceptibility to EMI
Propagation
EMI Origin EMI Target
Path
MM
CDM
55
MM
CDM
56
exposure to ESD
HBM
MM
CDM
57
19
Equipment Lock-Up: EMI Target
False Signals
• Electromagnetic fields induce Induced EM
Disturbance
seemingly legitimate signals into
electronics circuits which leads to
circuit malfunction
• Often, the electronics circuit does not
suspect that it was affected by EMI
• Today’s high-speed circuits are much
more susceptible to ESD-induced
high-speed transients An "Extra" Pulse
CDM
58
• Strong electromagnetic fields • TDMA mobile phone caused false readings in sensor
of magnetic head tester and finally caused error
induce voltages and currents in message after failing several good GMR heads
circuits
• In sensors such signals can
affect legitimate signals and
cause false readings
• Consequences:
– disrupted process
– good components failed
– bad components passed
©2009 BestESD Technical Services
HBM
MM
CDM
59
EMI FILTERS
©2009 BestESD Technical Services
HBM
MM
CDM
60
20
Purpose of EMI Filters
• In general, EMI filters suppress
high-frequency signals and pass
only desired signals
• More specifically, absolute
majority of EMI filters are designed
to help manufacturers comply with
EMC regulations
MM
CDM
61
EMI Filters
• Regular EMI filters don’t work well in a factory environment:
• They perform better at high frequencies while most of strong EMI cases in
production is at lower end of the spectrum
• They are designed for 50N termination during compliance test
• Real-life production environment is anything but that
• Most of signals in production environment are transients, while the EMC tests
use continuous signals
• Long lines in installation create reflections, mostly at low frequencies rendering
standard filters even more ineffective
• The performance of even a good-quality filter would be dramatically worse in
©2009 BestESD Technical Services
CDM
62
applications
• Read the specification! A=50N/50 Nsym; B=50N/50N asym;
HBM
C=0.1N/100N sym; D=100N/0.1N sym
MM
CDM
63
21
Signals on Power Lines
and Filter Performance
An example of a waveform on power Performance of different filters at low
lines. Timebase is 2µS. The main frequencies
frequency is 200kHz
0
0 500 1000 1500 2000
-10
-20
2-Stag
-30 e Filter
Attenuation, dB
Single
-40 Stage
Filter
-50 Specia
l Filter
-60
-80
-90
HBM
Frequency, kHz
MM
CDM
64
Impulse Response of
Different Filters
Raw signal on ground
HBM
MM
CDM
65
MM
CDM
66
22
GOOD EMI PRACTICES
MM
CDM
67
MM
CDM
68
MM
CDM
69
23
EMI Management of
Equipment
• Require all purchased equipment to have proper EMC
certification (FCC, CE). Make it a part of purchase specification
• Certify all internally-created equipment for compliance with EMC
standards
• Do not use non-compliant equipment
• Test entire installation for emission and compare it with internal
standards
• Enforce EMI check before and after maintenance of all
MM
CDM
70
• Properly install it
• Keep all covers on with all the screws properly
fastened
• Tighten all connectors
• Use EMI filters
• Monitor EMI environment near equipment
©2009 BestESD Technical Services
MM
CDM
71
EMI AUDIT
©2009 BestESD Technical Services
HBM
MM
CDM
72
24
EMI Audit
• Just as you conduct ESD Audit, perform EMI Audit on a regular basis.
Among items to check:
• Every connection to ground
• Quality of EMI ground
• EMI levels at each tool/workstation.
Set EMI limits for each type of tool!
• ESD activity
• Proper shielding
• Runs of data cables
MM
CDM
73
140
Measurements of 120
EMI on ground
100 – Determine your EMI “hot spots”
80
plates 60
40
S7 – Similar equipment should have
S6
20
0
S5
S4
similar EMI signature. Deviations
1
2 3 4 S2
S3
may mean trouble
5
Sub Fab Ground EMI 6 S1
7
8
• Do not let problems just “sit there” --
devise plan of action and follow-up
200
180
• Do EMI audit on scheduled basis.
Monitor progress. Find where the
©2009 BestESD Technical Services
160
Field Strength,mV/m
140
120
100
problems appear
80
60
40
20
0
HBM
MM
CDM
74
HBM
MM
CDM
75
25
EMI Audit: Non-Contact Ground
Measurements
• Measure field strength near
– each ground plate
– grounded tool cover
– grounding wires
• Recommended distance from the
grounded surface: 0.5” or 10mm
• Measure both average and peak
values
• Data log the readings and make
HBM
MM
CDM
76
devices to EOS
HBM
MM
CDM
77
HBM
MM
CDM
78
26
EMI TROUBLESHOOTING AND
MM
CDM
79
EMI Troubleshooting
Methodology
• Your tool has locked. What now?
HBM
MM
CDM
80
Difficulties in EMI
Troubleshooting
• In order for EMI to cause problems EMI occurrence should
coincide with the most vulnerable step in equipment
operation
• One equation with two variables
• EMI simulation often doesn’t help since it may not
represent actual EMI condition to which equipment is most
vulnerable
©2009 BestESD Technical Services
MM
CDM
81
27
Why EMI Matters Now
More than Ever?
• Smaller geometries of today’s devices make them much more
susceptible to EMI
• The new circuits work at higher speeds and now “notice” the ultra-
short spikes that older slower circuits ignored
• Higher frequencies used in today’s electronics create more emission
due to better antenna factor
• Today’s circuits work at lower voltages: as low as 1.8V. Much lower
levels of EMI are needed for their disturbance
MM
CDM
82
Q&A
©2009 BestESD Technical Services
HBM
MM
CDM
83
Contact Information
Vladimir Kraz
BestESD Technical Services
P.O. Box 5146, Soquel, CA 95073 USA
Tel. 831-824-4052 FAX 206-350-7458
E-mail vkraz@bestesd.com
Web site http://www.bestesd.com
©2009 BestESD Technical Services
HBM
MM
CDM 84
28