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  • MAH (Make Up Air Handler) : Figure #2

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    The document shows a diagram of a clean room layout with a raised floor return. It depicts a make-up air handler and recirculation air handler supplying HEPA-filtered air to a process bay through a mixing plenum, with the air then being exhausted through vacuum pumps after passing through the service chase and process bay. The design uses a unidirectional airflow approach with outlets on the ceiling and exhaust inlets near the floor to provide downward clean air movement through the working zones to the contaminated floor area.

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    Clean Room-37

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    The document shows a diagram of a clean room layout with a raised floor return. It depicts a make-up air handler and recirculation air handler supplying HEPA-filtered air to a process bay through a mixing plenum, with the air then being exhausted through vacuum pumps after passing through the service chase and process bay. The design uses a unidirectional airflow approach with outlets on the ceiling and exhaust inlets near the floor to provide downward clean air movement through the working zones to the contaminated floor area.

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    © All Rights Reserved
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    38 views1 page

    MAH (Make Up Air Handler) : Figure #2

    Uploaded by

    CIVIL
    The document shows a diagram of a clean room layout with a raised floor return. It depicts a make-up air handler and recirculation air handler supplying HEPA-filtered air to a process bay through a mixing plenum, with the air then being exhausted through vacuum pumps after passing through the service chase and process bay. The design uses a unidirectional airflow approach with outlets on the ceiling and exhaust inlets near the floor to provide downward clean air movement through the working zones to the contaminated floor area.

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    Download as PDF, TXT or read online from Scribd
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    of 1

    www.PDHcenter.com PDH Course M143 www.PDHonline.

    org

    MAH(Make up
    Air Handler)

    RAH (Recirc
    RAH
    Air Handler)
    Mixing
    Plenum

    HEPA FILTERS HEPA FILTERS

    Process Process
    Bay Bay
    Service
    Chase

    Vacuum
    Pump

    Figure #2 (Clean room Arrangements with Raised Floor Return)

    The figure # 2 above shows Class 10, Unidirectional Air Flow Arrangement. The figure

    depicts raised floor return arrangement unlike the low wall return arrangement shown in

    figure# 1.

    Why Raised Floor or low wall returns?

    Typically in a clean room, outlets supplying air to sensitive ultra clean areas and highly

    contaminated areas should be located on the ceiling, with perimeter or several exhaust inlets

    near the floor. This arrangement provides a downward movement of clean air through the

    working zones to the contaminated floor area for exhaust.

    The clean room design follows the 180° unidirectional airflow approach. By 180°, it implies

    that either

    Page 37 of 61

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