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A mass flow controller (MFC) is a closed-loop device that sets, measures, and controls the flow of a particular gas or liquid.
These devices are essential to most thermal and dry etching processes. Advanced Energy®’s Aera® MFCs provide the most
precise flow control at the most cost-effective price.
This paper defines critical flow control terminology, describes basic MFC operation, and illustrates Aera MFC design
solutions to common mass flow control challenges. The last section introduces the liquid mass flow controller (LMFC)
and describes design solutions specific to flow control of liquids.
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w h i t e p aper
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advanc e d e n e r g y
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A thermal vaporizer system is more An LMFC consists of the same flow
accurate and repeatable than the components found in traditional
carrier gas/bubbler technique, but MFCs. The major difference is that
it requires a very large, expensive each component must be designed to
system to enclose all of the prevent the most prevalent problem
requisite hardware and maintain with LMFCs—bubble formation
an isothermal environment. Re- and retention. In an LMFC, a liquid
condensation of the vapor can be a source can gain heat from the sensor
chronic problem with this technique tube, which operates at an elevated
unless stringent precautions are temperature, and from contact
taken to heat all lines leading from with the internal parts of a control
the thermal vaporizer system to the valve if it is of a type that generates
reactor or furnace tube. heat. If bubbles were consequently
generated and retained, their Figure 4. Aera® LX-1200/1200C
A New Method for Flow Control presence would adversely affect series LMFC
A mass flow control instrument accuracy and repeatability and
for metering very low flows of could cause malfunction of the
liquid source materials into LMFC. The present design uses a
process chambers is now available, vertically configured flow path that
offering considerable advantages prevents retention of bubbles. The
over vaporizer techniques. This inlet fitting is at a lower level than
instrument is a liquid mass flow the outlet fitting, and the sensor is
controller (LMFC) and is an S-shaped rather than U-shaped as in
adaptation of basic mass flow control conventional MFCs. Additionally, the
technology. The LMFC provides control valve is of a piezoelectric/
accuracy and repeatability, as well as diaphragm type, which has a much
size and cost advantages. cooler operating temperature
than other types of control valves
and permits no liquid to enter the
internal region of the valve. To
prevent bubble formation in the
heated sensor tube, the LMFC is
limited to liquids that have a boiling
point of at least 65°C (149°F).
Advanced Energy Industries, Inc. • 1625 Sharp Point Drive • Fort Collins, Colorado 80525 © Advanced Energy Industries, Inc. 2005
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Advanced Energy ®, AE®, and Aera® are trademarks of Advanced Energy Industries, Inc.