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Abstract—Inspired by magnetically actuated precision motion et al. [6], [7] built a piezoelectric robot, called NanoWalker,
devices based on magnetic levitation and those based on elastic whose design is based on a three-legged push-slip locomotion
suspension, we devised a novel magnetic actuation mechanism, mechanism. All of these legged precision mechanisms are based
namely, a magnetic walking mechanism. This biped precision
mechanism is a legged precision mechanism that consists of two on the piezoelectric actuation principle, and they are well suited
elastically connected rigid legs. We designed the mechanism to for use in the manufacture of legged precision machines that
be driven by one horizontal actuator and two vertical actuators, walk on individually actuated deformable legs, i.e., piezoelec-
each comprising a permanent magnet and an air-core coil, and tric legs, but such legs have short range of motion due to the
to produce both fine motion and walking motion. We discuss the limited displacements of piezoelectric actuators. To overcome
underlying principles of force generation, leg actuation, fine mo-
tion, and walking motion. To demonstrate that both fine motion this main disadvantage, a new legged precision mechanism is
and walking motion can be created with this mechanism, we built required.
and experimentally tested a two-legged walker. We successfully Another way to produce displacements at the micro- and
created a legged precision device capable of long-range fine mo- nanoscales is to use magnetic actuators that comprise permanent
tion and long-step walking motion based on a magnetic walking magnets and air-core coils. These magnetic actuators have been
mechanism.
successfully used to create precision positioning systems that
Index Terms—Bipedal walking, magnetic actuation, magnetic require micro- or nanopositioning capability. There are two main
walking, micro/nanorobots, precision positioning. types of magnetically driven precision positioners: positioners
based on magnetic levitation (maglev) [8]–[11] and positioners
I. INTRODUCTION based on spring or flexure suspension [12]–[15]. These devices
provide frictionless fine motion with the help of noncontact
EGGED precision positioning systems have been re-
L searched for applications such as micro- or nanoscale
manipulation, assembly, automation, and microscopy [1]–[7].
actuation and frictionless suspension; therefore, they do not
suffer from mechanical friction and the resulting wear. In the
case of the former, mechanical friction between a moving part
A legged precision machine requires actuators to produce dis- and a stationary part is eliminated by magnetically levitating
placements at the micro- and nanoscales to realize movement the moving part off the stationary part. In the case of the latter,
of the machine. mechanical friction between a moving part and a stationary part
A general way to produce such small displacements is to use is eliminated by supporting the moving part by means of springs
piezoelectric actuators built with piezoelectric materials. These or flexures.
piezoelectric actuators have been successfully used to create Examples of magnetically driven precision positioners based
legged precision machines for microscale or nanoscale opera- on magnetic levitation are as follows. Hollis et al. [8] designed
tions. An obvious way to achieve walking motion is to build a maglev wrist driven by six actuation units, each of which con-
a legged precision mechanism that uses piezoelectric actua- sisted of four magnets, one coil, and two steel plates. Kim and
tors as legs, with no requirement for mechanical bearings such Trumper [9] developed a maglev stage driven by four permanent
as ball or roller bearings. For instance, Binnig and Gerber [1] magnet linear motors that consisted of Halbach magnet arrays
proposed a piezoelectric traveling support using an eight-legged and coil sets. Jung and Baek [10] presented a maglev positioner
lift-shift-place-lift-shift-place locomotion method. Uozumi driven by a surface actuator that comprised multiple magnets
et al. [2] constructed a piezoelectric walker based on a six-legged and multiple coils. Kim and Verma [11] described a maglev po-
shrink-shear-expand-shrink-shear-expand walking mechanism. sitioner driven by three actuation units, each of which consisted
Breguet and Renaud [3] built a piezoelectric robot using a three- of one magnet and two coils.
legged stick–slip locomotion mechanism. This type of mecha- Examples of magnetically driven precision positioners based
nism has also been used in MINIMAN robots [4], [5]. Martel on spring or flexure suspension are as follows. Smith et al.
Manuscript received November 8, 2013; revised March 29, 2014; accepted [12] designed a flexure-based actuation mechanism consisting
September 22, 2014. Date of publication October 14, 2014; date of current of two magnets and two coils. Wang and He [13] developed a
version December 3, 2014. This paper was recommended for publication by spring-suspended positioner driven by an actuation mechanism
Associate Editor J. Dai and Editor B. J. Nelson upon evaluation of the reviewers’
comments. This work was supported by grants from the National Research that comprised three groups of coils and 12 magnetic shoes built
Foundation of Korea (NRF) funded by the Korea government (MSIP) under with multiple magnets and multiple steel plates. Culpepper and
Grant NRF-2008-0059827 and Grant NRF-2009-0080591. Anderson [14] presented a flexure-based manipulator driven by
J. S. Choi is with the Department of Mechanical Engineering, Graduate
School, Yonsei University, Seoul 120-749, Korea (e-mail: jschoi@yonsei.ac.kr). three actuation units built with magnets and coils. Teo et al. [15]
Y. S. Baek is with the School of Mechanical Engineering, Yonsei University, described a flexure-based linear actuator built with four magnets
Seoul 120-749, Korea (e-mail: ysbaek@yonsei.ac.kr). and one coil.
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. The aforementioned precision positioners consist of two
Digital Object Identifier 10.1109/TRO.2014.2360492 parts: a magnet assembly and a coil assembly. According to
1552-3098 © 2014 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications standards/publications/rights/index.html for more information.
CHOI AND BAEK: PRECISE MAGNETIC WALKING MECHANISM 1413
Fig. 2. Magnetic walking mechanism. (a) Principle of walking motion (for clarity, the coils and magnets are not shown. A detailed description of the principle
of walking motion is given in Section VI). (b) Currents applied to the vertical and horizontal coils in each transition. (c) Directions of the applied currents. The
trailing superscript u denotes that the upper leg is in transition from one state to the next. The trailing superscript l denotes that the lower leg is in transition from
one state to the next. The initial distance between the supports of the upper leg and the base when no currents are applied to the actuators is represented as gs 0 .
TABLE I
COMPARISON OF OUR MECHANISM WITH EXISTING MAGNETIC ACTUATION MECHANISMS
Kim and Verma’s mechanism [11] Teo et al.’s mechanism [15] Our proposed mechanism
Actuation configuration MOVING-MAGNET-TYPE ACTUATION MOVING-COIL-TYPE ACTUATION Combination of moving-magnet-type actuation and
moving-coil-type actuation
Advantages Simple single-rigid-body dynamics No redesign or increase in size is required to increase the range of
horizontal motion
Disadvantages Increasing the range of horizontal motion requires redesign or an increase in size. Complex multiple-rigid-body dynamics
and walking motion, namely, the magnetic walking mecha- assembly that has an upper platform to which permanent mag-
nism and the experimental demonstration of this mechanism’s nets and mechanical supports are attached. The other leg is the
feasibility. lower body. The lower leg is a coil assembly that has a lower
The remainder of this paper is organized as follows. In platform on which air-core coils are mounted. These legs are
Section II, we describe the basic structure and force-generation connected and guided by springs. The upper leg is suspended
principles of the proposed mechanism. Vertical and horizontal by springs, and the lower leg is supported by a base.
actuators of the mechanism are described in Section III, while To generate forces in the x- and z-axes and a torque about
the principle of shared leg actuation is described in Section IV. the y-axis, a minimum of three single-axis actuators must be
In Section V, we describe the fine motion of each leg and, in incorporated. Because the mechanical and control complexity
Section VI the walking motion of the mechanism. A prototype of the mechanism, as well as its size, increase with the number
built based on the mechanism is presented in Section VII, and of actuators used, we incorporated this minimum number of
experimental results are provided in Section VIII. Section IX actuators in our mechanism to make it as simple and small
concludes this paper. as possible. Three magnet–coil pairs are used to actuate the
two legs. Two magnet–coil pairs on the left and right generate
vertical forces on the upper leg and reaction forces on the lower
II. BASIC STRUCTURE AND FORCE-GENERATION PRINCIPLE leg. Both legs are raised and lowered by applying currents to the
The magnetic walking mechanism consists of two elastically coils on the left and right of the lower leg. These two magnet–
connected moving parts (see Fig. 1), each of which is a rigid leg. coil pairs are used as vertical actuators to raise and lower the two
In other words, this mechanism has two elastically connected legs. The vertical actuators are based on magnetic attraction and
rigid legs. One leg is the upper body. The upper leg is a magnet repulsion. The other magnet–coil pair in the middle generates
CHOI AND BAEK: PRECISE MAGNETIC WALKING MECHANISM 1415
TABLE II
COMPARISON OF OUR MECHANISM WITH EXISTING PRECISION WALKING MECHANISMS
Uozumi et al.’s mechanism [2] Breguet and Renaud’s Martel et al.’s mechanism [6], Our proposed mechanism
mechanism [3] [7]
a horizontal force on the upper leg and a reaction force on the In contrast, the horizontal actuator is composed of one mag-
lower leg. Both legs are propelled by applying a current to the net that is magnetized in the positive z-axis direction and one
coil in the middle of the lower leg. This magnet–coil pair is used coil whose air-core axis is parallel to the x-axis direction. This
as a horizontal actuator to propel the two legs. The horizontal magnet–coil pair is a horizontal actuator. The magnet in the
actuator is based on magnetic propulsion. A detailed description middle of the upper leg interacts with the current-carrying coil
of each actuator is provided in the following section. in the middle of the lower leg. The magnetic interaction between
them generates magnetic force in the x-axis direction.
Theoretically, the magnetic force generated by interaction
III. VERTICAL AND HORIZONTAL ACTUATORS between magnetic elements can be expressed by the modified
Lorentz’s law, which is expressed in vector form [16], [17] as
As described briefly in Section II, the magnetic walking mech-
anism uses two vertical actuators, which generate z-axis mag- F = (m · ∇)B (1)
netic forces to move the upper and lower bodies in the z-axis
direction and one horizontal actuator, which generates an x-axis where m is the magnetic dipole moment, and B is the magnetic
magnetic force to move the legs in the x-axis direction. As de- flux density. If a cylindrical permanent magnet has a magnetic
picted in Fig. 1, the three magnets of the actuators are attached dipole moment m (m = mx î + my ĵ + mz k̂, where mx = 0,
to the upper leg, and the three coils of the actuators are mounted my = 0, and mz = constant), the rectangular components of
on the lower leg. the force can be expressed as
Each vertical actuator comprises one magnet magnetized in
the positive z-axis direction and one coil whose air-core axis ∂Bx
F x = mz (2)
is parallel to the z-axis direction. This magnet–coil pair is a ∂z
vertical actuator. Magnets on the left and right of the upper ∂By
F y = mz (3)
leg interact magnetically with the current-carrying coils on the ∂z
left and right of the lower leg, respectively. Each interaction ∂Bz
generates magnetic force in the z-axis direction. F z = mz . (4)
∂z
1416 IEEE TRANSACTIONS ON ROBOTICS, VOL. 30, NO. 6, DECEMBER 2014
(5)
where hm is the height of the magnet, rm is the radius, Vm is
the volume, zm p is the distance from the center to a point on the
axis, Bm a is the measured magnetic flux density on the center
of the magnet’s surface, and μ0 is the permeability of free space
(4π × 10−7 N·A−2 ).
To calculate the forces of vertical and horizontal actuators,
the magnetic field produced by the air-core coil has to be deter- Fig. 3. Vertical actuator. (a) Vertical coil. (b) Distance from the center of the
vertical coil to the center of the permanent magnet. (c) Cross section of the
mined; we describe how we determined the field below. vertical coil. (d) jth square wire loop in the vertical coil.
where (10)
D V /2 L V /2
aj
Zdx1 ĵ − Y1 dx1 k̂ (BV )z =
μ0 NV iV
(bv j )z dz10 daj .
bV 1 = (8a)
−a j [(x1p − x1 )2 + Y12 + Z 2 ]3/2 4π( 2 DV − 12 dV
1
)LV d V /2 −L V /2
(11)
aj
−Zdy1 î + X2 dy1 k̂
bV 2 = (8b)
−a j [X2 + (y1p − y1 )2 + Z 2 ]3/2
2
(15)
D H/2 L H/2
μ0 NH iH
(BH )z = (bH k )z dx20 dak .
4π( 2 DH − 12 dH )LH
1
d H/2 −L H/2
(16)
TABLE III
MAGNETIC ELEMENTS USED IN THE VERTICAL AND HORIZONTAL ACTUATORS
∗
L: Length, W: Width, H: Height.
Fig. 8. Actuation forces acting on the lower leg: (a) Vertical forces. (b) Hori-
zontal force. For clarity, the coils and springs are not shown.
In (19) and (20), z1p and z2p are, respectively, the distance
between the center of the magnet of the vertical actuator and the
center of the coil of the vertical actuator and the distance between
the center of the magnet of the horizontal actuator and the center
of the coil of the horizontal actuator; iV and iH are, respectively,
the current applied to the coil of the vertical actuator and the
current applied to the coil of the horizontal actuator; and C1 ,
C2 , C3 , and C4 are constants, which are calculated from the
experimental data as C1 = 0.85 N·A−1 , C2 = 25.5 N·m−1 ·A−1 ,
C3 = 0.344 N·A−1 , and C4 = 14.96 N·m−1 ·A−1 .
Fig. 6. Calculated and experimental force values of the horizontal actuator. IV. SHARED LEG ACTUATION
The horizontal actuator exerts one horizontal force on the
rigid legs, while the vertical actuators exert two vertical forces on
fixed. The magnet center and the coil center were placed on the the rigid legs. The actuation forces acting on the upper and lower
z-axis. legs are depicted in Figs. 7 and 8, respectively. The mechanism
Comparisons between theoretical and empirical values are uses the action forces, i.e., moving-magnet-type actuation forces
shown in Figs. 5 and 6. The magnetic force of each actuator created by the vertical and horizontal actuators to move the upper
increased as the distance decreased, whereas the magnetic force leg; the mechanism uses reaction forces, i.e., moving-coil-type
decreased as the distance increased, indicating that magnetic actuation forces created by the vertical and horizontal actuators
force was dependent on distance. Furthermore, the magnetic to move the lower leg.
force increased as the current that was applied to the coil of The total magnetic forces on the upper or lower leg in the x-
each actuator increased, whereas the magnetic force decreased and z-axes and the torque about the y-axis are
CHOI AND BAEK: PRECISE MAGNETIC WALKING MECHANISM 1419
Fig. 13. Dimensions of components of the prototype designed based on the magnetic walking mechanism. Table III shows dimensions of the magnets and the
coils.
1. Increasing the currents applied to the vertical coils causes the total z-axis spring force produced by the potential energy
the vertical actuators to exert attraction forces on the lower stored in the springs of State 3 to repel the lower leg by the
leg, which break the vertical balance of forces on the lower amount 4 δzl (=2 δzl ) in the negative z-direction. The upper leg
leg maintained in State 1. These forces move the lower leg is stationary. When 4 zl = −4 δzl , i.e., zl =2 δzl − 4 δzl = 0,
upward by an amount 2 δzl . The upper leg is stationary. When the lower leg is in the equilibrium state of Landingl (State 4).
2
zl = 2 δzl , i.e., zl = 2 δzl , the lower leg is in an equilibrium As the lower leg moves down, the vertical distance between
state of Flightl (State 2). In State 2, the relative positions of the horizontal coil and the magnet increases. With the current
the upper and lower legs with respect to the initial positions are fixed, increasing this vertical distance decreases the total x-axis
(0, 0, −1 δzu ) and (0, 0, 2δzl ), respectively. magnetic force of the horizontal actuator, as shown in Fig. 6,
For Transition 3 from States 2 to 3 (Propulsionl ), the equations which breaks the horizontal balance of forces on the lower leg
of motion of the mechanism become maintained in State 3. This total x-axis magnetic force decrease
causes the total x-axis spring force produced by the potential
ml 3 ẍl + KH 3xl = 3 FHl (30) energy stored in the springs of State 3 to move the lower leg
ml 3 z̈l + KV 3zl = 0. (31) backward by the amount 4 δxl . Thus, when the lower leg is in
State 4, 4 xl = −4 δxl , i.e., xl =3 δxl −4 δxl . The step length of
This transition occurs by applying a clockwise current to the the lower leg is (3 δxl −4 δxl ). This step length can be increased
horizontal coil in State 2. Applying the current to the horizontal by increasing the current applied to the horizontal coil because
coil causes the horizontal actuator to exert a thrust force on the increasing the current applied to the horizontal coil increases the
lower leg, which breaks the horizontal balance of forces on the total x-axis magnetic force of the horizontal actuator, as shown
lower leg maintained in State 2. This force propels the lower leg in Fig. 6. In State 4, the relative positions of the upper and lower
forward by the amount 3 δxl . The upper leg is stationary. When legs with respect to the initial positions are (0, 0, −1 δzu ) and
3
xl =3 δxl , i.e., xl =3 δxl , the lower leg is in the equilibrium (3 δxl − 4 δxl , 0, 0), respectively.
state of Thrustl (State 3). In State 3, the relative positions of For Transition 5 from States 4 to 5 (Repulsionu ), the equations
the upper and lower legs with respect to the initial positions are of motion of the mechanism become
(0, 0, −1 δzu ) and (3 δxl , 0,2 δzl ), respectively.
For Transition 4 from States 3 to 4 (Repulsionl ), the equations mu 5 ẍu + KH 5 xu = −5 FHu + KH (3 δxl − 4 δxl ) (34)
of motion of the mechanism become mu 5 z̈u + KV 5 zu = −5 FVu + KV 1 δzu . (35)
ml 4 ẍl + KH 4 xl = 4 FHl − KH 3δxl (32) This transition occurs by decreasing the currents applied to
4 4
ml z̈l + KV zl = 4
FVl − KV δzl − KV δzu − ml g. (33)
2 1 the vertical coils in State 4. Decreasing the currents applied
to the vertical coils reduces the total z-axis magnetic force
This transition occurs by decreasing the currents applied to on the upper leg, which breaks the vertical balance of forces on
the vertical coils in State 3. Decreasing the currents applied to the upper leg maintained in State 4. This total z-axis magnetic
the vertical coils reduces the total z-axis magnetic force on the force reduction causes the total z-axis spring force produced
lower leg, which breaks the vertical balance of forces on the by the potential energy stored in the springs of State 4 to re-
lower leg maintained in State 3. This total z-axis magnetic force pel the upper leg by the amount 5 δzu (=1 δzu ) in the positive
reduction causes the gravitational force of the lower leg and z-direction. The lower leg is stationary. When 5 zu = 5 δzu , i.e.,
1422 IEEE TRANSACTIONS ON ROBOTICS, VOL. 30, NO. 6, DECEMBER 2014
Fig. 25. Step length of the upper leg of the biped after one step. When a 2.2-A
ramp current was applied to the horizontal coil, the step length of the upper leg
Fig. 22. Response of the upper leg to a 0.6-mA ramp input.
was 374 μm.
Fig. 26. Step lengths that the upper leg of the biped which took two steps Fig. 27. Repeatability tests for long-step walking of the biped. A 1.8-A ramp
had. When a 1.8-A ramp current was applied to the horizontal coil, the first step current was applied to the horizontal coil for each trial. The mean (m) equals
length of the upper leg was 327 μm, and the second step length of the upper leg 310 μm. The standard deviation (σ) equals 22.62 μm.
was 310 μm.
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acting as nano positioners and intelligent tweezers in scanning electron chanical engineering from Yeungnam University,
microscopes (SEMs),” in Proc. IEEE Int. Conf. Robot. Autom., Seoul, Gyeongsan, Korea, in 2000 and the M.S. degree
Korea, May 21–26, 2001, pp. 3909–3913. in mechanical engineering from Yonsei University,
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[10] K. S. Jung and Y. S. Baek, “Study on a novel contact-free planar system in mechanical engineering from Yonsei University,
using direct drive dc coils and permanent magnets,” IEEE/ASME Trans. Seoul, Korea, in 1979 and 1981, respectively, and the
Mechatronics, vol. 7, no. 2, pp. 35–43, Mar. 2002. M.S. and Ph.D. degrees in mechanical engineering
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resolution over extended travel range,” J. Dyn. Syst. Meas. Control-Trans. in 1986 and 1990.
ASME, vol. 129, no. 6, pp. 777–785, 2007. From 1990 to 1993, he was the Head Research En-
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freedom based on an electromagnetic driving principle,” Rev. Sci. Instrum., gineering, Yonsei University. His research interests
vol. 67, no. 1, pp. 312–317, 1996. include multidegree-of-freedom actuators and robotics, especially relating to
[14] M. L. Culpepper and G. Anderson, “Design of a low-cost nano- fine motion control. He is also interested in data storage devices such as optic
manipulator which utilizes a monolithic, spatial compliant mechanism,” disk drives, laser application devices such as bar code readers, and motorized
Precis. Eng., vol. 28, no. 4, pp. 469–482, 2004. exoskeletons for the elderly or paralyzed.