October 2000 Bulletin 86.

1:7000

7000 Series UHP Control Valve

The 7000 Series UHP control valves are manufactured
by Severn Glocon for Fisher. The 7000 Series valve
was initially developed over two decades ago
specifically for installation in cryogenic and warm
service UHP (Ultra High Purity) systems for the semi
conductor industry. Because of this, the Series 7000
now benefits from extensive experience in providing
cost effective and easily maintained valves in an
industry which makes very stringent design demands
upon its suppliers. Compact installation has always
been a major consideration in these designs and
therefore Z or Angle styles are favored over large Y
pattern valve bodies. Construction materials of the
valve body are generally forged 316L stainless steel to
suit connecting pipework, while the fully machined
crevice free flowpath minimizes particle pick up and
ensures the degree of cleanliness necessary for this
sector of the Industrial Gas Market.

Features
D Smooth profile crevice free body construction

D High capacity body

D Electronic grade surface finish options

D Large choice of trim sizes

D Robust parts for trouble free service and low cost

of ownership

D Inherently characterized trims available in linear,

equal percentage and semi throttle

D Bellows designed specifically for modulating

service W8138 / IL

D Soft seat insert option for ANSI Class VI

D Various options of weld end connections

Figure 1. 7000 Series Globe Valve
D Perpendicular actuator orientation
D102761X012
Bulletin 86.1:7000
Specifications
Valve / End Connection Sizes Maximum Plug/Seat Leakage Class

12 mm (1/2 inch) to 200 mm (8 inches) ANSI/FCI 70-2 Class IV as standard

Class VI with soft seat

Design Standards Assembly

All assembly takes place in a AFS 209E certified
ASME B16-34 and design rated Clean Room using nitrogen / helium mix filtered to
0.2 microns for testing purposes

Valve Body Ratings Packaging

Class 150 to 300 Packing for shipment incorporates sealing in a clear
plastic bag with a slight positive argon/nitrogen
pressure and tagged “electronically clean”
Valve Body Configurations Valve Plug Options
Globe, Angle, and Z pattern Unbalanced top-guided
For port diameters see table 8

Body Face to Face Dimensions Sizing and Noise Reduction

Standard Contact your Fisher sales office

Actuation
Bonnet Styles Various types of actuation are available including:
J Series P Linear spring pneumatic cylinder
J Bellows (Primary Packing) J Manually operated
J Cryogenic
Instruments
A wide range of control instruments are available
Bellows including: J Positioners, J Volume Boosters,
J Solenoid valves, J Switches, J Air-filter
Designed to provide an infinite number of regulators, etc.
modulating cycles. Vacuum leak tested with helium
to 10 –8 mbar/sec Materials of Construction
The standard valve body material is 316L stainless
steel. Other materials are available upon request.
Secondary Packing
For full listing see table 1
PTFE All fabrication welds are full penetration type to
eliminate the possibility of crevices with tube to
valve body welds being made by orbital welding
Trim Options
Temperature Range
Oversize, Full Size, and Reduced Capacity
Unbalanced Contoured, Cage. –196°C to 220°C (–320°F to 428°F)
For temperatures outside this range consult your
See table 1 for materials Fisher sales office

Available Connection Styles

Inherent Trim Characteristics Tube ends, see table 8
Equal %, Linear, & Semi–throttle Options of pipe or ANSI connections

2

E0549 / IL
Figure 2. Type 7330 Angle Valve
Benefits
D Top entry servicing with direct access to plug
assembly
D Reliable leakage performance, bubble TSO (tight
shutoff) available
D X-ray options on welds
D Interchangeability between other Fisher Air
Separation products
General
The Series 7000 range of control valves were
designed specifically for applications in the
manufacture and distribution of Ultra High Purity gas /
liquid used primarily in the semiconductor industry.
They provide a cost effective, reliable and easily
maintained control valve capable of being applied in a
Bulletin 86.1:7000
E0550 / IL
Figure 3. Tapped Sensor Port
flexible manner to accommodate various approaches
to UHP pipework installations. Reliability and ease of
maintenance are essential features of any good
control valve and the quick-change plug assembly
provides for easy access to minimize any parts
replacement times.
The specially designed forged valve bodies
incorporate top guided contoured trim configuration
which provides excellent rigidity and resistance to
vibration and service wear. The valve is designed to
accommodate other options within the Fisher Air
Separation range, such as concentric cages.
Valve Body Style Options
The Series 7000 UHP control valve is available in
three body styles of Z pattern, Angle, or Inline which
utilize the same internal parts. In order to provide high
integrity material formation demanded by the
semiconductor industry the valve bodies are
manufactured from forged 316L material thus
eliminating imperfections and porosity. Compact
installation has always been a major consideration in
these designs and therefore both styles are favoured
over large Y pattern valve bodies.
3
Bulletin 86.1:7000
Table 1. Materials of Construction (1)
Part Material
Valve Body & Bonnet Forged 316L Stainless Steel (ASTM A351 CF3)
Tube Ends 316L Stainless Steel
Optional Flanged or Screwed Ends 316 Stainless Steel
Plug 316L Stainless Steel
Soft Seat PCTFE ( KEL F )
Guide (bottom) Reinforced PTFE
Guide (top) Reinforced PTFE
Bellows 316L Stainless Steel
Packing PTFE Chevrons
Packing Follower 321 Stainless Steel
Packing Flange & Bolting Stainless Steel
Actuator Yoke Retaining Rings Stainless Steel
Bonnet Studs & Nuts B 8TX / 8MX
Valve Body Gasket Spiral Wound St St / PTFE filled
1. Materials listed are standard combinations. Other materials are available upon request.

Table 2. Surface Finish Options

Options Surface Finish
Standard < 63 Ra – 1.6 micron (63 microinch) all wetted parts
High Purity < 20 Ra – 0.5 micron (20 microinch) all wetted parts – no Electro Polish
Ultra High Purity < 8 Ra – 0.2 micron ( 8 microinch) all wetted parts – Full Electro Polish

Bellows Seal Bonnet Options unnecessary crevices. The guiding area of the plug
stem is highly polished and runs in a Kel F guide that
is located close to the plug head, providing the high
Standard Bonnet degree of stability necessary for good control. A wide
variety of reduced capacity plugs are also available.
This bonnet arrangement provides a positive metallic
packing seal, within the rated pressure and
temperature of the bellows material selected. It is
generally used on UHP service to ensure non ingress
of impurities into the process. An auxiliary packing box
serving as a backup seal in the unlikely event of a
Soft Seated
bellows failure is provided, together with a tapped
sensing port. The application temperature for this
design is –196_C to 220_C (–321_F to 428_F). When leakage across the seat needs to be reduced to
a minimum or be “bubble tight”, then a soft seat insert
is incorporated in the plug. The material used for the
seal is Kel F, due to its low shedding characteristics,
Extended Bonnet while all the other components remain in 316L
The extended bonnet is available in various lengths to stainless steel.
enable the valve to be installed in insulated pipework
or a cold box. The bellows retains any cryogenic liquid
in the body of the valve which protects the auxiliary
packing from coming into contact with it.
Low Noise

For applications involving venting / depressurizing etc

a multihole low noise cage can be installed to reduce
Trim Options Available valve emitted noise by as much as 15 dbA. It is
assumed that this valve is normally located at the
border of a high purity area. Therefore a lesser
Standard
standard of finish downstream can be tolerated
Standard UHP trim consists of a top guided plug & together with the need for alternative end connections
integral seat machined in the valve body, thus avoiding such as flanged or screwed.

4
 Bulletin 86.1:7000
Table 3. Roughness (1)
Roughness Numbers Comparison
Nominal Micrometer 50 25 12.5 6.3 3.2 1.6 0.8 0.4 0.2 0.1 0.05 0.025
Value
Ra Microinch 2000 1000 500 250 125 63 32 16 8 4 2 1
Roughness Number N12 N11 N10 N9 N8 N7 N6 N5 N4 N3 N2 N1
Roughness Average Ra by Common Production Methods
Electrolytic grinding
Roller burnishing
Grinding
Honing
Electro polish
Polishing
Lapping
Superfinishing
1. Shading represents tolerance bands.

Cv Values

Flow Coefficient Cv
Values, by definition, are related to the flow of water
(SG=1) through the valve at full lift in gallons per
minute with a pressure drop of 1lb/in2.

Table 4. Flow Coefficient Cv

VALVE SIZE AVAILABLE TRIM Cv(1)
mm Inch Full and Reduced Oversized
12 1/2 0.5 2.5 4
20 3/4 2.5 4 9
25 1 6 9 12 25
40 1.5 9 12 25 46
50 2 12 25 46 110
80 3 25 46 110 200
100 4 75 135 200 400
150 6 200 275 440 650
200 8 275 440 650 NA
1. All Cvs are available either as contoured or 1CC.

Actuator selection
Table 5. Series P Actuators — Cylinder and Stem Size Details for Valve (Standard Configurations)
EFFECTIVE AREA OF MAXIMUM
ACTUATOR DIMENSIONS STEM DIMENSIONS
VALVE CYLINDERS VOLUME
SIZE Lower Area
Stroke Diameter Upper Area Stem Diameter Stem Area cm2 Over Piston
Model cm2
Inches mm Inch mm Inch cm2 Inch2 cm2 Inch2 cm Inch cm2 Inch2 cm3 Inch3
1/2 to 1 A 20 0.787 152 6 182 28.2 179 27.7 1.9 0.748 2.8 0.43 1.721 0.105
1-1/2 B 40 1.57 203 8 325 50.4 316 49 3.17 1.25 7.7 1.19 4834 295
2 B 40 1.57 203 8 325 50.4 316 49 3.17 1.25 7.7 1.19 4834 295
3 C 63 2.48 305 12 729 113 718 111.3 3.81 1.5 11.6 1.80 15,239 930
4 C 63 2.48 305 12 729 113 718 111.3 3.81 1.5 11.6 1.80 15,239 930
6 C 63 2.48 305 12 729 113 718 111.3 3.81 1.5 11.6 1.80 15,239 930
8 C 63 2.48 305 12 729 113 718 111.3 3.81 1.5 11.6 1.80 15,239 930

5
Bulletin 86.1:7000
Table 6. Maximum Available Seating Thrust, lbf
SUPPLY ACTUATOR SIZE ACTUATOR SIZE
PRESSURE, Standard Spring—Air Fail Close Standard Spring—Air Fail Open
psig(1) A B C A B C
40 1428 2780 5550 663 1387 1987
60 1985 3270 7780 1220 2367 4305
80 2540 4250 10000 1776 3348 6432
100 3098 5230 12230 2333 4329 8659
150 4490 7680 17800 3724 6780 14226
1. The air pressure is applied above the piston in each case.

Table 7. Weights (1)

VALVE SIZE, INCHES 1/2 to 1 1.5 2 3 4 6 8
WEIGHT kg 45 48 52 90 120 184 343
(STANDARD) lbs 100 106 114 200 266 408 754
WEIGHT kg 50 53 57 100 133 201 377
(OPTIONAL) lbs 110 117 125 220 293 443 829
1. Weights apply to valve, actuator, positioner, and airset.

Table 8. Tube End Dimensions

NOMINAL PORT DIAMETER OD x THICKNESS
Inches mm Inches
1/2 6.35 x 0.91 0.0250 x 0.035
3/8 9.53 x 0.91 0.0375 x 0.035
1/2 12.7 x 1.24 0.500 x 0.049
3/4 19.05 x 1.24 0.75 x 0.049
1 25.40 x 1.65 1 x 0.065
1-1/2 38.10 x 1.65 1.50 x 0.065
2 50 80 x 1.65 2 x 0.065
3 76.10 x 1.65 3 x 0.065
4 101.60 x 2.03 4 x 0.080
6 152.40 x 2.03 6 x 0.080
8 Consult your Fisher sales office.

Table 9. Model Numbering for Series 7000 Valve

Product Family Construction Style Pressure Group
7 3 Barstock 1 Globe 1 ANSI 150
5 Forged 3 Angle 2 ANSI 300
5 Z Pattern
Product Type Action(1) Size Accessories
M Manual Handwheel 0 Manual Operation A 25 square inches H Side Mounted
P Pneumatic Cylinder 1 Modulating (AFO) B 50 square inches T Top Mounted
2 Modulating (AFC) C 100 square inches J Top Mounted Jacking Screw
3 Modulating (AFS) D 200 square inches M Limit Stop – Max
5 On/Off (AFO) L Limit Stop – Min
6 On/Off (AFC)
7 On/Off (AFS)
1. AFO (air fail open), AFC (air fail close), AFS (air fail stay put)

6
 Bulletin 86.1:7000

VALVE G
A B C D E F H
SIZE Cold Warm
mm Inch mm Inch mm Inch mm Inch mm Inch mm Inch mm Inch mm Inch mm Inch mm Inch
12.5 0.5 362 14.25 125 4.94 251 9.88 140 5.50 57 2.25 48 1.90 348 13.69 272 10.69 40 1.50
20 0.75 362 14.25 125 4.94 251 9.88 140 5.50 57 2.25 48 1.90 348 13.69 272 10.69 50 2.0
348 13.69 272 10.69
25 1 362 14 25
14.25 125 4 94
4.94 251 9 88
9.88 140 5 50
5.50 57 2 25
2.25 48 1 90
1.90 50 20
2.0
mm Inch
40 1.5 403 15.88 150 5.88 298 11.75 175 6.88 70 2.75 48 1.90 414 16.31 67 2.62
50 2 438 17.25 148 5.81 295 11.62 200 7.88 89 3.50 48 1.90 454 17.88 40 3.0
80 3 --- --- 208 8.19 416 16.38 241 9.50 108 4.25 89 3.50 610 24.00 100 4.0
100 4 --- --- 273 10.75 546 21.50 308 12.12 133 5.25 89 3.50 629 24.75 127 5.0
150 6 --- --- 311 12.25 622 24.50 362 14.25 197 7.75 89 3.50 689 27.12 --- ---

F DIAMETER

G
G
G

E
D

A B C

NOTE: ALL F/F DIMENSIONS INCLUDE STANDARD STUB LENGTH

FOR COLD BOX INSTALLATION, ’G’ DIMENSION CAN BE CUSTOMER SPECIFIED
E0551 / IL

Figure 4. Dimensions

7
Bulletin 86.1:7000
Key Description

1 Valve Body
15
2 Studs
14 3 Nuts
13
4 Washers
5 Bonnet
10
6* Gasket
7* Upper Guide
8* Packing
8
12 9* Lower Guide
10* Packing Follower
7 11 Port Plug
11 12 Anti Rotation Key
13 Packing Flange
14 Packing Bolts
15 Packing Nuts
5
16 Bellow Seal
17 Stem Guide Retainer
18 Plug Stem
20 Plug Assembly
18

4
16
3

1 6

17

20

E0552 / IL

Figure 5. Type 7350 Z Pattern Globe Valve

*Recommended spare parts

FIELDVUE, Fisher and Fisher-Rosemount are marks owned by Fisher Controls International, Inc. or Fisher-Rosemount Systems, Inc.
All other marks are the property of their respective owners.
EFisher Controls International, Inc. 2000; All Rights Reserved

The contents of this publication are presented for informational purposes only, and while every effort has been made to ensure their accuracy, they are not to be construed as warranties or guarantees, express
or implied, regarding the products or services described herein or their use or applicability. We reserve the right to modify or improve the designs or specifications of such products at any time without notice.

For information, contact Fisher:

Marshalltown, Iowa 50158 USA
Cernay 68700 France
Sao Paulo 05424 Brazil
Singapore 128461

8
Printed in U.S.A.