Professional Documents
Culture Documents
8.82 (Fei-Sem) FEI Nova NanoSEM 650 Scanning Electron Microscope
8.82 (Fei-Sem) FEI Nova NanoSEM 650 Scanning Electron Microscope
82
FEI Nova NanoSEM 650
Scanning Electron Microscope
(fei-sem) (SDH 131)
1.0 Equipment Purpose
1.1 The FEI Nova NanoSEM 650 Scanning Electron Microscope is a high
resolution microscope capable of resolving 1.4 nm features on samples
ranging in size from small pieces to 6-inch wafers. It has a number of
advanced detectors that can image highly charging samples.
2.3 Magnetic samples must have staff approval before use. These samples need
special mounting to prevent them from getting pulled up into the column.
2.4 Carbon / copper / aluminum tapes, pastes, and paints are not allowed in the
chamber. Under special circumstances you may request staff approval for
the use of non-mechanical sample mounting.
3.0 Training Procedure & Applicable Documents
3.1 Specialty Tool
3.1.1 This tool is a Radiation Producing Machine. In order to fully comply
with all campus and state regulations regarding radiation producing
machines, you are required to read the Standard Operating Procedure
(SOP) associated with this tool.
3.2 FEI Microscope Systems Safety Manual
3.3 FEI-SEM Instruction Manual located in 131 of Sutardja Dai Hall.
3.4 http://www.fei.com/resources/
3.5 An Introduction to Electron Microscopy at http://www.fei.com/introduction-to-
electron-microscopy/
3.6 ProSEM automated measurement software is available in the gowning room
for offline analysis of your SEM images.
5.4.6 Always wear booties to cover your shoes prior to entering room 131.
5.4.7 Use caution closing the chamber door. Close the door slowly and
keep body parts clear of this pinch point.
5.4.8 Beware of electrical shock hazard, especially high voltage in the SEM
column and adjoining power supply.
5.5.4.4 Make sure the white Teflon isolation plate is installed so that
the stage is protected from shorting during stage bias imaging.
5.5.9.3 This method does not account for tilt and clearance between
the sample/sample holder/stage and locations higher up on
the column. Extreme care must be taken to ensure the
highest point of your sample does not contact the pole piece,
even at large working distances. At all times, you must keep
your working distance greater than 5 mm.
7.2.5 Always ensure that the UHR (Immersion, Mode 2) lens is switch OFF
before plasma cleaning.
Direct Working
Adjustment Pages
Quad 2 Quad 1
Live Chamber
NavCam Video Quad
Quad
Figure 4A Figure 4B
Figure 5A
Torque Wrench
Cross Screw
Thrust
Washer
Cylinder
Slip
Washer Figure 5B
Slip
Washer
The small slip washer fits inside the hole of the larger Teflon plate.
12.0 Appendices
APPENDIX A
FEI Detector Mode Schematics
APPENDIX B
Useful Keyboard Shortcuts
ESC – Immediately stops all stage motors
+/- – Increase / decrease magnification
F2 – Instantly takes a photo or snapshot based on parameters set in Preferences
F3 – Pop-up linear signal for contrast and brightness adjustments
F4 – Instantly takes a photo or snapshot based on parameters set in Preferences
F5 – Makes selected quad window full screen view
F6 – Stop / start, pause / unpause
F7 – Jumps to small screen view for higher refresh rates during focus and stig
adjustments
F12 – Enables stage rotation
APPENDIX C
Useful Preference Settings
Lower stage when venting – Full Down
Blank beam during long moves – No
APPENDIX D
Comparison of Imaging Modes
APPENDIX E
Pump Oil Compatibility
The following is adapted from the SPI (electron microscope supplies) web site
(http://www.2spi.com/catalog/vac/santovac-5.shtml)
Santovac (pump oil) fluids are known for their low backstreaming characteristics, which
is especially important for electron microscope applications. This is the reason why it is
so highly used not only in analytical laboratory instrumentation but also in production
electronics applications. However, since the product is a hydrocarbon fluid, the
molecular species from the fluid, in the presence of the ionizing radiation from the
electron beam, will cause polymerization, contributing to the overall contamination of the
column.
For many users of electron microscopes, another alternative would be to use one of the
perfluorocarbon based diffusion pump fluids, such as Fomblin® or Krytox®. While all
diffusion pump fluids do have some low level of molecular species in the microscope
column, the perfluorinated polyether species do not get polymerized in the presence of
the ionizing radiation as is the case for hydrocarbon pump fluids. The end result of this
advantage is that the column runs cleaner, longer and whatever contamination in the
column that might otherwise be present is present but at much lower levels. Putting it
another way, microscope downtime is greatly reduced since the column runs much
cleaner for much longer periods of time.
Upon rare occasion when mechanical mounting of samples is not sufficient, pump oil
may be used (only with prior permission from staff). Fomblin, Krytox or other
perfluorinated ethers are acceptable for sample mounting, however no hydrocarbon
based oils are allowed.