SMC Product Overview Deel I

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with Constant Supply of High Quality and Innovative Products
Our most popular European products can now be chosen from our extensive component range
OV-01B-UK
Index
(Select product according to
features and family series) 1
Air Preparation
2
Sensors, Switches, Instrumentation
3
Solenoid Valves
4
Manually, mechanically, pneumatically
operated directional valves
5
Check and Flow Control Valves
6
Linear Actuators
7
Electrical Actuators
8
Rotary Actuators
9
Grippers
10
Auto Switches for Pneumatic Actuators
11
Vacuum
This catalogue contains only limited 12

product information. If you require any
additional options or technical details, Fittings and Tubing
please refer to our individual
product catalogues, our product
Others
information on CD, our web page:

www.smc.eu or by contacting your Others, catalogue and web site
nearest SMC office.
information,
1
2
Air Preparation
Air Preparation
1
1
Air Preparation
This catalogue contains only limited product information. If you require any additional options or technical details, please refer to our individual
product catalogues, our product information on CD, our web page: www.smc.eu or by contacting your nearest SMC office.
3
Air Preparation
Modular F.R.L. Unit
Series AC
Reduction Improved visibility
for lubricant drip
1 with graduation for
lubricant control.
New
Graduation
Air Preparation
Space-saving design
The use of a compact spacer with bracket
reduces the total assembly space. 5
6 4
SMC
Old
Model Reduction
2
9 1
New Old (mm)

AC10 AC1000 4
AC20 AC2000 14
AC25 AC2500 14
AC30 AC3000 14 Spacer with
AC40 AC4000 18 bracket
AC40-06 AC4000-06 18
AC50 AC5000 18
AC55 AC5500 18
AC60 AC6000 18
Embedded
pressure gauge
is a standard feature.
Ozone resistant rubber

material (HNBR)
Improved relief sensitivity
Float type auto drain with
excellent operability is used for
compact models (AF10, 20). Improved installation
Drain cock is easy-to-use rotary Bracket with spacer
Retainer
type.
Knob cover
Prevents careless adjustment
of the pressure setting.
Lock cover
Lever pin
q Attach the component into the fitting of the

Keyhole dia.: ø8 spacer with bracket.
w Lock the lever pin into the retainer.
(temporary installation)
Lock (supplied by customer) Bolt
Part no. Model

AC20/AR20/AR20K/AW20,
AR20P-580AS
AW20K/AWM20/AWD20
AR25P-580AS AC25/AR25/AR25K
AC30/AR30/AR30K/AW30,
AR30P-580AS
AW30K/AWM30/AWD30
AC40(-06)/AR40(-06)/
AR40P-580AS AR40K(-06)/AW40(-06)/
AW40K(-06)/AWM40/AWD40
e Tighten the bolt.
4
Air Preparation
Modular System
Air Filter+Regulator+Lubricator Part number 1) Port Size

Set pressure Drain
Filtration Circuit Symbols
range MPa type
Series AC AC10-M5 M5 0.05 to 0.7 1
AC20-F01
AC20-F02
G1/8
G1/4
1
AC30-F02 G1/4 5 µm
Air Preparation
Manual (optional: 2,
AC30-F03 G3/8 discharge 10, 20, 40,
AC40-F03 G3/8 0.05 to 0.85 1)
AC40-F04 G1/2 70, 100 µm)
AC40-F06 G3/4
AC50-F06 G3/4
AC60-F10 G1
1) Add sufiix D at the end of reference for automatic drain (Normaly Open), only for size 30 or more
• Optimal stacking manifold for use as 2) Add sufiix E at the end of reference for square gauge added.
3) Add sufiix G at the end of reference for round gauge added.
single device, and for different device
combinations.
• Standard sizes with port M5 to
G1/2 (G 3/4 and G1).
• Bowl protection from size 30 standard.
• Filter with optional manual or
automatic drain.
• Wide range of accessories for
custom variants.
• 3 bowl materials for different types of use
(polycarbonate, nylon, metal).
• Superior flow capacity with compact
dimensions.
• Temperature range -5 to 60°.
Filter Regulator+Lubricator Part number 1) Port Size

Set pressure Drain
range MPa type
Series AC AC10A-M5 M5 0.05 to 0.7
AC20A-F01 G1/8
AC20A-F02 G1/4
5 µm
AC30A-F02 G1/4 Manual
(optional: 2,
AC30A-F03 G3/8 0.05 to 0.85 discharge
10, 20, 40,
AC40A-F03 G3/8 1)
70, 100 µm)
AC40A-F04 G1/2
AC40A-F06 G3/4
AC60A-F10 G1
2) Add sufiix E at the end of reference for square gauge added.
• Simple assembly system for stacking the 3) Add sufiix G at the end of reference for round gauge added.
various parts and accessories.

• Wide range of accessories for
custom variants.
• Temperature range -5 to 60° C.
• Filter regulator with optional manual or
automatic drain.
• Vertical mounting position.
5
Air Preparation
Modular System
Filter * Part number Port Size

Bowl capacity Drain
(cm3) type
1 Series AF AF10-M5 M5 2,5
AF20-F01 G1/8 8
AF20-F02 G1/4 8
AF30-F02 G1/4 25 5 µm
Air Preparation
G3/8 * Manual (Option: 2,

AF30-F03 25
G3/8 discharge 10, 20, 40,
AF40-F03 45
AF40-F04 G1/2 45 70, 100 µm)
AF40-F06 G3/4 45
AF50-F06 G3/4 45
AF60-F10 G1 45
* Add sufiix D at the end of reference for automatic drain (Normaly Open), only for size 30 or more
• In stacking manifold or as single device.
• Filtration degree 5 µm.
• Optional manual or automatic drain. Bracket assembly
Series 20 Series 30 Series 40 Series 40-F06 Series 50•60
• Filter cartridge element can be AF20P-050AS AF30P-050AS AF40P-050AS AF40P-070AS AF50P-050AS
changed quickly.
Mist Separator Part number * Port Size Oil mist Drain Filtration Circuit Symbols
density type
Series AFM AFM20-F01 G1/8
AFM20-F02 G1/4 Max.1.0 *
AFM30-F02 G1/4 mg/m3 Manual
AFM30-F03 G3/8 0.3 µm
(ANR) discharge
AFM40-F04 G1/2
AFM40-F06 G3/4
Bracket assembly
• In stacking manifold or as single Series 20 Series 30 Series 40 Series 40-F06
device 99.9% of oil mist removal. AF20P-050AS AF30P-050AS AF40P-050AS AF40P-070AS
• Filtration degree 0.3 µm.
• Filter cartridge element can be
changed quickly.
Micro-Mist Separator Part number * Port Size Oil mist Drain Filtration
Circuit
Symbols
Series AFD AFD20-F01 G1/8
density type
AFD20-F02 G1/4 *
Max.0.1
AFD30-F02 G1/4 Manual 0.3 µm
mg/m3
AFD30-F03 G3/8
(ANR) discharge
AFD40-F04 G1/2
AFD40-F06 G3/4
Bracket assembly
• 99.9% of oil mist removal. Series 20 Series 30 Series 40 Series 40-F06
• Filtration 0.01 µm. AF20P-050AS AF30P-050AS AF40P-050AS AF40P-070AS
• Filter cartridge element can be
changed quickly.
6
Air Preparation
Modular System
Port size Set pressure
Regulator Part number Port Size
gauge range MPa
Circuit Symbols
Series AR AR10-M5 M5 Rc1/16 0.05 to 0.7

1
AR20-F01 G1/8
AR20-F02
AR30-F03
G1/4
G3/8
G1/8 1
Air Preparation
AR40-F04 G1/2 0.05 to 0.85
AR40-F06 G3/4
G1/4
AR50-F06 G3/4
AR60-F10 G1
1) Add sufiix D at the end of reference for automatic drain (Normaly Open),only for size 30 or more
Air regulator for 0.02 ~ 0.2 MPa

• In stacking manifold or as single device. Pressure Set pressure
• Piston-type regulator (AR10) or diaphragm Part number Port Size Gauge
Port Size range MPa
regulator (AR20-60), relieving type.
AR10-M5-1 M5 Rc1/16
• Panel mounting possible.
AR20-F01-1 G1/8
• Temperature range -5 to 60° C. AR20-F02-1 G1/4 G1/8 0.02 to 0.2
AR30-F03-1 G3/8
AR40-F04-1 G1/2 G1/4
Regulador de precisión de acción directa
Pressure Set pressure
Part number Port Size Gauge Sensitivity
Port Size range MPa
ARP20-F02 G1/4 G1/8
0.005~0.4 Within
ARP30-F03 G3/8 G1/8
0.2% F.S.
ARP40-F04 G1/2 G1/8
Regulator with Built-in
Check Valve Pressure Set pressure
Part number Port Size Gauge Circuit Symbols
Series ARK Port Size range MPa
AR10-M5 M5 Rc1/16 0.05 to 0.7
AR20K-F01 G1/8
AR20K-F02 G1/4 G1/8
AR30K-F02 G1/4 0.05 to 0.85
AR30K-F03 G3/8
AR40K-F03 G3/8
AR40K-F04 G1/2 G1/4

Bracket assembly
• Piston-type or diaphragm regulator,
Series 10 Series 20 Series 25 Series 30 Series 40 Series 50•60
relieving type.
• Dual pressure control for cylinder AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR50P-270AS
easily achieved.
Filter Regulator Pressure Set pressure Drain

Part number 1) Port Size Gauge Filtration Circuit Symbols
Series AW Port Size range MPa type
AW10-M5 M5 Rc1/16 0.05 to 0.7
AW20-F01 G1/8
AW20-F02 G1/4 G1/8
AW30-F02 G1/4 5 µm (Op-
AW30-F03 G3/8 Manual
tion: 2, 10,
AW40-F02 G1/4 0.05 to 0.85 discharge
20, 40, 70,
AW40-F03 G3/8 1)
100 µm
AW40-F04 G1/2 G1/4
AW40-F06 G3/4
AW60-F06 G3/4
AW60-F10 G1
• Piston-type or diaphragm regulator, 2) Add sufiix E at the end of reference for square gauge added.
relieving type. 3) Add sufiix G at the end of reference for round gauge added.
• Standard filtration degree 5 µm. Bracket assembly
• Temperature range -5 to 60° C. Series 10 Series 20 Series 30 Series 40 Series 60
• Filter cartridge can be changed quickly. AR10P-270AS AW20P-270AS AR30P-270AS AR40P-270AS AR60P-270AS
7
Air Preparation
Modular System
Lubricator Part number Port Size

Bowl capacity Recommended Circuit Symbols
(cm3) lubricant
1 Series AL AL10-M5 M5 7
AL20-F01 G1/8 25
AL20-F02 G1/4 25
AL30-F02 G1/4 55
Air Preparation
Class 1
AL30-F03 G3/8 55 Turbine oil
AL40-F03 G3/8 135 ISO VG32
AL40-F04 G1/2 135
AL40-F06 G3/4 135
AL50-F06 G3/4 135
AL60-F10 G1 135
• To be used as stacking manifold or as Bracket assembly

single device. Series 20 Series 30 Series 40 Series 40-F06 Series 50•60
• Bowl protection from body size 30. AF30P-050AS AF40P-050AS AF40P-070AS AF50P-050AS
AF20-050AS
• Lubricator adjustable with visual inspection.
• Refillable under pressure from body size 30.
Regulator with Built-in Pressure Part number Port Size

Set pressure
Circuit Symbols
Gauge range MPa
Filter Regulator with Built-in AG20-F01G1H

* G 1/8 ARG
AG20-F02G1H G 1/4
Pressure Gauge *
AG30-F02G1H G 1/4
*
Series ARG/AWG AG30-F03G1H
*
AG40-F03G1H
*
G 3/8
G 3/8
0.05 to 0.85
AWG
AG40-F04G1H
* G 1/2

* R: Regulator with Built-in Pressure Gauge

* W: Filter Regulator with Built-in Pressure Gauge
Bracket assembly
Series 20 Series 30 Series 40
ARG20P-270AS ARG30P-270AS ARG40P-270AS
• Visibility of pressure gauge is improved in
various installation places.
• Space saving, Labour saving: Panel-cut for
pressure gauge is not necessary.
• Installation and removal of pressure gauge
cover is possible with one-touch.
• Pressure gauge anti-revolving mechanism.
Digital Pressure Switch Pressure Switch Power supply

Part number
Series ISE35 range (MPa) output voltage
PNP open collector

ISE35- * -65-L ** 0 to 1 12 to 24 VDC
1 output
* N = Wiring botton entry

R = Wiring top entry Digital Pressure Switch Details
** Option Lock pin

A = With accessories (AR/AW series)
B = With accessories (ARM10/11 series) M3 x 7
(Screw for aluminum materials)
Digital pressure switch

(Body only )
• Built-in pressure switch for AR/AW/ARM

and AC series. Adaptor O-ring
• Switch replaceable. Example)
Regulator Wiring
• 2 Colour display. bottom entry
O-ring
• CE marking.
• Enclosure: IP40. Wiring top entry
8
Air Preparation
Modular System
Attachments
Spacer Spacer with Bracket Cross Interface
• Pipings are possible in all 4 directions.
1
1
Air Preparation
TYPE TYPE TYPE
TYPE
Y00 Y0 Y00T Applicable
Y0T
Model Port size model
Model Model Applicable Model Model Applicable
type Y00T type Y0T model type Y00T type Y0T model Y14-M5 M5 10
Y24-F01 G1/8 20
Y100 Y10 10 Y100T Y10T 10 Y24-F02 G1/4 20
Y200 Y20 20 Y200T Y20T 20 Y34-F01 G1/8 30
Y300 Y30 30 Y300T Y30T 30 Y34-F02 G1/4 30
Y400 Y40 40 Y400T Y40T 40 Y44-F02 G1/4 40
Y500 Y50 40-F06 Y500T Y50T 40-F06 Y44-F03 G3/8 40
Y600 Y60 50•60 Y600T Y60T 50•60 Y54-F03 G3/8 40-F06
Y54-F04 G1/2 40-F06
T-interface Piping Adapter
Check Valve
• Using a T-interface facilitates the • A pipind adapter allows installation/removal
• A check valve with intermediate air release
redirection of air flow. of the component wthout removing the
port can be easily installed to prevent a back
piping and thus makes maintenance easier.
flow of lubricant when redirecting the air flow
and releasing the air on the outlet side of the
regulator.
Applicable
Model Port size
model
Applicable E100-M5 M5 10
Model Port size E200-F01 G1/8 20 Applicable
model Model Port size
E200-F02 G1/4 20 model
Y110-M5 M5 10 E300-F02 G1/4 30
Y210-F01 G1/8 20 AKM2000-F01 G1/8 20
E300-F03 G3/8 30
Y210-F02 G1/4 20 AKM2000-F02 G1/4 20
E400-F04 G1/2 40
Y310-F02 G1/4 30 AKM3000-F02 G1/4 30
E400-F06 G3/4 40
Y410-F03 G3/8 40 AKM4000-F03 G3/8 40
E500-F06 G3/4 40-F06
Y510-F03 G3/8 40-F06 E600-F06 G3/4 50•60
Y610-F04 G1/2 50•60 E600-F10 G1 50•60
9
Air Preparation
Modular System
Pressure Switch Part Port Applicable

size
1 Series IS1000M/E number*
IS1000E-20F01-X215 G1/8
model
AC20
M:
IS1000E-20F02-X215 G1/4 AR20, AW20
• For assembly between two devices IS1000E-20F03-X215 G3/8 AWM20, AWD20
(not possible directly behind AV and AW). IS1000E-30F02-X215 G1/4 AC25, AC30
Air Preparation
E: IS1000E-30F03-X215 G3/8 AR25, AR30, AW30

• For assembly at the end of a IS1000E-30F04-X215 G1/2 AWM30, AWD30
maintenance unit. IS1000E-40F02-X215 G1/4
AC40
• Available for body sizes 20-60. IS1000E-40F03-X215 G3/8
AR40, AW40
• 0.7 MPa max. operating pressure. IS1000E-40F04-X215 G1/2 Type
AWM40, AWD40
IS1000E-40F06-X215 G3/4
• Function: N.O. E
Set pressure range: 0.1~0.6MPa
• Power consumption 2W/VA.
• Temperature range –5 to 60° C.
Pressure switch Part Applicable

number* model
IS1000M-20-X215 AC20
IS1000M-30-X215 AC25, AC30
IS1000M-40-X215 AC40
IS1000M-50-X215 AC40-06
IS1000M-60-X215 AC50, AC55, AC60
Set pressure range: 0.1~0.6MPa
Type
M
Standard
3 Port Manually Operated Part number Port Size
Port Size Effective flow (l/min) Adequate
Exhaust P→A (A→R) for series
Finger Valve
VHS20-F01 G1/8 G1/8 551 (600) 20
Series VHS VHS20-F02 G1/4 G1/8 767 (876) 20
• To be used as stacking manifold VHS30-F03 G3/8 G1/4 1692 (1584) 30
or as single device. VHS40-F04 G1/2 G3/8 3119 (2785) 40-F04
• Used to bleed the entire compressed VHS50-F06 G3/4 G1/2 4472 (4078) 50•60
air circuit.
• Can be upgraded with a silencer.
3 port manually operated finger valve for

residual pressure evacuation
10
Air Preparation
Modular System
Soft Start-up Valve Part number. Voltage Port Size

Flow (l/min) Adequate
1P→2A (2A→3R) for series
Series AV With solenoid valve 1
EAV2000-F02-4YZ-Q 220V AC
EAV2000-F02-5YZ-Q 24V DC
G1/4 1170 (1365) 20 1
EAV3000-F03-4YZ-Q 220V AC 30
G3/8 2165 (2840)
Air Preparation
EAV4000-F04-4YZ-Q 220V AC 40-F04
G1/2 3545 (4415)
EAV5000-F06-4YZ-Q 220V AC
G3/4 6161 (7197)
220V AC 50, 60
EAV5000-F10-4YZ-Q
G1 6650 (7688)
• To be used as stacking manifold Air operated

or as single device. EAVA2000-F02 — G1/4 1170 (1365) 20
EAVA3000-F03 — G3/8 2165 (2840) 30
• Safety feature, rapid bleeding of the
EAVA4000-F04 — G1/2 3545 (4415) 40-F04
operating pressure in the control
system when switching on.
• Pilot available, either pneumatic
or with solenoid valve.
• Flow characteristics can be set
using a needle valve for throttling.
Condensate Discharge Valve Part number. Port Size Port Size Condensate quantity
Drain
Series EAD402 EAD402-F02 G 1/4
EAD402-F03 G 3/8 G 3/8” 30 cm3
EAD402-F04 G 1/2
Types to 1.6 MPa operation pressure on request
• Nylon bowl.
• Mounting position: vertical at the
deepest point of the system
to be emptied.
• Temperature range: -5 to 60° C.
• Operating pressure range: 0.1 to 1 MPa.
Heavy Duty Auto Drain Port Size Condensate

Part number. Port Size Bracket set
Drain quantity
Series ADH4000 G 1/2 G 1/2 400 cc/min BM58
ADH4000-F04
• Suitable for dirty water drain.

• Easy manintenance.
• No need for electric power and no
waste of air.
11
Air Preparation
Refrigeration
Refrigeration Air Dryer

1 Series IDFA
• High Efficiency Heat Exchanger.
• Ozone Friendly Refrigerants.
• High performance, reliable and trouble
Air Preparation
free compressed air treatment from SMC.

• State of the art design ensuring a constant
3°C pressure dewpoint.
• Enviromentally ozone friendly 134a and
407c refrigerant gases.
• Simple control system,incorporating
easy to read avaporator gauge.
• Stainless steel heat exchanger providing
long life and low pressure drops.
• Compact design for ease of installation.
• 10mm push-in condensate drain port.
Standard Specifications
Specification IDFA3E-23 IDFA4E-23 IDFA6E-23-K IDFA8E-23-K IDF11E-23-K IDFA15E-23-K IDFA22E-23-K IDFA37E-23-K IDFA55E-23-K IDFA75E-23-K
Inlet air pressure (bar)
Ranges conditions
7 bar
Operating Rated
Inlet air temperature (°C) 35°C

Ambient temperature 25°C
Inlet air pressure (bar) 1,5~10 bar
Inlet air temperature (°C) 5~50°C
Ambient temperature 2~40°C (Relative Humidity of 85% or less)
Air inlet/outlet port connection Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 Rc1-1/2 Rc2
Drain connection (mm) 10
Electri-
Power source AC230V (50Hz)

Spec.
cal
Rated current (A) 1.2 1.2 1.2 1.4 2.7 3.0 4.3 4.3 5.4 7.9
Refrigerant HFC134a HFC407c
Height (mm) 470 495 495 565 565 578 623 623 800 900
Dimen-
sions
Width (mm) 266 270 270 270 270 300 290 290 470 470
Depth (mm) 390 435 435 465 465 603 775 855 855 855
Weight (kg) 18 22 23 27 28 46 54 62 100 116
Flow Table
3°C 7°C 10°C 3°C 7°C 10°C
Model
l/min m3/hr
IDFA3E-23 200 250 280 12 15 17
IDFA4E-23 400 510 560 24 31 34
IDFA6E-23-K 600 765 840 36 46 50
IDFA8E-23-K 1080 1375 1515 65 83 91
IDFA11E-23-K 1330 1690 1865 80 101 112
IDFA15E-23-K 2000 2540 2800 120 152 168
IDFA22E-23-K 3030 3850 4235 182 231 254
IDFA37E-23-K 4550 5780 6360 273 347 382
IDFA55E-23 6500 7200 8500 390 432 510
IDFA75E-23 11000 12000 13700 660 720 822
12
Air Preparation
Filtration
Water Separator Part number Port Size

Max. flow Suitable compressor Spare filter
(l/min) capacity in Kw element
Series AMG AMG150C-F01C G1/8 300 2,2 AMG-EL150 1
AMG250C-F02D
AMG350C-F03D
G1/4
G3/8
750
1500
5,5
11
AMG-EL250
AMG-EL350
1
AMG350C-F04D G1/2 1500 11 AMG-EL350
Air Preparation
AMG450C-F04D G1/2 2200 15 AMG-EL450
AMG550C-F06D G3/4 3500 22 AMG-EL550
AMG650-F10D G1 6000 37 AMG-EL650
AMG650-F14D G1 1/2 6000 37 AMG-EL650
AMG850-F20D G2 12000 75 AMG-EL850
Bracket assembly
• Water separation rate 99% .
150 250 350 450 550 650 850
• Standard automatic drain.
• Lower pressure drop. BM51 BM52 BM53 BM54 BM55 BM56 BM57
• Operating pressure range 0.15 to 1.0MPa.
• Device is self-cleaning and thus
maintenance-free.
Series AMG
Membrane Air Dryer Port Size Purge Flow on the Suitable

for series Max. attainable
Part number
G
Series IDG air outlet side AFM/AFD dew point
IDG1-F02 1/4 2.5 l/min 10 l/min –

IDG3-F01 1/8 6 l/min 25 l/min
20
IDG5-F01 1/8 12 l/min 50 l/min
IDG10-F02 1/4 25 l/min 100 l/min
30
IDG20-F02 1/4 50 l/min 200 l/min -20°C
IDG30-F03 3/8 75 l/min 300 l/min
40
IDG50-F03 3/8 125 l/min 500 l/min
IDG60-F03 3/8 125 l/min 600 l/min
IDG75-F04 1/2 150 l/min 750 l/min –
IDG100-F04 1/2 190 l/min 1000 l/min
• Functions on water-permeable IDG3H-F01 1/8 3 l/min 25 l/min 20
membrane priciple. IDG5H-F01 1/8 6 l/min 50 l/min
• The air is exchanged in the membrane IDG10H-F02 1/4 11 l/min 100 l/min
30
IDG20H-F02 1/4 22 l/min 200 l/min -15°C
and the air moisture is released via the
IDG30H-F03 3/8 35 l/min 300 l/min 40
purge air directly to the atmosphere. IDG50H-F03 3/8 60 l/min 500 l/min
• As a single device or combined with IDG60H-F03 3/8 65 l/min 600 l/min
AFM mist separator and AFD micro mist IDG75H-F04 1/2 80 l/min 750 l/min –
separator. IDG100H-F04 1/2 110 l/min 1000 l/min
• No external energy supply required. IDG30L-F03 3/8 25 l/min 75 l/min
• Coolant-free. IDG50L-F03 3/8 40 l/min 110 l/min
IDG60L-F03 3/8 57 l/min 170 l/min 40 -40°C
Air inlet IDG75L-F04 1/2 80 l/min 240 l/min
IDG100L-F04 1/2 100 l/min 300 l/min
IDG60S-F03 3/8 27 l/min 50 l/min
IDG75S-F04 1/2 54 l/min 100 l/min 40 -60°C
IDG100S-F04 1/2 85 l/min 150 l/min
Bracket assembly
Series IDG3,5 Series IDG10 Series IDG20 Series IDG30•50 Series IDG60•75•100
Exhaust air
BM59 BM61 BM63 BM64 BM65
Air/Gas
Dry air Water droplets
13
Air Preparation
Filtration
Air Filter
1
Series EAF800/900
*Flow
Part number. Port Size Bowl capacity
(l/min)
Air Preparation
EAF811-F14 G1 1/2 8000

180cm3
EAF911-F20 G2 15000
* at 0.7 MPa set pressure
• Superior flow capacity.

• Filtration degree 5 µm
(2, 10, 20, 40, 70, 100 µm on request).
• Temperature range 5 to 60° C.
• Automatic drain.
Main Line Filter:

Series AFF
Max. flow Max. flow
Part number. Port Size
(l/min) (m3/h)
AFF2C-F03D-T G3/8 300 18

AFF4C-F04D-T G1/2 750 45
AFF8C-F06D-T G3/4 1500 90
AFF11C-F06D-T G3/4 2200 132
AFF22C-F10D-T G1 3500 210
AFF37B-F14D-T G1 1/2 6000 360
AFF75B-F20D-T G2 12000 720
• Series AFF is mounted to main piping
to remove impurities like oil, water and
particles in compressed air.
• Fine filtration of compressed air
(3 µm filtration degree).
• Operating pressure range 0.05 to1.0 MPa.
• Automatic drain standard
(different versions possible).
• Solid construction with viewing window.
Mist Separator:
Series AM
• Fine filtration of compressed Max. flow Max. flow
air (0.3 µm filtration degree). Part number. Port Size
(l/min) (m3/h)
• Temperature range 5 to 60°C.
AM150C-F03D-T G3/8 300 18
• Operating pressure range
AM250C-F04D-T G1/2 750 45
0.05 to1.0 MPa. G3/4 1500
AM350C-F06D-T 90
• Automatic drain standard AM450C-F06D-T G3/4 2200 132
(different versions possible). AM550C-F10D-T G1 3500 210
• Solid construction with AM650-F14D-T G1 1/2 6000 360
viewing window. AM850-F20D-T G2 12000 720
Micro-Mist Separator
Series AMD
• Finest filtration of compressed Max. flow Max. flow
air (0.01 µm). Part number. Port Size
(l/min) (m3/h)
• Operating pressure range
AMD150C-F03D-T G3/8 200 12
0.05 to 1.0 MPa.
AMD250C-F04D-T G1/2 500 30
• Temperature range 5 to 60°C. AMD350C-F06D-T G3/4 1000 60
• Automatic drain standard AMD450C-F06D-T G3/4 2000 120
(different versions possible). AMD550C-F10D-T G1 3500 210
AMD650-F14D-T G1 1/2 6000 360
AMD850-F20D-T G2 12000 720
14
Air Preparation
Filtration
Micro-Mist Separator with Prefilter

Series AMH 1
Max. flow Max. flow
(l/min) (m3/h) 1
Air Preparation
AMH150C-F03D-T G3/8 200 12
AMH250C-F04D-T G1/2 500 30
AMH350C-F06D-T G3/4 1000 60
AMH450C-F06D-T G3/4 2000 120
AMH550C-F10D-T G1 3500 210
AMH650-F14D-T G1 1/2 6000 360
AMH850-F20D-T G2 12000 720
• The conventional pneumatic pressure line
AM + AMD series have been integrated to
achieve a reduction in installation space, savings
in piping installation labor, and reduced costs.
• Finest filtration of compressed air (0.01 µm)
• Operating pressure range 0.05 to 1.0 MPa.
Super Mist Separator

Series AME
Max. flow Max. flow
(l/min) (m3/h)
AME150C-F03D G3/8 200 12

AME250C-F04D G1/2 500 30
AME350C-F06D G3/4 1000 60
AME450C-F06D G3/4 2000 120
AME550C-F10D G1 3500 210
AME650-F14D G1 1/2 6000 360
AME850-F20D G2 12000 720
• Due to its special configuration, series AME
indicates the life of the filter element by a
colour change. Accordingly, the replacing time
can be judged vissually (a red colour indicates
the replacing time).
• Filtration of compressed air (0.01 µm).
• Operating pressure range 0.05 to 1.0 MPa.
Odor Removal
Series AMF
Max. flow Max. flow
(l/min) (m3/h)
AMF150C-F03D G3/8 200 12

AMF250C-F04D G1/2 500 30
AMF350C-F06D G3/4 1000 60
AMF450C-F06D G3/4 2000 120
AMF550C-F10D G1 3500 210
AMF650-F14D G1 1/2 6000 360
AMF850-F20D G2 12000 720
• Active carbon filter for filtering odours.
• Filtration degree 0.01 µm.
• 13 layers of active carbon ensure
optimum effectiveness.
• Operating pressure range 0.05 to
1.0 MPa.
15
Air Preparation
Pressure Control
Miniature Regulator Part number

Port Size Set pressure Circuit Symbol
range MPa
1 Series ARJ ARJ1020F-M5-04 M5
IN OUT
ø 4 mm tube 0.1 to 0.7
ARJ1020F-M5-06 M5 ø 6 mm tube 0.1 to 0.7
ARJ210-M5 R1/8, M5 M5 0.2 to 0.7
Air Preparation
Valve manifold for ARJ1020F

4 stations 6 stations 10 stations
ARJM10-4 ARJM10-6 ARJM10-10
• Piston-type regulator, relieving type.

• Panel mounted.
• Type ARJ1020F, can be fitted to
manifold (max. 10 pieces).
Miniature Regulator Port Size Set pressure

Part number Circuit Symbol
Series ARJ310 ARJ310-01
IN
R1/8, M5
OUT
Rc1/8
range MPa
0.2 to 0.7
ARJ310F-01-04 R1/8, M5 ø 4 mm tube 0.2 to 0.7
ARJ310F-01-06 R1/8, M5 ø 6 mm tube 0.2 to 0.7
• With either threaded or one touch fitting

at the outlet (2).
• Over double the flow capacity
compared with ARJ210.
• ARJ310-01: 500 l/min
• ARJ310F-01-04:190 l/min
• ARJ310F-01-06:415 l/min
Modular Regulator Series Type

Port Size Set pressure Accessories
range MPa
Series ARM10/11 IN OUT
Mounting bracket,
Single Push In: Push In:
ARM10 replacement fittings, panel
device 4, 6mm 4, 6mm 0.05 to 0.7
nut, pressure gauge
or
Push In: 0.05 to 0.35 3 port shut-off valve, pressure
modular
ARM11 Push In: 4, 6mm switch, replacement fittings,
on DIN-
6, 8, 10 mm extra SUP block supply,
rail
SUP blocking disc
• Available as single device or stacked

on DIN rails.
• 3 different control positions possible. Note:
• Integrated, replaceable one-touch Can only be specified from
fittings. full catalogue.
• Broad range of accessories available
(e.g.: 3 port shut-off valve, pressure switch,...).
• Flow of 150 to 300 l/min.
16
Air Preparation
Pressure Control
Pilot Operated Pressure Regulator Part number.

Port Size Port Size Circuit Symbol
0.05~0.85MPa Pressure Gauge
Series EAR EAR425-F04 G1/2 1
EAR625-F06
EAR625-F10
G3/4
G1 G1/4 1
EAR825-F14 G1 1/2
Air Preparation
EAR925-F20 G2
* at 0.7 MPa
Port Size Circuit Symbol
0.02~0.2MPa Pressure Gauge
EAR435-F04 G1/2
EAR635-F06 G3/4
• Pilot operated pressure regulator. EAR635-F10 G1 G1/4
• Superior flow capacity and EAR835-F14 G1 1/2
control precision. EAR935-F20 G2
* at 0.2 MPa
• Temperature range -5 to 60° C
• Port size to 2”.
High Precision Pressure Regulator Part no.* Set pressure Port Size Setting Repeatability Circuit Symbol
range sensitivity
Series IR1000/2000/3000 IR1000-F01 0.005~0.2MPa
IR1010-F01 0.005~0.4MPa G1/8
IR1020-F01 0.005~0.8MPa
IR2000-F02 0.005~0.2MPa
IR2010-F02 0.005~0.4MPa G1/4
IR2020-F02 0.005~0.8MPa
0.2% F.S. max. ±0.5% F.S. max.
IR3000-F03 0.01~0.2MPa
IR3010-F03 0.01~0.4MPa G3/8
IR3020-F03 0.01~0.8MPa
IR3000-F04 0.01~0.2MPa
IR3010-F04 0.01~0.4MPa G1/2
IR3020-F04 0.01~0.8MPa
• Can be stacked, modular *pneumatically operated high precision pressure regulator available on request
air preparation series.
Mounting bracket
• Can be mounted to panels.
For IR1000 For IR2000 For IR3000
• Air consumption IR10, IR20 < 4.4 l/min,
IR30 < 11.5 l/min. P36201023 P36202028 P362030-20
• Large exhaust capacity.
Regulator
up to 2.0 MPa Set Pressure
Series ARX20 Part number Set pressure range (MPa)
Max. operating pressure
Port size
(MPa)
ARX20-F01 0,05 to 0,85 G1/8
ARX21-F01 0,05 to 0,30 2,0
ARX20-F02 0,05 to 0,85 G1/4
ARX21-F02 0,05 to 0,30
Assembly materials
Mounting bracket Panel mounting nut
1348112 1348110A
• Set pressure up to 2.0 MPa.
• Compact design. 35x35x80 mm.
• Practical, 3 outlets available.
• Simple operation, ergonomic design.
• Ideal for regulating: e.g. discharge
pressure for small compressors or the
pressure in air blowing applications.
17
Air Preparation
Pressure Control
Miniature E/P Proportional Input Output Set pressure Flow

Type Part number signal signal range Port Size Nl/min
Converter
1 ITV0010-0N-Q 4 - 20 mA 0.001~0.1
Series ITV0000 3,5
as single device
ITV0010-3N-Q 0 - 10 V DC MPa
ITV0030-0N-Q 4 - 20 mA 0.001~0.5 6,0
ITV0030-3N-Q 0 - 10 V DC MPa
Air Preparation
ITV0050-0N-Q 4 - 20 mA 0.001~0.9 6,0

ITV0050-3N-Q 0 - 10 V DC MPa
ITV0090-0N-Q 4 - 20 mA -1.0 ~ 100 Push In
analog for 2,0
ITV0090-3N-Q 0 - 10 V DC KPa
ITV0010-0MN-Q 4 - 20 mA 1 - 5 VDC 0.001~0.1 ø 4 mm
for block mounting

tube 3,5
ITV0010-3MN-Q 0 - 10 V DC MPa
ITV0030-0MN-Q 4 - 20 mA 0.001~0.5 6,0
ITV0030-3MN-Q 0 - 10 V DC MPa
ITV0050-0MN-Q 4 - 20 mA 0.001~0.9 6,0
• Compact, light design, 15 mm wide, ITV0050-3MN-Q 0 - 10 V DC MPa
weights 100 g. ITV0090-0MN-Q 4 - 20 mA -1.0 ~ 100 2,0
• Can be used alone or stacked ITV0090-3MN-Q 0 - 10 V DC KPa
with DIN rails. Accessories
Lead wire straight 3 m M8-4DSX3MG4
• Integrated one-touch fittings.
Lead wire elbow 2 m ELWIKA-KV4408 PVC025 2M
• Enclosure IP65. Flat bracket P39800022
• LED fault display. U bracket P39800023
Manifold for 2 -10 IITV - *
stations * Number of stations
E/P Proportional Converter Part no.*

Input signal / Set
Port Size
Circuit
Output signal pressure range Symbol
Series ITV1000/2000/3000 ITV1010-01F2N-Q 4~20mA / analogue 1~5V DC
ITV1010-03F2N-Q 4~20mA / PNP 0.005~0.1MPa
ITV1010-31F2N-Q 0~10V DC / analogue 1~5V DC
ITV1010-33F2N-Q 0~10V DC / PNP
ITV1030-01F2N-Q 4~20mA / analogue 1~5V DC
ITV1030-03F2N-Q 4~20mA / PNP G1/4
0.005~0.5MPa
ITV1050-03F2N-Q 4~20mA / PNP 0.005~0.9 bar
• No air consumption when
pressure equalised. ITV2010-01F3N-Q 4~20mA / analogue 1~5V DC
ITV2010-03F3N-Q 4~20mA / PNP
• 2 switch outputs: analogue 0.005~0.1MPa
1-5 VDC/4-20 mA, PNP/NPN ITV2010-33F3N-Q 0~10V DC / PNP
switch output. ITV2030-01F3N-Q 4~20mA / analogue 1~5V DC
• Enclosure IP65. ITV2030-03F3N-Q 4~20mA / PNP G3/8
0.005~0.5MPa
• Compact design. ITV2030-31F3N-Q 0~10V DC / analogue 1~5V DC
• Simple control using foil keypad ITV2030-33F3N-Q 0~10V DC / PNP
and LED display. ITV2050-01F3N-Q 4~20mA / analogue 1~5V DC
ITV2050-03F3N-Q 4~20mA / PNP 0.005~0.9 bar
Connector cable with ferrite core ITV2050-31F3N-Q 0~10V DC / analogue 1~5V DC
P398010-12 straight with 3 m cable ITV2050-33F3N-Q 0~10V DC / PNP
P398010-13 elbow with 3 m cable
Attachments 4~20mA / PNP
ITV3010-03F4N-Q 0.005~0.1MPa
L foot Flat ITV3010-31F4N-Q 0~10V DC / analogue 1~5V DC
INI-398-0-6 P3020114 ITV3010-33F4N-Q 0~10V DC / PNP
ITV3030-03F4N-Q 4~20mA / PNP 0.005~0.5MPa G1/2
ITV3050-03F4N-Q 4~20mA / PNP 0.005~0.9 bar
*other styles available
18
Air Preparation
Pressure Control
Booster Regulator Part number Output range MPa

Flow
Port Size
Pressure Circuit
(l/min) ratio Symbol
Series EVBA EVBA1111-F02 0,2 - 2,0 60 max. 4 : 1 1
G1/4
EVBA1110-F02
VBA20A-F03
0,2 - 2,0
0,2 - 1,0
400
1000 G3/8 max. 2 : 1
1
VBA40A-F04 0,2 - 1,0 1900
Air Preparation
G1/2
VBA3A-F04 0,2 - 1,6 1600
Accessories
Model EVBA1000 VBA20A VBA40A
Pressure Gauge G27-20-R1 G36-10-01 G36-10-01
• Increases the main circuit pressure Silencer AN200-02 AN300-03 AN400-04
to an adjustable value.
• Major energy savings.
• No cooling required.
• Silencer means less operating noise.
• No other energy source required.
• Operating temperature: 5-50° C.
• Input pressure: 0.1-1 MPa.
• Mounting position: horizontal.
Pressure Gauge Part number Pressure range Connection Outside

MPa thread Diametre
Series G G15-10-01 0 to 1,0 R1/8, M5 (Female thread) ø15
G27-10-R1 0 to 1,0 R1/16 ø26
G36-2-01 0 to 0,2
G36-4-01 0 to 0,4
R1/8 ø37.5
G36-7-01 0 to 0,7
G36-10-01 0 to 1,0
G46-S2-01M 0 to 0,2
G46-S10-01M 0 to 0,1 R1/8
G46-S25-01M 0 to 0,2 ø42.5
G46-S2-02 0 to 0,2
R1/4
G46-S10-02 0 to 0,1
• With limit indicator. G46S2-01M-C 0 to 0,2
R1/8
G46-S10-01M-C 0 to 0,1 ø42.5
G46-S2-02M-C 0 to 0,2 (For panel mount)
R1/4
G46-S10-02M-C 0 to 0,1
19
Air Preparation
Lubrication
Large Flow Lubricator Part number. Port Size

Min. operating Bowl Recommended
flow (Nl/min) capacity lubricant
1 Series EAL800•900 EAL800-F14 G 1 1/2 650
440 cm3 ISO VG32
EAL900-F20 G2 1800
* Conditions: inlet pressure 7 bar.
Air Preparation
• Individual lubrication.
• Large flow type.
D.P. Lube Unit Part number. Port Size

Lube flow Oil mist Amount in
(Nl/min) particle size bowl
Series EALDU600-900 EALDU600-10 Rc 1 90 to 6000 2l
0.3~2 µm
EALDU900-20 Rc 2 250 to 15000 5l
D.P. Lube: Series ALD

D.P. Lube unit: Series ALDU Strainer
Series INA
Main line filter
Series AFF
Regulator Solenoid valve

Series AR Metal seal
Air cylinder
Air dryer
• Creates a quality oil mist using
adjustable differential pressure.
• Oil consumption only approx. 10%
compared to ordinary lubes. Solenoid valve
• Minimal environmental damage. Rubber seal
Air tool
Regulator
Series AR
Booster Lube Part number. Port Size

Rated flow- Oil mist Amount in
range(Nl/min) bowl
Series ALB900 IN: Rc1/4
particle size
ALB900-00-14 5000 to 60000 0.3~2 µm 5l

OUT: Rc1/2
Strainer Series AF30N60-**-X2230
Main line filter Bypass lubrication adapter

Series AFF
Solenoid valve
Ball valve
Ball valve
Regulator Metal seal

Series AR
Air cylinder
Air dryer
• No pressure loss in main flow.
• Low energy costs.
• Oil consumption only approx. 10%
compared to ordinary lubes.
Solenoid valve
• Minimal environmental damage. Booster Lube
ALB900
Rubber seal
Air tool
Regulator
Series AR
20
Air Preparation
Silencers
Plug-in Silencer Part number Circuit Symbol

For plug Flow Noise Ø x height
connector (mm2) (mm)
Series AN Ø8 14
reduction
20 dB (A) ø16 x 51 1
AN203-KM8
AN200-KM8 Ø8 20 ø22 x 78 1
AN200-KM10 Ø10 26 ø22 x 81
30 dB (A)
Air Preparation
AN300-KM10 Ø10 30 ø25 x 97
AN300-KM12 Ø12 41 ø25 x 98
• Plastic design.
Threaded Silencer Part number Circuit Symbol

Thread Effective area Noise Weight
connection mm2 (Cv) reduction
Series AN AN120-M3 M3 1 (0,05) 13 dB (A)
(g)
1
AN120-M5 M5 5 (0.27) 18 dB (A) 3,3
AN101-01 Rc(PT)1/8” 20 (1.1) 16 dB (A) 9,5
AN110-01 Rc(PT)1/8” 35 (19) 21 dB (A) 20
• For threads M3•M5•Rc(PT)1/8”.

• Made from sintered bronze.
Standard Silencer Part number Circuit Symbol

Thread Effective area Noise Weight
connection R mm2 (Cv) reduction (g)
Series AN*00 AN103-01 1/8” 10 (0.6) 1
• For threads 1/4” ~ 2”. 25 dB (A)
AN203-02 1/4” 15 (0.8) 3
• Noise reduction up to - 30 dBA, AN200-02 1/4” 35 (1.9) 17
or - 25 dBA. AN300-03 3/8” 60 (3.3) 25
• Compact design. AN400-04 1/2” 90 (5.0) 30 dB (A) 35
AN500-06 3/4” 160 (8.8) 165
AN600-10 1” 270 (15) 225
AN700-12 1 1/4” 440 (24) 490
AN800-14 1 1/2” 590 (33) 580
AN900-20 2” 960 (53) 820
21
Air Preparation
Silencers
High Noise Reduction Silencer Part number Circuit Symbol

Thread- Effective area Noise Weight
(mm2) reduction
1 Series ANA1 ANA1-01
connection (g)
R1/8” 10 4
ANA1-02 R1/4” 15 14
ANA1-03 R3/8” 35 22
Air Preparation
ANA1-04 R1/2” 60 36
ANA1-06 R3/4” 90 40 dB (A) 110
ANA1-10 R1” 160 180
ANA1-C08 Ø 8 mm 11 5
ANA1-C10 Ø 10 mm 15 13
ANA1-C12 Ø 12 mm 33 19
Series ANB1 with larger area and noise level reduction by 38 db (A) on request.
• For thread or one-touch fitting.

• Noise reduction - 40 dBA.
Exhaust Cleaner Part number Circuit Symbol

Thread Max. flow Noise Separation
connection R (l/min) reduction rate
Series AMC AMC310-03 3/8” 300
AMC510-06 3/4” 1.000
AMC610-10 1” 3.000 35 dB (A) 99,9% R.D.
AMC810-14 1 1/2” 6.000
AMC910-20 2” 10.000
Mounting bracket
Series 310 Series 510 Series 610
BE30 BE50 BE60
• Connection threads R3/8” ~ 2”.
• Combination of filter and silencer.
• Noise reduction 35 dBA.
• Filter separation rate up to 99.9 %.
• Model with female thread available
on request.
22
Sensors, Switches
23
Mechanical Style Pressure Switch Part number

Port Switch Cable Hysteresis
Voltage
thread* point MPa length (MPa)
Series IS1000 24 AC/DC or less 50 mA
IS1000-01S-X215 R1/8 0.1 ~ 0.6 3m 0,08
100V AC/DC 20mA
* standard with thread sealant
• N.O. function.
2 • Compact design (50 x 23 x 15 mm).
• Switch point easily set using screw.
• Displays the chosen
switch point.
Mechanical Style Pressure Switch Part number

Port Switching Hysteresis Min. applicable
thread point MPa load
Series IS3000 IS3000-02 Rc1/4 0.1~0.7
MPa
0.05 or less
5 VDC, 160 mA
IS3100 Gasket piping 0.1~0.7 0.05 or less
IS3010-02 Rc1/4 0.1~0.7 0.05 or less
5 VDC, 1 mA
IS3110 Gasket piping 0.1~0.7 0.05 or less
• Easy electrical wiring (wide space).

• Wide calibration range (0.1 to 0.7 MPa).
• High frequency operation and long
service life:
High frequency: 1 cycle/sec.
Long service life: 10 million cycles.
Electronic Pressure Switch Part number

Port Switching
Switch output Hysteresis Voltage
thread pressure
Series ISE2 ISE2-01-55CN-Q R1/8
MPa
0~0.97 PNP, with plug*
< 3%F.S. 12~24 V DC
ISE2-01-55L-Q R1/8 0~0.97 PNP, 3 m cable
NPN options available upon request.
ZS-10-5A-30 Cable with plug
• Small, compact design.

• Minimal switching time - 10 ms max.
• LED switch point display.
• Choose grommet type or plug.
Electronic Vacuum Switch Conection Switching

Hysteresis Voltage
Part number thread pressure KPa Switch output
Series ZSE1
ZSE1-01-55L-Q R1/8 -101 - 0 PNP, 3 m cable ~1 - 10%
12~24 V DC
ZSE1-01-55CN-Q R1/8 -101 - 0 PNP, with plug* adjustable
ZS-10-5A-30 Cable with plug
• Minimal switching times, 10 ms.

• LED switch point display.
• Grommet type or plug connection.
• Adjustable hysteresis.
• Repeatability ± 3% F.S.
24
Adjustable Vacuum and Positive Part number Switch point

Connection
Switch output Voltage
port
Pressure Switch with Display
Series ZSE30A/ISE30A ISE30A-01-P-L
ISE30A-01-E-L Positive Pressure:
PNP
PNP + (1-5 V)
–0.1~1.0MPa male: R 1/8
ISE30A-01-F-L PNP + (4-20 mA)
female: M5
ZSE30A-01-P-L ( also avai- PNP
Vacuum Pressure lable with Ø
ZSE30A-01-E-L
0 ~ –101 KPa 4 or 6 mm
PNP + (1-5 V) 12~24 V DC
2
ZSE30A-01-F-L PNP + (4-20 mA)
push-in fitting)
ZSE30AF-01-P-L PNP
Vacuum + Low Pressure

ZSE30AF-01-E-L PNP + (1-5 V)
–100 ~ +100 KPa
ZSE30AF-01-F-L PNP + (4-20 mA)
• 3 styles:
ZSE30A: vacuum pressure. Mounting accessories
ZSE30AF: compound pressure. Bracket A ZS-38-A1
ISE30A: positive pressure. Bracket B ZS-38-A2
• Enclosure IP40. Panel mount adapter ZS-27-C
• Large, easy-to-read display. Lead wire with connector cover (3 cores, for 1 output, 2 m) ZS-38-3G
• 2 colour (green/red) display. Lead wire with connector cover (4 cores, for 2 outputs, 2 m) ZS-38-4G
• Easy operation: 3-step setting and copy
display.
• Analogue output: 4 - 20 mA or 1 - 5 V.
• Switch output: 2 PNP/NPN or 1 PNP/NPN.
• With straight and elbow one-touch fittings.
Adjustable positive Pressure and Part number* Switch point Connection Switch output Voltage
Vacuum Switch with Display port
Series ZSE40•ISE40 ISE40-01-62

Male:
Positive Pressure:
(Vacuum) (Positive Pressure) R 1/8 1-5V
ISE40-01-62L -0.1~1.0MPa
Female: analogue +
M5 12~24 V DC
ZSE40F-01-62 2 x PNP
Vacuum & Low Pressure: (ø4, 6 on
ZSE40F-01-62L -100.0 ~ +100.0 KPa request)
* ZSE40* for vacuum on request

NPN option available upon request
Mounting accessories
High foot Short foot Panel adapter Panel adapter with cover
ZS-24-A ZS-24-B ZS-22-A ZS-24-C
• 3 styles:
ZSE40: vacuum,
ISE40: positive pressure ZSE40F
ZSE40F: vacuum & low pressure combination. Vacuum
• Wide range of programs and accessories. application
• Large, easy-to-read display.
• IP65 enclosure.
• Output’s: analogue & 2x NPN or PNP.
• Repeatability ± 2% F.S. ±1 digit. ISE40
• Response time 2.5 ms. max. Work piece location
monitoring
25
2-Colour Display Part number Rated pressure range Port size Piping direction Input/Output
Digital Pressure Switch
for General Fluids ISE80-02-B
R1/4”
Rear ported
ISE80-02L-B -0.1 to 1 MPa Botton ported
Series ZSE80/ISE80 ISE80-F02-B G1/4” Rear ported
PNP
ISE80H-02-B -0.1 to 2 MPa Rear ported
R1/4” open collector
ISE80H-02L-B Botton ported
ZSE80-A2-B Rear ported 2 outputs
2 ZSE80-A2L-B
0 to -101 kPa URJ1/4”
Botton ported
ZSE80F-02-B -100 to 100 kPa R1/4”
Rear ported
ZSE80F-A2-B URJ1/4”
Panel mount
Option
Front protection cover
Option Piping Part number

direction
Rear ported ZS-24-A
• 4 Rated pressure range: 0.0 to –101.0 Bracket Rear ported ZS-24-D
kPa; -100.0 to 100.0 kPa; –0.100 to Botton ported ZS-35-A
1.000 MPa; –0.100 to 2.00 MPa. Panel mount Rear ported ZS-35-C
• Stainless diaphragm (Oil-free Single- Botton ported ZS-35-B
layer diaphragm structure). Panel mount + Front Rear ported ZS-35-F
Sensor parts: Stainless steel 630 protection cover Botton ported ZS-35-E
Bracket mount
Fitting parts: Stainless steel 304.
• Choice of VCR® or Swagelok® fitting is
available.
• For use with water, hydraulic fluid,
silicon oil, lubricant, fluorocarbon, Bracket
argon, ammonia, carbon dioxide,

Bracket
Applications
Confirmation of the Confirmation of the supply Confirmation of the working Confirmation of the pressure
air-containing drainage and nitrogen. adsorption of work pressure of cleaning lines pressure of after a lubricator unit
pieces containing a hydraulic
• IP65/RoHS compliant. moisture cylinder
• Outputs: analogue (1-5 V, 4~20 mA),
1/2 x PNP/NPN
2-Colour Display Type Part number* Switch point Switch output Voltage
Digital Pressure Switch
Metal Body Type ISE70-F02-43 For Air
Fixed setting; NPN open collector 1 output (Pin no. 4) +
PNP open collector 1 output (Pin no. 2)
Series ISE70/75/75H ISE70-F02-65
-0.1~1MPa
(For Air) (For Fluids) Fixed setting; NPN open collector 1 output (Pin no. 4) +
ISE75-F02-43 For General Fluids 12~24
0.4~10MPa V DC
ISE75-F02-65 PNP open collector 1 output (Pin no. 4)
Fixed setting; NPN open collector 1 output (Pin no. 4) +
ISE75H-F02-43 For General Fluids
0.5~15MPa
ISE75H-F02-65 PNP open collector 1 output (Pin no. 4)
Mounting accessories
Bracket ZS-31-A
Lead wire with M12 connector, straight ZS-31-B
Lead wire with M12 connector, right-angled ZS-31-C
• Metal Body Type (Die-cast aluminum).

• For general fluids: For Air For General Fluids
ISE75 (10MPa); ISE75H (15MPa).
• For Air:
ISE70 (1MPa) ISE75 (10MPa) ISE75H (15MPa)
ISE70 (1MPa) MPa MPa MPa
• 2-colour Display (green and red).

• IP67 enclosure, with M12 connector. OUT1 OUT1 OUT1
UP DOWN UP DOWN UP DOWN

• Port Size: G1/4 (ISO1179). SET SET SET
Plain Grey Orange
PRESSURE SWITCH PRESSURE SWITCH PRESSURE SWITCH
26
Pressure or Vacuum Switch Part number Operating pressure Switch point Contact point Voltage
range MPa (MPa)
Series PS1000•1100 PS1000-R06L -0,1 - 0,45 Pressure ≥ Switch point: ON 12~24 V DC
-0,1 - 1,0
PS1100-R06L -0,1 - 0,40 Pressure ≤ Switch point: ON
* with 3 m cable

Suction monitoring
• LED switch point display. Pressure control on

actuator
• Miniature design.
• For mounting directly to one-touch
fittings. Pressure monitoring Sensor
• Piezo sensor gives long service life. FRL
Sensor
• Can be plugged straight into a
ø6 mm one-touch fitting. Sensor
FRL Vacuum
Controller Unit Controller Unit for 1 sensor
Series PSE200/300 Part number. Input Switch output Response time Mounting
PSE303-LC Voltage 2 x PNP +

analogue 1 to 5V
PSE304-LC Voltage 2 x PNP +

analogue 4 to 20mA * Panel
1ms
PSE313-LC Current 2 x PNP + mounting
analogue 1 to 5V
PSE314-LC Current 2 x PNP +

analogue 4 to 20mA
NPN options and auto-shift input available upon request.
• PSE200: DIN rail mounting available upon request.
- 4 channels digital pressure Including supply cable and sensor connector.
sensor controller.
- Applicable to PSE530/540/560 series. * Accessories
Bracket for PSE300 ZS-28-B
Panel mount adapter for PSE300 ZS-27-C
• PSE300:
Panel mount adapter +
- 1 channel digital pressure ZS-27-D
protective front cover for PSE300
sensor controller.
Including 4 sensor connector.
- Applicable to PSE530/540/
550/560 series. Controller Unit for 4 sensors
Part number Switch output Response time Mounting
PSE201-4C PNP
5 ms Panel mounting *
80 mA
* Accessories
Sensor cable with plug ZS-26-F
Protective cover for PSE201 ZS-26-01
Panel mounting adapter for PSE201 ZS-26-B
Sensor connector ZS-28-C
27
Vacuum and Positive Pressure Sensor Measuring sensor for compressed air
Series PSE530 Part number Connection thread Pressure range Output signal
PSE530-M5 0~1MPa
PSE531-M5 0 ~ -101 KPa Analogue 1
M5
PSE532-M5 0 ~ 101 KPa ~5V
2 PSE533-M5 -101 ~ 101 KPa
• Sensor and controller separate.

• IP40.
• Simple electr. connection using plug.
• Controller unit: PSE200/PSE300
Micro Vacuum and Pressure Sensor Compressed Air Micro Sensor
Series PSE540 Part number Connection type Pressure range Output signal
PSE541-M3 M3 male
PSE541-M5 M5 male Low Pressure
PSE541-01 male R1/8, female M5
and Vacuum:
PSE541-R04 Ø 4 mm one-touch fitting
PSE541-R06 Ø 6 mm one-touch fitting 0 ~ -101 KPa
PSE541-IM5 M5 female thread
PSE541-IM5H M5 female, with mounting holes Analogue 1 ~ 5 V
PSE543-M3 M3 male
PSE543-M5 M5 male
PSE543-01 male R1/8, female M5 Low Pressure
PSE540 PSE543-R04 Ø 4 mm one-touch fitting and Vacuum:
• 2 styles: PSE543-R06 Ø 6 mm one-touch fitting -100 ~ +100 KPa
PSE541: Vacuum pressure (0 ~ -101KPa) PSE543-IM5 M5 female thread
PSE543: Compound pressure (-100 ~ 101KPa) PSE543-IM5H M5 female, with mounting holes
• Micro design, e.g. 9.6 x 20.8 x 18 mm.
• Minimal weight, e.g. 1.9 g.
• 1 ms response time.
• 2 colour display determined by
switching status.
• 2 switch outputs and analogue output.
(7 different connection types PSE300)
Pressure Sensor for Compressed Air Micro Sensor

General Purpose Fluids Part number Pressure range Output signal
Series PSE560 PSE560- * Positive pressure (0 to 1 MPa) Voltage output type 1 to 5 V
PSE560- * -28 Positive pressure (0 to 1 MPa) Current output type 4 to 20mA
PSE561- * Vacuum (0 to -101 kPa) Voltage output type 1 to 5 V
PSE561- * -28 Vacuum (0 to -101 kPa) Current output type 4 to 20mA
PSE563- * Compound pressure (-100 to 100 kPa) Voltage output type 1 to 5 V
PSE563- * -28 Compound pressure (-100 to 100 kPa) Current output type 4 to 20mA
PSE564- * Positive pressure (0 to 500 kPa) Voltage output type 1 to 5 V
PSE564- * -28 Positive pressure (0 to 500 kPa) Current output type 4 to 20mA
* Port Size
Part
01 number.
R 1/8 (with M5 female thread) Part
N01 number.
NPT 1/8 (with M5 female thread) Part
C01 number.
Rc 1/8
02 R 1/4 (with M5 female thread) N02 NPT 1/4 (with M5 female thread) A2 URJ 1/4
• IP65. B2 TSJ 1/4
• Weeted material SUS316L.
• Copper-free. 7ASHINGLINE
• Oil-free (single diaphragm).
28
Low Differential Pressure Sensor

Pressure
Series PSE550 Part number Output specifications
range
Output signal
Analogue output 1 to 5VDC

Voltage output
PSE550 (within rated differential pressure range)
type 1 to 5V
Output impedance: Approx. 1kΩ
–50 to 50kPa
Analogue output 4 to 20mADC
PSE550-28 Current output
Note1)
(within rated differential pressure range) 2
type 4 to 20mA Allowable load impedance:
500Ω or less (at 24VDC)
100Ω or less (at 12VDC)

Note) Can detect differential pressure from 0 to 2kPa within the range of –50 to 50kPa.
• Rated differential pressure range: Mounting accessories

0 to 2kPa. Bracket ZS-30-A
• Accuracy: ±1% F.S.
Connector for PSE300 ZS-28-C
• Proof pressure: 65kPa.
• Analog output: 4 to 20mA DC,
1 to 5VDC.
• Controller Unit: PSE300
Filter clogging Liquid level

Flow monitoring detection
control
Can control air flow by monitoring the flow rate Can control filtration and replacement periods Can detect the liquid level through changes in
inside the duct. by monitoring the clogging of the filter. the purge pressure.
Air Catch Sensor

Series ISA2 To check the work piece position Position check of metal mold
on the reference plane
• Stable detection of 0.01 to 0.5mm clearance.

• Plug connectors (Centralised wiring).
• Modular construction,
(Requires less man hours to wire).
• Repetition accuracy 0.01mm or less.
• Minimum operating pressure 30 kPa (ISA2-G).
29
Digital Flow Switch Digital flow switch for air or water, integrated display type
Flow rate Min. set unit Switch Operating pres-
Series PF2A/PF2W Fluid Part number
l/min l/min outputs*
Supply
voltage sure range MPa
PF2A710-F01-67N 1 ~ 10
0.1
PF2A710-F02-67N 1 ~ 10 -50 kPa ~
Dry PF2A750-F01-67N 5 ~ 50 0.5 0.5 MPa
2 x PNP 12 - 24
air, N2 PF2A750-F02-67N 5 ~ 50
80 mA VDC
PF2A711-F03-67N 10 ~ 100 1
2 PF2A721-F03-67N 20 ~ 200 2
-50 kPa ~
0.75 MPa
PF2A751-F04-67N 50 ~ 500 5
PF2A703H-F10-69N 150 ~ 3000 5 1 x PNP
PF2A706H-F14-69N 300 ~ 6000 80 mA 24VDC 0.1 ~ 1.5
Air
10 Analogue:
PF2A712H-F20-69N 600 ~ 12000 4 ~ 20 mA
PF2W704-F03-67N 0.5 ~ 4 0,05
• Either for air or water. PF2W720-F03-67N
2 ~ 16 0,1
• Simple, LED display readout. PF2W720-F04-67N
2 x PNP 12 - 24 0 ~ 1.0
• Either integrated or remote Water PF2W740-F04-67N
5 ~ 40 0,5 80 mA
PF2W740-F06-67N VDC
combination of sensor and display.
• Key pad for simple adjustments. PF2W711-F06-67N
10 ~ 100 1,0
PF2W711-F10-67N
• 2 independent outputs/switch points. NPN on request
• No mechallicaly moving parts, Digital flow switch for air or water, remote type sensor unit
so longer service life. Operating pres-
Fluid Part number Flow rate Type Switch Supply
Application examples l/min outputs* voltage sure range MPa
Monitoring an N2 flow PF2A510-F01N 1 ~ 10
PF2A510-F02N 1 ~ 10 -50 kPa ~
PF2A550-F01N 5 ~ 50 0.5 MPa
PF2A550-F02N 5 ~ 50 Measuring –
PF2A511-F03N 10 ~ 100 sensor 12 - 24
Dry -50 kPa ~
PF2A521-F03N 20 ~ 200 VDC
air, N2 0.75 MPa
PF2A551-F04N 50 ~ 500
PF2A301-A 1 ~ 50
Temperature control Display 2 x PNP, 80 mA –
PF2A311-A 10 ~ 500
PF2W504-F03N 0.5 ~ 4
PF2W520-F03N 2 ~ 16
PF2W520-F04N 0 ~ 1.0MPa
Measuring –
PF2W540-F04N 12 - 24
PF2W540-F06N 5 ~ 40 sensor
VDC
Waterflow control for Water PF2W511-F06N
10 ~ 100
cooling ding guns PF2W511-F10N
PF2W301-A 0.5 ~ 40 2 x PNP
Display 80 mA
–
PF2W331-A 10 ~ 100
NPN on request
Accessory Cable/plug with ferrite core

S traight P398010-12
Elbow P398010-13
Digital Flow Switch for Deionised

Water & Chemicals
Series PF2D
Body and Sensor:
New PFA
Tube:
A single controller can
Super PFA monitor the flow rate of
4 different sensors.
Three type of flow range:
0.4 ~ 4 l/min (PF2D504)
1.8 ~ 20 l/min (PF2D520)
4.0 ~ 40 l/min (PF2D540)
• Dust generation of 3 particles/cc or less
(average number).
• Karman vortex eliminates moving parts
and allows low dust generation. 1 sensor Display unit 4-channel Flow Monitor
• Swept flow characteristics Series PF2D30 Series PF2D200
Tapered side seal minimizes dead volume
to reduce accumulation of liquid pool.
30
2-Colour Display Flow Switch Applications
Series PFM Control of metal wire tension Welder Models compatible with argon (Ar) and
carbon dioxide (CO2) mixed gas are
available. Refer to page 37 for details.
• Accumulated indication shows the

operating flow rate or residual amount
(of N2 etc.) in a gas cylinder.
• Flow control of
N2 gas to
prevent lead
frame oxidation.
• N2 blow
prevents
distortion of
Detection
camera
2
camera image
due to air
turbulence.
Suction check

• For air, N2, Ar and CO2
• A digital flow switch that uses MEMS
sensor for detecting the flow
• Compact size
• Improved visibility with two colour display
indication
• Two piping directions are possible
• Integrated flow adjustment valve
• Multiple mounting combinations
Integrated type Remote type

Flow rate Flow rate Supply Operating Flow rate Flow rate Supply Operating
Part number Pressure Part number Pressure
Dry air, N2, Ar CO2 voltage Range Dry air, N2, Ar CO2 voltage Range
PFM710 * - ** - *** 0.2 to 10 l/min 0.2 to 5 l/min PFM510 * - ** - 2 0.2 to 10 l/min 0.2 to 5 l/min
PFM725 * - ** - *** 0.5 to 25 l/min 0.5 to 12.5 l/min PFM525 * - ** - 2 0.5 to 25 l/min 0.5 to 12.5 l/min
24 V DC -100 kPa to 24 V DC -100 kPa to
PFM750 * - ** - *** 1 to 50 l/min 1 to 25 l/min 750 kPa PFM550 * - ** - 2 1 to 50 l/min 1 to 25 l/min 750 kPa
PFM711 * - ** - *** 2 to 100 l/min 2 to 50 l/min PFM511 * - ** - 2 2 to 100 l/min 2 to 50 l/min
* Flow adjustment valve PFM5 - Output specification

- Without flow adjustment valve 2 Analogue output (4 to 20 mA)
S With flow adjustment valve
** Port size (straight piping) Accesories
Flow rate range ZS-33-D Lead wire with connector (2 m)
Symbol Description
10 25 50 11
ZS-33-F Lead wire with connector (2 m) + rubber cover
F01 G1/8 • • • for connector
F02 G1/4 • ZS-33-M Bracket (for “without adjustment flow valve”)
C4 ø4 one-touch fitting • ZS-33-MS Bracket (for “with adjustment flow valve”)
C6 ø6 one-touch fitting • • • • ZS-33-J Panel mount adapter
C8 ø8 one-touch fitting • • • (for “without adjustment flow valve”)
ZS-33-JS Panel mount adapter
*** PFM7 - Output specification
(for “with adjustment flow valve”)
B 2 PNP outputs
ZS-33-R* DIN rail mounting bracket
E 1 PNP output + Analogue (1 to 5 V)
*=number of stations (1 to 5)
F 1 PNP output + Analogue (4 to 20 mA)
Flow sensor monitor
Part number Input specification Output specification Note
PFM313-LF 2 PNP + 1 to 5 V outputs With power and sensor

Current input
PFM314-LF 2 PNP + 4 to 20 mA outputs connectors included
Accesories
ZS-28-B Bracket
ZS-27-C Panel mount adapter
ZS-27-D Panel mount adapter + front protective cover
31
Ionizer Ionizer
Series IZS31 Part-Number Bar leng- Electrode

th (mm) needle material
Output Bracket (order
separately)
Sensor
IZS31-300P 300
IZS31-380P 380
2 x end bracket
IZS31-620P 620
IZS31-780P 780
Tungsten PNP Without
2 IZS31-1100P 1100
(Standard) 2 x end bracket feedback /
IZS31-1260P 1260
1 x centre bracket autobalance
IZS31-1500P 1500
2 x end bracket sensor
IZS31-1900P 1900
IZS31-2300P 2300 2 x centre bracket

NPN output available upon request
Accesories
Part-Number Description
IZS31-CP Power supply cable (3 m)

• Three ion emission modes: sensing DC, IZS31-CPZ Power supply cable (10 m)
pulsed DC or DC modes. IZS31-NT Electrode cartridge (Tungsten)
IZS31-NC Electrode cartridge (Monocrystal silicon)
• Maximum 60 Hz ion generation
IZS31-NS Electrode cartridge (Stainless Steel)
frequency. IZS31-BE End bracket
• Two types of compact sensors are IZS31-BM Centre bracket
available: Autobalance sensor and
Feedback sensor. Option - Electrode cartridge security cover
• Aerodynamic cross section. Part-Number Description
• Air purge function for even faster static
IZS31-E3 3 fixed electrode cartridges
electricity elimination.
IZS31-E4 4 fixed electrode cartridges
• Three types of needle material: Tungsten IZS31-E5 5 fixed electrode cartridges
(standard), silicon and stainless steel. IZS30-M1 Screw driver for ion balance adjustment trimmer
• Replaceable electrode needles. IZS30-M2 Electrode needle cleaning kit
• Dirt detection.
Aplications
Sensors
Abbau statischer
Eliminating staticElektrizit
Elektrizität
electricity
t anonPET-Flaschen
PET bottles
Part-Number Description • Trip-resistance during conveying.
• Prevents adhesion of dust.
IZS31-DF Feedback sensor

IZS31-DG Autobalance sensor
Auto-balance sensor
Automatic ion balancing
by means of a signal input
Abbau statischer Elektrizität

Eliminating Elektrizit
statict an electricity
formgepresstenon
Objekten
film
• Prevents winding failure due to wrinkles, etc.
50 Ionizer
Ion balance value (V)
25
Adjusts ion balance
0 near the workpiece.
Time
–25
–50
Abbau statischer static
Eliminating Elektrizität
Elektrizitelectricity
t beim Transport
onvon
molded
Halbleiterscheiben
goods
• Improves detachability of mold goods from a die.
Feedback sensor
Charged voltage on workpiece [kV]
3
With sensor
2
Without sensor
1 Ionizer PLC
+200 V
0 Feedback sensor Abbau statischer
Eliminating static electricity
Elektrizit
Elektrizität
on tanauf
electric
Leiterplatten
substrate
• Prevents element disruption due to discharge.
–1
Without sensor
–2
With sensor
–3 Charged object
1 2 3 4
Time [sec]
32
Electrostatic Sensor Part-Number Potential measurement Output voltage

Series IZD10 IZD10-110 ± 0.4 kV 1 to 5 V
IZD10-510 ± 20 kV 1 to 5 V

• Potential measurement:
± 20 kV (detected at a 50 mm distance)
± 0.4 kV (detected at a 25 mm distance)
• Detects the electrostatic potential and
outputs an analogue voltage.
• Small and easy to mount.
Electrostatic Sensor Connector cable for Connector for

Part-Number Input / Output
power supply/output sensor connection
Series IZE11 2 x PNP open collector +
IZE112-LC Analogue output 1-5 V Yes Yes
2 x PNP open collector +

IZE113-LC Yes Yes
Analogue output 4-20 mA
Option
Part-Number Description
ZS-28-A Connector cable for power supply/output (2 m)
ZS-28-B Bracket
ZS-28-C Connector for sensor connection
ZS-27-C Panel mount adapter
• Output: switch output x 2 + Analogue ZS-27-D Panel mount adapter + Front protective cover
output (1 to 5 V, 4 to 20 mA).
• 2-colour display (red and green).
• Display accuracy: ±0.5% F.S. ±1 digit or
less.
• Detection distance correction function
(adjustable in 1 mm increments).
• Supports two types of sensors.
• Connection by connector:
Connector for power supply / output.
e-con connector: connector to sensor.
33
Electro-Pneumatic Positioner Model Type Function

Suply air
Stroke
pressure (MPa)
Series IP8000/8100 IP8000 Lever type feedback Single/double action 0.14 - 0.7 10 - 85 mm
IP8100 Rotary type Single/double action 0.14 - 0.7 60º - 100º
2
• Vibration resistance: No resonances 5 to

200 Hz
• Dust resistance: Conforms to JIS F8007
IP65
• Opening current transmission (4 to 20
mA DC)
• 100 mm in height
• ATEX intrinsically safe explosion
protection type construction is available.
II 2 G EEx ib IIC T5…T6
Smart Positioner (Rotary Type)

Part-Number ATEX compliant Specifications
Series IP8101 IP8101-032-H-Q With output (alarm + analogue outputs)
No
IP8101-033-H-Q With HART transmision mode
Yes Intrinsically safe explosion protection constr.
52-IP8101-034-H-M
+ Output + HART transmission mode
Accesory Part-Number
Fork lever assembly M P368010-24

Fork lever assembly S P368010-25
• HART transmission mode available
• ATEX intrinsically safe explosion
protection construction
II 1G EExia CT4 Ta 80°C
II 1D T 83°C Ta 80°C
• Supply air pressure: 0.3 to 0.7 MPa
• Applicable actuator rotation angle: 60 to
100°
• Dust resistance: Conforms to JIS F8007
IP65
• Calibration function integrated - The
zero / span adjustment is performed
automatically
• Dual wire input
• Monitor output and software alarm
• Variety of parameter setting functions
and displayable control condition
• Interchangeable mounting with IP8100
34
Solenoid Valves
Solenoid Valves
Solenoid Valves
35
Solenoid Valves
2 Port Solenoid Valves, Part number* Switch Port Flow Operating Circuit
Air Pilot Type Solenoid Valve frequency (mm) l/min pressure range Symbol
Series VQ20/30 VQ21A1-5YO-C6-Q

VQ31A1-5YO-C10-Q
100 Hz
30 Hz
ø6
ø 10
395
785
0.01 ~ 0.6 MPa
0.01 ~ 0.5 MPa
Valves for manifold mounting upon request
*for 24 V DC, other voltages upon request
Sub-plate for single valve

VQ20 VQ30
AXT835-13A AXT837-13A
3
• Compact, light design with
superior flow capacity.
Solenoid Valves
• Response time below 5 ms

(depends on type).
• With built-in one-touch fittings.
• Long service life, over 20 million
switching cycles.
Solenoid Valve Type of Part number Operating

pressure Flow
Voltage Mounting Circuit Symbol
A 3 Port, Directly Operated actuation Solenoid Valve range MPa l/min
Series VQ100 VQ110-5LO-Q

VQ110-5MO-Q 24V DC
on aluminum
manifold
3 N.C. 0 - 0,8 15,7
VQ110-5F-Q on modular
manifold
Accessories
AXT662-1-1 Sub-plate for LO/MO valves
VV3Q12-02 Manifold for 2 valves, M5 port
• 3 port solenoid valve, micro design. VV3Q12-08 Manifold for 8 valves, M5 port
• Service life of over 200 million switching VV3Q12-10 Manifold for 10 valves, M5 port
cycles. VV3Q12-12 Manifold for 12 valves, M5 port
• Optional N.C., N.O. function. VVQ100-10A-2 Blanking plate e.g. for 3, 5, 7, 9, 11 valves
VV3Q11-02CUO-X55 Modular manifold, plug-in type for 2 valves
• Low power consumption 1.0 W (0.5 W
VV3Q11-04CUO-X55 Modular manifold, plug-in type for 4 valves
option). VV3Q11-06CUO-X55 Modular manifold, plug-in type for 6 valves
• Port size M5. VV3Q11-08CUO-X55 Modular manifold, plug-in type for 8 valves
• Base manifold with multi-pin plug connection VV3Q11-10CUO-X55 Modular manifold, plug-in type for 10 valves
and ready-wired solenoid valves. VV3Q11-12CUO-X55 Modular manifold, plug-in type for 12 valves
• Indicator light and surge voltage suppressor VVQ100-10A-1 Blanking plate
integrated in the connector body. AXT802-1A DIN rail mounting set
Accessory Plug connector with cable

0.6 m 2m 3m
AXT661-14AN-6 AXT661-14AN-20 AXT661-14AN-30
36
Solenoid Valves
3 Port Solenoid Valve Type of Part number Operating Flow

Voltage pressure Electry Entry Circuit Symbol
actuation Solenoid Valve l/min (Cv)
Series V100 V114-5LOU
range
L Plug Connector 2
3 port 8.4 l/min
N.C. V114-5MOU 24V DC 0 ~ 0.7Mpa Plug Connector (0.008)
M
V114-5G Grommet 1 3
N.O. and other voltages upon request
Type of Part number Operating Flow

Voltage pressure Electry Entry Circuit Symbol
actuation Solenoid Valve range l/min (Cv)
L Plug Connector 2
V124-5LOU
• Power consumption 0.4W. With 3 port 17 l/min
V124-5MOU 24V DC 0 ~ 0.7Mpa M Plug Connector
N.O. (0.015)
power saving circuit 0.1W.
V124-5G Grommet 1 3 3
• Coil temperature rises: only 1°C N.O. and other voltages upon request
(with power saving circuit).
• Indicator light/surge voltage
Solenoid Valves
Accessories
supressor integrated in the
V100-74-1 Sub-plate with M5 thread
connector body.
VV100-S41-02-M5 Manifold for 2 valves. M5 port
• Valve width 10.5mm. VV100-S41-03-M5 Manifold for 3 valves. M5 port
V100-77-1A Blanking plate
3 Port Solenoid Valve Type of Part number Operating Flow

Voltage Mounting pressure Circuit Symbol
Air Pilot Type actuation Solenoid Valve range Nl/min (Cv)
Series SYJ300 3 port

SYJ314M-5LOU-Q
24V DC to manifold 0.15 ~ 0.7Mpa 98
(A)
2
N.C.
SYJ314M-5G-Q 1 3
Body ported style and other voltages upon request
Accessory Manifold
SS3YJ3-S42-03-M5F-Q Manifold for 3 valves, M5 port
• Micro design. SS3YJ3-S42-04-M5F-Q Manifold for 4 valves, M5 port
• Plate valve style. SS3YJ3-S42-05-M5F-Q Manifold for 5 valves, M5 port
• N.C. ( N.O. upon request). SS3YJ3-S42-06-M5F-Q Manifold for 6 valves, M5 port
• Power consumption 0.55 W with LED. SS3YJ3-S42-07-M5F-Q Manifold for 7 valves, M5 port
SS3YJ3-S42-08-M5F-Q Manifold for 8 valves, M5 port
• Manual override non-locking
SYJ300-9-1-Q Sub-plate
style as standard. Blanking plate
SYJ300-10-2A-Q
• Minimum service life of 50 million
switching cycles.

Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m
Without cover SY100-30-4A-6 SY100-30-4A-10 SY100-30-4A-20 SY100-30-4A-30
With cover SY100-68-A-6 SY100-68-A-10 SY100-68-A-20 SY100-68-A-30
37
Solenoid Valves
3 Port Solenoid Valve Type of Part number

Voltage Mounting
Operating Flow
Port Size
actuation Solenoid Valve pressure range l/min
Directly Operated
Series VT•VO307/317 EVT307-5DO-01F-Q
EVT307-5DO-02F-Q
24V DC
24V DC body ported
Standard:
0 ~ 0.9 MPa
G 1/8”
G 1/4”
EVT307-4DO-01F-Q 220V AC single valve 206 G 1/8”
3/2 EVT307-4DO-02F-Q 220V AC EVT307V, G 1/4”
N.O. VO307-5DO-Q 24V DC EVT317V,
on manifold
N.C. VO307-4DO-Q 220V AC VO307V,
EVT317-5DO-02F-Q 24V DC VO317V: G 1/4”
body ported 687
EVT317-4DO-02F-Q 220V AC -0.1 ~ 0.1 MPa G 1/4”
single valve G 3/8”
EVT325-035F5DO-Q 24V DC 0 ~ 0.1 MPa 1374
Accessory • Manifold for VO307

3 • 3 port (also 2 port) in standard design,
DXT152-25-1A Mounting bracket
for valve functions N.C., N.O.
EVV307-01-022-01F-F Manifold for 2 valves. G1/8 port
• Port size G 1/8”, G 1/4”. EVV307-01-032-01F-F Manifold for 3 valves. G1/8 port
• Optional sub-plate or manifold. EVV307-01-042-01F-F Manifold for 4 valves. G1/8 port
Solenoid Valves
• Optional model for vacuum (95%). EVV307-01-062-01F-F Manifold for 6 valves. G1/8 port
• Connector with enclosure IP65, EVV307-01-082-01F-F Manifold for 8 valves. G1/8 port
also with light and surge voltage EVV307-01-102-01F-F Manifold for 10 valves. G1/8 port
suppressor. DXT060-51-13A Blanking plate
• Solenoid coils for direct or alternating
current available.
3 Port Solenoid Valves Type Part number

Voltage Port
Operating Flow
of act. Solenoid Valve pressure range l/min
Air Pilot Type
Series EVP300/500/700 EVP342-4YB-02FA-Q
EVP342-5YB-02FA-Q
220V AC
24V DC G 1/4”
0.2 ~ 0.8 MPa
980
EVP342R-5YB-02FA-Q 24V DC -0.1 ~ 0.8 MPa
3/2 EVP542-4YB-03FA-Q 220V AC 0.2 ~ 0.8 MPa
N.C. EVP542-5YB-03FA-Q 24V DC G 3/8” 2260
N.O. EVP542R-5YB-03FA-Q 24V DC -0.1 ~ 0.8 MPa
EVP742-4YB-04FA-Q 220V AC
G 1/2” 0.2 ~ 0.8 MPa 3920
EVP742-5YB-04FA-Q 24V DC
EVP742R-5YB-04FA-Q 24V DC -0.1 ~ 0.8 MPa
• For superior flow capacity. Model for Circuit Symbol

• Port size G 1/4”, G 3/8”, G 1/2”. VACUUM Applications
• Body ported type.
• Simple conversion to functions N.C. or
N.O.
• Pilot-operated poppet valve for
superior flow.
• Pilot air model for vacuum.
38
Solenoid Valves
4 Port Solenoid Valves, Cassette Type Type Part number Operating

pressure
Flow Port Size Port Size
Voltage Circuits Symbols
of act. Solenoid Valve range MPa l/min A/B P/E
Connecter Type Manifold
Series SJ2000•3000 SJ2160-5CU-C2
SJ3160-5CU-C2
40
40
Ø2 (A) (B)
42
4 Port SJ2160-5CU-C4 77
single Ø4
SJ3160-5CU-C4 0.15 ~ 0.7 99 Ø8 24 VDC
SJ3160-5CU-C6 125 Ø6 513
SJ2160-5CU-M3 54 M3 (EA)(P) (EB)
SJ3160-5CU-M5 100 M5
SJ2260-5CU-C2 38
Ø2 (A) (B)
SJ3260-5CU-C2 41
42
4 Port SJ2260-5CU-C4 83
double Ø4
SJ3260-5CU-C4 0.1 ~ 0.7 105 Ø8 24 VDC
SJ3260-5CU-C6 128 Ø6 513 3
SJ2260-5CU-M3 51 M3 (EA) (P) (EB)
• 3 port (also 2 port) in standard SJ3260-5CU-M5 105 M5
design, for valve functions N.C., N.O. Other types of actuation, voltages, plug connectors and port sizes available on request
Solenoid Valves
• Card-edge type connector.
• High space saving: 7.5/10 mm Solenoid variations
width. Part number Description
• Power savings: 0.15 W consumption
SJ2000 valve with light/surge voltage suppresser standard (non-polar) only;
(SJ3000 with power saving circuit).
SJ2160-5CU-C2 and with no power saving, individual wiring, shut-off switch.
• Power supply shut-off switch for
discharge of each valve individually. 1: 2 position single solenoid 2: 2 position double solenoid 3: 3 position closed center
• SJ2000/SJ3000 can be mounted SJ260-5CU-C2 4: 3 position exhaust center 5: 3 position pressure center A: dual 3 port valve N.C./N.C.
together. B: dual 3 port valve N.O./N.O. C: dual 3 port valve N.C./N.O.
• Ø2 One-touch fitting connection SJ2160R-5CU-C2 SJ2000 valve with external pilot
possible. SJ2160K-5CU-C2 SJ2000 valve with built-in back pressure check valve
• Manifold serial wiring variations: SJ2160T-5CU-C2 SJ2000 valve with power saving circuit
SJ2160-5MU-C2 SJ2000 valve with individual wiring (connector and 300 mm length wiring cable)
EX180 DeviceNet compliant (16, 32
SJ2160-5MNU-C2 SJ2000 valve with individual wiring (connector without wiring cable)
outputs), EX180 CC-Link compliant SJ2160-5MOU-C2 SJ2000 valve with individual wiring (no connector, no wiring cable)
(32 outputs). SJ2160-5CZ-C2 SJ2000 valve with light/surge voltage suppresser and individual wiring
• Manifold parallel wiring variations: SJ2160-5CUJ-C2 SJ2000 valve with shut-off switch for individual disconnection
D-sub connecter), flat ribbon cable SJ2160-5CUD-C2 SJ2000 valve with manual override locking switch
(10/20/26 pins).
• A maximum of 32 solenoids per Modular Manifold SJ2000, SJ3000
manifold. No. Description Part number Notes
• Easy attach/detach of the SI unit and
Internal pilot SJ3000-50-1A- C6: Ø6 straight
wiring by the connector.
Internal pilot / built-in silencer SJ3000-50-1AS- C8: Ø8 straight
• Easy in maintenance. SUP/EXH External pilot SJ3000-50-1AR- L6: Ø6 elbow upward entry
1 block External pilot / built-in silencer SJ3000-50-1ARS-L8: Ø8 elbow upward entry
assembly For different pressure, internal pilot SJ3000-50-3A- B6: Ø6 elbow downward entry
For different pressure, internal pilot L8: Ø8 elbow downward entry
SJ3000-50-3AS-
/ built-in silencer (All one-touch fitting)
2 End block assembly SJ3000-53-1A
3 DIN rail VZ1000-11-1- : number of stations
For D-sub connector SJ3000-42-1A-
Connector For flat ribbon cable 26 pins SJ3000-42-2A- : 1 connector upward
4 block For flat ribbon cable 16 pins SJ3000-42-3A- : 2 connector lateral
assembly
For flat ribbon cable 10 pins SJ3000-42-4A-
For serial wiring SJ3000-42-5A
DeviceNet, 32 points EX180 -SDN1 T-branch type
5 Serial DeviceNet, 32 points EX180 -SDN1A Straight type
Interface
U side
unit DeviceNet, 16 points EX180 -SDN2 T-branch type
DeviceNet, 16 points EX180 -SDN2A Straight type
6 SUP/EXH block disk assembly SJ3000-44-1A
SUP block disk assembly Manifold variations

EXH block disk assembly
Part number Description
w
SS5J2-60S0-U
* Without Serial Interface unit, SJ2000
* stations
q
SS5J3-60S0-U
* Without Serial Interface unit, SJ3000
* stations
t
SS5J3-M60S0- U* Without SI unit, SJ2000/SJ3000 mixed * stations
e SS5J2-60FD1-U
* D-sub connector, SJ2000 * stations
SS5J2-60PD1-U
* Flat ribbon cable, 26 pins, SJ2000 * stations
SS5J2-60PGD1-U * Flat ribbon cable, 20 pins, SJ2000 * stations
D side
SS5J2-60PHD1-U * Flat ribbon cable, 10 pins, SJ2000 * stations
r
SS5J2-60SQ-U
* EX180 DeviceNet, 32 points, SJ2000 * stations
SS5J2-60SQ1-U* EX180 DeviceNet, 16 points, SJ2000 * stations
39
Solenoid Valves
7 mm Width Type Operating Flow Circuit

Series Part no. pressure range Voltage
Compact Pilot Type of act. (MPa) l/min Symbols
5 Port Solenoid Valve Plug-in type S0710-5 0.2~0.7 105 24 VDC

(A) (B)
4 2
2 position Single
Series S0700 Plug lead type S0715-5 0.2~0.7 105 24 VDC 5 1 3
(R1) (P) (R2)
(A) (B)
Plug-in type S0720-5 0.2~0.7 105 24 VDC 4 2
2 position Double
Plug lead type S0725-5 0.2~0.7 105 24 VDC 5 1 3
(R1) (P) (R2)
4 2
Plug-in type 3 Port S07A0-5 0.2~0.7 90 24 VDC (A) (B)
4 position
Plug lead type N.C.+N.C. S07A5-5 0.2~0.7 90 24 VDC
5
(R1) 1
(P)
3
(R2)
Plug-in type 3 Port S07B0-5 0.2~0.7 90 24 VDC

4
(A)
2
(B)
4 position
Plug lead type N.O.+N.O. S07B5-5 0.2~0.7 90 24 VDC 5
(R1) 1
3
3
(R2)
(P)
4 2
Plug-in type 3 Port S07B0-5 0.2~0.7 90 24 VDC (A) (B)
4 position
Plug lead type N.C.+N.O. S07B5-5 0.2~0.7 90 24 VDC
5
(R1) 1
3
(R2)
(P)
Solenoid Valves
Solenoid variations
Part no. Description
• Compact design with high flow capacity.
S0710R-5 Base mounted plug-in, 24 VDC valve with external pilot
• Power consumption: 0.1W (with power S0715-5G Plug lead, 24 VDC valve with grommet electrical entry and without sub-plate
savin circuit). S0715R-5G Plug lead, 24 VDC valve with external pilot and grommet electrical entry
• Applicable to Serial Wiring Gateway S0715-6G Plug lead, 12 VDC valve with grommet electrical entry
Type. S0715-5M Plug lead, 24 VDC valve with M plug connector for electrical entry
• 2 Types of manifold pitch are selectable S0715-5MO Plug lead, 24 VDC valve with M plug connector (without lead wire) for electrical entry
(Plug lead type): 8.5 mm pitch with one- S0715-5G-M5 Plug lead, 24 VDC valve with grommet electrical entry and sub-plate
touch fittings; 7.5 mm pitch: with barb
fittings. Manifold specifications
Type Part no. Description
SS0750- * C4SDA1N S kit: Serial trasmission (EX500), Remote I/O (RIO)
SS0750- * C4SDA2N S kit: Serial trasmission (EX500), Ethernet/IP, DeviceNet, Profibus
SS0750- * C4SDNN첸 S kit: Serial trasmission (EX250), PROFIBUS DP
SS0750- * C4SD0첸 S kit: Serial trasmission (EX250), without serial unit
SS0750- * C4FD1 F kit: D-Sub conector (25P) with 1.5 m cable
Plug-in
SS0750- * C4PD2 P kit: Flat ribbon cable (26P) with 3.0 m cable
SS0750- * C4JD0 J kit: PC wiring compatible flat ribbon cable (20P)
SS0750- * C4TD0 T kit: Terminal block
SS0750- * C4LD0 L kit: Lead wire, with 0.6 m cable
SS0750- * C4MD3 M kit: Circulat connector (26P), with 5.0 m cable
unit Plug-lead
SS0755- * C4C C kit: Lead wire, 8.5 manifold pitch

SS0755-SAN * C4 S kit: Serial transmission (EX510)
SS0755- * V2C C kit: Lead wire, 7.5 manifold pitch
S0725-5G Connector kit: 2 position double, grommet, without sub-plate
Single
connector kit: 4 position dual 3 port type (NC+NO), with lead wire,
S07C5-5M-M5
with sub-plate
* : number of stations
Serial D-sub Flat Ribbon PC Wiring System

S kit Transmission F kit Connector P kit Cable J kit Compatible Flat
Ribbon Cable
EX500 EX510 EX250
0
EX50
series
6
7
14
15 0
1
8
9
Terminal Lead Wire Circular Lead Wire

T kit Block L kit M kit Connector C kit
40
Solenoid Valves
5 Port Solenoid Valve Type Part number Switching Operating

pressure
Flow Circuit
Mounting Voltage
of act. Solenoid Valve function range (MPa) l/min Symbols
Series SYJ3000
5 SYJ3143-5LOU-Q single 0.15 ~ 0.7
5 SYJ3243-5LOU-Q double 0.1 ~ 0.7

to
98 24V DC
5 SYJ3343-5LOU-Q Closed manifold
center
5 SYJ3443-5LOU-Q Exhaust 0.2 ~ 0.7
center
5 SYJ3543-5LOU-Q Pressure
center
• Micro design.
• Common exhaust for pilot and main 3
valve.
• Low power consumption 0.35 W. Accessory • Manifold
• Minimum service life of 50 million
Solenoid Valves
SYJ3000-22-1-Q Sub-plate. M5x0.8 port
switching cycles. SS5YJ3-S41-02-M5F-Q Manifold for 2 valves. M5 port
• Manual override non-locking SS5YJ3-S41-03-M5F-Q Manifold for 3 valves. M5 port
type as standard. SS5YJ3-S41-04-M5F-Q Manifold for 4 valves. M5 port
• Minimal switching times of only 15 ms. SS5YJ3-S41-05-M5F-Q Manifold for 5 valves. M5 port
SS5YJ3-S41-06-M5F-Q Manifold for 6 valves. M5 port
SS5YJ3-S41-08-M5F-Q Manifold for 8 valves. M5 port
SS5YJ3-S41-10-M5F-Q Manifold for 10 valves. Port M5
SS5YJ3-S41-12-M5F-Q Manifold for 12 valves. Port M5
SYJ3000-21-2A-Q Blanking plate
Accessory Plug connection with cable

Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m
41
Solenoid Valves
5 Port Solenoid Valves Type Part number Flow Operating

pressure range
For electr. Port Size
entry
Port Circuit
Body Ported of act. Solenoid Valve l/min at 24 V DC A/B P/R Symbols
MPa
Series SY3000•5000 SY3120-5LOU-C6-Q

SY5120-5LOU-C6-Q
196
500
2 pin plug
connector Ø 6 mm
M5
G 1/8”
SY7000•9000 5
Single
SY5120-5YO-C6-Q
SY7120-5LOU-C8F-Q
760
0.15 ~ 0.7 DIN plug connector
2 pin plug connector
Ø 8 mm P: G 1/4”,
SY7120-5YO-C8F-Q DIN plug connector R: G 1/8”
SY9120-5LOU-C10F-Q 1700
Ø 10 mm G 1/4”
SY9120-5YO-C10F-Q DIN plug connector
SY3220-5LOU-C6-Q 196 2 pin plug M5

SY5220-5LOU-C6-Q connector Ø 6 mm
491 G 1/8”
SY5220-5YO-C6-Q DIN plug connector
5 0.1 ~ 0.7
SY7220-5LOU-C8F-Q 2 pin plug connector
Ø 8 mm P: G 1/4”,
3 Double
SY7220-5YO-C8F-Q
760 DIN plug connector R: G 1/8”
SY9220-5LOU-C10F-Q 1700
Ø 10 mm G 1/4”
• Superior service life - at least 50m.

Solenoid Valves

switching cycles. SY5320-5LOU-C6-Q connector Ø 6 mm
• Pilot air model available. 395 G 1/8”
SY5320-5YO-C6-Q DIN plug connector
5 0.2 ~ 0.7
• Body ported type. Closed SY7320-5LOU-C8F-Q
630
Ø 8 mm P: G 1/4”,
center DIN plug connector R: G 1/8”
• With changeable fittings set for port A SY7320-5YO-C8F-Q
and B. SY9320-5LOU-C10F-Q 1676
Ø 10 mm G 1/4”
• Low power consumption 0.35 W with SY9320-5YO-C10F-Q DIN plug connector
24 V DC. SY3420-5LOU-C6-Q 206 2 pin plug M5

• Can be directly controlled by SPS. SY5420-5LOU-C6-Q connector Ø 6 mm
402 G 1/8”
• 10 ms response time. 5 SY5420-5YO-C6-Q DIN plug connector
Exhaust SY7420-5LOU-C8F-Q 0.2 ~ 0.7 2 pin plug connector
• Plug combinations: 2 pin plug model center 609 Ø 8 mm P: G 1/4”,
with light/surge voltage suppressor
SY9420-5LOU-C10F-Q 1637
integrated into plug body (miswiring SY9420-5YO-C10F-Q DIN plug connector
Ø 10 mm G 1/4”
protection) DIN connector for IP65
(only with valve sizes 5000/7000/9000). connector
SY5520-5LOU-C6-Q Ø 6 mm
402 G 1/8”
5 SY5520-5YO-C6-Q DIN plug connector
Pressure SY7520-5LOU-C8F-Q 0.2 ~ 0.7 2 pin plug connector
center 609 Ø 8 mm P: G 1/4”,
SY9520-5LOU-C10F-Q 1760 2 pin plug connector
Ø 10 mm G 1/4”
Accessory • Manifold
SS5Y--02-00F-Q
* Manifold for 2 valves. Port size **
SS5Y--03-00F-Q
SS5Y--04-00F-Q
SS5Y--05-00F-Q
Accessory • Replacement fittings SS5Y--06-00F-Q
SS5Y--07-00F-Q
SS5Y--08-00F-Q
SS5Y--09-00F-Q
SS5Y--10-00F-Q
SS5Y--11-00F-Q
SS5Y--12-00F-Q
SY3000-26-19A-Q Blanking plate with screws and gasket for SY3000
SY000-26-1A-Q Blanking plate with screws and gasket for SY5/7/9000
SX000-16-1A Mounting plate for a valve, side
3 for SY3000
* 20 for SY3000 Port size ** for SY3000: G 1/8”
SY000-6A- 5 for SY5000 20 for SY5000 for SY5000: G 1/4”
7 for SY7000 20 for SY7000 for SY7000: G 1/4”
3 3000 SY 3000 5000 7000 9000 9 for SY9000 23 for SY9000 for SY9000: G 3/8’’
5 5000 M5 •
7 7000 C4 •
C6 • • Accessory Plug connector with cable
9 9000
01F • Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m
C8 • • •
C10 • • Without cover SY100-30-4A-6 SY100-30-4A-10 SY100-30-4A-20 SY100-30-4A-30
02F • With cover SY100-68-A-6 SY100-68-A-10 SY100-68-A-20 SY100-68-A-30
•
03F •
C12 • Accessory • DIN connector
With indicator light and Without indicator light
24VDC protective circuit without protective circuit
SY100-82-3-05 SY100-82-1
42
Solenoid Valves
Operating For electr.

5 Port Solenoid Valves, Type of Part number Flow pressure entry
Circuit
actuation Solenoid Valve l/min range (MPa) Symbols
Manifold type, plug lead type at 24 V DC
SY3140-5LOU-Q
Series SY5140-5LOU-Q
255
687
2 pin socket
SY3000•5000•7000•9000 5 port
Single
SY5140-5YO-Q
SY7140-5LOU-Q
900
0.15 ~ 0.7 DIN plug connection
2 pin socket
SY7140-5YO-Q DIN plug connection
SY9140-5LOU-Q 2 pin socket
2200
SY3240-5LOU-Q 255
2 pin socket
SY5240-5LOU-Q
687
SY5240-5YO-Q 0.1 ~ 0.7 DIN plug connection
5 port
Double
SY7240-5YO-Q
900 DIN plug connection 3
• Body design for base mounting. 2200
• Low power consumption 0.35 W with
Solenoid Valves
SY3340-5LOU-Q 255
24 V DC. 2 pin socket
SY5340-5LOU-Q
• Can be directly controlled by PLC. 422
5 port SY5340-5YO-Q 0.2 ~ 0.7 DIN plug connection
• Minimal response time of only 10 ms. Closed SY7340-5LOU-Q 2 pin socket
900
• 2 pin miniature socket protects center SY7340-5YO-Q DIN plug connection
against miswiring. SY9340-5LOU-Q 2 pin socket
2160
• Long service life of at least 50 million SY9340-5YO-Q DIN plug connection
switching cycles. SY3440-5LOU-Q 255

2 pin plug
SY5440-5LOU-Q
422
Exhaust SY7440-5LOU-Q 2 pin plug
center
900 DIN plug connection
SY7440-5YO-Q
U Side SY9440-5LOU-Q 2 pin plug
r 2050
SY3540-5LOU-Q 255
w 2 pin plug
SY5540-5LOU-Q
422
Pressure SY7540-5LOU-Q 2 pin plug
center
900 DIN plug connection
SY7540-5YO-Q
SY9540-5LOU-Q 2 pin plug
3120
Other voltages, plug connectors and port sizes available on request
q
Modular manifold SY3000, SY5000
No. Item SY3000 SY5000
w
Manifold Ø 4 mm SX3000-50-1A-C4-Q
1 block ass’y Ø 6 mm SX3000-50-1A-C6-Q SX5000-50-1A-C6-Q
e
Ø 8 mm SX5000-50-1A-C8-Q
DIN rail fixing screw
2 SUP./EXH. block ass’y SX3000-51-1A SX5000-51-1A
3 End block ass’y D side SX3000-52-1A SX5000-52-1A-Q
4 End block ass’y U side SX3000-53-1A SX5000-53-1A-Q
5 DIN rail VZ1000-11-1-
D side 5 Blanking plate SX3000-75-1A-Q SX5000-76-1A-Q
7 Replacement Ø 4 mm VVQ1000-50A-C4
fitting Ø 6 mm VVQ1000-50A-C6 VVQ1000-51A-C6
Ø 8 mm VVQ1000-51A-C8
Accessory • Manifold - Aluminum
SS5Y-42-02-
* ** -Q Manifold for 2 valves
* 3 for SY3000
SS5Y-42-04-
* 5 for SY5000
SS5Y-42-06-
* 7 for SY7000
SS5Y-42-08-
SS5Y-42-10-
* ** -Q Manifold for 10 valves ** C6 for SY3000
SS5Y-42-12-
* ** -Q Manifold for 12 valves ** C8F for SY5000
SY3000-26-9A-Q Blanking plate with gasket and screws for SY3000 ** C10F for SY7000
SY5000-26-20A-Q Blanking plate with gasket and screws for SY5000
Accessory • DIN plug connector Accessory plug connector with cable

with indicator light and without indicator light Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m
24VDC protective circuit without protective circuit
SY100-82-3-05 SY100-82-1 With cover SY100-68-A-6 SY100-68-A-10 SY100-68-A-20 SY100-68-A-30
43
Solenoid Valves
Solenoid Valves Type

of
Part number Flow Operating
pressure range
For electr. Port Size
entry Voltage
Circuit
Solenoid Valve A/B Symbols
5 port, cassette type actuation l/min MPa at 24 V DC
SY3160-5LOU-C6-Q
Series SY3060•5060•7060 SY3160-5MOU-C6-Q
5 SY5160-5LOU-C6-Q
196 Ø 6 mm
24V DC
441 0.15 ~ 0.7 other
Single SY5160-5MOU-C6-Q Ø 8 mm voltages
SY7160-5LOU-C8-Q upon
980 request
SY7160-5MOU-C8-Q LOU: bipolar
SY3260-5LOU-C6-Q with indicator light Ø 6 mm
196
SY3260-5MOU-C6-Q and LED
24V DC
5 SY5260-5LOU-C6-Q lead wire entry
441 0.1 ~ 0.7 direction to side other
Double SY5260-5MOU-C6-Q
Ø 8 mm voltages
SY7260-5LOU-C8-Q upon
980
3 SY7260-5MOU-C8-Q request
• Valve block easy to expand SY3360-5LOU-C6-Q

196 Ø 6 mm
and disassemble. SY3360-5MOU-C6-Q 24V DC
5 SY5360-5LOU-C6-Q
Solenoid Valves
• Reduced cost through a combination Closed SY5360-5MOU-C6-Q 441 0.2 ~ 0.7 other
of valve and manifold. center MOU: bipolar Ø 8 mm voltages
SY7360-5LOU-C8-Q 2 pin plug connector upon
• Valve width 10/15/18 mm. 980 with indicator light request
SY7360-5MOU-C8-Q and LED
• Minimal weight means it can be lead wire entry
SY3460-5LOU-C6-Q
mounted directly to the consumer. 196 direction ABOVE Ø 6 mm
SY3460-5MOU-C6-Q 24V DC
• 0.35 W power consumption. 5 SY5460-5LOU-C6-Q
• Can be directly controlled by PLC. Exhaust SY5460-5MOU-C6-Q 441 0.2 ~ 0.7 other
center Ø 8 mm voltages
• 10 ms response time. SY7460-5LOU-C8-Q upon
980 request
• New gasket provides superior SY7460-5MOU-C8-Q
YO:
consensate resistance. SY3560-5LOU-C6-Q DIN plug connector
• Manual override non-locking type as 196 upon request Ø 6 mm
SY3560-5MOU-C6-Q 24V DC
standard. 5
SY5560-5LOU-C6-Q
Pressure 441 0.2 ~ 0.7 other
• Replacement fittings mean cylinder center SY5560-5MOU-C6-Q Ø 8 mm voltages
ports are easy to change. SY7560-5LOU-C8-Q upon
980 request
• Minimum operating life of 50 million SY7560-5MOU-C8-Q
switching cycles. Other voltages, plug connectors and port sizes available on request
• Common exhaust type pilot air, individual
SUP/EXH block assembly, SUP/EXH Modular manifold
passage block. No. Item SY3000 SY5000 SY7000
• Modern design.
1 Valves see table above
2 Supply station SY3000-55-1A-Q SY5000-55-1A-Q SY7000-75-1A-Q
3 End plate D side SY3000-56-1A-Q SY5000-56-1A-Q SY7000-56-1A-Q
4 End plate U side SY3000-56-1B-Q SY5000-56-1B-Q SY7000-56-1A-Q
5 Bushing assembly SY3000-52-5A SY5000-52-3A SY7000-70-1A
D side
6 Aluminium DIN rail VZ1000-11-1- VZ1000-11-1- VZ1000-11-1-
7 Additional SUP block assy SY3000-54-1C-Q SY5000-54-1C-Q SY7000-54-1C-Q
8 Additional EXH block assy SY3000-55-1B-Q SY5000-55-1B-Q SY7000-55-1B-Q
9 SUP/EXH blocking disc SY3000-52-6A SY5000-52-4A SY7000-70-2A
10 Silencer for EXH channel AN203-KM8 AN300-KM10 AN300-KM12

SY000-6A-
3 3000 SY 3000 5000 7000
U Side 5 5000 M5 •
7 7000 C4 •
C6 • •
01F •
C8 • •
Accessory Replacement fittings C10 •
02F •

(LOU, MOU) Cable L= 0.6 m Cable L= 1 m Cable L= 2 m Cable L= 3 m
44
Solenoid Valves
Solenoid Valves Type of Part number Flow Operating Number of

Voltage
actuation Solenoid Valve l/min pressure range stations occupied
5 port, manifold type
Series SY3000•5000 5 port
SY3140-5FU-Q 255
0.15 ~ 0.7 MPa
1
24V DC
Single
SY5140-5FU-Q 687 1
SY3245-5FU-Q 255 2
5 port 24V DC
Double 0.1 ~ 0.7 MPa
SY5245-5FU-Q 687 2
5 port SY3345-5FU-Q 255 2

0.2 ~ 0.7 MPa 24V DC
Closed
center SY5345-5FU-Q 422 2 3
• Easily installed, internally wired to
5 port SY3445-5FU-Q 255 2
D-sub connector and field bus. 24V DC
Exhaust 0.2 ~ 0.7 MPa
Solenoid Valves
• Valves easily assembled/ center SY5445-5FU-Q 422 2
disassembled.
• Small, compact design. SY3545-5FU-Q
5 port 255 2
• Push-in fittings standard. 0.2 ~ 0.7 MPa 24V DC
Pressure
• Minimal, 10 ms. response times. center SY5545-5FU-Q 422 2
• Low power consumption, 0.35 W.
• Superior service life - at least
50 million switching cycles. Modular manifold
No. Item SY•SX3000 SY•SX5000
Ø 4 mm SX3000-50-20A-C4
Manifold SX3000-50-20A-C6 SX5000-50-20A-C6
1 Ø 6 mm
block ass’y SX5000-50-20A-C8
Ø 8 mm
2 SUP./EXH. block ass’y SX3000-51-2A SX5000-51-2A
3 End block ass’y D side SX3000-52-2A-Q SX5000-52-2A-Q
4 End block ass’y U side SX3000-53-2A-Q SX5000-53-2A-Q
5 Electr. D sub, SY SY3000-65-1NA- SY5000-65-1NA-
manifold (negative com.) (negative com.)
6 Blanking plate SX3000-75-2A-Q SX5000-76-2A-Q
7 Ø 4 mm VVQ1000-50A-C4
Replacement Ø 6 mm
VVQ1000-50A-C6 VVQ1000-51A-C6
fitting Ø 8 mm VVQ1000-51A-C8
8 DIN rail VZ1000-11-1-
For manifold Part no. and specification, please 9 Silencer AN203-KM8 AN300-KM10
contact SMC or consult SMC catalogue
** Length in mm
U Side r
D sub D sub
w SY: 06
* for 6 coils SX: 6* for 6 valves
10 for 10 coils 10 for 10 valves
15 for 15 coils
20 for 20 coils
Field bus upon request
SY
q
q
t
Mainfold release
Plug con- e
button
nection
Cover
for cable A
channel
D side

Accessory • D sub connector with cable
L= 3 m L= 5 m L= 8 m
GVVZS3000-21A-2 GVVZS3000-21A-3 GVVZS3000-21A-4
45
Solenoid Valves
Solenoid Valves 4 position Type of Part number Flow Operating pressure

Voltage
dual 3 port, 5 port, base type actuation Solenoid Valve l/min range (MPa)
Series SV1000•4000 5 port

SV1100-5FU
SV2100-5FU
280
570
0.15 ~ 0.7 24V DC
Single SV3100-5FU 1080
SV4100-5FU 1580
SV1200-5FU 280
5 port SV2200-5FU 570 24V DC
0.1 ~ 0.7
Double SV3200-5FU 1080
SV4200-5FU 1580
SV1300-5FU 270
5 port SV2300-5FU 334
Closed 0.2 ~ 0.7 24V DC
SV3300-5FU 653
center
3 • Internal wiring. SV4300-5FU 1472
• Easy to install. SV1400-5FU 280
• Valves easily assembled/ 5 port SV2400-5FU 352
Exhaust 0.2 ~ 0.7 24V DC
disassembled. SV3400-5FU 653
Solenoid Valves
center
• Small, compact design. SV4400-5FU 1380
• Push-in fittings standard. SV1500-5FU 383
• Minimal, 10 ms. response times. 5 port SV2500-5FU 705
Pressure 0.2 ~ 0.7 24V DC
SV3500-5FU 1138
• Low power consumption, 0.6 W. center SV4500-5FU 2204
• Superior service life - at least
4 pos. dual SV1A00-5FU 230
50 millon switching cycles. 3 port 0.15 ~ 0.7 24V DC
NC/NC SV2A00-5FU 470
4 pos. dual SV1B00-5FU 230
3 port 0.15 ~ 0.7 24V DC
NO/NO SV2B00-5FU 470
4 pos. dual SV1C00-5FU 230
3 port 0.15 ~ 0.7 24V DC
NC/NO SV2C00-5FU 470
Manifold for field bus upon request
For manifold Part no. and specification, please Accessory • Replacement fittings for A/B
contact SMC or consult SMC catalogue. One-touch fitting SV1000 SV2000 SV3000 SV4000
Ø 3.2 mm VVQ1000-50A-C3
Ø 4 mm VVQ1000-50A-C4
D sub connector Ø 6 mm VVQ1000-50A-C6 VVQ1000-51A-C6 VVQ2000-51A-C6
Ø 8 mm VVQ1000-51A-C8 VVQ2000-51A-C8 VVQ4000-50B-C8
Ø 10 mm VVQ2000-51A-C10 VVQ4000-50B-C10
Ø 12 mm VVQ4000-50B-C12
Manifold • D sub connector
SS5V * -10FD1-02B-C ** Manifold for 2 stations. Port ø **
Circular plug
* 1 for SV1000 ** 6 for SV1000: Ø 6 mm with A/B
2 for SV2000 8 for SV2000: Ø 8 mm with A/B
Manifold • Circular plug IP65

SS5V * -W10CD-02B-C ** Manifold for 2 stations. Port ø **
L= 3 m L= 5 m L= 8 m SS5V * -W10CD-03B-C ** Manifold for 3 stations. Port ø **
GVVZS3000-21A-2 GVVZS3000-21A-3 GVVZS3000-21A-4 SS5V * -W10CD-04B-C ** Manifold for 4 stations. Port ø **
Accessory • Circular plug with cable SS5V * -W10CD-07B-C ** Manifold for 7 stations. Port ø **
Cable L= 1.5 m L= 3 m L= 5 m SS5V * -W10CD-08B-C ** Manifold for 8 stations. Port ø **
GAXT100-MC26-015 GAXT100-MC26-030 GAXT100-MC26-050 Manifold for 10 stations. Port ø **
SS5V * -W10CD-10B-C **
Accessory • Field bus, see Field bus component p. SS5V * -W10CD-11B-C ** Manifold for 11 stations. Port ø **
3-17 SS5V * -W10CD-12B-C ** Manifold for 12 stations. Port ø **
* 1 for SV1000 ** 6 for SV1000: Ø 6 mm with A/B
46
Solenoid Valves
5 Port Solenoid Valve, Type of Part number Flow Operating pressure

Voltage
actuation Solenoid Valve range (MPa)
Metal seal / Rubber seal l/min
SQ1130-5-
Series SQ1000•2000 2 Position
*
SQ1131-5-
*
177 (Metal seal)
245 (Rubber seal)
0.1 ~ 0.7
0.15 ~ 0.7 24V DC
single SQ2130-5-
* 638 (Metal seal) 0.1 ~ 0.7
SQ2131-5-
* 805 (Rubber seal) 0.15 ~ 0.7
SQ1230-5-
* 177 (Metal seal) 0.18 ~ 0.7
2 Position SQ1231-5-
* 245 (Rubber seal) 0.18 ~ 0.7 24V DC
double SQ2230-5-
* 638 (Metal seal) 0.18 ~ 0.7
SQ2231-5- * 805 (Rubber seal) 0.18 ~ 0.7
SQ1330-5-
* 157 (Metal seal) 0.1 ~ 0.7
3 Position SQ1331-5-
* 177 (Rubber seal) 0.2 ~ 0.7 24V DC
closed SQ2330-5- 442 (Metal seal) 0.1 ~ 0.7
*
• Stacking manifold. centre
SQ2331-5-
* 490 (Rubber seal) 0.2 ~ 0.7 3
• Manifold mounted type.
SQ1430-5-
* 177 (Metal seal) 0.1 ~ 0.7
• Easy replacement of clip type 3 Position SQ1431-5- 245 (Rubber seal) 0.2 ~ 0.7
* 24V DC
One-touch fittings. exhaust
Solenoid Valves
centre SQ2430-5-
* 638 (Metal seal) 0.1 ~ 0.7
• Built-in back pressure check valve. SQ2431-5-
* 687 (Rubber seal) 0.2 ~ 0.7
• Connector entry Direction can be SQ1530-5-
* 157 (Metal seal) 0.1 ~ 0.7
changed with a single push. 3 Position SQ1531-5- 177 (Rubber seal) 0.2 ~ 0.7
pressure * 24V DC
• Unprecedented high speed response centre SQ2530-5-
* 442 (Metal seal) 0.1 ~ 0.7
and long service life. SQ2531-5-
* 490 (Rubber seal) 0.2 ~ 0.7
Dual 3 port SQ1A31-5- 177 (Rubber seal) 0.15 ~ 0.7
valve * 24V DC
N.C. SQ2A31-5- * 490 (Rubber seal) 0.15 ~ 0.7
Dual 3 port SQ1B31-5- * 177 (Rubber seal) 0.15 ~ 0.7
valve 24V DC
N.O. SQ2B31-5- * 490 (Rubber seal) 0.15 ~ 0.7
Dual 3 port SQ1C31-5- * 177 (Rubber seal) 0.15 ~ 0.7
valve 24V DC
N.C.+N.O. SQ2C31-5- * 490 (Rubber seal) 0.15 ~ 0.7

* A,B port:
C3 One touch fitting for ø3.2 Only for SQ1000
C4 One touch fitting for ø4
C6 One touch fitting for ø6
C8 One touch fitting for ø8 Only for SQ2000
M5 M5 thread Only for SQ1000
• How to order Manifold • ** Electrical entry:
SS5Q13 - * ** -D Lead wire
SS5Q23 - * ** -D Kit description connector Cable specification
entry
direction
U side FD0 D-sub connector (25P) kit, without cable
F kit
FD1 D-sub connector (25P) kit, with 1.5m cable
D side
•
* Stations: D side FD2 D-sub connector (25P) kit, with 3.0m cable
D-sub
01 1 station connector kit FD3 D-sub connector (25P) kit, with 5.0m cable
: : PD0 Flat ribbon cable (26P) kit, without cable
16 16 stations P kit
PD1 Note 1) Flat ribbon cable (26P) kit, with 1.5m cable
PD2 D side Flat ribbon cable (26P) kit, with 3.0m cable
PD3 Flat ribbon cable (26P) kit, with 5.0m cable
26P
Flat ribbon cable connector kit ( 20P ) PDC Flat ribbon cable (20P) kit, without cable
J kit
JD0 D side Flat ribbon cable (20P)

Flat ribbon PC Wiring System compatible
cable (20P)
(PC Wiring System compatible)
L kit LD0 D side

Lead wire kit, with 0.6m cable
LU0 U side
LD1 D side
LU1 U side
LD2 D side
Lead wire kit LU2 U side
S kit SDF NKE Corporation: Uni-wire System compatible

SDH NKE Corporation: Uni-wire H System compatible
SDJ1 SUNX Corporation: S-LINK System (16 outputs) compatible
SDJ2 D side SUNX Corporation: S-LINK System (8 outputs) compatible
SDQ DeviceNet, OMRON Corporation: CompoBus/D compatible
SDR1 OMRON Corporation: CompoBus/S (16 outputs) compatible
SDR2 OMRON Corporation: CompoBus/S (8 outputs) compatible
Serial transmission kit SDV Mitsubishi Electric Corporation: CC-LINK System compatible
47
Solenoid Valves
Solenoid Valves Type of Part number Flow Operating pressure Utisable cylinder
actuation Solenoid Valve range (MPa) bore size (mm)
4 position dual 3 port, 5 port l/min
manifold with connector VQC1101N-5 206 (Rubber seal) 0.15 ~ 0.7 up to ø50 mm.
VQC1100N-5 157 (Metal seal) 0.1 ~ 0.7
Series 2 Position
single
VQC2101N-5
VQC2100N-5
540 (Rubber seal)
451 (Metal seal)
0.15 ~ 0.7 up to ø80 mm.
0.1 ~ 0.7
VQC1000•2000•4000 VQC4101N-5 2061 (Rubber seal) 0.2 ~ 1.0 up to ø160 mm.
VQC4100N-5 1472 (Metal seal) 0.15 ~ 1.0
VQC1201N-5 206 (Rubber seal) 0.1 ~ 0.7 up to ø50 mm.
VQC1200N-5 157 (Metal seal) 0.1 ~ 0.7
2 Position VQC2201N-5 540 (Rubber seal) 0.1 ~ 0.7 up to ø80 mm.
double VQC2200N-5 451 (Metal seal) 0.1 ~ 0.7
3 VQC4200N-5 1472 (Metal seal) 0.15 ~ 1.0
Connector VQC1301N-5 157 (Rubber seal) 0.2 ~ 0.7 up to ø50 mm.
• Excellent response times. VQC1300N-5 157 (Metal seal) 0.1 ~ 0.7
3 Position
Solenoid Valves
closed VQC2301N-5 481 (Rubber seal) 0.2 ~ 0.7 up to ø80 mm.

• Long service life.
centre VQC2300N-5 451 (Metal seal) 0.1 ~ 0.7
• Compact design and superior flow rate. VQC4301N-5 1865 (Rubber seal) 0.2 ~ 1.0 up to ø160 mm.
• One-touch fitting can be changed with a VQC4300N-5 1472 (Metal seal) 0.15 ~ 1.0
single push.
VQC1400N-5 157 (Metal seal) 0.1 ~ 0.7
3 Position 481 (Rubber seal)
exhaust VQC2401N-5 0.2 ~ 0.7 up to ø80 mm.
centre VQC2400N-5 451 (Metal seal) 0.1 ~ 0.7
VQC4400N-5 1472 (Metal seal) 0.15 ~ 1.0
VQC1500N-5 157 (Metal seal) 0.1 ~ 0.7
3 Position VQC2501N-5 785 (Rubber seal)
pressure 0.2 ~ 0.7 up to ø80 mm.
Serial transmission centre VQC2500N-5 559 (Metal seal) 0.1 ~ 0.7
EX250 VQC4501N-5 1865 (Rubber seal) 0.2 ~ 1.0 up to ø160 mm.
VQC4500N-5 1865 (Metal seal) 0.15 ~ 1.0
Dual 3 port VQC1A01N-5 157 (Rubber seal) 0.15 ~ 0.7 up to ø50 mm.
valve
N.C. VQC2A01N-5 451 (Rubber seal) 0.15 ~ 0.7 up to ø80 mm.
Dual 3 port VQC1B01N-5 157 (Rubber seal) 0.15 ~ 0.7 up to ø50 mm.
valve
SI-unit for I/O N.O. VQC2B01N-5 451 (Rubber seal) 0.15 ~ 0.7 up to ø80 mm.
(Profibus, Devicenet,
CANopen, AS.i, etc.)
Dual 3 port VQC1C01N-5 157 (Rubber seal) 0.15 ~ 0.7 up to ø50 mm.
valve
N.C.+N.O. VQC2C01N-5 451 (Rubber seal) 0.15 ~ 0.7 up to ø80 mm.
Input blocks
How to Order Manifold
VV5QC 1 1 08 C6 FD0
Valve size Kit designation/Electrical entry
1 VQC1000 FD0 D-sub connector (25-pin)
2 VQC2000 MD0 Multipole connector (26-pin)
4 VQC4000 SD0 For serial unit EX250 (note 1) (note 2)
Stations Note 1) SI units and input blocks ordered
01 1 station separetly, see table 1.
Note 2) With SDO needed always 1 endplate
EX250-EA1.
12 12 station
For others contact local SMC. Table 1
EX250-SPR1 Profibus SI-unit
EX250-SDN1 DeviceNet SI-unit
Port size
EX250-SCA1A CANopen SI-unit
Port size VQC1000 VQC2000 VQC4000
EX250-SAS3 AS-i SI-unit (8 input/8 output) SI- units
C4 With ø4 One-touch fitting EX250-SAS5 AS-i SI-unit (4 input/4 output)
C6 With ø6 One-touch fitting EX250-SCN1 Control/Net
C8 With ø8 One-touch fitting EX250-SEN1 EtherNet/IP
C10 With ø10 One-touch fitting EX250-IE1 Input block 2 x M12 (2 input)
C12 With ø12 One-touch fitting EX250-IE2 Input block 2 x M12 (4 input)
02 Rc 1/4 EX250-IE3 Input block 4 x M8 (4 input) Input-blocks
03 Rc 3/8 EX250-EA1 Endplate
48
Solenoid Valves
5 Port Solenoid Valves, Type of Part number Seal Flow Operating

pressure range Voltage
internal wiring actuation Solenoid Valve type l/min (MPa)
Series VQ1000•2000 5 port

VQ1101N-5-Q
VQ1100N-5-Q
Rubber
Metal seal
295
166
0.15 ~ 0.7
0.1 ~ 0.7 24V DC
Single VQ2101N-5-Q Rubber 883 0.15 ~ 0.7
VQ2100N-5-Q Metal seal 785 0.1 ~ 0.7
VQ1201N-5-Q Rubber 295 0.1 ~ 0.7
5 port VQ1200N-5-Q Metal seal 166 0.1 ~ 0.7 24V DC
Double VQ2201N-5-Q Rubber 883 0.1 ~ 0.7
VQ2200N-5-Q Metal seal 785 0.1 ~ 0.7
VQ1301N-5-Q Rubber 295 0.2 ~ 0.7
5 port VQ1300N-5-Q Metal seal 166 0.1 ~ 0.7
Closed 24V DC
VQ2301N-5-Q Rubber 883 0.2 ~ 0.7
• All pilot valves on one side, meaning center
VQ2300N-5-Q Metal seal 785 0.1 ~ 0.7 3
3 sides have no ports - up to 45 % VQ1401N-5-Q 295 0.2 ~ 0.7
Rubber
space saving. 5 port VQ1400N-5-Q Metal seal 166 0.1 ~ 0.7 24V DC
Solenoid Valves
• Either on DIN rail or direct mounting. Exhaust VQ2401N-5-Q 0.2 ~ 0.7
Rubber 883
center
• Valves attached simply using a «one VQ2400N-5-Q Metal seal 785 0.1 ~ 0.7
screw-clamp» system. VQ1501N-5-Q Rubber 295 0.2 ~ 0.7
• Rubber and metal seal types 5 port VQ1500N-5-Q Metal seal 166 0.1 ~ 0.7 24V DC
available. Pressure VQ2501N-5-Q Rubber 883 0.2 ~ 0.7
center 0.1 ~ 0.7
• Long service life of at least 200m. VQ2500N-5-Q Metal seal 785
switching cycles e.g. with metal seal. Other voltages, plug connectors and port sizes available on request
• Multi-pin connection to valve block Accessory • Manifold • D sub connector
for simple electronic connection. VV5Q1-02C
* ** FUO-Q Manifold for 2 stations. Port ø **
• Short, 10 ms. response times. VV5Q1-03C
• Low power consumption, 1 W VV5Q1-04C
(0.5 W optional). VV5Q1-05C
• Wide range of options available, e.g. VV5Q1-06C
external pilot. VV5Q1-07C
VV5Q1-08C
VV5Q1-09C
VV5Q1-10C
* ** FUO-Q Manifold for 10 stationsPort ø **
VV5Q1-11C
VV5Q1-12C
VVQ000-10A-1
* Blanking plate
VVQ000-57A
* DIN rail mounting set
VZ1000-11-3- ** * Aluminum DIN rail
AN203-KM8/AN300-KM10 Silencer for VQ1000/VQ2000

* 1 for VQ1000
2 for VQ2000
For manifold Part no. and specification, please
contact SMC or consult SMC catalogue. ** 6 for VQ1000: Ø 6 mm with A/B
8 for VQ2000: Ø 8 mm with A/B
Manifold for field bus upon request
Accessory • Replacement fitting for A/B
Manual VQ1000 VQ2000
Example for options
override Vacuum unit ø 3.2 mm one-touch fitting VVQ1000-50A-C3
ø 4 mm one-touch fitting VVQ1000-50A-C4
Pressure Gauge Blanking plate ø 6 mm one-touch fitting VVQ1000-50A-C6 VVQ1000-51A-C6
ø 8 mm one-touch fitting VVQ1000-51A-C8
M5 mm one-touch fitting VVQ1000-50A-M5

L= 3.0 m L= 5.0 m L= 8.0 m
4 position dual 3 port function

Type of Part number Seal
actuation Solenoid Valve type
2 x 3 NC-NC VQ * A01N-5-Q
2 x 3 NO-NO VQ * B01N-5-Q Rubber
2 stations matching fitting
2 x 3 NC-NO VQ * C01N-5-Q
DIN rail * 1 for size 1000
90° plug connection 2 for size 2000
Additional SUP
90° plug connection Additional EXH
49
Solenoid Valves
5 Port Solenoid Valves, Type of Part number Seal Flow Operating

internal wiring actuation Solenoid Valve type l/min (MPa)
Series VQ4000•5000 5 port

VQ4101-5-Q
VQ4100-5-Q
Rubber
Metal
~ 2160
~ 1960
0.2 ~ 0.7
0.15 ~ 0.7 24V DC
Single VQ5101-5-Q Rubber ~ 4320 0.2 ~ 0.7
VQ5100-5-Q Metal ~ 3920 0.1 ~ 0.7
VQ4201-5-Q Rubber ~ 2160 0.15 ~ 0.7
5 port VQ4200-5-Q Metal ~ 1960 0.15 ~ 0.7 24V DC
Double VQ5201-5-Q Rubber ~ 4320 0.15 ~ 0.7
VQ5200-5-Q Metal ~ 3920 0.1 ~ 0.7
VQ4301-5-Q Rubber ~ 1960 0.2 ~ 0.7
5 port VQ4300-5-Q Metal ~ 1760 0.15 ~ 0.7
Closed 24V DC
VQ5301-5-Q Rubber ~ 3440 0.2 ~ 0.7
3 center
VQ5300-5-Q Metal ~ 3340 0.15 ~ 0.7
VQ4401-5-Q Rubber ~ 2160 0.2 ~ 0.7
5 port VQ4400-5-Q Metal ~ 1960 0.15 ~ 0.7
Exhaust 24V DC
Solenoid Valves
VQ5401-5-Q Rubber ~ 4320 0.2 ~ 0.7

center
VQ5400-5-Q Metal ~ 3920 0.15 ~ 0.7
VQ4501-5-Q Rubber ~ 2160 0.2 ~ 0.7
5 port VQ4500-5-Q Metal ~ 1960 0.15 ~ 0.7 24V DC
Pressure VQ5501-5-Q Rubber ~ 3440 0.2 ~ 0.7
center VQ5500-5-Q 0.15 ~ 0.7
• Compact design. Metal ~ 3340
• Superior flow capacity. Field bus, IP65 version available upon request
• 2 valve seal models
(elastomer or metal).
• Short switching times, 12 ms - 50 ms.
• Multi-pin plug connection with ready
made electrical connections to the
solenoid valves.
• IP65 possible.
• Integral push-in fittings mean
replacement is easy.
For manifold Part no. and specification, please

contact SMC or consult SMC catalogue.
D side U side
Modular manifold
No. Item VQ4000 VQ5000
1 End plate D side VVQ4000-3A-1-L VVQ5000-3A-1-L
2 End plate U side for D sub VVQ4000-2A-1-F VVQ5000-2A-1-F
Sub-plate Ø 10 mm VVQ40000-1A-F1-C10
Double-wiring Ø 3/8” VVQ40000-1A-F1-03F VVQ50000-1A-F1-03F
Ø 1/2” VVQ50000-1A-F1-04F
3
Sub-plate Ø 10 mm VVQ40000-1A-F2-C10
Single wiring Ø 3/8” VVQ40000-1A-F2-03F VVQ50000-1A-F2-03F
Ø 1/2” VVQ50000-1A-F2-04F
Replacement Ø 8 mm VVQ40000-50B-C8
4 fittings not available for
Ø 10 mm VVQ40000-50B-C10
VQ5000
Ø 12 mm VVQ40000-50B-C12

L= 3 m L= 5 m L= 8 m
50
Solenoid Valves
5 Port ISO 15407-2 Valves Type of Part number Operating Flow (l/min) Flow (l/min)
pressure Voltage Circuits Symbols
actuation Solenoid Valve range (MPa) (P → A,B) (A,B → EA,EB)
Size 01, Plug-in type
(A) (B)
2 VSS8-4-FG-S-3V-Q 0.1 ~ 1 704 772

Series VSR8-4•VSS8-4
4 2
single 24 VDC
VSR8-4-FG-S-3V-Q 0.15 ~ 1 904 1006 5 1 3
(R1) (P) (R2)
(A) (B) (A) (B)
2 VSS8-4-FG-D-3V-Q 0.1 ~ 1 704 772 metal 4 2 rubber 4 2
double 24 VDC
VSR8-4-FG-D-3V-Q 0.1 ~ 1 904 1006 5 1 3
(R1) (P) (R2)
5 1 3
(R1) (P) (R2)
3 VSS8-4-FHG-D-3V-Q 0.15 ~ 1 704 727

(A) (B)
4 2
closed 24 VDC
centre VSR8-4-FHG-D-3V-Q 0.2 ~ 1 835 1068 5 1 3
(R1) (P) (R2)
3 VSS8-4-FJG-D-3V-Q 0.15 ~ 1 613 749

(A) (B)
4 2
exhautst 24 VDC
centre VSR8-4-FJG-D-3V-Q 0.2 ~ 1 769 986 5 1 3
(R1) (P) (R2)
3
3 VSS8-4-FIG-D-3V-Q 0.15 ~ 1 727 727
(A) (B)
4 2
pressure 24 VDC
centre VSR8-4-FIG-D-3V-Q 0.2 ~ 1 1085 888 5 1 3
(R1) (P) (R2)
Solenoid Valves
Other types of actuation, voltages, plug connectors and port sizes available on request
Manifold variations
VV801--W1-Q
* Without SI/input block, kit designation ,
* stations
VV801-11-W1-Q
* With 1 input block, M12-2 inputs, kit designation , * stations
VV801-42-W1-Q
* With 4 input blocks, M12-4 inputs, kit designation , * stations
VV801-83-W1-Q
* With 8 input blocks, M8-4 inputs, kit designation , * stations
Kit designation
Max. no. of
Kit Kit, protocol, and cable lenght
stations/solenoids
FD0 1 to 12 stations / 24 D-sub connector kit (25P) without cable
PD0 1 to 12 stations / 24 Flat ribbon cable kit (26P) without cable
LD0 1 to 12 stations / 24 Lead wire kit (25 core)0.6m lead wire
MD0 1 to 12 stations / 24 Multiple connector kit (26P) without cable
• Conforming to ISO 15407-2.
TD0 1 to 10 stations / 20 Terminal block box kit
• IP65 enclosure protection: dust / SD0 1 to 12 stations / 24 Serial kit without SI unit
splashproof type. SDN 1 to 12 stations / 24 EX250 Serial kit for PROFIBUS DP
• Light weight (3-position: 0.26 kg). SDQ 1 to 12 stations / 24 EX250 Serial kit for DeviceNet
• Large capacity (1000 l/min ANR for a SDTA 1 to 4 stations / 8 EX250 Serial kit for AS-I 8 in/out, 31 slaves, 2 power supply systems
cylinder driving size of Ø100). SDTB 1 to 2 stations / 4 EX250 Serial kit for AS-I 4 in/out, 31 slaves, 2 power supply systems
SDTC 1 to 4 stations / 8 EX250 Serial kit for AS-I 8 in/out, 31 slaves, 1 power supply system
SDTD 1 to 2 stations / 4 EX250 Serial kit for AS-I 4 in/out, 31 slaves, 1 power supply system
SDY 1 to 12 stations / 24 EX250 Serial kit for CANopen
SDZCN 1 to 12 stations / 24 EX250 Serial kit for ControlNet
SDZEN 1 to 12 stations / 24 EX250 Serial kit for EtherNet/IP
SDA2 1 to 8 stations / 16 Ex500 Serial kit for DeviceNet, PROFIBUS DP
Manifold variations
VV801-P-03 Individual SUP spacer
VV801-R-03 Individual EXH spacer

VVS8040-ARB-A-1-X1S Interface regulator with short pressure gauge
VVS8040-ARB-B-1-X1S adapter and different regulation types
VSS8040-ARB-P-1-X1S (A, B, P ports)
VVS8040-ARB-A-1-X1L Interface regulator with long pressure gauge
VVS8040-ARB-B-1-X1L adapter and different regulation types
VSS8040-ARB-P-1-X1L (A, B, P ports)
VVS8040-11A Blanking plate
51
Solenoid Valves
5 Port Solenoid Valves, Type of Flow Operating

Part number Type pressure range Voltage
ISO 5599/I compliant actuation Solenoid Valve l/min (MPa)
Series VQ7-6/VQ7-8 5 port

VQ7-6-FG-S-3ZR-Q
VQ7-6-FG-S-3Z-Q
ISO1 rubber seal
ISO1 metal seal
1700
1500
0.2 ~ 0.7
0.15~1.0
24V DC
Single VQ7-8-FG-S-3ZR-Q ISO2 rubber seal 3200 0.2~1.0
VQ7-8-FG-S-3Z-Q ISO2 metal seal 3200 0.15~1.0
VQ7-6-FG-D-3ZR-Q ISO1 rubber seal 1700 0.15~1.0
5 port VQ7-6-FG-D-3Z-Q ISO1 metal seal 1500 0.15~1.0
24V DC
Double VQ7-8-FG-D-3ZR-Q ISO2 rubber seal 3200 0.15~1.0
VQ7-8-FG-D-3Z-Q ISO2 metal seal 3200 0.15~1.0
VQ7-6-FHG-D-3ZR-Q ISO1 rubber seal 1500 0.15~1.0
5 port
Closed VQ7-6-FHG-D-3Z-Q ISO1 metal seal 1400 0.15~1.0
24V DC
center VQ7-8-FHG-D-3ZR-Q ISO2 rubber seal 2800 0.15~1.0
3 • Latest valve technology with
VQ7-8-FHG-D-3Z-Q ISO2 metal seal 2800 0.15~1.0
standard port sizes.
VQ7-6-FJG-D-3ZR-Q ISO1 rubber seal 1700 0.15~1.0
• ISO1 and ISO2. 5 port
• Electrical connection via DIN plug Exhaust VQ7-6-FJG-D-3Z-Q ISO1 metal seal 1500 0.15~1.0
24V DC
Solenoid Valves
center VQ7-8-FJG-D-3ZR-Q ISO2 rubber seal 3200 0.15~1.0

connector or cable with M12 plug VQ7-8-FJG-D-3Z-Q ISO2 metal seal 3000 0.15~1.0
connector.
VQ7-6-FIG-D-3ZR-Q ISO1 rubber seal 1700 0.15~1.0
• Superior flow capacity. 5 port ISO1 metal seal
Pressure VQ7-6-FIG-D-3Z-Q 1500 0.15~1.0
• Enclosure IP65. 24V DC
center VQ7-8-FIG-D-3ZR-Q ISO2 rubber seal 3200 0.15~1.0
• Rubber and metal seals available. VQ7-8-FIG-D-3Z-Q ISO2 metal seal 3000 0.15~1.0
• Small, compact design, 5 port VQ7-6-FPG-D-3ZR-Q ISO1 rubber seal 1100 0.15~1.0
up to 13% smaller. Exhaust VQ7-6-FPG-D-3Z-Q ISO1 metal seal 1100 0.15~1.0
center 24V DC
with check VQ7-8-FPG-D-3ZR-Q ISO2 rubber seal 2200 0.15~1.0
valve VQ7-8-FPG-D-3Z-Q ISO2 metal seal 2200 0.15~1.0
O: for DIN connector
SC: with cable and M12 plug connector
Modular manifold
Item ISO1 ISO2
Left end plate G 3/8” EAXT502-LA-03

G 1/2” EAXT512-LA-04
Right end plate G 3/8” EAXT502-RA-03
G 1/2” EAXT512-RA-04
Manifold G 1/4” EAXT502-1A-A02
G 3/8” EAXT502-1A-A03 EAXT512-1A-A03
G 1/2” EAXT512-1A-A04
ISO1
ISO2
Accessory • Sub-plate
ISO1 ISO2
G 1/4” EVS7-1-A02F
G 3/8” EVS7-1-A03F EVS7-2-A03F
G 1/2” EVS7-2-A04F
G 3/4” EVS7-2-A06F
52
Solenoid Valves
ISO-CNOMO Function
Circuit Type of Operating Flow Port
Voltage *
Symbols actuation pressure range size
Solenoid Valves 5 port l/min
Series EVS7-6/8/10 5 Single ISO1:

ISO1: 1/4, 3/8, 1/2
24V DC
5 Double 1476 12V DC
Closed 0.1~1.0 MPa ISO2: 24V AC
5
center ISO2: 3/8, 1/2, 3/4 110V AC
Exhaust 3148
5 ISO3: 220V AC
center
Pressure 1/2, 3/4, 1
5
center
* other voltages upon request
• Standardized hole pattern for fixing, air 3
channels and standard pilot component.
• 3 types of series, for sizes I,II,III.
• Valves made with lapped metal seal for
Solenoid Valves
hash operating conditions.
• All 5 port functions possible.
• Universally connectable with standard
base plate.
MULTI-FUNCTIONAL ASSEMBLY POSSIBLE
• Broad range of accessories (speed • Compliant with ISO. Compliant with ISO • VDMA
controller, dual pressure system, etc.).
• Service life of over 100m. switching
WIDE RANGE OF ACCESSORIES
cycles.
Manifolds, individual exhaust
connections, blanking plates,
intermediate plates, modular
pressure regulator, and many
more.
Complies with VDMA24563 Superior flow.

and ISO15407-1 Excellent response time.
Series EVS1-01/02 Long service life (VQ100 pilot valve)
Enclosure IP65.
Metal or rubber seals for the main
valve,suitable for use in a variety of
operating conditions.
Electrical entry:
Type 01: M12 (5 pin)
Type 02: M8 (4 pin)
Rubber seal: Cv0.9 (900 l/min)
Size 01 (EVS1-01)
Metal seal: Cv0.6 (600 l/min) Switching time:
Rubber seal: Cv0.5 (500 l/min) EVS1-01 single/metal seal:
Size 02 (EVS1-02)
Metal seal: Cv0.3 (300 l/min)
20ms or less
EVS1-02 double/metal seal:
12ms or less
Service life: min 100m cycles
53
Solenoid Valves
Compliant with ISO5599/1

Series EVS7-6/8/10
Superior flow.
Low power consumption 1.8 W.
Enclosure IP65.
Metal or rubber seals for the main
valve, suitable for use in a variety
3 of operating environments and
Rubber seal: Cv1.1 (1100 l/min) conditions.
Size 1 (EVS7-6)
Metal seal: Cv0.9 (900 l/min) Electrical entry: M12 (5 pin).
Solenoid Valves
Rubber seal: Cv3 (3000 l/min) Service life: min 100m cycles.
Size 2 (EVS7-8)
Metal seal: Cv2.4 (2400 l/min)
Rubber seal: Cv4 (4000 l/min)
Size 3 (EVS7-10)
Metal seal: Cv3 (3000 l/min)
Super compact
Series VV061
Directly operated 3 port
solenoid valve.
Valve width 6 mm.
Variety of valve connection
options and systems.
Light weight - 4 g.
Super compact
2 port solenoid valve.
Series S070 Valve width 7 mm.
Low power consuption:
0.35 W (standard), 0.1 W (with power saving).
Flow from 6 l/min to 20 l/min.
Light weight - 5 g.
Manifolds easily assembled/disassembled.
Dimensions: Single valve
54
Solenoid Valves
SMC Field Bus Technology

Field bus Number of
Part number Connection Valve family Enclosure
system Outputs/Inputs
EX120/EX122
EX120-SDN1 direct SV/VQ
DeviceNet TM 16/- IP20
EX122-SDN1 direct SY
Field bus Number of

system Outputs/Inputs 3
EX180-SDN1 Max. 32/- direct SJ
EX180
EX180-SDN1A Max. 32/- direct SJ

DeviceNet TM IP40
Solenoid Valves
EX180-SDN2 Max. 16/- direct SJ
EX180-SDN2A Max. 16/- direct SJ
Field bus Number of

EX240
EX240-SPR1 PROFIBUS DP Max.32/32 direct VQ

IP65
EX240-SDN2 DeviceNetTM Max.32/32 direct VQ
Field bus Number of

EX250-SDN1 DeviceNetTM Max.32/32 direct SV/VQC
EX250-SPR1 PROFIBUS DP Max.32/32 direct SV/VQC
EX250-SCA1A Max.32/32 direct SV/VQC IP67
CAN Open
EX250
EX250-SEN1 Ethernet/IPTM Max.32/32 direct SV/VQC

EX250-SAS3 8/8 2 voltage supply direct SV/VQC
AS interface IP67
Field bus Number of

EX500-GPR1A PROFIBUS DP Max.64/64 Gateway system SV/VQC

EX500-GDN1 DeviceNetTM Max.64/64 Gateway system SV/VQC
EX500
EX500-SEN1 Ethernet/IPTM Max.64/64 Gateway system SV/VQC IP65

EX500-S001 (*) SMC internal 16/16 direct SV
EX500-Q001 (*) SMC internal 16/16 direct VQC
(*) Only in connection with EX500 - GPR1A or EX500 - GDN1
Field bus Number of

EX510-GPR1 PROFIBUS DP Max.64/64 Gateway system SY/SJ/SZ/SQ/VQ

EX510-GDN1 DeviceNetTM Max.64/64 Gateway system SYJ/S0700/VQZ
EX510
EX510-S001 SMC internal 16/16 direct SY/SYJ/S0700/VQZ

IP20
EX510-S002A SMC internal 16/16 direct SY/VQ
EX510-S002B SMC internal 16/16 direct SZ/SQ
EX510-S002C SMC internal 16/16 direct SJ
Modular input units
Number of Max.units to
Part number Series
Inputs/Unit be combined
EX250-IE1 2 (M12) 16 SV/VQC
EX250-IE2 4 (M12) 8 SV/VQC
EX250-IE3 4 (M8) 8 SV/VQC
55
Solenoid Valves
3
Solenoid Valves
Gateway
System
EX500
Serial Transmission System
56
Solenoid Valves
No. Item Part number
1 Input unit EX500-IB1 Max.16 inputs

2 Input block EX500-IE3 2 (M12) inputs
5 Output block EX9-OEP2 2 NPN output (+COM.)
6 Power block EX9-PE1 Max. 8 outputs block stations
7
8
End plate
End plate
EX500-EB1
EX9-EA03
3
9 DIN Rail VZ1000-11-1-
= number of stations
Solenoid Valves
10 Communication connector EX9-AC020EN-PSRJ M12 plug (straight) - RJ-45 connector
11 Cable with M12 connector EX500-AC-SAPA Straight connector type 8-pins
EX500-AC-SSPS Straight connector type 8-pins
Power cable with connector (for GW unit) EX500-AP-S Straight connector type
12
EX500-AP-A Angle connector type
13 Waterproof cap EX500-AWES M8 connector for socket
14 Waterproof cap EX500-AWTS M12 connector for socket
15 Waterproof cap EX500-AWTP M12 connector for plug
16 Terminal plug input unit EX500-AC000-S M12
= Cable length (l)
11 003 = 300 mm 12 010 = 1000 mm
005 = 500 mm 050 = 5000 mm
010 = 1000 mm
030 = 3000 mm
050 = 5000 mm
57
Process Valves
Process Valves
Process Valves
59
Process Valves
Valve Selection based on the Process Fluid

IMPORTANT:
When choosing a process valve it is not only mere chemical compatibility of the materials which has to be taken into
consideration but rather the design and the valve's operating mechanism. A solenoid valve, for example, will not
operate correctly with highly viscous fluids in spite of being made with materials which are chemically compatible.
(The selection is a guide. Specific process conditions can render an initially valid option inadequate)
MATERIALS
RECOMMENDED MODELS BODY SEALS
BRASS/BRONZE/IRON
STAINLESS STEEL
3
ALUMINIUM
operated
operated
operated
PTFE
direct
FPM
EPR
NBR
pilot
air
Process Valves
Fluid
VCA,VDW VXD,VXZ VNB Air
VX, VCA VXZ VNB Low Vacuum (1torr)
VDW VXZ VNB Vacuum
VX VXD, VXZ VNB Ethyl Alcohol (2)
VX VXD, VXZ VNB Ethylene Glycol
VX VXD, VXZ VNB Trichloroethane
VX VXD, VXZ VNB Trichloroethylene
VX VXD, VXZ VNB Perchloroethylene
VX VXD, VXZ VNB Caustic Soda (25%)
VX VXD, VXZ VNB Argon
VX VXD, VXZ VNB Helium
VCA VXD, VXZ VNB Nitrogen Gas
VX VXD, VXZ VNB Carbon Dioxide
VCL VXD, VXZ VNB Light Oil
VCL VXD, VXZ VNB Silicone Oil (1)
VX VXD, VXZ VNB Brake Fluid
VX VXD, VXZ VNB Fuel oil
VCL VXD, VXZ VNB Heavy Oil (1)
VCL VXD, VXZ VNB Kerosene
VX VXD, VXZ VNB Naphta
VCW, VDW VXD, VXZ Fresh Water
VCW, VDW VXD, VXZ VNB Water
VCB VXD, VXZ VNB Water at a high Temperature (up to 99°C)
SGC SGCA Coolants
VCS VND Steam
Recommended options, consult other combinations.

(1) Operating with solenoid valves, the viscosity cannot exceed 50 centistokes.
(2) Highly flammable fluids. When possible, use metal body and connect to an earth wire to avoid an accumulation of
static electricity.
Directly operated valves P. 2 to 6

Series: VX2, VCA, VCB, VCL, VCS, VCW, VDW10/20/30, VDW200/300, VX3
Pilot operated valves P. 7 to 9
Series: VXD, VXZ, VXP, VXR, VXH, VXF
Air operated valves P. 10 to 12
Series: VXA2, VXA3, VNA, VNB, VND, VXFA
Specific application valves P. 13 to 20
Series: VQ20/30, PVQ, SGC/SGCA, VCH41/42/410, VCH, VCHR30/40, VCHN3/4, LVA, LVC, LVH, LVD, LVQ, LVM
Applicable fluids for high purity valves. P. 20
60
Process Valves
Solenoid direct operated valves

2 Port Solenoid Valve These models are suitable for water, oil, low vacuum and air ∗
Directly Operated Func- Q Kv
Maximun
differential Port Body/Seal
Part number 3 size Voltage
tion [Nl/min] [m /h] pressure material
Series VX2 [MPa]
VX2110A-01F-5D1 167 0.15 1.5
G1/8”
VX2120A-01F-5D1 324 0.28 0.5 24 VDC
VX2220A-02F-5D1 324 0.28 1.2
G1/4”
2 N.C. VX2230A-02F-5D1 599 0.52 0.3 Brass/FKM
VX2110A-01F-JDR1 167 0.15 1.5
G1/8” 230 VAC
VX2120A-01F-JDR1 324 0.28 0.5
(with built-in full
VX2220A-02F-JDR1
VX2230A-02F-JDR1
324
599
0.28
0.52
1.2
0.35
G1/4”
wave rectifier) 3
∗ For steam and medium vacuum applications, please select the suitable materials from the catalogue.
Process Valves
Accessory - DIN plug connector
Without indicator light and With indicator light and With indicator light and
without protective circuit 24VDC protective circuit 230VAC protective circuit
A0 A6 A7
• For air, water, oil, steam. Bracket Part Number

• Built-in full-wave rectifier type is now available. Model Part number
• Solenoid valves for various fluids used in a VX21(1,2,3)0 VX021N-12A
wide variety of applications. VX2(2,3)(2,3,4)0 VX022N-12A
• Reduction of power consumption.
• Improvement of corrosion resistance.
• Coil materials comply with UL94V-O - flame
resistant.
• Low-noise construction.
• Enclosure IP65.
• Improvement of maintenance performance.
• May be mounted on manifold.
• Body materials: Brass or Stainless steel.
• Seal materials: NBR, FKM, EPDM or PTFE.
• Other voltages available (AC, DC).
2 Port Solenoid Valve These models are suitable for air, inert gas and low vacuum
Directly Operated Func- Q
Maximun
Part number size Voltage
tion [Nl/min] pressure material
Series VCA [MPa]
VCA21-5D-3-02F-Q 324 1.0
G1/4”
VCA31-5D-4-02F-Q 540 1.0 24 VDC
VCA41-5D-5-03F-Q 788 1.0 G3/8”
2 N.C. AI/HNBR
VCA21-36D-3-02F-Q 324 1.0
G1/4”
VCA31-36D-4-02F-Q 540 1.0 230 VAC
VCA41-36D-5-03F-Q 788 1.0 G3/8”

A0 A6 A7
Bracket Part Number

• Improved durability. Model Part number
• Compact and lightweight. VCA21 VCA20-12-1A
• Electrical entry available from four directions: VCA31 VCA30-12-1A
4 x 90º turnable coils. VCA41 VCA40-12-1A
• Enclosure IP65.
resistant.
• Built-in rectifying circuit for the AC spec
(noise and burn-out prevention).
• Body material: Aluminium.
• Seal material: HNBR.
61
Process Valves
2 Port Solenoid Valve These models are suitable for heated water (up to 99ºC)
Maximun
Part number Voltage
tion [Nl/min] [m3/h] pressure size material
Series VCB [MPa]
VCB21-36T-3-02F-N-Q 324 0.28 0.8 G 1/4’’
2 N.C. VCB31-36T-4-03F-N-Q 530 0.46 0.8 G 3/8’’ 230 VAC SUS/FKM
VCB41-36T-5-03F-N-Q 834 0.73 0.7 G 3/8’’
Bracket Part Number

Model Port size Part number
VCB21 1/8, 1/4 VCW20-12-01A
VCB31 1/4, 3/8 VCW30-12-02A
VCB41 1/4, 3/8 VCW40-12-02A
3
Process Valves
• Improved durability.
• Compact and lightweight
• Ease of maintenance: Clip design to replace
the coil.
• Improved corrosion resistance Enclosure IP65).
resistant.
• Body material: Brass or Stainless steel.
• Seal material: EPDM or FKM.
• Other voltages available (AC).
2 Port Solenoid Valve These models are suitable for oil (kerosene, fuel oil, machine and
Directly Operated compressor oil, hydraulic fluid, gas oil, turbine oil)
Maximun
Series VCL Func-
tion Part number Q
[Nl/min]
Kv differential
[m3/h] pressure
[MPa]
Port
size Voltage Body/Seal
material
VCL21-5D-3-02F-Q 324 0.28 0.8 G1/4”

2 N.C. VCL31-5D-4-03F-Q 530 0.46 0.8 24 VDC Brass/FKM
G3/8”
VCL41-5D-5-03F-Q 834 0.73 0.7

Without indicator light and With indicator light and
without protective circuit 24VDC protective circuit
A0 A6
Bracket Part Number

VCL21 1/8, 1/4 VCW20-12-01A
VCL31 1/4, 3/8 VCW30-12-02A
• Improved durability. VCL41 3/8 VCW40-12-02A
• High speed response.
• Compact and lightweight.
the coil.
• Built-in surge voltage suppressor.
• Improved corrosion resistance Enclosure IP65.
resistant.
• Viscosity: up to 50 mm2/s.
• Seal material: FKM.
62
Process Valves
2 Port Solenoid Valve These models are suitable for steam (up to 184ºC)
Maximun
Part number Voltage
Series VCS [MPa]
VCS21-36TL-2-01F-Q 157 0.14 1 G1/8”
VCS31-36TL-3-02F-Q 785 0.69 0.5
G1/4”
2 N.C. VCS31-36TL-4-02F-Q 344 0.30 1 230 VAC Brass/PTFE
VCS31-36TL-5-03F-Q 530 0.46 0.8
G3/8”
VCS41-36TL-5-03F-Q 834 0.73 0.7
Bracket Part Number

VCS21 1/8, 1/4 VCW20-12-01A
VCS31 1/4, 3/8 VCW30-12-02A 3
VCS41 1/4, 3/8 VCW40-12-02A
Process Valves
• Compact and lightweight
the coil.
resistant.
• Seal material: PTFE or FKM.
2 Port Solenoid Valve These models are suitable for water and deionized water (industry use)
Directly Operated Maximun
Func- Q Kv differential Port Voltage Body/Seal
Part number
Series VCW [MPa]
VCW21-5D-2-01F-A-Q 157 0.14 2 G1/8”
VCW21-5D-3-02F-A-Q 324 0.29 0.8
VCW21-5D-4-02F-A-Q 501 0.43 0.5 G1/4”
24 VDC
VCW31-5D-5-02F-A-Q 785 0.69 0.5
VCW31-5D-5-03F-A-Q 785 0.69 0.5
G3/8”
VCW41-5D-5-03F-A-Q 834 0.73 0.7
2 N.C. Brass/FKM
VCW21-36D-2-01F-A-Q 157 0.14 2 G1/8”
VCW21-36D-3-02F-A-Q 324 0.29 0.8
VCW21-36D-4-02F-A-Q 501 0.43 0.5 G1/4”
230 VAC
VCW31-36D-5-02F-A-Q 785 0.69 0.5
VCW31-36D-5-03F-A-Q 785 0.69 0.5
G3/8”
VCW41-36D-5-03F-A-Q 834 0.73 0.7

• Improved durability. without protective circuit 24VDC protective circuit 230VAC protective circuit
A0 A6 A7
the coil.
Bracket Part Number
• Built-in surge voltage suppressor.
VCW21 1/8, 1/4 VCW20-12-01A
• Coil materials comply with UL94V-O - flame VCW31 1/4, 3/8 VCW30-12-02A
resistant. VCW31 1/2 VCW30-12-04A
• Body material: Brass or Stainless steel. VCW41 3/8 VCW40-12-02A
• Seal material: NBR, EPDM, PTFE or FKM.
63
Process Valves
2 Port Solenoid Valve These models are suitable for water, deionized water (industry use),
Directly Operated Poppet air and low vacuum
Maximun
Series VDW10/20/30 Func-
tion Part number Q
[Nl/min]
Kv differential
[m3/h] pressure
Port
material
[MPa]
VDW11-5G-1-M5-A-Q 30 0.03 0.9 M5

VDW21-5G-1-01F-A-Q 69 0.07 0.7
G1/8” 24 VDC Brass/FKM
2 N.C. VDW21-5G-2-01F-A-Q 177 0.16 0.4
VDW31-5G-3-02F-A-Q 275 0.24 0.4 G1/4”
Bracket Part Number

Model Part number
VDW11 VDW10-15A-1
3 VDW21 VDW20-15A-1
VDW31 VCW20-12-01A
Process Valves

• Highly compact valve owing to its mold coil
design.
the coil.
• Built-in rectifier for the AC specification.
• Seal material: NBR or FKM.
3 Port Solenoid Valve These models are suitable for water, deionized water (industry use),
Directly Operated Poppet air and low vacuum
Maximun
Series VDW200/300 Func-
tion Part number Q
[Nl/min]
Kv differential
[m3/h] pressure
Port
material
[MPa]
VDW250-5G-1-M5-A-Q 32 0.03 0.9 M5
VDW250-5G-2-01F-A-Q 88 0.07 0.7 G1/8” Brass/FKM
VDW350-5G-2-02F-A-Q 155 0.14 0.8
3 C.O. G1/4” 24 VDC
VDW350-5G-3-02F-A-Q 299 0.24 0.4
VDW250-5G-2-01F-H-Q 88 0.07 0.7
G1/8” SUS/FKM
VDW350-5G-3-01F-H-Q 299 0.24 0.4
Bracket Part Number

Model Part number
VDW250 VDW20-15A-1
VDW350 VCW20-12-01A

• Improved durability .
• Highly compact valve owing to its mold coil
design.
the coil.
• Built-in rectifier for the AC specification.
• Seal material: NBR or FKM.
64
Process Valves
3 Port Solenoid Valve These models are suitable for water, oil, low vacuum and air ∗
Directly Operated Poppet Func- Q Kv
Maximun
Part number Voltage
Series VX3 [MPa]
VX3114A-01F-5D1 79 0.070.6 G1/8”
VX3114A-02F-5D1 79 0.070.6
VX3224A-02F-5D1 186 0.160.6 G1/4” Brass/FKM
VX3324A-02F-5D1 186 0.16 1
3 C.O. VX3334A-03F-5D1 324 0.280.6 G3/8”
24 VDC
VX3114V-01F-5D1 79 0.070.6
G1/8”
VX3124V-01F-5D1 157 0.140.3
VX3234V-02F-5D1 324 0.280.3 Brass/FKM
G1/4” (non-leak)
VX3344V-02F-5D1 491 0.430.3
VX3344V-03F-5D1 491 0.430.3 G3/8” 3
∗ For steam and medium vacuum applications, please select the suitable materials from the catalogue.
Process Valves
A0 A6

resistant.
• Enclosure IP65.
• May be mounted on manifold.
• Seal materials: NBR, FKM, EPDM or PTFE.
65
Process Valves
Diaphragm pilot operated valves

2 Port Solenoid Valve These models are suitable for air, inert gas, water and oil
Pilot Operated diaphragm type ∗ Minimun pressure differential = 0.02 MPa.
Maximun
Series VXD Func-
tion Part number Q
[Nl/min]
Kv differential
[m3/h] pressure
[MPa]
Port
material
VXD2130A-02F-5D1 1865 1.64 0.5 G1/8”

VXD2130A-03F-5D1 2356 2.07 0.5 G3/8”
VXD2130A-04F-5D1 2356 2.07 0.5 G1/2” 24 VDC
VXD2140A-04F-5D1 5398 4.64 1.0
VXD2150A-06F-5D1 9324 8.21 1.0 G3/4”
VXD2260A-10F-5D1 12269 11.07 1.0 G1”
3 2 N.C.
VXD2130A-02F-JDR1 1865 1.64 0.7 G1/4”
Brass/FKM
VXD2130A-03F-JDR1 2356 2.07 0.7 G3/8”

VXD2130A-04F-JDR1 2356 2.07 0.7 230 VAC
G1/2” (with built-in full
VXD2140A-04F-JDR1 5398 4.64 1.0
Process Valves
wave rectifier)
VXD2150A-06F-JDR1 9324 8.21 1.0 G3/4”
VXD2260A-10F-JDR1 12269 11.07 1.0 G1”

• Reduction of power consumption. Without indicator light and With indicator light and With indicator light and
• Enclosure IP65. A0 A6 A7
• Coil materials comply with UL94V-O - flame resistant.
• Built-in full-wave rectifier available for AC
Class B coils.
• Seal materials: NBR, FKM or EPDM.
2 Port Solenoid Valve These models are suitable for water, oil, inert gas, air and low vacuum
Pilot Operated diaphragm type Func- Q Kv
Maximun
Part number 3 size Voltage
tion [Nl/min] [m /h] pressure material
Series VXZ [MPa]
VXZ2230A-02F-5D1 1865 1.63 0.7 G 1/4’’
VXZ2230A-03F-5D1 2356 2.06 0.7 G 3/8’’
VXZ2240A-04F-5D1 5202 4.56 0.7 G 1/2’’ 24 VDC
VXZ2350A-06F-5D1 9030 7.91 0.7 G 3/4’’
VXZ2360A-10F-5D1 11778 10.32 0.7 G 1’’ Brass/FKM
VXZ2230A-02F-JDR1 1865 1.63 0.7 G 1/4’’
2 N.C.
VXZ2230A-03F-JDR1 2356 2.06 0.7 G 3/8’’ 230 VAC
VXZ2240A-04F-JDR1 5202 4.56 0.7 G 1/2’’ (with built-in full
wave rectifier)
VXZ2350A-06F-JDR1 9030 7.91 0.7 G 3/4’’
VXZ2360A-10F-JDR1 11778 10.32 0.7 G 1’’

A0 A6 A7
• Zero differential pressure valve.

• Enclosure IP65.
• Coil materials comply with UL94V-O - flame resistant.
• Built-in full-wave rectifier available for AC
Class B coils.
• Seal materials: NBR, FKM or EPDM.
66
Process Valves
2 Port Solenoid Valve These models are suitable for air and water ∗
Pilot Operated Func- Q Kv
Maximun
Part number Voltage
Series VXP [MPa]
VXP2140S-04F-4T1-X53-Q 5202 4.56 1 G 1/2’’
VXP2150S-06F-4T1-X53-Q 9030 7.91 1 G 3/4’’ 220 VAC Brass/PTFE
2 N.C.
VXP2260S-10F-4T1-X53-Q 11778 10.32 1 G 1’’
VXP2380-14F-5D-Q 30427 26.66 1 G 1 1/2’’ 24 VDC Brass/NBR
∗ For steam and oil applications, please select the suitable materials from the catalogue.
Process Valves
• Easy to disassemble and reassemble in a
short time.
2 Port Solenoid Valve These models are suitable for water and oil (up to 60ºC)
Maximun
Pilot Operated Func- Part number Kv differential Port Voltage Body/Seal
tion 3
[m /h] pressure size material
Series VXR VXR2150-06F-4D-Q 6.45
[MPa]
1 G 3/4’’ 220 VAC
VXR2150-04F-5D1-X602-Q 5.59 1 G 1/2’’ 24 VDC
2 N.C. VXR2270-12F-BDR1-X602-Q 18.92 1 G 1/2’’ Brass/NBR
24 VAC
VXR2380-14F-BDR1-X602-Q 25.80 1 G 1 1/4’’ (built-in rectifier)
VXR2390-20F-BDR1-X602-Q 41.28 1 G 1 1/4’’
• Water hammer relief provided.

short time.
67
Process Valves
2 Port Solenoid Valve These models are suitable for air, water, steam and oil - High pressure
Pilot Operated diaphragm type applications (2 MPa)
Maximun
Series VXH Func-
tion Part number Q
[Nl/min]
Kv
3
differential
[m /h] pressure
Port
material
[MPa]
VXH2230-02-4D-Q 1865 1,63 2 Rc 1/4’’

2 N.C. VXH2230-03-4D-Q 2356 2,06 2 Rc 3/8’’ 220 VAC Brass/CR
VXH2230-04-4D-Q 2356 2,06 2 Rc 1/2’’
3
Process Valves
• High pressure applications (2 MPa).

• Body material: Brass.
• Seal material: NBR.
2 Port Solenoid Valve These models are suitable for air (dust collector)
Maximun
Pilot Operated diaphragm type Func- Part number Q differential Port Voltage Body/Seal
tion [Nl/min] pressure size material
Series VXF VXF2150-06-5DS-Q 9255
[MPa]
0.7
Rc 3/4’’
VXF2150-06-5DO-Q 9255 0.7 24 VDC Aluminium /
2 N.C.
VXF2160-10-5D-Q 17965 0.7 NBR
Rc 1’’
VXF2160-10-9D-Q(AC24V) 17965 0.7 24 VAC
• Silencer option available (19 dB or more).
68
Process Valves
Air operated valves

2 Port Valve These models are suitable for air, inert gas, low vacuum and water ∗
Air Operated Maximun
Func- Q Kv differential Port Body/Seal
tion Part number [Nl/min] [m3/h] pressure size material
Series VXA2 [MPa]
VXA2120-01F-1 382 0.28 1 G 1/8’’
VXA2130-02F-1 736 0.52 0.5
VXA2230-02F-1 736 0.52 1 G 1/4’’ Brass/NBR
VXA2240-02F-1 970 0.95 0.6
VXA2240-03F-1 970 0.95 0.6 G 3/8’’
2 N.C.
VXA2120V-01F-1 382 0.28 1 G 1/8’’
VXA2130V-02F-1
VXA2230V-02F-1
736
736
0.52
0.52
0.5
1 G 1/4’’
Brass/FKM 3
(non-leak)
VXA2240V-02F-1 970 0.95 0.6
VXA2240V-03F-1 970 0.95 0.6 G 3/8’’
Process Valves
∗ For oil and medium vacuum applications, please select the suitable materials from the catalogue.
Bracket Part Number

Model Part number
VXA2120, VX2130 VX070-020
VXA2230, VXA2240 VX070-022
• For high viscosity fluids (500 cSt)

short time.
• Free take off direction pilot port.
• Seal material: NBR, EPDM or FKM.
3 Port Valve These models are suitable for air, inert gas, low vacuum and water ∗
Func- Q Kv differential Port Body/Seal
tion Part number [Nl/min] 3
[m /h] pressure size
Series VXA3 [MPa]
material
VXA3114-01F 75 0.07 1
G 1/8’’
VXA3124-01F 148 0.14 0.5
VXA3134-02F 196 0.21 0.3 Brass/NBR
G 1/4’’
VXA3234-02F 271 0.28 0.6
VXA3244-03F 383 0.43 0.3 G 3/8’’
3 C.O.
VXA3114V-01F 75 0.07 1
G 1/8’’
VXA3124V-01F 148 0.14 0.5
Brass/FKM
VXA3134V-02F 196 0.21 0.3 (non-leak)
G 1/4’’
VXA3234V-02F 271 0.28 0.6
VXA3244V-03F 383 0.43 0.3 G 3/8’’
∗ For oil and medium vacuum applications, please select the suitable materials from the catalogue.
• For high viscosity fluids (500 cSt).

short time.
• Free take off direction pilot port.
• Seal material: NBR, EPDM or FKM.
69
Process Valves
2 Port Valve These models are suitable for compressed air, air-hydro circuit control
Air Operated (Ar, He, N2, CO2,Turbine oil, Freon® 11, 113, 114 and hydraulic fluids
up to 99ºC)
Series VNA Applicable
Func- Q Kv pressure Port Body/Seal
tion Part number [Nl/min] [m3/h] size
range material
[MPa]
VNA101B-F6A 687 0.76 G 1/8’’
VNA101B-F8A 1276 1.29 G 1/4’’
VNA101B-F10A 1963 1.63
G 3/8’’
VNA201B-F10A 3730 3.27
VNA201B-F15A 4908 4.13 G 1/2’’
2 N.C. 0 to 1 Aluminium / FKM
VNA301B-F20A 7852 6.45 G 3/4’’
3 VNA401B-F25A 11778
17667
10.32
15.48
G 1’’
G 1 1/4’’
VNA501B-F32A
VNA601B-F40A 27482 24.08 G 1 1/2’’
VNA701B-F50A 42204 36.98 G 2’’
Process Valves
• The balanced poppet permits normal and

reverse flow.
• Operation from 0 MPa is possible.
• Seal material: NBR, EPR or FKM.
2 Port Valve These models are suitable for a wide variety of fluids (air, water, heated
Air Operated water, oil, inert gas and low vacuum)
Applicable
Series VNB Func-
tion Part number Q
[Nl/min]
Kv
[m3/h]
pressure
range
Port
size
Body/Seal
material
[MPa]
VNB104B-F6A 687 0.6 G 1/8”
VNB104B-F8A 984 0.86 G 1/4”
VNB204B-F10A 2460 2.15 G 3/8”
VNB204B-F15A 3000 2.15 G 1/2”
VNB304B-F20A 4909 4.29 G 3/4”
Bronze/FKM
2 N.C. VNB404B-F25A 6878 6.01 Low G 1”
(1 MPa) VNB504B-F32A 10803 9.44 vacuum G 1 1/4”
VNB604B-F40A 18654 16.3 to 1 G 1 1/2”
VNB704B-F50A 28473 24.88 G 2”
VNB104BS-F8A 982 1.04 G 1/4’’
VNB204BS-F10A 2454 2.54 G 3/8’’ Stainless
VNB204BS-F15A 2945 2.71 G 1/2’’ Steel/FKM
VNB304BS-F20A 4908 5.00 G 3/4’’
• Body material: Bronze, Aluminium or

Stainless steel.
• Seal material: NBR, EPR or FKM.
70
Process Valves
2 Port Valve These models are suitable for steam up to 180 ºC

Air Operated Applicable
Port
Func- Part number Q Kv pressure Body/Seal
tion [Nl/min] [m3/h] range size material
Series VND [MPa]
VND104D-F8A-L 982 10.00 G 1/4’’
VND200D-F15A-L 4908 46.43 G 1/2’’
VND300D-F20A-L 7852 85.71 G 3/4’’
2 N.C. VND400D-F25A-L 11778 135.71 G 1’’ Bronze / PTFE
VND500D-F32A-L 17667 157.14 G 1 1/4’’
0 to 0.97
VND600D-F40A-L 27482 328.57 G 1 1/2’’
VND700D-F50A-L 43305 535.71 G 2’’
Process Valves
• PTFE seal for steam related applications.
• With operation confirmation indicator light.
• Body material: Bronze or Stainless steel.
• Seal material: PTFE.
2 Port Valve These models are suitable for air (dust collector)
Func- Q differential Port Body/Seal
Part number size
Series VXFA tion [Nl/min] pressure
[MPa]
material
VXFA2150-06 9255 1 Rc 3/4’’

2 N.C. VXFA2160-10 17965 1 Rc 1’’ Aluminium / NBR
VXFA2280-14 44096 1 Rc 1 1/2’’
71
Process Valves
Specific applications valves

2 Port Solenoid Valve These models are suitable for dry air, air and inert gas
Specific Application Valves Max. Min.
Func- Q Operating Operating Tube Body/Seal
Pilot Operated tion Part number [Nl/min] Pressure Pressure connection Voltage
[Ø mm]
Wiring material
[MPa] [MPa]
Series VQ20/30 VQ21A1-5Y-C6-Q 393

491
0,6
6 YO
(DIN
VQ21A1-5Y-C8-Q 0.01 8 Resin/
2 N.C. VQ31A1-5Y-C10-Q 24VDC terminal
785 10 without HNBR
0,5 connector)
VQ31A1-5Y-C12-Q 981 12
3
Process Valves
• High frequency operation.

• Long operating life.
• Easy piping with one-touch fittings.
• Enclosure IP65.
• Single and manifold body type options available.
• Full wave rectifier and power-saving circuit
options available.
• Body material: Resin (PBT).
• Seal material: NBR.
2 Port Solenoid Valve These models are suitable for air and inert gas. Vacuum applications
Specific Application Valves possible.
Proportional Solenoid Valve Func- Part number Flow rate Max.operating Port Voltage Valve type Body/Seal
Flow rate smoothly controlled by electric current tion [Nl/min] pressure diff. size material
[MPa]
adjustment.
PVQ13-5L-03-M5-A 0 to 5 0.7
Series PVQ PVQ13-5L-04-M5-A
PVQ13-5L-06-M5-A
0 to 6
0.45
0.2
M5 Base mounted
PVQ13-5L-08-M5-A 0 to 5 0.1
PVQ31-5G-16-01F 0.7 24 VDC Brass/FKM
0 to 100
2 N.C. PVQ31-5G-23-01F 0.35 Body ported
PVQ31-5G-40-01F 0 to 75 0.12 G 1/8”
PVQ33-5G-16-01F 0.7
0 to 100
PVQ33-5G-23-01F 0.35 Base mounted
PVQ33-5G-40-01F 0 to 75 0.12
• Compact format.
• Improved operation life.
• Low leakage.
• Operation noise during opening/closing of
the valve reduced.
• Base mounted and body ported configurations.
• Body material: Brass or Stainless steel
(Only PVQ30).
• Seal material: FKM.
• Other voltages available (DC).
72
Process Valves
2 Port Solenoid Valve Coolant valve suitable for cutting oils and coolants for machines
Specific Application Valves 0.5, 1 and 1.6 MPa operating pressure ranges available
Air Operated Valve Func- Part number SGC type Kv Operating
pressure range
Port Body/Seal
tion [m3/h] size Voltage material
[MPa]
Series SGC/SGCA SGC221B-10G15Y-5D 4.14 G 1/2’’
2 N.C. SGC321B-10G20Y-5D 6.07 0 to 1 G 3/4’’ 24 VDC Cast iron / FKM
SGC421B-10G25Y-5D 9.46 G 1’
SGC SGCA
A0 A6 3
Process Valves
Func- Kv Operating Port Body/Seal
tion Part number SGCA type [m3/h] pressure range size material
[MPa]
• Extended service life up to 5 million cycles SGCA221B-10G10 3.03 G 3/8’’

due to enhanced construction. SGCA221B-10G15 4.14 G 1/2’’
2 N.C. 0 to 1 Cast iron / FKM
• With auto switches to verify if the valve is SGCA321B-10G20 6.07 G 3/4’’
opened or closed. SGCA421B-10G25 9.46 G 1’
• RoHS directive compliant.
• Energy saving: Reduced power consumption. Applicable auto-switches (SGC / SGCA Series)
• Light and surge voltage suppressors can be Part No. Electrical entry Special function Wiring (output)
selected. D-M9PL 3 m wire with grommet - 3-wire (PNP)
• Body material: Cast iron. D-M9PSAPC 0,5 m with M8 connector - 3-wire (PNP)
• Seal material: NBR or FKM. D-M9BAL 3 m wire with grommet Water resistant (2-colour display) 2-wire
• Other voltages available for the SGC Series

(AC, DC).
2/3 Port Solenoid Valve These models are suitable for air and inert gas
Specific Application Valves Func- Part number Operating Port Body/Seal
High pressure operation range: tion VCH41 type
[MPa]
size material
0.5 to 5.0 MPa VCH41-5D-06G-Q G 3/4’’

2 N.C.
VCH41-5D-10G-Q G 1’’
Series VCH41/42/410 2 N.O.
VCH42-5D-06G-Q
0.5 to 5.0
G 3/4’’
24 Vcc Brass/Polyurethane
elastomer
VCH42-5D-10G-Q G 1’’
VCH42 Operating
VCH41 Func- Part number Port Body/Seal
tion pressure range size Voltage material
VCH410 type [MPa]
VCH410-5D-04G-Q G 1/2’’
3 N.C. Aluminium / Polyure-
0.5 to 5.0 24 VDC
VCH410-5D-06G-Q G 3/4’’ thane elastomer
VCH410-5D-10G-Q G 1’’
VCH410
• Energy saving: low power consumption.

• Enclosure splash proof (Equivalent to IP65).
• Body material: Brass/Aluminium.
• Seal material: Polyurethane elastomer.
73
Process Valves
Check valve These models are suitable for air and inert gas
Specific Application Valves Func- Part number Operating Port Body/Seal
tion pressure range size
High pressure operation range: VCHC40 type
[MPa]
material
0.05 to 5.0 MPa VCHC40-06G G 3/4’’ Brass/Polyurethane elastomer

2 N.C. 0.05 to 5.0
VCHC40-10G G 1’’
Series VCHC40
3
Process Valves
• Body material: Brass.

Regulator (Relieving type) These models are suitable for air

Specific Application Valves Regulating Port Body/Seal material
Ports Part number pressure range size
High pressure operation: up to [MPa]
6.0 MPa VCHR30-06G G 3/4’’

VCHR30-10G G 1’’ Aluminium / Polyurethane
Series VCHR30/40 2
VCHR40-10G
0.5 ~ 5.0
G 1’’ elastomer
VCHR40-14G G 1 1/2’’

74
Process Valves
Silencer These models are suitable for air and inert gas
Specific Application Valves Part number Max.Operating Port Body/cover/Absorbing
Ports size
High pressure operation: up to VCHN 3/4 pressure [MPa] material
5 MPa VCHN3-06 R 3/4

VCHN3-10 R1
Series VCHN3/4 1 VCHN4-10
5.0
(Solenoid valve inlet
pressure)
R1
Die-casted
Aluminium/SUS/Resin
VCHN4-12 R1 1/4
VCHN4-14 R1 1/2
Part number Max.Operating Port Body/cover/Absorbing

Ports size
VCHNF 3/4 pressure [MPa] material
VCHNF3-06 R 3/4 3
VCHNF3-10 5.0 R1
Die-casted
1 VCHNF4-10 (Solenoid valve inlet R1
pressure) Aluminium/SUS/Resin
VCHNF4-12 R1 1/4
Process Valves
• Suitable for air and inert gas. VCHNF4-14 R1 1/2
• Materials: Die-casted Aluminium / Stainless
steel / Resin.
•VCHNF: With freeze reduction.
2 Port Air Operated Compatible with high purity chemicals

High Purity Chemical Valve and deionised water (semiconductor industry)
Specific Application Valves Func- Q Kv
Operating
pressure Port Body/Diaphragm
tion Part number [Nl/min] [m3/h] range size material
Series LVA (Clean Wet Series) [MPa]
LVA10-01F-A 69 0.06 G 1/8’’

LVA20-02F-A 344 0.30 G 1/4’’
0 to 0.5
LVA30-03F-A 1669 1.46 G 3/8’’ Stainless Steel /
LVA40-04F-A 3239 2.83 G 1/2’’ PTFE
LVA50-06F-A 5889 5.14 G 3/4’’
0 to 0.4
LVA60-10F-A 7852 6.88 G 1”
2 N.C. LVA10-01F-B 69 0.06 G 1/8’’
LVA20-02F-B 344 0.30 G 1/4’’
0 to 0.5
LVA30-03F-B 1669 1.46 G 3/8’’ PPS / PTFE
LVA40-04F-B 3239 2.83 G 1/2’’
LVA50-06F-B 5889 5.14 0 to 0.4 G 3/4’’
• Threaded type valve.

• Minimal internal dead volume.
• Piston damper to minimize particle
generation.
• PTFE diaphragm to prevent micro-bubble
generation.
• New PFA body provides outstanding
corrosion resistance.
• Back-pressure resistance and service life
increased.
• 3 port valve version available.
• Wetted parts material: PFA, Stainless steel or
PPS (body), NBR, EPR or PTFE (diaphragm).
75
Process Valves

Specific Application Valves Operating
Func- Q Kv pressure Tubing Body/Diaphragm
Part number O.D.
Series LVC (Clean Wet Series) tion [Nl/min] [m3/h] range
[MPa] [mm]
material
LVC20-S06 344 0.30 6

LVC30-S10 1669 1.46 0 to 0.5 10
2 N.C. LVC40-S12 2454 2.14 12 PFA/PTFE
LVC50-S19 5889 5.14 19
LVC60-S25 7852 6.86 0 to 0.4 25
3
Process Valves
• High temperature chemical fluid handling

possible (100ºC).
• Integral fitting construction: Hyper Fitting®
Series used.
• Piston damper to minimize particle generation.
• PTFE diaphragm to prevent micro-bubble
generation.
• New PFA body provides outstanding
corrosion resistance.
• Back-pressure resistance and service life
increased.
• 3 port valve version available.
• Wetted parts material: PFA (body), PTFE (diaphragm).
2 Port Manually Operated Compatible with high purity chemicals

Specific Application Valves Kv
Operating
Tubing
Func- Part number Q pressure Body/Diaphragm
tion [Nl/min] [m3/h] range O.D. material
Series LVH (Clean Wet Series) [MPa] [mm]
LVH20-S06 344 0.30 6

2 N.C. LVH30-S10 1669 1.46 0 to 0.5 10 PFA/PTFE
LVH40-S12 2454 2.14 12
• Locking and non-locking types available.

• Integral fitting type / Threaded type.
• Wide range of valve variations available.
• Wetted parts materials: PFA, Stainless steel,
or PPS (body); PTFE (diaphragm).
76
Process Valves

Specific Application Valves Operating
Tubing
Func- Q Kv pressure Body/Diaphragm
Part number [m3/h] O.D.
Series LVD (Clean Wet Series) tion [Nl/min] range
[MPa] [mm]
material
LVD10-S03 88 0.08 3
LVD10-S04 88 0.08 0 to 0.5 4
2 N.C. LVD20-S06 344 0.30 6 PFA/PTFE
LVD30-S10 1276 1.11 10
LVD40-S12 1865 1.63 0 to 0.3 12
LVD50-S19 4908 4.29 19
Process Valves
• Compact valve : dimension across inlet/outlet
ports reduced by up to 25%.
Series.
generation.
• Piping from 4 directions possible.
• Wide range of valve variations available.
• Wetted parts materials: PFA / PTFE.

Specific Application Valves Func- Q Kv Operating Tubing
Part number Body/Diaphragm
tion [Nl/min] [m3/h] pressure O.D. material
Series LVQ (Clean Wet Series) range [mm]
LVQ20-S06 344 0.30 6

LVQ30-S10 1276 1.11 -98 kPa 10
to 0.5 MPa
2 N.C. LVQ40-S12 1865 1.63 12 PFA/PTFE
LVQ50-S19 4908 4.29 -98 kPa 19
LVQ60-S25 7852 6.86 to 0.4 MPa 25
• Non-metallic construction without metal

screws.
• New PFA body, PTFE diaphragm and PVDF
actuator section.
Series.
generation.
• Piping from 8 directions possible.
• Space saving: reduction in dimensions.
• Wetted parts materials: PFA / PTFE.
77
Process Valves
2/3 Port Solenoid Suitable for air, water, pure water, diluent, cleaning solvent
Valve for Chemicals Func- Cv Operating Orifice Body/Diaphragm
Part number pressure diameter
Specific Application Valves tion factor
range [mm]
Volatage material
Series LVM (Clean Wet Series) LVM11-5B-Q

LVM10R1
0.04 0 to 0.25 MPa 1,5
2/2 N.C.
LVM10R3 -75 kPa to 24 Vcc PEEK/FKM
0.03 1,4
LVM10R6 0.25 MPa
3 Universal LVM102R
3
Process Valves
• Direct Operated Diaphragm Type Valve.

• Valve chamber volume up to 20 µl or less.
• Compactness (width: 13 mm) and lightweight
(30 g or less ).
• Energy saving: low power consumption
(1-1.5 W).
• Service life of 10 million cycles.
(Based on SMC test conditions).
• Body ported and base mounted valve options.
• Wetted parts material: PEEK or PFA. Base mounted
valve only (plate) and EPDM, FKM, or Kalrez®
(diaphragm).
78
Process Valves
Applicable Fluids
Material and fluid compatibility check list for air and manually operated high purity valves
Body material Diaphragm material
Chemical Ethylene
Stainless Polyphenylene Fluoro Nitrile
Fluoro resin propylene
steel sulfide resin resin rubber
PFA rubber
SUS316 PPS PTFE NBR
EPR
Note 1) Note 1) Note 2)

Acetone
3
Note 2)
Ammonium hydroxide
Process Valves
Isobutyl alcohol
Isopropyl alcohol Note 1) Note 1) Note 2)
Hydrochloric acid
Ozone (dry)
Hydrogen peroxide Concentration 5% or less, 50°C or less

Ethyl acetate
Butyl acetate
Note 2)
Nitric acid (except fuming nitric acid) Concentration 10% or less
DI water
Sodium hydroxide Concentration 50% or less
Nitrogen gas
Super pure water

Toluene
Hydrofluoric acid Note 2)
Note 2)
Sulfuric acid (except fuming sulfuric acid)
Phosphoric acid Concentration 80% or less
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Use a stainless steel body, as static electricity may be generated. Table symbols : Can be used
Note 2) Use caution as permeation may occur and any permeated fluid could effect other : Can be used in certain conditions
material parts. : Cannot be used
• Compatibility is indicated for fluid temperatures of 100°C or less.
• The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product.
• The data above is based on the information presented by the material manufacturers.
• SMC is not responsible for its accuracy and any damage happened because of this data.
79
Manually, mechanically, pneumatically operated directional valves
81
Pneumatically operated Part number Circuit Symbol Switching Port Size

Operating
pressure
Flow
function Nl/min (Cv)
3 port valves. range MPa
Series SYJA500/700 SYJA512-M5

SYJA712-01F
N. C. M5
G 1/8”
197 (0.2)
492 (0.5)
SYJA522-M5 M5 0.15 ~ 0.7 197 (0.2)
N. O.
SYJA722-01F G 1/8” 492 (0.5)
SYJA300 on request, M5 and M3 ported.
Manifolds available on request
• 2 standard sizes.
• Base and body ported valves available.
• Compact design.
Pneumatically operated Type of Operating Flow

Part number Circuit Symbols Port Size pressure
actuation range MPa Nl/min (Cv)

5 port valves.
SYJA5120-M5 M5 197 (0.2)
Series SYJA5000/7000 SYJA7120-01F
Single
G 1/8”
0.15 ~ 0.7
590 (0.6)
SYJA5220-M5 M5 197 (0.2)
Double 0.1 ~ 0.7
SYJA7220-01F G 1/8” 590 (0.6)
SYJA3000 upon request, M5 and M3 ported.
• 2 standard sizes.
• Compact design.
• Lightweight.
• Base and body ported valves available.
Pneumatically operated Size SYA7000 - Standard

Circuit Switching Port size A Operating Flow
5 port valves. Part no.
Symbol function and B
pressure
Nl/min (Cv)
range MPa
Series SYA3000•5000•7000 SYA7120-02F (A)(B)
4 2 G(PF)1/4
SYA7120-C8 Single Ø8 mm 0.15 ~ 0.7
5 1 3
SYA7120-C10 (EA)(P)(EB) Ø10mm 885 (0.9)
(A)(B)
SYA7220-02F 4 2 G(PF)1/4
SYA7220-C8 Double Ø8 mm 0.1 ~ 0.7
5 1 3
SYA7220-C10 (EA)(P)(EB) Ø10mm
(A)(B)
4 2
SYA7320-02F 5 port closed
center
5 1 3
(EA)(P)(EB)
(A)(B)
4 2 5 port
• 3 sizes, SYA7000 standard. SYA7420-02F exhaust G(PF)1/4 0.2 ~ 0.7 620 (0.9)
• Choose base or body ported models. 5 1 3
(EA)(P)(EB)
center
• Long service life. (A)(B)
4 2 5 port
• Can be used with SY solenoid valves SYA7520-02F pressure
on manifold. 5 1 3 center
• 5 port function on request. (EA)(P)(EB)
82
Pneumatically operated Series EVSA7-6 ISO1

Flow Operating
5 port valves. Part no. Circuit Symbols Type of actuation pressure
Nl/min (Cv) range MPa
Series EVSA7-6 (ISO1)
EVSA7-6-FG-S-2 Single 1.476 (1.5)
Series EVSA7-8 (ISO2) 5
Number
EVSA7-6-FG-D-2 of ports Double 1.476 (1.5)
EVSA7-6-FHG-D-2 Closed center 1.378 (1.4)

0 ~ 1.0
EVSA7-6-FPG-D-2 5 Closed center 1.082 (1.1)
Number
EVSA7-6-FJG-D-2 of ports 1.476 (1.5)
Exhaust center
EVSA7-6-FIG-D-2 Pressurised 1.476 (1.5)

• ISO-standardized. center
• Types: sub-plate or manifold.
• Compatible with solenoid valves of Series EVSA7-8 ISO2 4
series EVSA7. Flow Operating
Part no. Circuit Symbols Type of actuation pressure
• Superior flow capacity. Nl/min (Cv) range MPa

• Valves made with lapped metal seal for
harsh operation conditions. EVSA7-8-FG-S-2 5 Single 3.148 (3.2)
• Long service life. Number
of ports Double
EVSA7-8-FG-D-2 3.148 (3.2)
EVSA7-8-FHG-D-2 Closed center 3.148 (3.2)

0 ~ 1.0
EVSA7-8-FPG-D-2 5 Closed center 2.165 (2.2)
Number
of ports
EVSA7-8-FJG-D-2 Exhaust center 3.148 (3.2)
Pressurised
EVSA7-8-FIG-D-2 3.148 (3.2)
center
Modular manifold
Item ISO1 ISO2
Left end plate G 3/8” EAXT502-LA-03

G 1/2” EAXT512-LA-04
Right end plate G 3/8” EAXT502-RA-03
G 1/2” EAXT512-RA-04
Manifold G 1/4” EAXT502-1A-A02
G 3/8” EAXT502-1A-A03 EAXT512-1A-A03
G 1/2” EAXT512-1A-A04
Accessory • Sub-plate
ISO1 ISO2
G 1/4” EVS7-1-A02F
G 3/8” EVS7-1-A03F EVS7-2-A03F
G 1/2” EVS7-2-A04F
G 3/4” EVS7-2-A06F
83
Mechanically/manually Part no. Circuit Symbols Actuator

Operating Flow
pressure range (Nl/min)
operated 3 port valves
Series VM1000 VM1000-4N-00 Basic valve
VM1000-4N-01 Roller lever
VM1000-4N-02 One way roller lever

0~0.8MPa 54
VM1000-4N-08 Toggle lever
VM1000-4N-32R Red push button
• 3 port micro switch valve with standard VM1000-4N-32B Black push button
body design for limit switch or manual
switch function.
4 • Hose connection with space-saving
barb fitting (Ø 2.7 mm).
• Minimal force to operate.
Mechanically/manually Part no. Circuit Symbol Actuator

Operating Flow
Series EVM100 EVM130-F01-00 Basic valve
EVM131-F01-01S Roller lever
EVM131-F01-02S One way roller lever
EVM130-F01-08 Toggle lever
EVM130-F01-30B Black (mushroom) push

button
0~1.0MPa 138
• 3 port switch valve with port
EVM130-F01-30R Red (mushroom) push
size G 1/8”. button
• Robust poppet valve design.
• Limit switch, manual switch and EVM130-F01-33 Push button (Flash)
switch type with a basic valve via
stacking system. EVM130-F01-34B Twist selector
• Superior flow capacity for a low black
height. Twist selector
EVM130-F01-36
with key
Twist selector
EVM151-F01-35B
3 position
84

Operating Flow
operated 3 port valves pressure range (Nl/min)
EVM230-F02-00 Roller lever

+VM-015
EVM230-F02-00
One way roller lever
+VM-025
EVM230-F02-00
Toggle lever
+VM-08A
EVM230-F02-00 Black (mushroom) push
+VM-30AB button
• 3 port switching valve with port size G 1/4”. EVM230-F02-00 Red (mushroom) push
• Robust poppet valve design. +VM-30AR button
• Limit switch, manual switch and foot 0~1MPa 984
EVM230-F02-00
pedal type mounted with a basic valve +VM-33A
Push button (Flash) 4
using a modular stacking system.
EVM230-F02-00
• Superior flow capacity for a low height. Black twist selector
• Minimal force to operate. +VM-34AB

EVM230-F02-36 Twist selector with key
EVM230-F02-35B Twist selector

(3 position)
EVM230-F02-40 Foot pedal (2 position)
XT34-67* Foot pedal

(5/2 position)
* Foot pedal with 5/2 position function upon request

Operating Flow
EVM430-F01-00
Roller lever
+VM-01AS
EVM430-F01-00
+VM-02AS
EVM430-F01-00
Toggle lever
+VM-08A
EVM430-F01-00 Black (mushroom) push 0~1.0MPa 370
+VM-30AB button
• 3 port switching valve, EVM430-F01-00 Red (mushroom) push
port size G1/8”. +VM-30AR button
• Robust poppet valve design. EVM430-F01-00
• Limit switch and manual switch Push button (Flash)
+VM-33A
mounted with a basic valve using a
EVM430-F01-00
modular stacking system. Black twist selector
• Superior flow capacity for a low +VM-34AB
height. EVM430-F01-00
Twist selector with key
• N.C. and N.O. version available. +VM-36A
85

Operating Flow
Series EVZM500 EVZM550-F01-00 Basic valve
EVZM550-F01-00
Roller lever
+VM-01CS
EVZM550-F01-00
+VM-02CS
EVZM550-F01-00
Toggle lever
+VM-08C
EVZM550-F01-00 Black (mushroom) push 0.15~0.7MPa 590
+VM-30CB button
• 5 port switching valve, EVZM550-F01-00 Red (mushroom) push
port size G 1/8”, valve seal design +VM-30CR button
with pneumatic pilot. EVZM550-F01-00
• Limit switch and manual switch Push button (Flash)
4 +VM-33C
types mounted with a basic valve
EVZM550-F01-00 Twist selector
via stacking system.
• Superior flow capacity at a +VM-34CB black
compact size. EVZM550-F01-00 Twist selector

• Valve width 18 mm. +VM-36C with Key

Operating Flow
operated 5 port valves pressure range (Nl/min)
Series EVFM300 EVFM350-F02-00 Basic valve
EVFM350-F02-01S Roller lever
EVFM350-F02-02S One way roller lever
EVFM350-F02-08 Toggle lever
EVFM350-F02-30B Black (mushroom) push 0.15~1MPa 984

button
• 5 port switching valve, port size Red (mushroom) push
G /4”, valve seal design with EVFM350-F02-30R
button
pneumatic pilot.
• Pneumatic pilot means minimal EVFM350-F02-33 Push button (Flash)
force required to operate.
• Superior flow capacity for EVFM350-F02-34B Black twist selector
a compact size.
• Valve width 26.4 mm.
EVFM350-F02-36 Twist selector with key
86

Operating Flow
operated valves 3 port pressure range (Nl/min)
EVM830-F01-01 Roller lever

0~1.0MPa 325
EVM830-F01-13 Adjustable roller lever
EVM830-F01-14 Adjustable rod lever
• Port thread G 1/8”.

• Either N.O. or N.C. models.
• Robust, compact design.
• Adjustable operating lever. 4

3-Port Valve for Residual Standard
Port Size Flow (l/min) For modular
Pressure Release Part no. Port Size
Exhaust release P→A (A→R) Series
Series VHS VHS20-F01 G1/8 G1/8 551 (600) 20
VHS20-F02 G1/4 G1/8 767 (876) 20
VHS30-F03 G3/8 G1/4 1692 (1584) 30
VHS40-F04 G1/2 G3/8 3119 (2785) 40
VHS50-F06 G3/4 G1/2 6012 (1800) 50•60
VHS50-F10 G1 G1/2 7104 (2184) 50•60
• With the use of a 3-port valve for

residual pressure release, pressure left
in the line can be easily exhausted.
87
Manually operated valves Part no. Circuit Symbols

Type of Operating Port size Flow
actuation pressure range G(PF) Nl/min (Cv)
4 port
Series VH VH212-F02
VH312-F03 4
1/4
3/8
393 (0.4)
885 (0.9)
1MPa
VH412-F04 2 position 1/2 3.050 (3.1)
VH412-F06 3/4 3.149 (3.2)
VH210-F02 1/4 393 (0.4)
VH310-F03 4 3/8 885 (0.9)
1MPa
VH410-F04 Closed 1/2 3.050 (3.1)
VH410-F06 center 3/4 3.149 (3.2)
VH600-F06 3/4 10.037 (10.2)
0.7 MPa
VH600-F10 1 10.332 (10.5)
VH211-F02 1/4 393 (0.4)
4
VH311-F03 3/8 885 (0.9)
Exhaust 1MPa
VH411-F04 1/2 3.050 (3.1)
center
• Robust, 4 port manual lever valve, reliable VH411-F06 3/4 3.149 (3.2)
round seal design.
• Variety of port sizes.
• Body for panel assembly or direct
4 mounting.
• Slepless and crack adjustment
of the flow from zero to the maximun
via the lever’s rotation angle.

• Pressure or exhaust center for both
cylinders.
• The cylinder may be positioned at the
valve’s center.
Manually operated valves

2 port manually operated valve
Series VHK
• Switch valve, compact design with 2

or 3 port function.
• Sizes from Ø 4-12 mm with superior
flow capacity.
• Being made of lightweight plastic,
and having integral hose connections,
it can be mounted directly in the
piping (push in).
• Body with mounting holes.
Operating Mounting
Part no. Circuit Symbols Port Size
pressure range bracket
VHK3-04F-04F ø4
VHK3-06F-06F Ø6 VHK-B1A
VHK3-08F-08F Ø8
VHK3-10F-10F Ø 10 VHK-B2A
VHK3-12F-12F Push-in port size Ø 12
1MPa
VHK3-M5-M5 M5 x 0,8
VHK3-01S-01S Two position Rc(PT)1/8
VHK3-02S-02S Rc(PT)1/4 VHK-B1A
VHK3-03S-03S Rc(PT)3/8
VHK3-04S-04S Thread port size Rc(PT)1/2
2 port function on request
Other thread and push-in combinations on request
88
Two Hand Control Valve Part number Connection piping size Operating
pressure (MPa)
Series VR51
Flame resistant
VR51-C06 metric size one-touch fitting ø6
0.25 ~ 1
VR51-C07 inch size Flame resistant
one-touch fitting ø1/4
Accesory Part number
Silencer AN101-01
• Equipment having a safety circuit: two

handed operation Option Part number
• An output is available through Bracket VR51B
synchronised, two-handed operation
• Certified to type IIIA of EN574
• Interchangeable with XT92-67
4
89
4
90
This catalogue contains only limited product information. If you requiere any additional options and technical detail, please refer to our individual
products catalogue, our product information on CD, our web page: www.smc.eu or by contacting your nearest SMC office.
91
Speed Controller Part number

Port Size
Tube Flow Circuit
Elbow type ø(mm) (l/min)* Symbol
Series AS Universal type
AS1201F-M3-02 - M3 2 20
AS1201F-M5-02 - M5 2 20
Universal type
AS1201F-M3-23 AS1301F-M3-23 3.2 20
M3
AS1201F-M3-04 AS1301F-M3-04 4 20
AS1201F-M5-23 AS1301F-M5-23 3.2 100
AS1201F-M5-04 AS1301F-M5-04 M5 4 100
AS1201F-M5-06 AS1301F-M5-06 6 100
Elbow type
AS2201F-01-04S AS2301F-01-04S 4 180
AS2201F-01-06S AS2301F-01-06S R1/8 6 230
• 4 sizes. AS2201F-01-08S AS2301F-01-08S 8 230
• Suitable for polyurethane and AS2201F-02-06S AS2301F-02-06S 6 390
R1/4
AS2201F-02-08S AS2301F-02-08S 8 460
nylon tubes.
AS3201F-03-08S AS3301F-03-08S 8 790
• 360° rotation. R3/8
AS3201F-03-10S AS3301F-03-10S 10 920
• Precise adjustment using special AS4201F-04-10S AS4301F-04-10S 10 1580
R1/2
throttle pin shape and fine thread. AS4201F-04-12S AS4301F-04-12S 12 1710
• Easy to mount. • Other combinations upon request
• Teflon-coated connection thread * At 0.5 MPa set pressure
(gasket for M3, M5).
Speed controller with flash set screw D version AS*F
Speed Controller Part number Tube Flow*
Port Size
5 Tamper resistant Elbow Type Universal Type ø(mm) (l/min)
AS1201F-M5-23D AS1301F-M5-23D 3.2
Series AS*D AS1201F-M5-04D AS1301F-M5-04D M5 4 100
AS1201F-M5-06D AS1301F-M5-06D 6
Screwdriver AS2201F-01-06SD AS2301F-01-06SD 6

R1/8
AS2201F-01-08SD AS2301F-01-08SD 8 230
AS2201F-02-06SD AS2301F-02-06SD 6
AS2201F-02-08SD AS2301F-02-08SD 8
AS3201F-02-06SD AS3301F-02-06SD R1/4 6 390
AS3201F-02-08SD AS3301F-02-08SD 8
460
AS3201F-02-10SD AS3301F-02-10SD 10
AS3201F-03-06SD AS3301F-03-06SD 6 660
AS3201F-03-08SD AS3301F-03-08SD R3/8 8 790
AS3201F-03-10SD AS3301F-03-10SD 10 920
• Flash set screw, to be operated * At 0.5 MPa set pressure
only with a screwdriver.
• Plug-in connection. Speed controller with flash set screw D version AS*001F
• Teflon-coated male thread from R1/8, Part number Tubing ø Flow*
gasket for M5. Straight Type (mm) (l/min)
AS1001F-23D 3.2 100
AS1001F-04D 4
AS2001F-06D 6 230
AS2051F-06D 6 290
AS2051F-08D 8 460
AS3001F-08D 8 660
AS3001F-10D 10 920
Speed Controller * At 0.5 MPa set pressure
Series AS-Stainless Steel Tube ø Flow*
Part number Port Size Circuit Symbol
(mm) (l/min)
AS1201FG-M5-04 4 100
M5
AS1201FG-M5-06 6 100
AS2201FG-01-04S 4 180
AS2201FG-01-06S R1/8 6 230
AS2201FG-01-08S 8 230
AS2201FG-02-06S 6 390
R1/4
• Stainless steel screw connection AS2201FG-02-08S 8 460
AS3201FG-03-08S 8 790
(SUS303). R3/8
AS3201FG-03-10S 10 920
• 1.0 MPa max. operating pressure. 1580
AS4201FG-04-10S 10
R1/2
AS4201FG-04-12S 12 1710
• Other combinations upon request
* At 0.5 MPa set pressure
92
Tube Flow*
Part number (l/min) Circuit Symbol
ø(mm)
Speed Controller
Series AS Straight Type AS1001F-02
AS1001F-23
2
3.2
20
100
AS1001F-04 4 100
AS1001F-06 6 100
AS2001F-04 4 130
AS2001F-06 6 230
AS2051F-06 6 290
AS2051F-08 8 460
AS3001F-08 8 660
AS3001F-10 10 920
AS4001F-10 10 1050
AS4001F-12 12 1390
• Simple, economical mounting.
• Precise adjustment using special
Mounting Tube diameter
throttle pin shape and fine thread.
Type ø 3.2 ø4 ø6 ø8 ø 10 ø 12
• Attachment available for optimal
handling. AS1001F TMH-23J TMH-04J TMH-06J
AS2001F
AS2051F TMH-0b TMH-08
AS3001F
TMH-10
AS4001F TMH-12
One side

Stacked 3 sides for panel mounting
Dual Type Speed Controller Thread Tube Ø Flow* Circuit Symbol

Part number
Series ASD Port (mm) (l/min)
75
ASD230F-M5-04 M5 4
ASD330F-01-06S R 1/8 6 175
ASD430F-02-06S R 1/4 6 295
ASD430F-02-08S R 1/4 8 350
ASD530F-03-08S R 3/8 8 600
ASD530F-03-10S R 3/8 10 700
ASD630F-04-12S R 1/2 12 1300
• Meter-in, meter-out combined in one

body.
• Plug-in connection rotates 360°.
Speed Controller with Pilot Part number Port Size Port Size Tube Flow* Circuit Symbol
Check Valve Pilot air ø(mm) (l/min)
Series ASP ASP330F-01-06S

ASP330F-01-08S
R1/8 M5 6
8
180
180
ASP430F-F02-06S R1/4 G1/8 6 330
ASP430F-F02-08S 8 350
ASP530F-F03-08S G1/8 8 600
R3/8
ASP530F-F03-10S 10 750
ASP630F-F04-10S R1/2 G1/4 10 1100
ASP630F-F04-12S 12 1190
Enables speed control and temporary intermediate stopping with cylinders

• 2 pneumatic functions in one valve
-speed controller and pilot check valve.
• Mounted directly to actuator. Drop Emergency
• 360° rotation. prevention function
93
Air Saving Valve Part number Port Applicable tubing O.D. (mm)
Pressure Valve Flow valve size 6 8 10 12
Series ASR (Pressure Valve) ASR430F-02-S ASQ430F-02-S R1/4
Series ASQ (Flow Valve) ASR530F-02-S
ASR530F-03-S
ASQ530F-02-S
ASQ530F-03-S
R1/4
R3/8
ASR630F-03-S ASQ630F-03-S R3/8
ASR630F-04-S ASQ630F-04-S R1/2
: Add applicable tubing O.D. (mm)
• 40% reduction in air consumption (Cuts

air consumption by operating the return
stroke at a reduced pressure).
5 Pressure valve / Series ASR Cuts air consumption by operating

the return stroke at a reduced pressure.
Conventional valve Air saving valve

Working and return strokes Return stroke operated
operated at the same pressure at a reduced pressure
Regulator with check valve and flow control Pressure Flow

valve integrated into a single construction valve valve
Working stroke Working stroke
Return stroke Return stroke
Flow valve / Series ASQ

Other applications
Jerk prevention in Quick air charge at the
vertical operation of end of stroke for press
the cylinder applications
Balancing pressure
Pressure valve
Pilot valve and two-way flow control valve Flow valve
integrated into a single construction
Speed controller
Speed controller
94
Stainless Steel Controller Part number Port Size

Tube ø Flow* Circuit Symbol
(mm) (l/min) (Meter-out type control)
(Elbow type)
Series ASG ASG220F-M5-04
ASG220F-M5-06
M5
M5
4
6
100
100
ASG320F-01-04S R1/8 4 180
ASG320F-01-06S R1/8 6 230
ASG320F-01-08S R1/8 8 230
ASG420F-02-06S R1/4 6 390
ASG420F-02-08S R1/4 8 460
ASG420F-02-10S R1/4 10 460
ASG520F-03-08S R3/8 8 790
ASG520F-03-10S R3/8 10 920
ASG520F-03-12S R3/8 12 920
ASG620F-04-12S R1/2 12 1580
Meter-in control option also available
• SUS316 and special FKM construction * Measured at 0.5 MPa and 20ºC.
to improve the resistance to corrosion.
• Elbow design to allow the rotation of
the tubing connection ports and suit
installation to air cylinders.
• Meter-in and meter-out type control.
• One-touch fittings and 5 body sizes.
• Applicable tubing: FEP, PFA, Nylon, Soft
nylon, Polyurethane and Polyolefin.
• Conforms to Food Sanitation laws. 5
Speed Controller Flow*

(l/min)
Series EAS Metal AS1200-M3 M3 20
AS1200-M5 M5 105
EAS2200-F01-S G1/8 230
EAS2200-F02-S G1/4 460
EAS3200-F03-S G3/8 920
EAS4200-F04-S G1/2 1700
• 4 sizes.
• 360° rotation.
• Precise adjustment using throttle
pin shape and fine thread.
• Easy to mount.
• Lock nut used to fix the setting.
Speed Controller Standard
Series EAS Metal Part number Port Size

Free Flow*
(l/min)
Circuit Symbol
Straight Type
AS1000-M3 M3 20
AS1000-M5 M5 90
EAS2000-F01 G1/8 340
EAS2000-F02 G1/4 340
EAS3000-F03 G3/8 810
EAS4000-F04 G1/2 1670
For superior flow capacity

• 4 sizes.
• Superior flow capacity. Free Flow*
(l/min)
• Fine thread for precise adjustment.
• Easy to mount. G3/4 10000
EAS500-F06
EAS600-F10 G1 15100
EAS800-F12 G1 1/4 35400
EAS900-F14 G1 1/2 52000
EAS900-F20 G2 57800
95
Speed Controller Silencer

Effective
Series ASN2 Part number Port Size
Area (mm2)
Circuit Symbol
ASN2-M5 M5 1,8
ASN2-01-S R1/8 3.6
ASN2-02-S R1/4 6.5
ASN2-03-S R3/8 16.6
ASN2-04-S R1/2 24.5
• Exhaust air noise reduction over 20 dB.

• Simple speed reduction for cylinder.
• Mounted directly to valve exhaust.
Quick Exhaust Valve

5 Series AQ Effective Area (mm2)
IN⇒OUT OUT⇒Exh.
AQ1500-M5 M5x0.8 2 2,8
EAQ1510-F01 G1/8 4 5,8

EAQ2000-F01 G1/8 25 25
EAQ2000-F02 G1/4 35 40
EAQ3000-F03 G3/8 60 70
EAQ5000-F04 G1/2 105 115
EAQ5000-F06 G3/4 135 180
• Large exhaust capacity.
• Port thread M5-3/4”.
Speed Exhaust Controller Effective Area (mm2)

Tube
Series ASV Part number Port Size
ø(mm)
IN⇒OUT OUT⇒Exh.
Circuit Symbol
ASV120F-M3-04 M3 4 0,3 0,3

ASV220F-M5-04 M5 4 1,3 1,3
ASV220F-M5-06 M5 6 1,3 1,3
ASV310F-01-06S R1/8 6 7 8
ASV310F-01-08S R1/8 8 7 8
ASV410F-02-08S R1/4 8 13,5 14
ASV410F-02-10S R1/4 10 13,5 14
ASV510F-03-10S R3/8 10 27 29
• 3 pneumatic functions in one ASV510F-04-12S R1/2 12 27 29
compact design.
Cylinder with ASV
• Simple, economical mounting.
• Size M3 - 1/2”.
• Integral 4 - 12 mm plug connection.
96
Quick Exhaust Valve,Straight Type Exhaust via silencer
Series AQ240/340 Part number Tube

Effective Area (mm2)
Circuit Symbol
ø(mm)
IN⇒OUT OUT⇒Exh.
AQ240F-04-00 4 1,7 2,5
AQ240F-06-00 6 2,4 2,7
AQ340F-06-00 6 4 4
Common exhaust
• Direct or common exhaust. Tube Effective Area (mm2)

• Simple, economical assembly by Part number Circuit Symbol
ø(mm)
the user. IN⇒OUT OUT⇒Exh.
• Built-in one touch fitting. AQ240F-04-04 4 1,7 2,5
• Suitable for nylon and polyurethane AQ240F-06-06 6 2,4 2,7
tubing. AQ340F-06-06 6 4 4
• Light weight.
Shuttle Valve Metal type with female thread 5

Series VR1210/1220 Part number Port Size
Effective Area
Circuit Symbol
(mm2)

VR1210-F01 G 1/8 7
VR1220-F02 G 1/4 15
Plastic with one touch fittings

Tube Size Flow*
Part number Circuit Symbol
(mm) (l/min)
• For pneumatic controls.
• Two input signals, one output signal. VR1210F-23 3.2 150
• Port sizes 1/8” and 1/4”. VR1210F-04 4,0 210
VR1220F-06 6,0 440
VR1220F-08 8,0 680
AND Valve Tube Size Flow* Circuit

Part number
Series VR1211F (mm) (l/min) Symbol
VR1211F-23 3.2 100

VR1211F-04 4,0 120
VR1211F-06 6,0 150
• For pneumatic controls.

• Simple, push-in mounting.
• Rotates through 360°.
97
Check Valve with One-touch fitting both sides

One-touch fitting/Thread Part number Tube OD Effective area
Series AKH/AKB [mm] [mm2]
AKH04-00 4 2.8
AKH06-00 6 6.5
AKH08-00 8 14
AKH10-00 10 24
AKH12-00 12 34
• Select from 3 designs.

• One-touch fitting both sides.
• Male thread/female thread.
• Male thread/one-touch fitting.
• Low cracking pressure.
Male thread/ female thread Male thread/one-touch fitting
Connection Effective area Connection Tube OD Effective

Part number Circuit Symbols Part number Area Circuit Symbols
port [mm2] thread [mm] [mm2]
5
AKH04 * -M5 M5 4 2.8
AKB01 * -01S R1/8, Rc1/8 6.5 AKH04 * -01S R1/8
Flow M5 2.8
AKH06 * -M5
A direction R1/8 6 6.5 A

AKH06 * -01S
AKB02 * -02S R1/4, Rc1/4 14 AKH06 * -02S R1/4 6.5
AKH08 * -01S R1/8 6.5
AKH08 * -02S R1/4 8
14
AKB03 * -03S R3/8, Rc3/8 24 AKH08 * -03S R3/8
B Flow AKH10 * -02S R1/4
direction AKH10 * -03S R3/8 10 24 B
AKB04 * -04S R1/2, Rc1/2 34 AKH10 * -04S R1/2
AKH12 * -03S R3/8
12 34
AKH12 * -04S R1/2
* Flow direction A or B
* Flow direction A or B
Check Valve
Series EAK Part number Port Size Effective Area
(mm2)
Circuit Symbol
EAK2000-F01 G 1/8 25
EAK2000-F02 G 1/4 27.5
EAK4000-F02 G 1/4 47
EAK4000-F03 G 3/8 85
EAK4000-F04 G 1/2 95
EAK6000-F06 G 3/4 200
EAK6000-F10 G1 230

• Low cracking pressure : 0.02MPa.
• Port size from 1/8” to 1”.
Optical Indicator Pneumatic Part number
Optical indication
Port Size Circuit Symbol
colour
Series VR3100/3110 VR3100-01R Red painted
VR3100-01G Green Rc1/8
VR3100-01O Orange
VR3110-01R Red painted
Rc1/8
VR3110-01G Green
• Optical pressure indication for

monitoring pressure.
• Port size Rc1/8”.
98
Linear Actuators
Linear Actuators
Linear Actuators
99
Linear Actuators
Standard Cylinders
Air Cylinder, Part no.

Bore size Stroke length *Theoretical Spring Force Tube connection
(mm) (mm) output (N) (N) size (mm)
Single acting
Series CJ1 CJ1B2-5SU4
CJ1B2-10SU4
2,5
2,5
5
10
1,81 0,64 Ø 2,5 x 4
CJ1B4-5SU4 4 5
CJ1B4-10SU4 4 10 4,52 1,47 Ø 2,5 x 4
CJ1B4-15SU4 4 15
CJ1B4-20SU4 4 20
* at 0.6 MPa
• Compact design.
• Easy mounting.
• For sensitive force applications.
Pin Cylinder, Part no. Bore size Stroke length *Theoretical Spring Force Tube connection
Single acting Panel mounted (mm) (mm) output (N) (N) nipple Ø
Series CJP CJPB4-5

CJPB4-10
4
4
5
10 6,00 1,00 M3
CJPB4-15 4 15
CJPB6-5H6 6 5
CJPB6-10H6 6 10 15,9 1,42 Outside 6 mm
CJPB6-15H6 6 15
CJPB10-5H6 10 5
6 CJPB10-10H6 10 10 49,0 2,45 Outside 6 mm
CJPB10-15H6 10 15
CJPB15-5H6 15 5
113
Linear Actuators
CJPB15-10H6 15 10 4,41 Outside 6 mm

• Compact round design, thread CJPB15-15H6 15 15
continuous over the whole body. * at 0.7 MPa.
• Panel or plug mounting possible. Plug-mounting on request
Pin Cylinder, Bore size Stroke length Thread

Part no. Possible auto switches
Series CJP2 (mm) (mm) connection
CDJP2B4- * D 4 5, 10, 15, 20 M3 Reed: D-A93L
CDJP2B6- * D 6 5, 10, 15, 20, 25 M3 3 wire solid state:
CDJP2B10- * D 10 5, 10, 15, 20, 25, M3 NPN: D-M9NL / PNP: D-M9PL
CDJP2B16- * D 16 30, 35, 40 M5 2 wire solid state: D-M9BAL
* Stroke length
Cylinder mounting brackets

Bore size [mm] Ø6 Ø10 Ø16
Flange CP-F006A CP-F010A CP-F016A
• Double acting, single rod.
Foot CP-L006A CP-L010A CP-L016A
• Small and light. Trunnion (with pin) CP-T006A CP-T010A CP-T016A
- Full lenght shortened by 6 to 9.5 mm.
- Weight reduced by 55 to 65%. Piston rod mounting brackets
• Auto switch can be integrated into body. Bore size [mm] Ø6 Ø10 Ø16
Single knuckle joint I-P006A I-P010A I-P016A
Double knuckle joint Y-P006A Y-P010A Y-P016A
100
Linear Actuators
Standard Cylinders
Air Cylinder, Double Acting - Rubber Cushion

Bore size Standard Strokes Rod end Port Operating
Double Acting, Single Rod Part no.
(mm) (mm) Thread Size
Pressure
(MPa)
Series CG1 CG1BN20-* 20 25, 50, 75, 100, 125, 150, 200 M8 x 1.25
CG1BN25-* 25 M10 x 1.25 Rc 1/8
CG1BN32-* 32
CG1BN40-* 40 M14 x 1.5
25, 50, 75, 100, 125, 150, 0.05 - 1.0
CG1BN50-* 50 200, 250, 300 Rc 1/4
M18 x 1.5
CG1BN63-* 63
CG1BN80-* 80 M22 x 1.5 Rc 3/8
CG1BN100-* 100 M26 x 1.5 Rc 1/2
* Insert required stroke
Insert “D” if magnetic version is required
• Clean line. W Through rod also available
• A substantial reduction in overall
Double Acting - Air Cushion
length compared to tie rod designed
Bore size Standard Strokes Rod end Port Operating
cylinders. Part no. Pressure
(mm) (mm) Thread Size (MPa)
CG1BA20-* 20 25, 50, 75, 100, 125, 150, 200 M8 x 1.25
M5x0.8
CG1BA25-* 25 M10 x 1.25
CG1BA32-* 32
Rc 1/8
CG1BA40-* 40 M14 x 1.5
25, 50, 75, 100, 125, 150, 0.05 - 1.0
CG1BA50-* 50 200, 250, 300 M18 x 1.5 Rc 1/4
CG1BA63-* 63
CG1BA80-* 80 M22 x 1.5 Rc 3/8
CG1BA100-* 100 M26 x 1.5 Rc 1/2
Mounting Bracket Part No.

Mounting bracket
Bore size (mm)
6
20 25 32 40 50 63 80 100
Axial foot* CG-L020 CG-L025 CG-L032 CG-L040 CG-L050 CG-L063 CG-L080 CG-L100
Flange CG-F020 CG-F025 CG-F032 CG-F040 CG-F050 CG-F063 CG-F080 CG-F100
Linear Actuators
Trunnion CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 — —
Clevis** CG-D020 CG-D025 CG-D032 CG-D040 CG-D050 CG-D063 CG-D080 CG-D100
Pivot bracket CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A
* Order two foot brackets per a cylinder.
** Clevis pins, snap rings and mounting bolts are attached for the clevis.
*** Mounting bolts are attached for the foot type and the flange type.
101
Linear Actuators
Standard Cylinders
Air Cylinder Standard cylinder, double-acting, built-in magnet, rubber bumper

Part number with
Series C76 Bore size
(mm)
Standard strokes
(mm)
Auto switch mounting style Circuit Symbol
Rail mounting Band mounting
32 10, 25, 40, 50, 80,

CD76E32- * -A CD76E32- * -B
100, 125, 160, 200,
250, 300 CD76E40- * -A CD76E40- * -B
40 (max. 1000)
* Stroke length
• Single or double acting.

• Cushion with rubber bumper or Double-acting, non-rotating, built-in magnet
adjustable air cushion. Part number with
• Connection between piston and Bore size Standard strokes Auto switch mounting style Circuit Symbol
piston rod by crimp connection (mm) (mm) Rail mounting Band mounting
designed for increased dynamic
loadings. 32 10, 25, 40, 50, 80, CD76KE32- * -A CD76KE32- * -B
• Cylinder body made from corrosion 100, 125, 160, 200,
40 250, 300 (max. 1000) CD76KE40- * -A CD76KE40- * -B
resistant material.
• Auto switch mounting in two options
by band or rail. * Stroke length
Double-acting, adjustable cushion, built-in magnet

Part number with
Bore size Standard strokes Auto switch mounting style Circuit Symbol
6 (mm) (mm) Rail mounting Band mounting
32 40, 50, 80, 100, 125, CD76E32- * C-A CD76E32- * C-B

Linear Actuators
A wide variety of different designs is 160, 200, 250, 300

40 CD76E40- * C-A CD76E40- * C-B
available, such as double piston rods, (max. 1000)
alternative cylinder head cover designs,
without magnet, single-acting, etc. * Stroke length
Mounting band for auto switch mounting

Bore size
32 40
BM2-032 BM2-040
Possible auto switches

Band mounting
Reed D-C73L, D-C73CZ, D-C80L
3-wire, solid state D-H7A1L, PNP:D-H7A2L
NPN:
Rail mounting
Reed D-A73L, D-A79WL
3-wire, solid state NPN: D-F79L, PNP:D-F7PL
2-wire solid state/2 colour D-M9BWL
Accessories C76
Foot or Foot or Single knuc- Double knuc- Floating
flanges Trunnion Clevis
Flange + 1 nut kle joint kle joint joint
ø
(mm)
32 C76F32A C76F32B C76T32 C76C32 KJ10DA GKM10-20 JA25-10-150
40 C76F40A C76F40B C76T40 C76C40 KJ12DA GKM12-24A JA40-12-175
* other tube diameters on request
102
Linear Actuators
Standard Cylinders
Standard Cylinder ISO/CETOP Standard cylinder, double-acting built-in magnet, rubber bumper
Part number with
Series C85 Cylinder Ø
(mm)
Standard strokes
(mm)
DIN-ISO 6432 Rail mounting Band mounting
8 10, 25, 40, 50, 80, 100 CD85N8- * -A CD85N8- * -B
10 (Max.400) CD85N10- * -A CD85N10- * -B
12 10, 25, 40, 50, 80, 100, CD85N12- * -A CD85N12- * -B
16 125, 160, 200, (max. 400) CD85N16- * -A CD85N16- * -B
20 10, 25, 40, 50, 80, 100, CD85N20- * -A CD85N20- * -B
125, 160, 200, 250, 300,
25 (max. 1000) CD85N25- * -A CD85N25- * -B
* Stroke length
Double-acting, non-rotating, built-in magnet
• Single or double acting.
• Cylinders with adjustable cushion Part number with
Bore size Standard strokes Auto switch mounting style
from Ø 10 mm. Circuit Symbols
(mm) (mm) Rail mounting Band mounting
• Cylinder body made from corrosion
resistant materials. 8 CD85KN8- * -A CD85KN8- * -A
• Two options for autoswitch mounting 10, 25, 40, 50, 80, 100,
10 (max. 400)
possible using band or rail. CD85KN10- * -A CD85KN10- * -A
• Special seals fitted as standard 12 10, 25, 40, 50, 80, 100, CD85KN12- * -A CD85KN12- * -A
for oil-free operation and band low 125, 160, 200
friction type. 16 (max. 400) CD85KN16- * -A CD85KN16- * -A
20 10, 25, 40, 50, 80, 100, CD85KN20- * -A CD85KN20- * -B
125, 160, 200, 250, 300
25 (max. 1000) CD85KN25- * -A CD85KN25- * -B
* Stroke length
Ø 8, 10 and 16 on request
Double-acting, adjustable cushion, built-in magnet

6
Part number with
Bore size Standard strokes
Linear Actuators
(mm) (mm) Rail mounting Band mounting
10 10, 25, 40, 50, 80, 100
(Max.400) CD85N10- * C-A CD85N10- * C-B
12 10, 25, 40, 50, 80, 100, CD85N12- * C-A CD85N12- * C-B
16 125, 160, 200 (max. 400) CD85N16- * C-A CD85N16- * C-B
20 10, 25, 40, 50, 80, 100, CD85N20- * C-A CD85N20- * C-B
125, 160, 200, 250, 300
25 (max. 1000) CD85N25- * C-A CD85N25- * C-B
* Stroke length
Mounting band for auto switch mounting

Bore size
8 10 12 16 20 25
BJ2-008 BJ2-010 BJ2-012 BJ2-016 BM2-020 BM2-025
A wide variety of different designs is
available, such as double piston rods, Possible auto switches
alternative cylinder head cover designs, Band mounting
without magnet, single-acting, etc. Reed D-C73L, D-C73CZ, D-C80L
3-wire solid state NPN: D-H7A1L, PNP:D-H7A2L
Rail mounting
Reed D-A73L, D-A79WL
3-wire, solid state NPN: D-F79L, PNP:D-F7PL
Accessories C85
Foot (2 pcs.) Single Double
Foot (1 pc.) Flange Trunnion Clevis Floating joint
+ 1 nut knuckle joint knuckle joint
ø
(mm)
8
C85L10A C85L10B C85F10 C85T10 C85C10 KJ4D GKM4-8 JA10-4-070
10
12
C85L16A C85L16B C85F16 C85T16 C85C16 KJ6D GKM6-12 JA15-6-100
16
20 C85L25A C85L25B C85F25 C85T25 C85C25 KJ8D GKM8-16 JA20-8-125
25 KJ10D GKM10-20 JA30-10-125
* other tube diameters on request
103
Linear Actuators
Standard Cylinders
Standard ISO Cylinders Bore size Piston rod Rod end Port Size Operating Cylinder speed
(mm) ø (mm) thread
Series C95 32 12 M10x1,25 G1/8
pressure range
40 16 M12x1,25 G1/4
50 20 M16x1.5 G1/4 50 ~ 1.000
63 20 M16x1.5 G3/8 mm/sec
M20x1,5 G3/8
C95
80 25 0,05~1MPa
100 30 M20x1,5 G1/2
125 32 M27x2 G1/2 50 ~ 700 mm/sec
160 40 M36x2 G3/4 50 ~ 500
200 40 M36x2 G3/4 mm/sec
• Standard VDMA cylinders in tierod G1
250 50 M42x2
design with standard outside
dimensions according to VDMA 24562.
• Standard fixings. Bore size
(*) Standard Strokes Part no.
• Bore sizes ø 32 – 250 mm (C95). (mm)
• Standard mounting brackets for all 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95SDB32-*
mounting options. 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95SDB40-*
• Non-lube operation. 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 C95SDB50-*
50
• SMC piston gasket achieves
63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 C95SDB63-*
considerably reduced friction, which
C95SDB80-*
C95
80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800
increases the efficiency and extends
100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 C95SDB100-*
the service life.
125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800, 1200 C95SDB125-*
• Auto switch mounting by tie-rod or
160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800, 1200 C95SDB160-*
band mounting.
200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800, 1200 C95SDB200-*
• Autoswitches can be supplied as
250 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800, 1200 C95SDB250-*
Reed switches or solid state switches.
6 Possible auto switches/Mounting accesories
Auto switch Bore size
mounting 32 40 50 63 80 100 125 160 200 250
Linear Actuators
Mini-tie-rod BMB4-032 BMB4-050 BA4-063 BA4-080 BS4-160 -

Auto switch D-Z73L, D-Z80L, D-Y59BL, D-Y7PL D-Z/Y
Standard tie-rod BT-03 BT-05 BT-06 BT-08 BT-16 BT-20
switch D-A53L, D-A54L, D-F5PL, D-A5/A6F5/J5
Other design variations, such as, for Mounting band BMB1-032 BMB1-040 BMB1-050 BMB1-063 BMB1-080 BMB1-0100 BS1-125 BS1-160 BS1-200 -
example dual stroke cylinders, tandem Autoswitch D-A44 D-A3/A4/K3/G3
cylinders, with built-in positioner, etc. are
available.
Piston rod
of the C95 - non-rotating
(Bore size 32 to 100 mm)
Mounting Accessories
Mounting Bracket for C95
Bore size Foot Double rear Single rear Angled rear Single Double
Flange
Single rear Double rear
clevis clevis with clevis with Angled rear Trunnion pivot Knuckle Joint Knuckle Joint Flotating
(mm) (2 pc.) clevis clevis ball joint clevis bracket Joint
(for ES accessory) ball joint (ISO 8139) (ISO 8140)
32 L5032 F5032 C5032 D5032 DS5032 CS5032 ES5032 E5032 C95-S03 KJ10D GKM10-20 JA30-10-125
80 L5080 F5080 C5080 D5080 DS5080 CS5080 ES5080 E5080 C95-S06 KJ20D GKM20-40 JAH50-20-150
104
Linear Actuators
Standard Cylinders
Bore size Piston rod Ø Cushion stroke Operating

Standard Cylinder ISO/VDMA Rod end Port
pressure
(mm) (mm) thread sizes (mm) range
Series CP95 32 12 M10x1,25 G1/8 19
Profile tube cylinders 40 16 M12x1,25 G1/4 19
50 20 M16x1.5 G1/4 24
63 20 M16x1.5 G3/8 24 0.05 - 1 MPa
80 25 M20x1,5 G3/8 30
100 30 M20x1,5 G1/2 30
125 32 M27x2 G1/2 Pool side 31
Head Size 29
• ISO/VDMA Standard cylinders in Standard

profile design with integrated tie-rods. Bore size
• Bore sizes ø 32 – 125 mm. (*) Standard Strokes Part no.
(mm)
• Integrated magnet and adjustable
cushion fitted as standard. 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CP95SDB32-*
• New floating cushion means smooth 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CP95SDB40-*
CP95
extension stroke. 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 CP95SDB50-*
• Auto switches fully integrated 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 CP95SDB63-*
into the body. 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 CP95SDB80-*
• Flat cylinder covers, means reducing 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 CP95SDB100-*
likelihood of contamination by dirt.
• Dust proof by virtue of the autoswitch
generator groove covering.
Non-rotate
Bore size
(mm) (*) Standard Strokes Part no. 6
32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CP95KDB32-*
40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CP95KDB40-*
Linear Actuators
CP95
50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 CP95KDB50-*
63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 CP95KDB63-*
Other special styles: 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 CP95KDB80-*
Low friction type. 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 CP95KDB100-*
Optional extension or retraction stroke.
High temperature type.
Piston rod of CP95K, non-rotating
Mounting Accessories
Mounting Bracket for CP95
Bore size Foot Double rear Single rear Angled rear Single Double
Flange
Single rear Double rear
clevis clevis with clevis with Angled rear Trunnion pivot Knuckle Joint Knuckle Joint Flotating
(mm) (2 pc.) clevis clevis ball joint clevis bracket Joint
(for ES accessory) ball joint (ISO 8139) (ISO 8140)
105
Linear Actuators
Compact Cylinders
Mini-free Mount Part no. Bore size Stroke Port Operating

Auto switch
double acting (mm) length (mm) thread pressure (MPa)
Series CUJ CUJB4- * D 4 4, 6, 8,10, 15, 20
CUJB6- * D 6 0.15 ~ 0.7 –
4, 6, 8 M3
CUJB8- * D 8
10, 15, 20, 25, 30
CUJB10- * D 10 0.1 ~ 0.7
CDUJB6- * D 6 3-wire solid state
CDUJB8- * D 4, 6, 8 M3 0.15 ~ 0.7 NPN: D-F8NL
8 PNP: D-F8 PL
10, 15, 20, 25, 30 0.1 ~ 0.7
CDUJB10- * D 10 2 wire D-F8BL
* Stroke length
Single acting: please use “S” instead of “D”, e.g. CDUJB10-10S.
Not all strokes can be provided.
With rod end thread: Use ”M” e.g..: CDUJB10-10DM.
• Significantly reduced dimensions
compared to Series CU.
• ~ 64% reduced overall length.
Length is shortened by approx. 64% max.
CU
• ~ 70% reduced weight.
CUJ
• Simple maintenance, since piston rod Volume is reduced by approx. 70% max.
cover is removable. (As compared with SMC Series CU cylinders without magnet)
Dimensions (Without magnet) (mm)

b Bore size
B (mm)
A(a) B(b) C(c)
4 10( — ) 15( — ) 13( — )
ke 6 13(13) 19(22) 13(33)

Stro
ke 8
A St
ro c+ 13( — ) 21( — ) 13( — )
C+
a 10 13.5(15) 22(24) 13(36)
Numbers in parentheses are the dimensions of SMC Series CU cylinders.
6
Linear Actuators
Free Mount Cylinder Standard

Bore size Standard strokes Rod end Possible auto
Series CDU/CDUK Part no.
(mm) (mm) thread
Port Size
switches
CDU6- * D 6 M3
5, 10, 15, 20,
CDU10- * D 10 M4 Reed
25, 30, 40, 50, 60
CDU16- * D 16 M5 M5 D-A93L
CDU20- * D 20 5, 10, 15, 20, M6
CDU25- * D 25 25, 30, 40, 50, 60, M8
CDU32TF- * D 32 70, 80, 90, 100 M10 G1/8 3 wire solid state:
Non-rotation rod NPN: D-M9NL

PNP: D-M9PL
CDUK6- * D 6 M3
5, 10, 15, 20, 2 wire solid state:
CDUK10- * D 10 M4
25, 30, 40, 50, 60 D-M9BAL
CDUK16- * D 16 M5 M5
CDUK20- * D 20 5, 10, 15, 20, M6
• Autoswitch can be integrated 25 25, 30, 40, 50, 60, M8
CDUK25- * D
in the body. CDUK32TF- * D 32 70, 80, 90, 100 M10 G1/8
* Stroke length
Mounting
106
Linear Actuators
Compact Cylinders
Free Mount Cylinder for Vacuum Part no.

Bore size Stroke Rod end
Port Size
Possible suction
(mm) (mm) thread pads
Series ZCDUKC ZCDUKC10- * D 10 5, 10, 15, 20, M4
ZCDUKC16- * D 16 25, 30 M5 see
M5
ZCDUKC20- * D 20 M6 Section Vacuum
5, 10, 15, 20,
ZCDUKC25- * D 25 M8
25, 30, 40, 50
ZCDUKC32TF- * D 32 M10 G1/8
* Stroke length
Possible signal generators
Reed D-A93L
3-wire, solid state/2 colour NPN: D-M9NWL, PNP:D-M9PWL
• Direct mounting of the suction pads

on the hollow, double piston rod.
• Fixed vacuum port at the rear end of Model for
the cylinder.
• No interfering tubes around the
VACUUM Applications
work piece.
• No moving hoses.
• Non-rotationg piston rod.
• Miniature auto switches in standard
design.
• Compact design, smooth outside
surface means simple installation.
Linear Actuators
107
Linear Actuators
Compact Cylinders
Compact Cylinder Standard cylinder, double-acting, without auto swicth

Bore size Strokes
Series CQS Part no.
(mm) (mm)
Port sizes Circuit Symbol
CQSB12- * D 12
5,10,15,20,25,30 M5
CQSB16- * D 16
CQSB20- * D 20 5,10,15,20,25,30,35,
40,45,50 M5
CQSB25- * D 25
* Stroke length
Long strokes can be provided: ø12, 16 = 35, 40, 45, 50, 75, 100, 125, 150, 175, 200
ø20 = 75, 100, 125, 150, 175, 200
ø25 = 75, 100, 125, 150, 175, 200, 250, 300
• Ø 12•16•20•25 mm.
• Flexible auto switch mounting Standard cylinder, double-acting, with auto swicth
on 3 or 4 sides. Bore size Standard strokes
Part no. Port sizes Circuit Symbol
• Auto switch fully integrated in the body. (mm) (mm)
• Square-section body style ensures full
CDQSB12- * D 12
flexibility in design projects. 5,10,15,20,25,30 M5
CDQSB16- * D 16
• Through-hole/Both ends tapped
CDQSB20- * D 20 5,10,15,20,25,30,35,
common (Standard). 40,45,50 M5
CDQSB25- * D 25
• A wide variety of mounting options
is available. * Stroke length
Long strokes can be provided: ø12, 16 = 35, 40, 45, 50, 75, 100, 125, 150, 175, 200
ø20 = 75, 100, 125, 150, 175, 200
ø25 = 75, 100, 125, 150, 175, 200, 250, 300
Compact cylinders, anti-lateral load type. Series CQSS

6 The permissible load at the piston rod end, in this version, is twice that of the simple
CQS series. The wear ring and bumper are standard on this type.
Linear Actuators
Example:
Compact cylinder Ø12, Stroke 20 mm, built-in magnet, double-acting, elastic rubber bumper
CDQSBS12-20DC
Reed: D-A93L , D-A90L
3 wire solid state: NPN: D-M9NWL, PNP:D-M9PWL
2 wire solid state: D-M9BWL

Bore size
Foot* Flange Double Clevis**
(mm)
12 CQS-L012 CQS-F012 CQS-D012
* 2 pcs. per cylinder should be ordered when foot brackets are required.
** Package for double clevis contains clevis pin and snap ring.
Note: Each package contains the following parts:
Foot, Flange: Body mounting bolt
Double clevis: Clevis pin, C shape snap ring for axis, body mounting bolt.
108
Linear Actuators
Compact Cylinders
Compact Cylinder Standard cylinder, double-acting, without auto swicth

Guide Rod Type Part no.
Bore size Strokes
Port sizes Circuit Symbol
(mm) (mm)
Series CQM CQMB12- * 12 M5
5, 10, 15, 20, 25, 30
CQMB16- * 16 M5
CQMB20- * 20 5, 10, 15, 20, 25, 30, 35, M5
CQMB25- * 25 40, 45, 50 M5
CQMB32TF- * 32 5, 10, 15, 20, 25, 30, 35, G1/8
CQMB40TF- * 40 40, 45, 50, 75, 100 G1/8
CQMB50TF- * 50 G1/4
CQMB63TF- * 63 10, 15, 20, 25, 30, 35, G1/4
CQMB80TF- * 80 40, 45, 50, 75, 100 G3/8
• Ø12•16•20•25•32•40•50•63•80• CQMB100TF- * 100 G3/8
100 mm.
* Stroke length
• Lateral Load Resisting 2–4times
*** Others strokes, please consult SMC.
(Compared to compact cylinder
series CQ). Standard cylinder, double-acting, with auto swicth
• Non-rotating accuracy ±0.2° or less. Bore size Strokes
• Load can be directly mounted. (mm) (mm)
• Compatible mounting dimensions CDQMB12- * 12 M5
with the series CQS, CQ2. 5, 10, 15, 20, 25, 30
CDQMB16- * 16 M5
CDQMB20- * 20 5, 10, 15, 20, 25, 30, 35, M5
CDQMB25- * 25 40, 45, 50 M5
CDQMB32TF- * 32 5, 10, 15, 20, 25, 30, 35, G1/8
CDQMB40TF- * 40 40, 45, 50, 75, 100 G1/8
CDQMB50TF- * 50 G1/4
CDQMB63TF- * 63 10, 15, 20, 25, 30, 35, G1/4
CDQMB80TF- * 80 40, 45, 50, 75, 100 G3/8 6
CDQMB100TF- * 100 G3/8
* Stroke length
Linear Actuators
ISO Standard [ISO 21287] Standard cylinder, double-acting, without auto swicth
Compact Cylinder Bore size Strokes
Series C55 (mm) (mm)
C55B20- * 20 M5
C55B25- * 25 M5
C55B32- * 32 5, 10, 15, 20, 25, 30, 35, G1/8
C55B40- 40 40, 45, 50, 60, 80, 100, G1/8
*
125, 150
C55B50- * 50 G1/8
C55B63- * 63 G1/8
* Stroke length
Standard cylinder, double-acting, with auto swicth
Bore size Strokes
• Ø20•25•32•40•50•63 mm. Part no. Port sizes Circuit Symbol
(mm) (mm)
• Standard ISO compact cylinders
comply to ISO21287. CD55B20- * 20 M5
CD55B25- * 25 M5
CD55B32- * 32 5, 10, 15, 20, 25, 30, 35, G1/8
CD55B40- 40 40, 45, 50, 60, 80, 100, G1/8
*
125, 150
CD55B50- * 50 G1/8
CD55B63- * 63 G1/8
* Stroke length
* Order two foot brackets per
Bore size
Foot* Flange Single Clevis** cylinder.
(mm)
** Parts belonging to each brac-
20 C55-L020 C55-F020 C55-C020 ket are as follows. Foot, Flange,
25 C55-L025 C55-F025 C55-C025 Single clevis/Body mounting
32 C55-L032 C55-F032 C55-C032 bolt.
40 C55-L040 C55-F040 C55-C040
50 C55-L050 C55-F050 C55-C050
63 C55-L063 C55-F063 C55-C063
109
Linear Actuators
Compact Cylinders
Compact cylinder Standard cylinder, double-acting, without magnetic ring

Bore size Stroke lengths
Series CQ2 Part no.
(mm) (mm)
Connection
sizes
Circuit Symbols
CQ2B12- * D 12
5, 10, 15, 20, 25, 30 M5
CQ2B16- * D 16
CQ2B20- * D 20 5, 10, 15, 20, 25, 30, 35,
40, 45, 50 M5
CQ2B25- * D 25
ECQ2B32- * D 32 5, 10, 15, 20, 25, 30, 35, M5** / G1/8
ECQ2B40- * D 40 40, 45, 50, 75, 100,*** G1/8
ECQ2B50- * D 50
G1/4
ECQ2B63- * D 63 10, 15, 20, 25, 30, 35,
• Compact length cylinder. ECQ2B80- * D 80 40, 45, 50, 75, 100,***
• Bore sizes ø 12 – 200 mm. G3/8
ECQ2B100- * D 100
• Stroke range 5 – 300 mm. ECQ2B125- * DC 125
• Cylinder function double-acting, ECQ2B140- * DC 140 G3/8
single-acting with spring, optional ECQ2B160- * DC 160 10, 20, 30, 40, 50, 75,
spring return or spring extend. 100,****
ECQ2B180- * DC 180
• Optionally with rubber bumper G1/2
ECQ2B200- * DC 200
cushion.
* Stroke length
• Autoswitch for stroke end detection ** with 5 mm stroke
with LED in 2-wire design. *** Strokes 125, 150, 175, 200, 250, 300 mm in version ECQ2A Ø - *** DC
**** Strokes 125, 150, 175, 200, 250, 300 mm
• Auto switch mounting in grooves M: Male rod option add at the end of the reference.
or on mounting rails. Standard cylinder, double-acting, with magnetic ring
(mm) (mm)
CDQ2B12- * D 12
5, 10, 15, 20, 25, 30 M5
CDQ2B16- * D 16
6 CDQ2B20- * D 20 5, 10, 15, 20, 25, 30, 35,
40, 45, 50 M5
CDQ2B25- * D 25
ECDQ2B32- * D 32 5, 10, 15, 20, 25, 30, 35,
Linear Actuators
40, 45, 50, 75, 100,*** G1/8”

ECDQ2B40- * D 40
ECDQ2B50- * D 50
G1/4”
ECDQ2B63- * D 63 10, 15, 20, 25, 30, 35,
ECDQ2B80- * D 80 40, 45, 50, 75, 100,***
G3/8”
ECDQ2B100- * D 100
ECDQ2B125- * DC 125
ECDQ2B140- * DC 140 G3/8”
10, 20, 30, 40, 50, 75,
ECDQ2B160- * DC 160 100,****
ECDQ2B180- * DC 180
200 G1/2”
ECDQ2B200- * DC
* Stroke length
*** Strokes 125, 150, 175, 200, 250, 300 mm in version ECQ2A Ø - *** DC
**** Strokes 125, 150, 175, 200, 250, 300 mm
M: Male rod option add at the end of the reference.
Cylinder, double rod, double-acting, with magnet
(mm) (mm)
CDQ2WB12- * D 12
5, 10, 15, 20, 25, 30 M5
CDQ2WB16- * D 16
CDQ2WB20- * D 20 5, 10, 15, 20, 25, 30, 35,
40, 45, 50, M5
CDQ2WB25- * D 25
ECDQ2WB32- * D 32 5, 10, 15, 20, 25, 30, 35,
40, 45, 50, 75, 100, G1/8
ECDQ2WB40- * D 40
ECDQ2WB50- * D 50
G1/4
ECDQ2WB63- * D 63 10, 15, 20, 25, 30, 35,
ECDQ2WB80- * D 80 40, 45, 50, 75, 100,
G3/8
ECDQ2WB100- * D 100
ECDQ2WB125- * DC 125
ECDQ2WB140- * DC 140 G3/8
10, 20, 30, 40, 50, 75,
ECDQ2WB160- * DC 160 100,
G1/2
* Stroke length Type without magnet: without D, e.g.: CQ2WB12-5D
Longer strokes on request M: Male rod option add at the end of the reference.
110
Linear Actuators
Compact Cylinders
Cylinder, non-rotating, double-acting, built-in magnet

(mm) (mm)
CDQ2KB12- * D 12
5, 10, 15, 20, 25, 30 M5
CDQ2KB16- * D 16
CDQ2KB20- * D 20 5, 10, 15, 20, 25, 30, 35,
M5
CDQ2KB25- * D 25 40, 45, 50
ECDQ2KB32- * D 32 5, 10, 15, 20, 25, 30, 35,
G1/8
ECDQ2KB40- * D 40 40, 45, 50, 75, 100
ECDQ2KB50- * D 50 10, 15, 20, 25, 30, 35,
G1/4
ECDQ2KB63- * D 63 40, 45, 50, 75, 100
* Stroke length
Type without magnet: without D, e.g.: CQ2KB12-5D
Cylinder, single acting, spring return, without magnet

(mm) (mm)
CQ2B12- * S 12
5, 10 M5
CQ2B16- * S 16
CQ2B20- * S 20
5, 10 M5
CQ2B25- * S 25
ECQ2B32- * S 32 M5** / G1/8
5, 10
ECQ2B40- * S 40 G1/8
ECQ2B50- * S 50 10, 20 G1/4
* Stroke length
** with 5 mm stroke
6
Linear Actuators
Cylinder, single-acting, spring-extend, without magnet
(mm) (mm)
CQ2B12- * T 12
5, 10 M5
CQ2B16- * T 16
CQ2B20- * T 20
5, 10 M5
CQ2B25- * T 25
ECQ2B32- * T 32 M5** / G1/8
5, 10
ECQ2B40- * T 40 G1/8
ECQ2B50- * T 50 10, 20 G1/4
* Stroke length
** with 5 mm stroke

Bore size
Foot* Flange Double Clevis**
(mm)
12 CQ-L012 CQ-F012 CQ-D012
16 CQ-L016 CQ-F016 CQ-D016
20 CQ-L020 CQ-F020 CQ-D020
25 CQ-L025 CQ-F025 CQ-D025
32 CQ-L032 CQ-F032 CQ-D032
40 CQ-L040 CQ-F040 CQ-D040
50 CQ-L050 CQ-F050 CQ-D050
63 CQ-L063 CQ-F063 CQ-D063
* 2 pcs. per cylinder should be ordered when foot brackets are required.
** Package for double clevis contains clevis pin and snap ring.
Note: Each package contains the following parts:
Foot, Flange: Body mounting bolt
Double clevis: Clevis pin, C shape snap ring for axis, body mounting bolt.
Note2: Mountings need to be used with ECQ2”A”... version.
111
Linear Actuators
Compact Cylinders
Compact cylinder Part no.

Bore size Standard Strokes
Port Size Foot Flange
Double
with Air Cushion (mm) (mm) clevis
Series RQ RDQB20- *
RDQB25- *
20
25
15, 20, 25,
30, 40, 50
M5
CQS-L020
CQS-L025
CQS-F020
CQS-F025
CQS-D020
CQS-D025
RDQB32TF- * 32 20, 25, 30, 40, CQ-L032 CQ-F032 CQ-D032
G 1/8
RDQB40TF- * 40 50, 75, 100 CQ-L040 CQ-F040 CQ-D040
RDQB50TF- * 50 30, 40, 50, CQ-L050 CQ-F050 CQ-D050
75, 100 G 1/4
RDQB63TF- * 63 CQ-L063 CQ-F063 CQ-D063
RDQB80TF- * 80 40, 50, 75, CQ-L080 CQ-F080 CQ-D080
100 G 3/8
RDQB100TF- * 100 CQ-L0100 CQ-F0100 CQ-D100
* Stroke length
• Uses a unique air cushion mechanism

with no cushion ring.
• Noise reduction and improvement in
repeatability.
• Wide size variations from ø20 to ø100.
• Minimal extended dimensions from +
2.5mm to 13mm.
• Nearly three times the allowable
kinetic energy.
• Interchangeable mounting for CQ2
and CQS.
6 Plate Cylinder with Standard

elliptical piston design Part no.
Bore size Stroke lengths
Port Size
Possible auto
(mm) (mm) switches
Series MU
Linear Actuators
MDUB25- * D(M) 25 M5
5, 10, 15, 20, 25, 30, Reed
MDUB32- * D(M) 32 Rc(PT)1/8
35, 40, 45, 50, 75 D-A73 , D-A80
MDUB40- * D(M) 40 Rc(PT)1/8
100, 125, 150, 175 D-79WL
MDUB50- * D(M) 50 Rc(PT)1/4
200, 250, 300 3 wire solid state:
MDUB63- * D(M) 63 Rc(PT)1/4
NPN: D-F79L
Double rod style PNP: D-F7PL
MDUWB25- * D(M) 25 M5 2 wire solid state:
5, 10, 15, 20, 25, 30,
MDUWB32- * D(M) 32 Rc(PT)1/8 D-J79L
35, 40, 45, 50, 75,
MDUWB40- * D(M) 40 Rc(PT)1/8
100, 125, 150, 175,
• Cylinder with elliptical piston means MDUWB50- * D(M) 50 Rc(PT)1/4
200, 250, 300
MDUWB63- * D(M) 63 Rc(PT)1/4
piston rod cannot rotate and the
thickness is reduced. * Stroke length
• Cylinder head with all-round mounting Mounting brackets
holes, additional mounting elements Diameter Ø25 Ø32 Ø40 Ø50 Ø63
can be used. Foot MU-L02 MU-L03 MU-L04 MU-L05 MU-L06
• Piston rod end with either male Flange MU-F02 MU-F03 MU-F04 MU-F05 MU-F06
or female thread. Single clevis MU-C02 MU-C03 MU-C04 MU-C05 MU-C06
• Auto switch for stroke end detection Double clevis MU-D02 MU-D03 MU-D04 MU-D05 MU-D06
with LED in 2-wire design can be
mounted on two sides.
112
Linear Actuators
Combination Cylinders
Compact Slide Part no.

Ø Standard strokes
Port Size Cylinder speed
(mm) (mm)
Series MXH MXH6- * 6
MXH10- * 10 5, 10, 15, 20, 25, 30, M5 50 ~ 500 mm/
MXH16- * 16 40, 50, 60 sec
MXH20- * 20
* Stroke

Reed: D-A93L, D-A90L,
• Sizes Ø 6 – 20 mm, 3 wire solid state/2 colour: NPN: D-M9NWL, PNP:D-M9PWL
Strokes up to 60 mm. 2 wire solid state/2colour: D-M9BWL
• Combination of guide unit and actuator.
• Improved moment absorption, excellent Application examples
guide accuracy.
• Compact body design.
• Universal mounting option as a result of
tapped and through holes on the slide
and the body.
• Auto switch for stroke end detection with
LED can be integrated in the body.
• Compared to MXU series, allowable
moment is approximately 6 times
improved. Pick&Place Positioning
Vacuum
Measuring
Linear Actuators
Compact Slide Part no. Ø Standard Strokes Port Size Cylinder speed
(mm) (mm)
Series MXU MXU6- * 6 5, 10
50 ~ 500 mm/
MXU10- * 10 15, 20 M5 sec
MXU16- * 16 25, 30
* Stroke
• Sizes Ø 6 – 16 mm.
• The miniature linear guide improves Universal mounting
the linear movement and non-rotating Vertical mounting (Body tapped)
accuracy of the cylinder with a 3 in parallel Lateral mounting (Body through hole) Axial mounting (Body tapped)
(Dispenser)
worktable. Parts transfer Lateral mounting (Body tapped) Positioning pin
• Displacement accuracy against Precision adsorption
moments.
• Parallel traveling (No load), 0.05mm
or less.
• Mounting is possible in three directions.
• Auto switch can be mounted.
113
Linear Actuators
Compact Slide with Standard version is without stroke setting units

Ø Standard strokes Stroke adjustment
Precision Guide Part no. Port Size
range optional
(mm) (mm)
Series MXS MXS6- * 6 10, 20, 30, 40, 50 M3
MXS8- * 8 10, 20, 30, 40, 50, 75
M5 0 - 5 mm
MXS12- * 12 10, 20, 30, 40, 50, 75, 100
0 - 15 mm
MXS16- * 16 10, 20, 30, 40, 50, 75, 100, 125
0 - 25 mm
MXS20TF- * 20 10, 20, 30, 40, 50, 75,
G1/8”
MXS25TF- * 25 100, 125, 150
* Stroke
• Sizes ø 6 –25 mm, Stroke adjustment

Strokes max. 150 mm. units MXS-
• Combination of guide unit and dual-rod • • Setting Range
actuator. A With rubber stopper per side for version A
• Heavy-duty cam follower guide without – 0 - 5 mm
B With shock-absorbers (except Ø 6 mm)
backlash. X11 0 - 15 mm
• Stroke adjustment possible at both end
X12* 0 - 25 mm
positions, each 0 – 5 mm (0-15, 0-25 mm). • * not available for Ø 6 mm
• Cushion by rubber bumpers or shock- S Extension stroke adjustment X11 and X12 are not available
absorber. T Retraction stroke adjustment for shock absorber type.
• Universal mounting option (tapped •
and through holes) on the slide and Bore size • - Standard MXQ
in the body. 6 6 mm L Mirror-image MXQ
• Stoppers can be fitted on the right or
8 8 mm
left side of the body (Symmetric Type).
12 12 mm Possible signal generators
• Auto switch for stroke end detection
6 with LED can be integrated in the
16 16 mm Reed: D-A93L, D-A90L,
20 20 mm 3 wire solid state/2 colour: NPN: D-M9NWL, PNP:D-M9PWL
body.
25 25 mm 2 wire solid state/2colour: D-M9BWL
Linear Actuators
A wide variety of options and designs is available.
Compact Slide with Pat no. Ø Standard strokes Port Size Stroke adjustment
recirculating ball bearing (mm) (mm) range
Series MXQ MXQ6- *

MXQ8- *
6
8
10, 20, 30, 40, 50
10, 20, 30, 40, 50, 75 0 ~ 5 mm
M5
MXQ12- * 12 10, 20, 30, 40, 50, 75, 100 0 ~ 15 mm
MXQ16- * 16 10, 20, 30, 40, 50, 75, 100, 125 0 ~ 25 mm
MXQ20TF- * 20 10, 20, 30, 40, 50,
G1/8”
MXQ25TF- * 25 75, 100, 125, 150
* Stroke length
Stroke adjusting units

• Sizes 6 - 25 mm.
•
MXQ-
• Strokes up to 150 mm.
A With rubber stopper • Setting Range
• Combined guide unit and double
dual-rod actuator. B With shock-absorbers (except Ø 6 mm) per side for version A
• Integrated recirculating ball C With metal stopper – 0 - 5 mm
bearing for increased moment • X11 0 - 15 mm
loads and guide accuracy. X12* 0 - 25 mm
S Extension stroke adjustment * not available for Ø 6 mm
• Slide made from hardened T Retraction stroke adjustment X11 and X12 are not available for
stainless steel. shock absorber type.
• A wide variety of designs are Bore size Ø • •
available as options. 6 6 mm - Standard MXQ
8 8 mm L Mirror-image MXQ
12 12 mm
16 16 mm Possible signal generators
20 20 mm Reed: D-A93L, D-A90L,
3 wire solid state/2 colour: NPN: D-M9NWL, PNP:D-M9PWL
25 25 mm
2 wire solid state/2colour: D-M9BWL
114
Linear Actuators
Mini Compact Slide Part no. Ø Standard strokes Port Size Stroke adjustment
range
Series MXF MXF8- *
(mm)
8
(mm)
10,20,30 M3
MXF12- * 12 20,30,50 0 ~ 5mm
MXF16- * 16 30,50,75 M5 both sides
MXF20- * 20 30,50,75,100
* Stroke length

• Sizes ø 8 – 20 mm, 2 wire solid state/2colour: D-M9BWL
Strokes up to 100 mm.
• Combination of guide unit and
actuator (small profile design).
• Cam follower guide without backlash.
• Universal mounting option
(tapped and through holes) on the
slide and in the body.
• Stroke adjustment on both sides.
• Auto switch with LED and 2-wire
design can be integrated in the body.
Linear Actuators
Compact Slide with Part no.
Ø Standard strokes
Port Size
Stroke adjustment
Precision Guide (mm) (mm) range
Series MXW MXW8- * **

MXW12- * **
8
12
25,50,75,100,125,150
50,75,100,125,150 M5
16 5 mm
MXW16- * ** 75,100,125,150,175,200
20 both sides
EMXW20- * ** 100,125,150,175,200,225,250
G1/8”
EMXW25- * ** 25 100,125,150,175,200,225,250,275,300
* Stroke length
** Stopper: - : Rubber stopper
B : Shock-absorber

• Sizes ø 8 – 25 mm, Reed: D-A93L, D-A90L,
Strokes up to 300 mm. 3 wire solid state/2 colour: NPN: D-M9NWL, PNP:D-M9PWL
• Combination of guide unit and dual-rod 2 wire solid state/2colour: D-M9BWL
actuator.
• Recirculating ball bearing guide
without backlash.
• Stroke adjustment at both end positions
each 0 – 5 mm.
• Universal mounting option (tapped
and throug holes) on the slide and body.
• Auto switch with LED and 2 – wire
design can be integrated in the body.
115
Linear Actuators
Compact Precision Air Miniature slide

Ø Standard Stroke setting
Slide Table with Linear Guide Part no.
(mm) Strokes (mm)
Port Size
range
Stoppers
Series MXP MXPJ6- * 6 5, 10 M3 – –
Standard design
Part no. Ø Standard Port Size Stroke setting Stoppers

(mm) Strokes (mm) range
MXP6- * ** 6 5, 10 M3
8 Rubber stopper,
MXP6- * ** 10, 20
shock-absorber
MXP10- * ** 10 10, 20 both sides
M5 (except Ø6, Ø8)
MXP12- * ** 12 15, 25
metal stoppers
• Sizes ø 6 – 16 mm, strokes 5-30 mm. MXP16- * ** 16 20, 30
• Mini compact slide unit with precise * Stroke
ball bearing linear guides.
** Stoppers: – elastic
• Cylinder function double-acting. B Shock-absorber
• Stroke adjustment in both end MXP C Metal stoppers
positions (as standard).
with LED can be integrated into the
body (except MXPJ6).
• Shock absorber on both sides
available (except MXP6, MXP8).
Positioning of
Transport Devices Feed/Positioning
6
Linear Actuators
Compact Slide, long Part no.

Bore size
Standard strokes Port size
Stroke adjustment
Stroke type (mm) range
Series MXY MXY6- * **

MXY8- * **
6
8
50, 100, 150, 200
50, 100, 150, 200, 250, 300
Centralized
on one side
Rubber and metal:
0 - 5 mm
Shock-absorber at Ø 12:
MXY12- * ** 12 50, 100, 150, 200, 250, 300, 350, 400 M5 0 - 15 mm
* Stroke length
** Stopper: - …rubber stopper
C …metal stopper
B …Shock-absorber only available for Ø 12 mm

• Magnetically coupled rodless cylinder 2 wire solid state/2colour: D-M9BWL
with high-precision recirculating ball
bearing.
• Extremely compact dimensions.
• Long stroke up to 400 mm, at Ø 12 mm
possible.
• Stroke adjustment and auto switch
rail as standard.
MXY
116
Linear Actuators
Precision Guide Cylinders Bore size Standard strokes

Part no. Port Size Cushion
Series MTS Ø (mm) (mm)
MTS8 - * 8 5, 10, 15, 20, 25, 30 M3 Rubber bumper

MTS12 - * (M) 12
25, 50, 75, 100,
MTS16 - * (M) 16
M5
MTS20 - * (M) 20 25, 50, 75, 100, Air Cushion
MTS25 - * (M) 25 125, 150, 175, 200
MTS32TF- * (M) 32 25, 50, 75, 100,
G 1/8”
MTS40TF- * (M) 40 125, 150, 175, 200
* Stroke length
• Sizes ø 8 – 40 mm, Reed: D-A90L, D-A93L,
Standard strokes up to 200 mm. 3 wire solid state/2 colour: NPN: D-M9NWL, PNP:D-M9PWL
• Cylinders with high quality recirculating 2 wire solid state/2colour: D-M9BWL
ball bearing on the piston rod for im-
proved repeatability and non-rotating
Pick & Place
accuracy.
• Double-acting cylinder function, with Positioning
air cushion at both ends.
• Mounting possibilities on all four
body sides and the front with reduced
deflection.
can be integrated in the body profile.
• End lock, stroke adjustment units are
available as options.
6
MTS with end lock and stroke
Linear Actuators
adjustment mechanism
on request.
117
Linear Actuators
Mechanically Jointed Part no.

Ø Standard strokes **
Port Size Cushion
Rodless Cylinders (mm) (mm)
Series MY1B MY1B10G - *

MY1B16G - *
10
16
100 ~ 2.000
100 ~ 2.000 (max. 3.000) M5
Rubber bumper
MY1B20G - * 20
EMY1B25G - * 25
G1/8 adjustable
EMY1B32G - * 32
40 100 ~ 2.000 (max. 5.000) air cushion
EMY1B40G - * G1/4
EMY1B50G - * 50
63 G3/8
EMY1B63G - *
EMY1B80G - * 80
G1/2
EMY1B100G - * 100
* Stroke length
** Suffix -XB11 in part number for strokes > 2000 mm
• Sizes ø 10 - 100 mm,
• Guide slide for vertical loading and Stroke adjustment units
longitudinal moments. Ø (mm) 10 16 20 25 32 40
• Reduced length as compared to piston Unit A MY-A10A MY-A16A MY-A20A MY-A25A MY-A32A MY-A40A
rod cylinders with the same stroke. Unit L — — MY-A20L MY-A25L MY-A32L MY-A40L
• Force-efficient power transmission Unit H MY-A10H — MY-A20H MY-A25H MY-A32H MY-A40H
between piston and slide.
• Resin seal belt reduces leakage. Unit A With adjusting bolt
• Steel dust seal hand with resin cover Unit L Low load shock absorber + adjusting bolt
provides optimum protection of the Unit H High load shock absorber + adjusting bolt
sealing track.
• Stroke adjusting unit combined with Shock-absorbers for L and H units
shock-absorbers and/or adjusters. Ø (mm) 10 20 25 32 40
6 • Piping ports either on one side or both Type L RB0806 RB1007 RB1412 RB1412
Type H RB0805 RB1007 RB1412 RB2015 RB2015
sides.
Linear Actuators
Stroke adjuster
Side supports
Ø (mm) Part No.
10 MY-S10A
16 MY-S16A
20 MY-S20A
Side support mounting 25 • 32 MY-S25A
40 • 50 MY-S32A
63 MY-S40A
80 • 100 MY-S63A
Mounting with floating bracket

Floating bracket mounting Ø (mm) Part No.
10 MY-J10
16 MY-J16
20 MY-J20
25 MY-J25
32 MY-J32
40 MY-J40
50 MY-J50
63 MY-J63
80 MY-J80
100 MY-J100
Standard Possible auto switches

Bearing Minimal dimensions, ideal for Ø 10•16•20 mm
combination Reed: D-A93L
with external guides
2 wire solid state/2 colour: D-M9BWL
Ø 25•32•40•50•63•80•100 mm
Reed: D-Z73L, D-Z80L
3 wire solid state: NPN: D-Y59AL, PNP:D-Y7PL
2 wire solid state: D-Y59BL
118
Linear Actuators
Ø Standard strokes
Mechanically Jointed Part no.
(mm)
Port Size Cushion
(mm)
Rodless Cylinder
MY1M16G - * 16 100 ~ 2.000 (max. 3.000)
Series MY1M MY1M20G - * 20
M5
EMY1M25G - * 25
G1/8 adjustable
EMY1M32G - * 32 air cushion
EMY1M40G - * 40 100 ~ 2.000 (max. 5.000) G1/4
EMY1M50G - * 50
G3/8
EMY1M63G - * 63
* Stroke length
Stroke adjustment unit

ø(mm) Ø16 Ø20 Ø25 Ø32 Ø40 Ø50 Ø63
Type A MYM-A16A MYM-A20A MYM-A25A MYM-A32A MYM-A40A MYM-A50A MYM-A63A
• Sizes ø 16 – 63 mm, strokes up to Type L MYM-A16L MYM-A20L MYM-A25L MYM-A32L MYM-A40L MYM-A50L MYM-A63L
5000 mm. Type H MYM-A16H MYM-A20H MYM-A25H MYM-A32H MYM-A40H MYM-A50H MYM-A63H
• Slide with four slide bearing rails for
all loading directions, in addition to Design of the stroke adjustment units
accommodation of longitudinal and Unit A With adjusting bolt
lateral moments . Unit L Low load shock absorber + adjusting bolt
• Reduced length as compared to piston Unit H High load shock absorber + adjusting bolt
rod cylinders with the same stroke.
• Force-efficient power transmission
Side supports
Ø (mm) Part No.
• Resin seal belt reduces leakage.
16 MY-S16A
• Steel dust seal band with resin
20 MY-S20A
cover provides optimum protection of 25 MY-S25A
the sealing track. 32 MY-S32A
• Stroke adjustment unit combined with 40,50 MY-S40A 6
shock-absorbers and/or adjusting bolts. 63 MY-S63A
• Piping port either on one side or both sides.
Linear Actuators
and intermediate stroke detection can Possible auto switches
be integrated in the body. Ø 10•16•20 mm
Reed: D-A93L
Slide Bearing 2 wire solid state/2 colour: D-M9BWL
Bearing Work piece Ø 25•32•40•50•63 mm
can be directly
Adjusting mounted
mechanism on the slide 3 wire solid state: NPN: D-Y59AL, PNP:D-Y7PL
Mechanically Jointed
Rodless Cylinder with
Protective Covering
Series MY1*W
• Can be supplied for cylinder series MY1M

and MY1C.
• Provides optimum protection against coarse
contaminants.
• Protective cover can be retro-fitted to
standard cylinders.
• Can be supplied for Ø 16, 20, 25, 32, 40, 50
and 63 mm.
119
Linear Actuators
Mechanically Jointed Series MY1C - Cam follower guides

Rodless Cylinder Part no.
Ø Standard strokes
Port Size Cushion
(mm) (mm)
Series MY1C16G - * 16 100 ~ 2.000 (max. 3.000)
MY1C/MY1H MY1C20G - * 20
M5
EMY1C25G - * 25 Adjustable
G1/8
EMY1C32G - * 32 100 ~ 2.000 (max. 5.000) air cushion
EMY1C40G - * 40 G1/4
EMY1C50G - * 50
G3/8
EMY1C63G - * 63
* Stroke length
Series MY1H – linear Guides
• Sizes MY1C: 16 - 63 mm. Ø Standard strokes**

MY1H: 10 - 40 mm. (mm) (mm)
• Strokes up to 1500 mm (MY1H) or MY1H10G - * 10 50, 100, 150, Rubber bumper
5000 mm (MY1C). 16 200, 250, 300,
MY1H16G - * 350, 400, 450, M5
• Slide table design: MY1H20G - * 20 500, 550, 600 (máx.1000)
MY1C: with cam follower EMY1H25G - * 25 Adjustable
guides. 50, 100, 150, G1/8 air cushion
EMY1H32G - * 32
MY1H: recirculating linear 200, 250, 300,
350, 400, 450,
guides. EMY1H40G - * 40 500, 550, 600 (máx.1500) G1/4
• For all loading directions, and for the
accommodation of longitudinal and
* Stroke length
lateral moments .
** Add “-XB10” to the end of the p/n for non-standard
• Reduced length as compared to strokes from 51 to 599. Also when exceding 600mm stroke,specify “-XB11”
piston rod cylinders with the same at the end of the p/n (except ø10)
6 stroke. Stroke adjustment unit MY1C
• Force-efficient power transmission
Ø (mm) 16 20 25 32 40 50 63
Type A MYM-A16A MYM-A20A MYM-A25A MYM-A32A MYM-A40A MYM-A50A MYM-A63A
• Resin seal belt reduces leakage.
Linear Actuators
Type L MYM-A16L MYM-A20L MYM-A25L MYM-A32L MYM-A40L MYM-A50L MYM-A63L

• Steel dust seal band with resin Type H – MYM-A20H MYM-A25H MYM-A32H MYM-A40H MYM-A50H MYM-A63H
cover provides optimum protection of
the sealing track. Side supports for MY1C
• Stroke adjusting unit combined with Ø (mm) 16 20 25 32 40, 50 63
shock absorbers and adjusting bolts. Type A MY-S16A MY-S20A MY-S25A MY-S32A MY-S40A MY-S63A
• Piping port either on one side or both Type B MY-S16B MY-S20B MY-S25B MY-S32B MY-S40B MY-S63B
sides.
Side supports for MY1H
and intermediate stroke detection can Ø (mm) 10 16 20 25 32 40
be integrated in the body. Type A – MYH-A16A MYH-A20A MYH-A25A MYH-A32A MYH-A40
Type L – MYH-A16L MYH-A20L MYH-A25L MYH-A32L MYH-A40L
Type H MYH-A10H – MYH-A25H MYH-A25H MYH-A32H MYH-A40H
Cylinder mounting bracket for MY1H

Ø (mm) 10 16 20 25 32 40
Type A MY-S10A MY-S16A MY-S20A MY-S25A MY-S32A MY-S40A
Type B MY-S10B MY-S16B MY-S20B MY-S25B MY-S32B MY-S40B
Mechanically Jointed
Design of the stroke adjusting units
Rodless Cylinder with Type A adjustable stopper bolts
Linear Guides on both sides Type H adjustable stopper bolts and shock-absorbers
Series MY1HT Side supports

Ø 50 - Ø 63 mm Type A Through hole
Maximum loads: Type B Tapped hole
MY1HT50: 2000 N
MY1HT63: 3160 N
Reed: Ø 10, 16, 20 mm: D-A93L, D-A90L, from Ø 25 mm: D-Z73L, D-Z80L
3 wire solid state: D-M9PWL, from Ø 25 mm: D-Y7PL
PNP: Ø 10, 16, 20 mm:
2 wire solid state: Ø 10, 16, 20 mm: D-M9BWL, from Ø 25 mm: D-Y59BL
120
Linear Actuators
Mechanically Jointed Rodless Part no.

Bore size Standard strokes Number of Moments
(mm) (mm) Port Size
Cylinder, Low Profile Design Guides M1/M2/M3 (Nm)
Series MY2H/HT/C MY2H16G - *

MY2H25TFG- *
16
25
50, 100, 150, 200,
250, 300, 350, 400, 1
7/6/7
28/26/26
M5
G 1/8
MY2H40TFG- * 40 450, 500, 550, 600 60/50/60 G 1/4
MY2HT16G - * 16 max. Ø16: 1000, 46/55/46 M5
MY2HT25TFG- * 25 Ø25/40: 1500 2 100/120/100 G 1/8
MY2HT40TFG- * 40 200/220/200 G 1/4
MY2C16G - * 16 100 - 2000 5/4/3,5 M5
MY2C25TFG- * 25 max. ø16: 3000 1 13/14/10 G 1/8
MY2C40TFG- * 40 max. ø25/40: 5000 45/33/28 G 1/4
* Stroke length
• Compact, extremely flat design.
Stroke adjusting unit
• Height reduction by 30% compared
to MY1. ø (mm) Ø16 Ø25 Ø40
• Bore sizes 16, 25 and 40 mm. MY2H L MY2H-A16L MY2H-A25L MY2H-A40L
H MY2H-A16H MY2H-A25H MY2H-A40H
• Increased load and moment capacity MY2HT L MY2HT-A16L MY2HT-A25L MY2HT-A40L
are possible. H MY2HT-A16H MY2HT-A25H MY2HT-A40H
• Available either with one (MY2H) or
MY2C L MY2H-A16L MY2H-A25L MY2C-A40L
two (MY2HT) linear guides. MY2H-A25H MY2C-A40H
H –
• Cylinder can be replaced without
removing the work piece.
• MY2C: Cam follower guides.
• MY2H/HT: Linear guides.
Work piece Cylinder mounting
bolts
Guide unit
6
Linear Actuators
Cylinder body
Slider
121
Linear Actuators
Mechanically Jointed Short style cylinder (rubber bumper)

Rodless Cylinders Part no. Port Size Cushion
(mm) (mm)
Series MY3A/3B/3M MY3A16 - * 16 100, 200, 300, 400, 500, 600, M5
MY3A25TF - * 25 700, 800, 900, 1000, 1200, G1/8
MY3A Rubber bumper
MY3A40TF - * 40 1400, 1600, 1800, 2000 G1/4
MY3A50TF - * 50 (max. 3.000) G3/8
* Stroke length
MY3B
Standard cylinder (air cushion)
(mm) (mm)
MY3M MY3B16 - * 16 100, 200, 300, 400, 500, 600, M5

MY3B25TF - * 25 700, 800, 900, 1000, 1200, G1/8 adjustable
MY3B40TF - * 40 1400, 1600, 1800, 2000 G1/4 air cushion
MY3B63TF - * 63 (max. 3.000) G3/8
• Sizes ø16, 25, 40, 63 mm, * Stroke length

• High functionality with reduced height Slide bearing type (air cushion)
and length: Ø Standard strokes **
-Height reduced by 36% at the maximum*. (mm) (mm)
-Overall length reduced by 140 mm at
MY3M16 - * 16 100, 200, 300, 400, 500, 600, M5
the maximum*.
MY3M25TF - * 25 700, 800, 900, 1000, 1200, G1/8 adjustable
-Weight reduced by 53% at the maximum.
MY3M40TF - * 40 1400, 1600, 1800, 2000 G1/4 air cushion
(*Comparison with Series MY1B).
MY3M63TF - * 63 (max. 3.000) G3/8
6 • Stroke adjusting unit combined with
shock absorbers and adjusting. * Stroke length
• Piping ports either on one side or both ** Suffix -XB11 in part number for strokes > 2000 mm
sides.
Linear Actuators
Stroke adjustment unit for MY3B and MY3M models

Ø (mm) 16 25 40 63
Stroke Adjusting Unit
Unit L Left MY3 * -A16L1 MY3 * -A25L1 MY3 * -A40L1 MY3 * -A63L1
Oval Piston Right MY3 * -A16L2 MY3 * -A25L2 MY3 * -A40L2 MY3 * -A63L2
Unit H Left MY3 * -A16H1 MY3 * -A25H1 MY3 * -A40H1 MY3 * -A63H1
Right MY3 * -A16H2 MY3 * -A25H2 MY3 * -A40H2 MY3 * -A63H2
* B = MY3B; M = MY3M
Unit L Low load shock-absorber and adjusting bolt
(MY3B/3M) Unit H High load shock-absorber and adjusting bolt
Side supports
The cylinder tube can be fixed from the upper or lower side. Shock-absorbers for L and H units
Ø (mm) 16 25 40 63
Type L RB0806 RB1007 RB1412 RB2015
Type H RB1007 RB1412 RB2015 RB2725
Side supports
Ø (mm) Part No.
16 MY-S16A MY-S16B
25 MY-S25A MY-S25B
40 MY-S32A MY-S32B
63 MY-S40A MY-S40B
Type A Type B
Mounting with floating bracket (MY3A and MY3B)
Ø (mm) Part No.
Floating bracket 16 MYAJ16
Easy connection with external guide. Vertical and lateral mounting is possible. 25 MYAJ25
40 MYAJ40
63 MYAJ63

Reed: D-A93L,
122
Linear Actuators
Rodless Cylinder Part no.

Ø Standard strokes
Port Size Cushion
(mm) (mm)
Series CY3B/CY3R CY3**6 - * 6 50, 100, 150, 200 M3
CY3**10 - * 10 50, 100, 150, 200, 250, 300
M5
CY3B CY3**15 - * 15 50,100,150,200,250,300,350,400,450,500
CY3**20TF - * 20
100, 150, 200, 250, 300,350,
CY3**25TF - * 25 G1/8 Rubber bumper
400, 450500, 600, 700, 800
CY3**32TF - * 32
CY3R CY3**40TF - * 40 100, 150, 200, 250, 300,350,
CY3**50TF - * 50 400, 450500, 600, 700, 800, G1/4
CY3**63TF - * 63 900, 1000
• Sizes ø 6 – 63 mm,
Strokes up to 5000 mm. * Stroke length
• Magnetically coupled rodless ** B…Standard, R…additional slide guide
cylinder field.
• Reduced length as compared to
piston rod cylinders with the same
stroke length.
• Reduced radial dimensions.
• Tube with square slide.
Linear Actuators
Magnetic Rodless Cylinder Part no.
Ø Standard strokes
Port Size Cushion
Series CY1S/CY1L CDY1S6H - *
(mm)
6
(mm)
50, 100, 150, 200
CDY1S10H - * 10 50,100,150,200,250,300,350 M5
Standard: none
CDY1S15H - * 15 50,100,150,200,250,300,350,400,450,500
ECDY1S20H - * 20 100, 150, 200, 250, 300,350, Optional:
ECDY1S25H - * 25 400, 450500, 600, 700, 800 G1/8 shock absorber
ECDY1S32H - * 32 100, 150, 200, 250, 300,350,400,
ECDY1S40H - * 40 450,500, 600, 700, 800, 900, 1000 G1/4
* Stroke length
CY1L Ball bushing version on request
Accessories•Shock-absorbers
Cylinder Ø (mm) Shock absorber
6•10•15 RB0805
20 RB1006
25 RB1411
• Sizes ø 6 - 40 mm, 32•40 RB2015
• Overall length advantages as
compared to slide units with the Possible auto switches
same stroke. Reed: D-A73L, D-A80L
3 wire solid state: NPN: D-F79L, PNP:D-F7PL
• Slide with two strong guide rods
2 wire solid state: D-J79L
running in slide bearing (CY1S) or
ball bushing (CY1L) to absorb lateral
forces and longitudinal and lateral
moments.
• Auto switch mounting in its own rail.
• Stopper bolts and shock-absorbers
integrated in the end plates.
123
Linear Actuators
Magnetic Rodless Cylinders Ø Nº of Standard strokes

Series CY1H/CY1HT (mm) Guides (mm)
CY1H10 - * 10 one 100, 200, 300
M5 Standard:
CY1H15 - * 15 one 100, 200, 300, 400, 500 elastic
CY1H20 - * 20 one 100,200,300,400,500,600
CY1H25 - * 25 one 100,200,300,400,500,600,800 optional:
Rc1/8 shock ab-
CY1HT25 - * 25 two 100, 200, 300, 400, 500, sorber
CY1HT32 - * 32 two 600, 800, 1000
* Stroke length
Possible auto switch
3 wire solid state: PNP:D-Y7PL
• Sizes ø 10 – 25 mm, 32 mm with 2 wire solid state: D-Y59BL

CY1HT, strokes up to 1500 mm.
• Enclosed design with one (CY1H) or
two (CY1HT) high precision guide.
• For increased load absorption
at extremely high precision.
• Auto switch can be integrated in the
body.
• Pre-machined mounting holes
in the slide.
6
Linear Actuators
Magnetic Rodless Cylinder- Part no.

Ø
Standard strokes Port size Cushion
Low Profile Guide Type (mm)
Series CY1F CY1F10R- * **

CY1F15R- * **
10
15
50, 100, 150, 200, 250, 300
50, 100, 150, 200, 250, 300, 350, 400, 450, 500
Centralized
on one side Shock absorber
M5 on both sides in
CY1F25TFR- * ** 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 G1/8” the slide
* Stroke length
** Stopper: - …Standard 2 mm adjustable
A …extended 25 mm adjustable

• Sizes Ø 10, 15 and 25 mm.
• Magnetically coupled rodless Stroke adjustment bolts
cylinder with lateral guide, Bore size Standard extended 25 mm
resulting in extremely low profile. 10, 15 CYF-S10 CYF-L10
25 CYF-S25 CYF-L25
• Drive cylinder can be removed from
the slide without the use of tools.
• Adjustable strota ends.
• Slide with integrated shock-absorber.
124
Linear Actuators
Rodless Cylinders for Clean Rooms Part no.

Bore size Strokes Stroke Operating pressure
and Vacuum Chambers (mm) (mm) adjustment (MPa)
Series CYP/CYV CYP * - ** 15, 32 100, 150, 200, 250, on both sides:
± 1 mm
300, 350, 400, 450, 0,05 ~ 0,3
15, 32 500, 600, 700 on both sides:
CYV * - **
-2 ~ 0 mm
* Diameter
Low particle generation
** Stroke length
• Internally-controlled start-up and

deceleration behaviour produces a
sinusoidal motion, ensuring jolt-free
operation.
• No particle generation, since slide runs
without contact with the cylinder tubing.
• CYP: - For Clean Room. • CYV: - For use in vacuum

- No suction vacuum chambers.
necessary. - Particle generation
- 1/20 of the particle (on average,
generation compared to 0,1 Particles/Cycle).
12-CY3B-Series. - Leakage 1,3 x
- Fitted and double-pac 10-7 Pa · m3/s.
kaged under clean room - Seals separate vacuum
conditions. and atmosphere. 6
- Operation conditions:
Atmospheres up to 1,3 x
Linear Actuators
10-4 Pa (ABS).
Miniature Guide Rod Cylinder Part no.

Ø Strokes**
Port Size Cushion
(mm) (mm)
Series MGJ MGJ6- * 6 5, 10, 15 Rubber bumper
M3
MGJ10- * 10 5, 10, 15, 20 (at both ends)
* Stroke length
** Intermediate stroke (by the 1 mm stroke) available, consult SMC.
Minimum stroke for auto switch mounting is 4 mm.

3 wire solid state: NPN: D-F8NL, PNP:D-F8PL
2 wire solid state: D-F8BL
• Sizes Ø 6, 10 mm, strokes up to 20 mm.

• Non-rotating accuracy: ±0.1°.
• Two auto switches can be mounted even
for 5 mm strokes.
• Integral wiring/piping to one direction.
125
Linear Actuators
Compact Guide Cylinder Standard Cylinder with Slide Bearing

Ø Strokes
Series MGP Part no.
(mm) (mm)
Port Size Cushion
MGPM12 - * 12 10, 20, 30, 40, 50, 75, 100,

M5
MGPM16 - * 16 125, 150, 175, 200, 250
MGPM20TF - * 20 20, 30, 40, 50, 75, 100, 125, 150,
MGPM25TF - * 25 175, 200, 250, 300, 350, 400
G1/8 Rubber bumper
MGPM32TF - * 32
(optionally
MGPM40TF - * 40
25, 50, 75, 100, air cushion)
MGPM50TF - * 50
125, 150, 175, 200, G1/4
MGPM63TF - * 63
• Sizes Ø 12 – 100 mm, strokes up to 250, 300, 350, 400
MGPM80TF - * 80
400 mm. G3/8
MGPM100TF - * 100
• Body with central piston rod and two
lateral guide rods for high lateral * Stroke length
loading and moments. Standard Cylinder with Ball Bushing Bearing
• Short length, compact dimensions. Ø Strokes
• Two types of guide rod bearing: Part no. Port Size Cushion
(mm) (mm)
slide or ball bushing bearing for many
MGPL12 - * 12 10, 20, 30, 40, 50, 75, 100, 125,
applications. M5
MGPL16 - * 16 150, 175, 200, 250
• Body with direct mounting facility on all
MGPL20TF - * 20 20, 30, 40, 50, 75, 100, 125, 150,
side surfaces and end surfaces.
MGPL25TF - * 25 175, 200, 250, 300, 350, 400
• Rubber bumper in the cylinder. G1/8 Rubber bumper
MGPL32TF - * 32
• Autoswitches can be integrated in the (optionally
body from 2 sides. MGPL40TF - * 40 25, 50, 75, 100, air cushion)
MGPL50TF - * 50 125, 150, 175, 200, G1/4
MGPL63TF - * 63 250, 300, 350, 400
MGPL80TF - * 80
G3/8
6 MGPL100TF - * 100
* Stroke length
Linear Actuators

Compact Guide Cylinders Stroke Variations

and Air Cushion Bearing type
Bore size
Stroke (mm)
(mm)
Series MGP*-*A 25 50 75 100 125 150 175 200 250 300 350 400
16
• The air cushion is standardised.
20
• This compact guide cylinder has an
MGPM 25
adjustable cushion to reduce noise Slide bearing 32
generation and vibration. This allows 40
more than three times as much kinetic 50
energy to be absorbed as compared with MGPL 63
Ball bushing
rubber bumper cushion. 80
100
Cushion valve is built into the body
Compared with compact cylinders of the series MGPM50

Heavy Duty Guide Rod Bore size Guide rod diameter (mm)
Cylinder with Improved Load (mm) MGPS MGPM
Resistance 50 30 25
Series MGPS 80 45 30
• Lateral load resistance: 10% increase.

• Eccentric load resistance: 25% increase. Stroke Variations
• Impact load resistance: 140% increase. Bore size
Bearing type Stroke (mm)
(mm)
25 50 75 100 125 150 175 200
MGPS 50
Slide bearing 80
126
Linear Actuators
Compact Guide Cylinder High

Precision Ball Bushing Type
Series MGPA
• Ø12, Ø16, Ø20, Ø25, Ø32, Ø40, Ø50, Ø63, Ø80, Ø100.
• The new series MGPA has been added by to the series MGP.
This new series is characterised by improved non-rotating
accuracy of the plate and reduced plate displacement.
• Non-rotating accuracy of the plate: ± 0,01°.
• Plate displacement: 0,05 mm (with MGPA Ø 12, 10 mm stroke,
load weight 1,7 kg).
Compact Guide Cylinder

with Shock Absorber
Series MGP-XC69
• Extended stroke can be adjusted
by adjustment screw.
• Extended stroke adjustment:
Ø 12 to Ø 25: 15 mm
Ø 32 to Ø 63: 25 mm 6
Ø 80, Ø 100: 30 mm
Linear Actuators
Compact Cylinder
with Special Scrapers
Series MGP-XC4/XC35
127
Linear Actuators
Guide Cylinder Part no.

Port sizes
Cushion
(mm) (mm) Guide
Series MGG MGG *** B20- * 20 75, 100, 125, 150, 200
Cylinder
MGG *** B25- * 25

Rc 1/8
MGG *** B32- * 32 75, 100, 125
MGG *** B40- * 40 Shock
150, 200, 250, 300 Rubber absorber
MGG *** B50- * 50
Rc 1/4 bumper (2 pcs.)
MGG *** B63- * 63
MGG *** B80- * 80 Rc 3/8
MGG *** B100- * 100 Rc 1/2
• Bore sizes ø 20 – 100 mm, strokes * Stroke length

up to max. 1300 mm. ** longer strokes available on request
*** M… slide bush guide bearing
• High quality guide unit with standard L… ball bush guide bearing
round cylinder.
• Guide rod bearing with either slide
Possible signal generators/accessories
or ball bushing bearing.
Type Ø 20 Ø 25 Ø 32 Ø 40 Ø 50 Ø 63 Ø 80 Ø 100
• Large diameter guide rods with
long support bearing for high lateral Reed switch D-C73L, D-C80L D-B54L
load resistance and non-rotating 3-wire, solid state PNP D-H7A2L D-G5PL
precision. 2-wire solid state D-H7BL D-K59L
• Integrated shock-absorber and Signal generator mounting band BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BA-08 BA-10
adjustment bolts to allow effective
cushion of large mass forces.
• Body mounting possible on all sides.
Pusher
• Simple stroke adjustment by moving
the rear plate.
• Integrated grease port as standard.
6
Linear Actuators
Lifter
Guide Table Part no.

Ø Standard strokes
Port Size Cushion
(mm) (mm)
Series MGF MGF40TF- * 40 G 1/8
MGF63TF- * 63 30, 50, 75, 100 G 1/4 Rubber bumper
MGF100TF- * 100 G 1/4
* Stroke length
• Bore sizes ø 40, 63 and 100 mm, Possible auto switches

strokes from 30 – 100 mm. Reed: D-Z73L, D-Z80L
• Compact stroke table to 3 wire solid state: NPN: D-Y59AL, PNP:D-Y7PL
accommodate eccentric 2 wire solid state: D-Y59BL

loads; with built-in nonn-rotating
mechanism.
• Cylinder function double-acting.
• Low height with respect to stroke.
• Rubber bumper cushion. Conveyor equipment
• Autoswitch for stroke end detection
can be integrated into body contour. Positioning
128
Linear Actuators
Double Power Cylinder Ø Standard strokes Theoretical output, Port

Part no. extension stroke (N) Cushion Type
(mm) (mm) Size
Series MGZ/MGZR MGZ20 - * 20
at 0,6MPa
436 M5
MGZ25TF - * 25 75, 100, 125, 651 G 1/8
MGZ32TF - * 32 150, 973 With G 1/8
MGZ40TF - * 40 175, 200, 250, 1520 non-rotating
MGZ50TF - * 50 2309 mechanism G 1/4
300
MGZ63TF - * 63 3567
MGZ80TF - * 80 Long stroke 5829 Rubber G 3/8
MGZR20 - * 20 436 bumper M5
version
MGZR25TF - * 25 up to 1000 mm 651 G 1/8
• Double-acting double power cylinder. MGZR32TF - * 32 available 973 Without G 1/8
• Highly loadable as a result of MGZR40TF - * 40 (800 mm for 1520 non-rotating
2309 mechanism G 1/4
integrated slide bearing. MGZR50TF - * 50 ø20,ø25)
MGZR63TF - * 63 3567
• Non-rotating rod (MGZ) - by slide
MGZR80TF - * 80 5829 G 3/8
bearing with built-in non-
rotating mechanism. * Stroke length
Mounting elements such as foot brackets, flanges on request
• Double extension output power by
“piston in piston construction”.
• Approx. 30% reduced overall length
compared with standard cylinders in Possible auto switches/accessories
tandem arrangement. Type MGZ MGZ
• Moment absorption is the same as Ø 20, 25, 32 mm Ø 40-80 mm
guide cylinders (e.g. MGP), but with a Reed switch D-A93L, D-A90L D-A93L, D-A90L
40% reduced overall width. 3-wire solid state PNP D-M9PWL D-M9PWL
2-wire solid state D-M9BWL D-M9BWL
• Improved non-rotating accuracy: ±0,3°.
Auto switch spacer BMY3-016 BMG2-012
• Optimum design by the use of profile
tube, auto switch can be integrated
in grooves. 6
• Simple piping connection via 2 ports, MGZ with end lock
resulting from internal air channels.
Linear Actuators
• Pre-cut mounting threads in
cylinder covers and piston rod.
Tandem cylinder MGZ
3 Position Cylinder • 2-stage stroke enabled with

Series RZQ a small increase in length
Overall length of cylinder tube
RZQ
First-stage
Stroke
Full stroke Additional cylinder tube length
CDQ2
• First-stage stroke can be specified
without changing the overall length. Overall length of cylinder tube
• ±0.02 or less repeatability
in intermediate stop positioning. Ø Standard strokes
• First-stage stroke can be freely Part no. Port Size
(mm) (mm)
specified.
RZQA32TF- * - ** 32 Full stroke:
• Wide variations in mounting. 25,50,75,100,125,150, G 1/8
RZQA40TF- * - ** 40
175,200,250,300
RZQA50TF- * - ** 50 First-stage stroke: G 1/4
RZQA63TF- * - ** 63 5mm to “full stroke” -1mm
* Full stroke
** First-stage stroke
129
Linear Actuators
Dual-Rod Cylinder: Bore size Standard strokes Port

Guide Auto switch
Part no.
Compact Type (mm) (mm) adjustable 5 mm size
6 M3
Series CXSJ CXSJM6- *
CXSJM10- * 10
10, 20, 30, 40, 50
10, 20, 30, 40, 50, 75 M5
CXSJM15- * 15 M5
20 M5 Slide bearing
CXSJM20- * 10, 20, 30, 40, 50,
CXSJM25- * 25 75, 100 M5 Reed:
CXSJM32- * 32 G1/8 D-A93L, D-A90L
2-wire solid state
CXSJL6- * 6 10, 20, 30, 40, 50 M3 D-M9BL
3 wire PNP
CXSJL10- * 10 10, 20, 30, 40, 50, 75 M5 D-M9PL
CXSJL15- * 15 M5 Ball bushing
CXSJL20- * 20 10, 20, 30, 40, 50, M5 bearing
• Improved auto switch mounting CXSJL25- * 25 75, 100 M5
possible from 4 sides. CXSJL32- * 32 G1/8
• Profiles reduced by approx. * Stroke length
30% and weight reduced by
approx. 40% in comparison with
conventional cylinders.
• With either slide bearings or ball
bushing bearings.
6 Dual-Rod Cylinder Slide Bush Guides

Bore size Stroke
Series CXS Part no.
(mm)
Standard strokes
(mm)
Port sizes
adjustment range
Linear Actuators
CXSM6- * 6 10, 20, 30, 40, 50 M5

CXSM10- * 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75
CXSM15- * 15 M5 0 ~ -5 mm
10, 15, 20, 25, 30, 35,
CXSM20- * 20 40, 45, 50, 60, 70, 75,
CXSM25TF- * 25 80, 90, 100 G1/8”
CXSM32TF- * 32
* Stroke length
• Sizes Ø 6 - 32 mm.
• Guide cylinder with small body Ball bush guides
profile. Bore size Standard strokes Stroke
Part no. (mm) (mm) Port sizes
• Guide piston rod with slide or adjustment range
ball bushing bearings. CXSL6- * 6 10, 20, 30, 40, 50 M5
• Air connections can be located 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75
CXSL10- *
in two alternative positions. 15 M5
CXSL15- * 0 ~ -5 mm
• Auto switch can be integrated 10, 15, 20, 25, 30, 35,
CXSL20- * 20
into body. 40, 45, 50, 60, 70, 75,
CXSL25TF- * 25 80, 90, 100
• Cushion bolts fitted as standard. 32
G1/8”
CXSL32TF- *
• Stroke adjustment in the range
of 5 mm with cylinder retracted. * Stroke length
Possible signal generator

Double piston cylinder

Series CXS*A
Piston-Ø 20, 25, and 32mm can be
supplied with adjustable endpoint
damping
130
Linear Actuators
Speciality Cylinders
Sine Rodless Cylinder Part no.

Ø
Nº of guides
Standard strokes
(mm) (mm)***
Series REA REA * - ** 200-800 -
25 ,32
40, 50, 63 200-1000 -
10 150-300 -
REAR * - **
15 150-500 2
REAS * - **
20, 25,32 200-800 2
REAL * - **
40 200-1000 2
10 150-300
15 150-500
REAH * - ** 1
20 200-600
25 200-800
REAHT * - ** 25, 32 200-1000 2
• 6 design variants:
* Diameter
REA: Basic type.
** Stroke length
REAR: Basic type with auto switch
*** diameter-specific stroke limitations possible
REAS/REAL:Slider type with 2 slide or ball bushing
bearing rod guides.
REAH: With a high precision
guide rail.
REAHT: With 2 high precision
guide rails.
• Internally-controlled start-up and deceleration behaviour
to achieve a sinusoidal movement, thereby ensuring jolt-free
operation.
6
Sine Rodless High Speed Cylinder
Series REBR/REBH
Linear Actuators
• Expansion of the Sine-cylinder series.
• Max. speed 600 mm/sec.
• REBR: with Ø 15, 25, 32 mm.
• REBH: with Ø 15, 25, 32 mm.
• Max. strokes: Ø 15: 750 mm
Ø 25, 32: 1500 mm
131
Linear Actuators
Microspeed Cylinder Bore size Standard strokes Operating Piston speed

Part no.
Series C*X (mm) (mm) pressure (MPa) (mm/s)
10 15,30,45,60,75,100,125,150
CDJ2XB * - ** 0,06 ~ 0,7 1 ~ 300
16 15,30,45,60,75,100,125,150,175,200
10,16 5,10,15,20,25,30, 0,06 ~ 0,7 1 ~ 300
CDUX * - ** D
20,25,32 5,10,15,20,25,30,40,50 0.05~0.7 0,5 ~ 300
12,16 5,10,15,20,25,30, 0,03 ~ 0,7 1 ~ 300
CDQSXB * - ** D
20,25 5,10,15,20,25,30,35,40,45,50
0,025 ~ 0,7
32,40 5,10,15,20,25,30,35,40,45,50,75,100 0,5 ~ 300
CDQ2XB * TF- ** D
50,63,80,100 10,15,20,25,30,35,40,45,50,75,100 0,01 ~ 0,7
20,25, 25, 50, 75, 100, 125,
CDM2XB * TF- ** 0,025 ~ 1.0 0,5 ~ 300
• Improved low friction characteristics. 32,40 150, 200, 250, 300
• Uniform piston operation from 0,5
* Bore size
mm/s, no stick and slip effect.
** Stroke length
• No lurching guaranteed, even after
long standstill times. Version without magnet, with rubber dumper, mounting brackets autoswitch on request.
6
Linear Actuators
Smooth Cylinder Bore size Standard strokes Operating Piston speed

Part no. pressure
(mm) (mm) (mm/s)
Series C*Y 12, 16, 5, 10, 15, 20, 25, 30
(MPa)
0,03 ~ 0,7
CDQSYB- * - ** DC
20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 0,02 ~0,7
CDQ2YB- * TF - ** DC 32, 40 5,10,15,20,25,30,35,40,45,50,75,100 0,02 ~ 0,7
50, 63, 80, 100 10,15,20,25,30,35,40,45,50,75,100 0,01 ~0,7
20, 25, 25, 50, 75, 100, 125, 150, 5 ~ 500
CDM2YB- * TF - ** 0,02 ~ 0,7
32, 40 200, 250, 300
CDG1YB- * TF - ** 20 25, 50, 75, 100, 125, 150, 200 0,02 ~ 0,7
25,32,40 25, 50, 75, 100, 125 ,150, 200,
0,01 ~0,7
50,63,80,100 250, 300
* Bore size
• 0.03 MPa Minimun operating pressure ** Stroke length
0.01 to 0.03 MPa.precision regulator
(e.g. Series IR). Version without magnet, with rubber dumper, mounting brackets autoswitch on request.
• Smooth operation with less sticking
and slipping. Stable operation possible
even at a low speed of 5 mm/
s(measurement based on JIS B8377).
• Sliding resistance:
Bi-directional low-friction operation
possible. Pressing force can be
controlled regardless of its direction.
132
Linear Actuators
Compact Metal-seal Part no.

Bore size Standard strokes Operating Speed
(mm) (mm)
Low Friction Cylinder pressure (MPa) (mm/s)
Series MQQ/MQM MQQTB * - * * D

10
16, 20
10,20,30,40
10,20,30,40,50,60 0,005 ~ 0,5 0,3 ~ 300
25, 28 10,20,30,40,50,75,100
10 10,20,30,40
MQQLB * - * * D 16, 20 10,20,30,40,50,60 0,005 ~ 0,7 0,5 ~ 500
25, 28 10,20,30,40,50,75,100
6 15,30,45,60 0,02 ~ 0,7
MQMTB * - * * D 0,5 ~ 1000
10, 16, 20, 25 15,30,45,60,75,100 0,005 ~ 0,7
MQMLB * H - * * D 10, 16, 20, 25 15,30,45,60,75,100 0,01 ~ 0,7 5 ~ 3000
* Bore size
** Stroke length
• Minimal friction as a result of metal seals Possible types: Possible types:

Possible types:
and floating bearing of the mechanism. MQQT/MQML MQML/MQMLH
MQQL/MQML
• Low breakaway pressure of 0.005 MPa.
• Uniform, smooth operation, even at
0.3 mm/s.
• Extended service life, 100 million
cycles or 10,000 km.
• High speed version up to 3 m/s.
• Increased lateral load resistance as a
result of integrated ball guides
(in the version L).
6
High-Power Cylinders Bore size Standard Max. stroke Max. energy Effective
Part no. absorption (J) cushion stroke
Linear Actuators
Ø (mm) stroke (mm) (mm)
Series RHC RHCB20 - * 20 7
(mm)
25 200 - 700 12
RHCB25 - *
RHCB32 - * 32 21
200 - 1000
RHCB40 - * 40 33 both sides
1500
RHCB50 - * 50 47 80
200 - 1200
RHCB63 - * 63 84
RHCB80 - * 80 200 - 1400 127
RHCB100- * 100 200 - 1500 196
* Stroke length
Auto switch/mounting bracket
• High-speed special cylinder Bore size (mm) 20 25 32 40 50 63 80 100
up to 3000 mm/sec. Mounting bracket BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BA-08 BA-10
• 8 Sizes, Ø 20 to Ø 100 mm. Reed switch D-C73L, D-C80L D-B54L
• Maximum stroke 1500 mm. 3-wire solid state NPN D-H7A1L
• Integrated cushion adjustment and 3-wire solid state PNP D-H7A2L
long cushion strokes ensure Accessories - Mounting brackets
smooth operation and absorbing Bore size (mm) 20 25 32 40 50 63 80 100
capacity a high kinetic energy. Foot RHC-L020 RHC-L025 RHC-L032 RHC-L040 RHC-L050 RHC-L063 RHC-L080 RHC-L100
Flange RHC-F020 RHC-F025 RHC-F032 RHC-F040 RHC-F050 RHC-F063 RHC-F080 RHC-F100
133
Linear Actuators
Rotary Clamp Cylinder Part no.

Ø Standard Stroke
Port sizes Cushion
(mm) (mm)
Series MK2/MK2T MK2B20 - 20
* ** N M5
MK2B25 - * ** N 25
10, 20
MK2B32 - * ** N 32 Rubber
G1/8 bumper
MK2B40 - * ** N 40
MK2B50 - * ** N 50
20, 50 G1/4
MK2B63 - * ** N 63
* Stroke length
** L… Counter-clockwise rotation
R… Clockwise rotation
Ø Standard Stroke
• Bore sizes 20 - 63 mm, strokes max. Part no. Port sizes Cushion
(mm) (mm)
50 mm
• Rotary movement either clockwise or MK2TB20 - * ** N 20
M5
counterclockwise. MK2TB25 - * ** N 25
10, 20
• Stroke end detection by Reed switch. MK2TB32 - * ** N 32 Rubber
G1/8 bumper
• Clamping force up to max. theoretical MK2TB40 - * ** N 40
value of 1400 N. MK2TB50 - * ** N 50
20, 50 G1/4
MK2TB63 - * ** N 63
* Stroke length
** L… Counter-clockwise rotation
R… Clockwise rotation

Combined linear Type Ø 12 - 16 mm Ø 20 - 63 mm
and rotary movement Reed switch D-A93L, D-A90L D-A73L, D-A80L
6 3-wire solid state PNP D-M9PWL D-F7PL
2-wire solid state D-M9BWL D-J79L
Linear Actuators
Stopper Cylinder Part no.

Ø Standard strokes
Port sizes Cushion
(mm) (mm)
Series RSQ RSDQB12 -10D ** 12 10
M5 x 0,8
RSDQB16 - * D ** 16 10, 15
ERSDQB20 - * D ** 20
10, 15, 20 Rubber bumper
ERSDQB32 - * D ** 32 G1/8
ERSDQB40 - * D ** 40
20, 25, 30
ERSDQB50 - * D ** 50
* Stroke length
** Version: - … Round bar type
R… Roller type
Lever Version
• Bore sizes ø 12 – 50 mm, strokes Ø Standard strokes
max. 30 mm. Part no. Port sizes Cushion
(mm) (mm)
• Reinforced piston rod and bearings
allow increased radial load. ERSDQB32 - * DL 32 10, 15, 20
• Compact short stroke cylinder. ERSDQB40 - * DL 40 G1/8 Rubber bumper
20, 25, 30
• Double-acting , single acting (Safety ERSDQB50 - * DL 50
function). * Stroke length
• 3 piston rod options for optimum
solution of the stop task. Possible auto switches
• Stroke end detection by auto Type Ø 12 mm Ø 16 - 50 mm
switches. Reed switch D-A93L, D-A90L D-A73L, D-A80L
3-wire solid state PNP D-M9PWL D-F7PL
2-wire solid state D-M9BWL D-J79L
134
Linear Actuators
Heavy duty Double-acting with steel roller, lock mechanism
Stopper Cylinder Part no.

Ø Standard strokes
Port sizes Cushion
(mm) (mm)
Series RSH/RS1H RSH20-15DM-D 20 15 M5
RSH32TF-20DM-D 32 20 Adjustable
G1/8
RS1H50TF-30DM-D 50 30 shock absorber
RS1H63TF-30DM-D 63 30
G1/4
RS1H80TF-40DM-D 80 40
Other roller materials and variations available on request.
• Bore sizes-ø 20 – 80 mm,

strokes 15 – 40 mm.
• Heavy duty stopper cylinder with
integrated shock-absorber for gently
stopping of the load via roller lever.
• Compact size and stable mounting
flange. Lever basic
Lever lock Locked cancel
• Double-acting, single-acting spring position
extended (safety function).
• Lock mechanism on the roller lever
prevents the load from rebounding
after braking.
• Stroke end detection by auto switch.
Operation mode RSQ, RSH
Linear Actuators
Roller on piston rod Lever Version
Work piece
is stopped
Work piece is Work piece

stopped gently can pass
Work piece
can pass
Next work piece

is awaited
Next work piece

is awaited
135
Linear Actuators
Escapement MIS - Single finger type

Bore size Finger Operating Nº-of
Series MIW/MIS Part no.
(mm) stroke (mm) pressure (MPa) fingers
Auto switch
MIS8- * D 8 10, 20
MIS12- * D 12 10, 20, 30 3-wire: NPN: D-M9NL
MIS20- * D 20 10, 20, 30 0.2 ~ 0.7 1 3-wire: PNP: D-M9BL
MIS25- * D 25 30, 50 2-wire solid state D-M9BL
MIS32TF- * D 32 30, 50
* Stroke length
MIW - Double finger type

• Alternatively in single finger (MIS) or Bore size Finger Operating Nº-of
Part no. Auto switch
double finger (MIW) type. (mm) stroke (mm) pressure (MPa) fingers
• Extended sevice life, since the piston MIW8-8D 8 8
and finger have a floating MIW12-12D 12 12 3-wire: NPN: D-M9NL
connection, avoiding moment loads MIW20-20D 20 20 0.2 ~ 0.7 2 3-wire: PNP: D-M9BL
on the seals, etc. MIW25-25D 25 25 2-wire solid state D-M9BL
• 3 different finger designs. MIW32TF-32D 32 32
• Sequential operation of both fingers
with the MIW.
• Optional stroke adjustment, scrapers
possible.
6
Linear Actuators
Stainless Steel Cylinder Built-in magnet, NBR seals
Series CJ5/CG5 Part no. Bore size

(mm)
Standard strokes
(mm)
Operating Water
resistant
pressure (MPa) auto switches
10, 16 15,30,45,60,75,100,125, 0.1 ~ 0.7

CDJ5B * SR- ** -B D-H7BAL
150, for Ø16: 175, 200
20 25,50,75,100,125,150,200
CDG5BN * SR- ** 25, 32, 40, 50, 25, 50, 75,100,125 0.05~1.0 D-G5BAL
63, 80, 100 150, 200, 250, 300
* Bore size on request: without magnet, FKM seals, long stroke version
** Stroke length
• SUS304 - stainless steel.

• Special scrapers provide optimum
piston rod sealing.
• Seals either NBR or FKM.
• FDA approved grease suitable for
food processing applications.
• CG5 can be disassembled, therefore
maintenance-friendly. Cylinder mounting
Series CDJ5 CDG5
ø (mm) 10 16 20, 25, 32, 40, 50, 63, 80, 100
Foot type CJ-L016SUS CJK-L016SUS CG-L0 ** SUS
Flange type CJ-F016SUS CJK-F016SUS CG-F0 ** SUS
** Enter the bore size
Mounting band for autoswitch
Serie CDJ5 CDG5
ø (mm) 10 16 20 25 32 40 50 63 80 100
Mounting BJ2-010S BJ2-016S NBA-088S NBA-106S BGS1-032S BAF-04S BAF-05S BAF-06S BAF-08S BAF-10S
band
136
Linear Actuators
Shock Absorbers
Shock Absorber Standard

Thread on Max. energy Max. operation Max. impact
Series RB/RBC Part no.
the body
Stroke
(mm) absorption (cycles/min) speed
M6•M8•M10•M14•M20•M27 M6 x 0.75 4 0.5 J 80 1 m/s
RB0604
RB0806 M8 x 1 6 2.94 J 80
RB1007 M10 x 1 7 5.88 J 70
5 m/s
RB1412 M14 x 1,5 12 19.6 J 45
RB2015 M20 x 1,5 15 58.8 J 25
RB2725 M27 x 1,5 25 147 J 10
With cap
Thread on Stroke Max. energy Max. operation Max. impact
Part no.
• Component for stroke end damping the body (mm) absorption (cycles/min) speed
with optimum effect.
RBC0806 M8 x 1 6 2.94 J 80
• Increased efficiency by use
RBC1007 M10 x 1 7 5.88 J 70
of hydraulic principle resulting in
RBC1412 M14 x 1,5 12 19.6 J 45 5 m/s
minimum dimensions.
RBC2015 M20 x 1,5 15 58.8 J 25
• Automatic adjustment system for
RBC2725 M27 x 1,5 25 147 J 10
each size allows a wide range of
applications.
• Impact speed up to max. 5 m/sec.
• The ring area on the front can also
be used as a mechanical stop to a
certain extent.
6
Metall stopper
Shock Absorber
Linear Actuators
Series RBQ/RBQC Part no.
the body (mm) absorption (cycles/min) speed
M16•M20•M25•M30•M32 RBQ1604 M16 x 1,5 4 1.96 J 60
RBQ2007 M20 x 1,5 7 11.8 J 60
RBQ2508 M25 x 1,5 8 19.6 J 45 3 m/s
RBQ3009 M30 x 1,5 8,5 33.3 J 45
RBQ3213 M32 x 1,5 13 49 J 30
Rubber stopper
Part no.
the body (mm) absorption (cycles/min) speed
RBQC1604 M16 x 1,5 4 1.96 J 60

RBQC2007 M20 x 1,5 7 11.8 J 60
• New design principle (external RBQC2508 M25 x 1,5 8 19.6 J 45 3 m/s
plunger) enables a high space RBQC3009 M30 x 1,5 8,5 33.3 J 45
efficiency with minimum dimensions. RBQC3213 M32 x 1,5 13 49 J 30
• Automatic adjustment.
• Ideal mounting options and
adjustment with continuous
male thread on the body.
• Impact speed max. 3 m/s.
• Stopper with either metallic or
with rubber cap with the same
mounting dimensions.
• Enclosed system produces
increased operational security
and is maintenance-free.
137
Linear Actuators
Cylinders with Lock
Cylinders with lock

• Mechanical locking of the piston rod
at the stroke ends.
• Separate compressed air supply not
required.
• Manually releasable.
• For either retraction or extension
direction (both directions on request).
Open Close
Locks
Series CBM2 Series CBG1 Series CBA1 Series MGG
Bore size Clamp position Bore size Clamp position Bore size Clamp position Bore size Clamp position
20 to 40 Both ends 20 to 100 Both ends 40 to 100 Both ends 20 to 100 Both ends
Series MGP Series CXS Series CXW Series MTS
6
Bore size Clamp position Bore size Clamp position Bore size Clamp position Bore size Clamp position
20 to 100 One side 6, 10, 15, 20 to 32 One end 10, 16 to 32 Both ends 12, 16 to 40 One side
Linear Actuators
Series MXS Series MXQ Series MY1H
Bore size Clamp position Bore size Clamp position Bore size Clamp position
8, 12, 16 to 25 One side 8, 12, 16 to 25 One side 16 to 40 Both ends
Bore size in (mm)
Possible Bore size (mm)
Series clamp
position 6 8 10 12 15 16 20 25 32 40 50 63 80 100
CBM2 Both ends
CBG1 Both ends

Standard cylinder
CBA2 Both ends
MGG Both ends

Guide cylinder MGP One side
Dual rod cylinder CXS Retraction
Slide Unit CXW One side
Precision Cylinder MTS One side
MXS One side
Slide Unit
MXQ One side
Rodless cylinder MY1H Both ends
138
Linear Actuators
Cylinders with Lock
Cylinders with fixing

elements
• Mechanical lock mechanism.
• Can be locked at any position within the
entire stroke.
• Locking is possible at any desired position.
• Able to easily accommodate changes in
work piece thickness.
• It is the best for the emergency stop and
the fall prevention, etc.
• The stop at the middle pòsition is LO
.
CK
possible. (CLQ Series / MLGP series is excluded) LO

CK
• Series from ø 16 to ø 250 mm available.
Series CLJ2 Series CLM2 Series CNG Series CNA Series C95N
Bore size Clamp direction Bore size Clamp direction Bore size Clamp direction Bore size Clamp direction Bore size Clamp direction
16 Both ends 20 to 40 Both ends 20 to 40 Both ends 40 to 100 Both ends 32 to 100 Both ends
Series CNS Series CLS Series CLQ Series MLGP
6
Bore size Clamp direction Bore size Clamp direction Bore size Clamp direction Bore size Clamp direction
Linear Actuators
125 to 160 Both ends 125 to 250 Both ends 20 to 100 One side 20 to 100 One side
Series MLGC
Bore size Clamp direction

20 to 40 Both ends
Bore size in (mm)
Clamp Clamp Bore size (mm)

Series
method direction 16 20 25 32 40 50 63 80 100 125 140 160 180 200 250
CLJ2 Konus clamp arm Both ends
CLM2 Konus ball lining Both ends
CNG Konus ball lining Both ends
CNA Konus ball lining Both ends

Standard cylinder
C95N
MNB Konus ball lining Both ends
CNS Konus ball lining Both ends
CLS Eccentric
Eccentricdisc
bush Both ends
Compact Cylinder CLQ Air/spring disc One side
Guide cylinder MLGP Air/spring disc One side
Guide cylinder MLGC Konus clamp arm Both side
139

SMC Product Overview Deel I

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SMC Product Overview Deel I

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Product Overview Extending Visibility Across Your Enterprise

with Constant Supply of High Quality and Innovative Products

This catalogue contains only limited 12

information on CD, our web page:

Modular F.R.L. Unit

New Old (mm)

Ozone resistant rubber

q Attach the component into the fitting of the

Lock (supplied by customer) Bolt

Part no. Model

e Tighten the bolt.

Air Filter+Regulator+Lubricator Part number 1) Port Size

Filter Regulator+Lubricator Part number 1) Port Size

various parts and accessories.

Filter * Part number Port Size

G3/8 * Manual (Option: 2,

Series AR AR10-M5 M5 Rc1/16 0.05 to 0.7

Air regulator for 0.02 ~ 0.2 MPa

• In stacking manifold or as single device.

Filter Regulator Pressure Set pressure Drain

Lubricator Part number Port Size

• To be used as stacking manifold or as Bracket assembly

Regulator with Built-in Pressure Part number Port Size

Filter Regulator with Built-in AG20-F01G1H

Digital Pressure Switch Pressure Switch Power supply

PNP open collector

* N = Wiring botton entry

** Option Lock pin

Digital pressure switch

• Built-in pressure switch for AR/AW/ARM

Pressure Switch Part Port Applicable

E: IS1000E-30F03-X215 G3/8 AR25, AR30, AW30

Pressure switch Part Applicable

3 port manually operated finger valve for

Soft Start-up Valve Part number. Voltage Port Size

• To be used as stacking manifold Air operated

Heavy Duty Auto Drain Port Size Condensate

• Suitable for dirty water drain.

Refrigeration Air Dryer

free compressed air treatment from SMC.

Inlet air temperature (°C) 35°C

Power source AC230V (50Hz)

Water Separator Part number Port Size

Membrane Air Dryer Port Size Purge Flow on the Suitable

IDG1-F02 1/4 2.5 l/min 10 l/min –

BM59 BM61 BM63 BM64 BM65

EAF811-F14 G1 1/2 8000

• Superior flow capacity.

Main Line Filter:

AFF2C-F03D-T G3/8 300 18

Micro-Mist Separator with Prefilter

Super Mist Separator

AME150C-F03D G3/8 200 12

AMF150C-F03D G3/8 200 12

Miniature Regulator Part number

Valve manifold for ARJ1020F

• Piston-type regulator, relieving type.

Miniature Regulator Port Size Set pressure

• With either threaded or one touch fitting

Modular Regulator Series Type

• Available as single device or stacked

Pilot Operated Pressure Regulator Part number.

Miniature E/P Proportional Input Output Set pressure Flow