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CP-PC-2260E

Fiber Unit Selection Guide


HPF Series

Please read the "Terms and Conditions" from the following URL before
ordering or use:
http://www.azbil.com/products/bi/order.html
[Notice] Specifications are subject to change without notice.
No part of this publication may be reproduced or duplicated
Other product names, model numbers and company names may be trademarks of the respective company. without the prior written permission of Azbil Corporation.

Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012.

1-12-2 Kawana, Fujisawa


Kanagawa 251-8522 Japan
URL: http://www.azbil.com

1st Edition : July. 2010-JBA


5th Edition : Aug. 2013-AZ/EP CP-PC-2260E
(10)
Table of Contents
Search by model number
Thru scan Diffuse scan Lens unit accessory

Screw
Search by Search by (H PF- T_ _ _) (H PF- D _ _ _)

type or application model number

Cylindrical
Model No. Page Model No. Page Model No. Page

Coaxial
HPF- T001 P9 HPF- D001 P11 FE-  PA-F1 P46
HPF- T002 P13 HPF- D002 P11   PA-FB1 P46
HPF- T003 P9 HPF- D003 P17   PA-FB2 P46
Search by type or application HPF- T004 P13 HPF- D004 P11   PA-FB4 P46

Sleeve
HPF- T005 P17 HPF- D005 P13   PA-L1 P45
HPF- T006 P17 HPF- D006 P17   PA-S1 P45
HPF- T007 P19 HPF- D009 P15 HPF- AT10 P46
Screw Cylindrical Coaxial

Side view
HPF- T008 P9 HPF- D010 P15  AT13 P46
Most generally used. Suitable for installation Used for target object
Use by attaching to a bracket, where space is limited. positioning or in HPF- T009 P13 HPF- D011 P19  EU02A1 P33
etc. Use by attaching with combination with HPF- T010 P9 HPF- D012 P11  EU05 P46
the setscrew. spot lenses.
HPF- T012 P27 HPF- D013 P27  EU10 P46

Narrow view
Select by shape or optical type

P 9 P 13 P 15 HPF- T014
HPF- T015
P27
P17
HPF- D014
HPF- D015
P29
P27
 LU01
 LU02
P43
P43
HPF- T017 P27 HPF- D018 P11  LU07 P43
Sleeve Side view Narrow view

reflection
Selective
Flat/
HPF- T018 P27 HPF- D019 P17  LU08 P43
Use to maintain a small ght emitted to the side.Use to Light spread minimized.
distance between target maintain a small distance Use in a place where light HPF- T019 P21 HPF- D021 P17  LU09 P43
object and sensor between target intrusion is undesirable. HPF- T020 P21 HPF- D022 P27  VA01 P32
in a limited space. object and
HPF- T021 P25 HPF- D023 P27  VA02-B P32

Area
sensor
HPF- T021T P25 HPF- D025 P21 P32
17 19 21
in  VJ03
P a limited space. P P
HPF- T021S P25 HPF- D026 P25  VL05 P32, 45
HPF- T021WT P25 HPF- D027 P35  VL06 P32, 45
Flat/Vane Selective reflection Area

Heatproof
HPF- T023 P21 HPF- D028 P24 HPX- PA06 P46
Suitable for installation where Resistant to ambient influences. Wide light beam.Use for target HPF- T024 P9 HPF- D028F P24
space is limited. Use for target object object with varying detection
Attach directly to casing. detection in a positions, detection HPF- T025 P9 HPF- D028T P24
limited area. of meandering, HPF- T025B P9 HPF- D029 P11

-proof
Chemical
etc.
HPF- T026 P19 HPF- D030 P11
P 23 P 24 P 25 HPF- T028 P23 HPF- D032 P15
HPF- T028LF P23 HPF- D032B P15
HPF- T029 P29 HPF- D033 P35

-proof
Vacuum
Heatproof Chemical-proof Vacuum-proof HPF- T029E P29 HPF- D034 P15
environment

Resistant to high temperatures. Protected with PFA tubing Usable in a vacuum.


HPF- T030 P21, 41 HPF- D035 P15
Select by

Use in environments up for excellent chemical Cable length can be specified.


to 350 ℃. resistance. HPF- T031 P13 HPF- D035C P15

Use
Specialized
HPF- T032 P37 HPF- D036 P13
HPF- T032E P37 HPF- D037 P11
P 27 P 29 P 31 HPF- T032E-L02 P37 HPF- D038 P15
HPF- T033 P9 HPF- D039 P17

Lens unit
HPF- T034 P37 HPF- D040 P39
Liquid level Liquid level Liquid leak Passing chip Wefer HPF- T034E P37 HPF- D041 P19
detection detection detection detection Mapping
application

HPF- T034E-L02 P37 HPF- D042 P15


Select by

accessories
Other
HPF- T035 P29 HPF- D043 P19
HPF- T036 P13 HPF- D045LF P23
HPF- T037 P19 HPF- D049 P15
P 37 P 35 P 39 P 33 P 41 HPF- T038 P13 HPF- VD_ _ P31
HPF- T039 P17
HPF- T042 P19
Lens unit Long-distance Other HPF- T043 P13
accessory lens side view accessories
Accessories

HPF- T044 P9
unit Technical
Guide
HPF- T046 P13
HPF- T047 P33 List of Scanning
HPF- T054-L05 P23 Distance by
Amplifiers Model
P 43 P 44 P 45 HPF- VT_ _ P31

1 2

HPF Series
Introducing: Combination Amplifiers Introducing: Fiber Customization Services
・ Advanced functions HPX-AG series Typical models Change the cable length
<Exterior view> Type Model No. If fiber length is insufficient, you can specify a cable length.
Standard HPX-AG00-1S
<Exa m p l e m o d e l n u m b e r > ■ Price: Determined by quantity
Space-saving
(main unit)
HPX-AG00-3S
H P F-T001-L05 ■ Qty: No minimum (1 cable or more)
Space-saving
HPX-AG00-5S * For details on the scanning distances with a
(expansion unit)
Base model number L02: Fiber length 2 m different cable length, see the Technical
L05: Fiber length 5 m Guide (page 49).
Double digital display * The cable cannot be lengthened on some
High-sensitivity, ultra-long distance detection L10: Fiber length 10 m models. For details, please contact our sales
High performance

Multifunctional models staff.


(Alarm output, differential output, two outputs,
databank, etc.)
<Operation panel> Change the sleeve length
A range of on-site services are available, such as emergency sensor additions and changes, and sample
<Standards compliance> production evaluation.
■ Applicable models <List example>
Front ケーブル
Thru scan Diffuse scan 方式 end
dia
s hape
曲げ半径 長さ
HPF-T005 HPF-D003 Extendable Shape D

HPF-T015 HPF-D006 φ1.2 R20


Customizable
2m
models
HPF-T037 HPF-D011
have this label.
HPX-EG series
Bendable
−30 to +70℃
Typical models 透過
(10-mm radius) フリーカット

<Exterior view> Type Model No. ■ Example model number 外形 E

φ1.2 R20 2m
Standard HPX-AG00-1S For an HPF-T005 with a 120 mm sleeve and 5 m 曲げ可
fiber unit cable ■ Price: Determined by quantity
(R10) −30∼+70℃ フリーカット
Space-saving
HPX-AG00-3S HPF-T005-S120L05 is the model number. ■ Quantity: No minimum (1 cable or more)
(main unit)
Cable length. This can
Space-saving The standard (base) “S” + 3-digit sleeve be omitted if length is
HPX-AG00-5S model No. length. standard.
(expansion unit)
Volume

Double digital display


Built for usability
(Sensitivity auto-change function, threshold value
tracking function)
Introducing: Element Types
<Operation panel>
<Standards compliance> <List example>
Material of element Performance/Feature
Cable 検出距離(mm)
General
Plastic -purpose
Bend radius Length Amp Mode

HPX-AG HP 42mm
Bend FT
耐屈曲
tolerant R1 2m HPX-EG nL 40mm
20mm
FT Indicates
HPX-H 50mm
折れない
Unbreakable Unbreakable Free cut
HPX-A element
25mm type.
HPX-AG HP
HPX-A series Typical models
Heatproof
FT 50mm

HPX-H series Type Model No. R4 2m HPX-EG nL


FT
50mm
30mm
<Exterior view> Low hysteresis HPX-A1 −30∼+70℃ 耐屈曲 フリーカット
HPX-H 100mm
HPX-A 40mm
High sensitivity HPX-H1
Multi-component Heatproof Two types, 200℃ and 350℃
glass
Sensitivity adjuster with indicator Vacuum 350℃
Self-diagnostic display (output)
Slim 10 mm profile
Standard

■ Bend-tolerant fiber unit R4 ■ Unbreakable fiber unit (stationary bend type) R1/R2

For use in moving Even if the cable is bent at a small radius,


environments the light level does not change.
Thanks to multi-core structure bundling several 100s of
<Operation panel> <Standards compliance> fiber elements, bending the cable does not attenuate the
■ Cyclic bending test (reference) light level.
Bent ±90°

Conventional fiber Unbreakable fiber


[Measurement conditions] core structure core structure
Roller diameter: 8 mm (4 mm in radius)
Load: 500 g
For example, HPF-T008 and -T009 withstand
1,000,000 bends under these conditions without breaking.

3 4

HPF Series
Applications
Wafer mapping Reference data Light level change characteristics
Combination amplifiers: HPX-AG series
【Type】Narrow view (Thru scan) (Sensing model : HP3)
Double layer Diagonal installation
【Catalog listing】HPF-T030

Screw
Case Studies (with actual workpiece data)
180
160

Light intensity (%)


140
Target object 120

Cylindrical
100
80
60
This section gives application case studies along with evaluation data using actual 40 *Light intensity is
20 100 % when there

Coaxial
workpieces. 5 10 15 20
is no wafer.
Displacement (mm)
Silicon wafer (300 mm)
Narrow view P 21

Sleeve
Liquid level detection Reference data Received light level display value Wafer projection detection Reference data

Side view
Combination amplifiers: HPX-EG series Combination amplifiers: HPX-AG series
【Type】Specialized use (Thru scan) (Sensing model : nL3) 【Type】Narrow view (Thru scan) (Sensing model: HP3)
【Catalog listing】HPF-D027, HPF-D033 Catalog Presence Absence 【Catalog listing】HPF-T020 Item Amount
listing of liquid of liquid

Narrow view
HPF-D027 σ 3 μm max.

Target object Target object Max - Min 11 μm


HPF-D033
■ Edge detection repeatability accuracy

reflection
Selective
Flat/
Area
Water Silicon wafer (300 mm)
Liquid level detection P 35 Narrow view P 21

Heatproof
Liquid level detection Reference data Received light level display value Gold wire detection Reference data Detection area characteristics
Combination amplifiers: HPX-AG series Combination amplifiers: HPX-AG series
【Type】Specialized use (Thru scan) (Sensing mode : nL3 【Type】Coaxial (Diffuse scan) (Sensing model : HP, FT)

-proof
Chemical
For 8mm dia. pipe only : nL2) 10
【Catalog listing】HPF-T032_, HPF-T034_ 【Catalog listing】HPF-D009 8
Sensing model
Catalog Pipe Presence Absence
listing diameter of liquid of liquid 6

Parallel displacement
4
HP
6 mm Ft

-proof
Vacuum
2
Target object HPF-T032 Target object 0
HPF-T032E
8 mm -2
-4

12 mm -6 X

HPF-T034

Use
Specialized
-8 Y

HPF-T034E -10
19 mm 0 1 2 3 4 5 6 7 8 9 10
Scanning distance X (mm)
Water Gold wire (φ17 μm)
Liquid level detection 37 Coaxial 15

Lens unit
P P

Liquid leak detection Reference data Lead frame detection Reference data

accessories
Other
Received light level display value Excess gain
Combination amplifiers: HPX-EG series Combination amplifiers: HPX-AG series
【Type】Specialized use (Diffuse scan) (Sensing mode: nL3) 【Type】Area (Diffuse scan) (Sensing model : HP3)
【Catalog listing】HPF-D040 Catalog Presence Absence Sensor 【Catalog listing】HPF-D026 1000
listing of liquid of liquid floating HPF-D026

Excess gain factor (times)


HPF-D002
HPF-D040 100

Target object Target object


10 Technical
Guide

1 List of Scanning
30 50 70 90 110 130 150 170 190 200 Distance by
Scanning distance (mm) Amplifiers Model

Water Lead frame size


Liquid leak detection P 39 35 mm×150 mm Area P 25
5 6
Note: The possibility of detection, as well as the measurement performance and degree of accuracy, are affected by the actual working conditions. Before using
the fiber unit, carry out a careful operation check.

HPF Series
Applications
Case Studies (with actual workpiece data)
Passing chip detection Reference data Light level change characteristics Glass detection Reference data Excess gain
Combination amplifiers: HPX-EG series (Sensing model : nL3) Combination amplifiers: HPX-AG series
【Type】Specialized use (Thru scan) 【Type】General-purpose screw (Diffuse scan) (Sensing model :nL3)

Rate of received light level change (%)


【Catalog listing】HPF-D027, HPF-D033 【Catalog listing】Fiber: HPF-D002 Amplifiers:HPX-AG series (HP3)

Screw
1000
100

Excess gain factor (times)


90 100

Target object Target object

Cylindrical
80

10
1mm 70
0.5 mm
0.3 mm -0.4 -0.2 0 0.2 0.4 0.6 0.8 Time (ms)

Coaxial
1
Notes: ・The characteristic changes depending on the fall velocity and attitude of the chip. 1 2 3 4 5 6 7 8 9 10
・This chart shows data for when the adapter for a small-diameter pipe
(HPF-AU04) is attached. Scanning distance (mm)

Target object size 1 mm×0.5 mm Black mask


Thickness 0.3 mm Passing chip detection P 33 Screw P 11

Sleeve
Chip face/back discrimination Reference data Received light level display value Glass detection Reference data Excess gain

Side view
Combination amplifiers: HPX-EG series (Sensing model : nL3) Combination amplifiers: HPX-AG series
【Type】Coaxial (Diffuse scan)/ Micro-Spot Lens Scanning Front of Rear of
【Type】Selective reflection (Diffuse scan) (Sensing model : HP3)
distance component component
【Catalog listing】HPF-D034, HPF-LU07 Target object 【Catalog listing】HPF-D028T 1000 AG
Plain glass

Excess gain factor (times)


-2 mm

Narrow view
Vapor-
deposited
100 glass
-1 mm
Target object Black mask

Focal Distance
10

reflection
Selective
Flat/
+1 mm
1
+2 mm 0 5 10 15 20 25 30 35 40 45 50
Scanning distance (mm)

Area
(Back) 15 Glass substrate
Target size 1 mm × 0.5 mm Coaxial/Micro-Spot Lens P43 Selective reflection P 24
Detection of meandering

Heatproof
Substrate "Bad" mark detection Reference data Received light level display value
Combination amplifiers: HPX-AG series (Sensing model : Ft3)
【Type】Coaxial (Diffuse scan) / Micro-Spot Lens

-proof
Chemical
Scanning distance Mark Reject mark
【Catalog listing】HPF-D038, HPF-LU08 Target object
-2 mm

-1 mm

-proof
Vacuum
Gold pattern
Understanding the graphs
Focal Distance
Approx. 1 mm dia.

+1 mm Excess gain

Use
Specialized
The excess gain indicates the magnitude of output from the light-receiving
+2 mm

Excess gain factor (times)


element relative to the amount of light received by the fiber unit (which varies 100
Reject mark depending on the distance). The graph shows that at a distance of 1, the
15
*The reject mark is applied to the gold
Coaxial/Micro-Spot Lens P 43
output from the light-receiving element is 10 times the level required for

Lens unit
pattern using an oil-based red felt pen.
operation. 10

This surplus is available in case there is a decrease in the incoming light level
Detection of meandering Reference data due to misalignment of the optical axis, dirt on the light-receiving element, etc.

accessories
Other
Light level change characteristics 1
0 0.5 1 1.5 2
Combination amplifiers: HPX-MA series
【Type】Area (Thru scan) (SENS:FINE RESP:NORMAL) Note: On an excess gain graph, the minimum operating level of the amplifier
Scanning distance (mm)

【Catalog listing】HPF-T021T_ 100


X mm is set at 1. Standard target object
Rate of received light level change (%)

75
T021WT
Detection area
T021T
Target object 50 The detection area is a characteristic used for diffuse scans. The graph shows
T021
the operation points of the fiber sensor when a standard target object (white Technical
25 paper) is moved perpendicular to the optical axis at the maximum sensitivity Guide
setting. This illustrates the extent of detectable light around the fiber unit.

Scanning renge
0 List of Scanning
-15 -10 -5 0 5 10 15 Displacement Distance by
Note: Optical center is aligned at 0 mm Note: For the excess gain graph, the minimum operating level of amplifier unit Amplifiers Model

Opaque Sheet is set as 1.


25
Sensing distance
Area P
7 8
Note: Detection availability, measurement performance, and accuracy also depend on actual working conditions.
Use the fiber unit after carrying out in advance an operation check and evaluation.

HPF Series
Screw Thru scan
Most generally used.
Use by attaching to a bracket, etc.

Screw
Outer dimensions Unit:mm
HPF-T024 HPF-T044
Shape A Shape B

Cylindrical
Core dia. Core dia.
φ0.5 2.5 φ0.75
HPF-T008 M3 (SUS) φ1 M3 (SUS) φ1

Core dia.

Coaxial
4 × φ0.25
Bolt type

【Related pages】 11 2000 11 2000

For combined lenses, see

Sleeve
Straight type
Elbow type P 45
HPF-T001 HPF-T033
For diffuse scan type, Shape C Shape D
see page 9. φ1.3
Thru scan Core dia. Core dia.

Side view
φ1.4 M2.6 M4 (SUS) φ2.2 3.2 16 × φ0.25
M2.6 M4 (SUS) φ2.2
Cable Scanning distance (mm) Min. HPF-T003
Type Size Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)
Core dia.
Shape A HPX-AG HP 40
140
φ1.0
FT

Narrow view
HPF-T025 3 11
R1 2m HPX-EG nL 50
29 φ0.5 φ0.005 HPF-T024
2000
3 11 2000
FT
Unbreakable Free cut
HPX-H 50
HPX-A 25 Core dia.
φ1.0
HPX-AG HP 52
180

reflection
Selective
Flat/
FT
M3 R4 2m HPX-EG nL 60
4×φ0.25 φ0.01 HPF-T008 HPF-T025B HPF-T010
FT 38 Shape E Shape F
−30 to +70℃ Bend
Free cut
HPX-H 100
tolerant
HPX-A 40 Core dia.
Core dia.
° φ2.5(SUS) φ2.7(SUS) φ2.2

7
Shape B HPX-AG HP 675 3 φ1.0
30 .5 Epoxy resin φ1.0

Area
FT 195
φ8
R20 2m HPX-EG nL 220
130 φ0.75 φ0.005 HPF-T044 5 5 15 2000
FT
−30 to +70℃ Free cut
HPX-H 220
HPX-A 110 R5
HPX-AG HP 900
30° φ2.2 11

Heatproof
Shape C FT 260 M4 (SUS)
Straight Lens attachable R2 2m HPX-EG nL
FT 180
310
φ1.0 φ0.005 HPF-T025 1
4.4 3
M2.6
HPX-H 300 2000
Unbreakable Free cut
HPX-A 150 7
HPX-AG HP M4(SUS)
3

-proof
Chemical
FT 350 1,200

R20 2m HPX-EG nL 410 M2.6


FT 240 φ1.0 φ0.005 HPF-T003
−30 to +70℃ Free cut
HPX-H 400
M4 HPX-A 200

-proof
Vacuum
Shape C HPX-AG HP 630 2,175
FT
R20 2m HPX-EG nL
HPX-H
FT 450
770
φ1.4 φ0.01 HPF-T001 NOTEWORTHY
−30 to +70℃ Free cut
800
HPX-A 400

Use
Specialized
Shape D HPX-AG HP 260
900
Products allowing either nut or setscrew installation are available for flexible operability,
FT
Lens attachable R4 2m HPX-EG nL 280 maintenance parts consolidation, and other factors.
FT 160 16×φ0.25 φ0.01 HPF-T033
−30 to +70℃ Bend
tolerant Free cut
HPX-H
HPX-A 130
265
HPF-T025B

Lens unit
Shape E HPX-AG HP 900
Applicable model number
FT 260 Nut installation Setscrew installation
Bolt M4
Lens attachable R2 2m HPX-EG nL 310
φ1.0 φ0.005 HPF-T025B
FT 180 Form Type Model no.
−30 to +70℃ HPX-H 300
Unbreakable Free cut
HPX-A 150 Thru scan Straight HPF-T033

accessories
Other
HPX-AG HP 855
Shape F FT 245 Thru scan Straight HPF-T044
Lens attachable R20 2m HPX-EG nL 300
Elbow M4 FT 170 φ1.0 φ0.005 HPF-T010 Thru scan Bolt HPF-T025B
−30 to +70℃ Free cut
HPX-H 300
HPX-A 150

*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG). D-Shape cutout
Technical
Guide

List of Scanning
Distance by
Amplifiers Model
Attachment method selectable

9 10

HPF Series
Screw Diffuse scan
Most generally used.
Use by attaching to a bracket, etc.

Screw
Outer dimensions Unit:mm
HPF-D004 HPF-D037
Shape G Emitter core dia.: Shape H
2 × φ0.25

Cylindrical
Core dia. Receiver core dia.:
2 × φ0.5 2 × φ0.25
HPF-D029 2×φ1 2×φ1
M3 (SUS) M3 (SUS)
Core dia.

Coaxial
2 × φ0.5

Bolt type
11 2000 10 2000

Sleeve
Straight type
Elbow type 【Related pages】
HPF-D018 HPF-D001
For thru scan see page 9. Dummy: Shape I Shape J
2 × φ0.5
Diffuse scan Core dia. Core dia.

Side view
2 × φ0.75 2 × φ1.4 2×φ2.2
Cable Scanning distance (mm) Min. M4 (SUS)
2×φ1 HPF-D002 φ4 M6 (SUS)
Type Size Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

HPX-AG HP 25 Core dia.


Shape G FT 8 Receiver 2 × φ1.0

Narrow view
and HPF-D012
R1 2m HPX-EG nL 10
HPF-D029
FT 5 emitter φ0.005 15 2000 Emitter core dia.:
16 × φ0.25
3
Unbreakable Free cut
HPX-H 10 φ0.5
HPX-A 5
φ1.8
Receiver core dia.:
16 × φ0.25
20 2000
HPX-AG HP 105
Receiver HPF-D030

reflection
Selective
Flat/
FT 34
M3 R15 2m HPX-EG nL 43 and
FT 25 emitter φ0.005 HPF-D004
−30 to +70℃ Free cut
HPX-H 40 φ0.5 Core dia.
2 × φ1.0
HPX-A 20
Shape H HPX-AG HP 20
Receiver

Area
FT 6
R4 2m HPX-EG nL 8 and
FT 5 emitter φ0.005 HPF-D037
−30 to +70℃ Bend
Free cut
HPX-H 8 2×φ0.25
tolerant
HPX-A 4
HPX-AG HP 200

Heatproof
Shape I FT 65 Receiver
M4 R15 2m HPX-EG nL 75 and
FT 46 emitter φ0.005 HPF-D018
−30 to +70℃ Free cut
HPX-H 80 φ0.75
Straight HPX-A 40
HPX-AG HP 210

-proof
Chemical
Shape J FT 69 Receiver
R2 2m HPX-EG nL 85 and
FT 50 emitter φ0.005 HPF-D030
Unbreakable Free cut
HPX-H 80 φ1.0
HPX-A 40

-proof
Vacuum
HPX-AG HP 80
250
Receiver
FT
R4 2m HPX-EG nL 100 and
FT 55 emitter φ0.005 HPF-D012
Bend
Free cut
HPX-H 100 16×φ0.25
M6
tolerant
HPX-A 50

Use
Specialized
HPX-AG HP
FT 170 530 Receiver
R20 2m HPX-EG nL 210 and
FT 120 emitter φ0.005 HPF-D001
Free cut
HPX-H 230 φ1.4
HPX-A 120

Lens unit
HPX-AG HP 400
FT 130 Receiver
R20 2m HPX-EG nL 150 and
FT 90 emitter φ0.005 HPF-D002
−30 to +70℃ Free cut
HPX-H 150 φ1.0
HPX-A

accessories
Other
80

*For scanning distances of the sensing modes, see the Technical Guide (page 52).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper).
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).

テクニカル
Technical
ガイ ド
Guide

List of Scanning
アンプ別検出
Distance by
距離一覧表
Amplifiers Model

11 12

HPF Series
Cylindrical
Suitable for installation where space is limited.
Use by attaching with the setscrew.

Screw
Outer dimensions Unit: mm
HPF-T038 HPF-T009
【Related pages】 Shape A Shape B

Cylindrical
Side-view sensors Core dia.
φ0.25
φ1 (SUS) φ3.5 Nylon resin
Core dia.
4 × φ0.25
P 19 φ1.5 (SUS)
φ0.7 Polyester resin φ2.2 φ1
Compatible lenses
P 45

Coaxial
13
15 2000
For head dia. of less than φ1.0 20
mm (thru scan) or φ1.5 mm 6 500
(diffuse scan), select from

Sleeve
Straight type sleeve-type sensors.
HPF-T046 HPF-T036
P 17 Shape C Shape D
Thru scan Core dia. Core dia. φ1.2 Polyethylene resin

Side view
4 × φ0.25 φ0.125

Cable Scanning distance (mm) Min. φ1.5 (SUS) φ1 φ1.5 (SUS) φ2.2 Nylon resin
Type Size Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

Shape A HPX-AG HP 10 37 25
FT

Narrow view
φ1 R4 0.5 m HPX-EG nL 12
FT 7 φ0.25 φ0.005 HPF-T038 10 2000
10 500
−30 to +70℃ HPX-H 12
HPX-A 6
HP 180
Shape B HPX-AG 52

reflection
Selective
Flat/
FT
R4 2m HPX-EG nL 60
HPF-T009 HPF-T043 HPF-T031
FT 38 4×φ0.25 φ0.01 Shape E Shape F
−30 to +70℃ Bend
Free cut
HPX-H 100
tolerant
HPX-A 40 Core dia. Core dia.
φ1.0
φ3
φ0.5
Shape C HPX-AG HP 180
φ2 (SUS) φ1 (SUS) φ2.2

Area
FT 52
φ1 .5 nL 60
R4 2m HPX-EG 38 4×φ0.25 φ0.01 HPF-T046
FT
−30 to +70℃ Bend
Free cut
HPX-H 100
tolerant
HPX-A 40
HPX-AG HP 18
22 2000
8 2000

Heatproof
Shape D FT 5
R4 0.5 m HPX-EG nL 6 φ0.125 φ0.005 HPF-T036
FT 3
−30 to +70℃
HPX-H 6
Straight HPX-A 3
HP 300 HPF-T004 HPF-D036

-proof
Chemical
Shape E HPX-AG
FT 85 Shape G Shape H
φ2 R15 2m HPX-EG nL 100
Emitter core dia.:
2 × 0.25 dia. φ1.5 (SUS)
FT 55 φ0.5 φ0.005 HPF-T043 φ1.2 Polyethylene tube
HPX-H
Core dia. Receiver core dia.: φ1.2
−30 to +70℃ Free cut 100 φ1.0 2 × 0.25 dia.
HPX-A 50
HPF-T002 M2.6 φ3 (SUS) φ2.2
φ3 (SUS)
2×φ3.5 (plastic)

-proof
Vacuum
Shape F HPX-AG HP 900
2×φ2.2
FT 260
nL 310
R2 2m HPX-EG 180 φ1.0 φ0.005 HPF-T031
Core dia.
FT φ1.4

−30 to +70℃ Unbreakable Free cut


HPX-H 300 13
HPX-A 150 20
3 15 2000

Use
Specialized
HP 15 (100)
HPX-AG
Shape G FT 350 1,200 10 1000
φ3 Lens attachable R20 2m HPX-EG nL 240
410
φ1.0 φ0.005 HPF-T004
FT
−30 to +70℃ Free cut
HPX-H 400
HPF-D005
HPX-A 200 Shape I

Lens unit
Shape G HPX-AG HP 630 2,175
FT Core dia.
2m HPX-EG nL 770 2 × φ0.5
R20 FT 450 φ1.4 φ0.01 HPF-T002 φ3 (SUS) 2×φ1
−30 to +70℃ Free cut
HPX-H 800
HPX-A

accessories
Other
400

Diffuse scan 15 2000

Cable Scanning distance (mm) Min.


Type Size Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

Shape H HPX-AG HP 6 20 Receiver


FT

φ1 .5 R4 1m HPX-EG nL 8
HPX-H
FT 5
and
emitter φ0.005 HPF-D036 NOTEWORTHY テクニカル
Technical
−30 to +70℃ Bend 8 2×φ0.25 ガイ ド
Guide
Straight
tolerant
HPX-A 4
Shape I HPX-AG HP
34
105
Receiver Smallest fiber unit head dia. (1.0 mm) in the industry Compatible lens units are available for cylindrical types List of Scanning
FT アンプ別検出
and FE-PA-L1(For long distance and narrow beam types) Distance by
φ3 R15 2m HPX-EG nL 43
φ0.005 HPF-D005 HPF-T038 距離一覧表
Amplifiers Model
FT 25 emitter
−30 to +70℃ Free cut HPX-H 40 φ0.5 HPF-T004
HPX-A 20
FE-PA-S1(For side view types)
*For scanning distances of the sensing modes, see the Technical Guide (page 51).
13 *Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). 14
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).

HPF Series
Coaxial
Used for target object positioning or in combination with spot lenses.

Screw
Outer dimensions Unit: mm
HPF-D034
HPF-D034 HPF-D010
Emitter core dia.: Shape A Emitter core dia.: Shape B
φ0.25 φ0.5

Cylindrical
Receiver core dia.:
Receiver core dia.: 2×φ3.5 (plastic) 4 × φ0.25
6 × φ0.25 (Dummy:5 × φ0.25)

M3 (SUS) φ3 φ0.9 (Emitter) 2×φ2.2 HPF-D032 M3 (SUS) 2×φ1


Emitter core dia.:
φ0.5
Receiver core dia.:
4 × φ0.25

Coaxial
【Related pages】 18 φ1.6 (Receiver) 13
(Dummy:5 × φ0.25)

20
For compatible micro-spot 23 500 18 2000
lenses

Sleeve
Straight type Bolt type P 43
HPF-D049 HPF-D035
Emitter core dia.: Shape C Emitter core dia.: Shape D
φ0.5 φ0.5

Diffuse scan Receiver core dia.:


M3 (SUS) φ1.0
Receiver core dia.:

Side view
9 × φ0.25 9 × φ0.25
2×φ1.25
Cable Scanning distance (mm) Min. φ3 φ1.3 M3 (SUS) φ3
Type Size Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

Shape A HPX-AG HP 60
Emitter:
FT 19

Narrow view
Lens attachable 0.5m HPX-EG nL 25 φ0.25
R4 FT 15 Receiver: φ0.005 HPF-D034 11 5 1000 18 5 2000
−30 to +70℃ Bend HPX-H 25 6×φ0.25
tolerant
HPX-A 13
Shape B HPX-AG HP 46
Emitter:

reflection
Selective
Flat/
Emitter: R1 FT 15
Lens attachable Receiver: R4 2m HPX-EG nL 18 φ0.5 HPF-D032B HPF-D038
FT 10 Receiver: φ0.005 HPF-D032 ° Epoxy resin Shape E Shape F
30
Emitter core dia.: Emitter core dia.:
φ0.5 .5
HPX-H 4×φ0.25 φ6
18 φ0.5

5.5
Unbreakable Free cut Receiver core dia.:
HPX-A 10 4 × φ0.25 Receiver core dia.:
HPX-AG HP 86 2.2 (Dummy:5 × φ0.25) 9 × φ0.25
Emitter: M3 (SUS) 2×φ1.25

Area
FT 28
Straight M3 2m HPX-EG nL 35 φ0.5 30°
2×φ1
R15 HPF-D010
FT 21 Receiver: φ0.005
−30 to +70℃ Free cut
HPX-H 40 4×φ0.25
HPX-A 20 3.5
1
HPX-AG HP 160

Heatproof
Shape C Emitter: 1000
Lens attachable
FT
nL
55
60 φ0.5 11.5 16 2000
1m HPX-EG
R4 38 Receiver: φ0.005 HPF-D049 M3 (SUS)
−30 to +70℃ Free cut
HPX-H 60 9×φ0.25
HPX-A 34
HPX-AG HP 95
HPF-D009 HPF-D042

-proof
Chemical
Shape D FT 43 Emitter: Emitter core dia.: Shape G Emitter core dia.: Shape H
Lens attachable 2m HPX-EG nL 50 φ0.5 φ1.0 φ0.5
R15 HPF-D035
FT 29 Receiver: φ0.005
−30 to +70℃ Free cut
HPX-H 50 9×φ0.25
Receiver core dia.:
16 × φ0.25 M6 (SUS) 2×φ2.2 Receiver core dia.:
4 × φ0.25
φ3 (SUS)
HPX-A 25 φ2 (SUS) 2×φ0.1

-proof
Vacuum
Shape E HPX-AG HP 46
Emitter:
Emitter: R1 FT 15
Bolt M3 Lens attachable Receiver: R4 HPX-EG nL 18 φ0.5
Receiver: φ0.005 HPF-D032B
1m
HPX-H
FT 10
18 4×φ0.25 3
15
−30 to +70℃ Unbreakable Free cut
HPX-A 10
22 2000

Use
Specialized
Shape F HPX-AG HP
FT 43
95
Emitter: 20 2000

M4 Lens attachable 2m HPX-EG nL 50 φ0.5


R15 HPF-D038
FT 29 Receiver: φ0.005
HPX-H 50 9×φ0.25
−30 to +70℃ Free cut
HPX-A HPF-D035C
NOTEWORTHY
25
Shape I

Lens unit
Emitter core
Shape G HPX-AG HP 400
Emitter:
dia.:φ0.5
FT 130
φ1.0
2.8
Receiver core φ3 (SUS) 2×φ1.25
M6 R20 2m HPX-EG nL 150
HPF-D009 dia.:9 × φ0.25
FT 90 Receiver: φ0.005 V Groove
−30 to +70℃ Free cut
HPX-H 150 16×φ0.25 Coaxial fiber is recommended for use with
HPX-A

accessories
Other
Straight 80
HPX-AG HP 86 micro-spot lenses and applications
Shape H FT 28 Emitter: 6
φ0.5 2000 requiring highly precise positioning.
φ2 R15 2m HPX-EG nL 35
HPF-D042
9.5
FT 21 Receiver: φ0.005
−30 to +70℃ Free cut
HPX-H 40 4×φ0.25 15 Standard Coaxial
HPX-A 20 General diffuse scan type Used in combination with micro-spot
used conventionally lenses, for positioning use, etc.
Shape I HPX-AG HP 43
95
Emitter:
FT
φ3 Lens attachable 2m HPX-EG nL 50 φ0.5
R15 FT 29 Receiver: φ0.005 HPF-D035C Detection
−30 to +70℃ Free cut
HPX-H 50 9×φ0.25 fiber
HPX-A 25
テクニカル
Technical
Receiver
fiber ガイ ド
Guide
*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper).
List of Scanning
アンプ別検出
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs. Distance by
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG). 距離一覧表
Amplifiers Model

Target Target
15 16

HPF Series
Sleeve
Use to maintain a small distance between target object and sensor in a limited space.

Screw
Outer dimensions Unit: mm
HPF-T039 HPF-T015
Core dia. Shape A Shape B
φ0.125
φ0.5 (SUS)

Cylindrical
0.4 φ0.4 (SUS)
Core dia.
φ0.25

φ2.5 (SUS) φ2.2 (Nylon resin) φ3 (SUS) φ1

【Related pages】

Coaxial
Sleeve-length 25
customization 5 10 500 5 15 2000
Straight type P8

Sleeve
Side-view sensing
HPF-T005 HPF-T006
P 19 Shape C Shape D
Thru scan Core dia. M4 (SUS) Core dia.

Side view
φ1.0
φ1.2 (SUS) φ2.2
φ1.0
φ1.2 (SUS) φ3 (SUS) φ2.2
Cable Scanning distance (mm) Min.
Front end dia. Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)
Note Note Note Note
Shape A HPX-AG HP 5
18
10 10 10 10
FT

Narrow view
φ 0 .4 R4 0.5m HPX-EG nL 5
3 φ0.125 φ0.005 HPF-T039 65 15 2000 65 15 2000
FT
−30 to +70℃ HPX-H 6
HPX-A 3 Note: Area that cannot be bent Note: Area that cannot be bent
Extendable Shape B HPX-AG HP 10
37

reflection
Selective
Flat/
FT
φ 0 .5 R15 2m HPX-EG nL 12
φ0.25 φ0.005 HPF-T015 HPF-D039 HPF-D019
FT 7 Shape E Shape F
−30 to +70℃ Free cut
HPX-H 12
HPX-A 6
φ0.82 (SUS)
Core dia. Core dia.
HPX-AG HP 2 × φ0.25 2 × φ0.25
2×φ1
Extendable Shape C 2×φ2.2 φ0.82 (SUS)

Area
FT 350 1,200
φ2.5 (SUS) φ3 (SUS)
φ 1 .2 R20 2m HPX-EG nL 240
410
φ1.0 φ0.005 HPF-T005
FT
Bendable
(10-mm radius) −30 to +70℃ Free cut
HPX-H 400
HPX-A 200
HPX-AG HP
15 15 500

Heatproof
Shape D FT 350 1,200
5 10 500
φ 1 .2 R20 2m HPX-EG nL 240
410
φ1.0 φ0.005 HPF-T006
FT
Bendable
(10-mm radius) −30 to +70℃ Free cut
HPX-H 400
HPX-A 200
HPF-D006 HPF-D021

-proof
Chemical
Shape G Shape H
Diffuse scan Core dia. Core dia.
2×φ1
Cable Scanning distance (mm) Min.
2 × φ0.5
φ1.2 (SUS) M4 (SUS) 2 × φ0.5
φ1.5 (SUS) φ3 (SUS)
2×φ1

-proof
Vacuum
Front end dia. Shape Core detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

Shape E HPX-AG HP 20
Receiver Note Note
FT 6 10 10
and 15
φ0.82 R4 0.5m HPX-EG nL 4
emitter φ0.005 HPF-D039
10 2000
FT 2
65

Use
Specialized
−30 to +70℃ Bend
Free cut
HPX-H 4 φ0.25 11 2000
tolerant
HPX-A 2
Note: Area that cannot be bent
Shape F HPX-AG HP 6
20
Receiver
FT
and
φ0.82 R15 0.5m HPX-EG nL 4
emitter φ0.005 HPF-D019 HPF-D003
FT 2
Shape I

Lens unit
−30 to +70℃ Free cut
HPX-H 4 φ0.25
HPX-A 2
Core dia. M6 (SUS) 2×φ2.2
Extendable Shape G HPX-AG HP 105
Receiver 2 × φ1.0
FT 34
and φ2.5 (SUS)
φ1.2 R15 2m HPX-EG nL 43
emitter φ0.005 HPF-D006

accessories
Other
FT 25
Bendable
(10-mm radius) −30 to +70℃ Free cut
HPX-H 40 φ0.5
HPX-A 20 Note Note
HPX-AG HP 86 10 10
Shape H FT 28 Receiver
and
φ1.5 R15 2m HPX-EG nL
FT 21
35
emitter φ0.005 HPF-D021 65 20 2000

−30 to +70℃ Free cut


HPX-H 40 φ0.5 Note: Area that cannot be bent
HPX-A 20
Extendable Shape I HPX-AG HP 130
400
Receiver
FT
and
φ2.5 R20 2m HPX-EG nL 150
emitter φ0.005 HPF-D003
FT 90 テクニカル
Technical
Bendable
(10-mm radius) −30 to +70℃ Free cut
HPX-H 150 φ1.0 ガイ ド
Guide
HPX-A 80

*For scanning distances of the sensing modes, see the Technical Guide (page 51). List of Scanning
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). Distance
Distancebyby
Amplifiers
Amplifier Model
Model
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).

17 18

HPF Series
Side view
Light emitted to the side.
Use to maintain a small distance between target object and sensor in a limited space.

Screw
Outer dimensions Unit: mm
HPF-T037 HPF-T026
Enlargement
Shape A Enlargement
Shape B
D-shape cutout

Cylindrical
D-shape cutout

2.2 2.2

Optical axis Optical axis


45°
φ2.5 (SUS) 45° φ1(SUS) φ2.5 (SUS) φ1
【Related pages】 φ0.88 φ1 (1

Coaxial
dia.)
Narrow view sensing 0.3 1.5
1 1.5

P 21 15 15 1000
15 12 2000
0.6 Optical axis 1.5 Optical axis
Sleeve-length

Sleeve
Straight type customization
P8 HPF-T007 HPF-T042
Shape C Shape D
Enlargement Enlargement

Thru scan D-shape cutout D-shape cutout

Side view
2.2 2.8
Center of
optical axis Cable Scanning distance (mm) Min.
Front end dia. (From Shape Core detectable Model No.
Optical axis φ2.5 (SUS) Optical axis

φ3 (SUS)
45°
front end) Bend radius Length Amp Mode Distance size (mm) 45°
φ1 (SUS) φ1 φ2.2
Extendable 0.6 Shape A HPX-AG HP 15
52
FT

Narrow view
1 1.5 1 1.5
20
R5 1m HPX-EG nL φ0.5 φ0.005 HPF-T037
φ 0 .8 8
HPX-H
FT 11
20
15 12 2000 35 2000
−30 to +70℃ Free cut
HPX-A 10 1.5 Optical axis 1.5 Optical axis

1.5 Shape B HPX-AG HP 52

reflection
Selective
Flat/
FT 15
φ1 R1 2m HPX-EG nL 20 HPF-D011 HPF-D041
FT 11 φ0.5 φ0.005 HPF-T026 Shape E Shape F
Enlargement Enlargement
−30 to +70℃ Unbreakable Free cut
HPX-H 20
D-shape cutout D-shape cutout
HPX-A 10
1.5 Shape C HPX-AG HP 165 2.8 2.6

Area
FT 48
Optical axis Optical axis
φ1 R15 2m HPX-EG nL 55
φ0.5 φ0.005 HPF-T007 2×φ1
HPX-H
FT 33
60
45°
φ2 (SUS) φ3 (SUS)
2×φ1 φ2 (SUS) φ2.8 (SUS)
−30 to +70℃ Free cut 45°
HPX-A 30
0.5 1.5
HPX-AG HP
1 1.5
1.5

Heatproof
Shape D 190 660
FT
40 15 2000
15
φ3 R5 2m HPX-EG nL 220
130 φ0.5 φ0.005 HPF-T042 1.5
15 2000
FT 1.5 Optical axis Optical axis

−30 to +70℃ Free cut


HPX-H 240
HPX-A 120
HPF-D043

-proof
Chemical
Shape G
Enlargement
Diffuse scan D-shape cutout

Center of 5.7
optical axis Cable Scanning distance (mm) Min.
2×φ2.2
φ6 (SUS)

-proof
Vacuum
Front end dia. (From Shape Core detectable Model No. Optical axis
front end) Bend radius Length Amp Mode Distance size (mm)
45°
Extendable 1.5 Shape E HPX-AG HP 40
Receiver
FT 13
HPX-EG nL 17 and
φ2 R15 2m HPF-D011 12
FT 10 emitter φ0.005
35

Use
Specialized
HPX-H 15 φ0.5 2000
−30 to +70℃ Free cut
HPX-A 8
1.5 Optical axis
1.5 Shape F HPX-AG HP 40
Receiver
FT 13
HPX-EG nL 17 and
φ2 R15 2m HPF-D041
FT 10 emitter φ0.005

Lens unit
−30 to +70℃ Free cut
HPX-H 15 φ0.5
HPX-A 8
1.5 Shape G HPX-AG HP 160
Receiver
NOTEWORTHY
FT 52
HPX-EG nL 65 and
φ6 R20 2m HPF-D043
FT 40 emitter φ0.005

accessories
Other
−30 to +70℃ Free cut
HPX-H 50 φ1.0
HPX-A 32
All side view types have D-shape cutout The distance from the front end to
*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). Unique on the fiber unit head. Selection the center of the optical axis depends
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs. feature This can greatly reduce adjustment point on the product structure.
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG). man-hours during installation. Select the model that is suitable for
your application.

×
D-shape cutout

Technical
Optical axis position for Guide
side view unit
List of Scanning
0.6 Distance by
The D-shape cutout In detection of small component dislocation, Amplifiers Model
perpendicular to the optical the distance from the front end to the center of
axis facilitates alignment. (Example) the optical axis is important.

19 20

HPF Series
Narrow view
Light spread minimized.
Use in a place where light intrusion is undesirable.

Screw
Outer dimensions Unit: mm
HPF-T030 HPF-T023
3 φ2 (SUS) Shape A Shape B
(Optical axis) (SUS)

Cylindrical
Glass lens 7.5 Glass lens
φ2.3 (SUS) M4 (SUS) φ1
1
φ1

Coaxial
【Related pages】 10.5
7.4
If a narrow beam is
1.5 4.3 17 11 2000
1.4 3.5 8
not required:
2.8 9 15 2000
P 17

Sleeve
(Light from top) (Light from side) Sleeve-type units
Side-view units P 19 HPF-T019
Shape C
HPF-T020
Shape D
φ4(SUS)
Enlargement

Thru scan φ2.8 (SUS) D-shape cutout φ2.2

Side view
3.8
Directional Cable Scanning distance (mm) Effective Min. Glass lens M4 (SUS) φ2.2
Light emitter angle Shape lens detectable Model No.
(half angle) Bend radius Length Amp Mode Distance diameter size (mm)
1.3 4.3
Shape A HPX-AG HP 305
500
FT

Narrow view
Side HPX-EG nL 310
1 .5 ° R5 2m
FT 180 φ1.5 φ0.005 HPF-T030 17 11 2000 (2.8)
Optical axis 30 2000
−30 to +70℃ Free cut
HPX-H 350
HPX-A 175
Shape B HPX-AG HP 3,600

reflection
Selective
Flat/
FT 1,050

Top 1 .5 ° R15 2m HPX-EG nL 1,200


HPF-T023 HPF-D025
FT 730 φ1.7 φ0.1 Shape E
HPX-H 1,200
−30 to +70℃ Free cut
HPX-A 600 φ4 (Aluminum) 2×φ1
Shape C HPX-AG HP M5 (SUS)

Area
4,100
FT 1,200 Glass lens
Top 2 .5 ° R20 2m HPX-EG nL 840
1,400
φ2.1 φ0.1 HPF-T019
FT
−30 to +70℃ Free cut
HPX-H 1,500
HPX-A 750
(10.7) 20.5
HPX-AG HP

Heatproof
Shape D FT
4,500
1,310 31.2 2000
Side 3° R20 2m HPX-EG nL 1,500
920 φ2.6 φ0.1 HPF-T020
FT
−30 to +70℃ Free cut
HPX-H 1,600
HPX-A 800

-proof
Chemical
Diffuse scan
Directional Cable Scanning distance (mm) Effective Min.
angle lens detectable

-proof
Vacuum
Light emitter Shape Model No.
(half angle) Bend radius Length Amp Mode Distance diameter size (mm)

Shape E HPX-AG HP 20
FT 20
Top ― R15 2m HPX-EG nL 20 ― φ0.005 HPF-D025
FT 16

Use
Specialized
−30 to +70℃ Free cut
HPX-H 20
HPX-A 20

*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper).
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.

Lens unit
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).
NOTEWORTHY

accessories
Other
Narrow view types are available also by combination with long-distance lenses and side-view lenses.
(Typical examples)

Optical configuration Lens unit Fiber unit Directional angle (half angle)
Top FE-PA-L1 HPF-T003 Approx. 3°
Top HPF-VL06 HPF-T003 Approx. 3°
Side FE-PA-S1 HPF-T003 Approx. 10° テクニカル
Technical
ガイ ド
Guide
Side HPF-VL05 HPF-T003 Approx. 8°
※For lens units, see page 43. List of Scanning
アンプ別検出
Distance by
距離一覧表
Amplifiers Model

21 22

HPF Series
Flat/Vane Selective reflection
Suitable for installation where space is limited. Resistant to ambient influences.
Attach directly to casing. Use for target object detection in a limited area.

Screw
Cylindrical
Coaxial
(Light from top) (Light from flat) (Light from top) (Light from flat)

Thru scan Diffuse scan

Sleeve
Cable Scanning distance (mm) Min. Cable Scanning distance (mm) Min.
Type Light emitter Shape Core detectable Model No. Light emitter Shape detectable Model No.
Bend radius Length Amp Mode Distance size (mm) Bend radius Length Amp Mode Distance size (mm)

Shape A HPX-AG HP 40
140
Shape A HP 2.5±0.5
FT

Side view
nL 2.5±0.5
Top R1 2m HPX-EG nL 50
φ0.5 φ0.005 HPF-T028 R15 2m HPX-AG φ0.005 HPF-D028
FT 29 SF 2.5±0.5
−30 to +70℃ Unbreakable Free cut
HPX-H 50 −30 to +70℃ Free cut
HPX-A 25 FT 2.5±0.5
Flat
Shape B HPX-AG HP 60
210
Top Shape B HP 7.4±1.6
FT

Narrow view
nL 7.4±1.6
Flat R5 2m HPX-EG nL 80
φ1.0 φ0.005 HPF-T028LF R15 2m HPX-AG
FT 47 SF 7.4±1.6 φ0.005 HPF-D028T
−30 to +70℃ Free cut
HPX-H 80 −30 to +70℃ Free cut
HPX-A 40 FT

Shape C HPX-AG HP 6 HPX-EG nL 7.4±1.2

reflection
Selective
Flat/
FT 6
HP 5.2±1.6
Vane type ― R15 5m HPX-EG nL 6
φ0.5 φ0.005 HPF-T054-L05
Shape C
FT 6 nL 5.2±1.6
HPX-H 6 Flat R15 2m HPX-AG
−30 to +70℃ Free cut
HPX-A 6 SF 5.2±1.6 φ0.005 HPF-D028F
−30 to +70℃ Free cut FT

Area
Diffuse scan HPX-EG nL 5.2±1.0

Cable Scanning distance (mm) Min. *For scanning distances of the sensing modes, see the Technical Guide (page 52).
Type Light emitter Shape Core detectable Model No. *Scanning distances for diffuse scan are obtained with a standard target object (plain white paper).
Bend radius Length Amp Mode Distance size (mm)
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.

Heatproof
Shape D HPX-AG HP 30
93
Receiver *The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).
FT
Flat Flat HPX-EG nL 37 and
R2 2m ─ HPF-D045LF
FT 21 emitter
HPX-H φ1.0
−30 to +70℃ Unbreakable Free cut
HPX-A 17
35
Outer dimensions

-proof
Chemical
Unit: mm
HPF-D028 HPF-D028T 4×φ6
*For scanning distances of the sensing modes, see the Technical Guide (page 51). Aluminum (black anodized) 2×φ1 Shape A Mounting hole: Shape B
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). 2×φ3.2
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs. 4
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG). 12 (4.5) 4×90°
Heat-resistant ABS resin

-proof
Vacuum
3 Sensing surface
(optical axis) 7 4

3 19 2000 2×φ1
2×90° 11.5 18
Outer dimensions

Use
Specialized
Unit: mm 2×φ6
HPF-T028
Shape A
HPF-T028LF
Shape B
2.5 6 6.5
SUS
Brass (Ni plated) 2×φ3.2 16 2000
2.4 3.3
2×M3

Lens unit
φ0.5 4 2×φ2.3 HPF-D028F 4×φ6
(Core dia) 2×R φ1 φ2.2 Mounting hole: 2×φ3.2 Shape C
2×R2
10 6 4 2.2
15 10 4×90°
Acrylic resin Heat-resistant ABS resin

accessories
Other
2.5
3 8.5
Optical axis center: 1.75 5 2×φ1
10 2000 10 2000 18 15.5

HPF-T054-L05 30 (5) HPF-D045LF 2.6 6 6.5


25 Shape C SUS Shape D
Optical axis center
9 4×C0.5 18.6 2000
3.3
2×M3
22 6 12 2×φ2.2
テクニカル
Technical
(8) ガイ ド
Guide
12.3
15.2
2×φ0.35
15 10
2.3 2.3 List of Scanning
アンプ別検出
Distance by
4.6 距離一覧表
Amplifiers Model
5000 Optical axis center: 1.5 5
Adhesive
(black epoxy-based resin) Housing (black PPS) 10 2000

23 24

HPF Series
Area
Wide light beam.
Use for target object with varying detection positions, detection of meandering, etc.

Screw
Outer dimensions Unit: mm
HPF-T021 HPF-T021T
PBT resin SUS insert Shape A 38.3 2000 Shape B
2×M3 31 Heat-resistant

Cylindrical
Optical axis (enlarged)
C1
【Related pages】 16 × φ0.25 (core dia.) 2.8 4 7 19 ABS resin
10 8.1 φ2.2
15.6

(=5.25)
Small part passage 1.3 0.35
14.5 10.7
φ2.2
sensing

15×0.35

Coaxial
4.8 4×φ6
P 33
8 15
8.1 10 2×φ3.2
2000
4.8 2
5 15.6 Acrylic resin
4×90°
Light from flat Light from side

Sleeve
HPF-T021S HPF-T021WT
Thru scan 38.3 2000
Shape C 71.3 2000 Shape D
64 Heat-resistant
31 Heat-resistant ABS resin
19 5

Side view
Cable Scanning distance (mm) Min. 7 ABS resin 12 45
Type
Optical
configuration
Area width
(mm) Shape
Bend radius Length Amp Mode Distance
detectable Model No. 4 φ2.2
size (mm) φ2.2
Shape A HPX-AG HP 780 17 14.5 10.7 23 18
FT 225
Array Flat 5.25 R4 2m HPX-EG nL 270
φ0.2 HPF-T021 15
2

Narrow view
FT 160 4×φ6 30 4×φ6
Bend HPX-H 250 Acrylic resin 10 2×φ3.2 18.5 2×φ3.2
−30 to +70℃ Free cut
tolerant
HPX-A 125 3
Shape B HPX-AG HP 3,600 Acrylic resin
FT 1,050 4×90° 4×90°
Flat 15 R15 2m HPX-EG nL 1,200
HPF-T021T

reflection
Selective
Flat/
FT 710 φ0.2
HPX-H HPF-D026
−30 to +70℃ Free cut
HPX-A 600
1,200
Shape E
HPX-AG HP PBT resin SUS insert
Shape D FT
3,600
2×M3
1,750
Magnified view of optical axis
C1 2.8
HPX-EG nL

Area
Screen Flat 30 R15 2m 2,000
φ0.4 HPF-T021WT
32×φ0.25 (core diameter)
FT 1,100 1.3 0.35
HPX-H 10.6
20.6

(=10.85)
−30 to +70℃ Free cut 2,000 15
HPX-A 1,000
2×φ2.2
(7.1)
Shape C HPX-AG HP 3,450
FT 1,000

31×0.35
HPX-EG nL

Heatproof
Side 15 R15 2m 1,100 10.6
FT 670 φ0.2 HPF-T021S
−30 to +70℃ Free cut
HPX-H 1,100
HPX-A 550 4.8 13 2000
20.6
4.8
5

-proof
Chemical
Diffuse scan
Optical Area width Cable Scanning distance (mm) Min.
Type Shape detectable Model No.
configuration (mm) Bend radius Length Amp Mode Distance size (mm)

-proof
Vacuum
HPX-AG HP
Accessory
265
Shape E FT 85 (HPX-T021T) (HPX-T021WT)
Array Flat 10.85 R4 2m HPX-EG nL 100
φ0.005 HPF-D026
FT 60
HPX-H 0.5 0.5 2 0.5 0.5
100
2.8 Paper mat
Bend
−30 to +70℃ Free cut
tolerant
HPX-A 50 1.5 5.5 3.5 2.7 7.7

Use
Specialized
*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). 15 7 11 30 20
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs. 29 60
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).

Lens unit
15×0.5 7×0.5 11×2 30×0.5 20×0.5

NOTEWORTHY
Note Note
Material: Transparent polyester film (black print on back) Material: Transparent polyester film (black print on back)

accessories
Other
HPF-T021T comes with slits. HPF-T021WT comes with slits.
Type Features Use the appropriate slit with the unit to achieve the Use the appropriate slit with the unit to achieve the
desired scanning distance and resolution. desired scanning distance and resolution.
The slits can be bought as parts.
Array type Small diameter fibers are aligned in a row. Model No : HPX - PA07
Smaller and slimmer sensor heads are also
available.

テクニカル
Technical
ガイ ド
Guide
Screen type Light is collimated using the lens.
List of Scanning
アンプ別検出
This increases the scanning range and makes Distance by
距離一覧表
Amplifiers Model
the light uniform.

25 26

HPF Series
Heatproof
Resistant to high temperatures.
Use in environments up to 350 °C.

Screw
Outer dimensions Unit: mm
HPF-T012 HPF-T017
Shape A Shape B

Cylindrical
Effective dia.: Core dia.
φ1.0 φ1.5

M2.6 M4 (SUS) φ2.2 φ2.85 M4 (SUS) φ2.2

Coaxial
1 15
3 11 2000
17 2000
【Related pages】

Sleeve
Heat resistant to 200℃ Heat resistant to 350℃
Compatible lenses
P 45 HPF-T018 HPF-T014
Shape C Stainless Shape D
Glass steel tube
Thru scan fiber: φ1.0
Silicone tube
φ5
(plastic)
φ0.05 × 370 M2.6
φ5

Side view
(φ0.05 × 320) (Glass fiber)
(plastic)
M4 (SUS) φ4
Heatproof Size Shape
Cable Scanning distance (mm)
Element
Min.
detectable Model No.
M2.6 M4 (SUS) φ2.2 φ2.2
Bend radius Length Amp Mode Distance size (mm)

Shape A HPX-AG HP
FT 200
690
Note 3 17 10 13

Narrow view
3 10 10 13
105℃ Straight Lens attachable HPX-EG nL 240
φ1.0 φ0.005 Note 30 2000
R25 2m
FT 140 HPF-T012 15 10
−30 to +105℃ Free cut
HPX-H 250 *1 1000 −60∼+350℃ −30∼+70℃
HPX-A 120
Note: Area where bending is not allowed
Operating temperature range
Shape B HPX-AG HP 1,200

reflection
Selective
Flat/
FT 350
150℃ Straight R35 2m HPX-EG nL 410
φ1.5 φ0.01 HPF-T017 HPF-D013 HPF-D022
FT 240 Shape E Core dia. Shape F
−60 to +150℃ Free cut
HPX-H 400 *1 2 × φ1.5
HPX-A 200 Effective dia.:
φ4.9
2 × φ1.0 2 × φ2.2
HPX-AG HP 615
M6 2×φ2.2 2×φ2.2
Shape C
M6 (SUS)

Area
FT 175
φ4
200℃ Straight Lens attachable R15 1m HPX-EG nL 140
φ1.0 φ0.005 HPF-T018
FT 80
−30 to +200℃ HPX-H 200
HPX-A 100
3 13
HPX-AG HP 660 3

Heatproof
Shape D FT 190
20 2000 17 2000
350℃ Straight Lens attachable R15 2m HPX-EG nL 130
220
φ1.0 φ0.005 HPF-T014
FT
−30 to +350℃ HPX-H 250
HPX-A 120
HPF-D023 HPF-D015

-proof
Chemical
Silicone Shape G Shape H
tube
Diffuse scan Glass fiber:
φ1.4
Silicone tube
φ1.5(2×(φ0.05×370)) φ4 Stainless steel tube 2×φ5
(2 × φ0.05 × 320) 2×φ5 (plastic)
M6 (SUS)
(Glass fiber)
(plastic)
Cable Scanning distance (mm) Min.
M6 φ10 (SUS) 2×φ2.2

-proof
Vacuum
Heatproof Size Shape Element detectable Model No. φ4
Bend radius Length Amp Mode Distance size (mm) φ9 2×φ2.2 φ5

Shape E HPX-AG HP 190


Receiver
FT 85
105℃ Straight HPX-EG nL 100 and 14 10 Note 23 17
R25 2m emitter φ0.005 HPF-D013 2 13 30 60 10 13
FT 55
*1
27 (30) (10) 3 25 2000

Use
Specialized
−30 to +105℃ Free cut
HPX-H 100 φ1.0
HPX-A 50 1000
−60∼+350℃ −60∼+110℃ −30∼+70℃
Note: Area where bending is not allowed
Shape F HPX-AG HP 130
400
Receiver Operating temperature range
FT
and
150℃ Straight R35 2m HPX-EG nL 150
emitter φ0.005 HPF-D022
FT 90
*1

Lens unit
HPX-H φ1.5
NOTEWORTHY
−60 to +150℃ Free cut 150
HPX-A 80
Shape G HPX-AG HP 55
170
FT
200℃ Straight R15 1m HPX-EG nL 42
70
φ1.4 φ0.005 HPF-D023
FT

accessories
Other
HPX-H 50 Use the lens unit appropriate for your application.
−30 to +200℃
HPX-A 50 *Select a lens with the desired heat resistance.
Shape H HPX-AG HP 75
160
FT
350℃ Straight R25 2m HPX-EG nL 85
φ1.5 φ0.005 HPF-D015 Heatproof
FT 50 Lens Type Sensitivity
HPX-H 90
temp.
−30 to +350℃
HPX-A 30
200℃ FE-PA-L1 Long Approx. ×6
*For scanning distances of the sensing modes, see the Technical Guide (page 51). distance
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper). 200℃ FE-PA-S1 Side ─
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs. テクニカル
Technical
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG). ガイ ド
Guide
350℃ HPF-VL06 Long Approx. ×10
distance
*1. If a fiber unit is continuously used in an environment where it is at the upper limit of the operating temperature range, the detection Side List of Scanning
アンプ別検出
350℃ HPF-VL05 ─ Distance by
distance will decrease. When selecting a fiber unit, be sure to take the ambient temperature into account so that the sensor is not continuously 距離一覧表
Amplifiers Model
operating near its limits. *Compatible lens units P. 43

27 28

HPF Series
Chemical-proof
Protected with PFA tubing for excellent chemical resistance.

Screw
Outer dimensions Unit: mm
HPF-T029 HPF-T029E
【Related pages】 Shape A Shape B
Wet process sensors φ4.7(PFA)

Cylindrical
Lens dia.: Core dia.
for level & leak φ3.0
φ4.7(PFA) φ2.2(PFA) φ1.3
φ1.0
φ1.3
φ2.2(PFA)
detection
P 35 P 37 P 39
5

Coaxial
11 2000 300
14.7 2000 300

Sleeve
Light from top Light from side
Usage notes
HPF-T035 HPF-D014
P 48 Shape C Shape D
Thru scan Side view unit Core dia. φ6(PFA) 2×φ2.2

Side view
2 × φ1.0
Effective dia. φ5(PFA)
Cable Scanning distance (mm) Min. φ2.8 φ4.7(PFA) φ2.2(PFA) φ1.3
Light emitter Size Shape detectable Model No.
Bend radius Length Amp Mode Distance size (mm)

Shape A HPX-AG HP 1,310 4,500 1900


FT

Narrow view
(5)
Top φ4.7 R20 2m HPX-EG nL 1,500
φ0.1 HPF-T029 16
HPX-H
FT 880 4.8(Optical axis) 15.8 2000 300
2000
−30 to +70℃ Free cut 1,500
HPX-A 750

Shape B HPX-AG HP 240


825

reflection
Selective
Flat/
FT
Top φ4.7 R20 2m HPX-EG nL 160
280
φ0.1 HPF-T029E
FT
−30 to +70℃ Free cut
HPX-H 270
HPX-A 130
Shape C HPX-AG HP 1,030

Area
FT 300
Side φ4.7 R20 2m HPX-EG nL 350
210 φ0.1 HPF-T035
FT
−30 to +70℃ Free cut
HPX-H 340
HPX-A 170

Heatproof
Diffuse scan
Cable Scanning distance (mm) Min.
Light emitter Size Shape detectable Model No.

-proof
Chemical
Bend radius Length Amp Mode Distance size (mm)

Shape D PFA area: HPX-AG HP 170


55
FT
Top φ6 R80 HPX-EG nL 70
2m ─ HPF-D014
NOTEWORTHY
Cable area: FT 42
HPX-H

-proof
Vacuum
−30 to +70℃ R20 Free cut
50
HPX-A 50

*For scanning distances of the sensing modes, see the Technical Guide (page 51).
*Scanning distances for diffuse scan are obtained with a standard target object (plain white paper).
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
Installation man-hours greatly reduced Saves space

Use
Specialized
*For chemical resistance of fluorine-resin, see the Technical Guide (page 47).
Simply cut the PFA-jacketed cable to
*The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).
length and insert as is into the amplifier.
Insert as is into

Lens unit
the amplifier.
The insertion
area requires no
PFA working.

accessories
Other
Tube has small outside diameter of
2.2 mm, which can save considerable
Simply cut the space compared with previous
PFA-jacketed This is
the models.
Conventionally After improvement differe
cable. nce!
Bend radius is also greatly improved.
テクニカル
Technical
ガイ ド
Guide

PFA tube must be Fiber cut with a cutter can List of Scanning
アンプ別検出
stripped off before be directly connected to Distance by
距離一覧表
Amplifiers Model
inserting fiber. an amplifier.

29 30

HPF Series
Vacuum-proof
Usable in a vacuum.
Cable length can be specified.

Screw
Product configuration Options for vacuum fiber unit
Heat resistant to 350 ℃ Heat resistant to 200 ℃
Product name Shape Heatproof Other specifications Model No.

Cylindrical
Optical coupler 200℃ ─ HPF-VJ03
(two units)

Cable length: 2 m
70℃ Free cut HPF-VA01
Bend radius: R20

Coaxial
Fiber unit for air
(two units in a pair)
【Related pages】 150℃
Cable length: 2 m
Free cut HPF-VA02-B
Bend radius: R35
Usage notes
Optional units Vacuum fibers Optical couplers Fiber unit for air Amp unit

Sleeve
P 48 Long-distance lens unit 350℃ Scanning distance: ×10 HPF-VL06
(two units)

Side-view unit 350℃ ─ HPF-VL05

Side view
Configuration of vacuum fiber model numbers (two units)

HPF −VT 0 S −S1000 (Typical examples)

Base model No. Model Head shape Coupler side shape Cable length Description

Narrow view
HPF
−VT Thru scan
−VD Diffuse scan Outer dimensions Unit: mm
HPF-VT0_ HPF-VT1_

reflection
Selective
Flat/
0 Straight
HPF-VT0_-S_ _ _ _ HPF-VT1_-S_ _ _ _
1 Elbow (VT type only) Glass fiber
Glass fiber φ2.9 (SUS)
bundle dia.: φ1.2 Head shape (straight) bundle dia.: φ1.2
Head shape (elbow)
S Straight (φ0.05×380) 27
M4 (SUS) (φ0.05×380)
E Elbow 

Area
φ4 φ2.9 (SUS)


Cable length Ordering increment M2.6

R1
0)
−S_ _ _ _ 25mm to 500mm 25mm φ4.6 (SUS)
37.5
−S_ _ _ _ 550mm to 1500mm 50mm 3 20 25
−S_ _ _ _ 1600mm to 5000mm 100mm 30
15 M4(SUS)

Heatproof
3 M2.6
Cable drawing Unit: mm
HPF-VD0_
HPF-VD_ _-S_ _ _ _ HPF-VT_ _-S_ _ _ _ HPF-VD0_-S_ _ _ _ HPF-V_ _S-S_ _ _ _ Coupler side shape

-proof
Chemical
Glass fiber
(straight)
bundle dia.: φ1.7 M6×0.75(SUS) φ2.9 (SUS) φ10
(2×φ0.05×380)

φ4 φ12 (SUS) φ4.1 (SUS)


φ3.5
enlargement

-proof
Vacuum
φ1.2
30

3 20 End fitting: Stainless steel (SUS)


Inside screw: M5, depth of 7 8
Specified cable length Specified cable length 1 8
35 11

Use
Specialized
HPF-V_ _E-S_ _ _ _ Coupler side shape HPF-VJ03
CHART Vacuum side Air side

Lens unit
(Elbow) Mountable plate thickness: SUS
φ4 (SUS) 8∼10mm
2.5
1.4 M5×0.8
◇Scanning distance characteristics enlargement 15 φ3.5 enlargement enlargement
φ10 24.5

accessories
Other
Thru scan Diffuse scan 8 11
8 End fitting: (SUS) (9.23)
Scanning distance Scanning distance φ1.2
Inside screw: M5, 1 φ12 6.8
[mm] Characteristics of cable length versus scanning distance [mm] Plot of cable length versus scanning distance depth of 7enlargement 11.5 2.5
φ4.1(SUS) 8
300 40 22 (8) 7 8
:HPX-AG :HPX-AG 45
:HPX-H 35 :HPX-H
250
30
HPF-VA01 HPF-VL05 HPF-VL06
200
25 HPF-VA_ _ φ3.5 (SUS) (optical axis):
φ8 (SUS) φ2.8
150 20 φ4.1
Core dia.: φ1.0 Fitting: (SUS) φ4 Glass lens
Straight knurl テクニカル
Technical
100
15 HPF-VA02-B Inside screw: M5, depth of 7 φ8 (SUS) M2.6 ガイ ド
Guide
φ3.5 (SUS) M2.6
10 φ2.2
50
5
List of Scanning
アンプ別検出
Core dia.: φ1.5 4 6 Distance by
距離一覧表
Amplifiers Model
0 0
0 1000 2000 3000 4000 5000 0 1000 2000 3000 4000 5000 2 15 10 6.3 11.75
2000 (optical axis)
Fiber length [mm] Fiber length [mm]
9.9
31 *For fiber units for air, HPF-VA01 is used for calculation. 32
*Scanning distances for diffuse-scan were obtained using a standard target object (plain white paper).
*For calculations, nL was used as the sensing type for HPX-AG.

HPF Series
Specialized Use Fiber Units for Small Parts Passage Detection
Reliable detection of small parts moving through the pipe.

Screw
Reliably detects parts in the pipe. Options
Weighs only 12 g.
Mixing fiber unit HPF-EU02A1 Attachment for small-diameter pipes HPF-AU_ _

Cylindrical
For operation inside a moving device, highly
bend-tolerant optical fiber cable are used.

Wire lead-out follows the pipe, allowing a smaller

Coaxial
footprint. Pipe diameter Output
4 mm HPF-AU04
By changing the attachment, the width of the detection
6 mm HPF-AU06
area can be adjusted to match the pipe diameter.

Sleeve
8 mm HPF-AU08

Side view
Product features Thru scan
Attachments suited to different pipe diameters improve Area width Shape
Cable
Model No.
Product
Shape
Cable
Model No.

Narrow view
name
detection stability. Bend radius Length Bend radius Length

(No attachment) (With attachment) 0.5m


Mixed
2m
12mm R4 HPF-T047 fiver R25 HPF-EU02A1
unit

reflection
Selective
Flat/
12 mm wide 6 mm wide −30 to +70℃ −30 to +70℃ Free cut
Reflector
*Area width can be changed with attachments (sold separately).
Target *Use HPF-T047 in combination with HPF-EU02A1.
object *Use HPF-EU02A1 for scanning distances of 50 cm or more.

Area
Pipe

Heatproof
There is an area of unreliable Use of a reflector matching
Outer dimensions Unit: mm

detection at the pipe rim due the pipe diameter achieves HPF-T047 Mirror HPF-EU02A1
Swapping attachments easily gives the optimal (Polycarbonate:
to light refraction. reliable detection even at evaporated aluminum) ABS resin (black)
area width.

-proof
Chemical
the rim.
5
12.4 9
2×φ6 2 × φ5
23 (Nylon resin) Fiber unit attach/detach lever
36 12.4 2 × φ2.6
52 48 (Polyolefin resin) 2×φ2.2 2×φ2.2

-proof
Vacuum
4×φ3.4
2×13 29 23
Recommended compatible amplifier unit 18
24 9 2×500
2×23
1.5 2000
HPX-AG08 (differential setting) model Unaffected by gradual light-level changes or stain buildup,

Use
Specialized
23.5 Core dia.: φ1.5
14
this model provides stable detection. In addition, since the Mounting plate thickness:
〈Exterior view〉 26.6 1.0 - 2.0 mm
light level differentiation signal is transmitted as a second 8.5
output, this model provides advance notice of sensitivity

Lens unit
limitations.
HPF-AU04 HPF-AU06 HPF-AU08
(when used with HPF-T047) (when used with HPF-T047) (when used with HPF-T047)
8.4 Adapter 6.4 4.4 Adapter

accessories
Other
Received light intensity Adapter

Conventional
set value 8.4 6.4 4.4
〈Operation panel〉
HPF-T047 HPF-T047 HPF-T047

Eventually,
Adjustment テクニカル
Technical
always
Conventional remains ON is needed ガイ ド
Guide
output
Model No. Output Differential Appropriate output List of Scanning
アンプ別検出
output Distance by
HPX-AG08-3S NPN for each job 距離一覧表
Amplifiers Model

33 34

HPF Series
Specialized Use Contact-Type Liquid Level Fiber Units
All-resin structure ensures no metal contamination.

Screw
Problems due to liquid accumulation are reduced
Diffuse scan
by Azbil corporation’s innovative front end structure.
Cable

Cylindrical
Product lineup includes a small-diameter model (φ4) Type Shape
Bend radius Length
Model No.

for easier cable routing.


PFA area:
R30 2m
φ4 Cable area: HPF-D033

Coaxial
−30 to +105℃ R15 Free cut

PFA area:
R40 2m
φ6 HPF-D027
Cable area:

Sleeve
−30 to +105℃ R25 Free cut

Side view
Principle of detection Outer dimensions Unit: mm

Tip and internal structure HPF-D033 HPF-D027


Reliable detection is achieved by the proprietary φ1 φ0.9
structure of the fiber tip

Narrow view
1 4.3
(4.5)1 φ4.4 (PFA) φ2×1 (8) 1
φ6.4(PFA) 2×φ2.2
The proprietary structure provided at the tip of the fiber reduces φ4(PFA) φ6 (PFA)
malfunction due to liquid clinging. The lens built into the tip of the
fiber ensures a large difference in light quantity between the
15

reflection
Selective
Flat/
20
conditions when liquid is present and absent. The molded prism fiber tip (40)(Bending not allowed) (60) (Bending not allowed)
readily sheds water drops. 2000 500 2000 200
No liquid Liquid present Other companies’
(light received) (no light received) models

Area
Fiber optic
cable

Lens

Heatproof
Molded prism tip

-proof
Chemical
The principle uses the difference in the reflective index due
to the presence of liquid.

-proof
Vacuum
Recommended compatible amplifier unit
HPX-EG Series Auto sensitivity switch function

Use
Specialized
〈Exterior view〉
This function automatically optimizes the sensitivity
setting during auto tuning, affording easy operation Usage Notes (type-specific)
while delivering the highest detection performance.
■ Contact-type liquid level detection

Lens unit
High When installing the unit, use commercially available Be careful not to bump the fiber unit tip (especially the conical
sensitivity fluorine-resin joint that matches the outside diameter of the part). Operation may be unstable due to scratches on or
SF4 PFA tube. deformation of the sensing head.

accessories
Other
Too much light If chattering occurs due to liquid dripping or bubbles, use a timer.
SF3 for detection
〈Operation panel〉
Direct
setting SF2 Joints
Detection area of HPF-D027
1

SF1
Operation may be unstable with the following conditions: Detection takes place 3.7mm
〈Typical models〉 ① Air bubbles adhering to the conical part of the sensing head within this range. テクニカル
Technical
(8)
ガイ ド
Guide
Model No. Output ② Chemical precipitate on the conical part of the sensing head 4.3

HPX-EG00-1S NPN High ③ Liquids of high viscosity List of Scanning


precision アンプ別検出
HPX-EG00-2S PNP Distance by
Liquid level detection positions vary depending on the 距離一覧表
Amplifiers Model
Some liquid properties, such as milky white color, may make the liquid surface tension of the liquid and the wet condition of the
undetectable. fiber unit’s detection area.

35 36

HPF Series
Specialized Use Pipe-Mounted Liquid Level Fiber Units
A 16-axis array of light beams greatly eliminates interference
from water droplets and air bubbles.

Screw
・Product lineup includes differing detection methods for Recommended compatible amplifier unit
fail-safe detection.
HPX-AG02(alarm output)model Alarm output model(HPX-AG02)
・Can be used for pipe diameters of 3 to19 mm.

Cylindrical
〈Exterior view〉 This sensor warns if the scanning conditions are unsuitable by means of
Model No. 
a second output (light-level drop alarm output).
HPF-T034,T034E

Sample use: surface detection of liquids such as slurry

Coaxial
An alarm signal indicating a drop in the light level is output if the
inside wall of the pipe becomes dirty, averting potential problems.

Sleeve
Model No. 
HPF-T032,T032E

〈Operation panel〉

Side view
Principle of detection
稼動初期 After time passes
Operating principle of HPF-T034 and T034E Operating principle of HPF-T032 and T032E 〈Typical models〉

Narrow view
Liquid present Liquid absent Liquid present Liquid absent Model No. Output
(Colorless liquid) HPX-AG02-1S NPN
Light HPX-EG02- 2S PNP
received Light Light
Light received emitted

reflection
Selective
Flat/
Light
emitted received
Light Light Light (When pipe
received emitted emitted contains air
Thru scan (Attached to pipe)
bubbles or
(Whitish liquid) Compatible Cable
is clouded.) Type Shape Model No.

Area
pipe dia. Bend radius Length Coating material
Light
received
Light
5m
PFA HPF-T034
emitted Light Light Liquid-absent φ8∼φ19mm Free cut
received emitted received light (3/4B) R4 HPF-T034E
Polyethylene
2m

Heatproof
Light reception is blocked when liquid is present, which prevents Clouding and bubbles reduce the level of received light, but thanks to −30 to +70℃ Free cut HPF-T034E-L02
false detection due to a change in the liquid’s color. the operating principle (light = liquid present) they do not increase the
risk of false delection. 5m
PFA HPF-T032
Liquid-present Free cut
φ3∼φ13mm R4 HPF-T032E
received light Polyethylene
2m

-proof
Chemical
−30 to +70℃ Free cut HPF-T032E-L02

Product features Use with PFA transparent pipe with wall thickness of 1 mm.
Depending on the pipe actually used, as well as the liquid thru scan and refractive ratios, fiber unit detection may not be reliable,
so be sure to test the operation before use.

-proof
Vacuum
Array of 16 optical axes eliminates the PFA-jacketed optical fiber If the fiber unit is used with other than the recommended pipe, material, or wall thickness, please test before use or consult our sales staff.
effects of air bubbles and water droplets
Adverse effects from air bubbles and water Fiber-optic cables protected by
Outer dimensions Unit: mm
HPF-T034 HPF-T032

Use
Specialized
droplets are reduced, resulting in reliable chemical-resistant resin can be run HPF-T034E HPF-T032E
detection. through machines and equipment HPF-T034E-L02 12 HPF-T032E-L02
12
safely (HPF-T032 and HPF-T034 *2 *2
only).

Lens unit
36 20 32 13.1

21 28 *1 23.4 28 *1
Fail-safe concept

accessories
Other
Model No. Cable length*1 Cable dia.*2 Model No. Cable length*1 Cable dia.*2
Upper limit detection Lower limit detection HPF-T034 5000 mm min. 2×φ2.3 HPF-T032 5000 mm min. 2×φ2.3
HPF-T034E 5000 mm min. 2×φ2.2 HPF-T032E 5000 mm min. 2×φ2.2
Required optical system Required optical system
Abnormality Abnormality HPF-T034E-L02 2000 mm min. 2×φ2.2 HPF-T032E-L02 2000 mm min. 2×φ2.2
Models that receive Models that receive
or light when there is
no liquid
or light when liquid is
present Usage Notes (type-specific)
Liquid is present, Broken fiber, Liquid is absent, Broken fiber,
so no light no light received
HPF-T034 so no light no light received
HPF-T032 テクニカル
Technical
is received. HPF-T034E is received. HPF-T032E ■ Pipe-mounted liquid level detection ガイ ド
Guide
A
Attach the unit using the supplied cable ties and non-slip tubes as List of Scanning
アンプ別検出
shown here. Securely fasten both the upper and lower cable ties Distance by
距離一覧表
Amplifiers Model
and cut off any excess. Where additional cable ties are required,
use ones which are no more than 2.5 mm wide (dimension A in the
figure).
* The supplied cable ties (with non-slip tubing) can also be purchased separately.
37 Model: SZ-A01 (5 sets) 38

HPF Series
Specialized Use Liquid Leakage Fiber Units
PFA jacket affords outstanding ease of routing.

Screw
・Space-saving sensor head height of only 9.9 mm Options
・Can be used in explosion-proof atmospheres Relay fiber unit HPF-EU05

Cylindrical
because the cable is optical fiber.
Optical fiber cable can be extended 5 m
using the optional relay unit. The relay unit
can be mounted in a panel.

Coaxial
Model No.

Sleeve
HPF-EU05

Diffuse scan

Side view
Principle of detection Shape(mm )
Cable
Model No.
Bend radius Length
Normal state: no liquid Leak: liquid present Abnormal state: sensor floating
(light received) (no light received) (no light received)

Narrow view
R20 5m HPF-D040
Light Light −30 to +70℃ Free cut
Light Light Light Light receiver emitter
receiver emitter receiver emitter

reflection
Selective
Flat/
Outer dimensions Unit: mm
HPF-D040
30.9 5000 φ2.3

Area
When there is a leak, no light reaches the receiver. This is the same result as when the fiber cable breaks or is disconnected, 19.1 4 PFA covering
ensuring fail-safe operation. (When using the unit in a pan, remember to secure it with a stud.) 13

13

Heatproof
Recommended compatible amplifier unit 20
Installation base (bushing:SUS)

HPX-AG04(advanced function timer)model ● Output latching function Installation base (main unit)
20 Hole: 3.3
24 4.8
〈Exterior view〉 Using the HPF-D040 and the HPX-AG04 amplifier together,

-proof
Chemical
output can be latched. This function is effective in detection of a 5.5
9.9 6.3
small leak of volatile liquid and in early detection of a leak’s
location.

-proof
Vacuum
When the output is latched, the display seen below blinks.

Use
Specialized
HPX-AG04 Series

〈Operation panel〉

Lens unit
The latch can be released by the operator or
by an external input.
〈Typical models〉

accessories
Other
Model No. Output External input
HPX-AG04-3S NPN
HPX-AG04-4S PNP Usage Notes (type-specific)
Leak detection
status ■ Liquid leakage detection
When using an SUS mounting base, insert the welded M3 M3 nut
Output stud bolt into the base’s mounting hole and fasten it with an
テクニカル
Technical
status M3 nut (not supplied). Then put the ridges of the mounting ガイ ド
Guide
base into the grooves of the fiber unit, and slide the base Groove

※ Output latch remains even forward until it is in place. List of Scanning


OFF when latch is released アンプ別検出
Distance by
if sensor power is turned 距離一覧表
Amplifiers Model
off. ※ The output latch is reset ● Chemical resistance of PFA M3 stud bolt Ridge
when the latch is released. (straight type)
See the Technical Guide(Page 47).
To use output latching again,
39 set the latch again. 40

HPF Series
Specialized Use Wafer-mapping fiber
Detects 300 mm wafers stored in a FOUP or open cassette without fail.

Screw
Narrow beam of light has an aperture angle of
±1.5° or less
Light level when no Sensitivity setting (% tuning) without a wafer
Simply press
(workpiece) when using an HPX-AG Series amplifier

Cylindrical
Beam axis is factory-aligned Setting wafer is detected a button

Light intensity
when there is When the received light intensity is 3000 (with no wafer), set
by anyone, no wafer
any time ※ the sensitivity by pressing the AUTO button and the + or –
button several times. To set a value that is X % of the light level
of 3000, you simply need to enter the value of X. If you enter 50

Coaxial
(%), for example, a value of 1500 will be set.
For example,
% tuning is Before entering a percentage, be sure to check
set to 50 % changes in the received light level both when wafers
The value is are present and when absent. Once a percentage is

Sleeve
set to 1500. determined, the same value can be used as the
Wafer is setting in the future in a similar environment.
detected

Side view
Product features Caution Wafer
In a mapping application,
Light beam aperture angle is ±1.5° or less reflection from the
wafer surface will result
Significant reduction 10 mm

Narrow view
With an aperture angle of ±1.5° or less, the effects of in time required for in fluctuation in
How to install the HPF-T030 300 mm received light intensity.
diffraction are insignificant, allowing reliable detection even adjustment
HPF-T030 For this reason, tuning
when mapping 300 mm wafers stored at a 10 mm pitch. the amplifier with a
Make sure the emitter and receiver
fiber units are on the same level. percentage value should

reflection
Selective
Flat/
be done without a wafer.
Factory alignment of light beam
Working with a narrow beam of light can involve difficult
adjustment of the light axis, requiring significant manpower

Area
Shipped after adjusting
and man-hours. Therefore, the light axis of the HPF-T030 is the light axis to within ±0.8°
factory aligned to within ±0.8°, greatly reducing adjustment Thru scan
time. Directional Cable Scanning distance (mm) Effective Min.

Heatproof
Light angle lens detectable
emitter Shape Model No.
(half angle) Bend radius Length Amp Mode Distance diameter size (mm)
Parallel displacement Actual wafer mapping waveform
When used with the HPX-AG HPX-AG HP 305
500
Double layer Diagonal installation FT
(set to HP mode sensing type) Scanning distance(mm) Side 1.5° R5 2m HPX-EG nL 310
φ1.5 φ0.005 HPF-T030
FT 180

-proof
Chemical
30
HPX-H
Parallel displacement(mm)

180 350
−30 to +70℃ Free cut
20 160 HPX-A 175
Light intensity (%)

140
*For scanning distances of the sensing modes, see the Technical Guide (page 51).
10 120
*Response times for the sensing types: HP 5 ms, nL 1 ms, and FT 250 µs.
100

-proof
Vacuum
0 *The values shown in the Minimum detectable size column were obtained with optimal scanning distance and sensitivity settings (HPX-AG).
80
-10 60
40
-20
-30
20
Outer dimensions Unit: mm

Use
Specialized
5 10 15 20
500 1000 Parallel Displacement (mm)
3±0.5 Stainless HPF-T030
displacement(mm)
Scanning distance(mm) ※Light intensity is 100 % when there is no wafer. (optical axis center) steel tube Stainless steel

φ2

Lens unit
Recommended compatible amplifier unit φ1.5 M1.6
1 (Effective dia)
〈Typical models〉
HPX-AG00 model Model No. Output 10.5
0

accessories
Other
4.3 -0.2 φ1
〈Exterior view〉 HPX-AG00-1S NPN 1.5

HPX-AG00-2S PNP 1.4 9 15 2,000 min.


2.8
With 4-element LED and APC, light emission is twice as stable
Four-element LEDs shine brightly for longer than
conventional ones, and LED brightness is monitored by Auto
Power Control (APC), which regulates the current to maintain
light emission at a constant level.
テクニカル
Technical
ガイ ド
Guide
Note: APC controls the light
Light emission level

〈Operation panel〉 emission level of the LED, but does List of Scanning
not compensate for a drop in the アンプ別検出
Distance by
received light level arising from 距離一覧表
Amplifiers Model
Without APC other factors.

41 Time 42

HPF Series
Lens unit Micro-Spot Lens
Lens unit achieving a micro-spot by combination with the coaxial type.
Lenses can be selected according to the target object size.

Screw
Outer dimensions Unit: mm
HPF-LU01 HPF-LU02
HPF-LU07 Shape A Shape B
φ4.3 φ4.3

Cylindrical
(aluminum) ● When attached to HPF-D010/D032 (aluminum) ● When attached to HPF-D010/D032
(31.6) (25.1)
Straight knurl φ5 (18) Straight knurl φ5 (18)
Glass lens
【Related pages】 Glass lens
M3 M3
(17) (10.5)
Compatible fiber units

Coaxial
Micro-spot Variable spot ● When attached to HPF-D035 ● When attached to HPF-D035
P 15 (Coaxial) (36.6) 4.4 (30.1)
17 4.4
(18) (5) (18) (5)
10.5
For diffuse scan type (17) (10.5)

Sleeve
Combined fiber
Type Shape Minimum spot dia. Focus distance Model No. HPF-LU08 HPF-LU09
Model No. Spot dia. Shape C Shape D
HPF-D034 Approx. 0.1mm M2 slot screw
Shape A
Identification mark
4.6 ㎜ ± 0.2 ㎜ HPF-D010 Approx. 0.2mm φ9.5 ● When attached to HPF-D038
Approx. 0.1 mm HPF-LU07

Side view
−30 to +70℃ Spot dia. HPF-D032 Approx. 0.2mm (aluminum)
image HPF-D035 Approx. 0.2mm Glass lens M4 (41.8)
HPF-D034 Approx. 0.2mm φ3
Shape A HPF-D010 Approx. 0.4mm (16)
Approx. 0.2 mm 7.0 ㎜ ± 0.5 ㎜
HPF-D032 Approx. 0.4mm HPF-LU01
−30 to +70℃ Spot dia.
Micro-spot image HPF-D035 Approx. 0.4mm
30.8

Narrow view
(30.8) Hole:2×φ3.2
HPF-D034 Approx. 1.0mm
Shape B
Approx. 1.0 mm 19 ㎜ ± 1.0 ㎜ HPF-D010 Approx. 2.0mm
HPF-LU02 11.5
Spot dia. HPF-D032 Approx. 2.0mm 5.7
−30 to +70℃
image HPF-D035 Approx. 2.0mm 2.2

Shape C 5.5 5.6

reflection
Selective
Flat/
Approx. 1.0 mm 33 ㎜ ± 2.0 ㎜ HPF-D038 Approx. 1.0mm HPF-LU08 2.5
−30 to +70℃ Spot dia.
image

Shape D
Fiber insertion depth: 6 ㎜
Variable 7.0 ± 1.0 ㎜
spot
Approx. 0.4 mm
Fiber insertion depth: 9.5 ㎜ HPF-D035C φ0.4 to 3.5mm HPF-LU09
−30 to +70℃ Spot dia.

Area
image 10 ± 1.0 ㎜ 12 (optical axis center)
15

CHART

Heatproof
◇Characteristics of distance versus spot dia. (typical example)

-proof
Chemical
HPF-LU01 HPF-LU02
Spot dia. Characteristics of distance versus spot dia. Spot dia. Characteristics of distance versus spot dia.
[mm] [mm]
2.0 2.5

-proof
Vacuum
1.5

1.0 2.0 HPF-LU09


Set distance
[mm]

Use
Specialized
0.5 35
φ3.5
30
0 1.5 Maximum scanning distance φ3.4
5 5.5 6 6.5 7 7.5 8 8.5 9 9.5 10 11 12 13 14 15 16 17 18 19 20 21 22 23 25
φ3.3

NOTEWORTHY
Distance [mm] Distance [mm] 20
φ2.3

Lens unit
φ1.3
15
HPF-LU07 HPF-LU08 φ0.6 φ0.7
10
Spot dia. Characteristics of distance versus spot dia. Spot dia. Characteristics of distance versus spot dia.
[mm] [mm] 5
φ0.4 Minimum spot Improving detection performance yields Problems due to scratches on the lens are
2.5
1.0
many positive results greatly reduced.

accessories
Other
0
0.9 0 6 7 8 9 10
0.8
0.7
2.0 Amount of fiber unit insertion [mm] Because of irregular reflection inside a lens, some light is The micro-spot lens is
0.6 returned even when no workpiece is present, but it is a small made of hard glass, so
0.5 1.5 The chart shows the following characteristics in amount compared with the light reflected when there is a problems caused by a
0.4 relation to the amount of fiber unit insertion: workpiece. drop in light level due to
0.3 1.0 ● The set distance and spot dia. achieving In HPF-LU sensors, the internal wall of the lens has a special
0.2 lens scratches made by
  the minimum spot feature that keeps this internal reflection to a minimum, so there
0.1 collisions with
0 0.5 ● The spot dia. at the maximum scanning is an increased amount of difference in light level when a
3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 22 24 26 28 30 32 34 36 38 40 42
  distance workpiece is actually present. workpieces can be
Distance [mm] Distance [mm]
greatly reduced.
テクニカル
Technical
*Values are for the lens combined with an HPF-D035 fiber unit. ガイ ド
Guide
*Measured values are calculated at 13.5 % of the peak light level. Light actually used
(Only HPF-LU07 is calculated at 50 %.) for detection List of Scanning
アンプ別検出
Distance by
距離一覧表
Amplifiers Model

43 44

HPF Series
Lens unit Long-Distance Lens / Side View Unit Other accessories
Longer distances and alternate optical configurations
are available by combination with thru-scan sensors. Use in combination with various fiber units.

Screw
【Related pages】
Product name Shape Description Other specifications Model No.
For combined fibers:

Cylindrical
P9 (screw) Shape
ShapeAA Use with a thru-scan fiber
unit to limit reflection, or use Used for M4 and M3 heads,
P 13 (cylindrical)
Angle adjustment bracket HPX-PA06
as side view type brackets. φ4 and φ3

P 27 (heatproof)

Coaxial
(Long-distance lens) (Side view)
Use to extend fibers by Cable length: 5 m.
P 31 (vacuum proof)
Shape B Free cut HPF-EU05
linking them. Bend: 4 mm in radius
Fiber-optic extender
For use with thru scan For scanning range see Cable length: 10 m.
Free cut HPF-EU10
p. 48. Bend: 4 mm in radius

Sleeve
Directional Fiber unit Scanning distance (mm)
Type Shape Scaling angle Model No. Shape C For M3 head FE-PA-FB1
(half angle) Model No. Element type HPX-AG HPX-EG HPX-H HPX-A
Suitable for attaching
HPF-T003 Standard 7,200 2,040 2,400 1,200
Fiber head bracket
a fiber head.
For M4 head FE-PA-FB2
Shape A (Two units)
FE-PA-L1

Side view
×6 3° HPF-T018 Heatproof 3,690 690 900 600 For M6 head FE-PA-FB4
Long- −40 to +200℃
HPF-T024 Unbreakable 840 240 300 150
distance
lens Shape B HPF-T003 Standard 12,000 3,400 4,000 2,000 Use in combination with For fibers with dia. of φ1.0 HPF-AT10
(Two units) small-dia. fiber units.
×10 3° HPF-T018 Heatproof 6,150 1,150 1,500 1,000 HPF-VL06 Small-diameter attachment
−40 to +350℃
HPF-T024 Unbreakable 1,400 410 500 250 (Two units) *Supplied with
HPF-AT13

Narrow view
applicable fibers. For fibers with dia. of φ1.3
HPF-T003 Standard 1,200 340 400 200
Shape C (Two units)
─ 10° HPF-T018 Heatproof 615 115 150 100 FE-PA-S1 Use to cut fibers.
−40 to +200℃ Unbreakable
HPF-T024 140 41 50 25 *Supplied with
Side view Fiber cutter Used for freehand cuttable fibers FE-PA-F1
HPF-T003 Standard 1,200 340 400 200 applicable fibers.
Shape D (Two units)

reflection
Selective
Flat/
─ 8° HPF-T018 Heatproof 615 115 150 100 HPF-VL05
−40 to +350℃ HPF-T024 Unbreakable 140 41 50 25

The scanning distances shown are nominal values. The actual scanning distances are limited by the fiber length
(approx. 2 m × 2 ≒ 4 m in the case of standard type).

Area
For HPX-AG, the scanning distance shown is for HP mode (response time: 5 ms).
For HPX-EG, the scanning distance shown is for nL mode (response time: 1 ms). Outer dimensions Unit: mm
The directional angles shown are typical examples obtained when the lens is combined with an HPF-T003.
HPX-PA06 HPF-EU05
Slot screw: 2×M3 Shape A HPF-EU10 Shape B
Outer dimensions

Heatproof
M3 screw
Unit: mm Hole: 2×φ4.1 9
FE-PA-L1 HPF-VL06 9
φ4
Shape A Shape B Hole: 2×φ3.2 Fiber unit attach/detach lever
(Brass (Ni plated)) 25 16 6.4
Y
φ8(SUS) 2×φ2.2
Glass lens M2.6

-proof
Chemical
Glass lens
Straight knurl 29 23
M2.6
6.4
9.7 8 4.5 1.5 *1
6 20.7 10 23.5 Core dia.:16×φ0.25
Thickness of attachable plate:

-proof
Vacuum
5.5 26.6 1.0 to 2.0 mm
11.75 FE-PA-FB1
8.7 Shape C Model No. Cable length*1
Hole A dia.: φ3.5
4×C1.5 HPF-EU05 5,000 mm min.
FE-PA-FB2 Hole: 2×φ4.5
Hole A

Use
Specialized
Hole A dia.: φ4.5 HPF-EU10 10,000 mm min.
FE-PA-S1 HPF-VL05
φ4 Shape C φ3.5(SUS) Shape D FE-PA-FB4
(Brass (Ni plated))
φ2.8 Hole A dia.: φ6.5
Straight knurl (optical axis) 14 25
Straight knurl M2.6

Lens unit
φ2.8 (optical axis) M2.6
8 10

4 13 16
6 6.3

accessories
Other
(optical axis center) (optical axis center)
9.8 9.9

テクニカル
Technical
ガイ ド
Guide

List of Scanning
アンプ別検出
Distance by
距離一覧表
Amplifiers Model

45 46

HPF Series
Technical Guide

Detection Method Optical Fiber Types and Characteristics ■ Cutting of fibers ■ Use under explosion-proof atmospheres
To cut a fiber, use the dedicated cutter (supplied with the fiber unit). Generally, the fiber unit is structured only to transmit light and
Optical fiber sensor A fiber is composed of a central Stationary bend type Standard type Bend-tolerant type Note that cold-proof and heatproof fibers cannot be cut. so cannot cause electrical explosions or ignite fires. Therefore,

Screw
core and circumferential cladding (multi-core) (single core) (bundle) the fiber and amplifier units can be used with the fiber unit
where the refraction index is low.
1 Insert the fiber into the cutter hole and set the fiber to the placed in a dangerous place, and the amplifier unit in a

Cross-section
Light travels inside the core, with specified length. non-dangerous place. Nevertheless, check the explosion-proof
repeated total reflection along the regulations required for the equipment used before using the
Fiber part Amplifier part Press the blade straight down in a strong smooth motion.

Cylindrical
2
boundaries between the core and sensor.
the cladding. Non-dangerous
3 Cut one fiber cable at a time and do not reuse the blade on Dangerous environment
Light emerging from the fiber is environment
another optical fiber.
emitted and spreads out at an

Structure
angle of approximately 60°. When the detecting surface of the

Coaxial
Fiber unit Amplifier unit
Refraction index
Cladding Core
Fiber covering resin
Cladding
fiber unit gets dirty, gently wipe it
Approx. Core with a soft clean cloth. Do not use
(The inner elements (The internal elements
60° LED
are grouped into one.) are not attached to organic solvents such as benzine Fiber
Fiber conductor Fiber conductor
each other.) or thinner.

Sleeve
Light emitted ・Bending causes a ・Good light ・Good bend tolerance
small variation in the transmission efficiency Bend repetition of The scanning distance may be reduced approximately 20%

Features
Light

60° Light
light level. (relatively long one million times or depending on how the fiber is inserted into the amplifier unit
Detection target
Light received ・Allowable bend scanning distance) ・more (typical) and how the fiber is cut.
radius: 1 or 2 mm ・Allowable bend Allowable bend

Side view
The optical fiber does not have radius: 10 or 20 mm radius: 4 mm
For specifications, usage notes Caution
any electrical properties and so Comparison with the Used frequently for Resistant to break and other information for the fiber

Useful applications
is excellent in an environment previous standard type: general purposes. even when used in unit, see the product Never disassemble the cutter.
where reduced electrical noise ・Soft and capable of Low price. a moving environment
cabling like electric wires specifications. The blade may cause injury.
is required.

Narrow view
・No worries about bend
Different fiber variations allow radius
for various applications. ・Touching the fiber does
not affect the light level. Use Cautions (type specific)

reflection
Selective
Flat/
number
Typical model

Thru scan: HPF-T025 Thru scan: HPF-T003 Thru scan: HPF-T008 ■ Vacuum fiber ■ Chemical proof
Diffuse scan: HPF-D030 Diffuse scan: HPF-D002 Diffuse scan: HPF-D037
Vacuum fiber HPF-V series When installing the unit, use commercially-available
The flange, fibers for vacuum and the lens unit are cleaned fluorine-resin joint that matches the outside diameter of the

Area
with IPA, but baking treatment etc. should be carried out PFA tube.
before use.
Usage Notes (general) Cautions for attaching the optical coupler The bend radius of the protective tube must be greater than
The optical coupler uses an O-ring as shown below. Do not the bend radius specified for each fiber unit. If the bend
weld it to the vacuum chamber wall, as this may cloud the radius is below the specified Fluorine-resin joint

Heatproof
■ How to attach the amplifier unit ■ Attaching the fiber unit to an amplifier inside glass rod. value, the fiber unit may break.
Attach the amplifier unit to the dedicated bracket 1 Open the cover. Vacuum
chamber wall Do apply excessive tension
(HPX-PA04, supplied or sold separately) or to the DIN rail. Vacuum side For air to the fiber-optic cable.
2
Tilt the fiber clamp lever forwards to the release position.
Insert one rail of the bracket or DIN

-proof
Chemical
1 O-ring

rail into the slot at point A. 3


Firmly insert the fiber tips into the Fiber unit Fiber unit
④ for vacuum for air
holes in the amplifier as far as they
2 Push the unit downwards until the will go. For the insertion depth of

second rail clicks into place at point the fiber, refer to the mark on the

-proof
Vacuum
B. When attaching the amplifier to a B side of the unit.
Flat washer
Optical coupler
Spring washer
DIN rail, be sure to secure both A M5 nut

ends with the end plate (HPX-PA03, 4 Close the cover.
sold separately). Attachable plate thickness: 8 to 10 mm
! Caution ③ Reference mark for fiber +0.2
Recommended mounting hole: 5 dia.  −0.1 mm

Use
Specialized
insertion depth Recommended surface roughness for O-ring’s
■ How to remove the amplifier unit ① if the fiber is thin, first insert it into the thin fiber adapter so that the contact area: 1.6 Ry

Push the amplifier forward firmly fiber projects approximately 0.5 to 1 mm from the top of the adapter.
(①) so that the front lock releases. Then insert the adapter into the hole in the amplifier as far as it will
go, and then fix it firmly.

Lens unit
Lift the unit as shown in the figure
(②) to remove the unit. ②
Because a cable break tends to
easily occur around the fiber unit’s 40 mm or more

■ Expansion unit attachment to the main unit sensing head and junction with the

accessories
Other
  for reduced-wiring models (HPX-AG/EG series) amplifier unit, do not bend the
cable within 40 mm (10 mm for a

1 Remove the stickers affixed to the thin fiber unit). In other cabling Fiber unit

connectors of the units to be attached. areas, use the fiber cable at the Amplifier unit
allowed bending radius or more
2 Mount the expansion units side by side specified for each product. If the 40 mm or more

on the DIN rail. cable is bent beyond the allowed bend radius, the rated
scanning distance may be unavailable or a cable break may
3 Slide the expansion units together so occur.
that the connectors connect. When attaching a coaxial diffuse テクニカル
Technical
4 Use end plates (HPX-PA03, sold Single core
Emitter
scan fiber unit to a main unit, ガイ ド
Guide
separately) to hold the expansion units
side attach the single-core fiber cable
in place. To remove expansion units, Receiver to the insertion hole’s emitter List of Scanning
Multi-core side
side, and attach the multi-core Distance by
slide off one by one. Amplifiers Model
fiber cable to the receiver side.
Scanning distances and display readouts may differ depending
on variations in individual unit characteristics, installation states
47 and fiber unit types. 48

HPF Series
Technical Guide

PFA Chemical Proof Characteristics of Scanning Distance by Combination with Fiber Extender (typical values)

Substance PFA chemical proof Substance PFA chemical proof

Screw
Heavy oils A/B/C OK Light oil OK
Aniline C6H5NH2 OK Paraffinum liquidum OK
Acrylonitrile C2H3CN OK Sodium dichromate Na2Cr2O7 OK

Cylindrical
Asphalt OK Barium nitrate Ba(NO3)2 OK
Acetone (CH3)2CO OK Silicone oil OK
Methanol CH3OH OK Plant oil OK
Ammonia NH3 OK Thinner OK

Coaxial
Isooctane i-C8H18 OK Barium hydroxide Ba(OH)2 OK
Isobutyl alcohol i-C4H9OH OK Phenol C6H5OH OK Thru scan
Isobutyl methyl ketone C4H9COCH3 OK Turbine oil OK
Scanning distance and cable length when combined with fiber extender:

Sleeve
Ethanol C2H5OH OK Sodium carbonate Na2CO3 OK HPX-AG (HP mode: 5 ms in response time)*1
Type Model No.
Ether (CH3)2O OK Turpentine OK No extender HPF-EU05(5m) (10m)
HPF-EU10
Ethylene glycol C2H4(OH)2 OK Natural volatile oil OK
Standard fiber
Enamel paint OK Kerosine petroleum OK 1200mm 580mm 440mm

Side view
Ammonium chloride NH4Cl OK Trichloroethane C2H3Cl3 OK HPF-T003
Cable length: 2m Cable length: 7m Cable length: 12m
Calcium chloride CaCl2 OK Trichlorethylene C2HCl3 OK Related pages P9 100% 49% 37%
Sodium chloride NaCl OK Toluene C6H5CH3 OK
Heatproof 615mm 250mm 195mm

Narrow view
Barium chloride BaCl2 OK Naphtha C7H16 OK
Chlorine Cl2 OK Acidum lacticum OK HPF-T018
Cable length: 1m Cable length: 6m Cable length: 11m
Gasoline OK Nitrobenzene C6H5NO2 OK Related pages P 27 100% 42% 32%
Glass ingredients OK Hydrofluoric acid (hydrogen fluoride) HF *
Area

reflection
Selective
Flat/
Dilute hydrochloric acid HCl OK Ferrosilicon OK 3600mm 1510mm 1150mm
Dilute sodium hydroxide NaOH OK Freon 11 FCCl3 OK HPF-T021T
Cable length: 2m Cable length: 7m Cable length: 12m
Dilute acetic acid CH3CO0H OK Propyl alcohol C3H5(OH)3 OK Related pages P 25 100% 42% 32%
Dilute nitric acid HNO3 OK Propylene glycol C3H2(OH)2 OK

Area
Unbreakable fiber 140mm 37mm 28mm
Dilute sulfuric acid H2SO4 OK Benzene C 6H6 OK
Citric acid C3H(OH)
(COOH)3 OK Methyl violet OK HPF-T024
4
Cable length: 2m Cable length: 7m Cable length: 12m
Glycerin C3H(OH)
5 3 OK Water H 2O OK Related pages P9 100% 27% 20%

Heatproof
Cresol C6H(OH)
4 (CH3) OK Carbon tetrachloride CCl4 OK
Pipe-mounted
Chloroform CH3Cl OK Ammonium sulfate (NH4)2SO4 OK liquid level HPF-T032、T032E Available*2 Available*2 Unavailable
*For information on hydrofluoric acid, contact our sales staff.
HPF-T034、T034E
Related pages P 37 Cable length: 5m Cable length: 10m Cable length: 15m

-proof
Chemical
Additional Notes
・The above table is not a guarantee that the product can be used with the indicated substance.
・Substances such as strong acids and ammonia may penetrate PFA (fluororesin).
Diffuse scan
Fiber Length vs. Scanning Distance Characteristics

-proof
Vacuum
Scanning distance and cable length when combined with fiber extender:
Type Model No. HPX-AG (HP mode: 5 ms in response time)*1
Note that extending fiber length reduces scanning distance.
No extender (5m)
HPF-EU05 (10m)
HPF-EU10
◇ Standard fiber element

Use
Specialized
Standard fiber 400mm 170mm 125mm
Element type Distance change ratio for each element length HPF-D002
Cable length: 2m Cable length: 7m Cable length: 12m
Core dia. Bend radius 2m 5m 10 m 15 m 20 m 25 m 30 m
Related pages P 11 100% 43% 32%
0.25 R4 100% 62% 28% 12% Unavailable Unavailable Unavailable

Lens unit
R1 100% 66% 33% 17% Unavailable Unavailable Unavailable Heatproof 170mm 47mm 35mm
0.5
R15 100% 85% 64% 49% 37% 28% 21% HPF-D023
Cable length: 1m Cable length: 6m Cable length: 11m
0.75 R15 100% 85% 64% 49% 37% 28% 21%
Related pages P 27 100% 28% 21%

accessories
Other
R2 100% 76% 48% 30% 19% 12% Unavailable
1 R5 100% 50% 16% Unavailable Unavailable Unavailable Unavailable Unbreakable fiber 25mm 8mm 6mm
R20 100% 85% 64% 49% 37% 28% 21% HPF-D029
Cable length: 2m Cable length: 7m Cable length: 12m
Related pages P 11 100% 33% 25%
◇ Heatproof fiber element
Liquid leakage
Element type Distance change ratio for each element length Available*2 Available*2 Unavailable
Heatproof 1m 2m 5m 10 m 15 m 20 m 25 m 30 m
HPF-D040
105℃ − 100% 57% 22% Unavailable Unavailable Unavailable Unavailable Related pages P 39 Cable length: 5m Cable length: 10m Cable length: 15m テクニカル
Technical
150℃ − 100% 50% 16% Unavailable Unavailable Unavailable Unavailable ガイ ド
Guide
Contact liquid level
200℃ 100% 93% 76% 54% 38% 27% 19% 13% Available*2 Available*2 Unavailable List of Scanning
350℃ − 100% 81% 58% 41% 29% 20% 14% HPF-D027 Distance by
Amplifiers Model
Related pages P 35 Cable length: 5m Cable length: 10m Cable length: 15m
*1 For combinations other than with HPX-AG, please contact us.
*2 Even where availability is indicated, detection may not be possible depending on the liquid. Please check operation before use.
49 50

HPF Series
Technical Guide

List of scanning Distance by Amplifiers Model

Thru scan Diffuse scan

Screw
Cylindrical
Scanning distance(mm) Scanning distance(mm)
Model No. HPX-AG HPX-EG HPX-H HPX-A Page Model No. HPX-AG HPX-EG HPX-H HPX-A Page
HP nL SF FT HS SH nL SF FT ─ ─ HP nL SF FT HS SH nL SF FT ─ ─
HPF-T001 2,175 1,450 1,160 630 360 500 770 650 450 800 400 P9 HPF-D001 530 400 320 170 85 130 210 180 120 230 120 P11

Coaxial
HPF-T002 2,175 1,450 1,160 630 360 500 770 650 450 800 400 P13 HPF-D002 400 300 240 130 65 100 150 130 90 150 80 P11
HPF-T003 1,200 800 640 350 200 280 410 350 240 400 200 P9 HPF-D003 400 300 240 130 65 100 150 130 90 150 80 P17
HPF-T004 1,200 800 640 350 200 280 410 350 240 400 200 P13 HPF-D004 105 80 64 34 17 26 43 36 25 40 20 P11

Sleeve
HPF-T005 1,200 800 640 350 200 280 410 350 240 400 200 P17 HPF-D005 105 80 64 34 17 26 43 36 25 40 20 P13
HPF-T006 1,200 800 640 350 200 280 410 350 240 400 200 P17 HPF-D006 105 80 64 34 17 26 43 36 25 40 20 P17
HPF-T007 165 110 88 48 27 38 55 48 33 60 30 P19 HPF-D009 400 300 240 130 65 100 150 130 90 150 80 P15
HPF-T008 180 120 96 52 30 42 60 50 38 100 40 P9 HPF-D010 86 65 52 28 14 21 35 30 21 40 20 P15

Side view
HPF-T009 180 120 96 52 30 42 60 50 38 100 40 P13 HPF-D011 40 30 24 13 6 10 17 14 10 15 8 P19
HPF-T010 855 570 455 245 140 195 300 250 170 300 150 P9 HPF-D012 250 190 150 80 40 60 100 80 55 100 50 P11
HPF-T012 690 460 365 200 115 160 240 200 140 250 120 P27 HPF-D013 190 190 160 85 43 65 100 80 55 100 50 P27

Narrow view
HPF-T014 660 440 350 190 110 150 220 190 130 250 120 P27 HPF-D014 170 130 100 55 28 43 70 60 42 50 50 P29
HPF-T015 37 25 20 10 6 8 12 10 7 12 6 P17 HPF-D015 160 160 140 75 39 60 85 70 50 90 30 P27
HPF-T017 1,200 800 640 350 200 280 410 350 240 400 200 P27 HPF-D018 200 150 120 65 32 50 75 65 46 80 40 P11
HPF-T018 615 410 325 175 100 140 140 120 80 200 100 P27 HPF-D019 20 16 12 6 2 4 4 3 2 4 2 P17

reflection
Selective
Flat/
HPF-T019 4,140 2,760 2,200 1,200 690 965 1,400 1,200 840 1,500 750 P21 HPF-D021 86 65 52 28 14 21 35 30 21 40 20 P17
HPF-T020 4,500 3,000 2,400 1,310 750 1,050 1,500 1,300 920 1,600 800 P21 HPF-D022 400 300 240 130 65 100 150 130 90 150 80 P27
HPF-T021 780 520 415 225 130 180 270 220 160 250 125 P25 HPF-D023 170 130 100 55 28 43 70 60 42 50 50 P27
HPF-T021S 3,450 2300 1,840 1,000 575 800 1,100 960 670 1,100 550 P25 HPF-D025 20 20 20 20 20 20 20 20 16 20 20 P21

Area
HPF-T021T 3,600 2400 1,920 1,050 600 840 1,200 1,000 710 1,200 600 P25 HPF-D026 265 200 160 85 43 65 100 90 60 100 50 P25
HPF-T021WT 3,600 3600 3,200 1,750 1,000 1,400 2,000 1,600 1,100 2,000 1,000 P25 HPF-D027 − − − − − − − − − − − P35
HPF-T023 3,600 2,400 1,920 1,050 600 840 1,200 1,000 730 1,200 600 P21 HPF-D028 2.5±0.5 2.5±0.5 2.5±0.5 2.5±0.5 − − − − − 2.5±0.5 2.5±0.5 P24

Heatproof
HPF-T024 140 95 75 40 23 33 50 42 29 50 25 P9 HPF-D028F 5.2±1.6 5.2±1.6 5.2±1.6 − − − 5.2±1.0 − − − − P24
HPF-T025 900 600 480 260 150 210 310 260 180 300 150 P9 HPF-D028T 7.4±1.6 7.4±1.6 7.4±1.6 − − − 7.4±1.2 − − − − P24
HPF-T025B 900 600 480 260 150 210 310 260 180 300 150 P9 HPF-D029 25 19 15 8 4 6 10 8 5 10 5 P11
HPF-T026 52 35 28 15 8 12 20 16 11 20 10 P19 HPF-D030 210 160 125 69 34 53 85 70 50 80 40 P11

-proof
Chemical
HPF-T028 140 95 75 40 23 33 50 42 29 50 25 P23 HPF-D032 46 35 28 15 7 11 18 15 10 18 10 P15
HPF-T028LF 210 140 110 60 35 49 80 65 47 80 40 P23 HPF-D032B 46 35 28 15 7 11 18 15 10 18 10 P15
HPF-T029 4,500 3,000 2,400 1,310 750 1,050 1,500 1,200 880 1,500 750 P29 HPF-D033 − − − − − − − − − − − P35

-proof
Vacuum
HPF-T029E 825 550 440 240 135 190 280 230 160 270 130 P29 HPF-D034 60 45 36 19 9 15 25 21 15 25 13 P15
HPF-T030 500 500 500 305 175 245 310 260 180 350 175 P21,41 HPF-D035 95 95 80 43 21 33 50 42 29 50 25 P15
HPF-T031 900 600 480 260 150 210 310 260 180 300 150 P13 HPF-D035C 95 95 80 43 21 33 50 42 29 50 25 P15
HPF-T032 − − − − − − − − − − − P37 HPF-D036 20 15 12 6 3 5 8 7 5 8 4 P13

Use
Specialized
HPF-T032E − − − − − − − − − − − P37 HPF-D037 20 15 12 6 3 5 8 7 5 8 4 P11
HPF-T033 900 600 480 260 150 210 280 240 160 265 130 P9 HPF-D038 95 95 80 43 21 33 50 42 29 50 25 P15
HPF-T034 − − − − − − − − − − − P37 HPF-D039 20 16 12 6 2 4 4 3 2 4 2 P17
HPF-T034E − − − − − − − − − − − P37 HPF-D040 − − − − − − − − − − − P39

Lens unit
HPF-T035 1,030 690 550 300 170 240 350 300 210 340 170 P29 HPF-D041 40 30 24 13 6 10 17 14 10 15 8 P19
HPF-T036 18 12 9 5 3 4 6 5 3 6 3 P13 HPF-D042 86 65 52 28 14 21 35 30 21 40 20 P15
HPF-T037 52 35 28 15 8 12 20 16 11 20 10 P19 HPF-D043 160 120 96 52 25 40 65 55 40 50 32 P19

accessories
Other
HPF-T038 37 25 20 10 6 8 12 10 7 12 6 P13 HPF-D045LF 93 70 56 30 15 23 37 31 21 35 17 P23
HPF-T039 18 12 9 5 3 4 5 4 3 6 3 P17 HPF-D049 160 120 100 55 27 42 60 55 38 60 34 P15
HPF-T042 660 440 350 190 110 150 220 190 130 240 120 P19
HPF-T043 300 200 160 85 50 70 100 80 55 100 50 P13
HPF-T044 675 450 360 195 110 155 220 190 130 220 110 P9
HPF-T046 180 120 96 52 30 42 60 50 38 100 40 P13
HPF-T047 − − − − − − − − − − − P33
HPF-T054-L05 6 6 6 6 6 6 6 6 6 6 6 P17 テクニカル
Technical
ガイ ド
Guide

51 52

HPF Series
Characteristics diagrams (typical examples)

Excess gain

Screw
HPF-T003 HPF-T003/FE-PA-L1 HPF-T029
Related pages P9 Related pages P 9 、 P 45 Related pages P 29

Cylindrical
1000 AG 1000 AG 400 AG
HP3 HP3 nL3
Ft3 Ft3
Excess gain factor (times)

Excess gain factor (times)

Parallel displacement (mm)


200 EG
100 EG 100 EG nL4
nL nL

Coaxial
FT FT 0

10 10
-200

Sleeve
1 1 -400
0 500 1000 1500 2000 0 500 1000 1500 2000 2500 3000 0 500 1000 1500 2000 2500 3000 3500
Scanning distance (mm) Scanning distance (mm) Scanning distance (mm)

Side view
L

HPF-T030 X HPF-T030 L

HPF-D002 HPF-D028T (Right and left detection) (Up and down detection) X

Related pages P 11 Related pages P 24 Related pages P 21 Related pages P 21

Narrow view
AG 1000 AG 20 AG 10 AG
1000 HP3 HP3 nL3 nL3
15

Parallel displacement X (mm)

Parallel displacement X (mm)


Ft3 Ft3
Excess gain factor (times)

Excess gain factor (times)

10 EG 5 EG
EG 100 nL4 nL4
5

reflection
Selective
Flat/
100 nL
FT 0 0
-5
10
10 -10 -5
-15

Area
1 -20 -10
1 0 5 10 15 20 0 200 400 600 800 0 200 400 600 800
0 500 1000 Scanning distance (mm) Scanning distance L (mm) Scanning distance L (mm)
Scanning distance (mm)

Heatproof
Parallel displacement Detection area characteristics

-proof
Chemical
HPF-T003 HPF-T003/FE-PA-L1 HPF-D002 HPF-D025
Related pages P9 Related pages P 9 、 P 45 Related pages P 11 Related pages P 21

-proof
Vacuum
800 AG 400 AG 150 AG 5 AG
nL3 nL3 nL3 4 nL3
600 100 3
Parallel displacement (mm)

Parallel displacement (mm)

Parallel displacement (mm)

Parallel displacement (mm)


400 EG 200 EG EG EG
nL4 nL4 50 2

Use
Specialized
nL4 nL4
200 1
0 0 0 0
-200 -1
-50
-2
-400 -200
-100 -3

Lens unit
-600 -4
-800 -400 -150 -5
0 500 1000 1500 0 500 1000 1500 2000 2500 3000 3500 0 500 0 10 20 30 40 50
Scanning distance (mm) Scanning distance (mm) Scanning distance (mm) Scanning distance (mm)

accessories
Other
L
L
HPF-T021T X HPF-T021T X
(Right and left detection) (Up and down detection)
Related pages P 25 Related pages P 25

150 AG 150 AG
nL3 nL3
Parallel displacement X (mm)

Parallel displacement X (mm)

100 100
EG EG
50 nL4 50 nL4 テクニカル
Technical
ガイ ド
Guide
0 0

-50 -50 List of Scanning


Distance by
-100 -100 Amplifiers Model

-150 -150
0 500 1000 1500 2000 2500 3000 3500 0 500 1000 1500 2000 2500 3000 3500
Scanning distance L (mm) Scanning distance L (mm)
53 54

HPF Series

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