Vacuum Pump Oil/Grease ULVAC TECHNO, Ltd.

Oil for Diffusion and Ejector Pumps ULVOIL D series (D-11, D-31), B-6
Features
Genuine oil (ULVOIL) D series was developed specific for oil
diffusion pumps and B-6 was designed specific for oil diffu-
sion ejector pumps. Select the optimal oil for your pump
needs from our specialized lineup.
Vacuum Pump Oil/Grease

ULVOIL D series/ B-6 features list

Applications Diffusion pump oil Diffusion ejector pump oil
Test method
Type of synthetic oil Hydrocarbon Silicon Hydrocarbon

ULVOIL model number D-11 D-31 B-6

Ultimate pressure (Pa) 7x 10-5 3x 10-8 2.7 x 10-2※ ULVAC evaluation method

20°C (Pa) 7.3 x 10-5 2.1 x 10-8 1.2 x 10-5 —

pressure
Vapor

40°C (Pa) 1.7 x 10-3 2.1 x 10-6 1.4 x 10-4 —

100°C (Pa) 1.5 x 10-1 1.1 x 10-3 3.3 x 10-1 —

Specific heat (100°C J/g) 0.5 (100℃ J/g) 0.4 (100℃ J/g) 2.18 (25℃ J/g) JIS K 2249

Evaporation latent heat (J/kg) 7.1 x 104 1.2 x 105 — —

Average molecular weight 366 548 330N~340 —

Density (25°C g/cm3) 0.91 1.09 0.89 JIS K 2249

Kinetic viscosity (mm2/s) 32 170 22 JIS K 2283

(measurement temperature °C) (40) (25) (40)

Total acid number (mgKOH/g) <0.1 — 0.00 JIS K 2501

Ignition point (°C) 220 210 200< JIS K 2265

Pour point (°C) -20 -15 <-50 JIS K 2269

Color (25°C) Transparent pale yellow Transparent Transparent pale yellow Visual evaluation

Features General-purpose oil Heat resistance stability For ejector pumps —

Applicable model type - PFL, F, ULK U, ULK PBL —

ULVAC pump series models

Container (L) 18 1.0 0.5 18 —

Pressure achieved with simultaneous use of a water-cooled baffle.

138 VACUUM COMPONENTS