Programme: B. Tech: (MECHATRONICS) Subject : Microclectromechanical Systems Date : 30 November 2016 NB Academic Year: 2016-2017 Marks: 60 ‘Time : 10.00 am to 1.00 pm Durations: 3 (hrs) Final-Examination 1) Question No.1 is compulsory. 2) Out of remaining questions, attempt any 4 questions. 3) All questions carry equal marks. 4) Answer to each new question to be started on a fresh page. 5) Figures in brackets on the right hand side indicate full marks. 6) Assume Suitable data if necessary. Qn Q2) Q3) Q4) Dy) » ‘) Dy b) 9 5 a) b) Answer any two questions Describe the concept of Piezo — electric effect in Capacitance measurement. Compare Surface Micro-machining with Bulk Micro-machi Enumerate various crystal structures, and lattice planes. Describe the process of LIGA. A silicon slab doped with electrons to make n — type having 2 and cross section area of J square 12m, determine the resistance. Determine the cross section area required to obtain a 21 fF gate oxide capacitance for SiO having a relative permittivity of 3.9, and 2nm thick. &y = 8.854 x 10°? F/m. 2.3 k Q.m, 100 nm long, Explain the fabrication of inverted pyramid by wet chemical etching. Comment on the sidewall angles on tapered plane with respect to horizontal plane. ‘A force of 105 aNV is applied on a piezo-clectric crystal. If the erystal is 3 mm thick, and having a cross section area of Isquare um, determine the capacitance and voltage observed across the crystal. Take c= 2, £,=2, and Ep = 8.854 x 10° F/m. Describe Vacuum Evaporation used in thin film deposition. Explain the process of Wet Oxidation for obtaining SiO, layers. Compare its quality with that of thermal oxide. : bpQ5) Q6) 0) a) b) a b) a) b) °) Describe application of MEMS in automobiles. Explain the principle of cantilever MEMS in diagnostic sensors. Describe the working of Scanning Electron Microscope. Explain the use of nanoparticles in water treatment. Write Short Notes on any two Bonding and Packaging of MEMS. ‘Smart sensors for wireless sensor networks. DNA nano-wires for nano-electronics, To