(2008) (Hon Et Al) Direct Writing Technology-Advances and Development

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CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Contents lists available at ScienceDirect

CIRP Annals - Manufacturing Technology


journal homepage: http://ees.elsevier.com/cirp/default.asp

Direct writing technology—Advances and developments


K.K.B. Hon (1)a,*, L. Li (1)b, I.M. Hutchings c
a
Department of Engineering, University of Liverpool, Liverpool 69 3GH, UK
b
School of Mechanical, Aerospace and Civil Engineering, University of Manchester, UK
c
Department of Engineering, University of Cambridge, Cambridge, UK

A R T I C L E I N F O A B S T R A C T

Keywords: Direct writing (DW), also known as digital writing or digital printing, is a family of flexible multi-length
Deposition scale processes for the deposition of functional materials to form simple linear or complex conformal
Miniaturization structures on a substrate. This paper provides an overview of key DW technologies and their process
Direct writing
characteristics under a unified classification system. In DW, a variety of mechanisms and energy modes
such as inkjet, laser, mechanical pressure and tips are used to create material transfer to produce features
from the nm to the mm range. This new group of additive on-demand processes complements existing
manufacturing methods especially in product miniaturization and geometrical footprint reduction due to
its conformal writing capability. The range of materials is exceptionally wide, ranging from metallics,
ceramics, dielectrics and polymers to biomaterials. The thickness of the layer ranges from a monolayer of
molecules to hundreds of micrometres. As DW is a scalable process, it is capable of high-throughput
volume production, especially in microelectronics. Industrial applications have been expanding and
numerous niche examples are given to illustrate meso-, micro- and nano-scale applications. Finally,
challenges for its future development are also discussed.
ß 2008 CIRP.

1. Introduction  A range of technologies, possibly in reconfigurable short produc-


tion runs, of two- or three-dimensional functional structures using
There is a trend for modern products to become more multi- processes that are compatible with being carried out directly on to
functional and compact, with a higher expectancy of quality and potentially large complex shapes [25].
reliability and a shorter life-cycle. There are increasing pressures to  Fabrication methods that employ a computer-controlled trans-
reduce materials content, energy consumption during manufac- lation stage, which moves a pattern-generating device, e.g. ink
ture and operation and to present a smaller carbon footprint to deposition nozzle or laser writing optics, to create materials with
meet the requirements of sustainable development. To deal with controlled architecture and composition [57].
the forces of competition, globalisation and regulation, one
effective approach is to develop new technologies and to innovate
While such definitions describe some of the essential properties
new solutions.
of DW processes, they are unable to distinguish DW from some of
Manufacturing technology has been under accelerated con-
the well-established rapid prototyping processes such as Fused
tinuous improvement over the past few decades; typical examples
Deposition Modelling, 3D printing or Object printing. A more
include high-speed machining [98,108], creep feed grinding
precise and accurate definition is therefore required for DW: direct
[33,116], superplastic forming [21,36] and an entirely new family
writing denotes a group of processes which are used to precisely
of layer-based manufacturing techniques under the generic name
deposit functional and/or structural materials on to a substrate in
of rapid prototyping and manufacturing [55]. It is only recently
digitally defined locations. DW is distinguished from conventional
that an emerging new family of ‘direct writing (DW) technologies’
RP in terms of the following characteristics:
has become more prominent.
Direct writing is not a single process but a diverse, versatile and
 The track width ranges from sub-microns to millimetres.
multi-length scale group of process technologies. Direct writing is
 The range of materials deposited can include metals, ceramics
also known as direct printing and digital writing. Numerous
and polymers, electronically and optically functional materials as
definitions have been proposed:
well as biological materials including living cells.
 The substrate is an integral part of the final product.
 Any techniques or process capable of depositing, dispensing or
processing different types of materials over various surfaces
following a preset pattern or layout [87]. With integrated laser positioning feedback, the topology of the
substrate could be flat, curvilinear, round, flexible, irregular or
inflatable. Based on the above definition, all RP processes are
* Corresponding author. outside the scope of this paper.

0007-8506/$ – see front matter ß 2008 CIRP.


doi:10.1016/j.cirp.2008.09.006
602 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Fig. 1. Publications with ‘direct writing’, ‘inkjet’, ‘rapid prototyping’ in their titles based on ISI Compendex database.

Research efforts have been building up in the past decade as DW deposits, transfers or consolidates a strip of material through
more new applications have been developed in the biological, the action of a high-energy laser beam. This can be further sub-
medical, optical and electronics areas. Fig. 1 shows the number of divided into four groups based on the precursors, i.e. solid, liquid,
publications with the term ‘direct writing’ in their title since 1990. gas or cell. As laser DW is highly versatile, several processes have
While Fig. 1 shows the general trend of the growing importance of been developed for each type of precursor as summarised in
DW, it may not provide a complete picture of the scientific Section 4.2 with nine processes in the group. Focussed ion beam
advances in DW as a number of publications on DW processes do (FIB) DW requires a precursor gas and its resolution is nearly two
not have that term in their title. For instance, there are over 400 orders of magnitude better than laser albeit with a slower writing
articles alone on dip-pen lithography and this is not wholly speed.
reflected in Fig. 1 [76]. Although there is no published data on the Flow-based DW requires high precision micro-dispensing
market impact of DW, it is estimated that the market for printable technology which could be in the form of a precision pump as
electronics alone will generate over US$7 billion in 2010 [58]. the case of the nScrypt process or extrusion for the MicroPen.
Usually, the delivery of the flowable material is through a very
2. Classification of direct writing small orifice or a needle. This kind of DW system is able to cope
with materials over a wide range of viscosities from 0.5 to
Direct writing is a generic term covering a number of processes 1,000,000 mPa s. Unlike inkjet where the ink is discretized as
using radically different methods for material transfer on to a individual droplets, the delivery of material for flow-based DW is
substrate. It is an unusual technology as it covers a vast length scale continuous.
from tens of nm to several mm in terms of line width. Based on the Tip-based DW is a nanomanufacturing method represented by
mechanism of materials transfer, DW methods can be grouped two processes. In dip-pen lithography, molecules diffuse on to a
under the headings shown in Fig. 2. substrate in an ordered pattern through the micro-capillary action
Droplet-based DW can be subdivided into two groups: inkjet between the tip and the surface. Alternatively, a micro-pipette can
and aerosol. Inkjet technology is the most mature form of DW be used, as in the case of MicroPen. The properties of the meniscus
technology and has two modes: continuous and drop-on-demand formed between the tip and the surface are highly significant for
(DOD). The continuous mode can be further subdivided into binary direct writing by this method.
deflection, multiple deflection, Hertz and microdot. Drop-on- A map summarising the capabilities of a few representative DW
demand can be realized by thermal, piezoelectric, electrostatic and processes is given in Fig. 3. It is evident that DW processes can be
acoustic techniques [52]. The earliest form of inkjet printer divided into two broad categories based on the range of feature size
appeared in the mid-1970s. At present, thermal and piezoelectric that can be produced, i.e. nano-scale and micro- to meso-scale. This
drop-on-demand inkjet methods are the most popular. In aerosol is because direct writing is not a single discipline subject and
jets, unlike inkjet systems, the driving force is based on a gas to employs numerous different mechanisms of materials deposition.
provide the kinetic energy for the deposition of materials. With such a vast range of length scale, DW technology offers huge
Energy beam-based DW refers to deposition of materials by application potential as described in Section 8 of this paper.
laser or ion beams. Although electron beam direct writing appears An overall summary of the basic process characteristics of
often in the literature, it is usually used in a material-subtractive direct writing techniques discussed in this paper is given in
sense rather than the definition adopted in this paper. Laser-based Appendices A and B.

Fig. 2. Classification of direct writing methods.


K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 603

Fig. 5. Composite image showing the break-up of a continuous liquid jet travelling
from left to right. The nozzle is located to the left of the stream in the upper image
and the lower image is a continuation of the upper image.
Fig. 3. Representative direct writing technology capabilities.

3. Droplet-based direct writing a so-called Taylor cone which then breaks up into a stream of very
small droplets) but are not commonly employed in commercial
3.1. Inkjet-based direct writing: basic principles systems [6]. The processes of CIJ and DOD printing are described in
more details and then compared in the following sections.
Inkjet printers have become very familiar over the past 30 years
in the context of small office and home (SOHO) applications. The 3.2. Continuous inkjet printing
rapid development of this technology followed the earlier
introduction of inkjet printing in an industrial context for in-line A stream of liquid emerging from a nozzle is unstable and will
date coding and marking of products, and is now being followed by tend to break-up into drops under the action of surface tension.
the progressive use of similar technologies in the manufacturing of This phenomenon is known as the Plateau–Rayleigh instability.
products themselves, both in the large-scale printing of text and The growth of a disturbance in the jet diameter occurs most rapidly
graphics, and also in the controlled digital deposition of structural when its wavelength l is about 4.5 times the diameter d of the
and functional materials: direct writing. The evolution of these stream. In a CIJ printer, this natural break-up is stimulated and
applications of inkjet technologies is illustrated schematically in enhanced by the application of a periodic disturbance to the fluid,
Fig. 4. at a frequency v=l where v is the jet velocity. The diameter of the
Inkjet-based direct writing involves the formation and deposi- resulting drops is close to 2d. Fig. 5 shows the break-up of a
tion of a sequence of droplets of liquid material, often called an ink continuous inkjet travelling from left to right. A typical commercial
or fluid. After deposition this material usually becomes solid, by CIJ printing system might have a jet diameter of 60 mm and a jet
the evaporation of a solvent, chemical changes (e.g. through the velocity of 20 m/s, giving drops about 120 mm in diameter and
cross-linking of a polymer) or through cooling (e.g. by crystal- requiring a drive frequency of about 75 kHz.
lization or vitrification). Subsequent processing steps, such as In a typical CIJ printhead, shown schematically in Fig. 6, the jet
sintering, may also be involved. The impact process and the is generated by pumping the liquid into a chamber from which it
development of a solid product will be discussed later; we shall emerges through a nozzle, and the modulating disturbance is
here focus on the formation and control of the liquid drops. provided by a piezoelectric transducer in contact with the ink or
There are two different methods most commonly used to the nozzle. An alternative method of stimulating the jet break-up is
generate drops in inkjet printing, termed continuous inkjet (CIJ) by the use of a small heating element very close to the nozzle
and drop-on-demand [DOD]. In CIJ a continuous stream of ink outlet, fed with a periodic electric current.
drops is generated from a nozzle by exciting the natural tendency In most CIJ systems the drops are deflected electrostatically, as
of a continuous liquid jet to break-up under surface tension forces. shown in Fig. 6. The charging electrode surrounds the jet at the
Each drop is then individually steered (deflected) to write spots on point at which it separates into drops, and the application of an
the substrate. Drops that are not selected in this way are fed into a electrical potential to this electrode induces an electrical charge on
gutter and recycled. Simple CIJ systems use single nozzles, but each drop as it leaves the stream. The liquid requires enough
systems also exist with multiple nozzles. In DOD individual electrical conductivity for this charge to pass along the intact
nozzles, usually in an array containing a large number of nozzles, stream from the nozzle. By varying the potential of the charging
are individually addressed to generate a single drop of ink on- electrode, the charge carried by each drop can be controlled and
demand, by inducing a transient pressure pulse in a chamber varied. The drops then pass through a region of steady electric field
behind the nozzle. The drops then travel in straight lines from the and are deflected sideways to an extent determined by the
nozzle to deposit on the substrate. magnitude of their charge. Uncharged, and therefore undeflected,
Other methods of drop generation are possible, including the
use of an electric field to draw out a liquid from a nozzle (forming

Fig. 6. Schematic illustration of the principle of operation of a continuous inkjet


Fig. 4. Evolution of applications of inkjet printing [68]. system.
604 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

drops pass into a gutter from which they are recycled, while
charged drops will be ‘steered’ to strike the substrate at a range of
possible positions.
By using a fluid with appropriate properties of which the most
important are surface tension and viscosity, and optimizing the
frequency and amplitude of the modulation, it is possible to
arrange that the satellite drops which often form between the main
drops and are clearly seen in the top-right area of Fig. 5 recombine
with the main drops, which are present in a very regular and
repeatable sequence.
By deflecting the drops and moving the substrate appro-
priately, a pattern of droplets can be written on to the substrate.
More complex CIJ systems can employ nozzles fed with different
inks, for example to print four-colour graphics at high speeds, and
commercial systems also exist which use linear arrays of many Fig. 8. High-speed photograph of jets ejected downwards from a linear array of
nozzles (located at the top of the image). The jets were ejected in three groups, and
hundreds of nozzles.
the image shows progressive collapse of the ligaments behind the main drops into a
series of satellites.
3.3. Drop-on-demand printing

In the DOD method drops of ink are only ejected from the 3.4. Comparison of commercial CIJ and DOD systems
system when they are required to be printed, and there is
therefore no need to recycle unused liquid. The liquid is ejected Although inkjet technology is currently undergoing rapid
from an ink cavity in response to a trigger signal, as shown development, with perhaps ten patent applications being filed
schematically in Fig. 7, through the generation of a pressure pulse worldwide each day, it is useful to summarise some of the current
by an actuator. similarities and differences between the various methods of drop
There are two common types of actuator. The thermal DOD generation.
(or bubble-jet) method is widely used in home and small-office A fundamental difference between CIJ and DOD methods lies in
printers; rapid transient heating of the ink by a small electrical the repetition rate, and hence material throughput, which can be
heating element located in the ink cavity close to the nozzle achieved from a single nozzle. In CIJ a continuous jet of liquid
creates a short-lived bubble of vapour which drives a jet of ink leaves the nozzle, and the drops form by collapse of the jet at a
out of the nozzle. The bubble then collapses, drawing ink from well-defined spacing, so that the centre spacing of the drops is
the reservoir to refill the cavity, and the process can be repeated. about 2.3 times their diameter; jet and drop formation represent
More common in industrial inkjet systems is the use of a continuous processes. In DOD, in contrast, the process of jet
piezoelectric element which changes the internal volume of the ejection and drop formation involves the sequential, discrete steps
cavity on the application of an electric field, and generates of fluid ejection and cavity replenishment, with a maximum
pressure waves which in turn eject ink from the nozzle and then frequency of operation governed by the timescale of these events.
refill the cavity. Since thermal DOD involves the vapourisation of In a typical DOD system the minimum spacing achievable between
a small volume of the ink, this places significant restrictions on drops ejected in a continuous sequence might be about 20 times
the materials which can be jetted by this method; they must be the drop diameter.
relatively volatile, or at least have a volatile component. There Generally, CIJ systems operate with fluids of lower viscosity
are no such restrictions for the piezoelectric DOD method. than DOD, and at a higher drop velocity, as summarised in Table 1,
Printheads for both methods of DOD typically contain tens, and tend to require larger quantities of fluid for pumping and
hundreds or even thousands of separate nozzles, fed by a single recirculation, but certain DOD nozzle arrays also circulate the fluid
ink manifold but each individually addressable. A typical set of through the nozzle manifold to improve reliability. Although early
drops and jets ejected from an industrial printhead is shown in CIJ systems used single or small numbers of nozzles, while DOD
Fig. 8. typically employed tens or hundreds, both are now capable of
Once the jet emerges from the nozzle, surface tension causes it addressing many hundreds of nozzles and there is significant
to form a main drop followed by a long ligament which may convergence of the technologies. There is a current trend to
collapse into one or more smaller satellite drops, as seen in Fig. 8. increase drop generation rates in DOD; other recent developments
As in CIJ, the surface tension and rheological properties of the include the ability to generate drops of variable size, in CIJ by
liquid strongly influence the formation of drops and ligaments; in varying a thermal stimulus applied at the nozzle, and in DOD by
an ideal system the ink will have formed a single drop by the point using a complex drive waveform which produces a stream of
at which it impacts the substrate, typically at a stand-off distance micro-drops which merge into a single drop before striking the
of 0.5–1 mm, but this is sometimes not achieved. substrate.
The dominant forces which control the behaviour of liquid jets
and drops arise from inertia, viscosity and surface tension. In
comparing and analysing jetting and break-up phenomena, it is
useful to describe the conditions in terms of appropriate dimension-

Table 1
Comparison of performance and fluid mechanical parameters for typical
commercial CIJ and DOD systems.

Parameters CIJ DOD

Drop velocity (m/s) 10–20 5–10


Drop diameter (mm) 10–150, typically 120 10–150, typically 50
Drop volume (pL) 0.5–2000 0.5–2000
Fluid viscosity (mPa s) 2–10 10–100
Reynolds no. (Re) 100–1000 2–50
Weber no. (We) 500–1500 50–150
Fig. 7. Schematic illustration of the principle of operation of a drop-on-demand
Ohnesorge no. (Oh) 0.03–0.2 0.1–1
printhead.
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 605

less groups. The Reynolds number Re, defined by Re = rDV/h,


describes the ratio between inertial and viscous forces in a fluid with
dynamic viscosity h and density r, at a velocity V and a characteristic
length D, usually taken to be the jet or drop diameter. The Weber
number We, where We = rDV2/s and s is the surface tension,
describes the ratio between kinetic energy and surface energy: i.e.
between inertial and surface forces. It is sometimes more useful to
consider the value of the Ohnesorge number Oh which describes the
relative importance of viscous and surface forces, where Oh = We1/2/
Re = h/(rsD)1/2.
It has been suggested that DOD printing of a fluid is practical
only if Oh lies within the range between about 0.1 and 1 [113]. For
Oh > 1 viscous dissipation in the fluid prevents drop ejection,
while for Oh < 0.1 multiple drops form rather than a single well- Fig. 10. Schematic representation of the spreading of a liquid drop with time. The
defined drop. The criterion for ‘jettability’ of a fluid thus involves axes represent the non-dimensional diameter of the drop d* and the non-
both its viscosity, which must fall within the limits indicated in dimensional time t* after impact [after 95]. The labelling of the axes is approximate.
Table 1, and also the Ohnesorge number which should lie in the
range 1 > Oh > 0.1. For non-Newtonian fluids which are of
increasing interest as applications of inkjet printing become R = (roughness amplitude)/D, and splashing is found to occur for
wider, still other dimensionless groups can be used to incorporate
the effects of viscoelasticity, such as the Weissenberg number K > 649 þ 3:76R0:63 (2)
Wi = TV/D where T is the characteristic relaxation time of the fluid.
A line is plotted in Fig. 9 for K = 1000 which approximates to
3.5. Drop impact phenomena these two conditions. Splashing will be favoured for conditions
above and to the left of this line, i.e. by a larger drop, higher impact
A wide range of behaviour is possible when a liquid drop strikes velocity, lower fluid surface tension, lower viscosity or a rougher
a solid surface, as reviewed by Yarin [122]. For the conditions substrate. It will occur more readily under the usual conditions for
applicable to inkjet printing and summarised in Table 1, both CIJ printing than for DOD.
gravitational and fluid compressibility effects can be neglected. Fig. 10 shows the four stages of development of the diameter of
The dynamics of drop spreading can be characterized primarily by a liquid drop after impact on to a solid surface [95]. The three
the Weber and Ohnesorge numbers, as shown in Fig. 9 adapted curves in the figure illustrate the behaviour for liquids which wet
from Schiaffino and Sonin [97]. The value of We determines the the surface well (curve A), and poorly (curve C); an intermediate
origin of the driving force for spreading, while Oh describes the case is also shown as curve B. The axes represent the diameter of
force that resists spreading. The conditions for inkjet printing lie in the deposit in non-dimensional form d* (where d*, often referred to
a regime where, at least for the earlier stages of impact, inertial as the spreading factor, is defined as the contact zone diameter
forces dominate and viscous forces are weak. As the spreading divided by D), and the time after impact made non-dimensional by
liquid comes to rest, however, capillary (surface tension) forces using the impact velocity V and the initial drop diameter D (t* = Vt/
become more important. D). Four phases can be identified. In the initial kinematic phase the
Splashing is generally undesirable if precise drop placement drop has its initial spherical shape, truncated by the plane of the
and deposition is required. The threshold for splashing to occur surface, and the contact circle increases according to a power law
during impact depends on the condition of the surface, and can be with d*  t*1/2. This phase of the impact is completely described by
expressed in terms of a dimensionless group K = We Oh2/5 [122]. the impact velocity and initial diameter. In the next phase, beyond
For impact on a surface which is already wet with a liquid film of t*  0.1, the spreading depends most strongly on the viscosity of
thickness h, and where H = h/D, the condition for splashing has the liquid, with less effect of surface tension; less viscous liquids
been empirically determined as attain larger diameter drops than more viscous liquids, although
towards the end of this phase (say for t*  1) the role of surface
K > 2100 þ 5880H1:44 (1) tension becomes more important. During the spreading phase the
diameter is constantly increasing. After this phase (from t*  2) the
for 0.1 < H < 1 and Oh > 7  103 [20]. For impact on a dry and effects of surface tension, and in particular of the contact angle
non-absorbent surface the critical value of K depends on the between the liquid and the surface, play a major role. Depending
roughness of the surface, expressed in dimensionless form as on the wettability of the surface and the balance between inertial
and viscous forces up to this point, the contact angle at the end of
the spreading phase may be greater or less than the appropriate
(advancing or receding) equilibrium value; the drop may therefore
continue to expand, or retract, during the relaxation phase, as
shown in Fig. 10. For longer times (t* > 10) and if the surface is
well wetted by the liquid, the drop continues to expand with a
diameter proportional to t*1/10 [107]. In practical applications of
inkjet printing, the first three stages of drop spreading shown in
Fig. 10 last only a few tens of microseconds.

3.6. Aerosol jet direct writing

Instead of using individual liquid ink droplets as the media for


direct writing, Optomec have developed a focused aerosol beam
which is now marketed under the name M3D which stands for
Maskless Mesoscale Material Deposition. An overview of the M3D
Fig. 9. Schematic diagram adapted from Schiaffino and Sonin showing four regimes
of behaviour for a liquid drop on impact, based on the values of Weber and system is given in Fig. 11 and its operation consists of three steps.
Ohnesorge numbers [97]. Typical ranges of values for drop-on-demand (DOD) and Firstly, the liquid material is placed into an atomizer, creating
continuous (CIJ) inkjets are shown. a dense aerosol of micro-droplets from 1 to 5 mm in diameter.
606 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

order of a few femto-litres. Therefore, the kinetic energy is so small


that it will not destroy living cells due to their tiny mass.

4. Energy beam-based direct writing

4.1. Laser direct writing

Laser direct writing (LDW) refers to the creation of 1D to 3D


features by laser-induced deposition of metal, ceramics, semi-
conductors, polymer, composites and biomaterials without the use
Fig. 11. Schematic diagram of M3D aerosol jet direct writing system [38]. of masks or lithographic methods. LDW was introduced in the early
1980s with pioneering work from Lawrence Livermore National
Laboratory and AT&T Bell Laboratories to enable the fabrication of
Aerosolized liquid particles as small as 20 nm have also been micro-electronic circuits with 1–2D features. The technology was
achieved. The choice of the atomization technique depends on the further developed in the 1990s, e.g. with critical contributions
ink parameters. Inks with a low viscosity of between 0.7 and from the Max Plank Institute in Germany and the US Naval
30 mPa s and containing small particles (<50 nm) can be ultra- Research Laboratory, to enable the creation of 3D features for
sonically atomized. For inks with viscosities between 1 and wider applications including photonic crystals and MEMs. Since
2500 mPa s, a pneumatic atomizer is used [38]. Inks can be based the late 1990s LDW has become more mature and new
on solutions, nanoparticle suspensions or precursor materials and applications, particularly in the biomedical sector, have been
can contain metals, alloys, ceramics, polymers, adhesives or even actively investigated by the wider scientific communities and
biomaterials. Secondly, the aerosol is carried by a carrier N2 gas flow industries. In this section, the basic characteristics of major laser
to the deposition head. Finally, within the aerosol head, the aerosol is direct writing techniques and the mechanisms of feature forma-
aerodynamically focused using a flow guidance deposition head, tion and material transfers are presented.
which creates an annular flow of sheath gas to collimate the aerosol.
The high velocity co-axial flow is sprayed onto a substrate creating 4.2. Laser direct writing technologies and their characteristics
features from 5 to 150 mm using standard equipment. Recently new
nozzle configurations have been developed which allow a maximum Laser direct writing can be carried out in a number of ways
line width of 5 mm. The ability to write feature sizes through three including depositing from gaseous, liquid and solid precursors and
orders of magnitude shows the versatility of this process. material transfers. The techniques involve either laser-induced
The writing speed is up to 200 mm/s and the volumetric chemical/electrochemical or physical reactions that lead to the
deposition rate is up to 0.25 mm3/s with a single nozzle. The deposition of a material on to the substrate.
system can handle a wide range of materials with a viscosity from
0.7 to 2500 mPa s. Once the materials are deposited, they are 4.2.1. Laser chemical vapour deposition (LCVD)
usually post-cured to achieve densification and/or chemical LCVD for direct writing of 2D features was first demonstrated in
decomposition to produce desired electrical and mechanical the early 1980s. An argon ion laser with 514.5 nm wavelength of
properties. The post-processing can be done either thermally in less than 2 W power is focused using an optical microscope lens to
a furnace or by an infrared laser depending upon the deposition a spot less than 2 mm in diameter. A reaction chamber is filled with
material and substrate combination being used [81,92]. Polymeric a gas precursor containing the elements to be deposited, e.g. silane
materials have also been post-processed in the M3D system using for depositing Si. The laser beam scans over a substrate target at a
integrated UV-curing. M3D is scalable for high-throughput volume 0.5–5 mm/s scanning speed. The hot target dissociates the gas
production with a multi-nozzle configuration. locally and a thin layer, normally less than 1 mm thick, of solid such
Akhatov et al. found that in the focused aerosol beam, seven as Si is then deposited onto the surface. Repeated scans of the
forces interact between a particle and the carrier gas flow, i.e. the surface allow multiple layers to be deposited. Typical line width is
Stokes drag force, which represents a steady viscous drag force; the 2–3 times larger than the laser beam diameter. As an example,
Basset force, which represents a non-steady viscous drag force; McWilliams et al. deposited Si and W on SiO2 coated wafer to
virtual mass force, which represents the inertia of the fluid around manufacture MOSFET with little post-process treatment required
a particle added to that particle; fluid pressure gradient force; [64]. The deposition rate is gas transport limited, and it is therefore
gravity force; the Magnus force, which represents a steady lift force a slow process. Foulon and Stuke deposited Al lines using
of a viscous fluid on a rotating particle; and the Saffman force, trialkylamine alane precursors, (C2H5)3NAlH3 (TEAA) and
which represents a steady lift force induced by the local shear flow (CH3)3NAlH3 (TMAA), on Si, GaAs and Al2O3 substrates [31]. It
of a viscous fluid [2]. Based on theoretical and experimental was found that the thermal decomposition of the precursor gas
studies, it was concluded that the Stokes force and Saffman force started at temperatures in excess of 300 K. Surface nucleation
have significant effects on the collimation of the aerosol beam with occurs within the first 0.01–0.1 s followed by Al growth. The rate of
an exit velocity of the order of 100 m/s. crystallite growth is greater than the rate of nucleation, leading to
Aerosol DW has been used in a wide range of applications, for an increase of surface roughness with the line thickness. Uniform
instance, micro-electronics: conformal interconnect, direct-die Al lines of 7 mm wide and 0.7 mm thick were grown at 300 mm/s
attachment, ceramic moulded interconnect device component, scanning rate and a power density of 1.55 MW/cm2.
embedded resistors, inductor coils, platinum electrodes; repair: LCVD can be applied to producing not only 2D but also 3D
PCB trace repair, flat panel display repair. Active development for structures. Lehmann and Stuke deposited 3D aluminium oxide
biological applications is being made. In a niche application, Horteis rods from a mixture of oxygen and trimethylamine alane
et al. demonstrated high volume printing of collector lines on solar ((CH3)3NAlH3) gas precursor by two orthogonal Ar laser beams
cells using highly solid loaded silver inks exceeding 70 wt.% [42]. The split from a single laser [54]. With 0.2–20 mW power focused to a
aerosol printed seed layer is 40 mm wide with a height of 1.5 mm on spot of 3 mm, Al2O3 rods of 3–20 mm diameter were produced. A
silicon substrate. For this volume production application, Optomec growth rate of 80 mm/s can be achieved. The technique was later
has developed a high throughput 40-nozzle Aerosol Jet deposition applied to the fabrication of 3D photonic band-gap microstructures
head that prints a solar cell every 2.5–3 s [38]. with an Al2O3 growth rate up to 100 mm/s [114] and 3D electrical
A very wide range of materials has been used for aerosol DW, cages for trapping particles [106]. An example of diamond-like
covering all the material groups described in Section 7. M3D is carbon micro-coils produced from ethylene gas precursor using
applicable for biomanufacturing because the droplet size is of the LCVD is shown in Fig. 12 [118].
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 607

temperature but not at ambient so that spatially selective laser


deposition can take place.
Another example is the deposition of copper wires on Si
substrate using LEEP, with a Ar+ laser (414.5 nm wavelength) that
is better than IR beams for transmitting through the copper
formate Cu(HCOO)2 and CuSO4 precursors. Thermal decomposition
of copper formate can be expressed as [13]

CuðHCOOÞ2 ! Cu þ H2 O þ CO þ CO2 (4)

Since Cu is easily oxidised in water, it cannot be reduced from


Fig. 12. A diamond like carbon micro-coil produced using LCVD. (a) Schematic aqueous solution of copper formate in the absence of a proper
illustration of the deposition process. (b) A deposited sample [118]. reducing agent. Glycerol was used as a reagent to reduce the
copper and to prevent oxidation of the metal. The final deposit was
mainly copper with some traces of carbon contamination. Line
The deposition rate in LCVD is dependent on a number of factors width increased with dwell time and laser power. Typical line
including gas pressure, laser power density and scanning speed. width was 2–12 mm and thickness of 0.25–1.2 mm, with a laser
The deposition rate generally increases with the gas pressure of the power of 1–3 W and a scanning rate of 0.1–0.8 mm/s. It is worth
precursor materials (linearly), laser power density (linearly) and is noting that the deposition rate of 80 mm/s was about five orders of
inversely proportional to the scanning speed. In a low-pressure magnitude faster than that of conventional electroless plating.
static reactor, the diffusion-limited axial growth rate is inversely Deposited Cu from CuSO4/glucose has a minimum resistivity of
proportional to the induced reaction zone size. Thus for a very 3.6 mV cm, approximately twice the resistivity of pure copper
small focused laser beam spot, the local diffusion of species to the (1.68 mV cm) [13]. Aluminium features can be deposited on a Si
reaction is enhanced. The LCVD deposition rate is found to be many substrate by laser scanning of a liquid precursor, triisobutylalu-
orders of magnitude greater than for standard CVD. For a Gaussian minium (TIBAL) using an Ar+ laser at 0.2–0.9 W, focused to a 3-mm
beam profile, the thickness of a deposited film can be estimated spot size, and at a scanning speed of 0.2–5 mm/s. Aluminium lines
from [118]: of 0.8–1.1 mm thick and 3 mm in width were produced [53].
pffiffiffiffi
pR0 rt 4.2.3. Laser enhanced or activated electroplating
hðvs ; t Þ ¼ pffiffiffiffi (3)
pr þ 2ðvs tÞ Laser-enhanced electroplating was first reported by von Gutfeld
et al. in the late 1970s and early 1980s with 1000 times faster
where hðvs ; tÞ is the thickness of the deposited film, R0 is the deposition rate than normal electroplating due to the increased
diffusion-limited axial growth rate, r is the laser beam radius, t is local temperature [91,111]. In the early 1990s Lawrence Livermore
time and vs is the scan velocity. In addition, the grain size increases National Laboratory developed a laser-assisted electroplating
with deposition thickness [31]. technique, using a 12 W Ar+ laser with 105 to 2.5  106 W/cm2
power density to melt and alloy the top a-Si coating layer with an
4.2.2. Laser-enhanced electroless plating (LEEP) Au film below to enable the laser scanned lines to be conductive.
Laser-enhanced electroless plating was first reported by von This is followed by electroplating. Only the exposed conductive
Gutfeld et al. in the early 1980s [110]. With this method, the features can be plated. The laser writing speed can reach 110 mm/s
substrate is submerged in a chemical solution containing the [65]. This method is limited to 1D and 2D features. The
metallic ions required for the deposition. A focused laser beam electroplating rate is typically 100 times greater than electroless
irradiates the substrate surface causing a local temperature rise. deposition rates. This technique is however, a two-stage process.
This temperature is high enough to decompose the liquid causing The University of Manchester developed a direct, single step
deposition of a metallic layer on the substrate. This can then be process of laser-activated multiple layer electroplating [117]. A
followed by electroplating or electroless plating to increase the laser beam, e.g. a frequency-doubled diode pumped solid state
deposition thickness as the new deposition is attracted to the laser, Nd: YVO4, with 532 nm wavelength, 20–70 ns pulse width,
conducting features created by the laser. The technique is currently scans over a substrate surface such as stainless steel covered with
limited to writing 1D and 2D features. For example, Srivastva et al. CuSO4 electrolyte solution with the plating voltage set just below
reported selective depositing of nickel on an alumina substrate the deposition threshold, i.e. so that no deposition occurs without
using a XeCl excimer laser at 308 nm wavelength [104]. Saturated the assistance of the laser beam. A typical set-up is shown in
R grade nickel acetate solution was circulated over the surface of Fig. 13. As the laser beam scans the surface, there is a local
the alumina substrate. The substrate was then irradiated with the temperature rise which promotes the deposition rates by up to
laser beam at 10–110 mJ pulse energy at 10–100 Hz repetition 1000 times. Typically each scan results in 1 mm deposition
rate. Visible Ni layers were formed at energies of 40–60 mJ/pulse at thickness as shown in Fig. 14. Multiple scans would allow thicker
a frequency of 100 Hz, and a scan rate of 200–300 mm/s. Laser
irradiation resulted in both deposition of metal and etching of the
substrate. The laser deposited layer had a thickness of 0.3–0.6 mm,
which was then brought to 3 mm by electroless plating in a Ni–B
bath.
The electrochemical conditions necessary for an electroless
plating process to take place are [13]:

(i) The reducing potential of the reductant must be less than that
of the reducing potential of the metal.
(ii) The metal must have enough catalytic activity for the anodic
reaction to take place at a reasonable rate.

In LEEP, a laser-induced temperature rise in the substrate


enhances the local chemical reaction, causing the redox reaction to
take place and metal to be deposited. The reducing agent needs Fig. 13. A typical set-up for laser-activated electroplating for direct writing Cu on a
to be chosen such that reduction takes place at an elevated stainless steel substrate [117].
608 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Fig. 15. Laser direct writing for depositing coloured enamels on ceramic tiles.

Fig. 14. An example of Cu deposited on stainless steel (multiple layers) by laser-


activated electroplating, at various laser scan rates. (a) 100 mm/s, (b) 200 mm/s and
(c) 300 mm/s [117].
et al. in 1980s to deposit Cu and Ag over silicon and fused silica
using excimer or Nd:YAG lasers [9,10]. The action of the laser pulse
results in vapourisation of a small amount of material that
2D to 3D structures to be built. recondenses on the substrate. LIFT was initially developed to
transfer metals, and was quickly extended to oxides [17,30]. In the
CuSO4 þ H2 O ! Cu þ ð1=2ÞO2 þ H2 SO4 (5) original form, the film material is the same as the deposited
material. Therefore, vapourisation of the film is needed to lift it off
the donor surface and deposit it on to the receiving target. This
4.2.4. Laser consolidation of thin solid films limits its applications. A variation of the technique was the matrix
This method, started in the early 1980s, is based on photo- assisted pulsed laser direct write (MAPLE DW) described in the
thermal (pyrolitic) decomposition of solid films of metallo-organic next section, to overcome some of the difficulties for transferring
precursors, i.e. a metal-containing ink. A metal-containing screen materials at lower temperatures.
ink is spin-coated on to a substrate followed by baking in an oven Further development of the LIFT technology in the 2000s allows
to remove excess solvent. The typical coating thickness is 0.1– the transfer of biomolecules. This is based on the deposition of a
2.5 mm. The surface is then patterned by a laser (typically a layer of liquid, containing biomolecules, on a transparent glass
continuous wave Ar+ laser, focused to 0.8–1.5 mm beam spot, up to plate which was coated with a thin layer of optically absorbent
20 W, scan speed 100–2000 mm/s), normally in air to allow the material, e.g. Ti [100,119]. A pulsed laser heats the absorbent
burning off of carbon in the organic binder. The metallic particles material and projects a tiny amount of liquid solution containing
are sintered or fused to form a continuous feature. The unexposed the biomolecules onto a solid substrate. For example, a 50–65 mm
and partially exposed material is then removed by dissolving it in a array of double-stranded DNA from salmon sperm was deposited
chemical solution such as dichloromethane chromic/sulphuric on to poly-L-lysine coated slides [29]. A similar method reported by
acid. A continuous patterned metal film is then formed on the Barron et al. was known as biological laser printing (BioLP) [5]. It
substrate. For example, gold lines of 0.1–0.7 mm height can be can deposit proteins, DNA, scaffolding materials, prokaryotic and
produced from ink with a thickness of 1–2.8 mm on quartz eukaryotic cells, with low volume transfers. It removes direct
substrates and palladium is deposited on a Si substrate from interaction of the laser with the biological material. As the laser
palladium acetate precursor [34,35]. Due to exothermic reactions absorption depth or skin depth is between 2.2 and 10.5 nm which
of the organic binder, two thermal fronts are formed which can is well within the metal film, 99.9% of non-reflected light is
lead to periodic line structures under certain conditions. This absorbed within the metal film. Thermal penetration into the
method is limited to the formation of 1–2D single layer patterns liquid is less than 400 nm into the biolayer. As thermal
due to the inconveniences of adding additional layers at the same vapourisation of the solid film takes place, the first 5% of material
location. It has an advantage over the LCVD method in terms of nearest the interlayer is affected. Cells are mixed with 0.1 vol.% of
materials design, process control and safety. The processing can sodium dodecyl sulphate (SDS) and 50 vol.% glycerol.
often be carried out in air. However, post-processing to remove A great advantage of the technique is high speed and high
untreated materials is required. Precursors must meet certain resolution. The deposited spot size has 9.3% standard deviation,
requirements to be of practical use. These include:

a. Homogeneous film formation.


b. High metal content, i.e. sufficient to form continuous metal
features.
c. To allow complete volatilisation of organic components at
decomposition temperatures low enough to prevent substrate
damage.
d. Either the film or the substrate must have enough optical
absorption at the laser wavelength to initiate decomposition of
the metallo-organic film.

A variation of the technique was applied by the University of


Manchester for the colour marking of tiles and glass by laser fusing
of a layer of coloured enamels as shown in Fig. 15.

4.2.5. Laser-induced forward transfer (LIFT)


LIFT employs a laser beam to transfer a thin film from an
optically transparent support onto a substrate placed 25–100 mm Fig. 16. LIFT for direct write deposition of biomolecules. (a) Experimental set-up. (b)
below and in parallel to it. LIFT was first demonstrated by Bohandy Deposited droplets containing ETS2 human genes [19].
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 609

comparable to commercial grade piezo-tip and solid pin arrayers.


Diameter is half that from commercial grade arrayers. 3D human
osteosarcoma cells were printed using this method. The droplet
volume displays a linear dependence on the laser pulse energy
[18]. An example of the typical set-up and laser deposited ETS2
human genes is shown in Fig. 16.
It is possible that the sacrificial layer is a polymer material such
as polyimide for transferring biomedical materials. Droplets of
biomedical materials can be deposited at different laser fluences
that can cause the polymer film to change geometry, melt,
vapourise and rupture, ejecting different size of biomedical
droplets on the target surface. The droplet diameter is linearly
proportional to the laser pulse energy in this case.

4.2.6. Matrix assisted pulsed laser direct write Fig. 18. A schematic of laser backward transfer [70].
MAPLE DW was demonstrated in 1999 by Pique et al. at the US
Naval Research Laboratory [88]. Strictly speaking, MAPLE DW is a
form of LIFT with the difference that a carrier material is used to be altered through the concentration prior to the formation of the
absorb the thermal energy from the laser. A laser-transparent disk film on the transparent support [94]. Based on this method,
such as quartz is coated with an organic binder and the material to polymers, enzymes, proteins, tissues, etc. have been successfully
be deposited (such as powders of metal or ceramics or cells). The transferred on to various substrates [120]. Micro-contact printing
coated disk is called the ribbon. This ribbon is placed in close and lithography techniques are limited to 2D and resolution of less
proximity of about 25–100 mm and parallel to the acceptor than 100 mm. Laser direct writing has allowed cell and tissue
substrate. The pulsed laser is focused through the transparent disk structures to be formed in 3D with a better resolution.
on to the matrix coating. When a laser pulse strikes the coating, a
fraction of the polymer decomposes into volatile by-products 4.2.7. Laser-induced backward transfer
which repel the powders to the acceptor substrate. In MAPLE DW, For optically transparent substrates, laser-induced backward
the material to be transferred is not vapourised, because the laser transfer can be used to deposit various materials including metallic
fluences required to decompose the photo-sensitive polymer are and metal oxides. The University of Manchester has demonstrated
below the ablation threshold of the powders. By avoiding the laser direct writing of conducting SnO2 films on to a glass substrate,
vapourisation of the depositing material, complex compounds can by placing the substrate on top with a 20–100 mm gap above a Sn
be transferred without modifying their composition, phase and powder bed. The laser beam passes through the glass and melts/
functionality [123]. Also there is little heating of the substrate. vapourises, some of the metal and deposits the vapour/molten
Each pass would deposit <1 mm layer. Multiple passes are required material on the back surface of the glass. A schematic of the process
to deposit thicker layers. Typical materials include Ag and BaTiO3. is shown in Fig. 18 and an example of laser direct write deposited
Line widths of 50–200 mm have been deposited with a beam spot SnO2 on glass is shown in Fig. 19. This example was processed in air
size of 25–100 mm. A deposition speed up to 500 mm/s has been without a specific reaction chamber. An advantage of the process is
claimed. Due to the low temperature of the transferred materials, the capability of depositing very thin (<50 nm) layers of materials
the substrates can be polymer materials. Large numbers of that can be fused on to the substrate as the laser would start to be
applications use this technique, mainly driven by the work of absorbed at the coating substrate interface. A disadvantage of the
the US Naval Research Laboratory. Examples include micro- process is the restriction of the substrates to optically transparent
capacitors, interconnects, phosphor displays, coplanar resistors materials.
[15,16], laminated band pass filters, inductors, resistors and on
separate layers [125], Li-ion micro-batteries [115], Ag2O for 4.2.8. Multi-photon polymerisation
primary alkaline cells and LiMn2O4 deposition for secondary Li- By tightly focusing a pulsed laser beam, non-linear photo-
ion cells [86]. An example of a spiral inductor is shown in Fig. 17. chemistry can be obtained, within a three-dimensionally defined
For transfer of biomedical materials, an aqueous-based focal volume of photo-sensitive acrylate polymers, to enable
biological support is used. The water in the biological support complex topographical structures to be fabricated with sub-
absorbs the UV light, causing some of the liquid at the interface to micrometer resolution. This has been achieved through multi-
be vapourised and resulting in the ejection of the remaining photon absorption by the materials to cause solidification. By the
material. 99% of the laser light passes through the liquid, raising use of a femtosecond laser scanning in 3D using micro-stages,
the possibility that the laser light could also damage the biological plastic model animals, interlocking buildings [46], and micro-
material [84]. The number of cells transferred to the substrate can scopic words can be produced [4]. Laser Zentrum Hannover has

Fig. 19. SnO2 grids deposited on glass with a film thickness 50 nm at 30 mm/s
Fig. 17. A spiral inductor deposited by the MAPLE DW technique [125]. scanning rate.
610 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

substrates such as polymers and cells. A further drawback of the


technique is the high cost, due to the use of a reaction chamber
associated with vacuum equipment. It is difficult to deposit alloys,
composites and organic materials using the technique.
Laser deposition in a liquid environment has high deposition
rates and excellent adhesion, but is limited to 2D structures only. It
can deposit metals and ceramics, but is not suitable for organic
materials. It does not require vacuum equipment. Therefore it has
lower cost than LCVD. Laser consolidation of solid films allows the
deposition of most metallic and ceramic materials. It is however
limited to applications on 2D surfaces.
Laser backward transfer, although fast in depositing metal and
metal oxides, is limited to optically (to the laser beam) transparent
materials. It would be difficult to deposit 3D structures using this
technique.
LIFT and MAPLE DW allow the building of 3D structures with
Fig. 20. A micro-Venus produced by two-photon polymerisation [99]. the widest range of materials on various substrates. A great
advantage is its capability to deposit biomedical materials at low
demonstrated the fabrication of 3D micro-objects by two-photon temperatures without damaging the cells. It has better thickness
polymerisation with a femtosecond laser, as shown in Fig. 20 [99]. control and allows a near-monolayer coverage that conventional
Ti–sapphire lasers have also been used to direct write 3D ink jet technique struggles to achieve. One limitation is the
protein microstructures, including low-profile arches and long substrate geometry. In LIFT and MAPLE DW the substrate needs to
aspect ratio cables [39]. The possibility of photo-fabricating 3D- be flat and placed parallel to the donor disk.
defined matrixes from biomaterials such as proteins opens Multi-photon polymerisation and laser guidance are recent
opportunities for creating sophisticated cellular interfaces that developments that are mainly suited to organic and biomedical
could enable cell growth in three dimensions or restrict diffusion of materials. They offer great flexibility and highest accuracy in
analytes secreted from subcellular regions of interest. Pitts and co- creating 3D structures. They can deliver and grow cells on a 3D
workers first reported the use of multi-photon excitation to object or substrate. Laser trapping and guided deposition in liquid
promote protein cross-linking in defined 3D voxels, allowing an is limited to low volume materials and is typically suited to small
extended protein-based matrix to be created in aqueous environ- particles and cells.
ments by scanning a laser focus through a reagent solution
containing protein and photosensitizer [89]. Kaehr et al. showed 4.4. Focussed ion beam direct writing
the possibility of activating multi-photon polymerisation through
a low cost frequency-doubled Nd:YAG (532 nm) laser with 3.5 mJ In FIB, the ion beam is generated from a liquid gallium source.
pulse energy. Two-photon excitation of aromatic amino acids and The ion beam energy is typically between 10 and 50 keV, with
bovine serum albumin (BSA) was demonstrated [45]. beam currents varying between 1 pA and 10 nA. When energetic
ions hit a surface, four mechanisms can take place: sputtering of
4.2.9. Laser contact-free trapping and transferring of particles in neutral and ionized substrate atoms, electron emission, displace-
solution for 3D direct writing ment of atoms in the solid and emission of phonons. For the DW
Laser tweezers can be used to force transparent particles in mode, the process requires the spraying on the substrate surface of
solution into the region of maximum light intensity. The a precursor gas. For the deposition of W, the organometallic
application is limited to cases where the object index of refraction precursor gas is W(CO)6 [93]. Other precursor gases are available
exceeds that of the surrounding liquid [3]. Laser-guided direct for the deposition of conductors such as Au, Al, Cu, Mo and Pt, and
writing can be realised by using a diode laser beam of 200 mW, insulators such as TEOS, TMCTS/O2, PMCPS/O2 [12,27,124].
830 nm wavelength, focused using a microscope lens to radially The principle of deposition is similar to LCVD except that FIB
trap and axially deliver particles to a non-absorbing surface. It is offers better resolution but lower deposition rate, typically
capable of guiding metal, silicon, polymer, bacteria and animal 0.05 mm3/s. The minimum feature that can be produced under
cells [78], embryonic chick neurons [77] and multi-potent adult the conditions used is 80 nm due to particle scattering and
progenitor cells [75] and endothelial cells [74] to various targets in migration of the carbon from the near-surface atmosphere prior to
2D and 3D formations. The principle employs the unbalanced deposition [73]. The minimum thickness is about 10 nm and aspect
momentum of the particles within the non-uniform laser beam ratios are between 5 and 10.
which drives the particles towards the higher energy concentra- FIB DW is a well-established tool for the repair of conventional
tion of the laser field. and phase-shift masks to add missing absorber materials. As
organo-metallic compounds are used for metal deposition, FIB
4.3. Discussion of laser direct writing deposits are not pure because of organic contaminants and Ga+
ions. Due to rather large carbon contents, the resistivity of these
Although there are many laser direct writing techniques deposits is generally about one to two orders of magnitude higher
available, each technique has its advantages and disadvantages than those of pure metal [26].
or limitations. LCVD allows 3D structures to be built but very FIB is a relatively slow process and its applications are restricted
slowly, although it is much faster than conventional CVD which to low volume production, especially repair work [72]. It is capable
builds at a few mm per hour. In most cases, the morphology and of conformal deposition and forming 3D micro-structures which
electrical conductivity of the deposited features are inferior to the can be used for hermetic encapsulation for micro-sensors.
bulk material, or the adhesion of the layer to the substrate is poor
and cannot be controlled. Gas phase deposition is limited by the
availability of volatile metal-organic or inorganic materials, 5. Flow-based direct writing
contamination of metal deposits and the need for specialised
reaction chambers. For example, it is difficult to find Cu gas 5.1. Precision pump method
precursors that would allow sufficiently high vapour pressure.
Although deposition can be carried out on various 2D and 3D forms The common property of processes grouped under flow-based
of substrates, the technique is not yet able to deposit on to organic DW is that they all require a positive mechanical pressure to
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 611

Fig. 23. Schematic diagram of MicroPen [121].

is 300 mm/s and the minimum speed can be 0.1 mm/s. The typical
speed is dependent on different material and applications; 50 mm/s is
normally observed [58].

5.2. Syringe and extrusion method


Fig. 21. The Smart Pump [59].
Another form of direct writing based on a micro-capillary tip is
achieve precision micro-dispensing through a positive displace- MicroPen which is the trademark of a DW system produced by
ment pump, air pressure or extrusion through a syringe. Unlike OhmCraft Inc. In operation, a flowable material which can be a
inkjet or aerosol jet DW where a line is formed from individual liquid or particulate slurry, is loaded into a syringe that is then
droplets, flow-based DW is characterized by a continuous flow of connected to the writing head of the MicroPen. A pneumatic ram
ink, paste or slurries on to the substrate. This group of methods compresses the plunger of the syringe and forces the material into
differs from the fused deposition method (FDM) in two main the writing head known as the ‘block’. The writing head consists of
respects. Firstly, there is no heating of the material, and secondly, a metal double piston cylinder, an A-frame fluidic pathway and
the volume of flow is much lower, in the order of nL/s. The two micro-capillary writing tip. Flowable material fed into the ‘block’ is
most well-known and established methods are known as nScrypt pressurized up to 13.8 MPa and dispensed through the writing tip.
and MicroPen, both of which are trademarks. The tip traverses perpendicularly on the surface of the substrate
nScrypt, formed in 2002, is based on Sciperio’s Micro-Dispense surface without direct contact. A schematic diagram of the
Direct Write (MDDW) technology developed through the DARPA MicroPen set-up is given in Fig. 23 [121].
(US Defence Advanced Research Projects Agency) MICE program The MicroPen uses an extrusional method for depositing
(Mesoscopic Integrated Conformal Electronics) in 2002. The core material and there are unique writing parameters for each pen
technology of the syringe-based DW system is a high precision orifice size, writing speed and paste material. The pressure
micro-dispensing pump with accurately controlled air pressure, required must overcome the frictional stresses at the wall and
timing, valve opening and dispensing height as shown in Fig. 21. the capillary force of the orifice as shown by the Benbow equation
Dispensing precision is enhanced with an integral suction function [8]:
which removes all residual materials sticking on the tip. It is
  D0 4L
capable of dispensing very small volumes of material, down to P ¼ 2 s y0 þ aV ln þ ðt 0 þ bV Þ (6)
D D
20 pL, and a range of viscosities from 1 to over 1,000,000 mPa s
[59]. where P is the extrusion pressure, sy0 is the initial tip orifice entry
The flowrate is sensitive to the dispensing height for a constant yield stress, a is the tip orifice entry yield stress velocity factor, V is
applied pressure as shown in Fig. 22. In order to maintain line the mean writing speed, D0 is the diameter of the chamber before
width consistency and accuracy, the dispensing height must be the tip, D is the diameter of the writing orifice, L is the length of the
maintained at above a certain value which is 50 mm in this case. In tip, t0 is the initial tip entry shear stress, and b is the orifice velocity
practice, a laser height sensor is employed to either pre-scan or factor.
scan the substrate surface in real-time to create a surface contour As the height of the pen tip is continuously sensed and its force
map. The dispensing tip is then controlled to following the contour can be controlled to tens of microNewtons levels, MicroPenning
map to maintain a constant height throughout the writing process. enables deposition on extremely soft surfaces with active topologies,
The line width is directly dependent on the material, which is including inflatables such as medical balloons. Any liquid material
often a slurry paste. Generally, the minimum line width is at least whose viscosity ranges between 5 and 500,000 mPa s is a candidate
10 times bigger than the biggest particle size in the specific paste. for MicroPen deposition. The line widths are in the range of 50 mm to
nScrypt is able to print any line width between 25 mm and 3 mm. 2.5 mm with a height from 1.3 to 250 mm. The system can also
The tolerance of the line width varies from 3% to 5% for line dispense individual dots with a volume as small as 100 nL. For an
widths of 150 and 75 mm, respectively. The maximum writing speed orifice of 50 mm, a writing speed of 25.4 mm/s has been used to write
functional silanes [28].
Other simple methods of precision micro-dispensing have been
developed such as the time-pressure needle dispensing system and
pin transfer. The time-pressure needle dispensing system normally
consists of a syringe containing a material which is deposited on to
the substrate via a needle through the action of air pressure on a
mechanical plunger.
Vozzi et al. analysed the time-pressure needle process with
several assumptions [112]. First, the driving pressure is the
predominant force in this system and the other forces such as the
surface tension between the fluid and air, dynamic friction
between the fluid and the glass substrate are negligible. Second,
the flow is laminar and third, the fluid is a Newtonian viscous fluid.
Fig. 22. The relationship of flow rate and dispensing height [59]. Under such conditions, the flow inside the capillary is given by
612 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Poiseuille’s equation, a theoretical model explaining DPN as a three-step process as


shown in Fig. 24a [44,66]. The three main steps are: molecular
pR4S d p deposition, lateral diffusion on a monolayer of molecules and
Q¼ (7)
8m dz finally termination of diffusion by chemical binding to a substrate.
where Q is the flow of fluid from the needle, Rs is the internal radius This will lead to the formation of well-ordered self-assembled
of the tip of the needle, m is viscosity of the fluid, and dp/dz is the monolayer (SAM) patterns.
applied pressure gradient. The heights of the DPN tips which are the same as for AFM, are
With further manipulation, the line width a of the direct usually about 3–10 mm. The diameter of the end of the tip can be as
writing is given as small as 10 nm which is a determining factor of the minimum
feature size that could be written on a surface [40]. Hong et al. have
pR4S d p demonstrated patterning of molecular structures of about 10 nm
a¼ (8)
8mv0 h dz via DPN [41]. In the normal DPN process, the tip is in direct contact
where v0 is the velocity of substrate with respect to the syringe and with the substrate with a contact force of about 1 nN. However, an
h is the height of the polymer deposited. oscillating DW mode is also used with the advantage of reducing
Using an air-pressure activated syringe at a pressure of the interaction between the AFM tip and the substrate.
50 mmHg, DW of poly-L-lactic acid (PLLA) and polycaprolactone DPN is a scalable, high-throughput, flexible and versatile
(PCL) with line widths of 10–20 mm was achieved with a needle method for precision nano-scale pattern formation. In 2006,
of 20 mm internal diameter. It was also reported that the viable Salaita et al. fabricated a massively parallel NDP 2D array with
range of polymer viscosity should be within 100–700 mPa s. 55,000 tips across a 1 cm2 chip using photo-lithographic techni-
Low viscosity solutions leak out of the tip whereas highly viscous ques. This array was demonstrated to generate 88 million gold dots
solutions require pressures that may damage the tip and be a with a pitch distance of 400 nm and a diameter of 100  20 nm
danger to the operator [112]. [96]. With a throughput rate of 3  107 mm2/h, the 2D array
technique is able to compete with e-beam lithography. DPN is the
6. Tip-based direct writing only sub-50 nm technique that can directly deposit molecules under
ambient conditions because its environmental process controls
6.1. Dip-pen nanolithography (DPN) allows precise control over many varieties of ink deposition.
The original DPN technique has been limited by an inability to
Dip-pen Nanolithography which is a general nano-scale direct turn the ink flow on and off. Existing dip-pens apply ink as long as
writing or nano-patterning method, was first demonstrated by they remain in contact with a surface. The thermal DPN (tDPN)
Mirkin’s group at Northwestern University in 1999 [85]. DPN is a method developed by Sheehan et al. solves that problem by using
trademark of NanoInk. The vehicle for deposition can include easily melted solid inks and a special AFM cantilever with built-in
pyramidal scanning probe microscope tips, hollow tips, and even resistive heater that allows writing to be turned on and off at will
tips on thermally actuated cantilevers. [101,102]. This approach allows the local deposition of molecules
Basically, DPN consists of the dipping of an AFM probe in an which are not mobile at ambient temperature and controls the rate
‘ink’. The ink is transferred to the substrate by capillary transport. at which they are deposited. The cantilever has a heating time in
Inks such as proteins, polymers, DNA and active enzymes have the range of 1–20 ms and a cooling time in the range of 1–50 ms
been used to create nanometric patterns. Jang et al. presented and the temperature could reach 700 8C [50].

6.2. Nanofountain pen

Nanofountain pen (NFP) was developed by Espinosa and is


similar to DPN except that the AFM tip is replaced by a cantilevered
nanopipette [49]. The pipette is filled with the solution to be
deposited and the liquid flows to the substrate when the pipette is
placed in contact with the surface, as shown in Fig. 25. NFP has
been used to deposit proteins, active enzymes, DNA and polymers.

Fig. 24. (a) DPN Process with weak surface binding [66]. (b) Deposition of a Fig. 25. (a) Schematic diagram of the nanofountain pen. (b) SEM of the dispensing
monolayer of molecules by DPN. tip [49].
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 613

Table 2
List of some materials used in direct writing applications.

Material class Examples

Alloys Al alloys, Pt–Ru, Ag–Pd, Cu–Ni, Sn–Pb solders


Biomaterials Living neural cell, peptides, proteins, antibodies, DNA oligomers, simple eukaryotic cell, mammalian cells,
Escherichia coli bacteria, enzymes
Ceramics Al2O3, SiO2, PZT, TiO2, ZrO2
Dielectrics Barium titanate, barium strontium titanate, PMN/glass ferrites, polyimide
Food Chocolate
Metals Ag, Al, Au, Cu, In, Pt, Sn
Nanoparticle materials Ag, Au, Cu, BaTiO3, Carbon nanotubes, Fe3O4
Optical materials Silicate glass, Epoxy resin
Oxides YBaCuO, BiSrCaCuO, InOx
Polymers PTF-epoxy + carbon + titanate, biodegradable polymer (PLGA), organic light emitting polymer, conductive polymers
(e.g. PEDOT:PSS, polyaniline), organic semiconductors, UV-curing polymers
Resistors Ag/Pd/glass, ruthenate
Speciality Diamond

Quartz nanopipettes can have an outer diameter of 10 nm and an in transferred materials [63]. A common approach is to use poly-
inner hole as small as 3 nm. A typical line width is about 40 nm dispersed powders so that smaller particles will fill the interstitial
which is about the size of the smallest virus found in nature. Lewis gaps between the larger ones. However, the use of nano-powders
et al. demonstrated the DW of a line of 1.15 mm line of cyanide on a will require special safety considerations due to their high surface
chrome film at a speed of 0.4 mm/s [56]. Deposition of a 20 mm energy and possible toxicity.
diameter dot of a fluorescein with a 600 nm aperture pipette was A very wide range of substrates have been used in DW, for
reported [7]. More recently, Moldovan et al. demonstrated that this instance ceramics, plastics such as PVC, mylar, nylon, polyimide,
process was scalable with the construction of a linear array of 12 PEEK, polystyrene, metals such as 304 stainless steel, aluminium,
probes producing sub-100 nm features [71]. copper and nitinol. Some unusual substrates include compliant
Hwang et al. showed that the line width Lf produced by NFP medical balloons used in association with the MicroPen [121].
consisted of two components including detailed analysis of each All those materials which are compatible with the substrate and
component: could form a proper bond with or without post-processing such as
surface curing could be used as materials for DW. In this sense, a
Lf ¼ Lt þ Ld (9) very wide range of materials have been reported as used in DW.
Table 2 shows the various classes of DW materials with some
Lt is the line width due to the tip and is directly affected by the representative examples. In addition, adhesives, electrolytes,
acceleration and initial mass of the meniscus. Ld is the additional lubricants, pharmaceuticals, radio-opaque materials and surfac-
line width due to diffusion of ink but can be affected by ambient tants have also been used for DW applications.
conditions such as temperature and humidity [43].
7.2. Materials used in inkjet direct writing
7. Materials
Inkjet technology has been used to deposit a very wide range of
7.1. General properties and types of materials used in direct writing materials, for many different applications, with the only restriction
being that the material must be in liquid form with appropriate
The provision of high quality and consistent materials is a pre- rheological properties at the point of printing. Materials which
requisite for all DW processes. The starting materials, sometimes have been printed include metals, ceramics and artificial polymers,
termed ink, slurry or paste may consist of combinations of as well as various biological materials including living cells.
powders, nano-powders, flakes, surface coatings, organic precur- Possible routes to metallic deposits include the direct deposi-
sors, binders, vehicles, solvents, dispersants, and surfactants which tion of liquid metals, printing of metallic particles followed by
require customized chemical and rheological properties. These sintering, and printing of a chemical precursor which is then
materials have applications as conductors, resistors, and dielectrics further processed to generate the metal. An early application for
and have been developed specifically for very low-temperature the direct printing of liquid metal was to form solder droplets for
deposition from less than 200–400 8C. Low-temperature proces- chip connection bumps, via filling, connector tracks and rework on
sing will allow fabrication of passive electronic components and electronic printed circuits [62]. Metals with higher melting points
radiofrequency devices with the performance of conventional pose significant challenges for printhead design, and although
thick-film materials, but on low-temperature flexible substrates, piezoelectric drive may still be useful for both CIJ and DOD,
such as plastics, paper and fabrics [87]. precautions must be taken to isolate the transducer from the high
For full process control and maintaining repeatability, a long list melt temperature; other actuation methods have also been used,
of material parameters has to be considered, e.g. viscosity, other such as direct pneumatic ejection in DOD printing [14]. The
rheological properties, melting temperature, mean particle size, deposition of aluminium, both pure and alloyed, has been
surface tension, wetting properties, particle size distribution, demonstrated in a droplet-based net-form manufacturing process
particle morphology, specific heat, thermal conductivity, density in which the drops are generated and deflected by piezoelectric CIJ
emissivity, diffusivity, reflectivity, solids loading, substrate mate- technology, with drops 190 mm in diameter being generated at
rial, sintering rate parameter and porosity [87]. 17 kHz, corresponding to a mass throughput of 1.5 kg/h [61].
Powder is a very common precursor for direct writing and its Metallic particles suspended in a suitable fugitive liquid can be
properties have a direct influence on the DW product. For spherical printed by inkjet processes, and are used for both structural and
powders, the highest possible packing density is about 74% for the electrical applications. Small particles are generally favoured as the
face-centred cubic or hexagonal close-packed structure. For suspensions are more stable, i.e. the particles do not sediment,
random close-packed powders, it is even lower at about 64% nozzle clogging is avoided and very importantly, the high surface to
[90,109]. This means that there will be at least 26% voids in the volume ratio leads to a lowered sintering temperature. There is
structure. According to the logarithmic mixing rule for dielectrics, considerable interest in the development of conductive nanoparticle
26% air reduces the effective dielectric constant by almost an order inks with good properties, oxidation resistance and low sintering
of magnitude, highlighting the importance of reducing the porosity temperatures [82]. Inks based on silver nanoparticles, typically 5–
614 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Fig. 26. Application examples of direct writing [25].

50 nm in size, for example can be sintered to form deposits of high of the drop edge, followed by subsequent full curing, perhaps after
electrical conductivity at temperatures below 300 8C, and even as further layers of material have been printed.
low as 150 8C, and are then compatible with many polymer
substrates and other printed polymeric materials [32]. Conductive 7.3. Materials used in aerosol jet direct writing
inks in which the solvent does not evaporate but cures to form a
binder will lead to lower conductivity, but this is sometimes The aerosol is formed from a liquid precursor material and the
desirable, an example being the use of carbon nanotubes in a droplet size is usually between 1 and 5 mm. The particulate
polymer matrix for the in situ fabrication of resistors. suspension is dependent on the mode of atomization, i.e. ultrasonic
Various indirect methods of achieving metallic conductive or pneumatic. For the ultrasonic method, nanoparticle suspensions
deposits by inkjet printing exist. One is to print a precursor, a and high vapour pressure solvents are used and the range of
solution of a compound of the metal, usually silver, which is then viscosity is up to 30 mPa s. For the pneumatic method, nanopar-
decomposed by heating. For example, inks based on silver nitrate ticles can be used in suspension up to a viscosity of 2500 mPa s. The
and on an organic silver compound have been successfully CIJ range of materials that can be deposited is very wide including
printed and processed to yield conductive metallic deposits [69]. metals, alloys, resistors, dielectrics, battery materials, polymers,
An alternative approach is to print a non-conductive but adhesives, organic electronics and biomaterials.
chemically active deposit which is then subjected to a secondary It is well known that the physical and mechanical properties of
treatment in a low-temperature plating bath of copper ions, the DW line are different from the bulk material. As an example,
leading to autocatalytic deposition of copper on the printed areas; Marinov and Atanasov applied M3D to deposit a silver ink which
excellent conductivity can be achieved and the low process contained 57–62 wt.% of Ag nanoparticles with an average size
temperature is a significant advantage for some applications. smaller than 50 nm. The deposits were then sintered on a hot plate
Long-chain polymers cannot be printed as they are by inkjet at 200 8C for 60 min. It was found that the average bulk resistivity
processes, since even as a melt their viscosity is usually too great, of the conventional M3D lines was 9.2 mV cm compared to bulk
and alternative routes are needed to produce polymeric deposits silver of 1.6 mV cm [67].
[11]. They can be dissolved or colloidally dispersed to form a latex
in suitable solvents, but even in solution the presence of a small 7.4. Materials used in laser direct writing
concentration of high molecular weight polymer may introduce
sufficient viscoelasticity to inhibit good droplet formation [23]. Almost any materials can be deposited by laser-based direct
Waxes, with molecular weights of a few hundred Daltons, do form writing. In the 1980s and 1990s, most materials deposited were
jettable melts, and can be used for some applications such as mask inorganic including various metals, semiconductors and ceramics.
printing and rapid prototyping. Common routes to the printing of Since 2000, more focus has been placed on depositing biomaterials
polymeric deposits include the use of solvent systems and UV- based on LIFT and MAPLE DW.
curing. Electronically functional polymers, such as conductors Deposition by LCVD from the gas phase normally results in single
(e.g. conjugated polymers such as PEDOT:PSS and polyaniline), element metallic materials such as Al, Si, W and diamond-like
semiconductors and polymer light-emitting diode (PLED) materi- carbon from their gas precursors such as trialkylamine alane
als, can be DOD printed in solution. There is major commercial (C2H5)3NAlH3 (TEAA), silane, tungsten hexafluoride WF6 and
interest in printing organic semiconductors, for such applications ethylene, although it would be possible to deposit metal
as display backplanes, and also in fabricating large-area PLED oxides, nitrides and carbides, such as Al2O3, SiN, WC, by intro-
displays [23]. An important challenge in electronic applications, for ducing O2, N2 gases or gas mixtures in the reaction chamber. Due to
best performance, is to achieve solid deposits which are as flat as the high temperature of the process, the substrate is normally an
possible. There is a natural tendency for solutes to deposit from inorganic material such as a metal or metal oxide, ceramic or
evaporating drops of solution towards the rim of the drop, the semiconductor.
‘coffee stain effect’, and special measures, for example through the Thin solid film consolidation and backward transfer techni-
use of mixed solvents, must be taken to reduce this effect. ques are applicable to depositing inorganic materials such as
For structural or optical applications, or to achieve dielectric metals, ceramics, composites and semiconductor materials on
properties, thermoset polymers can be cross-linked in situ after inorganic substrates. LEEP allows the deposition of both metallic
printing, by thermal treatment or often by UV-curing a formula- and ceramic materials, on both conductive and insulating
ted ink containing a photo-initiator; UV-curing is increasingly substrates. Materials such as Ni, Au, and Pt, can be deposited
common in graphical printing applications, and can involve a brief from nickel acetate, HAuCl4 and H2PtCl6. Laser-activated electro-
‘pinning’ exposure immediately after printing to arrest migration plating is limited to metallic materials only.
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 615

LIFT and MAPLE DW allow the deposition of most known tors, semiconductor ICs and interconnects into the circuit board and
materials on to both organic and inorganic substrates due to the micro-batteries. Other typical DW applications include semicon-
lower temperature operating conditions of the process, through ductor packaging for direct-die attach, flip chip, CSP; solder
the introduction of organic binders and sacrificial materials. The bumping, underfilling and encapsulation; high-density traces for
functional materials that have been successfully deposited include flat panels, solar cells, PCBs [38]. In inkjet DW, both CIJ and DOD
metals and alloys, ceramics, composites, polymers, semiconduc- methods have been used to achieve solder drops from tens to
tors, cells, and genetic material, e.g. Cu, Au, Ag, Ni, NiCr, YBaCuO, hundreds of micrometres in diameter, with the capability to produce
BiSrCaCuO, Sn, SnO, polypyrrole, BSA, BaTiO3, SrTiO3, Y3Fe5O12, continuous lines and tracks as well as discrete spheres or dots as
DNA and eukaryotic cells. shown for example in Fig. 27. Fig. 28 shows a resonant inductor
Multi-photon polymerisation mainly uses photo-sensitive printed by DOD with five layers of silver nanoparticle ink.
materials such as ORMOCER, although other powder materials In laser-based DW, MAPLE DW has been used to fabricate
can be embedded into the polymer matrix [99]. The same micro-solenoids and electromagnets and embedded electronic
technique is able to create protein cross-linking for example in circuits in polyimide substrates [118]. The 3D circuit occupies
bovine serum albumin [45]. Laser tweezer and laser-guided about 1/5 of the foot print and 1/10 of the thickness of a normal
protein cross-linking are suited to small organic and inorganic printed circuit board. This represents a volume reduction factor
particles in a liquid environment. of 0.1–0.01 [86]. LIFT has been used to fabricate Li- or Li-ion micro-
batteries, which must be electrically insulating, ionically conduct-
8. Scope and examples of direct writing applications ing, and chemically and thermally stable [80]. Laser direct
write using the LIFT technique has enabled the deposition of
Direct writing applications cover very wide sectors of industry thick-film electrodes such as LiCoO2 cathodes and carbon anodes
including micro-electronics, MEMS, optics, pharmaceutics and on metallic collectors. The micro-batteries fabricated in this way
biomedical engineering because of the multi-length scale from have demonstrated a significantly higher discharge capacity,
nano-, micro- to meso-process capabilities. The scope of applica- power and energy densities than those made by sputter-deposited
tion is also enhanced by the vast range of materials and process thin film techniques. This increased performance is attributed to
simplicity. In addition, the substrate topologies can be flat, round, the porous structure of the laser-printed electrodes, which
flexible, inflatable, irregular and 3D. An overview of DW products is allows improved ionic and electronic transport through the thick
shown in Fig. 26. electrodes of about 100 mm without a significant increase in

8.1. Micro-electronics industry

Applications of direct write in the electronic industry includes


embedded devices such as resistors, capacitors, inductors, transis-

Fig. 27. Example of solder bumps (70 mm diameter) deposited by DOD inkjet
printing on to an integrated circuit test substrate [37]. Fig. 29. (a) Conformal Direct writing of an RF frequency selective pattern. (b) Details
of the silver line pattern [105].

Fig. 30. Prototype ceramic impeller 28 mm in diameter formed by direct DOD inkjet
printing with a suspension of 40 vol.% alumina particles in a wax-based suspension,
Fig. 28. Inductor fabricated with silver nanoparticle ink by piezo-DOD printing [32]. followed by sintering [1].
616 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

internal resistance [48]. LEEP has also been applied to plating of


micro-scale copper wires [13].
The exploitation of conformal electronics is represented by the
direct writing of epoxy loaded Ag on to a glass fibre substrate and
then cured at 120 8C for 10 min using a 24-mm tip on an nScrypt
system. The pattern produced is a band stop periodic structure for
10 GHz as shown in Fig. 29 [105]. Apart from production, DW is
also valuable for the repair of high value micro-electronic parts.
Repair of photomasks by FIB which has a placement accuracy of
less than 75 nm is well established [26]. DW methods such as DPN
and M3D are also applied to the repair of flat panel displays.

8.2. Mechanical engineering

Inkjet printing can be used in rapid prototyping by depositing a


binder fluid on to a ceramic powder bed; ceramic particles can also
be directly deposited by printing a suspension. With an evaporat- Fig. 32. Array of micro-lenses fabricated by DOD inkjet printing from epoxy resin
ing solvent, the maximum concentration of solids which can be [http://www.microfab.com].
achieved in a jettable suspension appears to be low (perhaps
10 vol.%), but demonstrator components have been made by direct
inkjet printing in several ceramics, including zirconia, titania, and
PZT [23]. By using a phase-change ink that solidifies on impact a
much higher solids content, as high as 40 vol.%, can be attained.
Fig. 30 shows an example of an alumina component fabricated in
this way [1].

8.3. Micro-engineering

Inkjet printing can be used to produce ordered 2D arrays of


ceramic particles by a self-assembly process in which the
differential evaporation of mixed solvents plays a critical role, as
shown in Fig. 31 [83]. As this method produces uniform deposits
Fig. 33. Optical waveguide system printed by DOD inkjet on a glass substrate; the
without segregation, it may be useful in next-generation photonic,
waveguides are 100 mm wide [http://www.microfab.com].
electronic and display devices. As with metallic films, certain
ceramic materials can be produced from printed precursors; an
example is the dielectric ceramic barium strontium titanate which of optical waveguides on a glass substrate by the same process. A
has been deposited by printing a metal-organic precursor on to a process combining LIFT operating in a vacuum chamber and
ceramic substrate, followed by pyrolysis and annealing, to form a chemical treatments in zinc nitrate hexahydrate was used to
capacitor structure [47]. deposit and grow nano-ZnO rod arrays on a Si substrate.
High-pressure LCVD has been used to produce micro-springs Photoluminescence shows strong green-yellow emission centred
and coils with fibre diameters of 5–240 mm [118]. Laser DW has at 570 nm [51]. The use of LCVD for the growth of 3D Al2O3 for
also been applied for the production of 3D micro-cages for electric photonic band-gap structures has been demonstrated by Wanke
trapping of small particles including cells [106]. An unusual et al. [114]. It has the potential to totally reflect electromagnetic
application is the 3D nano-structuring of hybrid materials by two- radiation in a band of frequencies propagating in any direction,
photon polymerisation demonstrating micro-art work, such as the acting as a perfect mirror.
micro-Venus [99].
8.5. Biomedical and life sciences
8.4. Optics
Tissue architecture is complex, characterized by multiple cell
The use of inkjet DW for micro-optics applications is now well types and matrix components precisely organized in three-
established. For instance, Fig. 32 shows the volume production of dimensions. Loss of tissue architecture due to trauma or diseases
micro-lenses by DOD inkjet printing and Fig. 33 shows the printing leads to loss of tissue function. An important advance in tissue
engineering would be the ability to organize multi-cell types in the
well-defined three-dimensional architecture of the native organ, in
essence reconstructing the tissue from its cellular and matrix
components [74]. Laser-guided direct writing has been used to trap
and deliver cells with micrometer resolution on to arbitrary surfaces,
including biological gels. For example, human umbilical vein
endothelial cells have been deposited in two and three dimensions
by laser-guided direct writing [74]. MAPLE DW has been applied to
deposit hydroxyapatite-osteoblast-like cell composites for building
tissue scaffolds. This is known as bioactive ceramic, because it is able
to form strong chemical bonds with adjacent tissues [24]. Osteoblast
cells attach, proliferate and differentiate on these materials. MAPLE
DW has also been used to transfer MG 63 osteoblast cells. DNA has
been deposited using LIFT and MAPLE DW. A scaffold of
5.4 mm  5.4 mm  3.5 mm with a strut thickness of 100 mm
was built in PCL using nScrypt system [60].
Fig. 31. Two-dimensional array of silica microspheres deposited in suspension by Both inkjet and nScrypt methods have been applied to write
DOD printing [83]. fractal antennas on to living creatures. The advantage of fractal
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 617

which result from the processes of jet formation and break-up are
clear, but there is further scope to extend the range of fluids which
can be printed, for example to achieve high concentrations of solid
particles or polymer; better understanding of the printing of non-
Newtonian fluids would be helpful. Conductive inks with lower
cost, which achieve high and stable conductivity deposits with
long lifetimes would find a ready market. There are wide
opportunities for further development of functional optical,
magnetic, optoelectronic and semiconducting materials in forms
amenable to inkjet printing, which is ideally suited to the precise
deposition of very small volumes of special materials. With the
development of new methods of droplet generation, e.g. electro-
static, and better awareness of the process and its capabilities, it is
likely that the applications of inkjet printing in direct-write
manufacturing will become much broader.
Fig. 34. Direct writing of an antenna on to a live ant. The line width of the antenna is
25 mm [58]. In the case of laser-based direct writing, further developments
are necessary to overcome the limitations discussed in Section 4.3.
antennas is wide bandwidth and size reduction with no loss in Commercialization of the laser-based direct writing techniques is
gain. The former process has been applied to a butterfly wing and slow due to the high cost of the systems, limitations in depositing
the latter application to an ant is shown in Fig. 34. DW will play a materials and substrate dimensions. To speed up commercializa-
significant role in the integration of materials and devices in high tion, faster deposition rates and reduction of the cost of the
value new bio-product development. New next-generation pro- equipment would be desirable. Compared to electron beam and
ducts aimed at biological and pharmacological therapies, as well as focused ion beam, the resolution of laser-based direct writing
smart devices and multi use medical devices are anticipated in the techniques is diffraction limited and therefore it would be difficult
near future [121]. to achieve a dimensional resolution below 100 nm without major
breakthroughs in the science and technology of lasers and optics.
8.6. Nanomanufacturing
10. Conclusions
Tip-based DW methods have opened up new nano-scale
applications due to their unique ability to deposit SAM patterns. Direct writing is a new class of additive materials processing
Typical applications include: generation of nano-structures with techniques which are uniquely characterized by their flexibility,
Au or Si; chemically directed assembly and patterning templates ability to handle a vast range of materials including living cells,
for either bioactive molecules, e.g. proteins, viruses, etc. or scalability and exceptional multi-length scale capabilities. Direct
inorganics, e.g. carbon nanotubes, quantum dots; deposition of writing employs numerous energy modes and material transfer
pharmaceuticals, and nano-scale surface feature patterning. New mechanisms to deposit functional materials precisely and digitally. It
applications in nano-scale sensors, molecular electronic and is the only group of additive materials processing methods which can
photonic devices are being developed [22,79,103]. cover the length scale from nanometres to millimetres. While a fair
amount of fundamental scientific investigations have been under-
9. Challenges in direct writing taken, full and accurate process modelling and optimization remain
to be pursued, which will require a multi-disciplinary approach.
There are a number of generic challenges in direct writing The provision of high quality materials of consistent properties
technology. First, there is a strong need to gain deeper under- is a pre-requisite for direct writing. Consolidation methods for the
standing of the processes with more quantitative process deposited materials to meet functional performance requirements
parameter relationships to be developed. This will produce more exist for low temperature deposits but search for more efficient
accurate and reliable process modelling leading to eventually curing methods still continues. Among the entire group of DW
process optimization. Second, improvements in adhesion, surface processes, inkjet DW is the most established followed by laser DW
finish and resolution of the deposited materials would be in terms of industrial applications. New and emerging DW
beneficial. Third, faster deposition rates are required to enable processes such as flow-based DW have huge application potential.
commercialization of some techniques which are still mainly Tip-based DW offers attractive capabilities of nanomanufacturing
laboratory-based. Finally, support is needed for the formulation of and biomanufacturing. The growth of DW is reflected by the
the feed materials from a given set of functional performance increasing number of DW systems which range from low-cost to
criteria. Other specific technical challenges which need to be high-cost, from 1D to 3D and conformal writing.
overcome include the following examples: The benefits of DW are plentiful, particularly in cost reduction
for prototyping and production, process chain simplification
 Measurement of the physical properties of the materials laid through the reduction of process steps, and greater design freedom
down by direct writing technologies because of the small size due to its geometrical versatility. As the material is deposited on an
and limited amount of materials available [73]. on-demand basis, material wastage is minimal and the impact on
 The need to maintain edge acuity and elimination of necking at environmental footprint is low. In application, DW has a very wide
micro- or nano-level. application window from prototype evaluation to high-throughput
 Precision on-off control of droplet-based and tip-based DW production. New applications are being announced regularly as
process. this is still an emerging technology area. Niche applications in
 Scalability for high-throughput production. micro-electronics, microsystems packaging, and medical devices
 Complexity and control requirements for integration arisen from have already been identified.
large parallel DW system, for instance, in DPN. Key challenges for DW are the development of new design rules,
process modelling and optimization, integration issues for micro-
For the widely used versatile inkjet-based direct writing system applications, metrology and evaluation of functional
methods, there are many aspects which require further research performance of DW lines and structures. With increasing develop-
and development. Improved models for jet and drop formation, ment in micro- and nano-systems combining biological, electronics,
drop impact and drying/curing would assist with process and fluidics and optical functions, DW will play a significant role and will
material design. Some intrinsic limitations on fluid properties form a new paradigm in this technology trend.
618 K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620

Acknowledgements Khirotdin and Susan Xu of Liverpool University, Dr. Martin Hedges


of Neotech; Dr. Bo Li and Dr. Ken Church of nScrypt Inc.; Tom
The authors would like to acknowledge the contributions from Levesque of NanoInk Inc. and Dr. Graham Martin of Cambridge
the following in the preparation of this paper: Rd Khairilhijra University, Inkjet Research Centre.

Appendix A

Summary of direct writing process characteristics excluding laser-based methods.


Process Methods Mechanisms Line width (Lw) or droplet Deposition rate or Materials
characteristics dia. (Dd) writing speed

Droplet Inkjet continuous Deposition of liquid Lw from 20 mm to >5 mm. To 60 mm3/s with Liquid with viscosity
droplets, generated by Dd from 10 to 150 mm, a single nozzle 2–10 mPa s; can contain
break-up of continuous jet typically 120 mm small particles
Inkjet drop-on- Deposition of liquid Lw from 20 mm to >5 mm. To 0.3 mm3/s with Liquid with viscosity
demand droplets, generated Dd from 10 to 150 mm, a single nozzle 10–100 mPa s; can contain
individually when required typically 50 mm. small particles
Aerosol jet Kinetic bombardment Lw from 5 mm to 5 mm. Dd 0.25 mm3/s with Any materials that can be
of atomized droplets from 20 nm to 5 mm a single nozzle atomized plus biomaterials
such as cells

Flow Pump Precision micro-dispensing Lw from 25 mm to 3 mm Max vw is 300 mm/s, Liquid, paste and slurry
pump with suck-back typically 50 mm/s materials up to
action 1,000,000 mPa s
Extrusion Syringe-based and flow Lw from 50 mm to 2.5 mm Typical vw is 25.4 mm/s Liquid, paste and slurry
distribution block materials up to
500,000 mPa s

Tip Dip-pen Molecular deposition via an Lw from 10 nm to a few mm Typical range is Molecule thiol, macromolecule,
nanolithography AFM tip 0.2–5 mm/s nanoparticles
(DPN)
Nanofountain Capillary action of Lw from 40 nm to over Typical vw is about Monomer, nanoparticles
pen (NFP) micro-pipette and the 1.15 mm 0.4 mm/s
substrate

Energy beam Focussed ion Ion-induced deposition of Lw from 80 nm to 20 mm Typical deposition rate Metals and insulators
beam (FIB) precursor gas molecules is 0.05 mm3/s

Appendix B

Summary of laser-based direct writing process characteristics.


Precursors or Methods Mechanisms Line width or Deposition rate or Materials
feed material droplet diameter writing speed

Solid Thin film consolidation Melting, fusion onto substrates 10–50 mm 10–2000 mm/s Metals/ceramics on metal/ceramic
substrates
LIFT and MAPLE DW Transfer of material by kinetic 10–100 mm Typically Metals, ceramics, semiconductors,
energy of vapourising organic 3–50 mm/s, polymer, composite, cells, etc.
binders up to 500 mm/s
Backward transfer Physical vapour/liquid 5–200 mm 10–100 mm/s Metals and ceramics on transparent
deposition after laser substrates
irradiation through transparent
medium

Liquid LEEP Thermal decomposition of the 2–12 mm 0.1–80 mm/s Metals and ceramics on inorganic
liquid substrates
Laser-activated Accelerated chemical reaction 0.1–300 mm Typically 0.1–10 m/ Metals on metallic substrates
electroplating by local high temperatures s, up to 2.5 m/s

Gas LCVD Decomposition of gases after 1–20 mm Typically Metals, semiconductors and
vapourisation and 50–200 mm/s, ceramics such as Al, W, Si, Al2O3,
condensation takes place up to 5 mm/s WC

Cells/DNA Trapping-guidance, Momentum balance 0.1–10 mm 10–300 mm/s Cells, small particles in liquid
tweezer
LIFT, BioLP and Laser heating of sacrificial Dd from 30 0.1–10 droplets Cells, polymer, genes, tissue
MAPLE DW material causing, deformation, to 100 mm per second materials, etc. on any substrates
vapour, propelling the liquid
containing biomaterials
K.K.B. Hon et al. / CIRP Annals - Manufacturing Technology 57 (2008) 601–620 619

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