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Geiersbach 2003
Geiersbach 2003
Received 2 September 2002; received in revised form 29 October 2002; accepted 17 November 2002
Abstract
We report on the preparation of thin films and multilayers of the intermetallic Heusler compound Cu2MnAl, Co2MnSn,
Co2MnSi and Co2MnGe by r.f.-sputtering on MgO and Al2O3 substrates. Cu2 MnAl can be grown epitaxially with (1 0 0)-
orientation on MgO (1 0 0) and in (1 1 0)-orientation on Al2 O3 a-plane. The Co-based Heusler alloys need metallic seedlayers to
induce high quality textured growth. We also have prepared multilayers with smooth interfaces by combining the Heusler
compounds with Au and V. An analysis of the ferromagnetic saturation magnetization of the films indicates that the Cu2MnAl-
compound tends to grow in the disordered B2-type structure whereas the Co-based Heusler alloy thin films grow in the ordered
L21 structure. All multilayers with thin layers of the Heusler compounds exhibit a definitely reduced ferromagnetic magnetization
indicating substantial disorder and intermixing at the interfaces.
䊚 2002 Elsevier Science B.V. All rights reserved.
1. Introduction (AsCu, Co, Ni, BsMn, Fe«, XsAl, Ge, Si) w5x. The
basic ordered Heusler structure is a cubic lattice (space
The new, rapidly evolving field of magnetoelectronics group Fm3m) with four interpenetrating fcc sublattices
w1x started an upsurge of interest in ferromagnetic metals occupied by A-, B- or X-atoms, respectively. There are
with full spin polarization at the Fermi level. In principal several structural variants of the Heusler unit cell with
these so-called half metallic ferromagnets are ideal for different degrees of site disorder of the atoms on the
applications in tunnelling magnetoresistance (TMR) w2x A-, B- and X-positions. Among them the B2 structure
or giant magnetoresistance (GMR) w3x elements and as with a random occupancy of the B- and X-position and
electrodes for spin polarized current injection into the completely disordered bcc structure with a random
semiconductors. occupancy on the A-, B- and X-positions w5x.
Half metallic ferromagnetic alloys are scarce, since The ferromagnetic half metals known from theoretical
usually the s- and p-type valence electrons contribute electron energy band structure calculations are the com-
both spin directions at the Fermi level. From electronic pounds PtMnSb and NiMnSb w6x (so-called half Heusler
energy band structure calculations one knows several compounds since one A-sublattice is empty) and the
ferromagnetic oxides like CrO2 w4x and La1yxSrxMnO3 compounds Co2MnSi and Co2MnGe w7x. Co2MnSn and
w1x. Until now there are only a few intermetallic com- Co2MnSb in a strict sense do not belong to this group,
pounds known to have this unique property, all belong- since they possess only approximately 90% of spin
ing to the Heusler group with the general formula A2BX polarization at the Fermi level, but they can be made
half metallic ferromagnets by alloying w8x.
*Corresponding author. Tel.: q49-23-4322-3621; fax: q49-23-
4321-4173. In recent years the properties of thin films of the half
E-mail address: kurt.westerholt@ruhr-uni-bochum.de Heusler compounds PtMnSb and NiMnSb have been
(K. Westerholt). studied intensely by several groups in order to elucidate
0040-6090/03/$ - see front matter 䊚 2002 Elsevier Science B.V. All rights reserved.
PII: S 0 0 4 0 - 6 0 9 0 Ž 0 2 . 0 1 0 9 1 - X
226 U. Geiersbach et al. / Thin Solid Films 425 (2003) 225–232
their potential in the field of magnetoelectronics w9x. as sputter gas. The base pressure of the sputtering system
These compounds have also been tested already in TMR- was 5=10y8 mbar, the sputtering rate was 0.04 nmys
and GMR-thin film devices w10x, however, with only for the Heusler compounds, 0.06 nmys for Au and 0.03
moderate success until now. The main difficulty one nmys for V. For the growth of pure Heusler alloy thin
encounters when preparing thin films of the half Heusler films the temperature of the substrates was 470 8C, the
compounds is a high degree of site disorder. This leads, multilayers were grown at a temperature of 300 8C. A
on the one hand, to strong electron scattering and a low systematic change of the process parameters showed
electron mean free path which has a negative influence that these values gave the best structural results.
of the amplitude of the GMR w11x. On the other hand, Heusler alloy targets with 10 cm diameter have been
it is expected that the site disorder destroys the full spin made from single phase, stoichiometric ingots prepared
polarization at the Fermi level, which theoretically has by high frequency melting of the components in high
been predicted only when assuming perfectly ordered purity graphite crucibles. The thin films of the present
A2BX structure with pure L21 type of site symmetry study were grown on a-plane sapphire substrates or
w12x.
MgO (1 0 0)-substrates which were carefully cleaned
The half metallic ferromagnets from the Heusler group
and ion beam etched prior to deposition.
Co2MnGe, Co2MnSi, and Co2MnSn1yxSbx found much
During the sputter deposition process of the multilay-
less attention in the experimental literature until now.
Recently, two groups published first investigations of ers the substrates were moved automatically between
GMR elements using Co2MnSi w13x and Co2MnGe w14x. the two targets of the dual source discharge. After
Similar to the results on the spin valves based on the finishing 30 periods of the multilayers we deposited a 2
half Heusler compounds the amplitude of the GMR was nm thick Au-cap layer at room temperature for protec-
found to be very low, the reason for this was not clear. tion against oxidation. We usually prepared series of 10
We have presented our first experimental results on thin multilayers simultaneously within the same run with
films of the Co-based Heusler compounds in Ref. w15x. either the thickness of the Heusler compound or the
In this paper, we present in the first part a detailed study thickness of the other metal varied. The thickness
of the preparation and structural properties of thin films covered typically a range between 0.6 and 3 nm for
of the Heusler phases Co2MnSi, Co2MnGe, Co2MnSn each component. For preparing the constant layer thick-
and Cu2MnAl. The latter Heusler phase is a ferromagnet ness the substrate holder was rotated in the symmetric
but not half metallic w16x. We use it as a reference position above the target, for the preparation of the
compound and as a seedlayer for improving the growth variable thickness we made use of the natural gradient
of the Co-based Heusler alloys. of the deposition rate when the substrate holder is in an
In the second part of the present paper we report on off-centric position.
multilayers prepared by combining thin layers of two The stoichiometric composition of our thin films was
different Heusler compounds and Heusler compounds controlled using quantitative electron microprobe anal-
with nonmagnetic metals. Multilayers with Heusler com- ysis. For Co2MnSi there is a small Si-deficiency (23
pounds have rarely been studied in the literature until at.% Si instead of 25 at.%), probably caused by selective
now, we only know of publications on (PtMnSbyNi- resputtering of Si, for Cu2MnAl we find some excess of
MnSb) multilayers w17x. Our original intention to study Cu (52 at.% instead 50 at.%). For the other two Heusler
Heusler-based multilayers was to search for an antifer-
phases of the present study the thin films preserve the
romagnetic interlayer exchange coupling (IEC). Quan-
stoichiometric composition of the targets to within the
tum interference models for the IEC suggest that it
precision of the microprobe analysis of approximately
should exist in virtually any multilayer system combin-
ing ferromagnetic and nonferromagnetic metallic layers 0.5 at.%.
w18x. Experimentally, however, a prerequisite for the The structural characterization of all samples was
observation of the IEC is a high quality of the layered carried out by a thin film 3-circle X-ray spectrometer
structure with flat interfaces. Our results to this end using Cu Ka-radiation. The X-ray study combined small
were negative until now. We could not find clear angle reflectivity, Qy2Q Bragg scans and rocking scans
evidence for an antiferomagnetic IEC in the multilayer with the scattering vector out of the film plane. For
systems we report on in the next section. Instead, we selected samples Bragg scans and rocking scans at
use the multilayers here mainly as a tool for gaining glancing incidence with the scattering vector in the film
insight into the magnetic properties of the Heusler alloys plane were also taken. The determination of the satura-
films in the limit of a very small thickness. tion magnetization was performed by a commercial
SQUID magnetometer (Quantum Design MPMS sys-
2. Preparation and experimental
tem) at a temperature of 5 K and at a field of 0.4 T,
Our thin films and multilayers were deposited by r.f.- which is far above the coercive force for all samples
sputtering using pure Ar at a pressure of 5=10y3 mbar under study here.
U. Geiersbach et al. / Thin Solid Films 425 (2003) 225–232 227
Table 1
Structural parameters and saturation magnetization measured at 5 K for the Heusler films grown on Al2O3 a-plane or MgO (1 0 0)
a very low value of the magnetization w23x. For the seedlayer. One observes only the (2 2 0)- and the
single crystalline Cu2MnAl film on MgO we get Mss (4 4 0)-Heusler–Bragg-peak, evidencing pure (1 1 0)-
40 emuyg pointing towards a substantial degree of site texture. The rocking width of the (2 2 0) Heusler–
disorder. For the film prepared on a-plane Al2O3 we get Bragg-peak is approximately 38 i.e. it is definitely larger
Mss62 emuyg, this value comes closer to the bulk than obtained for the Cu2MnAl layers (Table 1). The
value for Ms. The structural parameters and the satura- Co2MnSi phase with similar structural quality can be
tion magnetization for the Cu2MnAl phase are summa- grown on V and Cr seedlayers, Cr giving a slightly
rized in Table 1. Note that the reduction of the moment better growth quality since it has a lattice mismatch of
correlates with a definite decrease of the lattice 0.8% only. For the Co2MnGe phase V, Au- and Cr-
parameter. seedlayers give comparably good structural quality. A
summary of these results is given in Table 1. For all
3.2. Co2MnSi, Co2MnGe and Co2MnSn thin films three Co-based Heusler compounds the thin films have
a very flat surface morphology. As one representative
The Co2MnSi, Co2MnGe and Co2MnSn half metallic example we show a small angle X-ray reflectivity scan
Heusler thin films grown directly on MgO or Al2O3 are of the Co2MnGe film grown on a V-seedlayer in Fig. 4.
polycrystalline and have a bad structural quality and a One observes well defined finite thickness oscillations
low value for the saturation magnetization. Only when from the total layer superimposed by an oscillation from
using suitable metallic seedlayers with a typical thick- the V-seedlayer. From a fit using the Parratt formalism
ness of approximately 2 nm we could achieve textured we estimate a roughness of approximately 0.5 nm for
growth and good structural quality. For the Co2MnSn the interfaces. We also have tested systematically the
phase we found that the optimum seedlayer for the growth of the Co-based Heusler phases on MgO (1 0 0)
growth on sapphire a-plane is Au with a lattice parameter substrates. The films grown on the bare MgO-surface
mismatch of approximately 1%. V and Cu2MnAl seed- are polycrystalline. When using metallic seedlayers one
layers can also be used. In Fig. 3 we show an out-of- can induce reasonable quality out-of-plane (1 0 0)-tex-
plane Bragg scan of a Co2MnSn film grown on an Au
Fig. 3. Out-of-plane Bragg scan of a Co2 MnSn film grown on an Au Fig. 4. Small angle X-ray reflectivity scan or a Co2MnGe film on
seedlayer. Al2O3 with a V-seedlayer.
U. Geiersbach et al. / Thin Solid Films 425 (2003) 225–232 229
Table 2
Structural parameters of the Heusler multilayers grown on Al2O3 a-plane and the relative saturation magnetization measured at 5 K
and low fluctuations of the layer thickness. From the multilayer possesses a pure (1 1 0) out-of-plane texture
reflectivity peak of order l at the angle Ql one can for Cu2MnAl, and (1 1 1) texture for the Au-layers.
calculate the superlattice periodicity L by using the Besides the fundamental Bragg-peak from the average
relation w25x. lattice, the multilayer exhibits a rich satellite structure
caused by the chemical modulation. Satellites up to the
w z order lsq3 and lsy4 can be resolved, proving coher-
Lsllyxy2ŽyQ2l yQ2c .|~ (1)
ently grown superstructures in the growth direction. The
position of the satellite peaks give the superstructure
From a fit we get Ls5.7 nm in good agreement with periodicity from the separation D(2Q) of the satellites
the nominal thickness. From simulations of the reflectiv- of order l from the fundamental Bragg-peak w25x:
ity curves using the Parratt formalism w20x we derive
an interface roughness of approximately 0.6 nm. The
Lslyw2lD(Q)cos(Q)x (2)
out-of-plane Bragg scan (Fig. 6b) close to the (2 2 0)y
(1 1 1) fundamental Bragg reflection reveals that the
From this relation we get a superlattice period of 5.8
nm, in good agreement with the value derived from the
small angle X-ray reflectivity. From the width of the
satellite peaks at half maximum (FWHM) L(2Q) we
can derive the out-of-plane coherence length of the
superstructure Dcoh using the Scherrer equation
DcohslywD(2Q)cos(Q)x (3)
indicates that typically several monolayers of the Heus- alternative choice would be to search for other material
ler compounds at the interfaces are not ferromagnetic, combinations or preparation methods with less interdif-
probably caused by alloying and (or) strong site disor- fusion at the interfaces.
der. This is not unexpected, since an alloying at the
interfaces can hardly be avoided in real thin film systems Acknowledgments
and the chemical conditions for the phase formations of
a ternary compound at the interfaces are complex and The authors thank the DFG for financial support of
virtually unknown. this work within the SFB 491, P. Stauche for the
¨
preparation of the alloy targets and S. Erdt-Bohm for
We finally come to the question concerning the
running the sputtering equipment.
potential of the Co-based Heusler alloys in the field of
magnetoelectronics in the light of the results presented References
here. The main problem will be to preserve the full spin
polarization predicted for the perfectly ordered Heusler w1x J. Park, E. Vescovo, E. Kim, C. Kwon, R. Ramesh, T.
structure in very thin layers of real devices. We have Venkatesan, Nature 392 (1998) 794.
w2x J. Moodera, R. Kinder, L.T. Wong, R. Meservey, Phys. Rev.
shown that for the preparation temperatures allowed in
Lett. 74 (1998) 3273.
thin film heterostructures the formation of site disorder w3x B. Dieny, J. Magn. Magn. Mat. 136 (1994) 335.
cannot be completely avoided in the Co-based Heusler w4x K. Schwarz, J. Phys. F: Met. Phys. 16 (1986) 7934.
alloys. Site disorder in the interior of the Heusler film ¨
w5x Ziebeck, Webster, Landolt-Bornstein New Series IIIy19c,
is a critical factor, since it must be expected that the Springer-Verlag (1988).
w6x R. de Groot, P. van Engen, Phys. Rev. Lett. 50 (1983) 2024.
full spin polarization is lost in disordered Heusler alloys
w7x S. Ishida, T. Masaki, S. Fujii, S. Asano, Physica B 245 (1998)
w7x. The question, to what extend some site disorder is
1.
tolerable, i.e. leaves at least a high value for the spin w8x S. Ishida, S. Fujii, S. Kashiwagi, J. Phys. Soc. Jpn. 64 (1995)
polarization, cannot be answered quantitatively at the 2152.
moment, since corresponding band structure calculations w9x R. Kabani, M. Terada, A. Roshko, J. Moodera, J. Appl. Phys.
have not been published yet. 67 (1990) 4898.
w10x J. Caballero, A. Reilly, Y. Hao, J. Bass, W. Pratt, F. Petroff, J.
The existence of nonferromagnetic interfaces, which Childress, J. Magn. Magn. Mat. 55 (1999) 198.
seem to be present in all combinations of the Co-based w11x M. Kautzky, F. Mancoff, J. Bobo, P. Johnson, R. White, B.
Heusler alloys and other metals which we have studied Clemens, J. Appl. Phys. 81 (1997) 4026.
until now, causes a second problem, which might be w12x D. Orgassa, H. Fujiwara, T.C. Schulthess, W.H. Butler, Phys.
even more detrimental for the performance of spin Rev. B 60 (1999) 13237.
w13x M. Raphael, B. Ravel, M. Willard, S. Cheng, D. Das, R. Stout,
transport devices. Necessarily, the spin polarization at K. Bussmann, Appl. Phys. Lett. 79 (2001) 4396.
the Fermi level will completely vanish in a nonferrom- w14x T. Ambrose, J. Krebs, G. Prinz, J. Appl. Phys. 89 (2001) 7522.
agnetic interlayer. Since in GMR with the current in the w15x U. Geiersbach, A. Bergmann, K. Westerholt, J. Magn. Magn.
plane (cip-geometry) the spin dependent electron scat- Mat. 240 (2002) 546.
tering at the interfaces is dominating w3x, nonferromag- w16x J. Kubler,
¨ A. Williams, C. Sommers, Phys. Rev. B 28 (1983)
1745.
netic interfaces are expected to reduce the GMR-value w17x F.B. Mancoff, J. Bobo, C. Richter, J. Mater. Res. 14 (1999)
strongly. This is in accord with our first results of 1560.
magnetoresistance measurements for spin valve systems w18x P. Bruno, Europhys. Lett. (1993) 615.
using the Co-based Heusler alloys, which reveal very w19x J. Soltys, Acta Phys. Pol. A 56 (1979) 227.
w20x L. Paratt, Phys. Rev. 95 (1954) 359.
small values for the GMR effect w27x. Possibly one can
w21x G. Bacon, J. Plant, J. Phys. F: Met. Phys. 1 (1971) 524.
overcome this problem by using the GMR geometry w22x J. Robinson, P. McCormick, R. Street, J. Phys. Condens. Matt.
with the current perpendicular to the plane (cpp-geom- 7 (1995) 4259.
etry). In this geometry one can use much larger thick- w23x R. Taylor, C. Tsuei, Sol. St. Comm. 41 (1982) 503.
nesses of the ferromagnetic layers and the spin w24x P. Webster, J. Phys. Chem. Sol. 32 (1971) 1221.
w25x H. Zabel, Adv. Sol. St. Phys. 30 (1990) 197.
asymmetry of the electron scattering in the interior of
w26x K. Westerholt, U. Geiersbach, A. Bergmann, J. Magn. Magn.
the ferromagnetic layers gives an important contribution Mat. (2002).
to the GMR w28x. However, concerning technical appli- w27x A. Bergmann, K. Westerholt, in preparation.
cations the cpp-geometry seems not very useful. The w28x M. Gijs, G. Bauer, Adv. Phys. 46 (1997) 286.