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Better Aluminium Mirrors by Integrating Plasma Pretreatment, Sputtering, and Plasma Polymerization For Large-Scale Car Headlight Production K
Better Aluminium Mirrors by Integrating Plasma Pretreatment, Sputtering, and Plasma Polymerization For Large-Scale Car Headlight Production K
Abstract
The move to abandon lacquering in today’s car manufacture has revealed new challenges at the plastic interface, especially
reduced adhesion of the coating and outgassing (mainly water) that can affect the aluminium quality. Under the increased
temperatures inside head and fog lights, further outgassing often leads to hazy appearance of the reflector or the front lens by
droplet condensation.
These problems can be solved by a process sequence that includes some oxidizing plasma pre-treatment that ensures good
bonding of the aluminium to the plastic and also enhances desorption of water. In addition, some plasma-polymerized adhesion-
promoting base coat (if required, also desorption blocking) may be deposited. After aluminium deposition, first a corrosion
protective layer and finally, a hydrophilic coating that suppresses hazing effects by spreading out any condensing vapours to some
optically neutral layer are deposited. © 1999 Published by Elsevier Science S.A. All rights reserved.
0257-8972/99/$ – see front matter © 1999 Published by Elsevier Science S.A. All rights reserved.
PII S 02 5 7 -8 9 7 2 ( 9 8 ) 0 0 71 8 - X
288 H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296
2. Experimental
This shows that desorption rates of metals and plastics we must conclude without precisely knowing that such
may differ by a factor of more than 100 after 1 h of monomer residues have some negative effect.
outgassing time. In addition, it has to be taken into The main concern from these experiments is the
account that in a multichamber system such as the build-up of a comparatively high concentration of
DynaMet the coating chambers are desorbed for longer reactive gases during sputtering exactly where the
than 1 h, whereas the substrate have less than 1 min to damage to Al quality is a maximum, namely at the
desorb. This means that the desorption of the substrates surface to be coated.
is the dominant factor for outgassing in the process. Another very large contribution to the residual gas
A mass spectrometric study of some ABS raw materi- background is well known from the evaporation batch
als proved that the largest portion (generally approxi- processes to arise from the usually large inner surfaces
mately 80%) of the desorbed gas is water vapour. It of the coating chamber that come into contact with the
must be assumed that the outgassing rate of water is ambient air in every batch. This usually becomes a
dependent not only on the plastic material itself but also problem if the fixtures, the inliners, and/or the evapora-
on temperature, relative humidity, production parame- tor itself have been heavily coated by the process during
ters, and storage conditions of the reflectors after injec- continuous production. In that case, the high vacuum
tion molding. pump time before the evaporation becomes very long.
In one spectrum out of four (see Fig. 4), mass signals A mass spectrum from a 2 m diameter production system
of 26 amu (atomic mass units) indicated the fragments taken with a Leybold PGA 100 quadrupole mass ana-
C H and/or CN, respectively that can be best explained lyser directly flanged to the coating chamber briefly
2 2
by outgassing of acrylonitrile, one of the monomers before evaporation at a pressure of 0.02 Pa showed that
forming ABS. From the data given in Fig. 3 on the the residual gas consisted of about 95% water with some
impact of background gases on the optical quality of Al low percentage of species with masses of 28, (N or
2
Fig. 4. Mass spectrum of a commercial ABS reflector raw material and the background gas in the spectrometer (top and bottom line, respectively).
The logarithmic intensity scale should be noted. The signal at 40 m/z (Ar+ main isotope) was skipped for being out of range at the given sensitivity.
The signal at 26 amu is assumed to represent C H or CN, both fragments indicative to acrylonitrile, one of the monomers forming ABS.
2 2
H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296 291
CO), 32 (O ), and 44 amu (probably CO ). The next HMDSO even under non-ideal conditions such as
2 2
spectrum taken during evaporation clearly indicates that outgassing parts or fixtures and masks.
all masses related to water (18, 17, and 16 amu) dropped (4) Since the properties of the plastic parts were found
with the exception of the hydrogen signals (1 and 2 amu, to differ over a wide range, the machine has to
respectively). The most likely interpretation is that the accommodate all vacuum pre- and post-treatment
water vapour was reacting with the Al vapour forming options that can be useful to ensure good adhesion
some aluminium oxide and/or hydroxide leaving and quality of the aluminium layer.
hydrogen as a volatile byproduct. The mass spectrum
of the gas phase taken immediately after evaporation 3.2. Basic machine design
shows an increased water signal again indicating that
there is still a continuous flow of water desorbing from In the ‘‘DynaMet 4V’’, a load lock and three process
the walls. stations for pre-treatment, sputtering, and plasma top
Some more detailed experiments quantified the effect coating are grouped in an vertical position around a
of different background gases during sputtering on the rotating substrate carrier drum. Four substrate chambers
optical quality of the aluminium ( Fig. 3(a)). It was inside the drum with a usable volume of
assumed that water vapour as the main residual gas and 800 mm×450 mm×250 mm each receive the fixtures
hexamethyldisiloxane from a top coating plasma poly- loaded with the parts through the load lock. For trans-
merization process should be the main reactive gases port from one to the next process station, the drum
potentially affecting the aluminium quality. with the fixtures is rotated by 90° around a vertical axis.
From Fig. 3(a) it can be seen that at a fairly high The processes in all stations run parallel within 30 s.
power density of 24 W cm−2, water background pres- Meanwhile the chambers are sealed from each other by
sures higher than 0.01 Pa (10−4 mbar) lead to exponen- lock valves that are only opened during the 6 s trans-
tially decreasing reflectivity and increase in colour port time.
deviation of the aluminium mirror. The optical appear- For less demanding plastic parts and lower through-
ance became more and more yellowish. This corresponds put, a three-horizontal chamber ( load lock, sputtering
very well to the general finding that starting pressures
and plasma polymerization) machine (‘‘DynaMet 3H’’)
above 0.01 Pa (10−4 mbar) for Al evaporation tend to
with a loading volume of 570 mm×330 mm×250 mm
cause yellowish discoloration. The Al coating seems to
is now also available (Fig. 5).
be even more sensitive to HMDSO since the threshold
value is close to 0.003 Pa. Above 0.02 Pa the yellow
3.3. Load lock
colour turned brown.
The data from Fig. 3(b) clearly show that the colour
When the Leybold autoloader is used, the chamber
difference between sputtered aluminium layers and the
door complete with the loaded fixturing frame is pressed
Al reference layer grows and the luminosity drops
to the load lock and pumping starts immediately while
dramatically as the power density at the sputtering
the frame is transferred from the door into the rotor.
cathode is decreased. For the preset base pressures of
the background gases however, even maximum power For unloading, the frame is hanged to the door again
density of 50 W cm−2 was not sufficient to achieve while the load lock is being vented. Then the door/frame
satisfactory luminosity (Y>85) and colour (dE*=0) unit is replaced by a new one within 6 s and the cycle
appearance.
From all these experiments we concluded that the
vacuum system of the ‘‘DynaMet’’ as a fast cycle
machine for synchronized production must have the
following basic design features:
(1) The machine must be loaded via a load lock with
easy to clean fixtures both having a minimum
surface area to keep the atmosphere out from the
process environment.
(2) All processes (pre-treatment, metallization, and
plasma top coating) must be performed in separate,
well-sealed chambers having their own vacuum
system in order to avoid cross-contamination,
especially into the sputtering chamber.
(3) All pump sets should have the highest affordable
pumping efficiency (well beyond the calculated mini-
mum) to ensure low background pressures especially Fig. 5. Three-chamber coating system ‘‘DynaMet 3H’’ for car light
of water vapour and siloxane monomers such as reflectors.
292 H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296
starts again. This arrangement shortens total cycle time the faster the coating is formed, the higher the Al purity
and permits a pump time in the load lock of 30 s. The and hence, quality will be. The basic advantage of
load lock is fitted with a 2000 m3 h−1 Roots blower evaporation in this respect is very high evaporation (and
backed by a large 630 m3 h−1 rotary vane pump. The also deposition) rate. However, this advantage is con-
starting pressure required for unlocking the chamber siderably lowered by the satellite movement of the
lock valves and transfer of the parts to the next station fixtures on their way through the Al vapour cloud. This
(#10 Pa or 0.01 mbar) is reached within 12 s under means that the aluminium layer is built up when the
usual production conditions. To check whether the load parts are facing the evaporator but may get contami-
lock can reach this base pressure even under adverse nated by the residual gas when they are rotated into
ambient conditions, a special experiment was set up: PC the shadow.
parts were stored in an air-conditioned room under Three main features of the DynaMet sputtering cham-
more than 95% relative humidity at 30 °C and directly ber ensure superior aluminium quality:
loaded from there into the load lock that was vented (1) Sputtering cathodes of the highest possible rate [4]
from and opened into that chamber. The result was an
with two powerful 60 kW d.c. supplies were built in
increase in cycle time by only 5 s.
right from the beginning because the experiments
with reactive gases had shown that high optical
3.4. Pre-treatment
quality of the Al requires a sufficiently high level of
power density (see Fig. 3(b))
In the pre-treatment chamber, the parts are degassed
(2) The parts are not moved during sputtering and the
further, in the simplest case by a turbomolecular pump.
This is sufficient if the sputtered aluminium adheres well Ar flow rate and pressure are adjusted such that
to the substrate material itself or to a base lacquered thickness homogeneity even across difficult shapes
surface. If not, some oxidizing pre-treatment with an is high.
oxygen or air plasma must be performed to form strong (3) The vacuum in the sputtering station is kept as
chemical bonds between the polymer surface and the clean as possible from reactive gases by the design
Al. This is not trivial because we found that if the of the vacuum system and the pre-treatment process.
plasma dose (the product of power and time) exceeds As the result, it is easily possible to deposit better
some threshold value specific for the material, the adhe- than 95% pure aluminium under production condit-
sion (to adhesive tape peel tests) degrades and may ions.
become inferior to the untreated part. We found different Depending on their shape, the reflector parts can be
results for d.c. and r.f. treatment with the general coated with a very good aluminium mirror in 5–10 s.
tendency that the r.f. results were superior (better homo- This short deposition time leaves another 15–20 s time
geneity) but not for all materials. Typically, the plasma for additional pumping before sputtering is started. It
treatment lasts less than 10 s at a pressure of 1 Pa when does not make sense to sputter any longer than necessary
using r.f. power. The rest of the cycle time is used for (#70 nm for optimum reflectivity) because of possible
degassing. overheating by release of too much condensation energy
An additional positive effect of the plasma treatment and the additional kinetic energy within a short time.
is enhanced desorption of adsorbed gases or vapours On the other hand, there is no need for excessive coating
from the surface that will have a positive effect on because of the good conformity of the aluminium across
aluminium quality. even demanding shapes. The reflectivity of the alumin-
In cases where adhesion was still not sufficient, a ium mirrors at a wavelength of 500 nm was determined
plasma-polymerized base coat proved to be very success-
to 90% (specified: 86). The distribution of sputtered
ful as an adhesion promoter. The surface energy of such
aluminium across the parts is superior to that for
a coating can be tuned by choice of the starting material
evaporated aluminium: while the thickness ratio of the
and process parameters with the specific advantage that
Al coating on the front edge of the reflector relative to
the surface properties are nearly the same all over the
part so that surface inhomogeneities of the substrate the less favoured area near the socket is typically 6:1 in
material are levelled out. To our surprise, we found not evaporation [see Fig. 6(a) and (b)], 2.5:1 or better can
only better adhesion but also improved performance of be achieved with sputtering [see Fig. 7(a) and (b)]. When
the coating. This may be due to decreased desorption coating demanding geometries this better coverage by
from the base-coated parts during sputtering resulting sputtering tends to increase the total light output because
in better Al quality and hence, corrosion stability. insufficient reflecting areas are avoided. In many cases
we observed in the laboratory and in production mark-
3.5. Aluminium sputtering edly improved corrosion resistance of the sputtered Al
compared that of the evaporated Al. One reason we
The higher the aluminium concentration in the gas assume is the higher average kinetic energy of the
phase relative to the concentration of reactive gases and incident Al vapour that seems not to permit columnar
H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296 293
(a)
(b)
Fig. 6. XPS depth profile of a coating on a lacquered polycarbonate reflector part deposited in a large evaporation batch coater: (a) front edge;
and (b) within parabola, near bulb socket. The depth is proportional to the sputtering time of the ion gun given on the abscissa. However, if the
sputtering yield of the materials involved is different, quantitative conclusions must be drawn with care.
growth (as known from deposition by evaporation) so (as determined by crosshatching and subsequent adhe-
the structure is more compact and dense instead of loose sive tape peel test on the Al without any top coat) of
and disturbed by grain boundaries. The higher kinetic sputtered aluminium on some unknown ABS reflector
energy of the sputtered material seems to be responsible material without any pre-treatment could be optimized
for better adhesion of the Al layer as we observed in to zero failure all over the part easily. In parallel we
extensive experiments for one material: The adhesion tried to optimize the adhesion with a smaller evaporation
294 H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296
(a)
(b)
Fig. 7. XPS depth profile of a ‘‘DynaMet 4V’’ coating (without anti-haze top coat) on a lacquered PC reflector part: (a) front edge; and (b) within
parabola, near bulb socket.
batch coater (BAH 1000 from Balzers) making use of 3.6. Plasma top coating
all usual oxygen, air, and argon plasma pretreatments.
The results were always inferior to even the worst 3.6.1. Corrosion protection
sputtering results. However, if a sputtered Al layer When HMDSO (hexamethyldisiloxane) is used for
becomes too thick (>100 nm) it tends to build up this process, the surface energy of the coating is approxi-
compressive stress lowering adhesion. mately 32–38 mN m−1. This is significantly higher than
H. Grünwald et al. / Surface and Coatings Technology 111 (1999) 287–296 295
decrease corrosion protection if oxygen-containing gases abandoning lacquering. Some functions of the lacquer,
were used. Oxygen-free gases, however, did not change namely adhesion promotion and blocking of outgassing,
surface energy sufficiently under realistic conditions of now are badly missed. The wide variety of plastics
power density and time. In contrast, it was no problem makes it difficult to identify clear tendencies and to find
to deposit plasma polymer layers having surface energies simple guidelines how to process a given class of plastic
well above 60 mN m−1, although most layers had some base material. We found significant differences within
more or less detrimental effect on the corrosion resis- the classes of polymers, even among materials with
tance of the underlying layer system. In other words, identical specification, sometimes just between different
layer stacks with good corrosion stability corroded much lots. All these inconsistencies in the substrate become
faster once the high energy coating was deposited on very obvious and troublesome without base lacquering.
top such that the specification was missed. Finally we The multichamber approach of the ‘‘DynaMet’’ systems
found a plasma polymerization process for depositing a based on one load lock and integration of high perfor-
very thin, high surface energy top coating that does not mance processes in their dedicated chambers for pre-
degrade the optical properties nor the corrosion resis- treatment, metallization, and top coating offers best
tance significantly. The process time including gas facilities for solving problems with plastic parts today
exchange is 10 s fitting well with the corrosion protection and in the near future. The product quality is at least
(15–20 s in total ) into the process time of 30 s per cycle. equal to, if not higher than, the results from the conven-
The surface energy is 50–52 mN m−1 on the freshly tional evaporation systems although a straight scientific
coated parts and increases with time probably by post- comparison is difficult if not impossible on a pro-
oxidation to 56 mN m−1 at maximum. To our knowl- duction scale.
edge, the process has been efficient enough to solve
nearly all haze problems in production on our machines
since the beginning of 1997. This process option has References
been ordered for half of the machines to date.
[1] H. Grünwald, J. Henrich, J. Krempel-Hesse, W. Dicken, S. Kunkel,
G. Ickes, J. Snyder, Rapid, high quality metallization of plastics,
SVC, 40th Annu. Tech. Conf. Proc., 1997, p. 44.
[2] R. Kukla, H. Grünwald, G. Ickes, M. Jung, U. Patz, Just-in-time
4. Conclusions coater for 3-dimensional plastic parts, SVC, 38th Annu. Tech.
Conf. Proc., 1995, p. 340.
The fast cycle machines of the ‘‘DynaMet 4V’’ and [3] R. Jede, H. Peters, G. Dünnebier, O. Ganschow, U. Kaiser, K.
Seifert, J. Vac. Sci. Technol. A 6 (4) (1988) 2271.
‘‘3H’’ series proved to be suitable tools for cutting cost
[4] R. Kukla, T. Krug, R. Ludwig, K. Wilmes, A highest rate self
in car lighting manufacture by offering the opportunity sputtering magnetron source, Vacuum 41 (1990) 1968.
for synchronized production. Further cost savings will [5] R.S. Hunter, R.W. Harold, The Measurement of Appearance, 2nd
be achieved in reducing the total process sequence by ed., Wiley, New York, 1987, Chap. 8.