Download as pdf or txt
Download as pdf or txt
You are on page 1of 1

US FED STD 209E cleanroom standards

maximum particles/ft³ ISO


Class
≥0.1 µm ≥0.2 µm ≥0.3 µm ≥0.5 µm ≥5 µm equivalent
1 35 7 3 1 ISO 3
10 350 75 30 10 ISO 4
100 750 300 100 ISO 5
1 1 7 ISO 6
10 10 70 ISO 7
100 100 700 ISO 8

NOTE: US FED STD 209E was canceled November 29, 2001,[4] but is still widely used.

ISO 14644-1 cleanroom standards

FED STD
Class maximum particles/m³ 209E
≥0.1 µm ≥0.2 µm ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm equivalent
ISO 1 10 2
ISO 2 100 24 10 4
ISO 3 1 237 102 35 8 Class 1
ISO 4 10 2.37 1.02 352 83 Class 10
ISO 5 100 23.7 10.2 3.52 832 29 Class 100
ISO 6 1,000,000 237 102 35.2 8.32 293 Class 1000
ISO 7
352 83.2 2.93 Class 10,000
Class
ISO 8
3,520,000 832 29.3 100,000
35,200,00
ISO 9
0 8,320,000 293 Room air

BS 5295 cleanroom standards

maximum particles/m³
Class ≥0.5 µm ≥1 µm ≥5 µm ≥10 µm ≥25 µm
Class 1 3 0
Class 2 300 2 30
Class 3 1,000,000 20 4 300
Class 4 200 40 4

BS 5295 Class 1 also requires that the greatest particle present in any sample does not exceed 5 μm.[5]

You might also like