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Digital Microscope

VHX-7000 Series

4K HIGH-RESOLUTION MICROSCOPE
Previous
Models VHX-7000

HIGH-RESOLUTION IMAGES
2
Digital Microscope
VHX-7000 Series

3
Microscope History 2nd Generation

1990 - Dawn of the digital age,


bringing 3D observation

VH-6000

VH-6300

VH-7000

VH-8000

VHX-100
1st Generation

VHX-200
New design eliminating
eye-to-the-lens viewing

A sales history including over


20,000 companies worldwide
VHX microscopes make observation simple and easy. KEYENCE engages in ongoing development of
new models to meet the expectations of our customers who carry out magnified observations.
Going forward, keeping our sights on the ideal magnified observation devices for our customers,
we shall continue to pursue the advancement of microscope technology.

4
5th Generation

VHX-7000

Advent of the era of


high-resolution 4K microscopes

4th Generation

Advances in focus and


lighting

VHX-500

VHX-600

VHX-900

VHX-1000

VHX-2000

3rd Generation
VHX-5000
Observation using 16-bit
high colour gradation
VHX-6000

5
VIEW

CAPTURE

MEASURE

6
Observation can be carried out whenever Large depth of field Hand-held observation
required without user adjustments

Allows examination at high depths. Lenses, cameras


and graphics engines are designed in-house, ensuring
an optimal balance between depth of field and
brightness. Intuitive microscopy can be performed
whenever required, even by first-time users.

Images can be saved and shared easily Observed images can be saved easily Automatically generates reports
with minimal effort
Failure
Report
Failure Report Failu
Custom
er Informa re Repo
tion
Compan
rt

Thanks to the built-in 1 TB hard disk drive, observed


y Cus
Customer Information Departm Date of Issue:
9/27/2018 3:38:03 PM tome
ent Com r Infor
Keyenc pan mati
Company Keyence Address Approval Rep.
e
Dep y on
Quality artm
Department Quality Control Yokoha Control
Phone ma city, Add ent
Kanaga ress Date of
Address Yokohama city, Kanagawa prefecture wa prefectu Issue:
E-mail Pho Key 8/20/2
045-XX re ne Approv
enceal 018 2:38:31
Phone 045-XX-XXXX -XXXX Yok Qua PM
Produc xxxx_xx E-m oha lity Rep.
t Informa xx@xxx ail ma Con
E-mail city, trol
xxxx_xxxx@xxxxx.xx.xx tion xx.xx.xx
Prod Kan
uct agaw
Info 045 a pref
Product Information Item# rma xxxx -XX
-XX ectu

images can be saved just as they are. Saved images


PNA-4 tion _xxx XX re
Item# Product 25-263Serial# x@x
5 xxxx
Dat
PNA-425-2635 A Summary 1915997 Produc
.xx.x
e of
t PNA Item#
x
of Finding Issu9/9
s Sum App
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5-2 rova e: /2018
The y of 635 Serial# l 11:2
Summary of Findings transis signal re is Find
tor and from the 0:46
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or and ut sign
transistor and the transistor circuit is damaged. is damag Pro
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can be shared easily over LAN or with USB devices.


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input/output cable, surge voltage from lightning or termin g or tage le,
al. to the surge wro
overvoltage to the output terminal. volt ng wiri
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Standard reports can be created automatically using


Observation equipment:KEYENCE VHX-Series ligh
inal tnin
File Name Recording Condition Observa . g or
[ima
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tion equipme
Line Scan Sensor X1000.jpg Lens Power: X1000 File Name nt:KEY
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Counte VHX-Se
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Countermeasure orderPrepared ion circuit orde e pro 8/20/2018 2:38:31 EM.jpg rvati
to avoid
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Date Tilt X100
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We will keep improving the performance and quality. Thank PM ent e by
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Perform a wide variety of measurements 3D measurement Contamination analysis


with just one device

2D or 3D measurement can be carried out simply by


operating the mouse. Roughness measurement,
contamination analysis, grain size measurement and a
wide range of other measurements can be carried out
with just one device.

Viewing performance at an incredible scale, measurement


capability enabling a variety of analytical processes, and enough
storage capacity to save millions of images, all of which can be
used easily and comfortably. The VHX Series has all the features
necessary to enhance operational efficiency.

View, capture and measure with an all-in-one system


7
4K monitor

More Accurate Images and Easier Operability


than Ever Before

High-resolution images draw out the finest details


Optical Shadow Effect Mode: page 10

Reveals details, such as minute variations in surface level and tiny imperfections, with just the touch of a button.

8
High-speed
auto-focus stage

Focus view camera

Motorised eucentric
stage

Full-control system enables even first-time users


to capture optimal images Advanced Operability: page 12

The focus view feature and the motorised stage make focusing intuitive, and magnification can be changed by operating the handheld controller.

High definition
4K Fully-integrated head: page 30

Featuring a 4K CMOS image sensor and a newly developed optical system, this VHX Series combines a large depth of field with high resolution to
deliver a new observation mode.

9
Optical Shadow Effect Mode

High-resolution images
draw out the finest details
Using a specialised design featuring a High resolution lens, a 4K CMOS image

sensor and illumination technology, KEYENCE has developed a whole new

method of microscopy.

Previous
Models

Images and uneven surfaces can be


observed and displayed in colour
Colour information is superimposed onto the Optical Shadow Effect Mode image, enabling
simultaneous representation of uneven surface information and colour information.
Colour-coding the display of an uneven surface also makes it easier to interpret.

Colour composition Colour display of uneven surface

Metal crystals (1500x) Laser printing (1000x)

10
Optical
Shadow
Effect
Mode
Fracture surface (50x)

Even subtle irregularities can be observed clearly

Illumination variation analysis

By analysing the variation in an image, in terms of contrast, minute irregularities on the surface can be detected.

Illumination from the left Optical Shadow Effect Mode

Illumination

Illumination from the right

Illumination

The image above is an illustration of the principle of Optical Shadow Effect Mode.

11
Controls are now even
simpler and more
convenient to operate

High-speed
auto-focus stage

Focus view camera

Motorised
eucentric stage

12
Advanced Operability

Full-control system enables even


first-time users to capture optimal images
The user simply places the sample on the stage, and everything else – including alignment,

focus adjustment, magnification switching and so on – is fully automatic.

Even first-time users can perform observations perfectly on the desired area without special training.

All the controls are at your fingertips

Building on the high operability of our previous


models, the new VHX Series employs the Focus View
feature and a motorised stage to deliver intuitive focus
adjustment. Additionally, magnification switching can
now be performed using the handheld controller or
the mouse.

The Focus View function enables easy


focus adjustment, viewed from the side

The new Focus View function enables simultaneous


viewing of the lens and the sample. Thanks to intuitive
GUI support, focusing can be carried out easily with
just a click.

Automatic multi-point capture and


measurement available

Using the Teaching Auto-Measurement function,


repeated measurements can be performed
automatically on identically shaped samples.
Magnification and lighting settings, as well as
three-dimensional coordinates, are reproduced
automatically.

13
Lighting and Observation Functions
Multiple lighting patterns are captured automatically

Polished metal surface (1000x)

Omnidirectional lighting Without multi-lighting


data is captured
automatically

Multi-lighting

With the multi-lighting function,


omnidirectional lighting data is captured
automatically at the click of a button. A
suitable image for observation can then be
selected from this data. This eliminates the
need to repeatedly adjust the lighting
settings in order to obtain a clear image.

Lighting can be changed flexibly


even after recording

The lighting data is retained even after the


image has been recorded. The lighting can
afterwards always be adjusted by using the With multi-lighting
mouse to move the lighting icon.

Lighting can be changed


even after saving the
image to a PC.

14
PCB flux (150x)

Without ring-reflection removal With ring-reflection removal

Capturing several images of different light-source directions prevents image


Ring-reflection
overexposure. It has historically been difficult to eliminate reflections on the
A solution to the problem removal sample's surface caused by the microscope ring light. With the VHX-7000
of light reflection Series, these reflections can be removed at the push of a button.

IC (1500x)

Without HDR With HDR

The High Dynamic Range (HDR) imaging function captures multiple


HDR observation
images at varying shutter speeds to obtain an image with high colour
Enhanced colour and
gradation. This enables observation with high accuracy and contrast.
contrast

15
Depth Composition and Image Stitching
Always view your sample fully in focus

Simply select an area to


view and it will be
displayed in full focus

Real-time composition
interface

On an overall image of the sample, users


can simply click on the area they wish to
view. The stage will then automatically move
to the selected location, and depth
composition will be performed until the area
is in focus. All the manual adjustments have
been shortened, reducing the time and
effort required for viewing.

Fully focused anywhere

The Real-Time Composition Interface does all this,


quickly and automatically

On the navigation screen : Stage moves on X and Y axes


wide field and low The stage moves to align itself with
the area you clicked on the
magnification
interface screen.
Simply click on the area
you want to view
Lens moves on Z axis
For full focus required
depth data is captured.

Depth compositing
A fully focused image is synthesised.

16
BGA (100x)
Up to 50,000 pixels
Larger high-magnification
observation range

High-Speed Image Stitching


with more pixels than ever
Field of view

Up to 50,000 pixels
When you press the Image Stitching button,
the image is automatically stitched together.
1536
Stitching can be performed quickly over pixels
large areas, and can be used to create a
gap-free overview of the whole image.
Image stitching can handle up to
2048 pixels
50,000 pixels vertically by 50,000 pixels
horizontally.

3D image stitching
By capturing multiple images while the
stage is moving, 3D data capture and
stitching can be performed
simultaneously. This makes it possible
to ascertain the overall contours of the
sample. Surface irregularities can also
be measured.

Seamless stitching is possible


In the stitching process, brightness
variations can occur around the edges
of each image, caused by factors such 3D profile
as lens aberrations. The Auto Correct measurement
function automatically corrects these
variations.

Without Auto Correct With Auto Correct

17
Applications: Observation

Metal structure (800x) Propylbiphenyl (200x)

Microneedles (200x)

Aluminium surface (100x) Throwaway chip (50x)


18
Applications: Observation

Switch (30x)

Solar battery (1000x) Residual stress on a toothbrush (20x)

TFT (5000x) Colour filter (1000x)

Hypodermic needle (80x) CMOS chip (400x)


19
Recording Function
Not only images but also settings used when the image was captured can be recorded easily

Data can be recorded at Don't just save the image: save the capture settings

the touch of a button


Measured
Images Videos Settings
and shared instantly values

Saving data

In order to save data, all you need to do is


press the Capture button during
observation. Your measurement data is safe
no matter how much time passes, because
you can save not only images, but also the
measurement results, observation conditions
and other data from when the images were
captured. By connecting your VHX system
to a network, you can share data throughout
your company, making the system even
more useful.

Report function
You can install Excel on your VHX system
Network
just like on a PC. By setting up form
templates in advance, you can easily
convert observed images into reports. Other factories Overseas offices

Failure Report
Customer Information
Failure
Custom
Compan
Departm
y
Report
er Informa
tion
Date of Issue:
9/27/2018 3:38:03 PM
Cus
Failu

tome
re Re
port
Settings used at the time of image capture can also be recorded for easy reproduction at a later date
ent Com r Infor
Keyenc pan mati
Company Keyence Address Approval Rep.
e
Dep y on
Quality artm
Department Quality Control Yokoha Control
Phone ma city, Add ent
Kanaga ress Date of
Address Yokohama city, Kanagawa prefecture wa prefectu Issue:
E-mail Pho Key 8/20/2
045-XX re ne Approv
enceal 018 2:38:31
Phone 045-XX-XXXX -XXXX Yok Qua PM
Produc xxxx_xx E-m oha lity Rep.
t Informa xx@xxx ail ma Con
E-mail city, trol
xxxx_xxxx@xxxxx.xx.xx tion xx.xx.xx
Prod Kan
uct agaw
Info 045 a pref
Product Information Item# rma xxxx -XX
-XX ectu
PNA-4 tion _xxx XX re
Item# Product 25-263Serial# x@x
5 xxxx
Dat
PNA-425-2635 A Summary 1915997 Produc
.xx.x
e of
t PNA Item#
x
of Finding Issu9/9
s Sum App
There
is no output mar A -42
5-2 rova e: /2018
The y of 635 Serial# l 11:2
Summary of Findings transis signal re is Find
tor and from the 0:46
the transis back panel tran no outp ings 191599 Rep AM
There is no output signal from the back panel of the tor circuit of the sist 7 .
or and ut sign
transistor and the transistor circuit is damaged. is damag Pro
ed. the al from duc
tran

Before reproduction After reproduction


sist the t
or circ bac A
k pan
uit
is dam el of
the
age
d. Ser
Root Cause
[image] ial#
Roo 191
t Cau 599
The cause 7
of problem The se
Root Cause input/o could be cau [image]
utput cable, inpu se of
wrong t/ou pro
The cause of problem could be wrong wiring of overvo surge voltage wiring blem
ltage to of tpu
the output from lightnin overvol t cab cou
ld be
input/output cable, surge voltage from lightning or termin g or tage le,
al. to the surge wro
overvoltage to the output terminal. volt ng wiri
outp age
ut term from ng of
Observation equipment:KEYENCE VHX-Series ligh
inal tnin
File Name Recording Condition Observa . g or
[ima
ge]
tion equipme
Line Scan Sensor X1000.jpg Lens Power: X1000 File Name nt:KEY
ENCE
Counte VHX-Se
Datermeasu Cou Screw ries
taken
re
Lens: nter
E500 Fructure Recordi
Add9/27/2018 Add0 mea Surdface ng Conditio
a surge 3:38:03 PM Tilt Angle:
a surg sure
Date taken 30xColo
Lens n
protect r ーOpt-S
Power: Obse
Countermeasure orderPrepared ion circuit orde e pro 8/20/2018 2:38:31 EM.jpg rvati
to avoid
by:
on the r to tect Lens: X30File on equi
Comment damag image by using output
e caused
Full focus avo
depth composition. ion d
Prepare PM Nam pme
Add a surge protection circuit on the output terminal in termin id e
by overvo al in damCommecirc by: Tilt Angle: E20Meta nt:
ltage. age nt uit on 0Date
l Crys
tal X100
KEY
ENC
order to avoid damage caused by overvoltage. cau the
Full focus E VHX
Equipment used Digital Microscope sed outp
image take 0 opt- -Ser
Equipm by ove ut by using 9/9/ n Rec
ordi ies
ent used rvol term depth composi 2018 sem
深度 ng
tage inal Preption. 11:20:46 Lens Con
Measurement Date 9/27/2018 3:38:03 PM . in ared AM
合成 Pow
3.jpg ditio
Com er: n
Measu Digital
Microsc ment
by: Lens
rement ope

Date Tilt X100
Thank you very much for choosing KEYENCE. 8/20/2 Equ
Full
focu
Angl 0
e: E500
018 2:38:31ipm s imag
We will keep improving the performance and quality. Thank PM ent e by
you very use usin 0
We much Mea d g dept
We hope to keep a good business relationship with your will keep for choosi sure
We hope improv ng KEYEN men h com
ing the CE. t Dat posi
to keep perform e Digi tion.
a good ance and tal Mic
busine
ss relation Thaquality
nk . 9/9 rosc
ope
We
ship you /20
willwith yourvery 18 11:2
We kee muc
hop p imp h for 0:46
e to rovi AM
kee
pa ng the choosin
goo per g KEY
d bus form ENC
ines anc E.
s rela e and
tion qua
ship lity.
with
you
r

Reproduction of image capture settings


Image capture settings can be reproduced
by simply selecting the image from an
album. Observation can be carried out
again under the same conditions, and the Lens Shutter Edge White Light
Gain Light shift
magnification speed enhancement balance adjustment
results will be consistent even if it is
performed by a different person at a later
date.

20
Even the measurement
Automatic recognition
magnification is
automatically recorded Lens connection

Lens type

Automatic magnification Observation


magnification
recognition

Measurement values taken with a digital


microscope will vary according to the
magnification, so the magnification needs to
be selected correctly at the time of
observation. To eliminate selection errors, the
VHX system recognises the magnification
automatically. It also identifies the lens
connected, and raises the measurement
accuracy by performing optimal calibration
for the particular lens in question.

One-push calibration

Simply installing a dedicated scale and


performing a one-click operation loads the
calibration values required for each lens.
This operation is simple and can be carried
out correctly even by first-time users,
enabling accurate calibration.

Traceability
This dedicated scale is in compliance with
National Institute
Japan's national traceability standards. JCSS Coordinate Calibration
of Advanced Reference
accredited measuring scale
It can be used with complete confidence for Industrial Science scale
manufacturer device OP-87426
and Technology
your calibration operations.

21
Measurement Functions
Measure as you view

A variety of accurate and


easy-to-use measurement
functions

2D measurement

A wide range of measurements can be


performed on-screen in real-time using
simple mouse operations, including distance
between two points, angle, diameter, parallel
lines, and area. Once the image has been
saved to an album, it can still be
re-measured later. The free communication
software enables anyone to use the
measurement functions with ease on their
own PC.

Wide variety of measurements


Several useful 2D measurements are
provided. These are being supported by
auxiliary measurement tools, which enable
user-independent measurements.

Automatic edge detection for


About 100 points are Shape is identified from detected points
user-independent measurement detected automatically using least-squares method

The VHX-7000 Series uses automatic edge


detection to eliminate variations caused by user
misinterpretation of the sample's edge.
The shape is identified from the detected points
using the least-squares method, eliminating
human error from the measurement operation.

22
One-touch measurement
from 3D contours to
surface roughness

3D measurement

Even when the sample has an uneven


surface, a fully focused image can be
obtained promptly, composited from multiple
images with varying focus positions.
Additionally, 3D display can be used to
Contour analysis
observe surface contours freely from various
angles.

Roughness analysis

Screw thread (100x)

High-accuracy 3D imaging using


Without Accurate D.F.D. 2.0 With Accurate D.F.D. 2.0
KEYENCE's Accurate D.F.D. 2.0
method

By estimating height based on subtle variations


in texture, a 3D image is constructed.
Areas with poor texture are treated as noise, so
an accurate 3D image is captured.
Bolt

Auto Adjust function allows


Without Auto Adjust With Auto Adjust
depth composition even when imaging
at an angle

When images for depth composition are


captured, the Auto Adjust function
automatically compensates for the edge
displacement and vibration that can occur
during image capture. The system then Coil (20x)

constructs a highly comprehensive, fully


focused image. The composition can
include images captured from an angle.

23
Measurement Functions
Even complex measurements can be taken easily by anyone

Contamination analysis
compliant with
ISO 16232 and VDA 19

Contamination analysis

The VHX-7000 Series enables to carry out


contamination analysis compliant with the
ISO 16232 and VDA 19 cleanliness
inspection standards covering the
automotive industry. High depth of field
images, captured at high resolution using a
microscope, can be analysed.
Enabling accurate measurement even when
the sample has an uneven surface.

Membrane filter (50x)

Detailed Analysis mode

When a particular contamination area is


selected on an image of the filter, the stage
automatically moves to that area. The
magnification can be increased instantly to
allow detailed observation, simplifying the
process of identifying foreign particles and
making the operation more efficient. This
mode can also be used for depth
composition and 3D height measurement.

24
One click

Measurement Measurement Measurement


Template area A area B area C

Save template One-click measurement


Template searching for Automatic measurement
identification target in action

Auto-measurements can now be carried out with one click. Multiple


One-click auto-
Same operations can be measured items are saved in a template with pattern data, and
measurement automatic batch measurement is performed by pattern matching
executed with one click
the areas identical with the template, also enabling aggregation.

Particle analysis Starch (400x) Crystal grain size Metal structure (800x) Maximum area measurement Probe mark (1000x)
analysis

In an easy operation, area measurements and counts can be


Automatic area
Advanced image analysis carried out within a specified range on the sample. Areas that are
measurements and not required can be excluded, and overlapping segments can be
can be performed easily
counts separated. Even when performed by first-time users, the operation
will still yield highly accurate analysis results.

With this function, grain size analysis according to ASTM E1382


Grain Size Analysis
standard and according to DIN EN ISO 643 can be performed.
ASTM E1382 The measurement results can be easily saved as a picture or

DIN EN ISO 643 report. It is also possible to create measurement templates,


which will not only save time, but also create reproducibility.

25
Applications: Measurement

Starch (800x) particle analysis

Razor blade (150x) overall contours

Metal foreign particles (20x)


contamination analysis Knurling (50x) profile measurement
26
Applications: Measurement

Die-cast surface treatment (1000x) roughness measurement

Solder cross-section (200x) Mounted PCB (100x)


2D measurement overall contours

Screw thread (40x)


2D measurement

Bearing (20x) Embossing (200x) overall contours


27
Stage Versatile stage system

Free-angle observation system


with XYZ motorised stage
VHX-S750E

Adjustment mechanisms allow easy field of view


alignment, rotation and oblique axis motion. Eucentric
design ensures that the sample stays centred in the field
of view even if the lens is tilted or rotated.

15° 0°
30° 15°

30°
45°
45°

45° 45°
60°

Easy to adjust
Cable holder
60°
Eliminates vibration by
securing the cable. Also
reduces abrasion and wear.

75°

90°
90°


120°

High-stability frame

Vibration-proof rubber

90°

60°

LED transmitted illumination Rotation sensor Handheld controller

LED transmitted illumination is provided as standard, The built-in rotation sensor identifies the rotation The handheld controller makes it easy to move the
enabling clear observation throughout the range from position from the stage. Even when rotated, the stage stage on the XY axes and on the Z axis.
low to high magnification. moves in the originally set direction.

28
100 × 100 mm large In response to customer
requests, several special
XYZ motorised stage large-scale stages are now

VHX-S770E available.
The special stages shown
below are not KEYENCE
To meet the need for larger products.
observation ranges and to
accommodate large samples,
a 100 × 100 mm large XYZ
motorised stage has been
released.

XY measurement system
compliant with traceability
standards
VH-M100E
Measurement module
delivering high ease of use
This XY measurement system
ensures highly reliable VHX-H3M3
measurements based on a
traceability system underpinned by
Wide range of measurements Real-time screen display
Japan's national standards. Display unit Includes distance between Displays XYZ measurement
Additionally, the manual stage can OP-84483 two points, radius, angle results on the monitor in
be moved to extend the and other measurements. real-time.
This is useful when the
measurement range beyond the travel range cannot be
maximum 100 × 100 mm field of viewed on the main unit
view. screen.

Backlighting unit
OP-84484
Clearly projects the
edges of the sample.

Wide-area image capture


A wide-area image, captured and recorded at low
magnification, can be used as a reference when navigating
at high magnification, allowing the measurement points to be
tracked across the entire image.

29
The new fully-integrated head marks a leap forward,
with the highest picture quality in the series

Newly developed
imaging engine
NEO REMAX

4K CMOS
image sensor

Lenses with i.a.


max. NA 0.9

Motorised revolver

30
4K Fully-integrated head

High definition
This series combines a large depth of field with high resolution,

thanks to a 4K CMOS image sensor and a newly developed optical system.

The wide range of viewing modes, including brightfield, darkfield, polarised light,

differential interference contrast and more,

supports all sorts of samples.

4K CMOS image sensor delivers


4000 pixels
high resolution

The 4K CMOS image sensor ensures high resolution

3000 pixels
and low noise. This mobilises the full image-capturing
1600 pixels
6the times
accuracy
4K display
power of the 4K monitor and the high resolution lens,
Approx. 12.22 megapixels
1200 pixels

enabling high-resolution observation. UXGA display


Approx.
1.95 megapixels

High resolution lenses, including 2500x to 6000x

KEYENCE's top NA 0.9 lens 100x to 500x

This new dedicated lens for digital microscopes offers


high-end optical performance by combining 4K
image-compatible resolution with a high depth of field.

20x to 100x 500x to 2500x

Automatic seamless zoom from Magnification is changed automatically


Low even when the zoom straddles lenses
20x to 6000x magnification

Objects can be viewed at magnifications from 20× to


6000× without changing the lens. The magnification
level can be switched on the fly using either the
mouse or the handheld controller.

High
magnification

31
Lens KEYENCE optical lenses are perpetually evolving

VHX-7100 Fully-integrated head and high-resolution lens


achieves high-quality images at 20x to 6000× magnification

Fully-integrated head VHX-7100

With four dedicated objective lenses and built-in lighting, this unit combines high (NA 0.9) resolution with large depth
of field. Designed for outstanding operability.

Brightfield Darkfield Mixed Lighting Polarised Light Differential Interference Contrast

High-Resolution lenses

High-Resolution, Low- High-Resolution, Medium-


Magnification Objective Lens 20 100 Magnification Objective Lens 100 500
VHX-E20 VHX-E100 VHX-E20 VHX-E100
Model VHX-E20 Model VHX-E100
Magnification 20x 30x 40x 50x 80x 100x Magnification 100x 150x 200x 300x 400x 500x
Horizontal 15.24 10.16 7.62 6.10 3.81 3.05 Horizontal 3.05 2.03 1.52 1.02 0.76 0.61
Field of view

Field of view
(mm)

(mm)
Vertical 11.4 7.6 5.7 4.56 2.85 2.28 Vertical 2.28 1.52 1.14 0.76 0.57 0.46
Diagonal 19.05 12.7 9.53 7.62 4.76 3.81 Diagonal 3.81 2.54 1.91 1.27 0.95 0.76
Working distance (mm) 30 (22.9*1) Working distance (mm) 24

*1 When OP-88323 is mounted

VHX-E500 VHX-E2500
High-Resolution, High- High-Resolution, Highest-
Magnification Objective Lens 500 2500 Magnification Objective Lens 2500 6000
VHX-E500 VHX-E2500
Model VHX-E500 Model VHX-E2500
Magnification 500x 700x 1000x 1500x 2000x 2500x Magnification 2500x 4000x 5000x 6000x
Horizontal 0.61 0.44 0.31 0.20 0.16 0.12 Horizontal 0.12 0.08 0.06 0.05
Field of view

Field of view
(mm)

(mm)

Vertical 0.46 0.33 0.23 0.15 0.11 0.09 Vertical 0.09 0.06 0.05 0.04
Diagonal 0.76 0.54 0.38 0.25 0.19 0.15 Diagonal 0.15 0.1 0.08 0.06
Working distance (mm) 6 Working distance (mm) 1

Dual-Objective Zoom Lens VH-ZST 20 2000

Allows observation at magnifications from Model VH-ZST*2


20x to 2000x without changing lenses Magnification*1 20x 100x 200x 500x 1000x 2000x
Horizontal 15.24 3.05 1.52 0.61 0.30 0.15
Field of view

For a wide range of magnification levels.


(mm)

Vertical 11.4 2.28 1.14 0.46 0.23 0.11


Utilising lens-controlled mixed lighting and
various optical adapters, the VH-ZST Diagonal 19.05 3.81 1.91 0.76 0.38 0.19

provides a wide variety of illumination Working distance (mm) 15

options to enable observation that best suits *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
*2 Because of the flared shape, coaxial illumination undergoes circular polarisation.
the sample.

Brightfield Darkfield Mixed Lighting Polarised Light

Long-Working-Distance, High-Performance Zoom Lens VH-Z50L/Z50T 50 500

Long-range lens with observation Model VH-Z50L/Z50T

distance of 85 mm Magnification*1 50x 100x 200x 300x 400x 500x


Horizontal 6.09 3.05 1.53 1.02 0.76 0.61
Field of view

Our long-range lens was developed in


(mm)

Vertical 4.57 2.28 1.14 0.76 0.57 0.46


response to users who require high
Diagonal 7.62 3.81 1.90 1.27 0.95 0.76
magnification at a greater distance from the
Working distance (mm) 85
sample. This enables observation of areas
that were previously inaccessible. *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor

32
High-Performance, Low-Range Zoom Lens VH-Z00R/Z00T 0.1 50

Handles everything from an entire- Model VH-Z00R/Z00T


sample image to an enlarged detail Magnification*1 0.1x 0.5x 1x 5x 10x 30x 50x
Horizontal 3200 640 320 61 30.5 10.2 6.1

Field of view
With a magnification range from 0.1x to 50x,

(mm)
Vertical 2400 480 240 45.5 22.8 7.6 4.6
the VH-Z00R/Z00T allows observation from
an entire-sample image to an enlarged detail. Diagonal 4000 800 400 76.2 38.1 12.7 7.6
Working Approx. Approx. Approx.
Featuring click-style magnification 95
distance (mm) 7700 1500 720
adjustment, an aperture mechanism and an
*1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
observation distance upwards of 95 mm, this
macro lens delivers high performance and
excellent operability.

Small High-Performance Zoom Lens VH-Z20R/Z20T 20 200

A small lens that delivers high Model VH-Z20R/Z20T


resolution Magnification*1 20x 30x 50x 100x 150x 200x
Horizontal 15.24 10.16 6.10 3.05 2.03 1.52

Field of view
Delivers high-resolution observation at

(mm)
Vertical 11.40 7.60 4.56 2.28 1.52 1.14
magnifications of 20× to 200×, making it
ideal for general-purpose use. The large Diagonal 19.05 12.70 7.62 3.81 2.54 1.91

depth of field has been upgraded even Depth of field (mm)*2 34 15.5 6.0 1.6 0.74 0.44

further in this model. Working distance (mm) 25.5

*1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor


*2 Number when depth of field is prioritised. Depth will vary according to aperture ring.

Wide-Range Zoom Lens VH-Z100R/Z100T 100 1000

Combines high resolution with a Model VH-Z100R/Z100T


large depth of field Magnification*1 100x 200x 300x 500x 700x 1000x
Horizontal 3.05 1.53 1.02 0.61 0.44 0.30
Field of view

Users often need magnified observation at


(mm)

Vertical 2.28 1.14 0.76 0.46 0.33 0.23


high resolution, combined with a large depth
of field. These contradictory needs are met Diagonal 3.81 1.90 1.27 0.76 0.54 0.38

by this innovative zoom lens. Working distance (mm) 25 (20*2)

*1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor


*2 With triple illumination adapter mounted

Dual-Light High-Magnification Zoom Lens VH-Z250R/Z250T 250 2500

Switching between coaxial and ring Model VH-Z250R/Z250T


illumination takes just one touch of a button Magnification*1 250x 300x 500x 1000x 1500x 2000x 2500x
Horizontal 1.22 1.02 0.61 0.31 0.2 0.15 0.12
Field of view

Allows illumination to be selected to suit the


(mm)

Vertical 0.92 0.76 0.46 0.23 0.15 0.11 0.09


sample, and enables darkfield observation at
magnifications up to 2500×. Surface Diagonal 1.52 1.27 0.76 0.38 0.25 0.19 0.15

condition, colouring, and other factors can Working distance (mm) 6.5

be observed with total clarity. *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor

Brightfield Darkfield

High-Resolution Zoom Lens VH-Z500R/Z500T 500 5000

Observation distance of 4.4 mm throughout Model VH-Z500R/Z500T


magnification range of 500x to 5000x Magnification*1 500x 1000x 2000x 3000x 5000x
Horizontal 610 305 152 102 61
Field of view

Enables observation at up to 5000×


(µm)

Vertical 457 229 114 76 46


magnification. A zoom lens that achieves
high levels of magnification at long Diagonal 762 381 191 127 76

observation distances. Working distance (mm) 4.4

*1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor

TRIPLE R-compliant lenses are fitted with automatic lens- and magnification-recognition units. 33
Basic
Model
Frequently-Used Functions in an Easy-to-Use Package

Basic model
VHX-970F
Functions for viewing, capturing and measuring
are more intuitive, and have evolved so far that
they can be operated correctly even by
first-time users.

Large depth of field Free-angle observation

The lenses, camera, and graphics engine are designed to provide a large Flexible and accurate observation all over the sample is possible thanks to the
depth of field and to facilitate observation. ability to tilt the camera up to 90 degrees and the ability to rotate the XY stage.

All-in-one system for viewing, capturing and measuring Depth composition and 3D display functions

Built-in 1 TB hard disk drive and network connection support. Even when the sample surface is uneven, the observed image is fully focused.

34
Free-angle observation system
VH-S30F/S30B

Easy to adjust

Adjustment mechanisms allow easy field of
view alignment, rotation and oblique axis 15° 0°
15°
motion. Eucentric design ensures that the 30°
sample stays centred in the field of view even if
45°
the lens unit is tilted or rotated.
45° Easy to adjust 30°

Quick setup marks


60° 45°
45°
The lens setting positions, which vary between
lenses, are indicated by guide marks. This
enables quick lens changes. 60°

Cable holder 75°

Eliminates vibration transmitted from the cable.


90°
Also secures cable, decreasing abrasion and
wear on cable. 90°

Vibration-proof rubber

Uses vibration-proof rubber to absorb vibrations 120° 0°


across a wide range from low to high frequencies. High-stability
Like this observations without worrying about the frame
equipment shaking is possible.

High-stability frame 90°

The die-cast main body provides a high- 60°


stability frame with a high-rigidity structure.
Vibration-
proof rubber

Focus on the lowest area ...

Depth composition and 3D display


functions
The depth composition and 3D display functions
can be used by simply moving the lens upwards
from the bottom.

Use the mouse to


rotate and zoom at will

...depth composition completed Unmodified 3D display

35
System Configuration Diagram: VHX Series System Line-Up High resolution lenses

High-resolution low-
20x magnification objective lens
to 100x VHX-E20
High-resolution medium-
100x magnification objective lens
to 500x VHX-E100
High-resolution high-
500x magnification objective lens
to 2500x VHX-E500
High-resolution highest-
VHX-7100
2500x magnification objective lens
to 6000x
VHX-E2500

Real zoom lenses*1

Dual-objective
20x zoom lens
VHX-7000 to 2000x VH-ZST

High-resolution
VHX-A70*11 500x zoom lens
Bayonet-type
standard to 5000x VH-Z500R/
adpater Z500T
OP-51478/
OP-66871*6
VHX-7020 *9 Dual-light high-
250x magnification zoom lens
to 2500x VH-Z250R/Z250T

VHX-7020 *9
100x Wide-range zoom lens
to 1000x VH-Z100R/Z100T
Lens joint
VHX-J00T/
J20T/J20UT/
J50T/J100T/
J250T/J500T/
VHX-A97F*12 100x Universal zoom lens
JZST
to 1000x VH-Z100UR/Z100UT
Joint holder*10
OP-88338

20x Universal zoom lens


to 200x
VH-Z20UR/Z20UT

Small high-performance
20x zoom lens
to 200x VH-Z20R/Z20T
VHX-970F

High-performance low-range
0.1x zoom lens
to 50x VH-Z00R/Z00T

Long-working-distance,
50x high-performance zoom lens
to 500x VH-Z50L/Z50T

Borescope lenses*4

VH-B55 VH-B100

VH-BA

Bayonet-type
C-mount VH-B18 VH-B27 VH-B40
adpater
OP-51479
Camera lens
(C-mount)

Fibrescope*5

VH-F
*7

Microscope VH-F61A VH-F111A

36
❚ Stages

Differential interference
filter for low-magnification
objective lens
OP-88324

Differential interference filter


Coaxial polarising filter set for medium-, high- and
highest-magnification Free-angle Large free-angle
OP-88323
objective lens observation system observation system
OP-88325 VHX-S750E VHX-S770E
(XYZ motorised stage, (XYZ motorised stage,
Z motorised focus) Z motorised focus)

Adjustable illumination adapter


for VH-ZST
OP-87796

Polarising illumination adapter


Free-angle Large free-angle
OP-51649
observation system observation system
VHX-S650E VHX-S660E
(XYZ motorised stage) (XYZ motorised stage)
Contact adapter
VHX-S600E
OP-81880
(Z motorised focus)

Head Polarising illumination adapter


OP-72407*8 OP-72405*2

Polarising illumination adpater


OP-72406
Polarising filter
SCP filter set OP-87800*8
Darkfield illumination adapter
OP-87821
OP-72402
Ring Free-angle Free-angle observation
illumination unit Adjustable illumination adapter observation system system
for Z100/Z100U/ OP-72404
VH-S300 VHX-S90F/VH-S30B
Z20U
OP-88164 Wide-area illumination adapter (Z motorised focus)
OP-87298*3 VH-S30F/S30B
DIC prism set
OP-86943
Diffuse illumination adapter
OP-87299

DIC prism Adjustable illumination adapter


and filter set VH-K20
OP-87297 VH lens mounting XY measurement system
Super-diffuse illumination adapter stand VH-M100E
OP-42305 OP-25539
XY stage
Polarising illumination adapter OP-22124
OP-87429

Non-contact diffuse adapter


OP-35414

Multi-diffuse adapter
OP-35469

Coaxial illumination adapter Z-axis motorised Vibration-resistant


OP-35416 high-magnification
VHX-S700F/S600F
observation system
VH-S5

Non-reflective illumination ring


OP-32009 ❚ Modules

Diffuse illumination adapter 3D profile measurement module


971929 VHX-H5M
XY measurement module
VHX-H3M3
Polarising illumination adapter
Ring illumination unit for 971930
VH-Z50L/T
OP-88135
*1 VH-Z00T/Z20T/Z20UT/Z50T/Z100UT/Z100T/Z250T/Z500T/ZST TRIPLE R-compliant lenses are fitted with automatic lens-magnification recognition units and connection recognition mounts. *2 For coaxial lighting,
OP-72407 and OP-72406 are required. *3 Included as standard with the VH-Z20UR/Z20UT. *4 The real-bore cable (OP-87201) is required. *5 The dedicated light-guide attachment (OP-88332) is required. *6 When the
VH-Z00R or Z20R is used, the OP-66871 is required. *7 A C-mount adapter suitable for the microscope is required. *8 for the VH-Z100R, use the OP-72407. For the VH-Z100T/VH-Z100UR/VH-Z100UT, use the OP-87800.
*9 The lighting unit (OP-88329) is required for mounting the VH-ZST, VH-Z500T, VH-Z250T or VH-Z100T on the VHX-7020. *10 When mounting the RZ lens on the VHX-S750E/770E, the OP-88338 (joint holder) is required.
*11 Models may vary according to the instrument language. VHX-A70 (Japanese) / VHX-A70E (English) / VHX-A70D (German) / VHX-A70C (Simplified Chinese) / VHX-A70W (Traditional Chinese) / VHX-A70F (French) /
VHX-A70K (Korean) / VHX-A70M (Spanish) / VHX-A70T (Thai) / VHX-A70I (Italian) / VHX-A70Z (Czech) / VHX-A70H (Hungarian) / VHX-A70P (Polish). *12 Models may vary according to the instrument language.
VHX-A97F (Japanese) / VHX-A97FE (English) / VHX-A97FD (German) / VHX-A97FC (Simplified Chinese) / VHX-A97FW (Traditional Chinese) / VHX-A97FF (French) / VHX-A97FK ( Korean) / VHX-A97FM (Spanish).

37
Specifications

❚ Controller
Model VHX-7000 VHX-970F
1/1.8 inch, 3.19 megapixel CMOS image sensor 1/1.8 inch, 3.19 megapixel CMOS image sensor
Image receiving element
Total pixels: 2064 (H) × 1554 (V); virtual pixels: 2048 (H) × 1536 (V) Total pixels: 2064 (H) × 1554 (V); virtual pixels: 2048 (H) × 1536 (V)
Scanning system Progressive Progressive
Frame rate 50 F/S (max.) 50 F/S (max.)
Standard 2048 (H) × 1536 (V) 2048 (H) × 1536 (V)
Resolution
High accuracy 6144 (H) × 4608 (V)*1 -
High dynamic range 16-bit intensity range through RGB data from each pixel -
VHX-7020
Gain Manual, Preset Manual, Preset
Electronic shutter Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000 Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000
Supercharge shutter Can be set in 0.01 s increments from 0.02 to 16 s Can be set in 0.01 s increments from 0.02 to 16 s
White balance Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K) Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required Not required
Built-in light Type High-intensity LED High-intensity LED
source Service life 40 thousand hours (reference value) 40 thousand hours (reference value)
1/1.7-inch, 12.22-megapixel CMOS image sensor;
Image receiving element
total pixels: 4168 (H) × 3062 (V); virtual pixels: 4024 (H) × 3036 (V)
Camera Scanning system Progressive
Frame rate 30 F/S (max.)
Fast 2048 (H) × 1536 (V)
Standard 2880 (H) × 2160 (V)
High-resolution
2880 (H) × 2160 (V)
Resolution (4K Mode OFF)
High-resolution
4000 (H) × 3000 (V)
(4K Mode ON) VHX-7100 -
High accuracy 12,000 (H) × 9000 (V)*1
High dynamic range 16-bit intensity range through RGB data from each pixel
Gain Manual, Preset
Electronic shutter Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000
Supercharge shutter Can be set in 0.01 s increments from 0.03 to 4 s
White balance Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required
Built-in Type High-intensity LED
light source Service life 40 thousand hours (reference value)
Size Colour LCD (IPS type), 27-inch*5 Colour LCD (IPS type), 27-inch*5
Screen size 596.736 (H) × 335.664 (V) mm 596.736 (H) × 335.664 (V) mm
Pixel pitch 0.1554 mm (H) × 0.1554 mm (V) 0.1554 mm (H) × 0.1554 mm (V)
LCD Number of pixels 3840 (H) × 2160 (V) 3840 (H) × 2160 (V)
monitor Display colours Approx. 1.07 billion colours*2 Approx. 1.07 billion colours*2
Brightness 350 cd/m2 (Centre 1 Point, typical) 350 cd/m2 (Centre 1 Point, typical)
Contrast ratio 1300:1 (typical) 1300:1 (typical)
Viewing angle ±89° (typical, horizontal), ±89° (typical, vertical) ±89° (typical, horizontal), ±89° (typical, vertical)
1 TB (including 350 GB reserved system space) 1 TB (including 350 GB reserved system space)
Hard disk
Storage capacity Approx. 2.16 million images (when 3 megapixel images are compressed) to Approx. 2.16 million images (when 3 megapixel images are compressed) to
drive unit
approx. 71.1 thousand images (when 3 megapixel images are not compressed) approx. 71.1 thousand images (when 3 megapixel images are not compressed)
Image format JPEG (with compression), TIFF (without compression) JPEG (with compression), TIFF (without compression)
Observable image size 50 thousand (H) × 50 thousand (V) pixels (with stitching) 2048 (H) × 1536 (V) pixels
Output method Display port: 3840 × 2160 pixels Display port: 3840 × 2160 pixels
Video
Scanning Special LCD monitor 132 kHz (H), 60 Hz (V) 132 kHz (H), 60 Hz (V)
output
frequency External monitor 132 kHz (H), 60 Hz (V) 132 kHz (H), 60 Hz (V)
Mouse input USB mouse supported USB mouse supported
Input Keyboard input USB keyboard supported USB keyboard supported
External remote input Pause/recording non-voltage input (with and without contact) Pause/recording non-voltage input (with and without contact)
LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
Interface USB 2.0 series A 6 ports 6 ports
USB 3.0 series A 2 ports 2 ports
Power Power voltage 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz
supply Power consumption 430 VA 430 VA
Environmental Operating ambient temperature +5 to 40°C*3 +5 to 40°C*3
resistance Operating ambient humidity 35 to 80% RH (no condensation)*4 35 to 80% RH (no condensation)*4
Controller Approx. 12.0 kg Approx. 12.0 kg
Weight Camera unit Approx. 0.6 kg (VHX-7020), approx. 5.0 kg (VHX-7100) Approx. 0.6 kg (VHX-7020)
Handheld controller Approx. 0.45 kg Approx. 0.45 kg
Dimensions (excluding the projected areas) 625 (W) × 460 (H) × 180 (D) mm (when stored) 625 (W) × 460 (H) × 180 (D) mm (when stored)
*1 When using the high-resolution function by means of the motorised stage shift. *2 8-bit + 2 FRC display *3 5°C to 35°C for hand-held observation with a standard camera
*4 If the ambient operating temperature exceeds 40°C, use the product under conditions where the relative humidity is not more than 70%.
*5 The LCD monitor provided with this system has been manufactured using extremely advanced technology. In very rare cases, an unlit pixel (black spot) or a lit pixel (bright spot) may be present on the screen. However, this is
not indicative of a fault.

❚ Stage
Model VHX-S750E VHX-S770E VHX-S600E VHX-S90F/VH-S30B
XY stage: Motorised/Manual Motorised Motorised Manual Manual
XY motorised stage motor 2-phase stepping motor 2-phase stepping motor – –
XY motorised stage resolution 1 µm (typical) 1 µm (typical) – –
XYθ XY motorised stage movement speed 10 mm/sec (max) 20 mm/sec (max) – –
stage XY-stage movement range ±20 mm ±50 mm ±35 mm X: ±37.5 mm, Y: ±25 mm
θ rotation angle ±90° – 360° 360°
XYθ stage size Top surface: 171 mm × 168 mm (centre disk: ø100) Top surface: 233 mm × 185 mm (centre disk: ø168) Top surface: 198 × 150 mm (centre disk: ø136) Top surface: 180 × 136 mm
Transmitted lighting 20x or higher 20x or higher 20x or higher –
Z stage: Motorised/Manual Motorised Motorised Motorised Motorised
Z motorised stage motor 5-phase stepper motor 5-phase stepper motor 5-phase stepper motor 2-phase stepper motor
Focus
Z motorised stage resolution 0.1 µm (typical) 0.1 µm (typical) 0.1 µm (typical) 1 µm (typical)
Z axis
Z motorised stage travel speed 17 mm/sec (max) 17 mm/sec (max) 17 mm/sec (max) 5 mm/sec (max)
Z stage travel range 49 mm 49 mm 49 mm Motorised: 29 mm Manual: 33 mm
Z stage: Motorised/Manual Motorised Motorised Manual Manual
Z motorised stage motor 2-phase stepping motor 2-phase stepping motor – –
Stage
Z motorised stage resolution 1 µm (typical) 1 µm (typical) – –
Z axis
Z motorised stage travel speed 10 mm/sec (max) 10 mm/sec (max) – –
Z stage travel range 50 mm 50 mm 45 mm 47 mm
Side camera Yes, VGA Yes, VGA No No
Power voltage 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz DC 12 V
Ratings
Power consumption 130 VA 130 VA 50 VA 18 VA
Environmental Operating ambient temperature +5 to 40°C +5 to 40°C +5 to 40°C +5 to 40°C
resistance Operating ambient humidity 35 to 80% RH (no condensation) 35 to 80% RH (no condensation) 35 to 80% RH (no condensation) 35 to 80% RH (no condensation)
Weight 23.8 kg 25.3 kg Approx. 17.2 kg Approx. 14.2 kg
Load capacity 5 kg 5 kg 1 kg 1 kg

38
❚ Functions
Model VHX-7000 VHX-970F
Auto-focus function Yes Yes
Focus view function Yes No
Lighting switch function
Observation Yes (Full, Partial, Lateral, Darkfield, Brightfield, Mixed Lighting) Yes (Full, Partial, Lateral, Darkfield, Brightfield, Mixed Lighting)
(uneven surface enhancement)
functions
Multi-lighting function Yes No
Optical shadow effect mode function Yes No
Camera-shake correcting function Yes Yes
Full-screen display function Yes Yes
Display Split-screen function Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display
function Real-time digital zoom 1.0x to 10.0x 1.0x to 10.0x
Comment display function Yes Yes
Glare removal function Yes Yes
Image
Ring-reflection removal function Yes No
enhancement
HDR function Yes No
function
Fine-Shot function Yes Yes
2D image stitching Yes No
Stitching
3D image stitching Yes No
function
Navigation function Yes No
Real-time depth composition function Yes No
Quick composition & 3D function Yes Yes
High-quality depth composition Yes Yes
3D function
3D display function Yes Yes
3D shape correction function Yes (Slope/Sphere/Cylinder) Yes (Slope/Sphere/Cylinder)
3D comparison function Yes (Combination/Comparison/Difference display mode) Yes (Combination/Comparison/Difference display mode)
Report output to Excel Yes Yes
Capture condition reproduction function Yes Yes
Recording Timer capture function Yes Yes
function
Video recording/ Max speed: 50 FPS; *Video size when using VHX-7020 Max. speed: 30 FPS; Video size
playback function (2880 × 2160, 2048 × 1536, 800 × 600, 640 × 480) (2048 × 1536, 800 × 600, 640 × 480)
Distance, angle, radius, area etc. Yes, various Yes, various
Automatic edge detection Yes Yes
Scale display Yes, various Yes, various
Automatic count, area measurement function Yes (length/area can be measured using brightness/colour extraction) Yes (length/area can be measured using brightness/colour extraction)
Automatic area measurement Yes No
Grain size analysis Yes No
Contamination analysis Yes No
Measuring One-click measurement Yes No
functions Auto-measurement teaching Yes No
Auto measurement Yes No
Automatic lens/zoom recognition
Yes Yes
function (Triple 'R)
Auto-calibration Yes (numerical input not required) Yes (numerical input not required)

One push calibration function Yes (scale position adjustment not required) No

CSV storage Yes Yes


3D profile measurement Yes Yes
3D measurement function
Point height measurement Yes Yes
(VHX-H5M
3D volume measurement Yes Yes
optional function)
Roughness measurement Yes Yes

Manual XY XY stage measurement Yes Yes


Measurement System
(VHX-H3M3
optional function) Wide image display function Yes Yes

Easy menu Yes Yes


Space-saving single unit Yes Yes
Foot switch compatibility Yes Yes
User-specific setting memory Yes Yes
Utilities System protection setting Yes Yes
PC mode Yes Yes
Network connection function Yes (communication software, file sharing, FTP) Yes (communication software, file sharing, FTP)
Function guide Yes Yes
Video help Yes Yes
Communication software Enables easy transmission of image data between VHX system and PC. (LAN) Enables easy transmission of image data between VHX system and PC. (LAN)
3D image playback software for the PC Enables 3D images saved on VHX to be played back in 3D on the PC. Enables 3D images saved on VHX to be played back in 3D on the PC.
Optical shadow effect mode Enables parameter adjustment on Optical Shadow Effect Mode images
No
PC software playback software saved on the VHX.
(available free of Multi-lighting images saved on the VHX can be played
Multi-lighting playback software No
charge) back later with the lighting direction changed.
HDR playback, measurement, stitched Enables HDR parameter adjustment, display of stitched images,
Enables measurement on the PC.
image playback software measurement.
One-click measurement compilation software Enables one-click measurement result compilation and export to Excel. No

39
C O N T A
0 8 0 0 - 5 3 9 3 6 2 3
C T U S
www.keyence.de SAFETY INFORMATION
Please read the instruction manual carefully in
E-Mail: info@keyence.de
0800-KEYENCE order to safely operate any KEYENCE product.

CONTACT YOUR NEAREST OFFICE FOR RELEASE STATUS

KEYENCE DEUTSCHLAND GmbH


Head office Siemensstrasse 1, D-63263 Neu-Isenburg, Germany Tel: +49-6102-3689-0 Fax: +49-6102-3689-100
Regional sales offices Berlin Cologne Dusseldorf Erfurt Essen Frankfurt Hamburg Hanover Karlsruhe Leipzig
Mannheim Montabaur Munich Nuremberg Stuttgart Ulm

KEYENCE INTERNATIONAL (BELGIUM) NV/SA


Head office Bedrijvenlaan 5, 2800 Mechelen, Belgium Tel: +32 (0)15 281 222 Fax: +32 (0)15 201 623 www.keyence.eu E-Mail: info@keyence.eu
Regional sales offices BELGIUM CZECH REPUBLIC NETHERLANDS ROMANIA SLOVENIA AUSTRIA HUNGARY POLAND SLOVAKIA SWITZERLAND

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. KD1_GB-2090

Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies. Unauthorised reproduction of this catalogue is strictly prohibited.
Copyright © 2019 KEYENCE CORPORATION. All rights reserved. VHX7000-KD-C3-GB 2120-2 622K20 L

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