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Digital Microscope: 4K High-Resolution Microscope
Digital Microscope: 4K High-Resolution Microscope
Digital Microscope: 4K High-Resolution Microscope
VHX-7000 Series
4K HIGH-RESOLUTION MICROSCOPE
Previous
Models VHX-7000
HIGH-RESOLUTION IMAGES
2
Digital Microscope
VHX-7000 Series
3
Microscope History 2nd Generation
VH-6000
VH-6300
VH-7000
VH-8000
VHX-100
1st Generation
VHX-200
New design eliminating
eye-to-the-lens viewing
4
5th Generation
VHX-7000
4th Generation
VHX-500
VHX-600
VHX-900
VHX-1000
VHX-2000
3rd Generation
VHX-5000
Observation using 16-bit
high colour gradation
VHX-6000
5
VIEW
CAPTURE
MEASURE
6
Observation can be carried out whenever Large depth of field Hand-held observation
required without user adjustments
Images can be saved and shared easily Observed images can be saved easily Automatically generates reports
with minimal effort
Failure
Report
Failure Report Failu
Custom
er Informa re Repo
tion
Compan
rt
Reveals details, such as minute variations in surface level and tiny imperfections, with just the touch of a button.
8
High-speed
auto-focus stage
Motorised eucentric
stage
The focus view feature and the motorised stage make focusing intuitive, and magnification can be changed by operating the handheld controller.
High definition
4K Fully-integrated head: page 30
Featuring a 4K CMOS image sensor and a newly developed optical system, this VHX Series combines a large depth of field with high resolution to
deliver a new observation mode.
9
Optical Shadow Effect Mode
High-resolution images
draw out the finest details
Using a specialised design featuring a High resolution lens, a 4K CMOS image
method of microscopy.
Previous
Models
10
Optical
Shadow
Effect
Mode
Fracture surface (50x)
By analysing the variation in an image, in terms of contrast, minute irregularities on the surface can be detected.
Illumination
Illumination
The image above is an illustration of the principle of Optical Shadow Effect Mode.
11
Controls are now even
simpler and more
convenient to operate
High-speed
auto-focus stage
Motorised
eucentric stage
12
Advanced Operability
Even first-time users can perform observations perfectly on the desired area without special training.
13
Lighting and Observation Functions
Multiple lighting patterns are captured automatically
Multi-lighting
14
PCB flux (150x)
IC (1500x)
15
Depth Composition and Image Stitching
Always view your sample fully in focus
Real-time composition
interface
Depth compositing
A fully focused image is synthesised.
16
BGA (100x)
Up to 50,000 pixels
Larger high-magnification
observation range
Up to 50,000 pixels
When you press the Image Stitching button,
the image is automatically stitched together.
1536
Stitching can be performed quickly over pixels
large areas, and can be used to create a
gap-free overview of the whole image.
Image stitching can handle up to
2048 pixels
50,000 pixels vertically by 50,000 pixels
horizontally.
3D image stitching
By capturing multiple images while the
stage is moving, 3D data capture and
stitching can be performed
simultaneously. This makes it possible
to ascertain the overall contours of the
sample. Surface irregularities can also
be measured.
17
Applications: Observation
Microneedles (200x)
Switch (30x)
Data can be recorded at Don't just save the image: save the capture settings
Saving data
Report function
You can install Excel on your VHX system
Network
just like on a PC. By setting up form
templates in advance, you can easily
convert observed images into reports. Other factories Overseas offices
Failure Report
Customer Information
Failure
Custom
Compan
Departm
y
Report
er Informa
tion
Date of Issue:
9/27/2018 3:38:03 PM
Cus
Failu
tome
re Re
port
Settings used at the time of image capture can also be recorded for easy reproduction at a later date
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20
Even the measurement
Automatic recognition
magnification is
automatically recorded Lens connection
Lens type
One-push calibration
Traceability
This dedicated scale is in compliance with
National Institute
Japan's national traceability standards. JCSS Coordinate Calibration
of Advanced Reference
accredited measuring scale
It can be used with complete confidence for Industrial Science scale
manufacturer device OP-87426
and Technology
your calibration operations.
21
Measurement Functions
Measure as you view
2D measurement
22
One-touch measurement
from 3D contours to
surface roughness
3D measurement
Roughness analysis
23
Measurement Functions
Even complex measurements can be taken easily by anyone
Contamination analysis
compliant with
ISO 16232 and VDA 19
Contamination analysis
24
One click
Particle analysis Starch (400x) Crystal grain size Metal structure (800x) Maximum area measurement Probe mark (1000x)
analysis
25
Applications: Measurement
0°
15° 0°
30° 15°
30°
45°
45°
45° 45°
60°
Easy to adjust
Cable holder
60°
Eliminates vibration by
securing the cable. Also
reduces abrasion and wear.
75°
90°
90°
0°
120°
High-stability frame
Vibration-proof rubber
90°
60°
LED transmitted illumination is provided as standard, The built-in rotation sensor identifies the rotation The handheld controller makes it easy to move the
enabling clear observation throughout the range from position from the stage. Even when rotated, the stage stage on the XY axes and on the Z axis.
low to high magnification. moves in the originally set direction.
28
100 × 100 mm large In response to customer
requests, several special
XYZ motorised stage large-scale stages are now
VHX-S770E available.
The special stages shown
below are not KEYENCE
To meet the need for larger products.
observation ranges and to
accommodate large samples,
a 100 × 100 mm large XYZ
motorised stage has been
released.
XY measurement system
compliant with traceability
standards
VH-M100E
Measurement module
delivering high ease of use
This XY measurement system
ensures highly reliable VHX-H3M3
measurements based on a
traceability system underpinned by
Wide range of measurements Real-time screen display
Japan's national standards. Display unit Includes distance between Displays XYZ measurement
Additionally, the manual stage can OP-84483 two points, radius, angle results on the monitor in
be moved to extend the and other measurements. real-time.
This is useful when the
measurement range beyond the travel range cannot be
maximum 100 × 100 mm field of viewed on the main unit
view. screen.
Backlighting unit
OP-84484
Clearly projects the
edges of the sample.
29
The new fully-integrated head marks a leap forward,
with the highest picture quality in the series
Newly developed
imaging engine
NEO REMAX
4K CMOS
image sensor
Motorised revolver
30
4K Fully-integrated head
High definition
This series combines a large depth of field with high resolution,
The wide range of viewing modes, including brightfield, darkfield, polarised light,
3000 pixels
and low noise. This mobilises the full image-capturing
1600 pixels
6the times
accuracy
4K display
power of the 4K monitor and the high resolution lens,
Approx. 12.22 megapixels
1200 pixels
High
magnification
31
Lens KEYENCE optical lenses are perpetually evolving
With four dedicated objective lenses and built-in lighting, this unit combines high (NA 0.9) resolution with large depth
of field. Designed for outstanding operability.
High-Resolution lenses
Field of view
(mm)
(mm)
Vertical 11.4 7.6 5.7 4.56 2.85 2.28 Vertical 2.28 1.52 1.14 0.76 0.57 0.46
Diagonal 19.05 12.7 9.53 7.62 4.76 3.81 Diagonal 3.81 2.54 1.91 1.27 0.95 0.76
Working distance (mm) 30 (22.9*1) Working distance (mm) 24
VHX-E500 VHX-E2500
High-Resolution, High- High-Resolution, Highest-
Magnification Objective Lens 500 2500 Magnification Objective Lens 2500 6000
VHX-E500 VHX-E2500
Model VHX-E500 Model VHX-E2500
Magnification 500x 700x 1000x 1500x 2000x 2500x Magnification 2500x 4000x 5000x 6000x
Horizontal 0.61 0.44 0.31 0.20 0.16 0.12 Horizontal 0.12 0.08 0.06 0.05
Field of view
Field of view
(mm)
(mm)
Vertical 0.46 0.33 0.23 0.15 0.11 0.09 Vertical 0.09 0.06 0.05 0.04
Diagonal 0.76 0.54 0.38 0.25 0.19 0.15 Diagonal 0.15 0.1 0.08 0.06
Working distance (mm) 6 Working distance (mm) 1
options to enable observation that best suits *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
*2 Because of the flared shape, coaxial illumination undergoes circular polarisation.
the sample.
32
High-Performance, Low-Range Zoom Lens VH-Z00R/Z00T 0.1 50
Field of view
With a magnification range from 0.1x to 50x,
(mm)
Vertical 2400 480 240 45.5 22.8 7.6 4.6
the VH-Z00R/Z00T allows observation from
an entire-sample image to an enlarged detail. Diagonal 4000 800 400 76.2 38.1 12.7 7.6
Working Approx. Approx. Approx.
Featuring click-style magnification 95
distance (mm) 7700 1500 720
adjustment, an aperture mechanism and an
*1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
observation distance upwards of 95 mm, this
macro lens delivers high performance and
excellent operability.
Field of view
Delivers high-resolution observation at
(mm)
Vertical 11.40 7.60 4.56 2.28 1.52 1.14
magnifications of 20× to 200×, making it
ideal for general-purpose use. The large Diagonal 19.05 12.70 7.62 3.81 2.54 1.91
depth of field has been upgraded even Depth of field (mm)*2 34 15.5 6.0 1.6 0.74 0.44
condition, colouring, and other factors can Working distance (mm) 6.5
be observed with total clarity. *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
Brightfield Darkfield
TRIPLE R-compliant lenses are fitted with automatic lens- and magnification-recognition units. 33
Basic
Model
Frequently-Used Functions in an Easy-to-Use Package
Basic model
VHX-970F
Functions for viewing, capturing and measuring
are more intuitive, and have evolved so far that
they can be operated correctly even by
first-time users.
The lenses, camera, and graphics engine are designed to provide a large Flexible and accurate observation all over the sample is possible thanks to the
depth of field and to facilitate observation. ability to tilt the camera up to 90 degrees and the ability to rotate the XY stage.
All-in-one system for viewing, capturing and measuring Depth composition and 3D display functions
Built-in 1 TB hard disk drive and network connection support. Even when the sample surface is uneven, the observed image is fully focused.
34
Free-angle observation system
VH-S30F/S30B
Easy to adjust
0°
Adjustment mechanisms allow easy field of
view alignment, rotation and oblique axis 15° 0°
15°
motion. Eucentric design ensures that the 30°
sample stays centred in the field of view even if
45°
the lens unit is tilted or rotated.
45° Easy to adjust 30°
Vibration-proof rubber
35
System Configuration Diagram: VHX Series System Line-Up High resolution lenses
High-resolution low-
20x magnification objective lens
to 100x VHX-E20
High-resolution medium-
100x magnification objective lens
to 500x VHX-E100
High-resolution high-
500x magnification objective lens
to 2500x VHX-E500
High-resolution highest-
VHX-7100
2500x magnification objective lens
to 6000x
VHX-E2500
Dual-objective
20x zoom lens
VHX-7000 to 2000x VH-ZST
High-resolution
VHX-A70*11 500x zoom lens
Bayonet-type
standard to 5000x VH-Z500R/
adpater Z500T
OP-51478/
OP-66871*6
VHX-7020 *9 Dual-light high-
250x magnification zoom lens
to 2500x VH-Z250R/Z250T
VHX-7020 *9
100x Wide-range zoom lens
to 1000x VH-Z100R/Z100T
Lens joint
VHX-J00T/
J20T/J20UT/
J50T/J100T/
J250T/J500T/
VHX-A97F*12 100x Universal zoom lens
JZST
to 1000x VH-Z100UR/Z100UT
Joint holder*10
OP-88338
Small high-performance
20x zoom lens
to 200x VH-Z20R/Z20T
VHX-970F
High-performance low-range
0.1x zoom lens
to 50x VH-Z00R/Z00T
Long-working-distance,
50x high-performance zoom lens
to 500x VH-Z50L/Z50T
Borescope lenses*4
VH-B55 VH-B100
VH-BA
Bayonet-type
C-mount VH-B18 VH-B27 VH-B40
adpater
OP-51479
Camera lens
(C-mount)
Fibrescope*5
VH-F
*7
36
❚ Stages
Differential interference
filter for low-magnification
objective lens
OP-88324
Multi-diffuse adapter
OP-35469
37
Specifications
❚ Controller
Model VHX-7000 VHX-970F
1/1.8 inch, 3.19 megapixel CMOS image sensor 1/1.8 inch, 3.19 megapixel CMOS image sensor
Image receiving element
Total pixels: 2064 (H) × 1554 (V); virtual pixels: 2048 (H) × 1536 (V) Total pixels: 2064 (H) × 1554 (V); virtual pixels: 2048 (H) × 1536 (V)
Scanning system Progressive Progressive
Frame rate 50 F/S (max.) 50 F/S (max.)
Standard 2048 (H) × 1536 (V) 2048 (H) × 1536 (V)
Resolution
High accuracy 6144 (H) × 4608 (V)*1 -
High dynamic range 16-bit intensity range through RGB data from each pixel -
VHX-7020
Gain Manual, Preset Manual, Preset
Electronic shutter Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000 Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000
Supercharge shutter Can be set in 0.01 s increments from 0.02 to 16 s Can be set in 0.01 s increments from 0.02 to 16 s
White balance Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K) Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required Not required
Built-in light Type High-intensity LED High-intensity LED
source Service life 40 thousand hours (reference value) 40 thousand hours (reference value)
1/1.7-inch, 12.22-megapixel CMOS image sensor;
Image receiving element
total pixels: 4168 (H) × 3062 (V); virtual pixels: 4024 (H) × 3036 (V)
Camera Scanning system Progressive
Frame rate 30 F/S (max.)
Fast 2048 (H) × 1536 (V)
Standard 2880 (H) × 2160 (V)
High-resolution
2880 (H) × 2160 (V)
Resolution (4K Mode OFF)
High-resolution
4000 (H) × 3000 (V)
(4K Mode ON) VHX-7100 -
High accuracy 12,000 (H) × 9000 (V)*1
High dynamic range 16-bit intensity range through RGB data from each pixel
Gain Manual, Preset
Electronic shutter Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000
Supercharge shutter Can be set in 0.01 s increments from 0.03 to 4 s
White balance Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required
Built-in Type High-intensity LED
light source Service life 40 thousand hours (reference value)
Size Colour LCD (IPS type), 27-inch*5 Colour LCD (IPS type), 27-inch*5
Screen size 596.736 (H) × 335.664 (V) mm 596.736 (H) × 335.664 (V) mm
Pixel pitch 0.1554 mm (H) × 0.1554 mm (V) 0.1554 mm (H) × 0.1554 mm (V)
LCD Number of pixels 3840 (H) × 2160 (V) 3840 (H) × 2160 (V)
monitor Display colours Approx. 1.07 billion colours*2 Approx. 1.07 billion colours*2
Brightness 350 cd/m2 (Centre 1 Point, typical) 350 cd/m2 (Centre 1 Point, typical)
Contrast ratio 1300:1 (typical) 1300:1 (typical)
Viewing angle ±89° (typical, horizontal), ±89° (typical, vertical) ±89° (typical, horizontal), ±89° (typical, vertical)
1 TB (including 350 GB reserved system space) 1 TB (including 350 GB reserved system space)
Hard disk
Storage capacity Approx. 2.16 million images (when 3 megapixel images are compressed) to Approx. 2.16 million images (when 3 megapixel images are compressed) to
drive unit
approx. 71.1 thousand images (when 3 megapixel images are not compressed) approx. 71.1 thousand images (when 3 megapixel images are not compressed)
Image format JPEG (with compression), TIFF (without compression) JPEG (with compression), TIFF (without compression)
Observable image size 50 thousand (H) × 50 thousand (V) pixels (with stitching) 2048 (H) × 1536 (V) pixels
Output method Display port: 3840 × 2160 pixels Display port: 3840 × 2160 pixels
Video
Scanning Special LCD monitor 132 kHz (H), 60 Hz (V) 132 kHz (H), 60 Hz (V)
output
frequency External monitor 132 kHz (H), 60 Hz (V) 132 kHz (H), 60 Hz (V)
Mouse input USB mouse supported USB mouse supported
Input Keyboard input USB keyboard supported USB keyboard supported
External remote input Pause/recording non-voltage input (with and without contact) Pause/recording non-voltage input (with and without contact)
LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
Interface USB 2.0 series A 6 ports 6 ports
USB 3.0 series A 2 ports 2 ports
Power Power voltage 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz
supply Power consumption 430 VA 430 VA
Environmental Operating ambient temperature +5 to 40°C*3 +5 to 40°C*3
resistance Operating ambient humidity 35 to 80% RH (no condensation)*4 35 to 80% RH (no condensation)*4
Controller Approx. 12.0 kg Approx. 12.0 kg
Weight Camera unit Approx. 0.6 kg (VHX-7020), approx. 5.0 kg (VHX-7100) Approx. 0.6 kg (VHX-7020)
Handheld controller Approx. 0.45 kg Approx. 0.45 kg
Dimensions (excluding the projected areas) 625 (W) × 460 (H) × 180 (D) mm (when stored) 625 (W) × 460 (H) × 180 (D) mm (when stored)
*1 When using the high-resolution function by means of the motorised stage shift. *2 8-bit + 2 FRC display *3 5°C to 35°C for hand-held observation with a standard camera
*4 If the ambient operating temperature exceeds 40°C, use the product under conditions where the relative humidity is not more than 70%.
*5 The LCD monitor provided with this system has been manufactured using extremely advanced technology. In very rare cases, an unlit pixel (black spot) or a lit pixel (bright spot) may be present on the screen. However, this is
not indicative of a fault.
❚ Stage
Model VHX-S750E VHX-S770E VHX-S600E VHX-S90F/VH-S30B
XY stage: Motorised/Manual Motorised Motorised Manual Manual
XY motorised stage motor 2-phase stepping motor 2-phase stepping motor – –
XY motorised stage resolution 1 µm (typical) 1 µm (typical) – –
XYθ XY motorised stage movement speed 10 mm/sec (max) 20 mm/sec (max) – –
stage XY-stage movement range ±20 mm ±50 mm ±35 mm X: ±37.5 mm, Y: ±25 mm
θ rotation angle ±90° – 360° 360°
XYθ stage size Top surface: 171 mm × 168 mm (centre disk: ø100) Top surface: 233 mm × 185 mm (centre disk: ø168) Top surface: 198 × 150 mm (centre disk: ø136) Top surface: 180 × 136 mm
Transmitted lighting 20x or higher 20x or higher 20x or higher –
Z stage: Motorised/Manual Motorised Motorised Motorised Motorised
Z motorised stage motor 5-phase stepper motor 5-phase stepper motor 5-phase stepper motor 2-phase stepper motor
Focus
Z motorised stage resolution 0.1 µm (typical) 0.1 µm (typical) 0.1 µm (typical) 1 µm (typical)
Z axis
Z motorised stage travel speed 17 mm/sec (max) 17 mm/sec (max) 17 mm/sec (max) 5 mm/sec (max)
Z stage travel range 49 mm 49 mm 49 mm Motorised: 29 mm Manual: 33 mm
Z stage: Motorised/Manual Motorised Motorised Manual Manual
Z motorised stage motor 2-phase stepping motor 2-phase stepping motor – –
Stage
Z motorised stage resolution 1 µm (typical) 1 µm (typical) – –
Z axis
Z motorised stage travel speed 10 mm/sec (max) 10 mm/sec (max) – –
Z stage travel range 50 mm 50 mm 45 mm 47 mm
Side camera Yes, VGA Yes, VGA No No
Power voltage 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz 100 to 240 VAC ±10%, 50/60 Hz DC 12 V
Ratings
Power consumption 130 VA 130 VA 50 VA 18 VA
Environmental Operating ambient temperature +5 to 40°C +5 to 40°C +5 to 40°C +5 to 40°C
resistance Operating ambient humidity 35 to 80% RH (no condensation) 35 to 80% RH (no condensation) 35 to 80% RH (no condensation) 35 to 80% RH (no condensation)
Weight 23.8 kg 25.3 kg Approx. 17.2 kg Approx. 14.2 kg
Load capacity 5 kg 5 kg 1 kg 1 kg
38
❚ Functions
Model VHX-7000 VHX-970F
Auto-focus function Yes Yes
Focus view function Yes No
Lighting switch function
Observation Yes (Full, Partial, Lateral, Darkfield, Brightfield, Mixed Lighting) Yes (Full, Partial, Lateral, Darkfield, Brightfield, Mixed Lighting)
(uneven surface enhancement)
functions
Multi-lighting function Yes No
Optical shadow effect mode function Yes No
Camera-shake correcting function Yes Yes
Full-screen display function Yes Yes
Display Split-screen function Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display
function Real-time digital zoom 1.0x to 10.0x 1.0x to 10.0x
Comment display function Yes Yes
Glare removal function Yes Yes
Image
Ring-reflection removal function Yes No
enhancement
HDR function Yes No
function
Fine-Shot function Yes Yes
2D image stitching Yes No
Stitching
3D image stitching Yes No
function
Navigation function Yes No
Real-time depth composition function Yes No
Quick composition & 3D function Yes Yes
High-quality depth composition Yes Yes
3D function
3D display function Yes Yes
3D shape correction function Yes (Slope/Sphere/Cylinder) Yes (Slope/Sphere/Cylinder)
3D comparison function Yes (Combination/Comparison/Difference display mode) Yes (Combination/Comparison/Difference display mode)
Report output to Excel Yes Yes
Capture condition reproduction function Yes Yes
Recording Timer capture function Yes Yes
function
Video recording/ Max speed: 50 FPS; *Video size when using VHX-7020 Max. speed: 30 FPS; Video size
playback function (2880 × 2160, 2048 × 1536, 800 × 600, 640 × 480) (2048 × 1536, 800 × 600, 640 × 480)
Distance, angle, radius, area etc. Yes, various Yes, various
Automatic edge detection Yes Yes
Scale display Yes, various Yes, various
Automatic count, area measurement function Yes (length/area can be measured using brightness/colour extraction) Yes (length/area can be measured using brightness/colour extraction)
Automatic area measurement Yes No
Grain size analysis Yes No
Contamination analysis Yes No
Measuring One-click measurement Yes No
functions Auto-measurement teaching Yes No
Auto measurement Yes No
Automatic lens/zoom recognition
Yes Yes
function (Triple 'R)
Auto-calibration Yes (numerical input not required) Yes (numerical input not required)
One push calibration function Yes (scale position adjustment not required) No
39
C O N T A
0 8 0 0 - 5 3 9 3 6 2 3
C T U S
www.keyence.de SAFETY INFORMATION
Please read the instruction manual carefully in
E-Mail: info@keyence.de
0800-KEYENCE order to safely operate any KEYENCE product.
The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. KD1_GB-2090
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies. Unauthorised reproduction of this catalogue is strictly prohibited.
Copyright © 2019 KEYENCE CORPORATION. All rights reserved. VHX7000-KD-C3-GB 2120-2 622K20 L