Pntside the p we metald

nmos
Pmos Cen han ceMent)
Cenhancement)
eatentions ound

Sepeuahons

x6

plant

nmos
deplehon
Spasao o.
ontactcutb

- twplant det an
a mnAuM nmos deplefion
Duuon
is not 6
to exend deonease in wd
mintrnum

beyond
charnel t
l derechon
mimimum

Stpasationum
lant i'plant
Onothe
to

tsanish1

7ranisto dean YuletoR osc con to exfend

a mwnmum o a
byond i lo n
Dound O t y

Tanctto dxtgn uler Ja c m o s

 ASSlgnment-a
ent+on tfhe lambda -

baud deuan nulu c Aot a

donoe
metal
doule
dhe dimenucu or um
te
pla g n ulo.

(a tMOt
anb da - Baud Paugn ulu bad
mehodolo9y
v aler amd layont
al deuian tue
J a
pioc
e and a
pE8da
On
th wncept o dimuony
Rethng
0ut m atk
ependent way f
d
tp Acale UaUue rOM"
a

a eample, a tan
be a llotakd
will be um(}
MR ou thip
Mintmun ea w
LLLmdd
LLDITA-n dmaon
metala

N-(oeon
1hino Mnimum

widt
Scpolahon
PdJubn

Mntim
tal dh

pouton
whur no b a a lion ts Apeutd r e x may ovelas

oc FO P we Cmot nok thaE n 'd{atn

emsl fade andp dyfub n*e
wi1u Co y
 Metal i
polyeucon o
bo dihubn

Mtnimum

AraA cut cent

n
aa
r Sapaimpoad
otayeu sto be
ZZZIA
One.&th all ca

mnimum

minimum Sepagqkion
mulkiple cnile
and tlence tD
n(contacko tom mekaB a to metal

dA Minímum
Vta SepasaHon

ux a a oVulap

enEes

MA and ut

Wedtv Co nnd Uta Cub

meeal a to d
on
dcontastt Ccmo)
Dimenons 8m onble me tal , o ulode Poly
Reunn e n l

n'd on P d
34
Su
 Poiecon- Pordcon-a

SU SALM

metal-1
metal

width Sepasafior
Pouuuon-1 S

polyicn-2a
n

metal S

metal a
Sepataton
to polylcon-1
Pn
' S AAM
to poyutpn-a

Polakon-I

dtagnam
and layont aDam
Waaw h Shck

3-tnpul emos NA ND G a
 E (c Mos)
p U T NA ND GAT
VDD

S11 CE Nagnam

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