246 THE RUDIMENTS OF IMAGING SCIENCE ook 14 (WTF gesigr ot 10 %e4 os (CTFlpesisy onl o2| 20 are ee ae Oe re) ry Figure 619 The critical MTF of a resist as a function of resist contrast, (Reproduced with permission from K.L, Ts etal. (4) in the form 10vr ova M(dose) = MTF (a8) This means that to achieve full restoration of a line pattern of given spatial frequency (feature size), with a resist of contrast +, the optics of the printer need to have an MTF equal to M(dose). This is also termed the critical MTF (CMTF) of the resist (14) The relation between the CMTF and resist contrast is plotted in Fig. 6-19. It shows that with a high contrast resist a modest MTF of the optics is sufficient for the satisfactory imaging of a step function {14} Contrast Enhancement Techniques. High contrast recording materials are re- Quired to deal with the low contrast aerial image of the optics when these operate at the limits of their resolving power. In recent years a number of resists have been reported with contrast values well in excess of 2, and these will be described in Chapters 7 and 8. Another effective route to high contrast is by the use of a timed inhibition effect, whereby the function of the system is suppressed in the early stages of, exposure, An example is the oxygen inhibition of a bis-azide resist based on p-diazidostilbene-poly(vinyl pyrrolidone), which was designed in the Hitachi laboratories [15]. The inhibition of the photogenerated nitrene by aerial oxygen is used here to produce low-intensity reciprocity failure. At low 10°} —— PAM-PVP-DAS: (PAM/PVP = 0.7, DASIPolymer = 0.3, 0.4 um thick) “> Dichromated-PVA Exposure time (s) 5 10 o1 1.0 Light intensity (mWicm?) uo 0.50 mm Figure 620 Contrast enhancement by oxygen inhibition of crosslinking in a bis-aide resist. ‘Compare the reiprecity failure curve ofthe inhibited resist with that of dichromated polyinyl lcohob The lower part shows the black matsix of a color TV screen fabricated. with the dichromated system (eft) and with the oxygen-inhibited resist (ight). (Reproduced with permis son from T. Kohasti etal. (5})