NANOPHOTONIC ON-CHIP

O-RING RESONATOR
ON SILICON NITRIDE PLATFORM FOR
CHEMICAL SENSING APPLICATIONS
Bachelor of Physic Graduation Thesis
Performed by
Institute of Physics, Technology and
Elmanova Anna Information Systems
Supervisor:
Department of General and Experimental
Doctor of Sciences Galina Chulkova Physics
Scientific Advisor:
Moscow Pedagogical State University (MPGU)
Post Doc Vadim Kovalyuk

Moscow, 2021
 CONTENTS
1. I n t ro d u c t i o n
Objectives of the project and why it is important
2. G a s F l ow E x p e r i m e n t
The first experimental work. How it was held and what
preparation it required
3. O p t i c a l F i b e r P o s i t i o n i n g
The second part of the experimental work. Different
devices simulated and then experimentally checked. What
is the main goal and what was achieved
4. C o n c l u s i o n s
Future prospects and directions of the research. What
are the next steps and what is happening right now
 1. INTRODUCTION
It is important to sense different
chemical substances. One of the
effective mechanisms is refractive
index sensing through the
evanescent mode of electric field.

O-Ring resonator is a highly

prospective sensing device, as
its resonant peaks noticeably
change their position due to
the change of surroundings.
 2. GAS FLOW EXPERIMENT
The electric field
propagation was
simulated and the
main parameters of
the resonator were
determine to get
different F, FSR and Q.

The group refractive index:

The free spectral range for 𝑑𝑛𝑒𝑓𝑓
the device can be found as: 𝑛𝑔 = 𝑛𝑒𝑓𝑓 𝜆0 + 𝜆0 ቤ
𝑑𝜆 𝜆
𝜆2 Finesse: Quality Factor:
0
𝐹𝑆𝑅𝜆 ≈ 𝐹𝑆𝑅 𝜆
𝑛𝑔 2𝜋𝑅 𝐹= 𝑄= .
𝐹𝑊𝐻𝑀 ∆𝜆𝐹𝑊𝐻𝑀
 A Elmanova et al 2020 J. Phys.: Conf. Ser. 1695 012124

2. GAS FLOW EXPERIMENT

Air

FSR for the device was 2.8 – 3.1 nm, FWHM obtained
equal to 0.01 nm, Finesse was from 280 up to 310 Propane
Helium
and the Q-factor was around 530-540, that
corresponded well to the simulated data.

The minimum concentration for propane 2.23 ×105 ppm and for helium
is 3.625×105 ppm for the fabricated O-ring resonator were estimated.
 3. OPTICAL FIBER POSITIONING
Matching
device
The main idea was to develop an easily
integrated with optical fiber device for
sensing applications using MEMS (deep
etching processes)
BRAGG FILTER
Condition for the
grating period:
𝟐𝒅 𝐬𝐢𝐧 𝜽 = 𝒏𝝀 Transmission (dB) and reflection
simulated for the Bragg filter.
There was developed a Bragg grating for notch
wavelength equal to 1550 nm (telecom). The period
determined to be 480 nm and filling factor 0.5.
A Elmanova et al 2020 Proceed. 32nd EMSS, pp. 354-360.
LOOP WAVEGUIDE MIRROR + RING RESONATOR
3.1. NUMERICAL SIMULATIONS

Obtaining the
reflection
spectra…

Reflection of the ring and the loop

Electric field distribution and transmission in the waveguide with different refractive
waveguide with loop mirror and a ring resonator. indices of the surroundings.
Simulation was performed using MEEP FDTD. A Elmanova et al 2021 Proceed. 33rd EMSS.
 3.2. FABRICATION
The probe samples
for the further work.
The BOSCH process
went well, the edges
are nice.

Then the final sample was prepared.

The linear sizes fit and the gratings
didn’t lost their period or filling factor
while e-beam lithography.
 3.2. FABRICATION

100 µm 5 µm

The BOSCH process of the final sample. The edges are under almost 90 degrees
angle. The waveguide structures are fine and the silicon layer etched only for 4 µm.
 3.3. EXPERIMENT Spectra of the
Braggs showed the
high quality band.
The ring resonators
worked exactly as
simulated, giving
for the radius 190
um corresponding
Finesse 100 and
FSR 1.02 nm.

The further work requires

performing measuring the
reflection of the final structures
through a circulator, combined
to the optical fiber.
4. CONCLUSIONS
One of the routes of the
project is to use microfluidic
tubes for chemical (gas)
sensing applications.

Another way is to integrate the fabricated

devices with optical fiber and to use the device
as a refractive index sensor without piezo-motor
placement → COMMERCIAL PRODUCT
 I would like to thank my supervisor, my scientific adviser,
colleagues at the research group, professors, head of the
laboratory, many other people listed in acknowledgements…

But the special thanks

are to those who were
listening to me today.
SUPPLEMENTARIES
SUPPLEMENTARIES

Refractive index of mixture of gases:

SUPPLEMENTARIES