Filmetrics F40-UV Basic Instructions

The Filmetrics F40-UV is a thin film measurement system similar to the F20 but with two major
distinctions: This system has a much smaller spot size, and can measure films ranging from 4 nm to 30
um of thickness.

Warming up the System

Before opening the software turn on the
halogen light source (red button) and, if needed,
the UV light source. Allow the lights to warm up
5 minutes to measure films thicker than 250 nm, Z (focus) Micrometer
or 15 minutes if measuring films thinner than
250 nm. A 15 minute warmup is also required Light Source
for measuring the refractive index.

Enabling the System

Once the system has warmed up open the
filmeasure software suite. From here you can X, Y Micrometers Main Unit
access recipe settings, past data, and the live
video feed.

Loading a Sample
When loading a sample onto the stage take care not to crash your sample into the objective. Also, don’t
try to move the sample large distances using the micrometers, to avoid running them out. Instead, use
tweezers to carefully load the sample under the objective, then do fine adjustments using the
micrometers until you’ve focused on the feature you’re attempting to measure.

Taking a Baseline
Open the shutter on the light source and change the display to live video. Load the filmetrics calibration
wafer to the focus region, and adjust the z micrometer until the pattern comes into clear focus. Once
finished, slide the wafer to the reflectance region and click the “Baseline” button to take a baseline
measurement. Take sample reflectance and the reflectance standard using the silicon reflectance
region. When prompted to take the dark measurement simply close the shutter, take the measurement,
then re-open the shutter.

Taking a Measurement
Once your sample is loaded on the stage and your recipe is appropriately configured, press measure to
acquire and analyze your material. Some notes for measurement: 1. Make sure your sample has some
identifiable features for easy focusing, either on the surface, or patterned into the substrate. 2. You
need an initial guess and tolerance for the system to be able to properly analyze your sample. 3. If you
want to measure the index of refraction you’ll typically need a sample thicker than 50 nm.

Shutting Down the System

To shut down the system use tweezers to remove the sample from the stage. Close the software, lock
the computer, turn off the light sources, and close the shutter.
F40-UV Advanced Tips
Below are some clarifications and tips for measuring with the Filmetrics F40-UV. Keep in mind the tool
manual is on the desktop of the tool’s computer, and contains even more information for those
interested.

Taking Baseline Measurements

When a “dark” measurement is made, a spectrum is measured that represents the signal generated by
the spectrometer when a sample of zero reflectance is measured. To simulate a sample with zero
reflectance during a “dark” measurement, simply close the shutter on the F40-UV light source.

Exact Spectrum Matching

The Exact Spectrum Matching is the third of three analysis methods available in FILMeasure. This solver
can be used to measure thickness, thickness nonuniformity, and roughness of single and multilayer
films, and can additionally solve for index.

Unmodeled Backside Reflections

When measuring films on transparent substrates, reflectance off of the backside of the substrate may
occur. Selecting Compensate for: Unmodeled backside reflections allows the software to shift the
intensity of the calculated reflectance curve to account for the additional light. This feature should not
be used when measuring very thin films (< 100 nm).

Tilted Sample/Lost Light

Samples with non-coplanar surfaces scatter some of the light away from the collection optics. This
option automatically compensates for the light lost due to nonplanarity.

Lock Identical Layers

Samples comprised of repeating layers can be more accurately measured by activating this option. By
activating these options, all properties of any layers that initially have the same material or thickness are
locked together.

Enable FFT (Thickness Only)

The FFT (thickness only) solver is one of three analysis methods available in the FILMeasure software.
playThis solver is best suited for films greater than 250 nm thick, as well as multi-layered films. It is also
an effective option when the index of refraction of the film isn't well known. While this feature is
selected there will be fewer options under the Analysis Options tab. You cannot solve for index,
roughness, or nonuniformity with the FFT (thickness only) solver enabled. More information on the
solver can be found here.

Robust Thickness
The Robust (adaptive; thickness only) solver is the second of three analysis methods available within
FILMeasure. It is best suited for measuring the thickness of single-layer films greater than 150 nm thick.
This method can oftentimes successfully measure films when the data is affected by non-ideal
properties, such as thickness nonuniformity, grading, and birefringence. Much like the FFT (thickness
only) solver, enabling Robust (adaptive; thickness only) will limit the options available in the Analysis
Options tab. You also cannot solve for roughness, nonuniformity or index with the Robust (adaptive;
thickness only) solver enabled