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Lecture 8: Mechanical Vibration

 Discrete systems
 Energy method
 Lumped-parameter analysis
» 1 d.o.f.
» Multi-d.o.f. (Eigenvalue analysis)
 Continuous systems
 Direct solving of partial differential equations
 Rayleigh’s method (the energy approach)
 Example: a laterally-driven folded-flexure comb-drive
resonator
Reference: Singiresu S. Rao, Mechanical Vibrations, 2nd Ed., Addison-Wesley
Publishing Company, Inc., 1990
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Energy Method
 Conservation of energy; the maximum kinetic energy is equal to
the maximum potential energy: Tmax = Vmax
 Also known as Rayleigh’s energy method
 Example: Effect of spring mass ms on the resonant frequency ωn

Kinetic energy of spring length dy:

dTs = y
l dy
Total kinetic energy: k
T= m
x(t)

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1
Cont’d

 The total potential energy:


1 2
U= kx
2
 By assuming a harmonic motion x(t) = X⋅⋅ cosω
ωnt,
1 m
(m + s ) X 2ωn2
Tmax =
2 3
1
U max = kX 2
2
 By equating Tmax = Vmax,

k
ωn =
m + ms / 3

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Lumped-Parameter Model

L-shape spring

=? k x k

k k

 Simplified description of 3D physical model using minimum


required number of variables (coordinates)
 Do we have “mass-less” spring? A valid assumption?
 Can consist of a set of ordinary differential equations depending
on the number of variables
 In “Linear Control Systems”, we call them the state-space
equations
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2
Degree of Freedom

x1 x1 x2
k1 k2 k1 k2 k3
m1 m1 m2

1 degree of freedom system 2 degree of freedom system

 The minimum number of independent coordinates required to


determine completely the positions of all parts of a system at
any instant of time defines the degree of freedom of the system

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Equations of Motion for a 2 D.O.F. System

F1(t) F2(t)
x1(t) x2(t)
k1 k2 k3
m1 m2

b1 b2 b3

m1&x&1 =
m2 &x&2 =

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Equations of Motion for a 2 D.O.F. System

r r r r
[ m ]x&& + [ b ]x& + [ k ]x = F
m1 0  b1 + b2 − b2  k 1 + k 2 − k2 
[m ] =  , [ b ] =  , [ k ] = 
 0 m2   − b2 b2 + b3   − k2 k 2 + k 3 
 F1 
F= 
F2 

In addition to the free-body diagram, equation of motion can also be


derived through the Lagrange’s equation from the energy perspective

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Solving of Dynamic Equation

 Gives complete transient response under


 Free vibration: without external applied force
» How can a structure move without a force?
» Natural frequency and damped natural frequency can be
obtained
 Forced vibration: with external applied force
 Motion Types:
» Underdamped
» Critical damped
» Overdamped
 Remember how to solve a set of linear ordinary differential
equations for multiple d.o.f. systems?

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Determine Resonant Frequency

 Design of micromechanical devices needs to know natural


frequency and damping
 To many performance indexes of the transient response,
such as rise time, overshoot, and settling time
 Resonant frequencies of a lumped-parameter mechanical
system can be obtained by
 Solving the eigenvalue problem (exact solution)
 Rayleigh’s Method (approximate solution)
 etc

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Eigenvalue Problem
 Under free vibration and no damping, natural frequencies of a
multi-d.o.f system are solutions of the eigenvalue problem
r
Let x = x sin(ωt ), then
r
[[ K ] − ω2 [ M ]] x = 0
x ≠ 0, ⇒ ∆ = [[ K ] − ω [ M ]] = 0
2

{
× [ K ] ⇒ [[ I ] − ω [ K ] [ M ]] = 0 , [[ I ] −
mω 2
−1 −1
2
[ D ]] = 0
k
α

 The roots αi = mω
ωi2/k, so ωi can be solved
 The eigenvector corresponding to the individual eigenvalue is the
mode shape of the system

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Example
From the free-body diagram:

k1

m1
x1
k2

m2
x2
k3

m3
x3

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Cont’d
 Let m1 = m2 = m3 = m, k1 = k2 = k3 = k, and ω = √(k/m):
m1 0 0   &x&1  k1 + k 2 − k2 0   x1 


0 m2 0   &x&2  +  − k 2 k2 + k3 − k 3   x2  = [ 0 ]
 0 0 m3   &x&3   0 − k3 k3   x3 
1 0 0  &x&1  2 − 1 0   x1 

⇒m 0

1 0  x2  + k − 1 2 − 1  x2  = [ 0 ]
 
& &

0 0 1  &x&3   0 − 1 1   x3 

  2 −1 0   1 0 0 
  
⇒ k −1
 
2 − 1 − ω m 0 1 0  = 0
 2 

 0
  −1 1   0 0 1 
 
−1

{14444244443
  2 −1 0  1 0 0 
 mω 2
 
⇒ I − 
−1 2 − 1 

0 1 0  = 0
k

α

 0 −1 1  0 0 1  
 
 
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D
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6
Cont’d

 αι = mωωi2/k, solve:
mω12 k
α1 = = 0.19806, ω1 = 0.44504
k m
mω 22 k
α2 = = 1.55530, ω 2 = 1.2471
k m
mω 32 k
α3 = = 3.24900, ω 3 = 1.8025
k m

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Cont’d: Mode Shapes

 For each solved ωi, recall


r r
that:
[[ K ] − ωi2 [ M ]] x = 0
 2 −1 0 1 0 0   x1i 
  αi k  
k −1
 
2 − 1 − ( ) ⋅ m 0 1 0   x2i 
m
 0
  −1 1  0 0 1    x3i 
 2 −1 0 1 0 0   x1i 
  
= k  − 1 2 − 1 − α i 0 1 0   x2i  = 0
 0
 −1 1  0 0 1    x3i 
 We can solve the eigenvector xji with respect to
each αi

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Cont’d: Mode Shapes
 1st mode, α1 = 0.19806
 1. 0 
r1 r 1 
x = x 1 1.8019 
2.2470
 
 2nd mode, α2 = 1.5553
 1 .0 
r2 r2 
x = x 1  0.4450 
− 0.8020 
 
 3rd mode, α3 = 3.2490
 1.0 
r3 r3 
x = x 1 − 1.2468
 0.5544 
 
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Vibration of Continuous Systems

 A system of infinite degrees of freedom


 The equation of motion may be described by a partial differential
equation which can be solved by the method of separation of
variables
 Many methods can be used to find approximate resonant
frequencies and mode shapes (e.g. the Rayleigh’s method)

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8
Example: Lateral Vibration of Beams
y f(x,t): force per unit length f(x,t)

M(x,t) M(x,t) + dM(x,t)


y(x,t) Free-body
x diagram
x O O’
L y(x,t) V(x,t) V(x,t) + dV(x,t)
dx

 What is the dynamic equation?


 The inertia force (i.e. f = ma):

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Example: the Lateral Vibration of Beams


 The sum of moments around the
point O is ZERO

M(x,t) M(x,t) + dM(x,t)

O O’
 Substitute V = ∂M/∂
∂x into the last y(x,t) V(x,t)
dx
V(x,t) + dV(x,t)
equation:

∂ 2 M ( x ,t ) ∂ 2 y( x , t )
− + f ( x , t ) = ρA( x )
∂x 2
∂t 2
∂2 ∂ 2 y( x , t )
− 2[ ] + f ( x ,t ) = ρA( x )
∂x ∂t 2
∂ y( x , t )
4
∂ y( x , t )
2
For a uniform beam: EI + ρA = f ( x ,t )
∂x 4
∂t 2
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9
Example: Lateral Vibration of Beams
 For free vibration, f(x,t) = 0, we require
 Two initial conditions, for example: EI ∂ y ( x4 , t ) + ρA ∂ y ( x2 , t ) = 0
4 2

» y(x, t = 0) = yo(x) = 0 ∂x ∂t
» ∂y/∂
∂t|(x, t = 0) = 0
 Four boundary conditions, for example:
» Free end
– Bending moment = EI(∂ ∂x2) = 0
∂2y/∂
– Shear force = EI∂ 3 ∂x = 0
∂ y/∂ 3

» Simply supported (pinned) end We will use these two


b.c.’s to solve for the
– Deflection y = 0 Fixed-pinned beam
– Bending moment = EI(∂ ∂x2) = 0
∂2y/∂
» Clamped end
– Deflection y = 0
– Slope ∂y/∂ ∂x = 0
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Solve Lateral Vibration of Beams

 Use the method of separation of variables y(x,t) = Y(x)⋅⋅ T(t)


d 4Y ( x ) d 2T (t )
EIT (t ) + ρAY ( x ) =0
dx 4 dt 2
EI / ρA ∂ 4Y ( x ) 1 d 2T (t )
= − = a = ω2
Y ( x ) ∂x 4 T (t ) dt 2
(3)
(2)

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Solve the Lateral Vibration of Beams

 Y(x) can be solved as:

Y ( x ) = C1e βx + C2e − βx + C3e iβx + C4e − iβx


Or,

Y ( x ) = C1 cos β x + C2 sin β x + C3 cosh β x + C4 sinh β x

The natural frequencies of the beam are (from (1)):

EI EI
ω = β2 = ( β l )2
ρA ρAl 4

The βl product depends on the boundary conditions

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Solve Lateral Vibration of a Fixed-Pinned


Beam
 Four B.C.’s for a fixed-pinned beam are substituted into Y(x):

Y (0) = 0 ⇒ C = −C
C1 + C3 = 0
β( C + C ) = 0 ⇒ C = −C
3 1
dY
(0) = 0 2 4 4 2

∴Y ( x ) = C1 (cos βx − cosh βx ) + C2 (sin β x − sinh β x ) (4 )


dx
Y (l ) = 0
d 2Y
(l ) = 0 C1(cos β l − cosh βl ) + C2 (sin β l − sinh βl ) = 0 (5)
14243
EI
dx 2
0
− C1(cos βl + cosh β l ) − C2 (sin βl + sinh β l ) = 0 (6 )
 cos βl − cosh β l sin βl − sinh β l 
So,  = 0 (7 )
− (cos βl + cosh βl ) − (sin β l + sinh βl )

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Cont’d
 From the last matrix, we get the determinant:
tan βl = tanh β l
 The many roots of this equation, β nl, will define the natural frequencies:

EI
ωn = ( β n l )2
ρAl 4
 Mode shape: Yn(x), Y(x), yn(x,y), and y(x,t):

cos β n l − cosh β n l
C2 n = −C1n ( ), from (5)
sin β nl − sinh β nl
cos β n l − cosh β n l
Yn ( x ) = C1n [(cos β n x − cosh β n x ) − ( )(sin β n x − sinh β n x )], from (4 )
sin β n l − sinh β n l
yn ( x , t ) = Yn ( x )( An cos ωn t + Bn sin ωn t )

∑ y ( x ,t ),

y( x ,t ) = n The final mod e shape
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Results of β nl for Various Beam Constraints

β1l = 1.875104
β2l = 4.694091
β3l = 7.854757
β4l = 10.99541
(1) Cantilever beam

β1l = 4.730041
β2l = 7.853205
β3l = 10.995608
(2) Doubly-clamped beam β4l = 14.137165

β1l = 3.926602
β2l = 7.068583
β3l = 10.210176
β4l = 13.351768
(3) fixed-pinned beam

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Rayleigh’s Method

 An approximate analysis using the energy perspective to find the


fundamental natural frequency of continuous systems
 The kinetic energy of a beam:

T=

 Assume a harmonic variation y(x,t) = Y(x)⋅⋅ cos(ω


ωt), the maximum
kinetic energy:
ω2 l
Tmax = ∫0 Y
2
( x )ρA( x )dx
2

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Cont’d

 The potential energy V of a beam: (neglecting the work done by


the shear forces)

 The maximum value of y(x,t) is Y(x), so the maximum potential


energy:
1 l d 2Y ( x ) 2
Vmax = ∫ EI ( ) dx
2 0 dx 2

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Rayleigh’s Method
 By equating Tmax to Vmax, we obtain:
l d 2Y ( x ) 2
∫0 EI ( ) dx
ω2 = dx 2
l
∫ ρAY ( x )dx
2
0

 For example, a stepped beam with various cross sections:

E
l1
I (
d 2Y ( x ) 2
∫0 1 1 dx 2 ) dx +
l2
E
∫l1 2 2I (
d 2Y ( x ) 2
dx 2
) dx + L
ω2 = l1

0
2
l2
∫ ρA1Y ( x )dx + ∫ ρA2Y ( x )dx +
l1
2
L
 Where is Y(x) from? You have to choose Y(x), and make sure: (1)
it is a reasonable beam deflection curve; (2) Y(x) must satisfy the
beam boundary conditions

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Example: Find the Resonant Frequency

 Use the deflection curve Y(x) = (1 – x/l)2


 The cross section A(x) = hx/l
 The moment of inertia I(x) = 1⋅⋅(hx/l)3/12
 By equating Tmax to Vmax
y anchored
ω = 2
1

h x

 The exact frequency is (for comparison):


Eh 2 1 / 2
ω = 1.5343( )
ρl 4

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Lateral Folded-flexure Comb-Drive
Resonator
 What is the resonant frequency of the resonator?
 A lumped-parameter model would be used for analysis

Source: William Tang, Ph.D. Dissertation, UC Berkeley, 1990


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Spring Constant kx

 When the resonant plate moves


Xo under a given force Fo, the truss
point B and D moves Xo/2,
respectively
 The force acting on each beam
beam is Fo/4
 The slope at both ends of the
beams are identically zero

anchor

plate

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Cont’d

 The deflection curve of beam


AB is:

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Lateral Resonant Frequency

 By Rayleigh’s energy method:


K .E .max = P.E .max
K .E .max = K .E .plate + K .E .truss + K .E .beam
1 1 1
= M p v 2p + M t vt2 + ∫ vb2 dM b
2 2 2
=
 For the beam segment AB, remember that:
(Fx / 4 ) ( 2
x AB (y ) = 3Ly − 2y 3 )
− for 0 ≤ y ≤ L
12EI z
Fx L3
x AB (L ) = X o / 2 =
48EI z
2 3
Xo   y  y  
⇒ x AB (y ) = 3  − 2  
2   L   L  
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Cont’d
 So the velocity profile for segment AB (multiply ω) is:
X oω   y 
2 3

v AB ( y ) =
 y
3  − 2  
2   L  L 

 The K.E. for beam AB is:

1 L ( X o ω)   y 
2 3 2
2
 y 
K .E . AB = 3  − 2   dM AB
2 ∫0
14444244443
4   L  L
v 2AB

3 2
X o2 ω2 M AB
2
  y
L y   M AB 
= ∫0 3  − 2   dy  dM AB = ⋅ dy 
8L  L
 L 
  L 

13 2 2
= X o ω M AB
280

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ᐽӛԋǴమ๮εᏢႝᐒ‫س‬

Cont’d

 Similarly for beam CD, the


truss
deflection curve is:

2 3
 
xCD ( y ) = X o + (− x AB ( y )) = X o 1 −
3 y   y 
  +  
2L L beam
 

y
 The velocity profile and K.E. for
segment CD are:
2 3
  anchor
vCD ( y ) = X o ⋅ ω1 −
3 y  y
  +  

 2 L  L 

2
X o2 ω2 M CD
2 3
L 3 y  y  
K .E . CD = ∫0 1 −   +   dy
2L 

2 L  L 
plate
83 2 2
= X o ω M CD
280
ENE 5400 ༾ᐒႝ‫س‬಍೛ी, Spring 2004 34 ᐽӛԋǴ
ᐽӛԋǴమ๮εᏢႝᐒ‫س‬

17
Cont’d: Total Beam Potential Energy

 Since,
1
M AB = MCD = Mb
8
⇒ K .E .b = 4 ⋅ K .E .AB + 4 ⋅ K .E .CD
13 2 2 83 2 2
= X oω Mb + X oω Mb
560 560
6 2 2
= X o ω Mb
35
ENE 5400 ༾ᐒႝ‫س‬಍೛ी, Spring 2004 35 ᐽӛԋǴ
ᐽӛԋǴమ๮εᏢႝᐒ‫س‬

Cont’d

 The total maximum K.E. is


K .E .max = K .E .plate + K .E .truss + K .E .beam
1 1 6 
= X o2ω 2  M p + Mt + Mb 
 2 8 35 

 The total maximum P.E. is:


Xo Xo 1
P .E .max = ∫ Fx ⋅ dx = ∫ k x x ⋅ dx = k x X o2
0 0 2
 Equating both equations, we obtain the resonant frequency:

kx
ω=
1 12
Mp + Mt + M
4 35 b
ENE 5400 ༾ᐒႝ‫س‬಍೛ी, Spring 2004 36 ᐽӛԋǴ
ᐽӛԋǴమ๮εᏢႝᐒ‫س‬

18

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