VACUUM AND PLASMA SCIENCE AND

TECHNOLOGY
U8

Pressure Gauges

Ming-Show Wong

May 2018
 Direct and Indirect -Reading Gauges
• Direct: measure pressure by calculating the force
exerted on the surface by incident particle flux
– PRESSURE: The average normal force per unit area
exerted by gas molecules impacting on a surface.
• Indirect: record the pressure by measuring a gas
property which changes in predictable manner with
gas density
– PV = nRT
• MANOMETER or BAROMETER
– An instrument for measuring the pressure of gases and
vapors.
 Pressure (Torr)
10³ 10² 10¹ 1 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10
BOURDON (DIAL)
KJLC BDG 250 760 - 1 Torr
PIRANI & CONVECTION
KJLC Convectron® Equivalent
1,000 - 1×10-4 Torr
Series
THERMOCOUPLE
KJLC 205 with KJLC 6000 Tube 1 - 1×10-3 Torr
KJL615TC-K or H 1 - 1×10-3 Torr
KJL615TC 760 - 1×10-3 Torr
KJLC 510TC 760 - 1×10-3 Torr

KJLC Field Analysis Vacuum Meter 1,000 - 1×10-4 Torr

HOT CATHODE / IONIZATION

KJLC 354 5 ×10-2 - 1×10-9 Torr
KJLC 351 5 ×10-2 - 1×10-9 Torr
WIDE-RANGE COMBINATION

KJLC 392 with KJLC

1000 - 1 ×10-9 Torr
CONVECTION Tube
MGC3000 Series 1000 - 2 ×10-11 Torr
MGC4000 Series 1000 - 2 ×10-11 Torr
10³ 10² 10¹ 1 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10
Pressure (Torr)
 Diaphragm and Bourdon Gauges

• The simplest mechanical gauge

– a system of gears and levers to transmit the deflection of a
solid wall to a pointer
• Bourdon: a coiled tube of elliptical cross section, fixed at
one end and connected to the pointer mechanism at the
other
– evacuation of the gas in the tube causes rotation of the pointer
• Diaphragm: contains a pressure sensitive element from
which the gas has been evacuated
– by removing gas from the region surrounding the element, the
wall is caused to deflect.
U-Tube manometer: 102 to 105 Pa
McLeod 10-3 to 102 Pa
This gauge, though seldom used, is employed mostly as a primary calibration standard
for other gauges. In effect, a large known volume of gas at unknown pressure is
captured in a glass bulb and compressed by raising the mercury level until the gas is
confined in a small, closed capillary of known volume.
Because the ratio between the original and final volumes is known and
the final pressure can be measured, the original pressure is calculated by
Boyle’s law (P1 x V1 = P2 x V2).
McLeod gauges are particularly useful in the 1 Torr to 10-4 Torr range.
 Inclined manometer
to increase readability

P  n[1  ( Ai / Ap )]sin 
Ai:cross section of inclined branch
Ap: cross section of vertical branch
Differential manometer
 Dubrovin gauge
1:Hg
2:Thin-wall steel tube
3:Thin steel disk welded on top of tube
4:Calibrated glass tubes

P  [(D22  D12 ) / D12 ]g m (ho  h)

dh / dP  [ D12 /( D22  D12 )] /( g m )
 Capacitance Manometer

• Simply a diaphragm gauge in which the deflection

of the diaphragm is measured by observing the
change in capacitance between it and a fixed
counter electrode.
– Capacitance is proportional to geometry (area/gap) and
to the dielectric constant of the gas being measured
Compact Capacitance Gauges
(CMR)

廠商 Balzers

特性
Absolute pressure measurement -
independent of gas type

Excellent long term and temperature

stability

Corrosion resistant

Ceramic construction
Compact Piezo Gauge (APR 250)

廠商 Balzers

特性
Absolute pressure

Measurement - independent of gas type

High accuracy from 1 mbar to 50 bar

Corrosion resistant
 Thermal Conductivity Gauges I
• Operate by measuring in some way the rate of heat transfer between
a heated wire and its surroundings
• PIRANI GAUGE A thermal conductivity gauge containing a heated
filament having a large temperature coefficient of resistance.
Because heat dissipation form the filament is a function of the gas
pressure in a certain pressure range, filament resistance or power
required to maintain o constant filament resistance can be correlated
with gas pressure.
– any type of of thermal conductivity gauge in which the heated
wire forms one arm of a Wheatstone bridge
• THERMISTOR GAUGE A form of Pirani gauge in which the
temperature sensitive elements are made of a semiconducting
material instead of metal.
 Thermal Conductivity Gauges II
• THERMOCOUPLE GAUGE A thermal
conductivity gauge which contains a heated filament
and a bi-metallic thermocouple junction for the
measurement of filament temperature as a function
of gas pressure.
– measures pressure dependent heat flow. Constant current
is delivered to the heated wire and a tiny TC welded to its
midpoint
Thermocouple Gauge
Pirani Gauge
Compact Pirani Gauge (TPR)

廠商 Balzers

特性
Rugged

Potential - free

Temperature compensated

Version for corrosive media

Convection Gauge
This gauge’s mechanism differs from that used in the T/C and
Pirani gauges only by using a structure that enables the
natural convection in (viscous flow) gases to aid in removing
heat from the hot filament.
Convection gauges measure pressures over the range from
about 10 Torr to atmosphere
 Ionization gauges
• Ionization of gas molecules and the collection of
the ions and their subsequent amplification by
sensitive and stable circuitry.
• IONIZATION A process which results in the
formation of ions. Such a process can occur by
adding (or removing) one or more electrons to (or
from) an atom (or molecule).
• IONIZATION GAUGE A vacuum gauge
comprising a means of ionizing the gas and a
means of correlating the ion current to the
collector with the pressure of the gas.
 Ionization gauges
• Hot cathode: ionization of gas molecules by
electrons (generated by a hot wire) impact ..
– Bayard and Alpert (BA)
• NUDE GAUGE A vacuum gauge which does not
have its own envelope; designed to be inserted
into a vacuum system.

• Cold cathode: developed by Penning. A device

with the arrangement of the electric and magnetic
fields causes electrons to travel long distance in
spiral paths before finally colliding with the anode
Cold Cathode Gauge
In the CCGs the ionizing electrons are part of
a self-sustaining discharge.

However, since the CCG has no (thermionic

emission) filament, the discharge is initiated
by stray field emission or external events
(cosmic rays or radioactive decay).

At low pressures, this can take minutes and

CCGs are usually switched on at high pressure.

Once started, the gauge's magnetic field

constrain the electrons in helical paths, giving
them long path lengths and a high probability
of ionizing the residual gas.

The ions are collected and measured to

determine the gas pressure.
COLD-CATHODE An ionization gauge in which electrons
are released IONIZATION GAUGE from the cathode by
photon and ion bombardment at ambient temperature, and
for which thermionic emission can be neglected.
Compact Process lon Gauge
(IMR 260)

廠商 Balzers

特性
Mesuring range 10-6 - 1000 mbar

Two gauge in one: Pirani and hot

cathode ionization

High accuracy

Excellent reproducibility

Ideal for plasma and sputtering

processes
Compact Cold Cathode
Gauge (IKR)

廠商 Balzers

特性
No filament burn-out-cold ionization

Withstands air inrush

Inverted magnetron

Corrosion resistant

Operating status display

Compact FullRangeTM
Gauge (PRK 250)

廠商 Balzers

特性
Two gauges in one housing

Pirani and cold cathode

Corrosion resistant

One port for atm to UHV

Granville-Phillips Series 375 CONVECTRONR
Vacuum Measurement System
Operates Series 275 CONVECTRONR Gauge
Wide range pressure measurement
1000 Torr to 1x10E-4 Torr (1,333 mbar to 1 x 10E-4 mbar)
Rugged all-metal CE Compliant 1/8 DIN package.
Granville-Phillips Series 370 STABIL-IONR Vacuum Measurement System
Improve your process with long-term vacuum measurement accuracy and gauge-to-
gauge reproducibility.
UHV Gauge for pressures down to the lower 10E-11 Torr range
Certified NIST traceable calibration
Robust sensors reduce risk of damage during mounting and eliminate glass breakage
 Vacuum Gauge Calibration

• McLeod Gauge method

– Good for 10-10-5 Torr range
– For thermal conductivity gauge, ionization gauge
• Expansion method
– Known amount of gas in a sealed container.
• Flow method
– Known gas flow into a chamber
• Pump-down method
http://en.wikipedia.org/wiki/Oxygen
Periodic Table

http://www.chemicool.com/
http://en.wikipedia.org/wiki/Oxygen

General
Name, Symbol, Number oxygen, O, 8
Chemical series Nonmetas, chalcogens
Group, Period, Block 16, 2, p
Appearance colorless (gas)
very pale blue (liquid)

Atomic mass 15.9994(3) g/mol

2 2 4
Electron configuration 1s 2s 2p
Electrons per shell 2, 6
 Physical
Vapor properties
pressure
Phase gas
Density (0 °C, 101.325 kPa)
1.429 g/L
Melting point 54.36 K
(-218.79 °C, -361.82 °F)
Boiling point 90.20 K
(-182.95 °C, -297.31 °F)
Critical point 154.59 K, 5.043 MPa
−1
Heat of fusion (O2) 0.444 kJ·mol
−1
Heat of vaporization (O2) 6.82 kJ·mol
Heat capacity (25 °C) (O2)
−1 −1
29.378 J·mol ·K
Vapor Pressure P/Pa 1 10 100 1k 10 k 100 k
at T/K 61 73 90
 Atomic properties
Crystal structure cubic
Oxidation states −2, −1
(neutral oxide)
Electronegativity 3.44 (Pauling scale)
−1
Ionization energies 1st: 1313.9 kJ·mol
(more) −1
2nd: 3388.3 kJ·mol

−1
3rd: 5300.5 kJ·mol
Atomic radius 60 pm
Atomic radius (calc.) 48 pm
Covalent radius 73 pm
Van der Waals radius 152 pm
 Miscellaneous
Magnetic ordering paramagnetic
−1 −1
Thermal conductivity (300 K) 26.58 mW·m ·K

Speed of sound (gas, 27 °C) 330 m/s

CAS registry number 7782-44-7
 Isotopes of oxygen

iso NA half-life

16
O 99.76% O is stable with 8 neutrons

17
O 0.038% O is stable with 9 neutrons

18
O 0.21% O is stable with 10 neutrons