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Study of graphene growth on copper foil by pulsed laser deposition at reduced

temperature
Abd Elhamid M. Abd Elhamid, Mohamed A. Hafez, Abdelnaser M. Aboulfotouh, and Iftitan M. Azzouz

Citation: J. Appl. Phys. 121, 025303 (2017); doi: 10.1063/1.4973736


View online: http://dx.doi.org/10.1063/1.4973736
View Table of Contents: http://aip.scitation.org/toc/jap/121/2
Published by the American Institute of Physics

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JOURNAL OF APPLIED PHYSICS 121, 025303 (2017)

Study of graphene growth on copper foil by pulsed laser deposition


at reduced temperature
Abd Elhamid M. Abd Elhamid,1 Mohamed A. Hafez,1,a) Abdelnaser M. Aboulfotouh,2
and Iftitan M. Azzouz1
1
Department of Laser Sciences and Interactions, National Institute of Laser Enhanced Sciences,
Cairo University, El-Giza 12613, Egypt
2
Department of Physics, Faculty of Science, Cairo University, El-Giza 12613, Egypt
(Received 1 October 2016; accepted 24 December 2016; published online 10 January 2017)
Graphene has been successfully grown on commercial copper foil at low temperature of 500  C by
pulsed laser deposition (PLD). X-ray diffraction patterns showed that films have been grown in the
presence of Cu(111) and Cu(200) facets. Raman spectroscopy was utilized to study the effects of
temperature, surface structure, and cooling rate on the graphene growth. Raman spectra indicate
that the synthesis of graphene layers rely on the surface quality of the Cu substrate together with
the proper cooling profile coupled with graphene growth temperature. PLD-grown graphene film
on Cu has been verified by transmission electron microscopy. Surface mediated growth of graphene
on Cu foil substrate revealed to have a favorable catalytic effect. High growth rate of graphene and
less defects can be derived using fast cooling rate. Published by AIP Publishing.
[http://dx.doi.org/10.1063/1.4973736]

I. INTRODUCTION free monolayer graphene. Expectation of the transfer-free


graphene growth by PLD has been attempted practically.
Graphene is considered to be the legendry material of the
Interfacial graphene bilayer was obtained directly on silicon
21 century because of its versatile unique properties like large
dioxide film using PLD technique, without the need for a
conductivity, transparency, strength, and thermal conductiv-
transfer process.14 Multilayer and few layer graphene fabri-
ity.1 Many techniques were utilized to fabricate this two-
cated on fused silica substrate from room temperature to
dimensional material including graphite exfoliation, mechani-
700  C by PLD without using any catalyst is reported.13 PLD
cal cleavage, and chemical vapor deposition (CVD).2–7 Yet,
growth of graphene on the Cu surface can be integrated with
the most widely technique in graphene production is CVD,
other deposition systems to have the selection to fabricate
which relies on using hydrocarbon gases as a carbon source
graphene for the required applications. Incorporating Cu sur-
together with a catalytic metal substrate at a high temperature
face along with other types of substrates in the PLD deposi-
of 1000  C. However, the main disadvantages of CVD are
tion system can provide the choice to grow graphene directly
the high growth temperature, carbon source controlling, and
or transfer it onto the required substrate, and this furnishes
long growth time. On the other hand, graphene synthesis at
the flexibility for potential applications in electrical and opti-
relatively low temperature using instantaneous laser ablation
cal devices.
of graphite source was reported,7,8 thanks to the highly ener-
This study reports, for the first time, on the Cu-based
getic deposited particles. Laser-based approaches for gra-
PLD-derived few-layer graphene synthesis at low tempera-
phene fabrication have been reported.9 PLD provides the
ture under high vacuum. A Q-switched Nd:YAG laser was
requirements to control carbon source and yields energetic
used to ablate the graphite target on bare Cu foil and ther-
particles which assist in reducing the growth temperature of
mally coated Cu foil substrates. Effects of empirical growth
the graphene. Thereupon, laser ablation of carbon target has
conditions; temperature, surface structure, and cooling rate
been used in graphene synthesis preferentially on different
on the capability to fabricate graphene layers were investi-
catalytic metals such as Ni and Co.10 Metal thin films such as
gated by Raman spectroscopy and TEM. The mechanism of
Cu, Fe, and Ag were deposited on Si substrates before abla-
graphene growth by PLD is discussed.
tion of carbon source.10,11 In addition, non-metal substrates
such as sapphire12 and fused silica13 were used. Although Cu
II. EXPERIMENTAL
is a low cost metal and usually used as a catalyzed solid-state
transformation, PLD growth of graphene was unattainable on The target pellet was prepared from the graphite powder
Cu.10 The separation of graphene from the catalyst substrate of 98% purity (Loba Chemical). Commercial Cu foil sub-
normally caused many defects and proved inefficient in pro- strates of thickness 0.3 mm cut into of 2  2 cm2 were used.
duction cost. With the interests in graphene-based applica- Prior to deposition, Cu foil substrates were sonicated in etha-
tions, there are potentials for fabrication of high quality nol and then cleaned with diluted HCl, acetic acid, and
defect free few-layer graphene. PLD using a solid carbon deionized water, successively. Thermal evaporation was per-
source is a practical technique to directly obtain the transfer- formed to deposit 1 lm thick Cu (99.95% purity) on the Cu
foils at a pressure of 6  107 Torr to be used as substrates
a)
Electronic mail: hafezm@niles.edu.eg for the PLD growth. The thin films were prepared in a high

0021-8979/2017/121(2)/025303/7/$30.00 121, 025303-1 Published by AIP Publishing.


025303-2 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

vacuum PLD chamber. The base pressure during the deposi- water þ 100 ml of 37% HCl). Oxidation step of FeCl2 was
tion was 1  105 Torr. A Q-switched Nd:YAG laser performed by adding 200 ml of 3% H2O2. The graphene
[pulse width 6 ns at the full width at half maximum coated with PMMA samples were thereafter transferred onto
(FWHM)] operating at a wavelength of 1064 nm was used to the Si substrate, which was cleaned by the standard RCA
ablate the graphite target. PLD of graphite on bare Cu foil method. Fishing technique was used to transfer the 2  2 mm
and thermally coated Cu foil substrates were performed sample onto the TEM Cu grid. Afterwards, they were baked
using a laser energy of 50 mJ/pulse at a repetition rate of at 150  C for 15 min and then at 200  C for 10 min under a
5 Hz. The laser was incident at an angle of 45 with the tar- vacuum of 1  105 Torr in case of graphene/TEM grid sam-
get’s surface and focused on the target using f ¼ 15 cm lens. ples. Prepared graphene on the Si substrate and TEM grid
The target-to-substrate distance was fixed at 5 cm. The samples were exposed to acetone vapor to eventually remove
target was rotated to furnish a fresh spot area for consecutive the PMMA.
laser ablation shots thus minimizing the particulate forma-
tion. Figure 1 shows a schematic diagram of the PLD system
III. RESULTS AND DISCUSSION
used in this study.
A homemade resistive heater (20–600  C) in conjunc- XRD patterns are shown in Fig. 2(a) for the as-deposited
tion with a K-type thermocouple were used to control and graphitic thin films with an ablation time of 30 min.
monitor the temperature of the substrate surface in the Deposition was carried out at different substrate tempera-
vacuum chamber. The in situ heating was performed during tures of 300, 400, and 500  C. For a substrate temperature of
pumping down the vacuum chamber to reach the growth 500  C, laser ablation of graphite was carried out simulta-
temperature with a gradual increase rate of 15–20 C/min. neously on both types of substrates (bare Cu foil and coated
Samples of carbon thin films were prepared with different Cu foil). XRD patterns show two peaks corresponding to
laser ablation times. Cu(111) and Cu(200) facets. Their peak positions are cen-
The as-deposited thin films were characterized by the tered at 2h ¼ 43.3 and 50.4 , respectively, for the deposited
XRD (X’Pert Pro) and dispersive Raman microscopy with a film on bare Cu foil at 500  C. As the substrate temperature
laser source with 532 nm and a power of 10 mW (Bruker increased, the positions of these two peaks were noticed to
Seterraa). The green laser was focused onto the sample with undergo small shifts, which may be due to the surface strain
an optical microscope at lens of 50 magnifications. The induced by substrate heating during the PLD growth. It is
measurements were carried out at 5 different positions for obvious that Cu grains were well aligned in the (111) and
each sample. Graphene deposited on Cu foil substrates was (200) orientations. The intensity ratio of Cu(111)/Cu(200)
subsequently transferred onto the TEM grid and Si substrate increases with temperatures. The average grain sizes esti-
for selective characterization by TEM and Raman spectros- mated from Cu(111) and Cu(200) peaks for the coated Cu
copy. Protective layer of polymethyl methacrylate (PMMA) foil are 28 and 55 nm, respectively, which are relatively
was therefore spin coated on the top of graphene. The gra- larger compared to the bare Cu foil (19 and 44 nm).
phene coated with PMMA on Cu foil was cut into two Coating the substrate surface with the Cu thin film, prior to
pieces, one is 2  2 mm. Etching of Cu was performed graphite deposition by the PLD, alter its structure and conse-
by FeCl3 solution over 24 h (20 g of iron þ 100 ml DI quently can influence the growth mode.

FIG. 1. Schematic diagram of the PLD system.


025303-3 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

FIG. 2. (a) XRD patterns of PLD-grown thin films on Cu foil and coated Cu foil substrates at 300, 400, and 500  C for ablation time of 30 min with a laser
energy of 50 mJ/pulse at a repetition rate of 5 Hz. (b) Raman spectra of carbon thin films on Cu foil substrates at 300, 400, and 500  C. (c) Raman spectra of
as-deposited thin films at 500  C on Cu foil and coated Cu substrates.

Raman spectroscopy is the most reliable, non-destructive, at 1378 cm1. The observed Raman shifts in D and G bands
and quick inspection for graphene. Raman spectra in Fig. 2(b) were attributed to decrease in the disorder.17 In addition, Cu
exhibit typical features of as-grown graphitic materials photoluminescence, due to surface resonance emission,
together with a background characteristic for Cu surface plas- affected the real peak positions. Moreover, a remarkable broad
mon photoluminescence.15 The thin films on Cu foil at temper- bump tends to emerge around 2700 cm1 indicating a distorted
atures 300 and 400  C exhibit the G band around 1582 and band around the 2D typical location.
1596 cm1, respectively, which is related to the in-plane C-C Next, PLD of graphite target is performed on the
stretching mode, and indicating a network of sp2 structures. coated Cu foil substrate. In Fig. 2(c), Raman spectra show
The rather shoulder representing the in-plane breathing mode the as-deposited thin film at 500  C. The G and D bands are
of the disorder-induced D band around 1403 and 1398 cm1 is centered at 1604 and 1383 cm1, respectively. A rather
activated by sp3 bonding. The broad bump DþD0 centered at well-discerned 2D band at 2685 cm1 identified with the
2940 cm1 is due to a combination of phonons with different as-grown ratio of I2D/IG ¼ 0.23 indicate the graphene for-
momentum around K and C of the first Brillouin zone.16 The mation. The relative increase in the crystalline carbon
partial overlapping of the G and D peaks signifies the forma- layers on the coated Cu surface compared to the grown
tion of nano-graphite. Further increase of the deposition tem- film on bare Cu foil substrate is shown in Fig. 2(c). These
perature to 500  C, a partial resolving and a clear distinguish results indicate that the growth temperature and substrate
are observed for the G and D bands, as shown in Fig. 2(b). The surface quality play significant roles in PLD-grown crystal-
graphitic G band became narrow indicating a relatively line graphene layers.
improved crystallinity. The G band is shifted towards a higher In an attempt to grow fewer layers of graphene with
wavenumber at 1600 cm1 while the D band is downshifted fewer defects, thin film has been deposited with ablation
025303-4 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

time of 2 min, simultaneously on both Cu foil and coated Cu reduction in defects in case of sample 1. In addition, the 2D
substrates at 500  C. Raman spectra of these two thin films band is located at 2671 and 2684 cm1, respectively. These
are presented in Fig. 3(a). Notwithstanding the high back- results are comparable quite well with an empirical rela-
ground of Cu photoluminescence of the thin film deposited tion,18 which showed the dependence of the Raman 2D band
on coated Cu substrate exhibited a well-defined 2D band frequency on the laser excitation energy. Accordingly, the
around 2690 cm1 with an apparent as-grown ratio of I2D/ Raman 2D band for graphene on Cu substrate is expected to
IG ¼ 0.473. The inset in Fig. 3(a) shows the XRD pattern cor- emerge around 2680 cm1 for a laser excitation of 532 nm.18
responding to the film grown on the coated Cu surface. From The Lorentz fitted 2D band for sample 2, shown in the
the two Cu(111) and Cu(200) XRD peaks, the estimated inset of Fig. 3(b), has a full width at half maximum (FWHM)
average grain sizes were 25 and 50 nm, respectively. On of about 112 cm1 indicating the multi-layers graphene forma-
the other hand, the deposited thin film on the bare Cu foil tion. This sample showed a modulated bump that evolved into
substrate failed to exhibit evidence of typical features of gra- two Lorentzian fitted peaks at 2684 and 2858 cm1. In con-
phene formation. Moreover, the D and G bands were over- trast, the FWHM of the 2D band for sample 1 is 63 cm1,
lapped and barely recognized. Figure 3(b) show the Raman which is corresponding to about four layers according to the
spectra of films grown with ablation time 2 and 30 min on statistical data of few-layer graphene as reported by Hao
coated Cu substrates, indicated as samples 1 and 2, respec- et al.19 The estimated number of graphene layers is in a good
tively. Due to the presence of Cu photoluminescence, a back- agreement with the experimental findings by Torres et al.,20
ground subtraction and normalizations were used for Raman which provided that the substrate Si/SiO2 has a little impact on
spectra, as seen in Fig. 3(b). In terms of graphene growth the broadening of the 2D band. Raman analyses of samples 1
quality, the correction yields a ratio of ID/IG ¼ 0.7 and 0.9 and 2 are summarized in Table I. On account of the reported
for samples 1 and 2, respectively, which indicates a doubling of the ratio of I2D/IG for graphene being transferred
on SiO2/Si substrate21 or as free standing suspended layer,22,23
the PLD growth of graphene with an ablation time of 2 min
indicating I2D/IG 0.24, which is likely to incorporate about
four layers. Thereupon, in our work, the actual ratio of I2D/IG
of the as-deposited graphene thin films with the background of
the Cu fluorescence can be invoked as an indication of the
number of graphene layers as well.
Figure 4(a) shows a photographic image of the graphene
coated with PMMA, floating on DI water surface, detached
from the Cu substrate. The corresponding Raman spectra of
the transferred graphene onto Si substrate is shown in Fig.
4(b), which reveal the D and G bands centered at 1348 and
1581 cm1, respectively. Strong well shaped 2D band cen-
tered at 2685 cm1 appears and the intensity ratio I2D/IG
0.55 indicates the three layer graphene. The relatively high
ID/IG ratio about 0.45 could be attributed to the existence of
unorganized carbon domains and varying graphite crystallite
sizes. Although the Cu foil was coated with Cu thin film, the
actual surface roughness has impacts on the growth of gra-
phene layers. The surface structure of Cu foil has various
degrees of dents, irregular step terraces, and grain boundary
grooves that can significantly affect the graphene nucleation
and growth. These surface features are preferential nucle-
ation sites for the laser-ablated carbon species. Diffusion of
carbon species towards different nucleation sites leading to
the formation of graphene layers of varying thicknesses.
Moreover, short range imperfection of the substrate surface
can lead to lack of long range crystalline carbon. Different
domains can be generated when the graphene growth occurs

TABLE I. Raman spectrum data of thin film samples.

After background 2D band


FIG. 3. (a) Raman spectra of as-deposited thin films with an ablation time of As-deposited subtraction and FWHM
2 min on Cu foil and coated Cu foil substrates at 500  C (Inset is the XRD Samples ID/IG I2D/IG normalizations I2D/IG (cm1)
pattern of as-deposited film on coated Cu foil substrate). (b) Raman spectra
after normalization and background subtraction of samples 1 and 2 on coated Sample 1 0.7 0.47 0.24 63
Cu substrates at 500  C (Inset is a Lorentz fit of the 2D peak). Samples 1 and Sample 2 0.9 0.23 0.12 114
2 are denoting for PLD at an ablation time of 2 and 30 min.
025303-5 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

FIG. 4. (a) Photographic image of the graphene coated with PMMA on the DI water surface after etching of Cu. (b) Corresponding Raman spectra of graphene
transferred onto the Si substrate. (d) and (c) TEM images of isolated graphene thin films taken at different locations.

at different locations on the substrate surface. When coales- followed by natural cooling to room temperature. Raman
cence took place, grain boundaries were formed that acti- spectra of as-grown thin films at substrate temperatures of
vated the D peak. Moreover, a previous study24 has shown 450, 500, and 550  C with a similar cooling rate are shown
that the disorder in graphene, which causes significant in Fig. 5(a). The suppression of the 2D peak for samples
changes in the relative intensities in the resonance Raman grown at 450 and 550  C is obvious. The effect of different
bands, appeared to be strongly dependent on the laser excita- cooling rates on thin films grown at 500  C was investigated
tion energy. The ID/IG ratio for graphene samples was found and presented in Fig. 5(b). After deposition, the samples
to vary with the average interdefect distance.24 The other were cooled down with different cooling rates of about 40,
possibility that the mechanical transfer of the graphene onto 20 and 2  C/min to 300  C followed by natural cooling to
the Si surface could be led to the formation of corrugation room temperature. Absence of the 2D peak along with the
and defects across the entire graphene layer. Figures 4(c) and relatively higher ID/IG ratio indicates the presence of high
4(d) show the TEM images which were taken for isolated defects when the substrate cooled down with a slower rate.
graphene that attached to the TEM Cu grid. The black areas In the present work, substrate temperature of 500  C with
with different shades indicate different multi-layer graphene optimized cooling profile was critical to facilitate the growth
islands. PLD of carbon target showed the growth of bi, tri, of few-layer graphene on the Cu surface by PLD.
and multi-layer graphene on Ni/SiO2/Si heterostructure.8 Low temperature graphene synthesis is an interesting
The effect of the cooling profile on thin films grown on topic for graphene researches. Using the CVD technique,
coated Cu substrate at different substrate temperatures has graphene films were grown on Cu foil at 1035  C,17 while a
been investigated for ablation of graphite target for 2 min. temperature of 1100  C was reported to grow graphene on
Substrates were cooled down with 40  C/min to 300  C Cu-Ni alloys.25 PLD of solid carbon was performed to grow
025303-6 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

laser pulse energy. Understanding the kinetics and mecha-


nisms of graphene layer formation by PLD growth still needs
further studies.
In a previous work,10 the growth of graphene on Cu by
PLD was not attained which was attributed to the low solubil-
ity of carbon in Cu (0.05% at 600  C),27 and the surface cata-
lytic behavior as a metal was not considered. Failure to realize
the graphene growth on Cu substrate at 750  C using PLD is
likely correlated with a cessation of sufficient graphene nucle-
ation due to inefficient cooling profile. Presumably, the proper
cooling profile following the deposition cannot decouple from
the graphene growth temperature. On the other hand, the diffu-
sion barrier of carbon on Cu surface is low,28 and negligible on
Cu(111),29 which makes Cu to have a catalytic role different
from other transition metals.30 Therefore, to grow graphene on
Cu substrate, surface mediated growth process should be con-
sidered. Density functional theory calculations show that car-
bon is facet insensitive to Cu facets such as Cu(001), Cu(110),
and Cu(111) because carbon clusters and Cu surfaces interact
more weakly as the carbon cluster grows.31 This is consistent
with our XRD results which showed that few-layers graphene
were grown on the Cu surface despite of the presence of
Cu(200) and Cu(111) facets. In our work, surface mediated
growth mode of graphene on Cu substrate revealed to have a
favorable catalytic effect.
It is essential to mention that the surface quality of the
substrate play a significant role in the nucleation and growth
of graphene. Polycrystalline Cu foil substrate exhibits differ-
ent surface morphologies that determine the density and
shape of the final grain boundaries of the grown graphene. In
our work, low cost commercial Cu foil surface was thermally
coated with the Cu thin film to avoid surface strain/stress in
FIG. 5. (a) Normalized Raman spectra of as-deposited samples with an abla- consequence of lattice mismatch and difference in thermal
tion time of 2 min on coated Cu foil substrates at 450, 500, and 550  C with
a similar cooling rate. (b) Normalized Raman spectra of as-deposited thin expansion coefficient. Moreover, the Cu coating was
films on coated Cu foil substrates at 500  C with different cooling rates of expected to minimize the microscopic surface roughness and
40, 20 and 2  C/min. enhance purity which induced surface transformation that
enhances few-layer graphene nucleation. Prolonged high
graphene on Ni as a catalytic transition metal at 650 and temperature of 1000  C as in CVD complicates the fabrica-
1010  C.8,14 Although the graphene growth on Cu has been tion process and escalates costs. Therefore, further research
realized with the CVD process involving a high processing work is needed to advance quality of the graphene growth.
temperature and chemical reactions with precursors, few tri- PLD is a challenge thin film deposition technique toward
als were attempted to produce graphene using a solid carbon obtaining high-quality crystalline graphene layers. Our scope
source with Cu. The low temperature synthesizing method is in this work was to investigate the ability to fabricate gra-
excellent for graphene based nanotechnology research and phene on Cu surface by the PLD method.
device fabrication. However, defects is a well-known prob- Based on Raman spectroscopy and TEM analysis, few-
lem in low temperature growth. PLD produces highly ener- layer graphene on Cu foil can be fabricated by PLD method
getic species with high instantaneous deposition rates.26 Koh at low growth temperature. Furthermore, it was observed
et al. have used the property of the energetic carbon source that different cooling rates yielded different results for PLD-
from the PLD to influence the segregation process in Ni.10 In grown carbon thin films. Although, PLD and CVD have
our case, the high kinetic energy of the laser-plume species different growth approaches, the significance of the cooling
assisted the graphene growth as a source of activation energy profile on graphene growth has been reported.10,32 In the
for carbon deposits that diffuse on the Cu surface to enhance case of PLD of carbon on Ni, graphene growth was occurred
crystallinity. The results have shown that graphene can be by segregation dissolved carbon in metal onto the surface.10
synthesized using PLD at relatively a low temperature of In CVD of graphene on Cu foil, growth was occurred by
500  C. The growth kinetics can be explained by the ener- decomposing a precursor gas, hydrogen and methane, on the
getic and pulsed nature of PLD. Further studies are needed metal surface, which was used to break down the gaseous
to achieve controllable synthesis to fabricate high quality carbon source.32 Therefore, the cooling profiles have differ-
graphene layers. The number of graphene layers can be con- ent rates in the production of graphene. At a moderate cool-
trolled through the ablation time of the solid target with the ing rate, few-layer graphene by PLD was observed to form
025303-7 Abd Elhamid et al. J. Appl. Phys. 121, 025303 (2017)

on Ni.10 However, no graphene was formed at a fast cooling


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IV. CONCLUSIONS 24
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26
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