Five deep learning

recipes for the mask

making industry
Ajay Baranwal et al (CDLe)
Noriaki Nakayamada et al (NuFlare)
Mikael Wahlsten et al (Mycronic)
Aki Fujimura et al (D2S)

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 DL can solve many mask industry problems

Automatic Lithography Fault detection Anomalous

Mask defect hotspot and data
inspection categorization detection classification synthesis

https://doi.org/10.1117/12.2282943
https://digital.hbs.edu/platform-digit/submission/applied-materials-when-machines-talk-to-each-othe/
https://semiengineering.com/searching-for-euv-mask-defects/

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 Many DL techniques are used at CDLe
10 successful projects in past year
(Labeled data) (Unlabeled data) (“Games”)

Update Observation
Update
Model & Reward
Model

Action
Evaluate Evaluate Agent
Input Model Input Model Environment
Error Error (Model)

Output
Label

Supervised learning Unsupervised learning Reinforcement learning

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 Recipe #1:
Mask rule error automatic categorization

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 Recommendation engines use deep learning
DL technique used: autoencoding (unsupervised DL)

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 Mask rule check can generate thousands of errors
Best to report similar errors together

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Unsupervised deep autoencoder captures similarity
After training, encoding abstracts out similar features

5.8539410e+01,
2.1572763e+02,
1.4674566e+02,
6.1346753e+01,
…

Mask Series of numbers

image clip (Also called encoding)
Autoencoder

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 Mask rule check groups similar errors together automatically

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 Recipe #2:
Fast mask design construction

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 Medical diagnosis uses deep learning
DL technique used: U-net architecture (supervised learning)

https://github.com/jantic/DeOldify

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 Faster but less accurate simulation is useful for evaluation
Quickly estimate downstream impact

TrueModel(R)
Simulation

Overlapping shots list Simulated dose map

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 U-Net architecture translates images using pixel values

We customized architecture and loss function

https://arxiv.org/abs/1505.04597

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 DL can construct mask shapes from shots faster
Current implementation reduces run time by 2.5x

DL

Overlapping shots list Constructed dosemap

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 Max EPE error is below 3 nm even with overlapping shots
Not to replace simulation but useful for evaluation function

Simulated dose map Simulated contours

EPE of two contours EPE distribution

x-axis: EPE error
y-axis: distribution
Constructed dose map Constructed contours

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 Recipe #3:
PCB component pick-and-place (PnP) error classification

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Amazon Go automatic checkout uses deep learning
DL technique used: object classification, others (supervised DL)

https://www.cnet.com/pictures/photos-inside-amazon-go-store-no-cashiers-seattle/7/

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 Incorrectly picked components need to be identified
Monitored using images of picked components

Robot arm picked Component

Magazine a component Mounted on PCB
with components (Image taken)

https://www.alibaba.com/product-detail/pick-and-place-robot-arm_62008663790.html

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 This problem is difficult
Classical computer vision is not sufficient

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 Object classification uses deep CNN

https://neurohive.io/en/popular-networks/vgg16/

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 CNN based classifier was used to identify “Bad” PnP
Accuracy 99.76%, even on different machines

Bad-”Billboarded” Bad-”Tombstone”

Bad - “Wrong pick angle” OK

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 Recipe #4:
Servo log anomaly detection for Flat Panel Displays (FPD)

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 Credit fraud detection uses deep learning
DL technique used: Deep anomaly detection (unsupervised learning)

https://contentpond.com/how-ai-can-analyse-the-fraud-detection-in-credit-card/

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 “Muras*” are unwanted defects in FPD mask writing
Surface log

Servo parameter logs record values for every x,y position of plate
Surface log is used to identify “Muras”
*Mura means irregularity in Japanese

https://webobjects2.cdw.com/is/image/CDW/5036714?wid=1142&hei=818&resMode=bilin&fit=fit,1

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 Anomaly detection use Generative Adversarial Networks (GAN)

https://arxiv.org/pdf/1901.08954.pdf

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 “Muras” can be identified by unsupervised DL

Deep Anomaly Detection

Bright regions are anomalies

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 Recipe #5:
Digital twins creation

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 Digital twins can benefit from deep learning
DL technique used: mixture models, GANs (semi-supervised DL)

Today’s 3 PM talk “Making digital twins using the Deep Learning Kit (DLK)” will cover digital twins in more
details

https://www.attendmia.com/blog/2019/02/27/explore-the-latest-manufacturing-technology/

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 SEM digital twin

Constructed SEM using

Mask shape
digital twin from CAD data

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 ILT digital twin

Constructed mask shapes with assist features

Target wafer using digital twin

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 Humans can find an anomaly easily

https://www.pinterest.co.uk/pin/849421179688401557/

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 How about now?
Still find anomaly?

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 And now?
DL performs great to find anomaly for huge data

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