Comparison of SEM, TEM, STEM and AFM microscopic techniques.

Similarities:
• All are microscopic techniques.
• All are instrumental techniques.
• All are used for both quantitative and qualitative analysis.
Differences:
Techniques Method of Instrument Energy Type of Applicable
Analysis source* interaction to surfaces
with sample that are:
SEM Electron- Scanning Electron Electron beam Conducting
stimulated Electron beam transfers a
Microanalysis Microscope part or all of
method* its energy to
the solid
which then
emits
backscattered
and secondary
electrons.
TEM Electron- Transmission Electron Electron beam Conducting
stimulated Electron beam passes through
Microanalysis Microscope the specimen.
method
STEM Electron- Scanning Probe Electron At high Conducting
stimulated Microscope beam voltage,
Microanalysis (SPMs)* electric field
method at the tip of
the cathode
produces
electrons by
quantum
mechanical
tunnelling.
AFM Electron- Scanning Probe Ions The force Both
stimulated Microscope acting conducting
Microanalysis (SPMs) between and
method cantilever and insulating
sample
surface causes
deflections of
cantilever
holding the tip
which scans
the sample
surface.
*Source of energy is required to stimulate a measurable response from the analyte.
* Microanalysis techniques detect the particles emitted after a finely focused beam of
electrons strikes the surface of a sample.
* SPMs are capable of resolving details of surfaces down to the atomic level.
Techniqu Provides Type Control Signals Resolutio Application
es images of: of System Detected n s
image
SEM External 2D Backscatter 5nm provides
planar ed and morphologic
morphology secondary al
electrons and
topographic
information
about a wide
variety of
solid
surfaces.
TEM Internal 2D 5nm
microstructur
al detail
STEM Surface 3D* Tunnelin 2-0.1nm
topography Contou g current
r map control
of the system
sample
AFM Surface 3D Optical Cantilever 2-0.1nm
topography control deflections
system* are detected
by optical
means

* 3D image: Unlike electron microscopes, SPMs reveal details not only on the lateral x and
y-axes of a sample but also on the z-axis, which is perpendicular to the surface.
*Optical control system: In AFM, a laser beam is reflected off a spot on the cantilever to a
segmented photodiode that detects the motion of the probe. The output from the photodiode
then controls the force applied to the tip so that it remains constant.