1 2 3 4 5 6 7 10 11 12 13 14 15 16

GA01
DA01 (Reagent Refrigerator) DC01 (STAT Table) c L7x13x1200
C26910 T1x2x250
C26910 T1x2x250
C26910 T1x2x250
A c L7x13x300 C26910 T1x2x250
A
c MB0020 L12x18x110
b
c c b Front C26910 T1x2x250

GB5600
b
b c e C26910 T1x2x250
Heat Exchanger
c L7x13x230
b T1x2x290

L12x18x60
1C

L7x13x70
L7x13x42 e L12x18x250 T1x2x290
c Water T1x2x290
c c E 3C 2C
b f b 4C dispensing T1x2x290
MU5033 Terminal MB1965 T1x2x320
MA7590
a b 6C 5C

L7x13x490
Cuvette wash water heater
b Coolant heater/ MB1965 T1x2x320

MU7661
L12x18x110
MA5834 Incubation bath heater MB1965 T1x2x320

L12x18x250
250W (AAH01)
B MA5834 C07998x20 MB1965 T1x2x320 B
c Back

C
C
C
C
C
C
MB1965 T1x2x320
b

350W (AAH03)
f

1
2
3
4
5
6
b MB1965 T1x2x320

L12x18x700
f L12x18x100 f
MA5834 L15x20x50
e

1
2
3
4
5
6
MB1965 T1x2x320
a T1x2x200
f
f a MF4460
L7x13x520 P2.5x4.5x25 T1x2x180

A
A
A
A
L15x20x45 c Total 25 T1x2x180

1
2
3
4
L12x18x230

7A
5A
6A
B
B
B
B
B
B
MA7590 a A A A A A A A A
e

1
2
3
4
5
6
8
e

P5x9x230
L12x18x70 L7x13x50 L15x20x220 P5x9x100
b b c 840 a e d d d d d d
c MA2997

ZM113100
L12x18x180
P07 a
b a MF4460
e
T2x3x300

b 622 b MW0341 T2x3x300

MB0020
L12x18x70 P5x9x60 C00053 C00053
b P08 L12x18x600
GA coolant pump/
Wash well for mix bar Wash well for mix bar T2x3x300 e e e B B B B B B
Incubation bath pump
C b MA7644
(Water) (Detergent) T2x3x300 C
B81366 L12x18x370 f e d d d d C C C C C C

wash solution/
L12x18x650 Coolant Pump d d Overflow/ Wash
B53167

P2.5x4.5x150
d

wash water
d d C33447 C33447 d d d d drying Water

aspiration
Peltier Unit b L12x18x370 d Aspiration Aspiration

Sample/
f d C33447 C33447

P2.5x4.5x150
d
C cup d d d d
d
C27245 f C32294
L12x18x230
MB0020
MB7738 d d d d d
C29613
e
C33447 C29613
L12x18x160 f MB0020 f f f d d T2x3x50
f f f f MB0020 d d T2x3x50

B
d B82783 Leaking
L12x18x230 L12x18x100 T2x3x450
L12x18x180 f f f f d d d d Aspiration

ME5008

ME5008
C29611
d
f C33447
1 2 3 4 5 6 7 8

P2.5x4.5x150
T2x3x100
S B

C26925 T2x3x500
C26925 T2x3x500
d

ME5008
e e

MB9158
Cuvette Wash

L7x13x42
L7x13x42

T2x3x30
O U T 824 1. Mixture aspiration, wash solution B dispensing
MF5138 f f f
B31826 Detergent e 2. Wash solution B aspiration and dispensing
D D

L12x18x40
L12x18x40
MD1113

L12x18x40
drip V21

L7x13x800

L7x13x800
T1.5x2.5x800 T1.5x2.5x950 prevention d 3. Wash solution B aspiration, wash water dispensing

L7x13x42
4, 5, 6. Wash water aspiration and dispensing

T2x3x300
R R MA3510 MD9214 valve e e d

P2.5x4.5x150
C00052
I N 7. Wash water aspiration

L7x13x800
GB5598 f f f f 8. Drying aspiration

L7x13x800
MF5138

MB9158
e
R

GB7776 S
I N I N I N

L12x18x40
T1x3x1250
S MF6891 MF6898 e
S MD7257 OUT
829 V30 826 V24 827 V33
d
S

MF5138 d 825 Overflow Aspiration

L7x13x80
P2.5x4.5x120
OUT Sample OUT OUT
GB7776 d V19 Wash water drain valve drain valve
drain valve
GB7776

C33447 drip prevention f f MU7685 f MU7685

GB6575

valve MU7696

MF5138
M510-SA01 T1x3x120 d d I N MU7646
T1.5x2.5x270

MD1113
R dispenser MU854200
e

L7x13x42
d d e
MA2213

e
T1x3x120

C33447
MF6890

E M220-SA02
d
GB5598
e E
S dispenser S probe R probe T1.5x2.5x121
MU854100
d

P2.5x4.5x270
MD9208
d

L12x18x125
L7x13x42
L12x18x60
Pressure sensor

L12x18x150
d

L12x18x150
MU7633 (AAS08) d C29613
T2x3x50
ME5008 ME5008
Q R probe

L12x18x110
831 inner wash d d
valve GB7776 e e
NC MU7996 GB6575 Wash well Wash well

L7x13x42
Adapter for different diameters

L7x13x42
for sample for reagent f
V06 I N
T2x3x200
ME3454
probe probe
MD9208 S e O U T 828 ME5008 (φ2.5-φ7)
C00055 C00055 d
Detergent supply pump
MU962300 NO Q O U T 822 823 OUT MD7832 (φ5-φ7)
(Consumables)
MU7666 T1x3x100
MF6889 d e e d R Detergent
pouring
V27
ME5009 (φ2.5-φ12)
F 260
Q ME4751
I SE valve V18 Wash
water
V16
I N
F
f f OUT OUT OUT C00052 pouring
Liquid
dripping
MA7644 (φ5-φ12)

P2.5x4.5x650
P13 I N I N f
MA7590 (φ7-φ12)

L7x13x300
ME4751 valve drain
830 d 833 V11 834 V10 835 V14
T1.5x2.5x150

Frame top
d R MU7646 e valve
ME6333 (φ2.5-φ5)
NC MU7685
I N I N I N
MA2212

MU963300 MU963300 Without ISE MF4460 (φ14-φ18)

L12x18x120

(Consumable) (Consumable) V05 COM

T1x2x200
MF0264
c Mix wash
water
c Probe outer d Mix wash water
MD7809
S probe GB6575 MB7738 wash valve dispensing valve d
e e

L12x18x125
NO
inner wash GB5314 f f
dispensing
MU7646 B08904
P2.5x4.5x150
MB9158 GB5598
e e GB5598 GB5598 GB5598

P2.5x4.5x200
valve valve
d
1

L12x18x125
MU7683 MB0031 MU7646 e e e e e e e e
Y Connector

L7x13x50
Thermistor

L7x13x100
P2.5x4.5x400

P2.5x4.5x400
T1x2x220
MD0170

C33447 (φ2.5)

L7x13x80

L7x13x80

L7x13x80

L7x13x80
MB9893

GB7776

L7x13x80

L7x13x80

L7x13x80

L7x13x80
GB6575
MA2997 (φ5)
f f d d e e e e e e e e GB5598 (φ7)
P2.5x4.5x80

P2.5x4.5x80

I N I N OUT OUT I N OUT MB7738 (φ12)

MD0170

MB7738 ME6333 ME6333 OUT I N

G MD1113
GB6575
T2x3x300
MB2686 ME7323
f
g g G
c V25 817 V26 820 V28 813 V29 821 V22 814 V23 818 V31 815 V32 812
MU5032

f f
B8x13.5x600

P5x9x600

P5x9x950
MB7738 Air release Air release
OUT I N OUT I N OUT I N OUT I N
Q f
e
valve for
e
valve for T Connector
L12x18x540

c
Air release
e Liquid Air release e Sample overflow
e Overflow aspiration e Wash water
GB5600 (φ7)
c valve for dripping valve for Aspiration MU7646 Aspiration MU7646 Aspiration
GB7776 I N liquid sample e valve e

L7x13x45
MU5031

GB6575 L12x18x450
GB5598 dripping
aspiration
valve aspiration
valve
MU7646 MU7646
valve
MU7646
MB0020 (φ12)
V09 832 c g MU7646 MU7646 ME5008 ME5008

L7x13x45
MU7646
Probe inner wash c g
S1.5x4x32

OUT water return valve MA2997 f f

L12x18x440
MD1261

MU7648
411
g L7x13x800

Q L Connector
T2x3x900

L7x13x750 L7x13x800
P06 MB0018 (φ7)
L7x13x800
Degassed water pump
MA5834 (φ12)
S1.5x4x32

d
GB5314 (Gear pump)
c
MD1261

GB6575 C00050 d c L7x13x800

d
H GB5598
H

P5x9x50
C33447
e c Crescent cramp
B

P2.5x4.5x500
T2x3x1850

f
C26912

f
L12x18x60
MA5834
a : C1 8 . 5
T2x3x1650

P2.5x4.5x500
f
P5x9x1150
MB0176

f
MB0020 b : C1 6 . 7
Liquid sensor
(L12x18x70) f c : C1 3 . 1
i :C9.4
T2x3x1850

assembly L12x18x50
C27245
g : C8 . 5
C26912

B75482
(AAS05) e L12x18x900
877 f
P09
f h : C2 2
e For changing the waste piping f e L7x13x50
MA7590 MB7738
Tie wrap Band
f
d S KB- 1 M
P5x9x300

I d I
Detergent tank
MU853400 Degasser unit MA7590 e S KB- 2 M

L12x18x250
L12x18x70 L7x13x50
(Consumable) MU7986

a c f S KB- 3 M
T2x3x320
Mouth piece for teflon tube
g
Q

L7x13x35
d
836 Float switch

L12x18x70
L7x13x400 L7x13x50 MA7644
I N OUT MU7657 DT123800 MB0018
e
c e
e
a (AAS03)
e e e e e
(AAS04)
f f Mouth piece for tube
g V04 Detergent
e
MA7644
dilution valve
MU7646 MD7832 L7x13x35
e MB0020
f f
C27245 f
R MD7960 ( 2. 5
e
a f
U MA7137 ( 14

L7x13x1000
g a e MB7738 f
L12x18x50

P5x9x300 L12x18x70 L12x18x70 e L12x18x50 L7x13x50

f
MB0018 f f
MA7644 b b
f f
f L12x18x200 c Fitting

L7x13x70

L7x13x70

L7x13x70

L7x13x70
J MA5834
f J
S
L12x18x70
c L7x13x50 MA5834
e e L12x18x70
a
b MB0020 b b b L7x13x1000
MA7590

Float switch MA7590 f e f

L12x18x50
L7x13x1000
MB0018
Outside of AU480
C13124 MB0020 b a b Reducer
P5x9x850
(AAS01)
L12x18x50 Float switch f MB0018 e L7x13x300
L12x18x200
b C13126 g e c c c c
b b MB0020 b (AAS02)
L12x18x50 MB0020
OUT I N I N OUT
b
MA7644
a b b L7x13x50
c
1 MD9208 ( 0.6) 2.5
Concentrated waste

L12x18x50
ME8477
e L12x18x70 d c 873
Diaphragm ME4751 ( 0.8) 2.5
MD9211 ( 2.5) 5
Vacuum tank
f MA7590 ME8478

( )
Waste pump P10

L12x18x40
a
T21x22x200

L12x18x200 Valve MB9963

2 ME6270 ( 1.5) 5
AAH02

B38435 L12x18x10m
DI water heater (350W)

L12x18x70 c
ME1580 ( 2.0) 12
L12x18x150

878
f f L7x13x300 Diluted waste
f f MA5834 V34 ME5010 ( 0.7) 2.5
P5x9x450

L12x18x100 f MB7738
P5x9x650

MD7779
B39544

f
L12x18x50
I N OUT
L12x18x350 f 3
K MD7786 GB5598
e MA5834
f f f L7x13x490
e Exhaust K
e Vacuum tank
L12x18x270

L7x13x200 waste valve Tap

e MW0270 Ⅰ Tube Ⅱ T fixer Ⅲ Screw
MA5602

Filter case
Filter case 2 MD7779
MU4512 g a e 4 Deionized Ⅰ Ⅱ Ⅲ 1 2 GB7 7 7 6 GB6 5 7 5
B08641 865 867
f b 1. 5 2. 5 MD 1 1 1 3 GB6 5 7 5
L7x13x200

water unit
e f
L7x13x200
OUT I N 2 3 GB5 3 1 4 GB6 5 7 5
g a MA7644
e
GB5598
P5x9x150 MA5834 Diluted detergent tank
MU853500 (Consumable)
f
P5x9x150 e U V02
OPD
V01
L12x18x200

MW0269 MU2535 or MU0815 (Japan)

L12x18x60 MD7779
f f L12x18x150 DI water MU2535 (Asia)
DI water tank
MA7644
i e e supply valve MU4146 (US)
MU4147 (Europe)
ME810600
f
e e L7x13x200

Service Manual
(Consumable) f f 862
i 864
MA5834
855 L12x18x80 Vacuum pump P04
f P03
MA5834 L12x18x80
P01
Diluted detergent pump
B81366
MU4149B MF7443 Diaphragm
Remarks :
House Code MU7886
L f f
DI water supply pump
MD2025 Valve
[119] 2013.1.10 Item M519-AA01 L
L12 18 1650
B81366 [117] 2013.03.10
Degassed water Detergent Conc. waste Diluted waste DI water Coolant Exhaust Vacuum [89] 2011.05.25 Sht. NO. 1/1
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16
 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

GA01
DA01 (Reagent Refrigerator) DC01 (STAT Table) c L7x13x1200
C26910
C26910
(T1x2x250)
(T1x2x250)
A A
L7x13x300 C26910 (T1x2x250)
c
MB0020 L12x18x110 C26910 (T1x2x250)
c b
c c Front C26910 (T1x2x250)

GB5600
b b
b c e C26910 (T1x2x250)
Heat Exchanger L7x13x230 (T1x2x290)
c b
L12x18x250 1C (T1x2x290)

L12×18×60
e

L7x13x70
L7x13x42
c Water (T1x2x290)
c E 3C 2C dispensing
b
c
f b 4C Terminal
(T1x2x290)
MU5033 MB1965 (T1x2x320)

L7x13x490
E a

AAH03
MU7661
b
6C 5C

Cuvette wash water heater

b MB1965 (T1x2x320)
MA5834
L12x18x110 250W
MB1965 (T1x2x320)

L12x18x250
AAH01
MA5834 C07998x20 MB1965 (T1x2x320)
B B

1C
2C
3C
4C
5C
6C
f Coolant heater/ Back
f c Incubation bath heater
MB1965 (T1x2x320)
b
MA5834 b

350W
MB1965

L12x18x700
L12x18x100 f (T1x2x320)
L12x18x50

6
e MB1965 (T1x2x320)
a
f (T1x2x200)
a T L7x13x520 P2.5x4.5x25 (T1x2x180)

1A
2A
3A
4A
L15x20x45 c Total 25 (T1x2x180)

8A
1B
2B
3B
4B
5B
6B

7A
5A
6A
a A A
e e A A A A A A
L12x18x70 L15x20x220 P5x9x100

P5x9x230
E L7x13x50 a d d d d d d
b b c
c
840 e MA2997

ZM113100
P07
T
b T2x3x300

L12x18x180
a a e

MB0020
622 MW0341 P5x9x60 C00053 C00053 T2x3x300
L12×18×70 b b L12x 18x600 B B B B B B
b P08 GA coolant pump/
Incubation bath pump
Wash well for mix bar Wash well for mix bar T2x3x300 e e e
b D (Water) (Detergent) T2x3x300
C C
B81366 L12x18x370 f e d d d d Overflow/ Wash C C C C C C
L12×18
×650

P2.5x4.5x150
Coolant Pump d

wash solution/
d drying Water

P2.5x4.5x150
B53167 d d d d d d d Aspiration Aspiration

wash water
C33447 C33447
Peltier Unit L12x18x370

aspiration
b f d d C33447 C33447

Sample/
d
C cup d d d d
d
C27245 C32294 d d d e
d d C29613
C29613
f MB0020 f MB0020 f MB0020 f f C33447
d T2x3x50 d T2x3x50

B
d d

C26925 T2x3x500
d B82783 Leaking
L12x18x230 L12x18x440
f f f f L12x18x100 f f d d d d Aspiration
C33447 C29611 d T2x3x450
S T2x3x100 B 1 2 3 4 5 6 7 8

C26925 T2x3x500
A A d
e

P2.5x4.5x150
e

L7x13x42
Cuvette Wash

L7x13x42

T2x3x30
OUT

MB9158

A
MF5138 824 f f f 1. Mixture aspiration, wash solution B dispensing
B31826 MD1113 Detergent
drip V21
e 2. Wash solution B aspiration and dispensing
D d 3. Wash solution B aspiration, wash water dispensing D

P2.5x4.5x150
T1.5x2.5x800 MD9214

L7x13x42

L12x18x40

L12x18x40

L12x18x40
L7x13x800

L7x13x800
prevention
R MA3510 T1.5x2.5x950 valve e e 4, 5, 6. Wash water aspiration and dispensing
R IN d

T2x3x300
MB9158
C00052 7. Wash water aspiration
MF5138 GB5598 f f f f 8. Drying aspiration
R

GB7776 S e
IN IN IN

L7x13x800
MF6891
MF6898
S T1x3x1250 e

L12x18x40
S OUT
829 V30 826 V24 827 V33
S

MF5138 d 825 Overflow Aspiration

d Sample
GB7776 OUT OUT drain valve OUT drain valve
drain valve

L7x13x80
MD7257
d V19 Wash water
MU7685 MU7685
C33447 drip prevention f MU7696 f f

P2.5x4.5x120
GB7776
GB6575

MU854200 valve

MF5138
M510-SA01 d d IN
T1.5x2.5x270

(Consumable) MU7646

MD1113
R dispenser
e
MA2213

T1x3x120

L7×13×42
d
e
d e
C33447
T1x3x120

M220-SA02 GB5598 e
MF6890

L12x18x60
E S dispenser d E
S probe R probe

(Consumable)
d

T1.5x2.5x121
MD9208

MU854100

L7x13x800
d
Pressure sensor

L7x13x42

L12×18×150
P2.5x4.5x270

L12x18x150
MU7633 (AAS08)
d d C29613

L12x18x125
T2x3x50

Q R probe
inner wash
A A
831 d d e

L12x18x110
valve W GB5314 e
NC MU7996 GB6575
Wash well Wash well
f
for sample for reagent MD9208 S

L7x13x42

L7x13x42
V6 IN probe probe
d e OUT 828
Detergent supply pump C00055 C00055
MU962300 NO Q OUT 822 823 OUT
MU7666 R
ME4751

(Consumable) V27
260
T1x3x100 d e e d
F Q MF6889 ISE
V18 V16 Liquid
F
f OUT OUT OUT IN dripping
ME4751

f Detergent Wash
drain
P13 IN pouring IN water f
d valve
830

L7×13×300
833 V11 834 V10 835 V14 valve pouring
Frame top
d R C00052 e valve
MU7685
MA2212

NC
T1.5x2.5x150

MU7646

GB5598
IN IN IN

GB5598
Without ISE

GB5598
MU963300 MU963300

GB5598
(Consumable) (Consumable) V5 COM c Mix wash c Probe outer d Mix wash water
T2x3x200

GB6575
ME3454

S probe MB7738 water dispensing valve d

wash valve
e e e
L12x18x120

inner wash GB7776 f f

dispensing B08904 e
MF0264

MU7646
NO valve P2.5x4.5x150
3

P2.5x4.5x650
valve L12x18x125

L12x18x125
T1x2x200

d e
MU7646 e e e e e e e

L7x13x100
MU7683 MB0031

P2.5x4.5x200
L7x13x50
Thermistor
P2.5x4.5x400

(Inside)
P2.5x4.5x400
MD0170

L17x13x80

L7x13x80
L7x13x80

L7x13x80
GB6575
MB9893

L7x13x80

L7x13x80

L7x13x80
T1x2x220

L7x13x80
GB7776
Adapter for different diameters
f f d d e e e e e e e e A :ME5008( 2.5- 7)
MD1113 T2x3x300 :MD7832( 5- 7)
MD0170

MB7738 IN IN B
GB6575 MB2686 f IN OUT OUT IN OUT OUT
:ME5009( 2.5- 12)
P2.5x4.5x80

P2.5x4.5x80

G ME7323 F F C G
g g
c
MU5032

f f
V25 817 V26 820 V28 813 V29 821 V22 814 V23 818 V31 815 V32 812 D :MA7644( 5- 12)
:MA7590( 7- 12)
L12x18x540

MB7738 Air release Air release E

B8x13.5x600

P5x9x950
OUT IN OUT IN OUT valve for IN OUT IN
Q valve for
:ME6333( 2.5- 5)

P5x9x600
f overflow F
Air release e Liquid Air release
e Sample e e Overflow e aspiration
e Wash water
GB7776 c c valve for dripping valve for Aspiration MU7646
Aspiration MU7646 Aspiration T :MF4460( 14- 18)
IN liquid sample valve valve valve

L7x13x45
GB6575 L12x18x450 aspiration
e
dripping valve aspiration MU7646 e MU7646 MU7646
GB5598 A
MU5031

V9 832 i MU7646 MU7646 A

c c MU7646
Y Connector

L7x13x45
Probe inner wash i
f

MA2997
f
water return valve
C33447 (φ2.5)
S1.5x4x32

OUT
MD1261

MU7648 i L7x13x800
L12x18x440

L7x13x750
411 MA2997 (φ5)
T2x3x900

Q L7x13x800
P06 GB5598 (φ7)
L7x13x800
Degassed water pump MB7738 (φ12)
S1.5x4x32

X C20124 d
MD1261

(Gear pump)
d c L7x13x800
GB6575 C00050 c
Liquid sensor d T Connector
C26912 T2x3x1850

H assembly
H
B75482 e c GB5598 GB5600 (φ7)
(AAS05) f
MB0020 (φ12)

P2.5x4.5x500
L12x18x60 f

P5x9x50
T2x3x1650

MA5834
MB0176

f
f P2.5x4.5x500
P5x9x1150

MB0020
L12x18x70
L Connector
f MB0018 (φ7)
MA5834 (φ12)
C26912 T2x3x1850

C27245 L12x18x50
e L12x18x900 Crescent cramp
877 f
P09 For changing the waste piping
E f d a :MD1259(C18.5)
e f e L7×13×50 b :MD1260(C16.7)
MB7738
c :MF5351(C13.1)

L12x18x250
f
i :B13526(C9.4)
P5x9x300

J Detergent tank g :MD3915(C8.5) J

Degasser h :MF4463(C22)

L7x13x35
MU853400
L12x18x70

MB0018
(Consumable) MU7986 E L7x13x50 d
a c Float switch
MU7657 e
Tie wrap
DT123800
f f d :SKB-1M(GB7000)

L7x13x35
(AAS03) (AAS04) L12x18x70
e e e e e e e :SKB-4M(GB9396)

MB0020
g f
T2x3x320 836 e C27245
L7x13x400 L7x13x50 e f f f :SKB-3M(GB9397)
IN OUT
D a f

L7x13x1000
c e e MB7738 f
e L12x18x50 L7x13x50
g V04 Detergent
f f f
MB0018
Mouth piece for teflon tube

L7x13x70
L7x13x70
L7x13x70
L7x13x70
MD7832

dilution valve f f
MU7646 B f L12x18x200
E
g a a D f
MA5834 e c L12×18×70 Q :MA6939
P5x9x300 L12x18x70 L12x18x70 e L7x13x1000 e a
MB0018
f L12x18x50
L12x18x50

D e

L7x13x50
f
MA3143
b
L7x13x1000 Outside of AU480 Mouth piece for tube
b MA5834 MB0018 e L7x13x300
K L12x18x70
c
f
c c c c R :MD7960( 2.5) K
e
b b b b L7x13x50
OUT IN IN OUT
1 U :MA7137( 14)
MB0020
P5x9x850
Float switch
C13124 MB0020 L12x18x50
b E
a
Float switch
C13126 b c
ME8477 c
Concentrated waste Fitting

L12x18x50
Diaphragm
MA7679 (AAS01) L12x18x200 b b b b (AAS02) g L12x18x50 MB0020
873 S :MD7931
D f Waste pump P10 ME8478
b MB0020 a a E Valve MB9963
e MA7644 b b 2 L12x18x10m Reducer

L12x18x40
L12x18x70 d L12x18x70 c
878
f f
:MD9208( 0.6) 2.5
L7x13x300 Diluted waste
L12x18x200 V34 MB7738
:ME4751( 0.8) 2.5
AAH02

MF0287 f
DI water heater

MA5834 L12x18x50 L12x18x350

IN OUT f 3
GB5598
e f f f L7x13x490
e
Exhaust :MD9211( 2.5) 5
ME1514 T21x22x200

:ME6270( 1.5) 5
L12x18x150

f f MA5834 e Vacuum tank

P5x9x450

P5x9x650

MD7779 L12x18x100 L7x13x200 waste valve Tap

e :ME1580( 2.0) 12
350W

MW0270
B39544

f MD7786
L e 4 Deionized L
b 865 water unit 867 Ⅰ Tube Ⅱ T fixer Ⅲ Screw
L12x18x270

L7x13x200
OUT IN 1 2 GB7776 GB6575
L7x13x200

Filter case e GB5598 U V01

Filter case 2 MD7779 MU4512 a e V02
1.5 2.5 MD1113 GB6575
B08641 g MW0269 OPD Ⅰ Ⅱ Ⅲ 2 3 W : GB5314 GB6575
f D e
DI water
MU2535orMU0815(JPN) MU2535(ASIA)
e e supply valve X : C20124
f MU4146(USA) MU4147(EU)
g a MA5834 e e L7x13x200
L12x18x200

P5x9x150 Diluted detergent tank f P5x9x150

D MU853500 (Consumable) 864
L12x18x60 MD7779 f
f L12x18x150 Vacuum pump P04
DI water tank i MF7443 Diaphragm
MU810600 MU4149B
(Consumable) i f f f
MD2025 Valve
Service Manual
862
f 855 P03
MA5834 L12x18x80
MA5834
L12x18x80
P01 Diluted detergent pump
B81366
Remarks :
House Code MU7886
f f
M DI water supply pump
B81366 L12x18x1650
[142] 2017.11.10
Item M519-AA01 M

Degassed water Detergent Conc. waste Diluted waste DI water Coolant Exhaust Vacuum [1] 2008.08.25 Sht. NO. 1/1
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16