300mm - Spare Parts List

300mm_Spare Parts List
Material Description Part OEM Number Department

CLOTH-ABRASIVE;3M-051131-02020,9x11, 200 3M-051131-02020 METAL
UOT249105R;ROTATION AXIS REPAIR UOT249105R REPAIR
PIN;1344017-00,CONNECTOR/CA-79BR 1344017-00 METAL
3155089-10(R),,RFG3002 AMP (CU) REPAIR 3155089-10(R) REPAIR
3155089-10R,RFG3002 AMPLIFIER REPAIR 3155089-10R REPAIR
GRANITE SURFACE PLATE;0040-76820,300mm showerhead,2nd source 0040-76820 CVD
AERA MFC;FC-PA7800C-4V 5%B2H6/N2 750SCCM FC-PA7800C -4V 5%B2H6/N2 750SC METAL
DOWEL PPS LKG CHUCK POST/CHUCK;1101248.5,chuck post dowel 1101248.5 CLEAN
EXTRACTOR-PIN;40-9865,510-2117, Plastic 40-9865 METAL
SEAL-KIT;MXQ25-PS,Rebuild KIt,Slit Liner MXQ25-PS ETCH
SWITCH;908-1379,CLEANER DOOR INTERLOCK 908-1379/CHERRY 0.1AMPS 125VAC CMP
CONNECTOR-ELECTRIC;534-1630,14-16 AWG, 5 534-1630 METAL
FUSE;0273005.H,6.35x8.89,5A,2DOT003227 0273005.H DIFFUSION
FUSE;0313005.HXP,6.35x31.75,5A,2DOT00360 0313005.HXP DIFFUSION
EXTRACTOR-PIN;M81969/14-01,233-0167, Pla M81969/14-01 METAL
EXTRACTOR-PIN;91067-1,527-0162, Metal 91067-1 METAL
EXTRACTOR-PIN;91067-2,527-0177, TE Red 91067-2 METAL
VALVE;KQ2R01-07,(3-1/4) KQ2R01-07 METAL
FITTING-AIR;KQ2H06-00 KQ2H06-00 METAL
FITTING-TUBE;KQ2H04-00 KQ2H04-00 METAL
FITTING-TUBE;KQ2L07-34S KQ2L07-34S METAL
UNION-TUBE;KQ2H11-00 KQ2H11-00 METAL
VALVE-CHECK;AKH07-00 AKH07-00 METAL
TUBE ADAPTER;KQ2L09-35S,499-0038, 5/16"T KQ2L09-35S METAL
TUBE REDUCER;KJR01-07,499-1872, 1/4fitti KJR01-07 METAL
SCREWDRIVER;754-0002,H-90, Tweeker, Bour 754-0002 METAL
SENSOR-PHOTO;EE-SPX404-W2A EE-SPX404-W2A IMPLANT
SENSOR-PHOTO;GA-311 GA-311/UGA-311 CLEAN
CONTACT;1605643,CONTACTS,FEMALE 2MM 1605643/SF-7QS2000 CMP
UNION;KJU03-07, 499-1875,1/4" Y Fitting KJU03-07 METAL
SOLENOID;SJ3A60KT-5CZ-C4,VALVE SOLENOID, SJ3A60KT-5CZ-C4 DIFFUSION
SEAL-KIT;CQ2WB32-PS,seal kit CQ2WB32-PS ETCH
VALVE-SOLENOID;VQ1201N-5-X53 VQ1201N-5-X53 METAL
VALVE;3ROT165656,SOLENOID 3ROT165656/VX3334M-02-5G1-B DIFFUSION
VALVE;VQD1251 NW-5MO,SOLENOID VQD1251 NW-5MO(VQD1C10) ETCH
VALVE-SOLENOID;SS5J3-60SQ1A-08DS,5UOT256 SS5J3-60SQ1A-08DS/EX180-SDN2A DIFFUSION
SCREWDRIVER;970-1025,008T000, Beige, Twe 970-1025 METAL
VALVE;CDV2-F88-NO,Furon CDV VLV 2-WAY 1/ CDV2-F88-NO CMP
CABLE-RF;0190-24298; CABLE ASSY, N R/A T 0190-24298 METAL
FITTING-ELBOW;KQ2L07-34S-X23,1/4 x 1/8 N KQ2L07-34S-X23 METAL
VALVE-CHECK;CK4-4F-4F,Galtek Check Valve CK4-4F-4F CMP
FILTER-GAS;WGMXMSRR2,IPA GAS FILTER WGMXMSRR2 CMP
SENSOR-FIBER;SERV.502.27834, GRIPPER CRASH SENSOR SERV.502.27834 PHOTO
KEYBOARD;SERV.502.29021 SERV.502.29021 PHOTO
HEAT JACKET;0190-23871,FORELINE ELBOW 0190-23871 CVD
300mm PRODUCER GT/BLADE;0200-07302 0200-07302 CVD
ISOLATOR/RING;0021-27290,TEFRON RING 0021-27290 CVD
SHIELD;0020-54777,Inner Shield (SIP),SUS 0020-54777 METAL
BLOCKER PLATE, SIH4, BP GB,300mm;0020-70842,BLOCK PLATE,AL,300mm,HT 0020-70842 CVD
BRACKET-SENSOR;0020-47524,SENSOR BRACKET 0020-47524 CMP
UNIT;0010-43023,CRESCENT ASSY, UD,DESICA, 300mm 0010-43023 CMP
UNIT;3860-01330,POLY LINE 3860-01330 CVD
COVER;0040-82867,LID BASE, BRUSH Module, 300mm Desica 0040-82867 CMP
FEEDTHRROUGH;0190-19840,CONN ASSY 8-COND ROTATING FEED-THRU 0190-19840, P-110-2032 CMP
DC POWER SUPPLY;0010-45407 0010-45407 / 301447-4211-PSM0209A METAL
MANIFOLD OUT, RIGHT, CHAMBER LID/VALVE-MANIFOLD;0040-87101,manifold out r 0040-87101 CVD
HOSE;0050-90916,HTX,RETURN 0050-90916 CVD
KIT MONOVAT SEAT/VALVE;0190-22279,CHAMBER SLIT VALVE INSE 0190-22279 CVD
HOSE;3400-01564,HOSE ASSY OUTLET / SUP R 3400-01564 CVD
SPECIFICATION FOR UHP POLYMER FOUR VALVE-MANIFOLD;0190-19008,HLCU MANI 0190-19008 CMP
TUBE;3860-01784,TBG PLSTC 5/32ODX5/64ID POLYURETHANE 3860-01784 CMP
HOSE;0050-90911/HOSE, HTX, LID, TO, CH 0050-90911 CVD
TUBE-GAS;0050-91052,LOWER WELDMENT PRODU/B188704 0050-91052 CVD
TUBE-GAS;0050-93496,WELDMENT MIDDLE PROD/B188705 0050-93496 CVD
PLATE;0021-47450,BLOCKER PLATE,ALUMINUM, BLOCKER DD2439 SACVD 300mm 0021-47450 CVD
TEST JIG;0270-03559,COOLDOWN/DEGAS Robot / CALIBRATION TOOL COOLDOWN 0270-03559 METAL
TEST JIG;0270-02076,Bfr Xfer Robot ZERO, TOOL ZERO POSITION ENDURA XP 300MM 0270-02076 METAL
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TEST JIG;0270-01156,CAL Plate, HTR-TO-RB 0270-01156 METAL
COUPLER;0190-26834,THERMO, HEATER 0190-26834 CVD
TUBING AIR BLAST;0050-90919 / HOSE, HTX SUPPLY TO LID 0050-90919 CVD
TUBE-GAS;0050-92756,WELDMENT NF3 LOWER, WELDMENT 0050-92756 CVD
TUBE-GAS;0050-90965,WELDMENT NF3 MIDDLE, WELDMENT NF3 INTERCONNECT PR 0050-90965 CVD
TUBE-GAS;0050-90964,UPPER NF3 WELDMENT, WELDMENT NF3 UPPER PRODUCER S 0050-90964 CVD
ISOLATOR 300mm;0200-00374 0200-00374 CVD
PC;0090-A6352,WHC, WHC ASSY G3/GX 0090-A6352 METROLOGY
SHIELD;0020-45231,ENCORE Ta Shutter Disk/DISK Shutter Encore Tan Center Pin 0020-45231 METAL
TABLE-ESC;3030-13340,MFC 8565C 20SCCM AR DOWNPORT 3030-13340 METAL
BELLOWS;0040-75296,300MM RPG P5 Bellows,/KSM-3911-0104 0040-75296 METAL
GREASE;5070-00050,Fluorocarbon Gel 813-1 5070-00050 CMP
BELT;0190-26994,TMG .375P 1/2W, RUBBER BELT,TMG .375P 1/2W 300mm ENDUR 0190-26994 METAL
BRUSH;0090-03125,Sensor Door Open 1/2 0090-03125 COMMON
Ractangular Door L-VAT;0190-31117,LOAD LOCK DOOR ACTUATOR 0190-31117 CVD
BALL SCREW;3690-01934 3690-01934 METAL
O-RING;3700-01959,Viton, ID 11.975 CSD 210 VITON DURO BL 3700-01959 METAL
SEAL;3300-04409 TOP NOZZLE TEMP, FTG TBG CONN 1/4T 3300-01054 CVD
SCREW;3690-01883,AL,HIGH VACUUM,ENDURA T 3690-01883 METAL
SEAL;3700-03410,C-SEAL K1H 2 PORT SS W/R 3700-03410 CVD
SCREW;0021-08181, Vented Screw #8-32 FLAT HEAD 300mm TXZ 0021-08181 METAL
SCREW;3690-01914,SUS,1/2,8-32 3690-01914 METAL
BEARING;0190-15211,XP ATM BEARING, BEARING ASSY(4-PT CONTACT-BB) 0190-15211 METAL
SPRING;0020-63264,SPRING, DR, LD PAD CON 0020-63264 CMP
HINGE;3390-00072,FEMALE,LK_DOOR 3390-00072 CMP
GASKET;3320-01190,RF BRAID .09 3320-01190 METAL
SCREW;0020-34054 CAPTIVE FIXTURE 0020-34054 ETCH
PIN;0200-03314(U1),ACL,LIFTPIN,Y2O3 INSE/LIFT PIN 170 FIXED FLOATING 300MM 0200-03314(U1) CVD
SCREW;0020-34055,CAPTIVE 0020-34055 ETCH
COVER;0020-24121,Front Tube, Tube Manifo 0020-24121 CMP
SCREW;3690-01359,CAP SKT HD 3/8-16x1-1/4 3690-01359 COMMON
SCREW;3690-03680,FLT HD 8-32x1-1/4L 3690-03680 COMMON
GASKET;3700-03005,FLG FOR LATCH 3700-03005 CMP
SPACER;0020-52213,HINGE PLATE 0020-52213 CMP
O-RING;3700-01429,Viton 3700-01429 METAL
O-RING;3700-01220,ID 5.484 CSD .139 VITON 75 DURO B 3700-01220 METAL
UNIT;0090-03913,assy, Overtemp SW w/filt, HARN ASSY 0090-03913 ETCH
BONDING PAD;0020-64990,FRONT LEFT PAD FLAT MODULAR BLADE 0020-64990 CVD
WASHER;3880-01105,Wavy washer, Ultima Gr 3880-01105 CVD
SCREW;3691-01314,Flt Hd 10-32x1/2L Torx 3691-01314 METAL
SCREW;3691-01486,Pan Hd, 4-40x1/2L Torx 3691-01486 METAL
GUIDE-PIN;0021-12556,Vac Assy, VHP Robot 0021-12556 METAL
ORING SEAL;3700-01363,ID 7.734, CSD 139, Viton 75 DURO BLK 3700-01363 METAL
CLAMP;0040-83305,ATM, Inner Race, XP Robot 0040-83305 METAL
SCREW;3690-00844,Dryer Crescent Roller S 3690-00844 CMP
SCREW-CAP;3690-04041,6-32 X 1-1/8L,HEX S 33339/3690-04041 METAL
PIN-JIG;0270-76245,FIXTURE, CALIBRATION, FIXTURE ALIGN CHAMBER 0270-76245 METAL
ROLLER;0021-26606,Flange, Drive Roller, 0021-26606 CMP
BOLT;3690-01346,PLATEN SHIELD 3690-01346 CMP
HOUSING;0040-81392,HOUSING, INNER LK PAD 0040-81392 CMP
SCREW-CAP;3690-04461,SCR CAP SKT HD 1/2- 3690-04461 CMP
LINEAR GUIDE;3760-00149,SLIDE LINEAR 95M 3760-00149 CMP
O-RING;3700-06990 3700-06990 METAL
SCREW;3690-04859,SCR CAP BTN HD 5/16-18X 3690-04859 CMP
HANDLE;3370-00100,PULL HANDLES 3370-00100 CMP
O-RING;0190-23606,ORING, SPLICED, BRUSH 0190-23606 CMP
SOCKET SCREW;3690-02529,1-3/4 Length,Sta 3690-02529 CVD
WASHER-FLAT;0020-17827, SHIM EDGE GRIPPER LOAD 0020-17827 CMP
LAMP-HALOGEN;1010-01116 1010-01116/JCD120V-800WB METAL
SWITCH-SNAP;1270-01261 SWITCH SNAP ACTIO 1270-01261 , 1/4HP 125VAC METAL
SENSOR-PHOTO;1400-01055,-,-,-,-,-,-,Z-MO 1400-01055/3880-00172 CMP
SENSOR-ETC;0090-02521,LK RB Z-AXIS HOME, SENSOR ASSY 0090-02521 CMP
SENSOR-ETC;1270-00872,switch sensor 1270-00872/7352-710 1115 CMP
SENSOR-ETC;0090-00444,SWEEP SENSOR, PROX 0090-00444 CMP
SENSOR-ETC;0090-03407,Brush Leak Sensor 0090-03407 CMP
DIAPHRAGM DDF3 HEAD;0021-42308 SILICON 0020-08036 CMP
ORIFICE;0015-02259,.0145, 1/4 DOUBLE MAL 0015-02259 CVD
CONNECTOR;0720-01566,CONT SKT 20-24AWG C 0720-01566 COMMON
BELLOWS;0041-27208,lift pin 0041-27208 ETCH
SCREW;SCREW, FLT HD 8-32 X 3/8L SCREW CVD
FITTING;0040-89768,water fitting AMAT, FITTING WAFER Inlet/Outlet 0040-89768 METAL
CPU;0190-18082,SPECIFICATION, 160GB 7200 SATA HDD 0190-18082 CVD
HUB;1110-01030,8,DNET 8 Position Network 1110-01030 CMP
LOCK;3140-01141,SUS/BSHG TAPER0LOCK2517 X5 5MM BORE 3140-01141 CMP
HEAT JACKET;0190-28672,HEATED JACKET 6,V2/VC LIQUID POSITION 1 0190-28672/UAPM22925RSN-054 CVD
O-RING;3700-01245 3700-01245 METAL
BEARING;0190-00962,SPACER PIN GUIDE 0190-00962 CVD
SHIELD;0200-01904(S),CERAMIC,RF CHAMBER 0200-01904(S) METAL
JIG-BASE;0270-70043,CENTER ALIGNMENT JIG 0270-70043 METAL
O-RING;3700-04001(S),DUPRA182,W1.02,ID3. 3700-04001(S) ETCH
BONDING PAD PBI HT3.8MM MODULAR END;0020-99758 0020-99758 CVD
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GROMMET;3360-01020,RND 5/16IDX1/2GRV-DIA 3360-01020 CMP
BONDING PAD;0020-64989,: FRONT RIGHT PAD FLAT MODULAR 0020-64989 CVD
SCREW;3691-01378,Cap Skt Hd 4-40X1/2L To 3691-01378 METAL
SCREW;3691-01391,Cap Skt Hd 6-32x1/2L To 3691-01391 METAL
SCREW;3690-01159,Flt Hd, 8-32x3/8 PHH Ve 3690-01159 METAL
SCREW;3691-01400,Cap Skt Hd, 6-32X1/2 TO 3691-01400 METAL
SCREW;3690-00456,SCR CAP SKT HD M5 3690-00456 DIFFUSION
PIN;0021-28692,Stand-Off Pin 0021-28692 CVD
BOLT;0015-04693,BOLT M12X35MM GRADE 12.9 0015-04693 ETCH
MAGNET;0040-53249,MAGNET HOUSING 0040-53249 CMP
SCREW;3690-08249 3690-08249 CVD
BOARD;0100-01801 , ASSY SOURCE CONDITIONING 0100-01801 CVD
SENSOR-ETC;0150-18105,CNT DUAL TC HDP-CV 0150-18105 CVD
SENSOR-ETC;0090-02522,SENSOR ASSY, Z2-AX 0090-02522 CMP
Screw CAP;3690-01275,FLAT HD,SOC,CAP 8-32X3/8 3690-01275 COMMON
CONNECTOR HEATER 300MM ULTIMA X;0020-17121,Ground Shield Heate 0020-17121 CVD
BUSHING;0021-26309,HTR LEVELING,1/2-28 T 0021-26309 CVD
PIN;0270-02456,300MM ROBOT CALIBRATION 3 0270-02456 METAL
INDUCTOR, 470 NANO HENRY ;0700-00073,300MM ACL EQUIPMENT 0700-00073 CVD
RF MATCH, ASSY HIGH EFF RF-BIAS;0010-33724 0010-33724 METAL
SENSOR-ETC;0041-11911,HOUSING WAFER PRI/HOUSING WAFER PRESENT SENSOR V 0041-11911 CMP
SENSOR-FIBER;0090-05425,SENSOR ASSY,HI L 0090-05425/E3XDA41S-U1 CMP
SWITCH-KEY;0090-04767 0090-04767 CMP
HDD;0190-37967,HTE726060M9AT00,4900,USB, 0190-37967 CVD
HINGE PLATE WINDOW PANEL, UNIVERSAL 300mm UPPER FRAME 0020-51971 CMP
TUBE-GAS;0050-94075,GAS LINE, POS 6/16, 0050-94075 CVD
TUBE-GAS;0050-92816,GAS LINE, POS 1 NF3 0050-92816 CVD
WINDOW,TWIN VIEWPORT LIDE8,300mm,PR;0020-12002,Producer GT Clear lid 0020-12002 CVD
POWER SUPPLY-DC;1140-00329,AC 100V~240V, 1140-00329/1600-XLP50E CVD
MFC;3030-14249,5SLM,N2 3030-14249/DSVBD1XM ETCH
FLOW CONTROLLER;1350-00242,FLOW 0-2.5LPM, 6500-T5-F03-H04-M-P2-U1 1350-00242 CMP
VALVE;3870-04305,VALVE PNEU DIAPH NC 1/4 3870-04305/FPR-NSDBT-21-6, 35-APY CVD
VALVE;3870-04757A,VALVE NC 2PORT 1.5C SM 3870-04757A / 316L-P CVD
VALVE;3870-04730,PNEU/MAN NC 1/4 2P 3870-04730/FPRL-NSDB-21GL-6, 35-APY#A CVD
UNIT;0090-04961,ASSY,SERVER X306M TOOL Control Server/300070-479-KQTAMB3 0090-04961 CVD
CABLE;0190-10602,TRACK CABLE SET FOR KAW 0190-10602/40975-1892 CMP
CABLE-ROBOT;0190-27570,0190-27570, New T/50979-3164LA0 0190-27570 CMP
C-SERIES KAWASAKI ROBOT CONTROLLER-DVSN 0190-27243 / 30C61D-B027 CMP
MOTOR-ETC;0190-10598,Servo Motor with Tr 0190-10598/40946-1116/P50B04007AXL7K/090512016P CMP
MKS SWITCH;0190-01902,30 TORR SWITCH 0190-01902/51A-21440 ETCH
FILTER, 5SLM, NASCLEAN, 1-1/8C-SEAL, GAS;4020-00267,1-1/8,5 SLM 4020-00267/NASCLEAN BF-1 125C-5-M CVD
SENSOR-FIBER;0090-05423,SENSOR ASSY, PUS 0090-05423 CMP
SENSOR-FIBER;0090-05424,SENSOR ASSY, CRESCENT WAFER PRESENT, VDPM 0090-05424/E3XDA11S-U5 CMP
VALVE;3870-00772,NUPRO 3870-00772/45800757/SM930LP1NCS102 CVD
ORIFICE;3510-00102,100 Wph Exshaust Orif 3510-00102/JKL4-M5A0.4 METAL
MOTOR Z AXIS;0090-03123,ASSY, RB Z2-AXIS 0090-03123/P50B05005DCSA7M CMP
VALVE;0190-14235,Pressure Transducer/SETRA 264 0190-14235 CVD
CYLINDER;3020-00081,LK OUTPUT STATION WA 3020-00081/CDQ2B12-5S CMP
MACHINED FORGING;3760-00127,SLIDE RAILE 3760-00127 CMP
RAIL;3760-01090,Slide Guild LM Block 1 o 3760-01090/RSR7ZMUU+40LM CMP
CABLE;0620-01380,CABLE ASSY DNET TRUNK 1Meter 300V 80C RS 0620-01380/U5452-9010 CMP
CONNECTOR;0720-03839,CONN ADPTR Y DNET D 0720-03839, VB2-FKM/FKM/FSM 57 CMP
ACTUATOR;3870-04344,35*336,760TORR,80PSI / ASSY, VALVE SLIT DBL ACTUATOR 3870-04344 , K8575 VAT229397/766/019 CVD
INDICATOR;0190-33293,ATM,Door Position 0190-33293 CVD
WATLOW ANAFAZE CLS204/CONTROLLER;3930-00020,24V,CNTRL TEMP 4LO 3930-00020 CVD
BOSCH LOWER LOAD LOCK PIN LIFT/ACTUATOR;0190-25081,PURCH SPEC,BOSCH PIN/0190-25081/SGMM-A203YA21 CVD
UNIT;SERV.634.15811,DCDC164/34 LOW V/IN SERV.634.15811 PHOTO
LENS;SERV.456.12122,To Expand the size o, BXP LENS C PAS/800 SERV.456.12122 PHOTO
LENS;SERV.631.31311,BXP LENS-A 8X0 LONG-LIFE SERV.631.31311/4022.631.31311 PHOTO
IPC;SERV.472.94001,SUN NETRA 240 2X1.5GHZ 2X146GB SERV.472.94001 PHOTO
HDD;SERV.437.35961(S) SERV.437.35961(S)/ST3146855LC PHOTO
TUBE-GAS;4QON355385,R3-4, SiN, R-Axis, G 4QON355385 DIFFUSION
TUBE-GAS;4QOP192620,R2-3, SiN, Flex Gas 4QOP192620 DIFFUSION
TUBE-GAS;4QOP192596,R3-2, SiN, Gas Line 4QOP192596 DIFFUSION
TUBE-GAS;4QOP10180,R3-1, SiN, IGS, Gas L 4QOP10180 DIFFUSION
TUBE-FLEXIBLE;19.100L-400-SP,2110-364117 19.100L-400-SP DIFFUSION
TUBE-FLEXIBLE;16.500L,2110-463342-11,ORV 16.500L DIFFUSION
GASKET;ST-08 100,BeCu,1/8,standard force ST-08 100 ETCH
O-RING;734-061280-377,VITON,T5.33,9.975, 734-061280-377 IMPLANT
SEAL;22-303252-00 22-303252-00 METAL
SEAL;22-303251-00,-,-,-,-,-,- 22-303251-00 METAL
O-RING;2-217V747-75,VITON 2-217V747-75 DIFFUSION
O-RING;2-215V747-75,VITON 2-215V747-75 ETCH
O-RING;2-320V747-75,VITON 2-320V747-75 ETCH
O-RING;3ROT115545,5.7X499.3V75-G500;VITO 3ROT115545/2204-001-1667 DIFFUSION
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O-RING;3ROT021164,5.7X459.3V75-G460;VITO 3ROT021164/2204-001-1660 DIFFUSION
O-RING;3ROT020547,459V75;VITON 3ROT020547/2204-001-1659 DIFFUSION
KALREZ O-RING;P004K4079,Kalrez P4 o-ring P004K4079/JIS P004 METAL
O-RING;2-231 FEPV75,Teflon Encapsulated 2-231 FEPV75 ETCH
O-RING;FLEX TALON LOW GAP CHBR CLN,KIT FLEX TALON LOW GAP CHBR CLN ETCH
O-RING;PXE INJ FLAG O-RING KIT PXE INJ FLAG O-RING KIT IMPLANT
O-RING;PXE SOURCE O-RING KIT PXE SOURCE O-RING KIT IMPLANT
O-RING;PXE RSLVR O-RING KIT PXE RSLVR O-RING KIT IMPLANT
O-RING;PXE SRC BUSHING O-RING KIT PXE SRC BUSHING O-RING KIT IMPLANT
GASKET;8.00 CU CONFLAT,6.75 OD 8.00 CU CONFLAT METAL
O-RING;2-389K8085,Kalrez,8085,2-389/AS568A 2-389K8085 ETCH
O-RING;2-125K8085,Kalrez 2-125K8085/AS-568 ETCH
O-RING;2-326K4079,3700-02066 KALREZ 2-326K4079/AS-568A CVD
KALREZ O-RING;2-207K8575,SAHARA 2-207K8575/AS-568 ETCH
KALREZ O-RING;388K8085,3700-03759 KALREZ 388K8085/AS-568 ETCH
O-RING;2-212K8085,Kalrez,2-212,8085 2-212K8085/AS-568 ETCH
KALREZ O-RING;2-379K8085,Oring 2-379K8085/AS-568A ETCH
KALREZ O-RING;NW16 K8085,showerhead j-pipe NW16 K8085/JIS NW16 METAL
CLAMP;17059530 QUAD 17059530 QUAD IMPLANT
SHIELD;17270190 17270190 IMPLANT
SHIELD;17270180, Liner (4) Striker Plate AMU-Beam Guide 17270180 IMPLANT
SHIELD;17270170, Liner (3) Striker Plate AMU-Beam Guide 17270170 IMPLANT
APERTURE;17224320(S),GRAPHITE 17224320(S) IMPLANT
SPRING;17270640 17270640 IMPLANT
SHIELD;17066301,QUAD SHIELD CUP 17066301 IMPLANT
GUIDE;170045830,Arm guide #2,170045830,v 170045830 IMPLANT
APERTURE;17250360,VG select shield suppo 17250360 IMPLANT
PLATE;17332490,FEM Striker/Liner (2) Striker Plate FEM 17332490 IMPLANT
SHIELD;17270120,bolt head FEM 17270120 IMPLANT
BLOCK;17270070,1 FEM BEAM GUIDE 17270070 IMPLANT
BLOCK;17270080,#2 FEM 17270080 IMPLANT
PLATE;17332500,Liner #4 striker FEM 17332500 IMPLANT
PLATE;17332510,Liner #6 Striker FEM 17332510 IMPLANT
APERTURE;17270140,#2 FEM 17270140 IMPLANT
BLOCK;17270110,#5 FEM BEAM GUIDE 17270110 IMPLANT
PLATE;17270050,liner #5 striker FEM 17270050 IMPLANT
BLOCK;17270100,#4 FEM 17270100 IMPLANT
BUSHING;4200541,DoorPlasticGuide 4200541 IMPLANT
CONNECTOR-ELECTRIC;5101979,#9924006 CONN 5101979 IMPLANT
INSULATOR;1711261(S),AL6061 1711261(S) IMPLANT
INSULATOR;17114680,eMER feedthru 17114680 IMPLANT
GAUGE;330000178,TC For Paradigm 330000178 IMPLANT
CUP SHIELD-VGI;17065341,carbon,36*27*3.2 17065341 IMPLANT
HOLDER;1919620,Ball Screw Wafer, BALL SCREW(19S3013) 1919620 IMPLANT
ELECTRODE;17138730,aper bk bias vg1 17138730 IMPLANT
FEEDTHRROUGH;17B5402,13*50MM,CERAMIC,ASS 17B5402 IMPLANT
INSULATOR;5001057,CERAMIC 5001057 IMPLANT
CONNECTOR;1003-0050-0004,4mm,MALE 1003-0050-0004 IMPLANT
CONNECTOR;5102496,4mm,MALE 5102496 IMPLANT
CONNECTOR;5102567,8mm,male,paradigmXE EL 5102567 IMPLANT
CONNECTOR;5100021,0.8mm,male,paradigmXE 5100021 IMPLANT
SERVER;120000400,SUN1 Workstation(Upgrad 120000400R-REV.B-RM4U-SX1500 IMPLANT
SWITCH-PRESSURE;6500625 6500625 IMPLANT
VALVE;FUCL-715-9.52-0.023-KA,3/8" 3ROT06 FUCL-715-9.52-0.023-KA DIFFUSION
FUJIKIN VALVE-CHECK, FUCL-715-9.52-0.023 FUCL-715-9.52-0.023 DIFFUSION
VALVE;FUBFL-71-9.52-2-BR#A,077453 FUBFL-71-9.52-2-BR#A DIFFUSION
VALVE;DS012-004333-1,V,AIR..FPR-71-9.52-2-PA-BR DS012-004333-1 DIFFUSION
FILTER;GSMM-50-010-33,1.5",10SPLM,Hastel GSMM-50-010-33 DIFFUSION
CONNECTOR;22-106015-00,24P,AIR,PLASTIC,G 22-106015-00 METAL
CONNECTOR;22-115772-00,disconnect 24 por 22-115772-00/QD24-M METAL
AIR VALVE-SOLENOID;380-4A2 380-4A2 CLEAN
SENSOR-POWER;4027F2M,+,- 3%,7/16 Din Fem 4027F2M CVD
CONNECTOR-ELECTRIC;4240-268 RF QC HN(F) 4240-268 RF QC HN(F) METAL
GUIDE UNIT;17116860(S),Vespel,VCSS butto 17116860(S) IMPLANT
ADSORBER CRYO AIR MEDICAL SYS;8080040K001 8080040K001/8032267GXXX,8031007 METAL
GAUGE-PRESSURE;7021002P001/E-904SAETW-1200 HOSE ASSY 7021002P001 METAL
READER;TLG-I2-FL6M-01,TLG-RS232/N5GTSG TLG-I2-FL6M-01 METAL
GASKET;7100001G007,Cryo Indium Gasket 7100001G007 METAL
GAUGE-ION;370120,STABIL, HE06, TYPE:EXT-Y 370120/YEA06033 IMPLANT
HB0480412, YASKAWA ROBOT CONTROL REPAIR HB0480412 REPAIR
MODULE;173179, RELAY CUR MONITOR 3PH 200-500VAC 173179/K8AB-PH1 METAL
MFC;SLA7950S1EGG1B2A1 500 SCCM SIH4 SLA7950S1EGG1B2A1 500 SCCM SIH4 METAL
MFC;GF125C-923490/GF125CXXC/SIH4 50SCCM GF125CXXC METAL
MFC;GF125-SH44-B2H6,w/ adptr 7003590,750,N2 GF125-SH44-B2H6/GF125CXXC METAL
MFC;GF125CXXC-0013050L-CXVODX-0961AX GF125CXXC-0013050L-CXVODX-0961AX CVD
MFC;GF125SH46,WF6, w/ adptr 7003590,500SCCM GF125CXXC METAL
MFC;GF125-SH44,B2H6 w/ adpater 7003590,500SCCM GF125CXXC METAL
TUBE CONNECTOR;002-09280-302,stainless s 002-09280-302 ETCH
TUBE CONNECTOR;002-09279-302,ss, turbo w 002-09279-302 ETCH
Page 4 of 26
VALVE-AIR;KSP1-102222 KSP1-102222/AMD01-8BUP-4 CLEAN
DIAPHRAGM VALVE;AGD11R-AT2-4R-C01-FL-413857,2-WAY AGD11R-AT2-4R-C01 / 1A-00020G CMP
BELLOWS;VEC-VH8-BLWS-ASSY2-FL-309640,Rep VEC-VH8-BLWS-ASSY2-FL-309640 DIFFUSION
VALVE;AMD312-15BUP-10-1-4,flow control 1 AMD312-15BUP-10-1-4 CLEAN
AMD422-20B6P-63B
REGULATOR-AIR;EVD3500-010AP-3 EVD3500-010AP CLEAN
VEC-VH8-X0318(R),CKD VALVE REPAIR VEC-VH8-X0318-1(R) REPAIR
SPRING;E40000001 E40000001 IMPLANT
BONDING PAD;E17014500 E17014500 IMPLANT
ISOLATOR;0200-02421(S),CERAMIC,ISOLATOR 0200-02421(S) METAL
BELT;7500-3977-01,BELT,MXL,475TEETH,9.5M 7500-3977-01 ETCH
ROBOT TIP;9701-3181-01,KIT,FRU,FRONT,EE 9701-3181-01 ETCH
FLANGE;7500-3976-01,BEARING,FLANGE,14X5M 7500-3976-01 ETCH
8033019(ARRAY ASSY 80K 8 CRYO Pump) CRYO OBIS 8F sput 8080025K006 METAL
AUTO VIBRATION SYSTEM 300mm Lite, SENSOR-VIBRATION;AVS300CL,wafer sense 30 AVS300CL METAL
SLEEVE;SS-6-UTS ULTRA TORR SS-6-UTS ULTRA TORR ETCH
NUT;SS-6-UTN ULTRA TORR SS-6-UTN ULTRA TORR ETCH
CONNECTOR;CWC8-8P,SS-810-1-8W MALE PIPE CWC8-8P ETCH
UNION;NY-400-61,BULKHEAD UNION NY-400-61 ETCH
FITTING;NI-4-VCR-2-VS-BL,BLIND,GASKET,1/ NI-4-VCR-2-VS-BL METAL
CONNECTOR;SS-600-1-8,MALE CONNECTOR,3/8 SS-600-1-8 ETCH
VALVE;6LVV-ALD3VR4-P-CS,22-301841-00, Sw 6LVV-ALD3VR4-P-CS/ED1042 METAL
VALVE;6LVV-A61VD2DP-ASB-NV,6LVV-A61VD2DP 6LVV-A61VD2DP-ASB-NV METAL
VALVE;6LVV-A6V11456P-AS-NV,22-323740-00, 6LVV-A6V11456P-AS-NV METAL
PLUG;SS-6-UT-P SS-6-UT-P/D1HLN0741S ETCH
FILTER;X009994-016-190 FILTER;P512925,PO X009994-016-190 FILTER PHOTO
TAPE;3A145,Tape, Reflective 3A145 DIFFUSION
O-RING;700-000000251,o-ring 120-4.00 FKM 700-000000251 CLEAN
CARTRIDGE;TQ753244,CARTRIDGE WITH TUBING TQ753244 METAL
2124-000009-11R,MAG SEAL REPAIR 2124-000009-11R REPAIR
5124-000009-11R, MAG SEAL REPAIR 5124-000009-11R REPAIR
DOOR;001-05495-301,DOOR,INNER, MEGASONIC MODULE 001-05495-301 CMP
COVER, 300mm, AMAT HEAD ;001-05436-301,Outer 300mm 001-05436-301 CMP
SPACER;001-09233-303,Spacer, Ultima GSH 001-09233-303 CVD
BLOCK;001-05452-303,ESP ULTIMA TEFLON / ESC SUPPORT BLOCK 001-05452-303 CVD
TUBE-EXHAUST;001-09249-303,Modification, LOD WELDMENT 001-09249-303 CVD
1917660R,UNCLAMPER BELLOWS REPAIR 1917660R REPAIR
TH4DAMO4(R),TI MAGNET HOLDER REPAIR TH4DAMO4(R) REPAIR
0041-10756R,FLANGE REPAIR 0041-10756R REPAIR
SCREW;001-05442-301,HEX HEAD , PPS 001-05442-301 CMP
SCREW;001-05492-301,Screw, Brush Lid, PP 001-05492-301 CMP
INSULATOR;001-05490-303,Connector(insula 001-05490-303 CVD
CLIP;000-06730-302,KF Clip 000-06730-302 ETCH
GAUGE;000-05470-303 000-05470-303 CVD
BLOCK;000-05471-303 000-05471-303 CVD
SCREW;001-06699-303-HEX, HDP SCREW COVER,HEX 001-06699-303-HEX CVD
SCREW-CAP;003-05463-302 003-05463-302 ETCH
HOLDER;000-05546-301,Holder, Pad 000-05546-301 CMP
STRAP-GROUND;001-06706-303,Ground Strap, 001-06706-303 CVD
3870-06289R,VALVE CONTROL (CU) REPAIR 3870-06289R REPAIR
SHIELD;001-05480-303,Teflon Bellows shield 001-05480-303 CVD
PANEL;002-09243-302,SET,BLACKOUT 002-09243-302 ETCH
FILTER-GAS;WGSLSHW1MP,1800PSI,1.125" / Wafergard SL 1.125" W-SEAL SF MINI-PLUWGSLSHW1MP DIFFUSION
FILTER-CHEMICAL;CWUZ0S0P1,ipa filter, 50 CWUZ0S0P1 CLEAN
FILTER-GAS;WG2S02WW2,1.5" W-Seal,105mm WG2S02WW2 DIFFUSION
FILTER-CHEMICAL;CWAX0SP01 CWAX0SP01 CLEAN
SHPR-WAFER SGLE 300MM/CARRIER;H93-120-101-1116,-,300MM,-,-,-,- H93-120-101-1116 CLEAN
EXCHANGER-HEAT;PHX08U00P, pHasor X- heat exchanger PHX08U00P CLEAN
FILTER-CHEMICAL;QCPZ30P3F,.05 um 3/8" fl QCPZ30P3F CLEAN
Quick exchange ATM UCM CLII 10", FILTER;QCDYACM4F,0.03um,1 INCH,0.003um,6 QCDYACM4F CLEAN
FILTER-CHEMICAL;QCDYATM2F,.03 um,10", 1/ QCDYATM2F CLEAN
SHIELD;0021-19342(S),AL,RF CHAMBER 0021-19342(S) METAL
ELECTRICAL ASSY BRUSH 1/2;0090-03124,Sensor Door Close 1/2 0090-03124 COMMON
FLANGE O-Ring;0020-07211,0-RING SEAL TV, 300MM 0020-07211 CVD
SCREW;0190-23626,peek 4x40 3/8 in screww 0190-23626 CMP
SHIELD;0020-19258(S),TI,RF CHAMBER SHIEL/P0809031 01-01 0020-19258(S) METAL
WHEEL;0260624,Dremel 545,7/8" DREMEL Diamond Wheel 260624 METAL
TOOL HAND;0257878,81002, 1/4" Drv 5pc Ex 257878 METAL
TOOL HAND;0257903,81200, 3/8" Drv 4pc Ex 257903 METAL
HOLDER;4022 268 02026,aperture strip hol 4022 268 02026 YE
DETECTOR-ASSY;4022 268 01694,TLD Deterct 4022 268 01694 AUTOMATION
LENS;5322-695-16148,Detector, Thru Lens, SEM DDL LIGHT GEL 200/300 5322-695-16148 YE
VALVE-SOLENOID;526992,Festo 5/2 Way Dbl 526992 METAL
FILTER;MLOX 028-225-1/4GS-MF,MLOX 028-22 MLOX 028-225-1/4GS-MF METAL
PEN-CARTRIDGE;19 304 776,SCRUBWRIGHT PEN 19 304 776/FTPEN-1 METAL
(R)VAT VALVE, 02112-BA24(CU)REPAIR 02112-BA24-APN1 (CU)REPAIR REPAIR
11039040R,PHASE MONITOR BOX REPAIR, RF DETECTOR ASSEMBLY 11039040R REPAIR
1526850R,PCB ASSY CVA BOARD REPAIR/CVA Control PCB 1526850R/1426850 REPAIR
SEAL-KIT;918008-004 918008-004 CLEAN
ACTUATOR-ROTARY;928588-001,ASSY,HOT ROTA 928588-001 CLEAN
O-RING;303266-335 303266-335 CLEAN
Page 5 of 26
MOUNT BASE;444983-005 444983-005 CLEAN
CHEMRAZ O-RING;303266-242,o-ring,chemraz 505, 4" 303266-242/AS-568A-242 CPD 505 CLEAN
O-RING;303266-117,o-ring,chemraz 505, 13 303266-117 CLEAN
VALVE;931044-001 931044-001 CLEAN
VALVE;317602-011,Zeta IR Heater By-Pass 317602-011 CLEAN
SENSOR-TEMP;318332-001,RTD,PFA,1/8-27NPT 318332-001 CLEAN
SEAL-KIT;929007-002 929007-002 CLEAN
VALVE-3 WAY;317601-102 317601-102/202-81-01-TS-B CLEAN
ORIFICE;444624-180 444624-180 CLEAN
VALVE;928021-007 928021-007 CLEAN
VALVE;928021-008 928021-008 CLEAN
VALVE;317479-002,Zeta Valve 317479-002 CLEAN
UNION;444664-001 444664-001 CLEAN
TUBE-HEATER;928581-002,aasy,ir heater mo 928581-002 CLEAN
VALVE-3 WAY;312070-002 312070-002 CLEAN
HEATER-LAMP;930868-001,ASSY,LAMP,ALUM IR 930868-001 CLEAN
ADHESIVE;316062-001, 3M Scotch-Weld 316062-001 CLEAN
RELAY-MAGNET;232731-001 232731-001/SH04 VDE0660 CLEAN
VALVE INTEGRA 1/4IN N/CHP 3GEN 2W 3/8IN/;305322-003 305322-003 CLEAN
VALVE;317600-101,VLV,2-WAY,N/O,1/4 ORF,3 317600-101/202-76-01-TS-H CLEAN
VALVE;303269-001,Valve ,PNU,2-2 WAY,3/8 303269-001 CLEAN
VALVE-AIR;317600-102,vlv,2-way,n/o,1/4 o 317600-102/202-77-01-TS-H CLEAN
FLOWMETER;307211-104 307211-104/4400-04-F04-A00-A-C41 CLEAN
VALVE;317601-101,VLV,SMPL,1/4 ORF,1/2 TS 317601-101/202-82-01-TS-B CLEAN
VALVE;305322-004, VALVE INTEGRA 1/4IN N/CHP 305322-004/202-124-01 CLEAN
VALVE;304221-003 (2-3 WAY VALVE),VLV,PNU 304221-003 (2-3 WAY VALVE)/202-86-01 CLEAN
VALVE-INTEGRA 1/4IN NC 3GEN SAMP 1/2IN FSI P/N : 312070-001 Entegris P/N:202- 312070-001/202-82-01 CLEAN
REGULATOR-AIR;311584-204 311584-204, UPRM1/41/2FLFT CLEAN
FURON VALVE;316946-002, 1/2",2-WAY,HIGH TEMP, UPM2-F88-NO-VI-HT-SB 316946-002 CLEAN
VALVE;316955-002,VLV,PNEU,3-way,1/2 orf/ UPMS-F88-VI-HT-SB 316955-002 CLEAN
SENSOR-ETC;922139-001,CYLINDER SENSOR 922139-001 CLEAN
CYLINDER-AIR;306993-001/TYPE S-A01027C 306993-001 CLEAN
VALVE;316949-002 316949-002 CLEAN
SENSOR-FIBER;235075-002 235075-002 CLEAN
NUT-HEX;1WB13,M8, 8-32, 11/32, 316 SS 1WB13 METAL
BOLT-EYE;547508S,Metric M8x75mm, 8mm eye 547508S METAL
WRENCH-L;4RE12,Hex Key,L Shape,5/64In,1. 4RE12 CMP
WRENCH-L;4RE10,Hex Key,L-,0.050 In,1.66 4RE10 CMP
TAPE-POLYIMIDE;15C597,Kapton,Polyimide T 15C597 ETCH
METER-TEMP;9UDG3,Label 160 to 230Deg F 9UDG3 CMP
BRUSH;3U780,Scrub, Swivel 3U780 CMP
TIP-VACUUM;12A514 12A514 METAL
GREENE TWEED O-RING;3700-02183,Viton(썩여 있음) 3700-02183/9207-SP706 CVD
O-RING;9-127SC513 9127-SC513/AS568A-127 CPD 513 CVD
O-RING;9388-SWD18, AS-568A-388 CPD D18 9388-SWD18 ETCH
O-RING;9284-SC513,chemraz 513,3.53,456.0 9284-SC513(AS-568A-284 CPD 513) DIFFUSION
SCREW;720-000960-028,6-32 X 3/16",SUS,1. 720-000960-028 ETCH
BONDING PAD;955-068152-001,CLN, SEMI, CO 955-068152-001 ETCH
TUBE PLUG;715-049949-001 715-049949-001 ETCH
SPACER;713-050552-001,SPCR,FSI,DGF MOD 713-050552-001 ETCH
LAMP;H3319270-003,Halogen, JCR15V-150WB H3319270-003 METROLOGY
BELT;41S9043,ALIGNER 41S9043 IMPLANT
BELLOWS;1917660,PLUNGER BELLOWS R-PAD 1917660 IMPLANT
MFC;SEC-Z512MGXOT1-MR.MG-06-5SLM-14W2,N2 SEC-Z512MGX DIFFUSION
SEC-Z512MGX(R),1SLM NH3 MFC REPAIR SEC-Z512MGX(R) REPAIR
SEC-Z512MGX(R),3SLM N2 MFC REPAIR SEC-Z512MGX(R) REPAIR
CONTROLLER;HPR-2004 HPR-2004 PHOTO
HPR-2004 POP DATA Terminal HPR-2004
SUPPORT;4QOP092895,BASE 4QOP092895 DIFFUSION
CIRCUIT BREAKER;2KOT025776,ELB2132, Brea 2KOT025776 COMMON
POWER SUPPLY;HP-Q282F3P,280W,model H280P HP-Q282F3P METAL
BONDING PAD;1316,MODIFIED w/ DIMPLE, MODIFIED HOT EDGE RING, Six Posts PEC 1316 ETCH
GASKET;UPG-6.35G,Gasket, SUS316L,UPG-6.3 UPG-6.35G DIFFUSION
BEARING-BALL;KMS A5204-G,Double Row Glas KMS A5204-G CMP
SCREW;M310PPSST,M3X10 FLAT HD M310PPSST CMP
SCREW;3690-01088-SUN,SCR CAP SKT HD 8-32 3690-01088-SUN CMP
SCREW;3690-01469-SUN,SCR SET 6-32X 1/4L 3690-01469-SUN CMP
SCREW;3880-01045-SUN,WSHR LKG SPLIT #14 3880-01045-SUN CMP
SCREW;3880-01026-SUN,WSHR LKG SPLIT #1/4 3880-01026-SUN CMP
TOOL HAND;1FX74,HEX KEY T-HADLE 3/16 1FX74 CMP
TOOL HAND;1FX68,HEX KEY T-HANDLE 2.5MM 1FX68 CMP
TOOL HAND;1FX65,HEX KEY T-HANDLE 5MM 1FX65 CMP
TOOL;5HZ97,BRAID, DESOLDERING, #3 5HZ97 CMP
LED;32M3095,NTE30012, PLCC SUPER GREEN L 32M3095/NTE 30012 METAL
CABLE TIE MOUNT;1LEVE,CABLE MOUNT, ADHES 1LEVE CMP
FITTING-TUBE;KPT08-00 KPT08-00 CMP
FITTING-TUBE;KPH04-00 KPH04-00 CMP
Page 6 of 26
FITTING-TUBE;KPT04-00 KPT04-00 CMP
UNION;KQP04-00,4 mm Y-union KQP04-00 METAL
FITTING;KJT01-00,KJT01-00 1/8 Union Tee KJT01-00 CMP
FITTING;SS-4-DU,1/4 Tylok Union; Stainle SS-4-DU CMP
FITTING-ELBOW;KGW04-M5,4MM/M5 EXTENDED E KGW04-M5 CMP
THERMOCOUPLE;5TOT013677(R) 5TOT013677(R) REPAIR
WRENCH-L;4RE15,Hex Key,L Shape,1/8 In,2. 4RE15 CMP
O-RING;P-25,EPDM6170,-,T3.5,ID24.7,BLACK EPDM6170 DIFFUSION
SCREW;3690-01490,M2.5X16,AMAT ETCH 3690-01490 ETCH
NUT;UJR-6.35N,UNION NUT, UJR-6.35N UJR-6.35N DIFFUSION
SLEEVE;UJR-6.35MS-AW-316LM,WELD SLEEVE, UJR-6.35MS-AW-316LM DIFFUSION
SLEEVE;UJR-6.35MS-L28-AW-316LM,WELD SLEE UJR-6.35MS-L28-AW-316LM DIFFUSION
BONDING PAD;GL-WCC-4512P-10(PAD),1200 gr GL-WCC-4512P-10(PAD) METAL
NUT;SS-302-1,Swagelok, 3/16" tube SS-302-1 DIFFUSION
BONDING PAD;0021-46440(S),PRO12,GT,LEFT, 0021-46440(S) CVD
BONDING PAD;0021-46439(S),PRO12,GT,RIGHT 0021-46439(S) CVD
BEARING-LM;LM16UU,THK, LINEAR LM16UU ETCH
BUTTON HEAD CAP SCREW;6C15KCS,M6x15,Blac 6C15KCS ETCH
BOLT-HEX SOCKET;M5 X 15 SOC CAP SC ALLOY M5 X 15 SOC CAP SC ALLOY ETCH
UNION-TUBE;SS-400-61,1/4 SS-400-61 ETCH
TUBE CONNECTOR;CMC8-6N,SS-810-1-6 MAIL CMC8-6N ETCH
TUBE CONNECTOR;SS-QC6-B-600 SS-QC6-B-600 METAL
NOZZLE;1843,DPS GAS NOZZEL, 1843 1843 ETCH
VALVE-DIAPHRAGM Kit;NXT-3DK-DRP4-A,Pneumatic NXT-3DK-DRP4-A/EV6245 CMP
WINDOW;032-00209-001,Acrylic AL Viewing 032-00209-001 ETCH
UNION;KQP06-00,6 MM Y-UNION KQP06-00 CMP
X50-AAEE-BABA-AA,X50,BELLOWS PUMP X50-AAEE-BABA-AA CLEAN
HANDLE;2ELE1,Fiberglass Extension 3ft 2ELE1 CMP
TUBE;TIUB07YR2-33,1/4 ORANGE/POLY-TUBING TIUB07YR2-33 CMP
BRUSH-CLEANING;2RWA4,Long-Handled Brush, 2RWA4 CMP
BRUSH-CLEANING;2RWC1,Bench Brush, Soft, 2RWC1 CMP
MFC;GF125-B2H6-750SCCM, GF125-B2H6-750SCCM / GF125C-909732 METAL
MFC;GF125-SIH4-500SCCM GF125-SIH4-500SCCM METAL
CYLINDER-COMPACT;19-380368-00,CYLINDER,A 19-380368-00/225033-2-5 METAL
FITTING;533213,Push-in fitting,QS-H-1/8-1/8-U-M 533213 METAL
HDD;MHV2080BH,2ZOT006689,KE HDD MHV2080BH DIFFUSION
HEATER;LH7-1-2.2-C-A22-P650,IN-LINE LH7-1-2.2-C-A22-P650 / W1-39D3B CLEAN
CIRCUIT BREAKER;FAZ-B20/2,20amp,2 pole FAZ-B20/2, 3870-03094 METAL
CIRCUIT BREAKER;QO220,20Amp,120/240,2Pol QO220 METAL
VALVE-SOLENOID;VQ1201N-5 VQ1201N-5(VQ1A54) METAL
VALVE;6LV-FV11456P-A,NUPRO 6LV-FV11456P-A METAL
GAUGE-VACUUM;971-5007(27-229996-00),10TO 971-5007(27-229996-00)/Q1104-302 METAL
JIG;CMP FAB2, 3LJPD/YS CMP FAB2 CMP
NOZZLE;001-05429-301,Sensor Taper 001-05429-301 CMP
FLANGE;001-06662-301,6 port 001-06662-301 CMP
REPLACEMENT DIAPHRAGM KIT;923-722-G1,CPM diaphragm kit 923-722-G1 METAL
GAUGE;351-022,0190-23645, inverted magne, INFICON AG, LI 9496 Balzers 351-022/MPG 401 DN 40 CF-F METAL
VALVE;923-711-G1,Hexblock Valve Kit 923-711-G1 METAL
GAUGE;912-353-P1,10-6~10torr,CPM EM 912-353-P1/30043/APD1 MA METAL
TOOL;HH15DX8,TOHNICHI REPLACMENT HEAD HH15DX8 CMP
STOPPER-SEPARATOR;BONDING(LANDING) PAD,0 BONDING(LANDING) PAD ETCH
MOUSE TRAK (부외) B-SUNMD A0001
DAMPER;PDA-40W/06106811 PDA-40W CLEAN
SHUTTLE-ROBOT;CBGAC00001450 CBGAC00001450 CLEAN
SENSOR-ETC;4RS0209,1.25~4.0V,6 4RS0209 CLEAN
HEATER;CFBAA00000330,TEFRON,CLEAN BELT H CFBAA00000330 CLEAN
BRACKET;PGF4L0031H00,JET-HEATER PGF4L0031H00 CLEAN
AMPLIFIER-ETC;CHAAA00001520,fiber sensor CHAAA00001520/HPX-AG00-1S CLEAN
TEMPERATURE SENTOR, THERMOCOUPLE;CHFAC00000510,H3PO4 bath TC CHFAC00000510 CLEAN
THERMOCOUPLE;CHFAC00000740,SC1 and ORG b CHFAC00000740 CLEAN
CONTROLLER-TEMPERATURE;C15TV0TA0300,C15T C15TV0TA0300/Azbil SDC15 CLEAN
WAFER;1530A-12-5149,Bake SensArray 1530A-12-5149 EDS
ASSY TSTD PCA, SENSOR Module, 5xx, BOARD;710-337479-001,TDI Daughter Board 710-337479-001 PHOTO
WAFER;1840A-12-5044A_SA,HOT CHUCK WAFER 1840A-12-5044A_SA EDS
LAMP;0219034-000,Lamp, Rev 7 Lamp Discov 0219034-000 METROLOGY
WAFER;0323519-000,ACS12-0.060D-16K-25,GSS ONLY, DUKE 0.06u 0323519-000 METROLOGY
SEAL;3ROT128605,Packing, Scavenger Panel 3ROT128605 DIFFUSION
GASKET;4ROP091417,SIN Scavenger Access D 4ROP091417 / T4DS1-01646-40023 DIFFUSION
CONTROLLER;5UOT308364,TEMP CONTROLLER(CQ1710) 5UOT261696 / T4DS1-00516-10026 DIFFUSION
INNER BURNING HEATER;4TON996581,D3DN99658 4TON996581 DIFFUSION
GAS;4QOP192612,GAS LINE FLEXIBLE 4QOP192612 DIFFUSION
BASE;4QON558152 4QON558152 DIFFUSION
SCREW;3FOT021464,M4 Black Scavenger Scre 3FOT021464 DIFFUSION
TAPE;2ZOT001201,Tape, Teflon 20mm 2ZOT001201 DIFFUSION
HOLDER;4POM747237,Presence Sensor Holder 4POM747237 DIFFUSION
SHUTTER;4QOM807691,Shutter Support Bolt, 4QOM807691 DIFFUSION
O-RING;3ROT130858 3ROT130858 DIFFUSION
O-RING;3ROT148132,Seal Cap Outside DWG:4 3ROT148132 DIFFUSION
Page 7 of 26
O-RING;3ROT004681,N2 Purge/Scavenger DWG 3ROT004681 DIFFUSION
O-RING;3ROT115545,Below Furnace Flange D 3ROT115545 DIFFUSION
O-RING;3ROT021164,Above Furnace Flange D 3ROT021164 DIFFUSION
SPRING;4QOM807683 4QOM807683 DIFFUSION
SEAL;4RON476230,SCAVENGER PACKING 4RON476230 DIFFUSION
SOCKET SCREW;4QOD859205,Furnace Cap Scre 4QOD859205 DIFFUSION
GASKET;4RON562609,4RON562609, Ring Packi 4RON562609 DIFFUSION
GASKET;4RON476255,Rubber,Scavenger Inter 4RON476255/T4DS1-01804-40020 DIFFUSION
STOPPER;4QOP096771,STANDOFF 4QOP096771 DIFFUSION
GASKET;4RON476271,BIO Access Panel 4RON476271 DIFFUSION
PIN-HOLDER;4ROP021802,TEFLON,BIO BASE 4ROP021802 DIFFUSION
LAMP-FL;2DOT002112,Light Bulb 9W 4 pin 2DOT002112 DIFFUSION
SENSOR-VIBRATION;5UOT287287 / CDU 100A-SENSOR 5UOT287287 DIFFUSION
VALVE;ERDA003810,CHECK VALVE, VENT LINE ERDA003810 DIFFUSION
GAS PIPING SYSTEM;4QOP348453 4QOP348453 DIFFUSION
FITTING-AIR;3ROT179285,Steel Fitting,CWL, BLOCK CONNECTOR 3ROT179285 DIFFUSION
THERMOMETER;2KOT032699,US-625AXRMQE 2KOT032699 DIFFUSION
SAFETY LIGHT CURTAIN;2HOT001169 2HOT001169/T4DS1-02036-50001/SL-C52H-T DIFFUSION
ABSORBER;3FOT001466,Shutter Stopper Shoc 3FOT001466/RB2015 DIFFUSION
SHOCK ABSORBER;3ROT056046,Shutter Shock 3ROT056046/RBQ3213 DIFFUSION
PUMP;5014-000063-11 5014-000063-11/MCE-83WS PHOTO
(Cleaned)Nozzle Insert DG Solid 300mm 1843
DOOR;KTI-003-0013-1Y,TEL SHIN SHUTTER KTI-003-0013-1Y ETCH
RING;0200-05959(S),QUARTZ 0200-05959(S) ETCH
WASHER-BEARING;715-047802-001 715-047802-001 ETCH
DOOR;715-008220-105,DOOR, BARRIER, ROCKE 715-008220-105 ETCH
BOARD;810-010473-009/ RF INTERFACE, FLEX45 810-010473-009 ETCH
INSERT;713-025888-002,CAP PLUG ESC PROBE 713-025888-002 ETCH
SCREW;720-016936-008,720-016936-008,SUS, 720-016936-008 ETCH
PLUG;853-012782-001,PLUG,COMSTOMER INTER 853-012782-001/1002685-1029 ETCH
WINDOW;713-810529-001,WINDOW, SLOT V/LL 713-810529-001 ETCH
O-RING;734-092561-281,FSI,.139,14.96 734-092561-281 ETCH
SENSOR-RTD;853-800105-001,ASSY, HARN, RT 853-800105-001 ETCH
TUBE-AIR;955-009170-001,Poly tubing 955-009170-001 ETCH
SWITCH, VACUUM, 1/4 VCR, SENSOR-ETC;768-090914-001 ATM 768-090914-001 ATM ETCH
PIN;713-037069-003(S),PEEK 713-037069-003(S) ETCH
839-800327-410,ESC CHUCK (CU) CLEAN, LAM410 ESC-881 839-800327-410 REPAIR
KSP1-111195,IRIS CHAMBER SPIN SERVO MOTOR KSP1-111195/APM-HE11DC(I3)H CLEAN
SOCKET SET SCREW;1000838,10x.5,SS 1000838 ETCH
BRACKET;1000837,STOP BLOCK, BLADE, TRAVEL 1000837 ETCH
SENSOR-ETC;3002843 / CBL ASY, LL WFR PROTRUSION, SNSR, PM1, SUPRM 3002843 ETCH
RUBY BALL 1/8" DIAMETER 0.125" SPHERICAL DIAMETER GRADE25 MRB125D
CAM;715-007598-005/ INSR,PLGR,WAP CAM,THD,ANDZ 715-007598-005 ETCH
SEAL-KIT;MSA-043-315,3port MSA-043-315 CVD
SEAL-KIT;MSA-043-215,2port MSA-043-215 CVD
BUBBLE CUTTER,FILTER;KSP1-105018,H150102,PTFE,KSPIN12 KSP1-105018/MJ-G204-P10K PHOTO
HEAT JACKET;5UOT269939, 9699-1215,htr jc, HTR4. 13,STR59,6BP3 5UOT269939 / 9699-1215 DIFFUSION
HEATER;5UOT270119,KE NITRIDE HEATER JACK / HTR2.0,STR12.5,SPEC,6BP3 5UOT270119 DIFFUSION
HEATER;9515-0143,HTR1.5,LAM 678-099961-0 9515-0143 ETCH
FLANGE;100888015,Cryo leak check flange 100888015 METAL
HEAT JACKET;9511-0080,HEAT JACKET; 5UOT2 9511-0080 DIFFUSION
HEAT JACKET;9517-0028,HEAT JACKET; 5UOT2 9517-0028 DIFFUSION
CLAMP;NW-25CP,100312903 25 NW NW-25CP ETCH
0920-00013R,MKS ASTRON RPS 2L(CU) REPAIR 0920-00013R/FI20620-1-C REPAIR
627BRETDD2P(R),CM1 BARATRON REPAIR 627BRETDD2P(R) REPAIR
628B11TDE18(R),10TORR MANOMTR (CU)REPAIR 628B11TDE1B(R) REPAIR
627D11TDC2P(R),MANOMETER REPAIR 627D11TDC2P(R) REPAIR
683B-29282R,3" THROTTLE VALVE REPAIR 683B-29282R REPAIR
631A13TBEH(R),1000 TORR BARATRON REPAIR 631A13TBEH(R) REPAIR
683B-29016R,THROTTLE VALVE REPAIR 683B-29016R REPAIR
CONTROLLER;CT5015-000010-11,2CH,AUXILIARY MFC. MKS EPCA-24592 CT5015-000010-11 PHOTO
640A-15715(R),APC FLOW CONTROLLER REPAIR TYPE640 640A-15715(R) REPAIR
683B-24562(R),THROTTLE VALVE (CU) REPAIR 683B-24562(R) REPAIR
FI80133-01R,MKS RPS GENERATOR REPAIR FI80133-01R REPAIR
FI20620-1R,RPS 2L UNIT REPAIR(CU)0920-00013 FI20620-1R REPAIR
Refurbished MKS Throttle VALVE-BUTTERFLY;253B-11328,0-760 Trr,AIR 253B-11328 METAL
BEARING-BALL;6903 6903 ETCH
BEARING-FLANGE;SSRF1450ZZ,0.1969 in,0.55 SSRF1450ZZ ETCH
VERT OP KEY FOR OMRON KEYlock SWITCHES-KEY;653-D4GS-NK2 653-D4GS-NK2 DIFFUSION
SWITCH-KEY;653-D4GS-NK1 653-D4GS-NK1 DIFFUSION
8" ESC Deposition Ring/SHIELD;MA-29611,-,DEPO RING MA-29611 METAL
LAMP UNIT;9407-030998,Lamp Housing Ellip 9407-030998/FLS-400 METROLOGY
MFC;FC-PIDA980C-4V-M6-500SCCM,500sccm,WF6 FC-PIDA980C-4V-M6-500SCCM/FCPI981C4VX9TAA METAL
MFC;FC-PIDA980C-4V-M7-500SCCM,500sccm,SiH4 FC-PIDA980C-4V-M7-500SCCM/FCPI980C4VX9TAA METAL
CAP;S-CP-W2A,3/8" PILLAR S-CP-W2A CMP
391-41000-02R,CONTROL UNIT REPAIR/SDS-8000X-1-000 391-41000-02R REPAIR
HEAD-SHOWER;16-100488-00(U1),AL6061,SHOWHEAD 16-100488-00(U1) METAL
O-RING, 2-387, VITON 22-120994-00
COVER-GRILL;17-314885-00,Shield, Heat 17-314885-00 CVD
HOSE ASSY, WATER, TOP COOLING, DOME, C# SPD ;11-286071-00 11-286071-00 CVD
WAFER,TEST,1,SILICON RUBBER,300mm, POSITION DISK;71-259891-00,SILICON RUBBE 71-259891-00 METAL
Page 8 of 26
CABLE-HIV;03-250458-01,75'ESC cable 03-250458-01 METAL
RING SHIELD SUPPORT 1GAP PVD300;15-154732-00,Support Ring(CU),AL2 15-154732-00 METAL
TOOL KIT, C3 ALT,WHEEL BLOCK REMOVAL;04-269057-00 TR,Wheel Block Remova 04-269057-00 TR METAL
ASSY, END EFFECTOR, 11.0",CMPLT, FRCTN, T-B/BLADE-ROBOT;02-357829-01 02-357829-01 METAL
PIN ALUMINA,C3 DIRECT FILL, WAFER LIFT;15-300042-00 15-300042-00 METAL
RING;15-385384-00,INSULATOR,Ceramic,HCM Target,IXT HC 15-385384-00 METAL
16-327424-01,RING, LIFT PIN,SPLIT,LEFT,PVD 300mm 16-327424-01 METAL
CARD-I/O;02-057949-00; SIOC 0&1 02-057949-00 METAL
MOTOR,FAN,115V,FFU,C3WTS ;33-328329-00,C3WTS altus ffu f 33-328329-00 METAL
HEATER-LAMP;61-276646-00 QUARTZ LAMP 61-276646-00 QUARTZ LAMP METAL
GAUGE-CONVECTRON;275821,1/4" VCR FEMALE, 60-10006-00/275821 METAL
IPC;02-307230-00,ALTUS SIOC2 W/WN 02-307230-00 METAL
RF MATCH BOX;27-389171-00 27-389171-00 METAL
DRIVER-BIT;72-354009-00,Philips, SST hex, BIT, MOER SCREW 72-354009-00 METAL
WASHER, QUICK SEAL, 1/8 TUBE ;22-00649-00 T/C SEAL 22-00649-00 T/C SEAL METAL
SCREW;15-250878-00(S),MOER Ring Screw 15-250878-00(S) METAL
CONNECTOR;39-10183-00 39-10183-00 METAL
SCREW;15-112298-00,AL,AR CURTAIN SCREW 15-112298-00 METAL
GROMMET;15-105518-00,ATM robot calibrati, PLUG, ROBOT CALIB, 300MM WTS 15-105518-00 METAL
O-RING;22-255021-00,CARBON,2-386 77967 CMP
PIN-CONNECTOR;15-11243-00,RF pin feedthr, PIN RF DC Power 15-11243-00 METAL
COVER;15-101236-00,adjustment cover, PLUG,INDEX PLATE,ADJUSTMENT 15-101236-00 METAL
PIN;15-272948-00, PIN, SST, IXT, PVD, WAFER LIFT 15-272948-00 METAL
BOLT-PIN;20-132330-00,altus L/L & ped ho 20-132330-00 METAL
SEAL;22-274715-00,1-1/8,W,Surface Mount 22-274715-00 METAL
BALL;22-251236-00 22-251236-00 METAL
CLAMP;60-262560-00,Brooks Fixload 6M, pn 60-262560-00 METAL
FINGER-ROBOT;71-254022-00,Calibration Sp 71-254022-00 METAL
TOOL,CAL,BROOKS PLAT ROBOT /FINGER-ROBOT;15-138414-00,Calibration Pi 15-138414-00 METAL
PIN-ELECTRODE;15-373553-00,RPC RF Pin/PIN, RF CONTACT,8-32X,1375DIA,C3DIREC 15-373553-00 METAL
HOSE;11-307477-02,ASSY,WATER,DOME 11-307477-02 CVD
TUBE-GAS;10-267122-00,KF/VCO,Gas Tube, TUBE ASSY, ADAPTOR, PED TO B/S GAS,C310-267122-00 METAL
VALVE-ASSY;61-288740-00,Pneumatic PNL in 61-288740-00 METAL
WINDOW INDR E/P, ZNSE, C3 Altus;60-138015-00 60-138015-00 METAL
ROBOT;03-252263-00,PCA,VAC, AWC,IXT WTS-HV 03-252263-00 METAL
RG393 CABLE-COAXIAL;38-145153-00,CABLE ASSY, R 38-145153-00 METAL
SHIELD;15-257372-00,LOWER PEDESTAL RING, Guard 15-257372-00 METAL
SHOCK ABSORBER;20-114273-00 20-114273-00 METAL
ASSY-HOLDER;15-281946-00,NEW HOLDER ASSA 15-281946-00 METAL
BLOCK;31-033622-00,PEDESTAL POWER LINE,P 31-033622-00 METAL
GROMMET;15-119800-00,Vacuum robot calibration/ PLUG, CALIBRATION, VAC ROBOT 15-119800-00 METAL
SHIELD;17-157996-00 17-157996-00 METAL
RETAINER;15-251248-00 15-251248-00 METAL
SOCKET SCREW;21-121321-20,10-32,Lift Pin 21-121321-20 METAL
PCB;62-282572-00,SNNX RPC overtemp 62-282572-00 METAL
SENSOR-LIQUID LEAK;38-278999-00 / CABLE, SENSING WATER LEAK, 5FT 38-278999-00 METAL
CONTROLLER-SPEED;60-00162-00,1/4 INCH,10 60-00162-00 METAL
THERMOCOUPLE;34-369927-00,Preclean TC/ TC, MINERAL INSULATED, K-TYPE, DUAL, 34-369927-00 METAL
O-RING;22-10323-00,VITION,BLACK 22-10323-00 METAL
SHIELD;17-260362-00,AL6061,528*97 17-260362-00 METAL
SHIELD;15-118122-00,Ring Insulator,TARGET, PVD300 15-118122-00 METAL
SCREW;21-109049-00;SCRW,SKT,HEX,5/16-18X 21-109049-00 CVD
PIN-HOLDER;16-327424-02,RING, LIFT PIN,SPLIT,RIGHT, PVD300MM 16-327424-02 METAL
SWITCH, OVERTRAVEL, PLUNGER;34-00102-00 34-00102-00 CVD
POWER SUPPLY;27-297727-00,ESC P/S 89 X 4, PH(585)7983140 685-L-CE 27-297727-00 METAL
SHIELD;15-273669-00,Chamber Upper PC300 (RPC), 15-273669-00 METAL
VALVE, SWITCHING, 1/8NPT,INLINT,8575T, CDA ;22-274038-00 22-274038-00 CVD
GAUGE-ION;27-341085-00,353-500, NX RPC, INFICON AG, LI-9496 Balzers 27-341085-00/BPG400 METAL
MFC;22-342513-00,Ar,10sccm,1-1/8" SURFAC, UPC BACKSIDE 22-342513-00/P6A-28032 METAL
FILTER;22-273196-00,NICKEL, STD FL/P2113790 22-273196-00 METAL
O-RING;22-303445-00,VITON,2-009,BLACK,PE 22-303445-00/2-009-UHP METAL
VALVE-3 WAY;22-116895-00,3WAY,N/C,N/C 22-116895-00/45300401 METAL
UPS;27-282383-00, KIN-1000AP RM, AC 100-120V 50/60Hz 15A max 27-282383-00 METAL
CIRCUIT BREAKER;34-158242-00,3POLE AC240/ED43B125 34-158242-00 METAL
VALVE-PILOT;60-344834-00 60-344834-00 CVD
VALVE;22-280163-00,SNNX top plate ALD va 22-280163-00/6LVV-ALD3FR4MR4-P-C METAL
VALVE;22-323741-00,DIAPH,2PORT,NC PNEUMATIC, 1/4 VCR-F 22-323741-00/6LW-ALD6HFR4-P-CS-NV METAL
O-RING;22-263229-00-UA,snnx rpc slit v/v 22-263229-00-UA METAL
VACCUM SWITCH;PV48W-14,VACUM,ATMOSPHERE 60-00193-00/PV48W-14 METAL
LM BLOCK;KSP1-102648,Semes Iris MTR Line KSP1-102648 CLEAN
BOLT;EM0867-131-22C,Cu Plate EM0867-131-22C METAL
CHUCK;1020745,-,CHUCK,3 HOLE ESC,HIGH TE/ULVAC HOT PLATE 1020745/ZE08-9604-0/KH3950H METAL
AMPLIFIER-ETC;0090-02246,LK VD PUSHER TR/E3X-NA 0090-02246 CMP
ASM46AK-N7.2, MOTOR-STEPPING;KSP1-109237,y-axis steppi KSP1-109237 CLEAN
DRL60PA4-05M(PN:SM60PM)/MOTOR-DC;KSP1-101922,Select Nozzle Z-Axi KSP1-101922 CLEAN
VEXTA Stepping MOTOR-STEPPING;KSP1-109242,step motor- i KSP1-109242/PK564AWM CLEAN
CONTROLLER;ASP430F-02-06S ASP430F-02-06S CLEAN
SILENCER;AN200-02,-,-,-,-,- AN200-02 CLEAN
VALVE;AQ340F-06-06 AQ340F-06-06 CLEAN
CONTROL FLOW;AS2052F-07,AS2052F-07,1/4" AS2052F-07 METAL
CONTROLLER-SPEED;JSU4 JSU4 ETCH
Page 9 of 26
PUMP-CHEMICAL;PAF5410-P19-N,.2-.6Mpa / Process Pump PAF5410-P19-N CLEAN
CYLINDER-AIR;D-A73,-,-,-,-,-,-,-,- D-A73 DIFFUSION
CYLINDER;CDQ2B12-5S,OUTPUT DRYER CYCLIND CDQ2B12-5S CMP
CYLINDER-AIR;CDUJB8-20DM,iris chuck open CDUJB8-20DM(CUJOC27) CLEAN
SENSOR-CYLINDER;D-A73L D-A73L DIFFUSION
VALVE-CONTROL;AS2201FM-01-04S AS2201FM-01-04S CLEAN
GAUGE-PRESSURE;ISE30A-C6L-D,digital,vac ISE30A-C6L-D CLEAN
O-RING;V0747 5-381,IPA VESSEL LID O-RING V0747 5-381 CMP
SCREW;10-32X3/4BUTTON HD SST,SCREW 10-32 10-32X3/4BUTTON HD SST CMP
SCREW;10-32X1 BUTTON HD SST,SCREW 10-32X 10-32X1 BUTTON HD SST CMP
INSULATOR;5000132(S),CERAMIC / WASHER, NOZZLE, ULTIMA HDP 5000132(S)/0020-18899 IMPLANT
FITTING;P-U-W4B P-U-W4B CMP
FITTING-TUBE;UT12-12-6N-3,3/4X3/4X3/8 PF UT12-12-6N-3 CMP
FITTING-TUBE;UES1212TN-3,3/4 PFA UNION E UES1212TN-3 CMP
FITTING;FCAP12,3/4 CAP FCAP12 CMP
SENSOR-FLOW;F1BKB6SV,Rebuild kit for E19 F1BKB6SV IMPLANT
11B0677(R),MOTOR-ETC REPAIR AC Servo Motor 11B0677(R) REPAIR
LED TUBE, LIGHTING UNIT YELLOW;5900-0000176,1200mm,120-22 5900-0000176/T8-12-02Y ETCH
LED TUBE, LIGHTING UNIT YELLOW;5900-0000175,600mm,120-220 5900-0000175/T8-06-02Y ETCH
CONNECTOR;5128-3200100 5128-3200100 ETCH
QUARTZ TUBE 8" ;58700015 58700015 METAL
TONER;ML-1710D3/XAA,PRINTER CARTRIDE ML-1710D3/XAA ETCH
VALVE;955AOPLPNCSFSFF2.78,VERIFLOW 955AOPLPNCSFSFF2.78 METAL
VACUUM PARTS;VE43300640,Kit 955 valve re/KIT 955 PCTFE REBUILD VE43300640 ETCH
VACUUM PARTS;VE53310219,Kit 944 valve re/KIT 944 PCTFE REBUILD VE53310219 ETCH
SENSOR-PROXIMITY;871TMM3NN8J2,PC UP SENS 871TMM3NN8J2 CMP
LUBRICANT;064981-03,SUPERLUBE SYNTH. OIL 064981-03 METAL
SENSOR-PHOTO;EE-SX673 EE-SX673 ETCH
FERRULE;SS-600-SET PAK SS-600-SET PAK METAL
TUBE;SS-600-1-6ST,SS-600-1-6ST,FTG TBG C SS-600-1-6ST METAL
CONTROLLER-TEMP;CB100 FK02-V*CP-N1/A/Y, 12C07165 CB100 FK02-V*CP-N1/A/Y 2 ETCH
FILTER;PHD22UNDEH23 PALL SOLVENT PHD22UNDEH23 PALL SOLVENT PHOTO
FILTER;LDFGN1GPK164E51-K7-SS,0.02UM/PALL ULTIKLEEN G2 EXCELLAR LDFGN1GPK164E51-K7-SS CLEAN
FILTER-CHEMICAL;DFA1ANMENP64,CO2 DFA1ANMENP64 CLEAN
CAP;FMP4CAP,Fitting,Flare,Cap,3/4,PFA FMP4CAP/1102869 CMP
PCBB-105989(R),BLUEICE SPIN CHUCK REPAIR, SPM SPIN CHUCK PCBB-105989(R) REPAIR
GUIDE;KMFA-213314 KMFA-213314 PHOTO
SPACER;KMFA-238704 KMFA-238704 CLEAN
PCB;KSP1-123869,DC MOTOR I/O KSP1-123869/FOUP SUB 2.0 CLEAN
MODULE;PEBA-000084 PEBA-000084/AD33-0702-022 CLEAN
CABLE;KMEL-014051,spin servo cable rsc23 KMEL-014051 CLEAN
SHEET;KMFA-004887,4inch,-,-,-,- KMFA-004887 CLEAN
BEARING;KSP1-036495 KSP1-036495 CLEAN
SPACER;KMFA-008125 KMFA-008125 CLEAN
NUT;KMFA-008130 KMFA-008130 CLEAN
BOLT;KMFA-110418 KMFA-110418 CLEAN
POWER SUPPLY;KSP1-128227 KSP1-128227/S82R-6328 CLEAN
NOZZLE-BODY;KMFA-391883 KMFA-391883 CLEAN
TUBE-BACK NOZZLE;KMFA-275949 KMFA-275949 CLEAN
THERMOCOUPLE;KSP1-124221,Thermocouple-IR KSP1-124221 CLEAN
CPU;KSP1-108073,P4, 3.0 ghz cpu KSP1-108073 CLEAN
SCREEN-TOUCH;KMFZ-332486,hepa fan touch/00039-461-520-441/X11-15302 KMFZ-332486 CLEAN
SENSOR-ETC;KMFA-015479 KMFA-015479 CLEAN
THERMOCOUPLE;KSP1-139905, R/B-111205-001 KSP1-139905 CLEAN
CONTROLLER,AC220V,NES-3123-7, KOMATSU NES-3123-7; HEAT EXCHANGER su3000; KSP1-045686 / 20005000/6-39-00597 CLEAN
NSK MEGATORQUE MOTORS/DRIVER-AC SERVO;KSP1-120776,M-EDC-PS3015AB502 KSP1-120776 CLEAN
POWER SUPPLY;KSP1-108075,bps-450r3 KSP1-108075 CLEAN
MFC;KSP1-050464,CO2/N2 100SLPM KSP1-050464/TN2920 CLEAN
VALVE;AMD012-8BUP-4-0-4,KSP1-110459 AMD012-8BUP-4-0-4 CLEAN
VALVE;AMD312-10BUP-8-1-4,KSP1-107658 AMD312-10BUP-8-1-4 CLEAN
VALVE;KSP1-110462, AMD412-20BUP-16-1-4 KSP1-110462 CLEAN
VALVE-AIR;KSP1-110458, AMD312-15BUP-10-0-4 KSP1-110458/AMD312-15BUP-10-0-4 CLEAN
VALVE;KSP1-110460,AMD412-20BUP-16-0-4 KSP1-110460/AMD412-20BUP-16-0-4 CLEAN
VALVE;KSP1-107657, AMD012-8BUP-4-1-4 KSP1-107657/AMD012-8BUP-4-1-4 CLEAN
VALVE-AIR;KSP1-111455,AOV DASDV-07017 KSP1-111455 CLEAN
BOARD-CPU;KSP1-132347,rocky4786ev-rs-r40 KSP1-132347 CLEAN
CONTROLLER-TEMPERATURE;KSP1-045687,GRS-612 KSP1-045687 CLEAN
SENSOR-PRESSURE;KSP1-120682,Digital pres KSP1-120682/E8Y-AR5Y-R CLEAN
FILTER-GAS;KSP1-102310 KSP1-102310/LDFN02F000504E2 CLEAN
FITTING-TUBE;KSP1-019107 KSP1-019107/S-RU6-W2B CLEAN
MOTOR-STEPPING;KSP1-132852,motor-step KSP1-132852/SL5601-82XB43 CLEAN
CYLINDER-AIR;KSP1-037342,air cylinder KSP1-037342/MSQB30AX-A93-X110 CLEAN
VALVE-SOLENOID;KSP1-110326,solenoid valve KSP1-110326/SJ3260-5CZj-C4 CLEAN
REGULATOR-PRESSURE;KSP1-001357 KSP1-001357/INA-13-708 PHOTO
FLOWMETER;KSP1-108387,UCUF-04P MINI,100m KSP1-108387, SFC-200/B CLEAN
Valve PCB Board;KMFZ-332087,Valve PCB (Board) (E03V0 KMFZ-332087 PHOTO
DATA CONVERTER;KSP1-133138,IRIS Mixing DATA CONVERTER KSP1-133138/CMC10ACL1A000 CLEAN
Page 10 of 26
POWER SUPPLY;KSP1-111183,24VDC, VSF300-24 FINE SUNTRONIX KSP1-111183 CLEAN
TRANSDUCER-PRESSURE;26410R1WD11T1E,model : SETRA 264 26410R1WD11T1E CMP
TMP-H3603LMC-A(R),TURBO PUMP(CU) Repaired Non Heated, Non CU TMP-H3603LMC-A1(R) REPAIR
TUBE;TU0425C-20 TU0425C-20 CMP
SEAL-KIT;CQ2B100-PS,FOR CROSS BRAKE CQ2B100-PS CMP
FITTING;KQG2E07-00,BULKHEAD 1/4 TUBE; SS KQG2E07-00 CMP
CYLINDER-AIR;KSP1-103880,Bown up_Down 40 KSP1-103880/CDQSB25-120-CJKC07 CLEAN
RING;02-054573-00(S),MOER RING 2.4MM-14/AL2O3,300MM,CERAMIC 02-054573-00(S) METAL
MOER RING 2.4MM-14L;02-054573-00(U),Notch Covered MOER, 02-054573-00(U) METAL
SCREW;15-268171-00(S),CERAMIC,SCREW 15-268171-00(S) METAL
PIN;15-369012-00(S),S-5313,WN lift 15-369012-00(S) METAL
SPACER;0200-01326(S2),S-3141, Modified e 0200-01326(S2) METAL
1919620R,WAFER HOLDER BALL SCREW REPAIR 1919620R/5D0033-05 REPAIR
PIN;15-281946-00,MOER finger,40390,saphi 15-281946-00 METAL
BLADE;15-250449-00(S),CERAMIC,WTS TM ROB 15-250449-00(S) METAL
0040-48594R,CHUCK-ESC REPAIR/ESC Ultima 300mm 0040-48594R/ESC-263 REPAIR
TAPE-TEFLON;0.25MM X 3/4,k x 3/4,.25mm 0.25MM X 3/4 DIFFUSION
KMFA-074553,SPIN CHUCK-120 KMFA-074553 PHOTO
SCREW;0015-00870S,5/16-18 X 1 MODIFIED S 0015-00870S CLEAN
SENSOR-ETC;KSP1-033124,IRIS WAFER UNSAFE/HL-T1005A/UHLT1005A KSP1-033124 CLEAN
VALVE;KSP1-111282/FCRM-3/4 KSP1-111282 CLEAN
VALVE-3 WAY;VLV-6LVV-A61VD2DP-ASAS,SNNX VLV-6LVV-A61VD2DP-ASAS METAL
R9GEK6113B, 272508 PIPE FITTING;6LVV-DPVR4-P-C,FITTING 6LVV-DPVR4-P-C METAL
VALVE;6LVV-A61VD2DP-ASAS-NV,22-323737-00 6LVV-A61VD2DP-ASAS-NV/986447 METAL
CONNECTOR-SENSOR;MS-CS-BALF-1,-,ALD v/v MS-CS-BALF-1 METAL
VALVE-AIR;6LV-DFMR8-P-C,(N/C) 6LV-DFMR8-P-C/434995 METAL
VALVE;6LVV-ALD6HRF4-P-CS-NV,ALD VALVE 6LVV-ALD6HRF4-P-CS-NV METAL
TUBE CONNECTOR;SS-QC4-B1-400 SS-QC4-B1-400 METAL
UNION-TUBE;SS-400-6,1/4" SS-400-6 ETCH
ELBOW;SS-8-VCR-9,SS-8-VCR-9,VCR,UNION,EL SS-8-VCR-9 ETCH
TUBE FERRULE;SS-400-NFSET SS-400-NFSET ETCH
FITTING-HOSE;SS-500-7-8RG,5/16 to 3/4 SS-500-7-8RG METAL
CONNECTOR-HD;SS-2-A-2RT,Adapter SS-2-A-2RT ETCH
CONNECTOR;SS-810-7-4,1/2 TUBE X 1/4 FNPT SS-810-7-4 CMP
VALVE-DIAPHRAGM;6LVV-ALD3FR4-P-CS,SNNX W 6LVV-ALD3FR4-P-CS METAL
FITTING, FLANGED 32046-QAZV 028-014948-1
DIODE;226S,DIODE LA4DC3U 23317 CMP
STP-F2203C(R),TURBO PUMP (CU) REPAIR STP-F2203C®/PT50-OZ-006 REPAIR
TURBOMOLECULAR PUMP CONTROLLER UNIT ;SCU-1500R,TURBO REPAIR SCU-1500R REPAIR
PLATE-HOT;CT50Z7-684666-11, CGHL(30L) CT50Z7-684666-11 / OEE-T13327-1 PHOTO
O-RING DU353TEP10;2127-000003-11 DS2127-000003-11 DIFFUSION
O-RING..ER-SERIES-ID461-B-R1;3S27-000008-11 3S27-000008-11 DIFFUSION
PIPE;DS2110-463342-11,ORV-8PS-40 DS2110-463342-11 DIFFUSION
MAGNETRON;3S38-000099-12,MAGNETRON..YJ16 MB3S38-000099-12 DIFFUSION
QUARTZ WINDOW;3S10-400080-14 MB3S10-400080-14 DIFFUSION
GAP(CUP) ASSY, JIG;5085-432827-13,Lihitus Dev GAP(Cup)A CT5085-432827-13 PHOTO
CUP INNER, BOWL;CT5004-200008-12,Lithius PR Inner B CT5004-200008-12 PHOTO
BOWL;CT5004-200010-12,Lithius PR Upper B CT5004-200010-12 PHOTO
LITHIUS CONTROLLER;5080-004745-12 CT5080-004745-12, UA037/052A PHOTO
FINGER;5085-404901-11,PRA,SUS,300mm,LITH 5085-404901-11 PHOTO
DUCT(SR-EXH) ASSY;5085-425235-11 CT5085-425235-11/OEE-T07715-1 PHOTO
PCB Controller BAMA01263,BOARD-PCB;CT5014-000749-11 CT5014-000749-11 PHOTO
NOZZLE;CT5085-413053-13,LITHIUS DEV NLD CT5085-413053-13 PHOTO
PLATE-HOT;CT5085-431396-13 CT5085-431396-13 PHOTO
5013-000040-12,PLATE COOLING RCP-3021 5013-000040-12 PHOTO
PLATE;CT-5085-431935-12,Plate Assy CT-5085-431935-12 PHOTO
PCB;CT5044-000239-11,PCB-I/O..TOB1106 MPC-T0070A-14 CT5044-000239-11 PHOTO
PCB;CT5014-002192-11 PCB CPU AG-0160 CT5014-002192-11 PHOTO
BOARD-I/O;SR2986-487758-11 BOARD, PRB PANEL #01 SR2986-487758-11 PHOTO
PUMP;CT5011-000004R12,pump..HPT-106-2(TUBEPHRAGM PUMP) CT5011-000004R12 PHOTO
FLOWMETER;CT5024-000663-11/UCUF-04B/ZTD-200M CT5024-000663-11 PHOTO
CONTROLLER-TEMP;CT5014-001192-12/REX-B875-CS1APF CT5014-001192-12 PHOTO
BELT;5080-193016-11,LITHIUS IRA X BELT 5080-193016-11/XY-P5216 PHOTO
GUIDE;2904-490036-11,ceramic,bake wafer 2904-490036-11 PHOTO
GASKET;028-017064-1,gasket ujr-6.35-rg-0 028-017064-1/A-MBBC-000 DIFFUSION
O-RING;DS027-001383-1 DS027-001383-1 DIFFUSION
GUIDE-MAIN;CT5010-402349-11,WAFER GUIDE CT5010-402349-11 PHOTO
PLATE;5010-204485-11 5010-204485-11 PHOTO
FUSE;MB045-000623-1,LM03 MB045-000623-1 ETCH
FUSE;ES045-001153-1 ES045-001153-1 ETCH
NOZZLE-ASSY;CT5085-434535-11 CT5085-434535-11 PHOTO
CABLE;2986-409866-11 2986-409866-11 PHOTO
PIN;020-000090-1,SUS,SCREW CAP.M620 SUS3 020-000090-1 ETCH
O-RING;DS027-003928-1,VITON, P80-4D BLK DS027-003928-1 DIFFUSION
O-RING;DS027-003929-1,VITON, G125-4D BLK DS027-003929-1 DIFFUSION
O-RING;DS027-006768-1,TEL_SIN_NW25_ORING DS027-006768-1/DU353FAE01 DIFFUSION
WASHER;2L10-452422-11 2L10-452422-11 ETCH
LINEAR GUIDE;5018-000026-11 5018-000026-11 PHOTO
O-RING;DS027-007020-1,O-RING..DU353FPE 0 DS027-007020-1/DU353FPE01 DIFFUSION
SCREW M5-L7-D9;3S10-453344-11 3S10-453344-11 DIFFUSION
VALVE;2112-000042-11, VALVE CHECK..IC8-1/3-VUA-48 DS2112-000042-11/44-02066-01 DIFFUSION
Page 11 of 26
VALVE SOL;012-012580-1,Sol.Valve,CKD N3E0660 012-012580-1 / N3E0660-C4-MU-3 PHOTO
VALVE;DS012-008679-1,,FPR-71RS1-2-9.52-P DS012-008679-1 DIFFUSION
ADJUSTER;5085-447314-11 5085-447314-11 PHOTO
TUBE NUT;CT5010-419175-11 CT5010-419175-11 PHOTO
TUBE;CT5011-000014-11 CT5011-000014-11 PHOTO
WINDOW;2L10-350757-11,WINDOW(Y1-E),SHIEL 2L10-350757-11 ETCH
REGULATOR-AIR;5024-000327-11 CT5024-000327-11/PMM20-8BUR-G-TC PHOTO
VALVE VAC, VEC-VF8-X0001, TUBE-VACUUM;2112-000119-11-X0001 DS2112-000119-11/VEC-VF8-X0001 DIFFUSION
O-RING;027-006766-1,O-RING..DU353FAE01-1 027-006766-1/DU353FAE01 DIFFUSION
O-RING;DS027-006767-1,O-RING..DU353FAE01 DS027-006767-1/DU353FAE01 DIFFUSION
O-RING;DS027-007021-1,O-RING..DU353FPE01 DS027-007021-1/DU353FPE01 DIFFUSION
O-RING;DS027-007022-1,O-RING..DU353FPE01 DS027-007022-1/DU353FPE01 DIFFUSION
VALVE;012-010154-1,FBSDAL-RS20-6.35UGF-2 DS012-010154-1/C16L-P DIFFUSION
LOCK-OUT GATE VALVE;3S80-000764-11 / PLATE, GV XRZ BONDED 5641A1827 3S80-000764-11/5641A1827SSXRZ DIFFUSION
MOTOR SERVO IRAI T # NP8241R714-0 ; FHA-25C-50-E250-SP 5080-105095-11 PHOTO
DRIVER-MOTOR;5080-105100-11 5080-105100-11/HA-655-2-200 PHOTO
CONTROLLER-TEMPERATURE, RCC-300;CT5013-000003-12 CT5013-000003-12/RCC-300 PHOTO
MOTOR-SERVO;5080-192472-12/M-SSB020FN502 5080-192472-12 PHOTO
MOTOR-SERVO IRAI Z NP8241R723-0 ;CT5080-105094-11 CT5080-105094-11 PHOTO
MOTOR-SERVO IRAI X1 NP8241R706-0 ;CT5080-105091-11 CT5080-105091-11/MQMA012S2Q PHOTO
MOTOR-SERVO IRAI Y # NP8241R733-0;CT5080-105093-11 CT5080-105093-11/MSMA082S2N PHOTO
5080-193831-11/W0298 MOTOR SERVO CRA X #01 NP8174R705-1/PANASONIC MQ 5080-193831-11 PHOTO
MOTOR-SERVO IRAI X2 BP8241R707-0 PANASONIC MQMA012S2Q 5080-105092-11 PHOTO
FITTING-AIR;CT028-000044-1 CT028-000044-1/MS-5HLH-4 PHOTO
AMPLIFIER SENSOR FX-305, CT036-008338-1,FX305,HMDS flo CT036-008338-1 PHOTO
POWER SUPPLY;039-003956-1,24V,HWS300-24 DS039-003956-1/HWS300-24 DIFFUSION
LINEAR GUIDE SHS15V1UUC1FEM+545LF;5018-000001-13,LITHIUS,PRA 5018-000001-13 PHOTO
CONVERTER;CT5024-000037-11,Converter, SFC-M CT5024-000037-11 / SFC-M PHOTO
VAT VALVE-GATE;65046-PH52-AHS1 65046-PH52-AHS1/266, MB3M12-012830-11 DIFFUSION
DRIVER-MOTOR IRAI Z #01 NP8241R303-0 ;5080-105099-11 5080-105099-11/SERVOPACK Model : SGDM-10ADAY751 PHOTO
MOTOR-SERVO SGMCS-08DDA-TE14 ;CT5040-000049-11 CT5040-000049-11/SGMCS-08DDA-TE14 PHOTO
MOTOR-ASSY;5085-407862-61/SGMCS-08DDA-TE14 5040-000049-11 PHOTO
CONNECTOR;PSG 3-2 PSG 3-2 / U0092-00 CMP
BEARING;CRBC5013UUT1P5,CROSS ROLLER BEAR CRBC5013UUT1P5 CMP
BEARING-BALL;SSRI-539QQ4EEKEA5P25LYXXXP, SSRI-539QQ4EEKEA5P25LYXXXP CMP
BEARING;06513 Z 10000,Idler Ceramic Bear 06513 Z 10000/6001 SIC FC CMP
BEARING;CARTRIDGE BEARING SSR4ZZA7 CARTRIDGE BEARING SSR4ZZA7 IMPLANT
TUBE-EXHAUST;LDP5WC/125P-16,SW PRESS DIFF LDP5WC/125P-16, 1350-00412 CMP
1040495R, ENTRON-EX PBN ESC CHUCK REPAIR 1040495R REPAIR
VALQUA O-RING;UA4640 AS275,UA,734-046356-275 UA4640 AS275/AS568-275 ETCH
O-RING;F-TR AS342,Flouritz,2-342 F-TR AS342/AS568-342 ETCH
O-RING;UA-FAS373,LLM to PM Door UA-FAS373/AS568-373 ETCH
HARNESS;E16147982,W6007R, Scan/Rotate/Tw E16147982/E16147983 IMPLANT
BOARD-PCB;E15006750/ INTERFACE ADIO I/O E15006750 IMPLANT
CONTROLLER;E11320302,SOURCE SUPP. PS CONTROLLER W/PGF E11320302 IMPLANT
WASHER-LOCK;E48000008, SS#4 SPILT LOCK E48000008 IMPLANT
SCREW;E47000449 E47000449 IMPLANT
MAGNET;E17042300,20*50*5,COBALT E17042300 IMPLANT
WASHER;E40000057,Dogbone Wavy E40000057 IMPLANT
MOUNT;E51000197,PLUG BANANA UNISUL, SAGER ELECTRONICS E51000197 IMPLANT
SNAP RING;E43000272,V810 manipulator sha E43000272 IMPLANT
FEEDTHRROUGH 30KV,D2 ASSY ;E17277900 E17277900 COMMON
FEEDTHRROUGH;E17058160 E17058160 IMPLANT
BEARING;E42000293 OG BUSHING E42000293 OG BUSHING IMPLANT
ELECTRODE;E17385700,BOTTOM,W,90*15 E17385700 IMPLANT
ELECTRODE;E17389880,Source electrode lin E17389880 IMPLANT
1/4" REGULATOR;E30000146, AIR 0-60PS E30000146/14R111FC IMPLANT
0520-00131R, VAT MOTOR, DPS 0520-00131R, 314453/92, 982854/1 REPAIR
ADAPTER Flange;12148-PA44-XXX1,ISO250 to ISO320 12148-PA44-XXX1 / 5065375215 / 509321 IMPLANT
0340X-CA24(R),SLIT VALVE REPAIR / PN:308392 0190-22280/0340X-CA24® REPAIR
GAUGE;211965 ACTUATOR,Overhaul Kit 211965 ACTUATOR METAL
(R)PENDULUM VALVE; 63-336650-01 63-336650-01 REPAIR
VALVE-GATE;60-290433-00,2.5",pneumatic/14036-PE24-ARV1/0161 60-290433-00 METAL
WAFER;0326783,ACS12-0.155D-16K-25, GSS O/LCS12-5S-0.204-3.040-5K-25 0326783-000 METROLOGY
5TOT013677(S),THERMOCOUPLE SWAP 5TOT013677(S) REPAIR
200000476R,19" LCD ACCUSYNC MON. REPAIR 200000476R/LCD 1970NX-BK-1(U) REPAIR
0190-24787R,WATLOW D88 CONTROLLER REPAIR 0190-24787R/D881-AB01-1000 REPAIR
FITTING;AF201-01-B,1/8NPTX1/4 GRIPPER-AI AF201-01-B CMP
PUMP;RBPL60-4,REBUILD KIT DUAL SLAVE W/CHKS RBPL60-4 CLEAN
SPRING;15-054800-00(U),CERAMIC 15-054800-00(U) METAL
BEARING 9" Duplex HYBRID CERAMIC ;100-0029-01 100-0029-01 METAL
BEARING COVER;001-0669-01/MACHINED HUB CAB XP 001-0669-01 METAL
BEARING;100-0025-01/BEARING 4.25" HYBRID CERAMIC 100-0025-01 METAL
AC SERVO MOTOR, LIFTER SYSTEM;0190-33877,Lift assy, Load 0190-33877 / SGMM-A2C3Y CVD
XU-RC250S-D00(R), LOAD ROBOT REPAIR XU-RC250S-D00(R) / 4K 152-627-2 REPAIR
BUTTON HEAD CAP SCREW;0015-01136(S),1/4- 0015-01136(S) METAL
PIN;1104083.1(S),PPS,Post 3 1104083.1(S) CLEAN
PIN;713-037069-003(U1),ZrO2,CONF. 713-037069-003(U1) ETCH
PCB;PCB_20070313_NPN PCB_20070313_NPN EDS
CHUCK;2316199300,cover screw E-chuck 2316199300 CVD
PUSHER;0021-27285(S),LK DRYER 0021-27285(S) CMP
Page 12 of 26
ELECTRODE OUTER-014(TALON);716-082039-002(DS) 716-082039-002(DS) ETCH
PLATE;E17386490(S),TUNGSTEN, SUPPRESSION ELECTODE BASE E17386490(S) IMPLANT
INSERT;E17385690(S),SUPPRESSION ELECTROD LE E17385690(S) IMPLANT
INSERT;E17385700(S),SUPPRESSION ELECTROD LE E17385700(S) IMPLANT
WINDOW;60-138015-00(S),SAPPHIRE 60-138015-00(S) METAL
GAUGE;E8Y-A2Y-R E8Y-A2Y-R CLEAN
MONITOR;P15BX-AB-459G,G Vision Monitor,M P15BX-AB-459G ETCH
HOLDER-SP;MOER Finger Axel Clips MOER Finger Axel Clips METAL
O-RING;3700-01376,VITON,3.359,8",BLACK,E 3700-01376 CLEAN
O-RING;2542015,VITON .551 ID 2542015 IMPLANT
SCREW;001-06670-302 SCREW 001-06670-302 SCREW CMP
O-RING;P008 V75,O-RING, VITON P008 V75 DIFFUSION
O-RING;F-TR AS232,Flouritz,2-232 F-TR AS232 ETCH
INSULATOR;5000132,CERAMIC 5000132 IMPLANT
CONTROLLER;730-200000110,IR Drying Syste 730-200000110/BF 9250.01/001 CLEAN
VALVE;931191-2001,HDP ISO, conflat flang 931191-2001 METAL

WINDOW Small ViewPort ;001-05553-303,Cover, Clear lid wi 001-05553-303 CVD
GREASE;L65,50G TUBE,DEMNUM GREASE 071-00 L65 DIFFUSION
O-RING;3700-01622,VITON,22,0.8,21.5,BLAC 3700-01622 CLEAN
SENSOR-TEMP;000500 500 METAL
SENSOR-TEMP;087469 87469 METAL
INSULATOR;100064811(S),CERAMIC 100064811(S) METAL
RING;726-062331-875,Ring, Integral, .875 726-062331-875 ETCH
JIG;000-06641-301,Centering Laser Fixtur 000-06641-301 CMP
Page 13 of 26
Supplier's Name Unit Lot
3M 1 D-3-3
ACECO PRECISION SEMICON COMPONENTS 4 B-1-1&5-3
ADVANCED ENERGY INDUSTRIES 1 E-5-1
ADVANCED ENERGY INDUSTRIES 2 G-2 &G-3
ADVANCED ENERGY INDUSTRIES 2 G-2 &G-3
Advanced Good Resource, Inc/뉴엠텍 8 I-6
AERA 2 D-4-2
AKRION,INC. 18 E-3-1
Allied Electronics, Inc. 10
Allied Electronics, Inc. 8 E-3-1
Allied Electronics, Inc. 39 C-2-2
Allied Electronics, Inc. 10 C-2-2
Allied Electronics, Inc./BOURNS 30
Allied Electronics, Inc./OMRON 2 E-2-2
Allied Electronics, Inc./PANASONIC 2 E-2-3
Allied Electronics, Inc./PHOENIX CONTACT 50 E-2-3
Allied Electronics, Inc./SMC 10
Allied Electronics, Inc./SMC 1 C-1-2
Allied Electronics, Inc./SMC 1 B-1-1
Allied Electronics, Inc./VISHAY SPCECTOL SFEFN 38
alve & Fitting/FURON 1 C-1-1
AMAT 1 D-5-2
And Services Inc. 1 E-3-1
Andon Specialties Inc./ENTEGRIS 1 E-2-2
Andon Specialties Inc./Mykrolis 13 A-5-2
aphy Inc/ASML 1 E-4-2
aphy Inc/SUN 1 H-1
APPLIED MATERIALS, INC. 3 A-1-3
APPLIED MATERIALS, INC. 1 I-5
APPLIED MATERIALS, INC. 3 H-3
APPLIED MATERIALS, INC. 1 F-1
APPLIED MATERIALS, INC. 1 C-5-1
Page 14 of 26
APPLIED MATERIALS, INC. 3 J-6
APPLIED MATERIALS, INC. 1 D-3-2
APPLIED MATERIALS, INC. 2 D-3-1
APPLIED MATERIALS, INC. 4 E-3-2
APPLIED MATERIALS, INC. 150
APPLIED MATERIALS, INC. 1 B-5-1
APPLIED MATERIALS, INC. 6 B-5-1
Page 15 of 26
APPLIED MATERIALS, INC. 3 J-1
APPLIED MATERIALS, INC. 3 A-6
APPLIED MATERIALS, INC. 1 A-6
APPLIED MATERIALS, INC./ALLEN BRADLEY 3 B-5-1
APPLIED MATERIALS, INC./Celerity 1 C-1-2
APPLIED MATERIALS, INC./Entegris 2 A-1-2
APPLIED MATERIALS, INC./FUJIKIN 2 C-1-3
APPLIED MATERIALS, INC./FUJIKIN 1 B-5-1
APPLIED MATERIALS, INC./FUJIKIN 1 C-1-3
APPLIED MATERIALS, INC./IBM 2 H-3
APPLIED MATERIALS, INC./KAWASAKI 4 A-2-2
APPLIED MATERIALS, INC./KAWASAKI 2 F-5
APPLIED MATERIALS, INC./KAWASAKI 1 F-1
APPLIED MATERIALS, INC./KAWASAKI 1 E-2-1
APPLIED MATERIALS, INC./MKS 1 E-4-2
APPLIED MATERIALS, INC./NIPPON SEISEN 2 E-5-1
APPLIED MATERIALS, INC./OMRON 1 C-1-3
APPLIED MATERIALS, INC./OMRON 1 C-5-2
APPLIED MATERIALS, INC./PARKER 5 C-5-3
APPLIED MATERIALS, INC./PISCO 10 E-2-2
APPLIED MATERIALS, INC./SANYO DENKI 1 E-2-3
APPLIED MATERIALS, INC./SETRA 1 C-5-2
APPLIED MATERIALS, INC./SMC 2 E-2-3
APPLIED MATERIALS, INC./THK 1 A-1-2
APPLIED MATERIALS, INC./THK 4 E-3-1
APPLIED MATERIALS, INC./TURCK 2 E-4-3
APPLIED MATERIALS, INC./TURCK 2 E-5-1
APPLIED MATERIALS, INC./VAT 1 C-3-2
APPLIED MATERIALS, INC./VAT 3 C-5-3
APPLIED MATERIALS, INC./WATLOW 2 A-1-1
APPLIED MATERIALS, INC./YASKAWA 1 A-1-2
ASM LITHOGRAPHY INC 1 I-3
ASM LITHOGRAPHY INC 3 E-4-2
ASM LITHOGRAPHY INC 1 C-1-1
ASM LITHOGRAPHY INC 1 J-2
ASM LITHOGRAPHY INC/SEAGATE 2 E-4-1
Austin Orbital, LLC 3
Austin Orbital, LLC 2 C-3-3
AUSTIN SEAL COMPANY 1 C-3-2
AUSTIN SEAL COMPANY 6
AUSTIN SEAL COMPANY 12 E-5-1
Page 16 of 26
AUSTIN SEAL COMPANY/KALREZ 3 E-3-2
AXCELIS TECHNOLOGIES INC 4 E-3-1
AXCELIS TECHNOLOGIES INC 1
AXCELIS TECHNOLOGIES INC 1 C-1-1
AXCELIS TECHNOLOGIES INC/RAVE Computer Ass 1 F-1
AXCELIS TECHNOLOGIES INC/WASCO 2 C-2-2
Banner Industries 2 C-1-3
Banner Industries/FUJIKIN 4 C-1-3
Banner Industries/FUJIKIN 2 C-1-3
Banner Industries/FUJIKIN 3 A-5-1
Banner Industries/Mott Corp 2 C-1-3
BAY ADVANCED TECHNOLOGIES LLC 5 E-3-1
BAY ADVANCED TECHNOLOGIES LLC 5 E-3-1
BAY ADVANCED TECHNOLOGIES LLC/KOGANEI 3 E-4-1
BIRD ELECTRONIC CORPORATION 1 E-1-2
BIRD ELECTRONIC CORPORATION 4 C-2-2
BRANDT PRECISION MACHINING, INC. 4 E-2-3
BROOKS AUTOMATION 3 G-2 & G-3
BROOKS AUTOMATION 1 D-5-2
BROOKS AUTOMATION 1 D-4-2
BROOKS AUTOMATION 8 E-3-1
BROOKS AUTOMATION 7 E-2-3
BROOKS AUTOMATION 2 G-1
BROOKS AUTOMATION/OMRON 1 E-4-2
Brooks Instrument 1 D-3-1
Brooks Instrument 2 E-4-1
Brooks Instrument 1 B-5-1
Brooks Instrument 1 B-5-1
BTVY Engineered semiconductor 12 C-1-3
BTVY Engineered semiconductor 12 C-1-3
Page 17 of 26
CKD 2 C-2-2
CKD CORPORATION 3 A-1-1
CKD USA CORPORATION 1 A-1-3
CKD USA CORPORATION 2 C-5-3
CKD USA CORPORATION 2 D-2-3
CKD USA CORPORATION 2 D-2-1
CKD/ACECO PRECISION SEMICON COMPONEN 1 I-1
conductor Equip. As 16 C-2-3
conductor Equip. As 6
COORSTEK 1 I-4
CROSSING AUTOMATION 4 C-1-1
CTI-CRYOGENICS 1 D-2-3
CyberOptics Semiconductor 1 J-5
d System Technologi 1
d System Technologi/Swagelok 2 B-3-1
d System Technologi/SWAGELOK 1 E-4-1
d System Technologi/SWAGELOK 2 E-4-1
d System Technologi/SWAGELOK 3 C-2-2
Donaldson Company, Inc. 3 I-3
dustrial Supply 1 E-2-3
DYNAMIC MICRO SYSTEMS 2
ECI TECHNOLOGY 5 E-4-3
EKK Eagle Semicon Components Inc. 1 E-1-3
EKK Eagle Semicon Components Inc. 1 F-5
ENGINEERED SEMICONDUCTOR PRODUCTS 11 A-2-3
ENGINEERED SEMICONDUCTOR PRODUCTS 1 H-3
ENGINEERED SEMICONDUCTOR PRODUCTS 8 H-2
ENGINEERED SEMICONDUCTOR PRODUCTS 7 C-3-1
ENGINEERED SEMICONDUCTOR PRODUCTS 3 B-3-1
ENGINEERED SEMICONDUCTOR PRODUCTS 6 E-1-3
ENGINEERED SEMICONDUCTOR PRODUCTS 1 I-2
ENGINEERED SEMICONDUCTOR PRODUCTS/Mak 5 B-4-1
ENTEGRIS INC. 4 C-3-2
ENTEGRIS INC. 8 E-5-1
ENTEGRIS INC. 2 C-1-2
ENTEGRIS INC. 4 B-1-1
ENTEGRIS INC. 4 D-2-2
ENTEGRIS INC. 1 I-4
ENTEGRIS INC. / Mykrolis 2 B-1-2
ENTEGRIS INC./Mykrolis 8 A-3-2&3-3&4-3
ENTEGRIS INC./mykrolis 7A-4-3&4-1&4-2&5-1
erials 1 I-3
erials 1 E-3-1
erials 12 E-4-3
erials 9 C-5-2
ERIALS, INC. 1 D-4-3
Fastenal 3 E-2-2
Fastenal 3
Fastenal 3
FEI COMPANY 2 E-2-3
FEI COMPANY 4 B-5-1
FEI COMPANY/VDL ENABLING TECHNOLOGIES 1 E-2-3
FESTO CORPORATION 3 E-4-3
FILTER SOURCE, INC./PALL 4 E-4-3
Fisher Scientific/FOAMTEC International 1 E-5-1
Foss Industries Inc. 1 I-1
Foss Industries Inc./AXCELIS 1 E-4-1
Foss Industries Inc./Axcelis 1 C-1-2
FSI CORPORATION 1 D-2-3
FSI CORPORATION 1 E-2-1
FSI CORPORATION 2
Page 18 of 26
FSI CORPORATION 2
FSI CORPORATION 2 B-5-1
FSI CORPORATION 1 C-1-2
FSI CORPORATION 3 C-2-2
FSI CORPORATION 3 A-5-1
FSI CORPORATION 1 A-6
FSI CORPORATION/3M 2 E-5-1
FSI CORPORATION/AEG 2 E-5-1
FSI CORPORATION/ENTEGRIS 1 E-2-2
FSI CORPORATION/Entegris 1 C-1-2
FSI CORPORATION/Entegris 2 B-5-1
FSI CORPORATION/Entegris 3 D-2-3
FSI CORPORATION/ENTEGRIS 3 A-5-1
FSI CORPORATION/FURON 3 E-2-1
FSI CORPORATION/FURON 6 A-5-1
FSI CORPORATION/FURON 6 A-5-1
FSI CORPORATION/NORGREN 1 E-2-1
FSI CORPORATION/NORGREN 2 D-1-3
FSI CORPORATION/SAINT GOBAIN 6 E-2-2
FSI CORPORATION/TREBOR 1 E-4-2
Grainger Industrial Supply 1
Grainger Industrial Supply 15 E-2-3
GREENE TWEED 173
GREENE TWEED & CO. INC 1 E-3-2
GREENE TWEED & CO. INC 3 C-1-1
GREENE TWEED & CO. INC 8 C-2-1
h 88
h 10
h 4 C-1-1
h 3 C-5-3
HITACHI HIGH TECHNOLOGIES AMERICA, 1 E-4-3
hnologies Inc 1 E-4-2
hnologies Inc 1 C-1-1
Horiba Stec Inc. 2 C-4-1
Horiba Stec Inc. 1 B-3-3
Horiba Stec Inc. 1 B-3-3
HYUNAM 4 B-4-3
HYUNAM 3 B-4-3
iconductor Equipmen/KOKUSAI 2 J-5
iconductor Equipmen/KOKUSAI 1 C-1-3
IMK / Samsung C&T America, INC. 8 A-2-3
IMK / Samsung C&T America, INC. 2 E-4-2
IMK / Samsung C&T America, INC. 200
Page 19 of 26
IMK / Samsung C&T America, INC. 5 C-2-2
IMK / Samsung C&T America, INC. 14 B-5-1
IMK / Samsung C&T America, INC. 1 D-1-2
IMK / Samsung C&T America, INC./Brooks 1 C-4-1
IMK / Samsung C&T America, INC./brooks 1 C-1-1
IMK / Samsung C&T America, INC./COMPACT 5 E-1-3
IMK / Samsung C&T America, INC./FESTO 27 E-4-2
IMK / Samsung C&T America, INC./Fujitsu 2 E-2-1
IMK / Samsung C&T America, INC./HEATEFLEX 1 B-4-2
IMK / Samsung C&T America, INC./Moeller 4 E-1-2
IMK / Samsung C&T America, INC./NEWARK 4 E-4-1
IMK / Samsung C&T America, INC./SMC 5 E-4-2
IMK / Samsung C&T America, INC./Swagelok 1 E-2-3
IMK / Samsung C&T America, INC./VARIAN 2 B-3-3
Inc. 1 H-4
Inc. 21 E-3-1
Inc. 1 C-1-1
Inficon Inc 3 E-2-2
Inficon Inc 1 D-5-3
Inficon Inc 3 C-1-1
Inficon Inc/PHOTONIS 1 E-4-1
INGERSOLL RAND COMPANY/TOHNICHI 4 C-1-3
INOCERA INC. 24 E-2-3
ITAC SYSTEMS 1 C-4-1
IWAKI/TEXAS PROCESS EQUIPMENT COMPANY 3 J-4
JET INTERNATIONAL,USA LTD. 1 A-2-1
JET INTERNATIONAL,USA LTD. 5 C-3-3
JET INTERNATIONAL,USA LTD. 3
JET INTERNATIONAL,USA LTD. 19 E-4-3
JET INTERNATIONAL,USA LTD. 3 E-6
JET INTERNATIONAL,USA LTD./YAMATAKE 2 E-2-2
KLA-TENCOR CORPORATION 1
KLA-TENCOR CORPORATION 2 C-5-2
KLA-TENCOR CORPORATION 1 F-5
KLA-TENCOR CORPORATION/OSRAM 1 B-3-2
KLA-TENCOR CORPORATION/VLSI STANDARDS 1 B-6
KOKUSAI SEMICONDUCTOR E CORPORATION 2
KOKUSAI SEMICONDUCTOR E CORPORATION 6 C-5-1
KOKUSAI SEMICONDUCTOR E CORPORATION 2 E-2-1
Page 20 of 26
KOKUSAI SEMICONDUCTOR E CORPORATION/ 1 E-6
KOKUSAI SEMICONDUCTOR E CORPORATION/ 2 E-2-1
KOKUSAI SEMICONDUCTOR E CORPORATION/ 1 E-2-1
KOMATSU 1 C-3-3
Komico 1 C-1-3
KOMICO TECHNOLOGY,INC/TEL 1 G-3
KUMKANG QUARTZ 21 G-1 & G-2
LAM 20 E-4-3
LAM RESEARCH CORPORATION 1 C-3-1
LAM RESEARCH CORPORATION 3 E-3-1
LAM RESEARCH CORPORATION 5
LAM/(IMK-Imarket Korea) 25 E-2-3
LAM/KOMICO TECHNOLOGY,INC 1 H-2
LS 1 I-4
MATTSON TECHNOLOGY INC. DEPT.890581 32 E-3-1
MATTSON TECHNOLOGY INC. DEPT.890581 20 C-1-1
MATTSON TECHNOLOGY INC. DEPT.890581 1 C-1-3
Meller Optics, Inc.
Metron 4 C-1-1
MICROFLEX TECHNOLOGIES LLC 16 E-3-1
MICROFLEX TECHNOLOGIES LLC 10 E-3-1
MIURA 2 C-5-1
MKS INSTRUMENTS 1 C-4-2
MKS INSTRUMENTS INC 1 J-5
MKS INSTRUMENTS INC 1 B-3-2
MKS INSTRUMENTS INC 1 D-4-1
MKS INSTRUMENTS INC 1 E-3-3
MKS INSTRUMENTS INC 1 F-1
MKS INSTRUMENTS INC 1 J-5
MKS/Foss Industries Inc. 2 D-2-2
Motion Industries Inc 1 E-2-2
Motion Industries Inc 6 E-2-3
MOUSER ELECTRONICS 5 E-2-3
MOUSER ELECTRONICS 4 E-2-2
MUTO Technology Inc. 1 D-4-2
Nanometrics Inc. 1 B-3-3
NET MERCURY/AERA 2 C-4-1
NET MERCURY/AERA 3 C-4-1
NIPPON PILLAR 8 E-5-1
NOVA/Direct Repair Labs 1 I-2
NOVELLUS 4 F-3
Novellus
NOVELLUS SYSTEMS 1 I-2
NOVELLUS SYSTEMS 1 A-2-1
NOVELLUS SYSTEMS 3 D-5-2
Page 21 of 26
NOVELLUS SYSTEMS 1 H-5
NOVELLUS SYSTEMS 1
NOVELLUS SYSTEMS 2
NOVELLUS SYSTEMS 23
NOVELLUS SYSTEMS 4 E-3-1
NOVELLUS SYSTEMS 2
NOVELLUS SYSTEMS 25
NOVELLUS SYSTEMS 1
NOVELLUS SYSTEMS 1 B-5-1
NOVELLUS SYSTEMS 1 C-1-1
NOVELLUS SYSTEMS 2 C-6
NOVELLUS SYSTEMS 2
NOVELLUS SYSTEMS 23
NOVELLUS SYSTEMS 2
NOVELLUS SYSTEMS 6
NOVELLUS SYSTEMS/ TREK INC 2 G-4
NOVELLUS SYSTEMS/APPLIED CERAMICS INC 6 H-5
NOVELLUS SYSTEMS/Clippard 5 B-5-1
NOVELLUS SYSTEMS/INFICON 1 E-4-1
NOVELLUS SYSTEMS/MKS 1 E-4-2
NOVELLUS SYSTEMS/PALL 10 D-3-2
NOVELLUS SYSTEMS/PARKER 7
NOVELLUS SYSTEMS/PARKER 2 E-2-2
NOVELLUS SYSTEMS/POWERCOM 2 G-4
NOVELLUS SYSTEMS/SIEMEMS 2 D-3-1
NOVELLUS SYSTEMS/SMC 6 B-5-1
NOVELLUS SYSTEMS/Swagelok 3 E-5-1
NOVELLUS SYSTEMS/SWAGELOK 16 D-1-3
NOVELLUS SYSTEMS/VALQUA 2 E-3-2
NOVELLUS/UE 2 B-5-1
NSK 2 C-2-2
ologies Inc. 2 C-2-2
ologies Inc./ULVAC 1 E-4-2
OMRON 1 C-5-3
ORIENTAL MOTOR 1 D-4-1
ORIENTAL MOTOR 2 D-3-3
Oriental Motor 2 D-2-3
P.T. PRODUCTS AND SERVICES INC. 3 E-4-3
P.T. PRODUCTS AND SERVICES INC. 46
P.T. PRODUCTS AND SERVICES INC./PISCO 20 C-1-3
Page 22 of 26
P.T. PRODUCTS AND SERVICES INC./SMC 4 B-2-2&2-3
P.T. PRODUCTS AND SERVICES INC./SMC 1 E-2-1
PARKER HANNIFIN CORPORATION 15 D-1-2
ply, LLC 200
ply, LLC 400
poration/AMAT 5 E-4-2
PROTEC Construction Services 6 E-2-3
PROTEC Construction Services/Fit LINE 14 A-5-2
PROTEC Construction Services/Fit LINE 10 A-5-2
PROTEC Construction Services/FIT-LINE INC 8 E-3-1
PROTEUS INDUSTRIES INC. 2 C-2-1
PSI Semicon Services/SANYO DENKI 1 E-5-1
PSK TECH AMERICA INC 10 D-6
PSK TECH AMERICA INC 22 D-6
PSK TECH AMERICA INC 2
QUARTZFAB 1 I-4
r Centers, Inc. 6
Rawson Lp/PARKER 2 E-2-3
Reynolds Company/ROCKWELL Automation 4 E-4-1
RICA INC. 4
RICA INC. 2 E-2-3
RICA INC. 6
RICA INC. 9
RKC INSTRUMENT 19 A-1-1
RYAN HERCO FLOW SOLUTIONS 43 D-1-1
RYAN HERCO FLOW SOLUTIONS/PALL 15 G-6
RYAN HERCO FLOW SOLUTIONS/PALL 10 A-5-2
SAINT-GOBAIN 8 C-5-3
SEMES 1 H-5
SEMES America Inc 2 E-4-3
SEMES America Inc 5 C-1-1
SEMES America Inc 4 B-5-1
SEMES America Inc 4 H-2
SEMES America Inc 2 D-2-3
SEMES America Inc 2 D-2-1
SEMES America Inc 2 A-5-1
SEMES America Inc 2 A-6
SEMES America Inc 1 A-5-1
SEMES America Inc / KOMATSU / DNS 1 F-1
SEMES America Inc /NSK 2 B-1-3
SEMES America Inc/BPS 2 B-2-1
SEMES America Inc/CELERITY 1 B-5-1
SEMES America Inc/CKD 3 E-4-1
SEMES America Inc/CKD 1 C-1-2
SEMES America Inc/CKD 2 A-5-3
SEMES America Inc/CKD 3 B-5-2
SEMES America Inc/Dymatrix 2 A-5-2
SEMES America Inc/IEI 1 B-1-3
SEMES America Inc/KOMATSU 1 G-2
SEMES America Inc/OMRON 3 E-4-3
SEMES America Inc/PALL 5 C-2-1
SEMES America Inc/PILLAR FITTING 30 C-1-3
SEMES America Inc/SANYO DENKI 1 E-2-3
SEMES America Inc/SMC 1 E-2-2
SEMES America Inc/TOKYO KEISO 4 B-5-1
SEMES America Inc/WACOO Technology 1 C-2-2
SEMES America Inc/YAMATAKE 2 E-1-3
Page 23 of 26
SEMES America Inc/오리엔트전자 2 B-1-2
SETRA 1 E-2-1
SHIMADZU 1 Pal
SMC 7 A-3-1
SMC 8 C-5-3
SMC 9 C-5-3
SMC/SEMES America Inc 2 E-4-3
SNT-USA INC. 8 H-4
SNT-USA INC. 8 G-5
SNT-USA INC. 10 E-3-1
SNT-USA INC. 12 E-3-1
SNT-USA INC. 1 C-6
SNT-USA INC./ISSOKU 2 E-4-2
SNT-USA INC./Novellus 85 E-4-2
SOLMICS 6 D-2-3
SOLMICS USA 2 I-1
stics Pvt Ltd 16
SUN IL TECHLON 5 B-4-3
Sunbelt Supply, LLC 100
SUNX 3 D-2-1
SURPASS INDUSTRY 3 D-1-2
Swagelok 2 B-3-1
Swagelok 14 D-4-1
Swagelok Austin/Corpus Christi 20 E-3-3
Swagelok Austin/Corpus Christi 30 H-1
Swagelok Austin/Corpus Christi 30
Swagelok Austin/Corpus Christi 4 A-5-3
TEL/VAT INCORPERATION 2 B-3-2
Telemecanique 2 C-5-3
Texas Capitol Semiconductor, BOC EDWARDS 1 Pal
Texas Capitol Semiconductor/BOC EDWARDS 1 C-2-2
TOKYO ELECTRON AMERICA, INC. 1 I-3
TOKYO ELECTRON AMERICA, INC. 1 C-5-1
TOKYO ELECTRON AMERICA, INC. 1 H-2
TOKYO ELECTRON AMERICA, INC. 1 J-4
TOKYO ELECTRON AMERICA, INC. 1 B-3-1
TOKYO ELECTRON AMERICA, INC. 8 B-6
TOKYO ELECTRON AMERICA, INC. 9 B-6
TOKYO ELECTRON AMERICA, INC. 1 J-6
TOKYO ELECTRON AMERICA, INC. 1 E-1-3
TOKYO ELECTRON AMERICA, INC. 1 I-4
TOKYO ELECTRON AMERICA, INC. 1 D-4-3
TOKYO ELECTRON AMERICA, INC. 22
Page 24 of 26
TOKYO ELECTRON AMERICA, INC. 2 B-5-1
TOKYO ELECTRON AMERICA, INC./CKD 1 C-3-1
TOKYO ELECTRON AMERICA, INC./CKD 1 J-6
TOKYO ELECTRON AMERICA, INC./DAIKIN Indust 12 C-2-1
TOKYO ELECTRON AMERICA, INC./FUJIKIN 2 E-2-3
TOKYO ELECTRON AMERICA, INC./GREENE TW 2 C-3-1
TOKYO ELECTRON AMERICA, INC./HARMONIC 1 D-5-1
TOKYO ELECTRON AMERICA, INC./HARMONIC 1 E-1-3
TOKYO ELECTRON AMERICA, INC./KOMATSU 1 H-6
TOKYO ELECTRON AMERICA, INC./NSK 1 H-1
TOKYO ELECTRON AMERICA, INC./PANASONIC 1 B-3-1
TOKYO ELECTRON AMERICA, INC./PANASONIC 1 B-3-1
TOKYO ELECTRON AMERICA, INC./PANASONIC 1 C-3-1
TOKYO ELECTRON AMERICA, INC./PANASONIC 2 D-3-1
TOKYO ELECTRON AMERICA, INC./PANASONIC 1 D-5-3
TOKYO ELECTRON AMERICA, INC./SMC 5 E-3-1
TOKYO ELECTRON AMERICA, INC./SUNX 1 C-1-1
TOKYO ELECTRON AMERICA, INC./TDK-Lambda 2 C-4-1
TOKYO ELECTRON AMERICA, INC./THK 3 C-5-2
TOKYO ELECTRON AMERICA, INC./TOKYO KEIS 1 B-3-2
TOKYO ELECTRON AMERICA, INC./VAT 1 J-1
TOKYO ELECTRON AMERICA, INC./YASKAWA 1 C-4-2
TOKYO ELECTRON AMERICA, INC./YASKAWA 1 C-3-2
TOKYO ELECTRON AMERICA, INC./YASKAWA 1 D-4-2
TURCK/Allied Electronics, Inc. 35 A-1-3
U.S. Bearings & Drives 2 E-2-3
U.S. Bearings & Drives 20 C-2-3
UE Precision 1 A-1-1
ULVAC/(IMK-Imarket Korea) 3 F-3
Valqua America Inc. 1 E-3-2
Valqua America Inc. 2
Valqua America Inc. 4 E-3-2
VARIAN SEMICONDUCTOR E ASSOCIATIONI 2 D-6
VARIAN SEMICONDUCTOR E ASSOCIATIONI 5 D-1-1
VARIAN SEMICONDUCTOR E ASSOCIATIONI 1 C-2-3
VARIAN SEMICONDUCTOR E ASSOCIATIONI 40
VARIAN SEMICONDUCTOR E ASSOCIATIONI 4 E-2-3
VARIAN SEMICONDUCTOR E ASSOCIATIONI/Par 2 E-5-1
VAT INCORPERATION 1 B-3-3
VAT INCORPERATION 3 G-2
VAT INCORPERATION 1 J-2
VAT INCORPERATION 1 D-3-3
VAT INCORPERATION 1 J-4
VAT/Novellus 1 D-5-3
VLSI STANDARDS 1 A-3-1
VULCAN ELECTRIC COMPANY 9 D-3-2
WASHBURN COMPUTER GROUP, INC./NEC 1
WATLOW 1 C-5-3
WHITE KNIGHT FLUID HANDLING, INC. 5 E-2-3
WHITE KNIGHT FLUID HANDLING, INC. 5 D-1-2
WONIK QNC/NOVELLUS 12 E-4-3
Yarbrough Southwest Associates/FABWORX Sol 8 D-3-3
Yarbrough Southwest Associates/FABWORX Sol 10 E-4-3
Yarbrough Southwest Associates/FABWORX Sol 10 E-4-3
YASKAWA 1 B-1-1
YASKAWA/Direct Repair Labs 1 J-4
8
12 E-5-1
9 E-3-1
4 E-3-1
33 C-5-3
5 C-5-3
Page 25 of 26
6 G-3 & G-4
6 C-2-3
4 C-2-3
8 C-2-3
16 E-4-2
3 E-2-3
1
1 E-2-1
2
3
19 E-2-3
39
1
7 E-2-3
2 E-2-3
8 E-2-3
7 E-2-2
23
3
2 C-1-1
2 C-1-1
1 D-2-1
4 E-3-1
1 C-5-3
Total 9,341
Page 26 of 26

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