Ultra High Purity Fittings: Fitting

Ultra
High Purity Fittings
FITTING
Reliable enough to handle high-purity gas ■CVC (Clean Vacuum Couplings)
Gland 48
KITZ-SCT's series of fittings Nut 49
In the IT era, semiconductor-related products are becoming more advanced at an Gasket 50
Union 51
accelerated pace and the requirements placed on gas piping system materials
Double Union 52
have become more diverse. Manifold 54
KITZ-SCT offers a wide range supply of UHP fittings to accommodate high-purity ■SCM/SCL (Automatic Welded Fittings)
SCM Super-clean Micro Fittings 56
gases and meets the needs of the application precisely. The products presented
SCL Super-clean Long Fittings 58
here are the CVC (clean vacuum coupling) series of mechanically welded joints, the ■SCF (Automatic Welded Fittings)
SCM (Super-Clean Micro Fittings), SCL (Super-Clean Long Fittings), and SCF Superclean Fittings 59
(super-clean fitting) series of primarily weld fittings. All product groups are ■SQ (Super Quartz Lock Fittings)
Super Quartz Lock Fittings 66
high-reliability, high-quality products that are based on each type of
■IF (IF Flange)
semiconductor-use piping material and underwent a rigorous production process. IF Flange 67
CVC SCM/SCL
SCF
CVC
Clean Vacuum Coupling
KITZ SCT's CVC fittings are fittings with mechanical metal gasket sealing surface.
KITZ SCT’s unique electropolishing and cleaning, testing, and packaging are done
in a clean room. This make them suitable for use in UHP applications.
Mechanical Metal Gasket ■
Surface Seal Coupling
●The
● CVC fittings have the following component parts and features.
Gasket (G)
Long Gland (S)

Short Gland (S)
Female Nut (NF) Male Nut (NM)
(1) Female Nut (NF) (2) Gland (S) (3) Gasket (G) (2) Gland (S) (4) Male Nut (MN)
(1) Female nut (NF): The female threading is silverplated to prevent galling and seizing for reliable tightening.
In addition, the leak test ports (two locations) are positioned above the gasket line for easy verification of gasket installation and leak testing.
(2) Gland (S): Finished to a smooth inner surface by KITZ SCT's unique surface finish techniques including electropolishing.
(3) Gasket (G): A standard nickel gasket provides excellent seal with the sleeve from tightening.
(4) Male nut (NM): The use of rolled threading gives the male nuts strength and enables reliable connections.
■Product
■ Code Table
Model Size Type of Product Sleeve Dimensions Space Grade + Material
CVC 2 1/8" Gland S Gland 1/8" 12 316 Unpolished + SUS316

Metal Gasket
Surface Seal Fittings
4 1/4" SB Blind Gland 22 STD 316 Mechanical Polished Finish + SUS316
6 3/8" □S Reducing Gland 27 STD 316L Mechanical Polished Finish + SUS316L
8 1/2" Nut NF Female Nut 1/4" 15 EP 316 Electro Polished Finish + SUS316L
12 3/4" NM Male Nut 28 EP 316L Electro Polished Finish + SUS316L
NSM Male Short Nut 31 SEP 316LE Electro Polished Finish + SUS316L
NFH Female Nut (High-flow) 43 (Double Melt Material)
NMH Male Nut (High-flow) 3/8" 16
NBF Female Blind Nut 28 Gasket only
NBM Male Blind Nut 45 NI Electro Polished Finish + Pure nickel
Gasket G Gasket 1/2" 16 Electro Polished Finish + SUS316LE
RG Retainer Gasket 28 316LE
(Double Melt Material)
BG Blind Gasket 45
Union UM Male Union 3/4" 52 *Gasket of 316LE:1/4",1/2" are available
UB Bulkhead Union Note: There is a space between the grade and the material.
UBS Bulkhead Union (Tube End)
UF Female Union
UE Union Elbow
UT Union Tee
UC Union Cross
Double Union USFW Double Female Union
UEFW Doubled Female Union Elbow
UTFW Double Female Union Tee
UCFW Double Female Union Cross
USMW Double Male Union
UEMW Double Male Union Elbow
UTMW Double Male Union Tee
UCMW Double Male Union Cross
Manifold ME Manifold Elbow
MT Manifold Tee
46
■Product
■ Grade
Ultra High Purity Valves

Grade STD EP SEP
Material SUS316, SUS316L, SUS316LE (Double melt material)
≤ Rz 3.2 µm ≤ Rz 0.7 µm
Surface Roughness
≤ Ra 0.5 μm / 20 μin ≤ Ra 0.13 μm / 5 μin
Polish Mechanical Polished Electro Polished
Degreasing
Cleaning +
Precision cleaning
Clean Room Enviroment Class10
Packaging *1 Single bagged package Double bagged package
*1 All gaskets are single bagged package.
*Max.temperature and pressure may be refered to the table and graph below.
Ultra High Purity Fittings

■Production
■ Range Table
SUS316 SUS316L SUS316LE NI
Un-
STD EP STD EP SEP EP
polished
S Gland
Gland SB Blind Gland × × × ○ ○ ○ ×
□S Reducing Gland
NF Female Nut
NM Male Nut
NSM Male Short Nut
Nut NFH Female Nut (High-flow) ○ × × × × × ×
Vacuum Components
NMH Male Nut (High-flow)
NBF Female Blind Nut
NBM Male Blind Nut
G Gasket
Gasket RG Retainer Gasket × × × × × ○ ○
BG Blind Gasket
UM Male Union × ○ ○ Optional Optional × ×
UF Female Union ○ × × × × × ×
UB Bulkhead Union × ○ Optional × × × ×
Bulkhead Union
Union UBS × × × ○ ○ Optional ×
(Tube End)
UE Union Elbow
UT Union Tee × × × ○ ○ ○ ×
PFA Valves
UC Union Cross
USFW Double Female Union
UEFW Doubled Female Union Elbow
UTFW Double Female Union Tee
UCFW Double Female Union Cross
Double union × × × ○ ○ ○ ×
USMW Double Male Union
UEMW Double Male Union Elbow
UTMW Double Male Union Tee
UCMW Double Male Union Cross
ME Manifold Elbow
Manifold × × × ○ ○ ○ × PFA Weld Fittings
MT Manifold Tee
Note: Polish designator for the nuts, female unions, and gaskets are omitted from the model number for simplification purpose.
*Gasket of 316LE:1/4”,1/2” are available
CVC Temperature and Pressure Resistance
■Temperature
■ and Pressure Resistance
Sleeve Size Maximum Operating Pressure (MPa)
Outer
Size Diameter Thickness 42ºC 80ºC 150ºC 250ºC 350ºC
Pressure Resistance (MPa)
1/8" 3.18 0.7 59 53 45 39 36

1/4" 6.35 1 40 36 30 27 24
3/8" 9.53 1 25 23 19 17 15
Antistatic Unit
1/2" 12.7 1.24 23 21 18 15 14

3/4" 19.05 1.24 15 13 11 10 9
[note] 1.Max Pressure in the table are calculated by each wall thickness.
2.Temperature above 300ºC, durability for re-assembly tend to decrease.
47
Unit: inch (mm)
CVC Gland, for use with Female Nut Type Size OD T L L1
0.125 0.028 0.480 0.276

CVC2-S12 1/8"
(3.18) (0.70) (12.20) (7.00)
0.250 0.039 0.598 0.250

CVC4-S15 1/4"
(6.35) (1.00) (15.20) (6.35)
/○ OD
L1 T
L 0.375 0.039 0.650 0.323

CVC6-S16 3/8"
(9.53) (1.00) (16.50) (8.20)
0.500 0.049 0.650 0.323

CVC8-S16 1/2"
(12.70) (1.24) (16.50) (8.20)
CVC Gland, for use with Female Nut Type Size OD T L L1
0.125 0.028 1.079 0.750

CVC2-S27 1/8"
(3.18) (0.70) (27.40) (19.05)
0.250 0.039 1.098 0.750

CVC4-S28 1/4"
(6.35) (1.00) (27.90) (19.05)
/○ OD
L1 T
L 0.375 0.039 1.122 0.750

CVC6-S28 3/8"
(9.53) (1.00) (28.50) (19.05)
0.500 0.049 1.122 0.750

CVC8-S28 1/2"
(12.70) (1.24) (28.50) (19.05)
CVC Gland, for use with Male Nut Type Size OD T L L1

0.125 0.028 0.866 0.276
CVC2-S22 1/8"
(3.18) (0.70) (22.00) (7.00)
0.250 0.040 1.200 0.250
CVC4-S30.5 1/4"
(6.35) (1.00) (30.50) (6.35)
0.250 0.039 1.701 0.750
CVC4-S43 1/4"
/○ OD (6.35) (1.00) (43.20) (19.05)
L1 T 0.375 0.039 1.791 0.750
CVC6-S45 3/8"
L (9.53) (1.00) (45.50) (19.05)
0.500 0.049 1.791 0.750
CVC8-S45 1/2"
(12.70) (1.24) (45.50) (19.05)
0.750 0.049 2.031 0.750
CVC12-S52 3/4"
(19.05) (1.24) (51.60) (19.05)
CVC Reducing Gland, High Flow Type Type Size OD T L L1
0.375 0.039 0.610 0.421

CVC4-6S15 1/4"×3/8"
(9.53) (1.00) (15.50) (10.70)
0.375 0.039 1.130 0.941

CVC4-6S28 1/4"×3/8"
(9.53) (1.00) (28.70) (23.90)
/○ OD
L1 T 0.375 0.039 1.220 1.031

L CVC4-6S31 1/4"×3/8"
(9.53) (1.00) (31.00) (26.20)
0.375 0.039 1.701 1.512

CVC4-6S43 1/4"×3/8"
(9.53) (1.00) (43.20) (38.40)
CVC Blind Gland Type Size OD L L1
0.125 0.866 0.276

CVC2-SB22 1/8"
(3.18) (22.00) (7.00)
0.250 1.098 0.750

CVC4-SB28 1/4"
(6.35) (27.90) (19.05)
/ OD
○
L1
L
0.250 1.701 0.750
CVC4-SB43 1/4"
(6.35) (43.20) (19.05)
0.500 1.791 0.750

CVC8-SB45 1/2"(3/8")
(12.70) (45.50) (19.05)
48
Unit: inch (mm)
CVC Reducing Gland, for use with Female Nut Type Size OD T L L1

0.125 0.028 0.598 0.250
CVC4-2S15 1/4"×1/8"
(3.18) (0.70) (15.20) (6.35)
0.125 0.028 1.098 0.628

CVC4-2S28 1/4"×1/8"
(3.18) (0.70) (27.90) (15.95)
/○ OD 0.125 0.028 1.220 0.750

CVC4-2S31 1/4"×1/8"
T (3.18) (0.70) (31.00) (19.05)
L1
L
0.250 0.039 0.650 0.250
CVC8-4S16 1/2"×1/4"
(6.35) (1.00) (16.50) (6.35)
0.250 0.039 1.122 0.750

CVC8-4S28 1/2"×1/4"
(6.35) (1.00) (28.50) (19.05)

CVC Reducing Gland, for use with Male Nut Type Size OD T L L1
0.125 0.028 1.701 0.750

CVC4-2S43 1/4"×1/8"
(3.18) (0.70) (43.20) (19.05)
/○ OD
T
L1
L
0.250 0.039 1.791 0.750

CVC8-4S45 1/2"×1/4"
(6.35) (1.00) (45.50) (19.05)
Vacuum Components
CVC Female Nut Type Size D H F 2 surface width
0.213 0.531 0.433
CVC2-NF 1/8"
(5.40) (13.50) (11.00)
0.362 0.815 0.748

CVC4-NF 1/4"
(9.20) (20.70) (19.00)
/○ D
0.382 0.815 0.748
CVC4-NF-H 1/4"
(9.70) (20.70) (19.00)
H F
0.610 0.882 1.063
CVC8-NF 1/2" (3/8")
(15.50) (22.40) (27.00)
PFA Valves
0.890 1.122 1.500
CVC12-NF 3/4"
(22.60) (28.50) (38.10)
CVC Male Nut Type Size D H F 2 surface width

0.213 0.500 0.374
CVC2-NM 1/8"
(5.40) (12.70) (9.50)
0.362 0.717 0.622

CVC4-NM 1/4"
(9.20) (18.20) (15.80)
/○ D
0.382 0.717 0.622
PFA Weld Fittings
CVC4-NM-H 1/4"
(9.70) (18.20) (15.80)
H F
0.610 0.811 0.937
CVC8-NM 1/2" (3/8")
(15.50) (20.60) (23.80)
0.890 1.000 1.315

CVC12-NM 3/4"
(22.60) (25.40) (33.40)
CVC Male Short Nut Type Size D H F 2 surface width
0.362 0.591 0.622

CVC4-NSM 1/4"
(9.20) (15.00) (15.80)
Antistatic Unit
/○ D
H F
0.610 0.657 0.937

CVC8-NSM 1/2" (3/8")
(15.50) (16.70) (23.80)
49
Unit: inch (mm)
CVC Female Blind Nut Type Size C H F 2 surface width
0.315 0.638 0.433

CVC2-NBF 1/8"
(8.00) (16.20) (11.00)
0.441 0.941 0.748

CVC4-NBF 1/4"
(11.20) (23.90) (19.00)
C 0.449 1.012 1.063

H F CVC8-NBF 1/2" (3/8")
(11.40) (25.70) (27.00)
0.528 1.276 1.500

CVC12-NBF 3/4"
(13.40) (32.40) (38.10)
CVC Male Blind Nut Type Size H F 2 surface width
0.618 0.374
CVC2-NBM 1/8"
(15.70) (9.50)
0.921 0.622
CVC4-NBM 1/4"
(23.40) (15.80)
1.079 0.937
H F CVC8-NBM 1/2" (3/8")
(27.40) (23.80)
1.429 1.315
CVC12-NBM 3/4"
(36.30) (33.40)
CVC Blind Gasket Type Size T D
0.020 0.250
CVC2-BG 1/8"
(0.50) (6.35)
T 0.031 0.469
CVC4-BG 1/4"
(0.80) (11.90)
/○ D
0.031 0.780
CVC8-BG 1/2" (3/8")
(0.80) (19.80)
0.031 1.134
CVC12-BG 3/4"
(0.80) (28.80)
※ Orifice gaskets of each size can be manufactured. For further inquiries, please consult your local sales representative.
CVC Gasket Type Size E T D
0.091 0.020 0.250

CVC2-G 1/8"
(2.30) (0.50) (6.35)
T
0.220 0.031 0.469
CVC4-G 1/4"
(5.60) (0.80) (11.90)
/○ E /○ D
0.441 0.031 0.780
CVC8-G 1/2"（3/8")
(11.20) (0.80) (19.80)
0.669 0.031 1.134

CVC12-G 3/4"
(17.00) (0.80) (28.80)
CVC Retainer Gasket Type Size E T L D
0.240 0.031 0.118 0.488

CVC4-RG-NI
(6.10) (0.80) (3.00) (12.40)
1/4"
A A-A
0.220 0.031 0.118 0.488
CVC4-RG-LE
(5.60) (0.80) (3.00) (12.40)
/○ E /○ D
A 0.453 0.031 0.118 0.780

CVC8-RG-NI
(11.50) (0.80) (3.00) (19.80)
L T
1/2"
0.453 0.031 0.118 0.780
CVC8-RG-LE
(11.50) (0.80) (3.00) (19.80)
50
Unit: inch (mm)
CVC Male Union Type Size E L F 2surfacewidth

0.071 1.130 0.374
CVC2-UM 1/8"
(1.80) (28.70) (9.50)
/○ E
0.169 1.551 0.622
CVC4-UM 1/4"
(4.30) (39.40) (15.80)
L F
1/2" 0.402 1.839 0.937

CVC8-UM
(3/8") (10.20) (46.70) (23.80)

F2 Panel hole Panel thickness
CVC Bulkhead Union Type Size E L L1 L2 surfacewidth diameter (Max)
0.071 1.693 1.004 0.689 0.433 0.354 0.236

CVC2-UB 1/8"
(1.80) (43.00) (25.50) (17.50) (11.00) (9.00) (6.00)
/○ E
0.169 2.228 1.299 0.929 0.748 0.579 0.433

CVC4-UB 1/4"
L2 L1
F (4.30) (56.60) (33.00) (23.60) (19.00) (14.70) (11.00)
L
Vacuum Components
1/2" 0.402 2.571 1.480 1.091 1.063 0.890 0.866
CVC8-UB
(3/8") (10.20) (65.30) (37.60) (27.70) (27.00) (22.60) (22.00)
F2 Panel hole Panel thick-

CVC Bulkhead Union (Tube End) Type Size OD E L L1 L2 surfacewidth diameter ness (Max)
0.250 0.169 2.358 1.299 0.750 0.748 0.579 0.433

CVC4-UBS28 1/4"
(6.35) (4.30) (59.90) (33.00) (19.05) (19.00) (14.70) (11.00)
/○ E
/○ OD
0.375 0.295 2.571 1.480 0.750 1.063 0.890 0.866

L2 L1
CVC6-UBS28 3/8"
L F (9.53) (7.50) (65.30) (37.60) (19.05) (27.00) (22.60) (22.00)
PFA Valves
1/2" 0.500 0.402 2.571 1.480 0.750 1.063 0.890 0.866
CVC8-UBS28
(3/8") (12.70) (10.20) (65.30) (37.60) (19.05) (27.00) (22.60) (22.00)
CVC Female Union Type Size H F 2surfacewidth
0.661 0.433
CVC2-UF 1/8"
(16.80) (11.00)
PFA Weld Fittings

1.189 0.748
CVC4-UF 1/4"
(30.20) (19.00)
H F
1/2" 1.311 1.063

CVC8-UF
(3/8") (33.30) (27.00)
CVC Union Elbow Type Size E C F 2surfacewidth
0.071 0.890 0.433

CVC2-UE 1/8"
(1.80) (22.60) (11.00)
Antistatic Unit
/○ E 0.171 1.071 0.669

CVC4-UE 1/4"
C F
(4.35) (27.20) (17.00)
1/2" 0.402 1.449 0.984

CVC8-UE
(3/8") (10.22) (36.80) (25.00)
51
Unit: inch (mm)
CVC Union Tee Type Size E L C F 2 surface width
0.071 1.780 0.890 0.433

CVC2-UT 1/8"
(1.80) (45.20) (22.60) (11.00)
C
0.171 2.142 1.071 0.669
/○ E CVC4-UT 1/4"
(4.35) (54.40) (27.20) (17.00)
C C F
L
1/2" 0.402 2.898 1.449 0.984

CVC8-UT
(3/8") (10.22) (73.60) (36.80) (25.00)
CVC Double Union Cross Type Size E L C F 2 surface width
0.071 1.780 0.890 0.433

CVC2-UC 1/8"
(1.80) (45.20) (22.60) (11.00)
F
C
/E
○
L 0.171 2.142 1.071 0.669

CVC4-UC 1/4"
C (4.35) (54.40) (27.20) (17.00)
C C
L
1/2" 0.402 2.898 1.449 0.984

CVC8-UC
(3/8") (10.22) (73.60) (36.80) (25.00)
CVC Double Female Union Type Size E L F 2 surface width
0.071 1.142 0.433

CVC2-USFW 1/8"
(1.80) (29.00) (11.00)
/○ E
0.171 1.709 0.748
CVC4-USFW 1/4"
(4.35) (43.40) (19.00)
L F
1/2" 0.402 1.850 1.063

CVC8-USFW
(3/8") (10.20) (47.00) (27.00)
CVC Double Female Union Elbow Type Size E C F 2 surface width
0.071 0.886 0.433

CVC2-UEFW 1/8"
(1.80) (22.50) (11.00)
C
0.171 1.000 0.748
/○ E CVC4-UEFW 1/4"
(4.35) (25.40) (19.00)
C F
1/2" 0.402 1.173 1.063

CVC8-UEFW
(3/8") (10.20) (29.80) (27.00)
CVC Double Female Union Tee Type Size E L C F 2 surface width
0.071 1.772 0.886 0.433

CVC2-UTFW 1/8"
(1.80) (45.00) (22.50) (11.00)
C
/○ E 0.171 2.000 1.000 0.748
CVC4-UTFW 1/4"
(4.35) (50.80) (25.40) (19.00)
C C F
L
1/2" 0.402 2.346 1.173 1.063

CVC8-UTFW
(3/8") (10.20) (59.60) (29.80) (27.00)
52
Unit: inch (mm)
CVC Double Female Union Cross Type Size E L C F 2 surface width

0.071 1.772 0.886 0.433
CVC2-UCFW 1/8"
(1.80) (45.00) (22.50) (11.00)
C
/○ E
L
0.171 2.000 1.000 0.748
C CVC4-UCFW 1/4"
(4.35) (50.80) (25.40) (19.00)
C C
L F
1/2" 0.402 2.346 1.173 1.063

CVC8-UCFW
(3/8") (10.20) (59.60) (29.80) (27.00)

CVC Double Male Union Type Size E L F 2 surface width
0.071 1.732 0.374

CVC2-USMW 1/8"
(1.80) (44.00) (9.50)
/○ E
0.171 2.402 0.622
CVC4-USMW 1/4"
(4.35) (61.00) (15.80)
L F
1/2" 0.402 2.520 0.937
Vacuum Components
CVC8-USMW
(3/8") (10.20) (64.00) (23.80)
CVC Double Male Union Elbow Type Size E C F 2 surface width
0.071 1.274 0.374

CVC2-UEMW 1/8"
(1.80) (32.35) (9.50)
C
0.171 1.600 0.622
CVC4-UEMW 1/4"
/○ E (4.35) (40.65) (15.80)
C F
PFA Valves
1/2" 0.402 1.783 0.937
CVC8-UEMW
(3/8") (10.20) (45.30) (23.80)
CVC Double Male Union Tee Type Size E L C F 2 surface width
0.071 2.547 1.274 0.374

CVC2-UTMW 1/8"
(1.80) (64.70) (32.35) (9.50)
C PFA Weld Fittings

0.171 3.201 1.600 0.622
/○ E CVC4-UTMW 1/4"
(4.35) (81.30) (40.65) (15.80)
C C F
L
1/2" 0.402 3.567 1.783 0.937

CVC8-UTMW
(3/8") (10.20) (90.60) (45.30) (23.80)
CVC Double Male Union Cross Type Size E L C F 2 surface width
0.071 2.547 1.274 0.374

CVC2-UCMW 1/8"
(1.80) (64.70) (32.35) (9.50)
Antistatic Unit
/○ E
L
0.171 3.201 1.600 0.622
CVC4-UCMW 1/4"
(4.35) (81.30) (40.65) (15.80)
C
C C
L F
1/2" 0.402 3.567 1.783 0.937
CVC8-UCMW
(3/8") (10.20) (90.60) (45.30) (23.80)
53
Unit: inch (mm)
CVC Manifold Elbow Type Size OD T L L1 A F 2 surface width
T 0.250 0.039 0.984 0.524 1.071 0.669

CVC4-ME 1/4"
/○ OD (6.35) (1.00) (25.00) (13.30) (27.20) (17.00)
L1 F
L
CVC Manifold Tee Type Size OD T L L1 A F 2 surface width
A
T /○ OD
0.250 0.039 0.984 0.524 1.071 0.669
CVC4-MT 1/4"
(6.35) (1.00) (25.00) (13.30) (27.20) (17.00)
L1 L1
L L F
54
SCM SCL

Super-clean Micro Fittings Super-clean Long Fittings
Weld Fittings Weld Fittings
■Features
■ ■Features
■
◎◎Vacuum double melt material is available as an op- ◎◎Surface roughness Rz 0.7 µm or less achieved by
tion for use in UHP piping in order to suppress gas electropolishing.
emissions. ◎◎When installing manifold piping, the long straight
◎◎Surface roughness Rz 0.7 µm or less achieved by pipe sections enable less work (one welding spot

electropolishing. not needed) because additional pipe will not be nec-
◎◎Compact shapes save piping spaces. essary.
◎◎The neck (straight pipe section) enables high quality ◎◎The neck (straight pipe section) enables high qual-
weld by using automatic orbital welder. ity weld by using orbital welder.
■Product
■ Code Table
Vacuum Components
Size
Large Small
Model Space Diameter Diameter Type of Product Custom Specifications Grade + Material
SCM Weld Fittings 0 Same diameter as main line E Elbow Space Standard Item STD 316L Mechanical Polished + SUS316L
SCL 2 1/8" T Tee -P1304 The length of the straight pipe part will differ EP 316L Electro Polished + SUS316L
4 1/4" R Reducer -P0413 depending on the placement. (6.35,21mm) SEP 316LE Electro Polished + SUS316LE
6 3/8" AT Angle Tee * Only SCM can be made for -P1304 and-P0413. (Double Melt Material)
8 1/2" C Cross Note: There is a space between the grade and the material.
12 3/4" RT Reducing Tee
PFA Valves
■Product
■ Grade
Grade STD EP SEP
Material SUS316L, SUS310LE (Double melt Material)
≤ Rz 3.2 µm ≤ Rz 0.7 µm
Surface Roughness
Ra 0.5 μm / 20 μin Ra 0.13 μm / 5 μin
Degreasing
Cleaning +
Precision cleaning
Clean Room Environment Class10 PFA Weld Fittings
Packaging Single bagged package Double bagged package
■Production
■ Range Table
SUS316L SUS316LE
Type of Product
STD EP SEP
SCM ○ ○ ○
SCL ○ ○ Option
Antistatic Unit
55
Unit: inch (mm)
SCM 90° elbow Type Size OD T C A L
0.125 0.028 0.406 0.313 0.563

SCM 20E 1/8"
(3.18) (0.70) (10.32) (7.94) (14.29)
/○ OD
T
0.250 0.039 0.406 0.313 0.563
6.35
SCM 40E 1/4"
/○ OD (6.35) (1.00) (10.32) (7.94) (14.29)
C T
L
A
0.375 0.039 0.469 0.438 0.688
SCM 60E 3/8"
A 6.35 A (9.53) (1.00) (11.91) (11.12) (17.47)
C
L
0.500 0.049 0.531 0.563 0.813

SCM 80E 1/2"
(12.70) (1.24) (13.50) (14.29) (20.64)
SCM 90° Reducing Elbow Type Size OD1 T1 OD2 T2 C A L

0.250 0.039 0.125 0.028 0.406 0.313 0.563
SCM 42E 1/4"×1/8"
(6.35) (1.00) (3.18) (0.70) (10.32) (7.94) (14.29)
0.375 0.039 0.125 0.028 0.469 0.438 0.688
/○ OD1 SCM 62E 3/8"×1/8"
T1 (9.53) (1.00) (3.18) (0.70) (11.91) (11.12) (17.47)
6.35
0.375 0.039 0.250 0.039 0.469 0.438 0.688
/○ OD2 SCM 64E 3/8"×1/4"
L
C
T2 (9.53) (1.00) (6.35) (1.00) (11.91) (11.12) (17.47)
A 0.500 0.049 0.125 0.028 0.531 0.563 0.813
SCM 82E 1/2"×1/8"
6.35 A
(12.70) (1.24) (3.18) (0.70) (13.50) (14.29) (20.64)
A
C
L 0.500 0.049 0.250 0.039 0.531 0.563 0.813
SCM 84E 1/2"×1/4"
(12.70) (1.24) (6.35) (1.00) (13.50) (14.29) (20.64)
0.500 0.049 0.375 0.039 0.531 0.563 0.813
SCM 86E 1/2"×3/8"
(12.70) (1.24) (9.53) (1.00) (13.50) (14.29) (20.64)
SCM Straight Tee Type Size OD T C A L
0.125 0.028 0.406 0.313 0.813

SCM 20T 1/8"
(3.18) (0.70) (10.32) (7.94) (20.64)
/○ OD
T 6.35
0.250 0.039 0.406 0.313 0.813
SCM 40T 1/4"
C T
(6.35) (1.00) (10.32) (7.94) (20.64)
A
/○ OD
0.375 0.039 0.469 0.438 0.938
6.35 A 6.35 A SCM 60T 3/8"
C C (9.53) (1.00) (11.91) (11.12) (23.82)
L
0.500 0.049 0.531 0.563 1.063

SCM 80T 1/2"
(12.70) (1.24) (13.50) (14.29) (27.00)
SCM Reducing Tee Type Size OD1 T1 OD2 T2 C A L

0.250 0.039 0.125 0.028 0.406 0.313 0.813
SCM 42T 1/4"×1/8"
(6.35) (1.00) (3.18) (0.70) (10.32) (7.94) (20.64)
0.375 0.039 0.125 0.028 0.469 0.438 0.938
/○ OD2 SCM 62T 3/8"×1/8"
T2
(9.53) (1.00) (3.18) (0.70) (11.91) (11.12) (23.82)
6.35
0.375 0.039 0.250 0.039 0.469 0.438 0.938

C T1 SCM 64T 3/8"×1/4"
(9.53) (1.00) (6.35) (1.00) (11.91) (11.12) (23.82)
A
0.500 0.049 0.125 0.028 0.531 0.563 1.063
/○ OD1
SCM 82T 1/2"×1/8"
6.35 A 6.35 A (12.70) (1.24) (3.18) (0.70) (13.50) (14.29) (27.00)
C C
L 0.500 0.049 0.250 0.039 0.531 0.563 1.063
SCM 84T 1/2"×1/4"
(12.70) (1.24) (6.35) (1.00) (13.50) (14.29) (27.00)
0.500 0.049 0.375 0.039 0.531 0.563 1.063
SCM 86T 1/2"×3/8"
(12.70) (1.24) (9.53) (1.00) (13.50) (14.29) (27.00)
SCM Reducing Tee Type Size OD1 T1 OD2 T2 C A L

0.250 0.039 0.125 0.028 0.406 0.313 0.813
SCM 42RT 1/4"×1/8"
(6.35) (1.00) (3.18) (0.70) (10.32) (7.94) (20.64)
0.375 0.039 0.125 0.028 0.469 0.438 0.938
SCM 62RT 3/8"×1/8"
/○ OD1
T1
(9.53) (1.00) (3.18) (0.70) (11.91) (11.12) (23.82)
6.35
0.375 0.039 0.250 0.039 0.469 0.438 0.938

/○ OD2 SCM 64RT 3/8"×1/4"
C T1 (9.53) (1.00) (6.35) (1.00) (11.91) (11.12) (23.82)
A 0.500 0.049 0.125 0.028 0.531 0.563 1.063
/○ OD1 SCM 82RT 1/2"×1/8"
6.35 A 6.35
T2 (12.70) (1.24) (3.18) (0.70) (13.50) (14.29) (27.00)
A
C C
L 0.500 0.049 0.250 0.039 0.531 0.563 1.063
SCM 84RT 1/2"×1/4"
(12.70) (1.24) (6.35) (1.00) (13.50) (14.29) (27.00)
0.500 0.049 0.375 0.039 0.531 0.563 1.063
SCM 86RT 1/2"×3/8"
(12.70) (1.24) (9.53) (1.00) (13.50) (14.29) (27.00)
56
Unit: inch (mm)
SCM Angle Tee Type Size OD T C A L

0.125 0.028 0.406 0.313 0.563
SCM 20AT 1/8"
(3.18) (0.70) (10.32) (7.94) (14.29)
/○ OD
T
0.250 0.039 0.406 0.313 0.563
6.35 SCM 40AT 1/4"
/○ OD (6.35) (1.00) (10.32) (7.94) (14.29)
C T
L
A
0.375 0.039 0.469 0.438 0.688
A 6.35 6.35 A
SCM 60AT 3/8"
C C
(9.53) (1.00) (11.91) (11.12) (17.47)
L L
0.500 0.049 0.531 0.563 0.813

SCM 80AT 1/2"
(12.70) (1.24) (13.50) (14.29) (20.64)

SCM Reducer Type Size OD1 T1 OD2 T2 R
0.250 0.039 0.125 0.028 0.085
SCM 42R 1/4"×1/8"
(6.35) (1.00) (3.18) (0.70) (2.15)
0.375 0.039 0.125 0.028 0.148
SCM 62R 3/8"×1/8"
7
(9.53) (1.00) (3.18) (0.70) (3.75)
/○ OD2
T1
0.375 0.039 0.250 0.039 0.148
T2 SCM 64R 3/8"×1/4"
(9.53) (1.00) (6.35) (1.00) (3.75)
R
/ OD1
○
0.500 0.049 0.125 0.028 0.201

SCM 82R 1/2"×1/8"
6.35
(12.70) (1.24) (3.18) (0.70) (5.10)
19.05
0.500 0.049 0.250 0.039 0.201
SCM 84R 1/2"×1/4"
(12.70) (1.24) (6.35) (1.00) (5.10)
Vacuum Components
0.500 0.049 0.375 0.039 0.201
SCM 86R 1/2"×3/8"
(12.70) (1.24) (9.53) (1.00) (5.10)
SCM Cross Type Size OD T C A L
0.125 0.028 0.406 0.313 0.813

SCM 20C 1/8"
(3.18) (0.70) (10.32) (7.94) (20.64)
/○ OD
T 6.35
0.250 0.039 0.406 0.313 0.813

/ OD T
SCM 40C 1/4"
○ C
(6.35) (1.00) (10.32) (7.94) (20.64)
A L
C
0.375 0.039 0.469 0.438 0.938
SCM 60C 3/8"
6.35 A 6.35 A 6.35 (9.53) (1.00) (11.91) (11.12) (23.82)
C C
L
PFA Valves
0.500 0.049 0.531 0.563 1.063
SCM 80C 1/2"
(12.70) (1.24) (13.50) (14.29) (27.00)
SCM Different-length Elbow Type Size OD T A C C1 L
/○ OD
T
/○ OD
C1
SCM 0.250 0.039 0.313 0.406 0.827 0.984
PFA Weld Fittings
L
1/4"
T 40E-P0413 (6.35) (1.00) (7.94) (10.32) (21.00) (25.00)
A
A 6.35 A
C
SCM Different-length Tee Type Size OD T A C C1 C2 L
/○ OD
T
Antistatic Unit
/○ OD
C2
C1 SCM 0.250 0.039 0.313 0.250 0.984 0.827 0.813
1/4"
T 40T-P0413 (6.35) (1.00) (7.94) (6.35) (25.00) (21.00) (20.64)
A
C A C A
L
57
Unit: inch (mm)
SCM Different-length Tee Type Size OD T A C C1 C2 L
/○ OD
T /○ OD
C2
C1 T
SCM 0.250 0.039 0.313 0.828 0.406 0.250 1.969
A 1/4"
40T-P1304 (6.35) (1.00) (7.94) (21.03) (10.32) (6.35) (50.00)
A
C A C
L
SCL 90° Ebow Type Size OD T C A L1
0.250 0.039 0.984 0.433 0.750

SCL 40E 1/4"
(6.35) (1.00) (25.00) (11.00) (19.05)
/○ OD
T
0.375 0.039 0.984 0.433 0.750

SCL 60E 3/8"
L1 (9.53) (1.00) (25.00) (11.00) (19.05)
C
T
0.500 0.049 1.142 0.669 0.750
/○ OD SCL 80E 1/2"
(12.70) (1.24) (29.00) (17.00) (19.05)
L1
A
C
0.750 0.049 1.732 0.866 1.299

SCL 120E 3/4"
(19.05) (1.24) (44.00) (22.00) (33.00)
SCL Straight Tee Type Size OD T C A L1 L2
0.250 0.039 0.984 0.433 0.750 1.969

SCL 40T 1/4"
(6.35) (1.00) (25.00) (11.00) (19.05) (50.00)
/○ OD
T
0.375 0.039 0.984 0.433 0.750 1.969

SCL 60T 3/8"
L1 (9.53) (1.00) (25.00) (11.00) (19.05) (50.00)
C
0.500 0.049 1.142 0.669 0.750 2.283

SCL 80T 1/2"
L1 L1 /○ OD (12.70) (1.24) (29.00) (17.00) (19.05) (58.00)
C C A
L2
0.750 0.049 1.732 0.866 1.299 3.465

SCL 120T 3/4"
(19.05) (1.24) (44.00) (22.00) (33.00) (88.00)
SCL Reducing Tee Type Size OD1 T1 OD2 T2 C A L1 L2

0.375 0.039 0.250 0.039 0.984 0.433 0.750 1.969
SCL 64T 3/8"×1/4"
(9.53) (1.00) (6.35) (1.00) (25.00) (11.00) (19.05) (50.00)
0.500 0.049 0.250 0.039 1.142 0.669 0.750 2.283
/○ OD2 SCL 84T 1/2"×1/4"
T2
(12.70) (1.24) (6.35) (1.00) (29.00) (17.00) (19.05) (58.00)
0.500 0.049 0.375 0.039 1.142 0.669 0.750 2.283
L1 SCL 86T 1/2"×3/8"
C
/○ OD1 (12.70) (1.24) (9.53) (1.00) (29.00) (17.00) (19.05) (58.00)
T1
0.750 0.049 0.250 0.039 1.732 0.866 1.299 3.465
SCL 124T 3/4"×1/4"
(19.05) (1.24) (6.35) (1.00) (44.00) (22.00) (33.00) (88.00)
L1 L1
C C
L2 A 0.750 0.049 0.375 0.039 1.732 0.866 1.299 3.465
SCL 126T 3/4"×3/8"
(19.05) (1.24) (9.53) (1.00) (44.00) (22.00) (33.00) (88.00)
0.750 0.049 0.500 0.049 1.732 0.866 1.299 3.465
SCL 128T 3/4"×1/2"
(19.05) (1.24) (12.70) (1.24) (44.00) (22.00) (33.00) (88.00)
SCL Reducer Type Size OD1 T1 OD2 T2 L1 L2

0.375 0.039 0.250 0.039 0.750 1.575
SCL 64R 3/8"×1/4"
(9.53) (1.00) (6.35) (1.00) (19.05) (40.00)
0.500 0.049 0.250 0.039 0.750 1.575
SCL 84R 1/2"×1/4"
(12.70) (1.24) (6.35) (1.00) (19.05) (40.00)
T1
T2 0.500 0.049 0.375 0.039 0.750 1.575
R
SCL 86R 1/2"×3/8"

/ OD1
○
(12.70) (1.24) (9.53) (1.00) (19.05) (40.00)
/○ OD2 0.750 0.049 0.250 0.039 0.750 2.165
L1 SCL 124R 3/4"×1/4"
L2
(19.05) (1.24) (6.35) (1.00) (19.05) (55.00)
0.750 0.049 0.375 0.039 0.750 2.165
SCL 126R 3/4"×3/8"
(19.05) (1.24) (9.53) (1.00) (19.05) (55.00)
0.750 0.049 0.500 0.049 0.750 2.165
SCL 128R 3/4"×1/2"
(19.05) (1.24) (12.70) (1.24) (19.05) (55.00)
58
SCF

Super-clean Fittings
Weld Fittings
■Features
■
◎◎Welded fittings for high-purity gas supply.
◎◎Vacuum double melt material is available as an option for use in UHP piping in order to suppress gas emissions.
◎◎Surface roughness of Rz 0.7 µm or less achieved by electropolishing.

◎◎Compact shapes save piping spaces.
◎◎The neck (straight pipe section) and the tube end enable high quality weld by using automatic orbital welder.
◎◎Please contact the sales representative for sizes, flanges, etc., not listed in the catalog.
■Product
■ Code Table
Product
Name Space Type of Product Space Size (Same Diameter) Space Thickness (Same Diameter) Space Grade + Material
Vacuum Components
SCF 90E 90° Elbow Size (Different Diameters) Thickness (Different Diameter) BA 316L Mechanical Polished + SUS316L
Weld Fittings T Tee EP 316L Electro Polished + SUS316L
RC Concentric Reducer × × SEP Electro Polished + SUS316LE
LAP(L) Lap (Large Diameter Side) (Small Diameter Side) (Large Diameter Side) (Small Diameter Side) 316LE (Double Melt Material)
* Please ask us about Note: There is a space between the grade and the material.
* When the thicknesses are the same,
product classes other than the small-diameter side is omitted.
those listed above.
Notation Nominal Diameter Outer Diameter Notation Nominal Diameter Thickness
1/4 1/4" 6.35mm 1.0T 1/4" 1.0mm
3/8 3/8" 9.53mm 1.0T 3/8" 1.0mm
1/2 1/2" 12.7mm 1.24T 1/2" 1.24mm
3/4 3/4" 19.05mm 1.24T 3/4" 1.24mm
1 1" 25.4mm 1.65T 1" 1.65mm
10A 10A 17.3mm 5S 10A 1.2mm
15A 15A 21.7mm 5S 15A 1.65mm
20A 20A 27.2mm 5S 20A 1.65mm
25A 25A 34.0mm 5S 25A 1.65mm
32A 32A 42.7mm 5S 32A 1.65mm
40A 40A 48.6mm 5S 40A 1.65mm
PFA Valves
50A 50A 60.5mm 5S 50A 1.65mm
65A 65A 76.3mm 5S 65A 2.1mm
80A 80A 89.1mm 5S 80A 2.1mm
100A 100A 114.3mm 5S 100A 2.1mm
■Product
■ Grade
Grade BA EP SEP
Material SUS316L, SUS316LE (Double melt material)
≤ 100A 3.0 µm ≤ Rz 0.7 µm
Surface Roughness PFA Weld Fittings
> 100A 4.0 µm ≤ Ra 0.13 μm / 5 μin
Degreasing
Cleaning +
Precision cleaning
Post-cleaning Environment Class10
Packaging Single bagged package Double bagged package
■Production
■ Range Table
SUS316L SUS316LE
Size
Antistatic Unit
BA EP SEP
1/4"~1/2" ○ × ○
3/4"~1" ○ ○ ×
10A~100A ○ ○ ×
* Please ask the sales representatives for sizes other than those noted above.
59
Unit: inch (mm)
SCF 90° Elbow Type Size OD T R A L
0.250 0.039 0.375 1.575 1.142
SCF 90E 1/4 1/4"
(6.35) (1.00) (9.53) (40.00) (29.00)
0.375 0.039 0.563 1.772 1.142
SCF 90E 3/8 3/8"
L (9.53) (1.00) (14.30) (45.00) (29.00)
0.500 0.049 0.602 1.969 1.142
T
SCF 90E 1/2 1/2"
/○ OD (12.70) (1.24) (15.30) (50.00) (29.00)
R 0.750 0.049 0.750 2.362 1.417
SCF 90E 3/4 3/4"
(19.05) (1.24) (19.05) (60.00) (36.00)
A
1.000 0.065 1.000 2.559 1.417
SCF 90E 1 1"
(25.40) (1.65) (25.40) (65.00) (36.00)
0.681 0.047 0.681 2.362 1.142
A SCF 90E 10A 10A
(17.30) (1.20) (17.30) (60.00) (29.00)
0.854 0.065 0.854 2.559 1.417
SCF 90E 15A 15A
(21.70) (1.65) (21.70) (65.00) (36.00)
1.071 0.065 1.071 2.756 1.417
SCF 90E 20A 20A
(27.20) (1.65) (27.20) (70.00) (36.00)
1.339 0.065 1.339 2.953 1.417
SCF 90E 25A 25A
(34.00) (1.65) (34.00) (75.00) (36.00)
1.681 0.065 1.681 3.543 1.811
SCF 90E 32A 32A
(42.70) (1.65) (42.70) (90.00) (46.00)
1.913 0.065 1.913 3.937 1.811
SCF 90E 40A 40A
(48.60) (1.65) (48.60) (100.00) (46.00)
2.382 0.065 2.382 4.528 1.811
SCF 90E 50A 50A
(60.50) (1.65) (60.50) (115.00) (46.00)
3.004 0.083 3.004 5.512 2.008
SCF 90E 65A 65A
(76.30) (2.10) (76.30) (140.00) (51.00)
3.508 0.083 3.508 5.906 2.008
SCF 90E 80A 80A
(89.10) (2.10) (89.10) (150.00) (51.00)
4.500 0.083 4.500 6.890 2.008
SCF 90E 100A 100A
(114.30) (2.10) (114.30) (175.00) (51.00)
5.504 0.110 7.500 10.236 2.362
SCF 90E 125A 125A
(139.80) (2.80) (190.50) (260.00) (60.00)
6.504 0.110 9.000 11.811 2.362
SCF 90E 150A 150A
(165.20) (2.80) (228.60) (300.00) (60.00)
SCF Tee : Tube Size Type Size OD T C M L

0.250 0.039 1.378 1.378 0.984
SCF T 1/4 1/4"
(6.35) (1.00) (35.00) (35.00) (25.00)
/○ OD
T 0.375 0.039 1.535 1.535 0.984
SCF T 3/8 3/8"
(9.53) (1.00) (39.00) (39.00) (25.00)
L
L M 0.500 0.049 1.575 1.575 0.984

T
SCF T 1/2 1/2"
(12.70) (1.24) (40.00) (40.00) (25.00)
/○ OD
0.750 0.049 2.165 2.165 1.417
SCF T 3/4 3/4"
C C
(19.05) (1.24) (55.00) (55.00) (36.00)
1.000 0.065 2.165 2.165 1.417

SCF T 1 1"
(25.40) (1.65) (55.00) (55.00) (36.00)
SCF Tee : Pipe Size Type Size OD T C M L

0.681 0.047 1.969 1.969 1.378
SCF T 10A 10A
(17.30) (1.20) (50.00) (50.00) (35.00)
0.854 0.065 2.165 2.165 1.417
SCF T 15A 15A
/○ OD (21.70) (1.65) (55.00) (55.00) (36.00)
T
1.071 0.065 2.165 2.165 1.417
SCF T 20A 20A
(27.20) (1.65) (55.00) (55.00) (36.00)
L
M 1.339 0.065 2.362 2.362 1.417
L
T SCF T 25A 25A
(34.00) (1.65) (60.00) (60.00) (36.00)
1.681 0.065 2.953 2.953 1.811
/○ OD SCF T 32A 32A
(42.70) (1.65) (75.00) (75.00) (46.00)
C C 1.913 0.065 3.150 3.150 1.811
SCF T 40A 40A
(48.60) (1.65) (80.00) (80.00) (46.00)
2.382 0.065 3.346 3.346 1.811
SCF T 50A 50A
(60.50) (1.65) (85.00) (85.00) (46.00)
3.004 0.083 3.937 3.937 2.008
SCF T 65A 65A
(76.30) (2.10) (100.00) (100.00) (51.00)
3.508 0.083 4.134 4.134 2.008
SCF T 80A 80A
(89.10) (2.10) (105.00) (105.00) (51.00)
4.500 0.083 4.724 4.724 2.008
SCF T 100A 100A
(114.30) (2.10) (120.00) (120.00) (51.00)
5.504 0.110 7.874 7.874 2.362
SCF T 125A 125A
(139.80) (2.800) (200.00) (200.00) (60.00)
6.504 0.110 8.661 8.661 2.362
SCF T 150A 150A
(165.20) (2.800) (220.00) (220.00) (60.00)
60
Unit: inch (mm)
SCF Tee (Reducing) Type Size OD1 OD2 T1 T2 C M L1 L2

0.375 0.250 0.039 0.039 1.535 1.535 0.984 0.984
SCF T 3/8X1/4 3/8"×1/4"
(9.53) (6.35) (1.00) (1.00) (39.00) (39.00) (25.00) (25.00)
0.500 0.250 0.049 0.039 1.575 1.575 0.984 0.984
/○ OD2 SCF T 1/2X1/4 1/2"×1/4"
T2 (12.70) (6.35) (1.24) (1.00) (40.00) (40.00) (25.00) (25.00)
0.500 0.375 0.049 0.039 1.575 1.575 0.984 0.984
SCF T 1/2X3/8 1/2"×3/8"
L2 (12.70) (9.53) (1.24) (1.00) (40.00) (40.00) (25.00) (25.00)
M
L1 T1
0.750 0.250 0.049 0.039 1.969 1.969 1.417 1.142
SCF T 3/4X1/4 3/4"×1/4"
(19.05) (6.35) (1.24) (1.00) (50.00) (50.00) (36.00) (29.00)
0.750 0.375 0.049 0.039 1.969 1.969 1.417 1.142
C C /○ OD1 SCF T 3/4X3/8 3/4"×3/8"
(19.05) (9.53) (1.24) (1.00) (50.00) (50.00) (36.00) (29.00)
0.750 0.500 0.049 0.049 1.969 1.969 1.417 1.142
SCF T 3/4X1/2 3/4"×1/2"
(19.05) (12.70) (1.24) (1.24) (50.00) (50.00) (36.00) (29.00)

1.000 0.250 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 1X1/4 1"×1/4"
(25.40) (6.35) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
1.000 0.375 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 1X3/8 1"×3/8"
(25.40) (9.53) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
1.000 0.500 0.065 0.049 1.969 1.969 1.417 1.142
SCF T 1X1/2 1"×1/2"
(25.40) (12.70) (1.65) (1.24) (50.00) (50.00) (36.00) (29.00)
1.000 0.750 0.065 0.049 2.165 2.165 1.417 1.417
SCF T 1X3/4 1"×3/4"
(25.40) (19.05) (1.65) (1.24) (55.00) (55.00) (36.00) (36.00)
0.681 0.250 0.047 0.039 1.969 1.772 1.417 1.142
SCF T 10AX1/4 10A×1/4"
(17.30) (6.35) (1.20) (1.00) (50.00) (45.00) (36.00) (29.00)
0.681 0.375 0.047 0.039 1.969 1.772 1.417 0.984
SCF T 10AX3/8 10A×3/8"
(17.30) (9.53) (1.20) (1.00) (50.00) (45.00) (36.00) (25.00)
0.681 0.500 0.047 0.049 1.969 1.772 1.417 1.142
SCF T 10AX1/2 10A×1/2"
Vacuum Components
(17.30) (12.70) (1.20) (1.24) (50.00) (45.00) (36.00) (29.00)
0.854 0.250 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 15AX1/4 15A×1/4"
(21.70) (6.35) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
0.854 0.375 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 15AX3/8 15A×3/8"
(21.70) (9.53) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
0.854 0.500 0.065 0.049 1.969 1.969 1.417 1.142
SCF T 15AX1/2 15A×1/2"
(21.70) (12.70) (1.65) (1.24) (50.00) (50.00) (36.00) (29.00)
0.854 0.750 0.065 0.049 2.165 2.165 1.417 1.417
SCF T 15AX3/4 15A×3/4"
(21.70) (19.05) (1.65) (1.24) (55.00) (55.00) (36.00) (36.00)
1.071 0.250 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 20AX1/4 20A×1/4"
(27.20) (6.35) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
1.071 0.375 0.065 0.039 1.969 1.969 1.417 1.142
SCF T 20AX3/8 20A×3/8"
(27.20) (9.53) (1.65) (1.00) (50.00) (50.00) (36.00) (29.00)
1.071 0.500 0.065 0.049 1.969 1.969 1.417 1.142
SCF T 20AX1/2 20A×1/2"
(27.20) (12.70) (1.65) (1.24) (50.00) (50.00) (36.00) (29.00)
PFA Valves
1.071 0.750 0.065 0.049 2.165 2.165 1.417 1.417
SCF T 20AX3/4 20A×3/4"
(27.20) (19.05) (1.65) (1.24) (55.00) (55.00) (36.00) (36.00)
1.071 0.854 0.065 0.065 2.165 2.165 1.417 1.417
SCF T 20AX15A 20A×15A
(27.20) (21.70) (1.65) (1.65) (55.00) (55.00) (36.00) (36.00)
1.339 0.250 0.065 0.039 1.969 2.165 1.417 1.142
SCF T 25AX1/4 25A×1/4"
(34.00) (6.35) (1.65) (1.00) (50.00) (55.00) (36.00) (29.00)
1.339 0.375 0.065 0.039 1.969 2.165 1.417 1.142
SCF T 25AX3/8 25A×3/8"
(34.00) (9.53) (1.65) (1.00) (50.00) (55.00) (36.00) (29.00)
1.339 0.500 0.065 0.049 1.969 2.165 1.417 1.142
SCF T 25AX1/2 25A×1/2"
(34.00) (12.70) (1.65) (1.24) (50.00) (55.00) (36.00) (29.00)
1.339 0.750 0.065 0.049 2.362 2.362 1.417 1.417
PFA Weld Fittings
SCF T 25AX3/4 25A×3/4"
(34.00) (19.05) (1.65) (1.24) (60.00) (60.00) (36.00) (36.00)
1.339 0.854 0.065 0.065 2.362 2.362 1.417 1.417
(34.00) (21.70) (1.65) (1.65) (60.00) (60.00) (36.00) (36.00)
1.339 1.071 0.065 0.065 2.362 2.362 1.417 1.417
(34.00) (27.20) (1.65) (1.65) (60.00) (60.00) (36.00) (36.00)
1.681 0.250 0.065 0.039 2.362 2.362 1.811 1.142
SCF T 32AX1/4 32A×1/4"
(42.70) (6.35) (1.65) (1.00) (60.00) (60.00) (46.00) (29.00)
1.681 0.375 0.065 0.039 2.362 2.362 1.811 1.142
SCF T 32AX3/8 32A×3/8"
(42.70) (9.53) (1.65) (1.00) (60.00) (60.00) (46.00) (29.00)
1.681 0.500 0.065 0.049 2.362 2.362 1.811 1.142
SCF T 32AX1/2 32A×1/2"
(42.70) (12.70) (1.65) (1.24) (60.00) (60.00) (46.00) (29.00)
1.681 0.750 0.065 0.049 2.756 2.756 1.811 1.417
SCF T 32AX3/4 32A×3/4"
(42.70) (19.05) (1.65) (1.24) (70.00) (70.00) (46.00) (36.00)
Antistatic Unit
1.681 0.854 0.065 0.065 2.756 2.756 1.811 1.417

(42.70) (21.70) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
1.681 1.071 0.065 0.065 2.756 2.756 1.811 1.417
(42.70) (27.20) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
1.681 1.339 0.065 0.065 2.756 2.756 1.811 1.417
(42.70) (34.00) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
1.913 0.250 0.065 0.039 2.362 2.362 1.811 1.142
SCF T 40AX1/4 40A×1/4"
(48.60) (6.35) (1.65) (1.00) (60.00) (60.00) (46.00) (29.00)
61
Unit: inch (mm)

1.913 0.375 0.065 0.039 2.362 2.362 1.811 1.142
SCF T 40AX3/8 40A×3/8"
(48.60) (9.53) (1.65) (1.00) (60.00) (60.00) (46.00) (29.00)
/○ OD2
1.913 0.500 0.065 0.049 2.362 2.362 1.811 1.142
SCF T 40AX1/2 40A×1/2"
T2 (48.60) (12.70) (1.65) (1.24) (60.00) (60.00) (46.00) (29.00)
1.913 0.750 0.065 0.049 2.756 2.756 1.811 1.417
SCF T 40AX3/4 40A×3/4"
L2
M
(48.60) (19.05) (1.65) (1.24) (70.00) (70.00) (46.00) (36.00)
L1 T1
1.913 0.854 0.065 0.065 2.756 2.756 1.811 1.417
(48.60) (21.70) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
C C /○ OD1 1.913 1.071 0.065 0.065 2.756 2.756 1.811 1.417
(48.60) (27.20) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
1.913 1.339 0.065 0.065 2.756 2.756 1.811 1.417
(48.60) (34.00) (1.65) (1.65) (70.00) (70.00) (46.00) (36.00)
1.913 1.681 0.065 0.065 3.150 3.150 1.811 1.811
(48.60) (42.70) (1.65) (1.65) (80.00) (80.00) (46.00) (46.00)
2.382 0.250 0.065 0.039 2.362 2.559 1.811 1.142
SCF T 50AX1/4 50A×1/4"
(60.50) (6.35) (1.65) (1.00) (60.00) (65.00) (46.00) (29.00)
2.382 0.375 0.065 0.039 2.362 2.559 1.811 1.142
SCF T 50AX3/8 50A×3/8"
(60.50) (9.53) (1.65) (1.00) (60.00) (65.00) (46.00) (29.00)
2.382 0.500 0.065 0.049 2.362 2.559 1.811 1.142
SCF T 50AX1/2 50A×1/2"
(60.50) (12.70) (1.65) (1.24) (60.00) (65.00) (46.00) (29.00)
2.382 0.750 0.065 0.049 2.756 2.953 1.811 1.417
SCF T 50AX3/4 50A×3/4"
(60.50) (19.05) (1.65) (1.24) (70.00) (75.00) (46.00) (36.00)
2.382 0.854 0.065 0.065 2.756 2.953 1.811 1.417
(60.50) (21.70) (1.65) (1.65) (70.00) (75.00) (46.00) (36.00)
2.382 1.071 0.065 0.065 2.756 2.953 1.811 1.417
(60.50) (27.20) (1.65) (1.65) (70.00) (75.00) (46.00) (36.00)
2.382 1.339 0.065 0.065 2.756 2.953 1.811 1.417
(60.50) (34.00) (1.65) (1.65) (70.00) (75.00) (46.00) (36.00)
2.382 1.681 0.065 0.065 3.150 3.346 1.811 1.811
(60.50) (42.70) (1.65) (1.65) (80.00) (85.00) (46.00) (46.00)
2.382 1.913 0.065 0.065 3.150 3.346 1.811 1.811
(60.50) (48.60) (1.65) (1.65) (80.00) (85.00) (46.00) (46.00)
3.004 0.250 0.083 0.039 2.559 2.953 2.008 1.142
SCF T 65AX1/4 65A×1/4"
(76.30) (6.35) (2.10) (1.00) (65.00) (75.00) (51.00) (29.00)
3.004 0.375 0.083 0.039 2.559 2.953 2.008 1.142
SCF T 65AX3/8 65A×3/8"
(76.30) (9.53) (2.10) (1.00) (65.00) (75.00) (51.00) (29.00)
3.004 0.500 0.083 0.049 2.559 2.953 2.008 1.142
SCF T 65AX1/2 65A×1/2"
(76.30) (12.70) (2.10) (1.24) (65.00) (75.00) (51.00) (29.00)
3.004 0.750 0.083 0.049 2.953 3.346 2.008 1.417
SCF T 65AX3/4 65A×3/4"
(76.30) (19.05) (2.10) (1.24) (75.00) (85.00) (51.00) (36.00)
3.004 0.854 0.083 0.065 2.953 3.346 2.008 1.417
(76.30) (21.70) (2.10) (1.65) (75.00) (85.00) (51.00) (36.00)
3.004 1.071 0.083 0.065 2.953 3.346 2.008 1.417
(76.30) (27.20) (2.10) (1.65) (75.00) (85.00) (51.00) (36.00)
3.004 1.339 0.083 0.065 2.953 3.346 2.008 1.417
(76.30) (34.00) (2.10) (1.65) (75.00) (85.00) (51.00) (36.00)
3.004 1.681 0.083 0.065 3.543 3.740 2.008 1.811
(76.30) (42.70) (2.10) (1.65) (90.00) (95.00) (51.00) (46.00)
3.004 1.913 0.083 0.065 3.543 3.740 2.008 1.811
(76.30) (48.60) (2.10) (1.65) (90.00) (95.00) (51.00) (46.00)
3.004 2.382 0.083 0.065 3.543 3.740 2.008 1.811
(76.30) (60.50) (2.10) (1.65) (90.00) (95.00) (51.00) (46.00)
3.508 0.250 0.083 0.039 2.559 3.150 2.008 1.142
SCF T 80AX1/4 80A×1/4"
(89.10) (6.35) (2.10) (1.00) (65.00) (80.00) (51.00) (29.00)
3.508 0.375 0.083 0.039 2.559 3.150 2.008 1.142
SCF T 80AX3/8 80A×3/8"
(89.10) (9.53) (2.10) (1.00) (65.00) (80.00) (51.00) (29.00)
3.508 0.500 0.083 0.049 2.559 3.150 2.008 1.142
SCF T 80AX1/2 80A×1/2"
(89.10) (12.70) (2.10) (1.24) (65.00) (80.00) (51.00) (29.00)
3.508 0.750 0.083 0.049 2.953 3.543 2.008 1.417
SCF T 80AX3/4 80A×3/4"
(89.10) (19.05) (2.10) (1.24) (75.00) (90.00) (51.00) (36.00)
3.508 0.854 0.083 0.065 2.953 3.543 2.008 1.417
(89.10) (21.70) (2.10) (1.65) (75.00) (90.00) (51.00) (36.00)
3.508 1.071 0.083 0.065 2.953 3.543 2.008 1.417
(89.10) (27.20) (2.10) (1.65) (75.00) (90.00) (51.00) (36.00)
3.508 1.339 0.083 0.065 2.953 3.543 2.008 1.417
(89.10) (34.00) (2.10) (1.65) (75.00) (90.00) (51.00) (36.00)
3.508 1.681 0.083 0.065 3.543 3.937 2.008 1.811
(89.10) (42.70) (2.10) (1.65) (90.00) (100.00) (51.00) (46.00)
3.508 1.913 0.083 0.065 3.543 3.937 2.008 1.811
(89.10) (48.60) (2.10) (1.65) (90.00) (100.00) (51.00) (46.00)
3.508 2.382 0.083 0.065 3.543 3.937 2.008 1.811
(89.10) (60.50) (2.10) (1.65) (90.00) (100.00) (51.00) (46.00)
62
Unit: inch (mm)

3.508 3.004 0.083 0.083 3.937 4.134 2.008 2.008
(89.10) (76.30) (2.10) (2.10) (100.00) (105.00) (51.00) (51.00)
4.500 0.250 0.083 0.039 2.559 3.740 2.008 1.142
/○ OD2 SCF T 100AX1/4 100A×1/4"
T2
(114.30) (6.35) (2.10) (1.00) (65.00) (95.00) (51.00) (29.00)
4.500 0.375 0.083 0.039 2.559 3.740 2.008 1.142
SCF T 100AX3/8 100A×3/8"
(114.30) (9.53) (2.10) (1.00) (65.00) (95.00) (51.00) (29.00)
L2
M
L1 T1 4.500 0.500 0.083 0.049 2.559 3.740 2.008 1.142
SCF T 100AX1/2 100A×1/2"
(114.30) (12.70) (2.10) (1.24) (65.00) (95.00) (51.00) (29.00)
4.500 0.750 0.083 0.049 2.953 3.937 2.008 1.417
C C /○ OD1 SCF T 100AX3/4 100A×3/4"
(114.30) (19.05) (2.10) (1.24) (75.00) (100.00) (51.00) (36.00)
4.500 0.854 0.083 0.065 2.953 3.937 2.008 1.417
SCF T 100AX15A 100A×15A
(114.30) (21.70) (2.10) (1.65) (75.00) (100.00) (51.00) (36.00)
4.500 1.071 0.083 0.065 2.953 3.937 2.008 1.417

SCF T 100AX20A 100A×20A
(114.30) (27.20) (2.10) (1.65) (75.00) (100.00) (51.00) (36.00)
4.500 1.339 0.083 0.065 2.953 3.937 2.008 1.417
SCF T 100AX25A 100A×25A
(114.30) (34.00) (2.10) (1.65) (75.00) (100.00) (51.00) (36.00)
4.500 1.681 0.083 0.065 3.543 4.331 2.008 1.811
SCF T 100AX32A 100A×32A
(114.30) (42.70) (2.10) (1.65) (90.00) (110.00) (51.00) (46.00)
4.500 1.913 0.083 0.065 3.543 4.331 2.008 1.811
SCF T 100AX40A 100A×40A
(114.30) (48.60) (2.10) (1.65) (90.00) (110.00) (51.00) (46.00)
4.500 2.382 0.083 0.065 3.543 4.331 2.008 1.811
SCF T 100AX50A 100A×50A
(114.30) (60.50) (2.10) (1.65) (90.00) (110.00) (51.00) (46.00)
4.500 3.004 0.083 0.083 4.134 4.724 2.008 2.008
SCF T 100AX65A 100A×65A
(114.30) (76.30) (2.10) (2.10) (105.00) (120.00) (51.00) (51.00)
4.500 3.508 0.083 0.083 4.134 4.724 2.008 2.008
SCF T 100AX80A 100A×80A
(114.30) (89.10) (2.10) (2.10) (105.00) (120.00) (51.00) (51.00)
Vacuum Components
SCF Reducer Type Size OD1 OD2 T1 T2 H L1 L2
0.375 0.250 0.039 0.039 2.953 0.984 0.984
SCF RC 3/8X1/4 3/8"×1/4"
(9.53) (6.35) (1.00) (1.00) (75.00) (25.00) (25.00)
0.500 0.250 0.049 0.039 2.953 0.984 0.984
H SCF RC 1/2X1/4 1/2"×1/4"
L2 L1
(12.70) (6.35) (1.24) (1.00) (75.00) (25.00) (25.00)
0.500 0.375 0.049 0.039 2.953 0.984 0.984
SCF RC 1/2X3/8 1/2"×3/8"
(12.70) (9.53) (1.24) (1.00) (75.00) (25.00) (25.00)
/○ OD2 /○ OD1 0.750 0.250 0.049 0.039 3.937 1.417 0.984
SCF RC 3/4X1/4 3/4"×1/4"
T2 (19.05) (6.35) (1.24) (1.00) (100.00) (36.00) (25.00)
T1 0.750 0.375 0.049 0.039 3.937 1.417 0.984
SCF RC 3/4X3/8 3/4"×3/8"
(19.05) (9.53) (1.24) (1.00) (100.00) (36.00) (25.00)
0.750 0.500 0.049 0.039 3.937 1.417 0.984
SCF RC 3/4X1/2 3/4"×1/2"
PFA Valves
(19.05) (12.70) (1.24) (1.00) (100.00) (36.00) (25.00)
0.854 0.375 0.065 0.039 4.331 1.417 0.984
SCF RC 15AX3/8 15A×3/8"
(21.70) (9.53) (1.65) (1.00) (110.00) (36.00) (25.00)
0.854 0.500 0.065 0.039 4.331 1.417 0.984
SCF RC 15AX1/2 15A×1/2"
(21.70) (12.70) (1.65) (1.00) (110.00) (36.00) (25.00)
1.071 0.375 0.065 0.039 4.724 1.417 0.984
SCF RC 20AX3/8 20A×3/8"
(27.20) (9.53) (1.65) (1.00) (120.00) (36.00) (25.00)
1.071 0.500 0.065 0.039 4.724 1.417 0.984
SCF RC 20AX1/2 20A×1/2"
(27.20) (12.70) (1.65) (1.00) (120.00) (36.00) (25.00)
1.071 0.854 0.065 0.065 4.724 1.417 1.417
SCF RC 20AX15A 20A×15A
(27.20) (21.70) (1.65) (1.65) (120.00) (36.00) (36.00) PFA Weld Fittings
1.339 0.500 0.065 0.049 4.921 1.417 0.984
SCF RC 25AX1/2 25A×1/2"
(34.00) (12.70) (1.65) (1.24) (125.00) (36.00) (25.00)
1.339 0.854 0.065 0.065 4.921 1.417 1.417
(34.00) (21.70) (1.65) (1.65) (125.00) (36.00) (36.00)
1.339 1.071 0.065 0.065 4.921 1.417 1.417
(34.00) (27.20) (1.65) (1.65) (125.00) (36.00) (36.00)
1.681 0.854 0.065 0.065 5.472 1.811 1.417
(42.70) (21.70) (1.65) (1.65) (139.00) (46.00) (36.00)
1.681 1.071 0.065 0.065 5.472 1.811 1.417
(42.70) (27.20) (1.65) (1.65) (139.00) (46.00) (36.00)
1.681 1.339 0.065 0.065 5.472 1.811 1.417
(42.70) (34.00) (1.65) (1.65) (139.00) (46.00) (36.00)
1.913 1.071 0.065 0.065 5.984 1.811 1.417
(48.60) (27.20) (1.65) (1.65) (152.00) (46.00) (36.00)
Antistatic Unit
1.913 1.339 0.065 0.065 5.984 1.811 1.417

(48.60) (34.00) (1.65) (1.65) (152.00) (46.00) (36.00)
1.913 1.681 0.065 0.065 6.378 1.811 1.811
(48.60) (42.70) (1.65) (1.65) (162.00) (46.00) (46.00)
2.382 1.071 0.065 0.065 6.457 1.811 1.417
(60.50) (27.20) (1.65) (1.65) (164.00) (46.00) (36.00)
2.382 1.339 0.065 0.065 6.457 1.811 1.417
(60.50) (34.00) (1.65) (1.65) (164.00) (46.00) (36.00)
63
Unit: inch (mm)

2.382 1.681 0.065 0.065 6.850 1.811 1.811
(60.50) (42.70) (1.65) (1.65) (174.00) (46.00) (46.00)
2.382 1.913 0.065 0.065 6.850 1.811 1.811
H (60.50) (48.60) (1.65) (1.65) (174.00) (46.00) (46.00)
L2 L1
3.004 1.681 0.083 0.065 7.559 2.008 1.811
(76.30) (42.70) (2.10) (1.65) (192.00) (51.00) (46.00)
3.004 1.913 0.083 0.065 7.559 2.008 1.811
/○ OD2 /○ OD1 SCF RC 65AX40A 65A×40A
(76.30) (48.60) (2.10) (1.65) (192.00) (51.00) (46.00)
T2
3.004 2.382 0.083 0.065 7.559 2.008 1.811
T1 SCF RC 65AX50A 65A×50A
(76.30) (60.50) (2.10) (1.65) (192.00) (51.00) (46.00)
3.508 1.681 0.083 0.065 7.559 2.008 1.811
(89.10) (42.70) (2.10) (1.65) (192.00) (51.00) (46.00)
3.508 1.913 0.083 0.065 7.559 2.008 1.811
(89.10) (48.60) (2.10) (1.65) (192.00) (51.00) (46.00)
3.508 2.382 0.083 0.065 7.559 2.008 1.811
(89.10) (60.50) (2.10) (1.65) (192.00) (51.00) (46.00)
3.508 3.004 0.083 0.083 7.756 2.008 2.008
(89.10) (76.30) (2.10) (2.10) (197.00) (51.00) (51.00)
4.500 1.913 0.083 0.065 8.071 2.008 1.811
(114.30) (48.60) (2.10) (1.65) (205.00) (51.00) (46.00)
4.500 2.382 0.083 0.065 8.071 2.008 1.811
(114.30) (60.50) (2.10) (1.65) (205.00) (51.00) (46.00)
4.500 3.004 0.083 0.083 8.268 2.008 2.008
(114.30) (76.30) (2.10) (2.10) (210.00) (51.00) (51.00)
4.500 3.508 0.083 0.083 8.268 2.008 2.008
(114.30) (89.10) (2.10) (2.10) (210.00) (51.00) (51.00)

1.681 0.250 0.065 0.039 4.646 1.811 1.142
SCF RC 32AX1/4 32A×1/4"
(42.70) (6.35) (1.65) (1.00) (118.00) (46.00) (29.00)
1.681 0.375 0.065 0.039 4.646 1.811 1.142
H SCF RC 32AX3/8 32A×3/8"
(42.70) (9.53) (1.65) (1.00) (118.00) (46.00) (29.00)
L1
L2 1.681 0.500 0.065 0.049 4.646 1.811 1.142
SCF RC 32AX1/2 32A×1/2"
(42.70) (12.70) (1.65) (1.24) (118.00) (46.00) (29.00)
/○ OD2 /○ OD1 1.681 0.750 0.065 0.049 4.921 1.811 1.417
SCF RC 32AX3/4 32A×3/4"
T2 (42.70) (19.05) (1.65) (1.24) (125.00) (46.00) (36.00)
T1 1.913 0.250 0.065 0.039 4.646 1.811 1.142
SCF RC 40AX1/4 40A×1/4"
(48.60) (6.35) (1.65) (1.00) (118.00) (46.00) (29.00)
1.913 0.375 0.065 0.039 4.646 1.811 1.142
SCF RC 40AX3/8 40A×3/8"
(48.60) (9.53) (1.65) (1.00) (118.00) (46.00) (29.00)
1.913 0.500 0.065 0.049 4.646 1.811 1.142
SCF RC 40AX1/2 40A×1/2"
(48.60) (12.70) (1.65) (1.24) (118.00) (46.00) (29.00)
1.913 0.750 0.065 0.049 4.921 1.811 1.417
SCF RC 40AX3/4 40A×3/4"
(48.60) (19.05) (1.65) (1.24) (125.00) (46.00) (36.00)
SCF RC 1.913 0.854 0.065 0.065 4.921 1.811 1.417
40A×15A
40AX15A (48.60) (21.70) (1.65) (1.65) (125.00) (46.00) (36.00)
2.382 0.250 0.065 0.039 4.646 1.811 1.142
SCF RC 50AX1/4 50A×1/4"
(60.50) (6.35) (1.65) (1.00) (118.00) (46.00) (29.00)
2.382 0.375 0.065 0.039 4.646 1.811 1.142
SCF RC 50AX3/8 50A×3/8"
(60.50) (9.53) (1.65) (1.00) (118.00) (46.00) (29.00)
2.382 0.500 0.065 0.049 4.646 1.811 1.142
SCF RC 50AX1/2 50A×1/2"
(60.50) (12.70) (1.65) (1.24) (118.00) (46.00) (29.00)
2.382 0.750 0.065 0.049 4.921 1.811 1.417
SCF RC 50AX3/4 50A×3/4"
(60.50) (19.05) (1.65) (1.24) (125.00) (46.00) (36.00)
SCF RC 2.382 0.854 0.065 0.065 4.921 1.811 1.417
50A×15A
50AX15A (60.50) (21.70) (1.65) (1.65) (125.00) (46.00) (36.00)
3.004 0.250 0.083 0.039 4.843 2.008 1.142
SCF RC 65AX1/4 65A×1/4"
(76.30) (6.35) (2.10) (1.00) (123.00) (51.00) (29.00)
3.004 0.375 0.083 0.039 4.843 2.008 1.142
SCF RC 65AX3/8 65A×3/8"
(76.30) (9.53) (2.10) (1.00) (123.00) (51.00) (29.00)
3.004 0.500 0.083 0.049 4.843 2.008 1.142
SCF RC 65AX1/2 65A×1/2"
(76.30) (12.70) (2.10) (1.24) (123.00) (51.00) (29.00)
3.004 0.750 0.083 0.049 5.118 2.008 1.417
SCF RC 65AX3/4 65A×3/4"
(76.30) (19.05) (2.10) (1.24) (130.00) (51.00) (36.00)
SCF RC 3.004 0.854 0.083 0.065 5.118 2.008 1.417
65A×15A
65AX15A (76.30) (21.70) (2.10) (1.65) (130.00) (51.00) (36.00)
SCF RC 3.004 1.071 0.083 0.065 5.118 2.008 1.417
65A×20A
65AX20A (76.30) (27.20) (2.10) (1.65) (130.00) (51.00) (36.00)
SCF RC 3.004 1.339 0.083 0.065 5.118 2.008 1.417
65A×25A
65AX25A (76.30) (34.00) (2.10) (1.65) (130.00) (51.00) (36.00)
3.508 0.250 0.083 0.039 5.315 2.008 1.142
SCF RC 80AX1/4 80A×1/4"
(89.10) (6.35) (2.10) (1.00) (135.00) (51.00) (29.00)
64
Unit: inch (mm)

3.508 0.375 0.083 0.039 5.315 2.008 1.142
SCF RC 80AX3/8 80A×3/8"
(89.10) (9.53) (2.10) (1.00) (135.00) (51.00) (29.00)
3.508 0.500 0.083 0.049 5.315 2.008 1.142
SCF RC 80AX1/2 80A×1/2"
H (89.10) (12.70) (2.10) (1.24) (135.00) (51.00) (29.00)
L1
L2 3.508 0.750 0.083 0.049 5.591 2.008 1.417
SCF RC 80AX3/4 80A×3/4"
(89.10) (19.05) (2.10) (1.24) (142.00) (51.00) (36.00)
/○ OD2 /○ OD1 3.508 0.854 0.083 0.065 5.591 2.008 1.417
T2
(89.10) (21.70) (2.10) (1.65) (142.00) (51.00) (36.00)
T1 3.508 1.071 0.083 0.065 5.591 2.008 1.417
(89.10) (27.20) (2.10) (1.65) (142.00) (51.00) (36.00)
3.508 1.339 0.083 0.065 5.591 2.008 1.417
(89.10) (34.00) (2.10) (1.65) (142.00) (51.00) (36.00)
4.500 0.250 0.083 0.039 6.181 2.008 1.142

SCF RC 100AX1/4 100A×1/4"
(114.30) (6.35) (2.10) (1.00) (157.00) (51.00) (29.00)
4.500 0.375 0.083 0.039 6.181 2.008 1.142
SCF RC 100AX3/8 100A×3/8"
(114.30) (9.53) (2.10) (1.00) (157.00) (51.00) (29.00)
4.500 0.500 0.083 0.049 6.181 2.008 1.142
SCF RC 100AX1/2 100A×1/2"
(114.30) (12.70) (2.10) (1.24) (157.00) (51.00) (29.00)
4.500 0.750 0.083 0.049 6.457 2.008 1.417
SCF RC 100AX3/4 100A×3/4"
(114.30) (19.05) (2.10) (1.24) (164.00) (51.00) (36.00)
4.500 0.854 0.083 0.065 6.457 2.008 1.417
(114.30) (21.70) (2.10) (1.65) (164.00) (51.00) (36.00)
4.500 1.071 0.083 0.065 6.457 2.008 1.417
(114.30) (27.20) (2.10) (1.65) (164.00) (51.00) (36.00)
4.500 1.339 0.083 0.065 6.457 2.008 1.417
(114.30) (34.00) (2.10) (1.65) (164.00) (51.00) (36.00)
Vacuum Components
4.500 1.681 0.083 0.065 6.850 2.008 1.811
(114.30) (42.70) (2.10) (1.65) (174.00) (51.00) (46.00)
SCF Lap Joint Type Size OD T t L G L1 R

0.854 0.083 0.065 2.559 2.008 1.575 0.118
SCF LAP (L) 15A 15A
(21.70) (2.10) (1.65) (65.00) (51.00) (40.00) (3.00)
1.071 0.083 0.065 2.559 2.205 1.575 0.118
SCF LAP (L) 20A 20A
T (27.20) (2.10) (1.65) (65.00) (56.00) (40.00) (3.00)
R t 1.339 0.110 0.065 3.346 2.638 1.575 0.118
SCF LAP (L) 25A 25A
(34.00) (2.80) (1.65) (85.00) (67.00) (40.00) (3.00)
/○ G /○ OD 1.681 0.110 0.065 3.740 2.992 1.969 0.157
SCF LAP (L) 32A 32A
(42.70) (2.80) (1.65) (95.00) (76.00) (50.00) (4.00)
L1 1.913 0.110 0.065 3.740 3.189 1.969 0.157
L SCF LAP (L) 40A 40A
(48.60) (2.80) (1.65) (95.00) (81.00) (50.00) (4.00)
PFA Valves
2.382 0.110 0.065 3.740 3.780 1.969 0.157
SCF LAP (L) 50A 50A
(60.50) (2.80) (1.65) (95.00) (96.00) (50.00) (4.00)
3.004 0.118 0.083 3.937 4.567 2.165 0.197
SCF LAP (L) 65A 65A
(76.30) (3.00) (2.10) (100.00) (116.00) (55.00) (5.00)
3.508 0.118 0.083 3.937 4.961 2.165 0.197
SCF LAP (L) 80A 80A
(89.10) (3.00) (2.10) (100.00) (126.00) (55.00) (5.00)
4.500 0.118 0.083 3.937 5.945 2.165 0.197
SCF LAP (L) 100A 100A
(114.30) (3.00) (2.10) (100.00) (151.00) (55.00) (5.00)
PFA Weld Fittings

Antistatic Unit
65
SQ
Super Quartz Lock Fittings
KITZ SCT Super Quartz Lock fitting for quartz chamber/reactor is highly safety
and repeatable fitting.
■Features
■
◎◎Sealing reliability for glass tubing and metal tubing through the utilization of dual O-ring. (Disunion・Corotation Prevention)
◎◎Fluorine resin coated washer is installed to prevents the O-ring from co-rotation when tightening the nut or O-ring from falling off.
◎◎Keeping high sealing ability in repeatable use.
◎◎Stopper keeps consistency of tightening amount and prevents damage to the quartz tube by over tightening.
◎◎More so than our conventional products, SQ Fittings can be used in a clean room environment, because of our Super Precision Cleaning Process.
■Specifications
■
Quartz Size φ 10 φ 12
Operating Pressure VAC 〜 1atm
Fluid Temperature -10~150ºC
■Product
■ grade
Grade *1 EP
Body SUS316L
≤ Rz 0.7 µm
Surface Roughness
≤ Ra 0.13 μm / 5 μin
Polish Electro Polished
Degreasing
Cleaning +
Precision Cleaning
Packaging Single Bagged Package
*1 Please ask to thesales repersentative about STD grade.
Product Code Table
Model Quartz O-ring SUS Tube O-ring

Tubing Size Material
SQ 10 A 4W F
SQ Fitting 10:φ10 A: Dual O-ring 4W:1/4 *2 Fluorine Rubber
12:φ12 *2
* 2 Please ask to the sales representative for othe size.

■Dimensions
■ Unit: inch (mm)
Quart SUS
Model Type Tube Size Tube L A B C φD φd t E
φOD1 Size φOD2
0.39 0.94 0.79 0.67

SQ10A-4W-F
(10.0) (24.0) (20.0) (17.0)
E /○ d /○ OD2 /○ D
0.25 1.34 0.28 0.39 0.47 0.04
(6.35) (34.0) (7.0) (10.0) (12.0) (1.0)
A B C
/○ OD1
L
0.47 1.02 0.87 0.75

SQ12A-4W-F
(12.0) (26.0) (22.0) (19.0)
*2 Please ask to the sales representative for othe size.
66
IF

IF Flange
■Features
■
◎◎Exclusion of the resin packing seal for high purity gas systems. By utilizing a nickel gasket, an air tight seal is achieved. In addition, it is not
only corrosion resistant, but resistant to corrosive gas as well.
◎◎It is most suitable for large flow systems. Sizes 10A~80A correspond to the sizing standards of bulk gas delivery supply for the liquid crystal
and solar battery industries.

◎◎Piping construction improvement. The gasket fixed pin can be used as a temporary stop, thus preventing the gasket from falling off at the time
of the construction.
◎◎By utilizing the rotatable flange, construction is easy even in confined spaces.
　Wide temperature rating -200~450℃
■Specifications
■
Size 10A 20A 25A 32A 40A 50A 65A 80A
Maximum Operating Pressure 1×10-6Pa~1MPa (G)
Leak Rate 5×10-10Pa·m3/s
Fluid temperature -200ºC~450ºC (The fluid temperature range depends on our calculated value)
Vacuum Components
■Product
■ grade
Grade (Flange Only) STD EP
Flange/SUS316L
Rotatable Flange/SUS304
Material Gasket/NLCB (Nickel 201)
Gasket Fixed Pin/A5056
Bolt, Nut, Washer/SUS304 *
≤ Rz 12 µm ≤ Rz 0.7 µm
Surface Roughness
≤ Ra 3.2 μm / 126 μin ≤ Ra 0.13 μm / 5 μin
Flange, Gasket,
Degreasing + Precision cleaning
Gasket Fixed Pin
Cleaning
Rotatable Flange Degreasing
Bolt, Nut, Washer No Cleaning
Flange Single Bagged Package Double Bagged Package
PFA Valves
Rotatable Flange Single Bagged Package
Packaging Gasket Double Bagged Package
Gasket Fixed Pin Single Bagged Package
Bolt, Nut, Washer Single Bagged Package
*1 Please use lubricant when sticking occurs.
Product Code Table
IF Flange Set (Flange 2x, Rotatable Flange 2x, Gasket 1x, Gasket Fixed Pin 2x, Bolt, Nut, Washer 1x each) Rotatable Flange, Blank Flange, Gasket
Model Size Space Grade + Body Material Model Size Type

PFA Weld Fittings
IF Flange STD-316L :Machanical Polish + SUS316L IF Flange Rotatable Flange RAF

Set EP-316L :Electro Polish + SUS316L Blank Flange BLF
Gasket NIG
Flange Gasket Fixed Pin
Model Size Thickness & Connection Length Space Grade + Body Material Model Type
Antistatic Unit
IF Flange Title Size Outer Diameter W:Butt Weld Total Length: STD-316L :Machanical Polish + SUS316L IF Flange Gasket Fixed Pin
109.5mm EP-316L :Electro Polish + SUS316L
67
■Flange
■ Dimensions Unit: inch (mm)
Model Type Size A B C D E L L1 t
IF10-5SW 10A 1.34 1.10 0.63 0.68 0.87 4.31 3.19 0.05
(34.0) (28.0) (16.0) (17.3) (22.0) (109.5) (81.0) (1.20)
IF15-5SW 15A 1.50 1.26 0.79 0.85 1.02 4.31 3.11 0.06
(38.0) (32.0) (20.0) (21.7) (26.0) (109.5) (79.0) (1.65)
4- /○ 2
IF20-5SW 20A 1.69 1.46 0.98 1.07 1.22 4.31 3.07 0.06
(43.0) (37.0) (25.0) (27.2) (31.0) (109.5) (78.0) (1.65)
f /○ B
IF25-5SW 25A 2.05 1.81 1.34 1.34 1.57 4.31 2.95 0.06
(52.0) (46.0) (34.0) (34.0) (40.0) (109.5) (75.0) (1.65)
/○ D /○ E /○ C /○ A
IF32-5SW 32A 2.36 2.13 1.65 1.68 1.89 4.31 2.91 0.06
(60.0) (54.0) (42.0) (42.7) (48.0) (109.5) (74.0) (1.65)
IF40-5SW 40A 2.60 2.36 1.89 1.91 2.13 4.31 2.87 0.06
L1
(66.0) (60.0) (48.0) (48.6) (54.0) (109.5) (73.0) (1.65)
L IF50-5SW 50A 3.07 2.83 2.36 2.38 2.60 4.31 2.80 0.06
(78.0) (72.0) (60.0) (60.5) (66.0) (109.5) (71.0) (1.65)
IF65-5SW 65A 3.82 3.58 3.03 3.00 3.27 4.31 2.56 0.08
(97.0) (91.0) (77.0) (76.3) (83.0) (109.5) (65.0) (2.10)
IF80-5SW 80A 4.33 4.09 3.54 3.51 3.78 4.31 2.52 0.08
(110.0) (104.0) (90.0) (89.1) (96.0) (109.5) (64.0) (2.10)
■Rotatable
■ Flange Dimensions Unit: inch (mm)
Model Type Size A T B N-φH C D S
IF10-RAF 10A 2.40 0.59 1.81 6-φ0.28 1.34 0.91 0.43
(61.0) (15.0) (46.0) (6-φ7) (34.0) (23.0) (11.0)
IF15-RAF 15A 2.72 0.67 1.97 6-φ0.35 1.50 1.06 0.47
N- /○ H (69.0) (17.0) (50.0) (6-φ9) (38.0) (27.0) (12.0)
N- /○ H
45° IF20-RAF 20A 3.15 0.75 2.24 6-φ0.43 1.69 1.26 0.55
(80.0) (19.0) (57.0) (6-φ11) (43.0) (32.0) (14.0)
60°
IF25-RAF 25A 3.70 0.79 2.68 6-φ0.51 2.05 1.61 0.59
/○ B
/○ B
(94.0) (20.0) (68.0) (6-φ13) (52.0) (41.0) (15.0)
/○ D /○ C /○ A /○ D /○ C /○ A
IF32-RAF 32A 4.09 0.83 3.07 8-φ0.43 2.36 1.93 0.63
(104.0) (21.0) (78.0) (8-φ11) (60.0) (49.0) (16.0)
S IF40-RAF 40A 4.17 0.87 3.15 8-φ0.43 2.60 2.17 0.67
(106.0) (22.0) (80.0) (8-φ11) (66.0) (55.0) (17.0)
T
S
IF50-RAF 50A 4.80 0.94 3.70 8-φ0.51 3.07 2.64 0.75
T
10A∼25A (122.0) (24.0) (94.0) (8-φ13) (78.0) (67.0) (19.0)
32A∼80A 6.02 1.14 4.69 8-φ0.71 3.82 3.31 0.91
IF65-RAF 65A (153.0) (29.0) (119.0) (8-φ18) (97.0) (84.0) (23.0)
IF80-RAF 80A 6.54 1.18 5.20 8-φ0.71 4.33 3.82 0.94
(166.0) (30.0) (132.0) (8-φ18) (110.0) (97.0) (24.0)
■Blank
■ Flange Dimensions Unit: inch (mm)
Model Type Size A T B N-φH C
IF10-BLF 10A 2.40 0.59 1.81 6-φ0.28 1.34
(61.0) (15.0) (46.0) (6-φ7) (34.0)
IF15-BLF 15A 2.72 0.67 1.97 6-φ0.35 1.50
N- /○ H (69.0) (17.0) (50.0) (6-φ9) (38.0)
N- /○ H
45° IF20-BLF 20A 3.15 0.75 2.24 6-φ0.43 1.69
(80.0) (19.0) (57.0) (6-φ11) (43.0)
60°
IF25-BLF 25A 3.70 0.79 2.68 6-φ0.51 2.05
/○ B (94.0) (20.0) (68.0) (6-φ13) (52.0)
/○ B
/○ C /○ A /○ C /○ A
IF32-BLF 32A 4.09 0.83 3.07 8-φ0.43 2.36

(104.0) (21.0) (78.0) (8-φ11) (60.0)
IF40-BLF 40A 4.17 0.87 3.15 8-φ0.43 2.60
(106.0) (22.0) (80.0) (8-φ11) (66.0)
T
IF50-BLF 50A 4.80 0.94 3.70 8-φ0.51 3.07

10A∼25A (122.0) (24.0) (94.0) (8-φ13) (78.0)
32A∼80A 6.02 1.14 4.69 8-φ0.71 3.82
IF65-BLF 65A (153.0) (29.0) (119.0) (8-φ18) (97.0)
IF80-BLF 80A 6.54 1.18 5.20 8-φ0.71 4.33
(166.0) (30.0) (132.0) (8-φ18) (110.0)
■Gasket
■ Dimensions Unit: inch (mm)
Model Type Size A T B C
IF10-NIG 10A 1.34 0.11 0.63 1.10
(34.0) (2.8) (16.0) (28.0)
IF15-NIG 15A 1.50 0.11 0.79 1.26
(38.0) (2.8) (20.0) (32.0)
2- /○ 2.6
/○ C IF20-NIG 20A 1.69 0.11 0.98 1.46
(43.0) (2.8) (25.0) (37.0)
IF25-NIG 25A 2.05 0.11 1.34 1.81
(52.0) (2.8) (34.0) (46.0)
/○ A IF32-NIG 32A 2.36 0.11 1.65 2.13
(60.0) (2.8) (42.0) (54.0)
IF40-NIG 40A 2.60 0.11 1.89 2.36
(66.0) (2.8) (48.0) (60.0)
T
IF50-NIG 50A 3.07 0.11 2.36 2.83
(78.0) (2.8) (60.0) (72.0)
IF65-NIG 65A 3.82 0.11 3.03 3.58
(97.0) (2.8) (77.0) (91.0)
/○ B
IF80-NIG 80A 4.33 0.11 3.54 4.09
(110.0) (2.8) (90.0) (104.0)
■Gasket
■ Fixed Pin Unit: inch (mm)
Model Type A B C D
/○ D /○ A
0.12 0.3 0.06 0.08

IF-PIN (3.0) (7.5) (1.5) (2.0)
C
B
10A∼80A
68
参考資料　PMaterial
Reference 1 は 1MPa（絶対圧）の時、空気を 1 とした比重にて計算しています。
: P1 is calculated based on the specific air as 1 under 1MPa(absolute) pressure.

Cv、差圧ガス流量特性
Cv, differential pressure Flow curve Cv 値計算式　
value calculation
注 1） formula (Note 1)
700 FCI の式　注to
According による：
2）FCI formula (Note 2) :
気体に対する式
Formula for gas
0.04
600
0.05 Qg 　　　
　Cv ＝
0.1 273
500 0.25
/ min
(In the
　( case
ΔP＜ Δ P1 ＜
of 0.5P 0.5P1))
の場合
L ／Lmin
0.27
400 0.3 　
　Cv ＝　 (In the case
　　　　( ΔP≧ Δ P1 ≧
of 0.5P 0.5P1))
の場合
Rate

　　
300 　
流量
Flow
Cv：弁容量係数
Cv : Valve Capacity Coefficient
200 Gg：標準状態の空気に対する標準状態の当該気
Gg : Air under normal conditons vs. Specific
体の比重
100
Gravity of Relevant Gas under normal
P1：弁入口圧力〔kg ／ cm2abs〕
conditions
P2：弁出口圧力〔kg ／ cm2abs〕
0
P1 : Valve Inlet Pressure [kg/cm22abs]
Δ P：弁差圧 P1 － P2〔kg ／ cm 〕
0.00 0.1 0.2 0.3 0.4 P2 : Valve Outlet Pressure3 [kg/cm2abs]
Qg：気体の体積流量〔Nm ／ h〕
差圧（MPa）
Differential Pressure (MPa) ΔP
T : Differential〔K〕
1：弁入口温度 Pressure of Valve P1 – P2 [kg/cm2]
Qg : Volume Flow of Gas [Nm3/h]
Vacuum Components
注
T11）Cv
: Valve値計算式は慣用的に用いられるため、
Inlet Temperature [K] SI
Cv、差圧ガス流量特性
Cv, differential pressure Feature of gas flow rate 単位系ではなく、旧単位系のままで示します。
3500 注 2）FCI-62 : Recommended Voluntary Standard
NoteFormulas
1) The traditional Cv-value
for Sizing Control calculation
Vaives
formula is used, therefore, the formula
3000
is indicated in old unit type but not in
0.7
0.85 SI unit type.
2500
/ min
1.7
L ／Lmin
400
Rate
1500
流量
Flow
PFA Valves
1000
500
0
0.00 0.1 0.2 0.3 0.4
差圧
Differential （MPa）(MPa)
Pressure
PFA Weld Fittings

Antistatic Unit
58 69

Ultra High Purity Fittings: Fitting

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Ultra High Purity Fittings: Fitting

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Ultra

Long Gland (S)

Female Nut (NF) Male Nut (NM)

CVC 2 1/8" Gland S Gland 1/8" 12 316 Unpolished + SUS316

Ultra High Purity Valves

Ultra High Purity Fittings

CVC Temperature and Pressure Resistance

1/8" 3.18 0.7 59 53 45 39 36

1/2" 12.7 1.24 23 21 18 15 14

CVC Gland, for use with Female Nut Type Size OD T L L1

0.125 0.028 0.480 0.276

0.250 0.039 0.598 0.250

L 0.375 0.039 0.650 0.323

0.500 0.049 0.650 0.323

CVC Gland, for use with Female Nut Type Size OD T L L1

0.125 0.028 1.079 0.750

0.250 0.039 1.098 0.750

L 0.375 0.039 1.122 0.750

0.500 0.049 1.122 0.750

CVC Gland, for use with Male Nut Type Size OD T L L1

CVC Reducing Gland, High Flow Type Type Size OD T L L1

0.375 0.039 0.610 0.421

0.375 0.039 1.130 0.941

L1 T 0.375 0.039 1.220 1.031

0.375 0.039 1.701 1.512

CVC Blind Gland Type Size OD L L1

0.125 0.866 0.276

0.250 1.098 0.750

0.500 1.791 0.750

Ultra High Purity Valves

0.125 0.028 1.098 0.628

/○ OD 0.125 0.028 1.220 0.750

0.250 0.039 1.122 0.750

Ultra High Purity Fittings

0.125 0.028 1.701 0.750

0.250 0.039 1.791 0.750

0.362 0.815 0.748

CVC Male Nut Type Size D H F 2 surface width

0.362 0.717 0.622

0.890 1.000 1.315

CVC Male Short Nut Type Size D H F 2 surface width

0.362 0.591 0.622

0.610 0.657 0.937

CVC Female Blind Nut Type Size C H F 2 surface width

0.315 0.638 0.433

0.441 0.941 0.748

C 0.449 1.012 1.063

0.528 1.276 1.500

CVC Male Blind Nut Type Size H F 2 surface width

CVC Blind Gasket Type Size T D

CVC Gasket Type Size E T D

0.091 0.020 0.250

0.669 0.031 1.134

CVC Retainer Gasket Type Size E T L D

0.240 0.031 0.118 0.488

A 0.453 0.031 0.118 0.780

CVC Male Union Type Size E L F 2surfacewidth

Ultra High Purity Valves

1/2" 0.402 1.839 0.937

Ultra High Purity Fittings

0.071 1.693 1.004 0.689 0.433 0.354 0.236

0.169 2.228 1.299 0.929 0.748 0.579 0.433